Flexible silicon wafer taking and placing mechanism

By using multi-motor load transfer module, double-layer drag chain support mechanism and flexible controlled gantry load transfer robot in the silicon wafer pick-and-drop mechanism, the problems of large size, high cost and difficult to improve production capacity are solved, and the problem of traditional equipment is realized. The reduction of equipment size, cost reduction and capacity improvement are achieved.

CN222532125UActive Publication Date: 2025-02-25GOLD STONE (FUJIAN) ENERGY CO LTD
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Patent Information

Application Number
CN202421142384.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-05-23
Publication Date
2025-02-25
Estimated Expiration
2034-05-23

AI Technical Summary

Technical Problem

Traditional silicon wafer material picking and discharge mechanisms have difficulties in increasing production capacity. The equipment is large in size and high in cost. In order to increase production capacity, the number of gantry jaws and step belts needs to be increased, resulting in an increase in the volume of equipment and affecting the flexibility and stability of the equipment.

Method used

A flexible silicon wafer material pick-up and discharge mechanism is designed, using a multi-motor load transfer module, a double-layer drag chain support mechanism and a gantry load transfer robot. The equipment width space is saved through the double-layer drag chain support mechanism, and multiple groups of flexible control are used. The gantry moving robot can stay at any position within the travel range, and adopt soft and hard limit protection methods.

Benefits of technology

Effectively reduce equipment size, reduce equipment costs, increase production capacity, reduce workshop space occupation, and achieve capacity expansion without increasing equipment space. The subsequent production improvement and transformation are also more convenient.

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    Figure CN222532125U_ABST
Patent Text Reader

Abstract

The utility model discloses a flexible silicon wafer taking and placing mechanism, which comprises a multi-mover transferring module, two groups of parallel double-layer drag chain supporting mechanisms and a gantry transferring manipulator, and the multi-mover transferring module realizes the walking precision of the gantry transferring manipulator in a gantry double-drive power form. The gantry transferring mechanical arm is installed between the two sets of double-layer drag chain supporting mechanisms, and each double-layer drag chain supporting mechanism comprises an upper-layer transferring drag chain supporting metal plate, a lower-layer transferring drag chain supporting metal plate, a fixed-end upper-layer drag chain supporting plate, a fixed-end lower-layer drag chain supporting plate and a drag chain. The fixed end upper layer drag chain supporting plate and the fixed end lower layer drag chain supporting plate are divided into a high layer and a low layer to be provided with drag chains correspondingly. The gantry transferring mechanical arm comprises a supporting lifting mechanism, an opening and closing mechanism, a clamping jaw mechanism and a middle supporting mechanism. According to the utility model, the equipment size is effectively reduced, the equipment cost is reduced, the chip capacity is improved, and the workshop space occupation is reduced.
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Description

Technical Field

[0001] The utility model relates to the field of photovoltaic equipment, in particular to a flexible silicon chip taking and placing mechanism. Background Art

[0002] With the rapid development of photovoltaics today, for photovoltaic cell production lines, improving the production capacity of the entire line equipment and reducing the equipment size and production costs have always been the constant topics in the entire history of photovoltaic development. As large-size cells are constantly needed by new markets, the overall size of the equipment is gradually increasing, and the hardware cost is also rising, and reducing the cost of cells has encountered resistance. The optimization of the production capacity of the traditional silicon wafer loading and unloading mechanism is becoming increasingly difficult, and large-size wafers have higher requirements for floor space and production capacity. The increase in production capacity needs to be compensated by continuously increasing the number of gantry grippers and stepping belts, which will affect the size of the equipment. The impact on the future optimization of silicon wafer production capacity will become more and more prominent, which is not conducive to adapting to the development of the industry market.

[0003] The mainstream silicon wafer grabbing method on the market is to use multiple sets of independent gantry grippers, each set of gantry grippers corresponds to 2-3 belts, and each is controlled in different areas. This structural control method is relatively simple, but it occupies a large space. When the number of belts is insufficient, there is a waiting time for changing the flower basket, and the flexibility is not enough. At the same time, the traditional gantry clamping method requires several different area pick-and-place modules to realize the placement of the wafer, which requires the carrier to run during transmission, increasing the transmission time. At the same time, after the carrier stops, new cumulative errors are generated and need to be repositioned, which will affect the entire carrier cycle. If you want to increase production capacity in the future, you need to increase the transmission speed or add new area grabbing modules to achieve this, which will increase the length of the equipment.

[0004] Therefore, designing a silicon wafer loading and unloading mechanism that can effectively reduce the equipment size and reduce the equipment cost, while increasing the wafer production capacity and reducing the space occupied in the workshop is of great significance to the future development of the industry and has good application prospects. Utility Model Content

[0005] In view of the above problems, the utility model provides a flexible silicon wafer loading and unloading mechanism which can effectively reduce the size of the equipment and reduce the equipment cost, while increasing the wafer production capacity and reducing the space occupied by the workshop.

[0006] In order to solve the above technical problems, the technical solution adopted by the utility model is: a flexible silicon wafer loading and unloading mechanism, including a multi-motor transfer module, two sets of parallel double-layer drag chain support mechanisms, and a gantry transfer robot. The multi-motor transfer module realizes the walking accuracy of the gantry transfer robot through the power form of the gantry double drive. The gantry transfer robot is installed between the two sets of double-layer drag chain support mechanisms. The gantry transfer robot is controlled by multiple sets of flexibility, so that each gantry transfer robot stays at any position in the entire travel range. The double-layer drag chain support mechanism includes an upper transfer drag chain supporting sheet metal, a lower transfer drag chain supporting sheet metal, and a lower transfer drag chain supporting sheet metal. Chain support sheet metal, fixed end upper drag chain support plate, fixed end lower drag chain support plate and drag chain, the upper transfer drag chain support sheet metal and the lower transfer drag chain support sheet metal are respectively fixedly connected to their own gantry transfer manipulators, and the drag chains are moved on their own layers driven by the gantry transfer manipulator. The fixed end upper drag chain support plate and the fixed end lower drag chain support plate are divided into two layers of high and low layers and the drag chains are respectively arranged. The gantry transfer manipulator includes a support lifting mechanism, an opening and closing mechanism, a clamping mechanism and a centering mechanism. The support lifting mechanism is arranged on both ends and is respectively installed on the double-layer drag chain support mechanism. The opening and closing mechanism drives the clamping mechanism to open and close.

[0007] Furthermore, the gantry transfer robot adopts two protection modes: soft limit and hard limit.

[0008] Furthermore, the opening and closing mechanism includes a reduction motor, a slider mechanism, a cam, and a tension spring. The reduction motor drives the cam to rotate, thereby driving the clamping claw mechanism connected to the slide rail slider mechanism to open or close.

[0009] Furthermore, the centering mechanism is driven by a cylinder to push the slider mounting plate to move, thereby moving the connecting rod connecting block, thereby driving the connecting rod and pin, the centering rod, and the limit block to form a multi-link mechanism to swing.

[0010] From the above description of the structure of the utility model, it can be seen that compared with the prior art, the utility model has the following advantages:

[0011] This utility model adopts a double-layer drag chain support mechanism design, and different drag chains are placed on the high and low layers to save the width space of the equipment. The support mechanism can support the long film direction, reduce the amount of film under the film, and improve stability. While effectively reducing the equipment size and reducing the equipment cost, it increases the film production capacity and reduces the space occupied in the workshop. At the same time, the expansion of production capacity can be achieved by adding linear movers or gear rack movers without increasing the equipment space, and the subsequent production improvement and transformation are also more convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The drawings constituting a part of this application are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0013] Figure 1 It is an axial side view of the overall structure of the utility model;

[0014] Figure 2 This is a front view of the double-layer drag chain support mechanism structure of the utility model;

[0015] Figure 3 This is a side view of the gantry transfer manipulator structure of the utility model;

[0016] Figure 4 This is a structural axial view of the opening and closing mechanism of the utility model;

[0017] Figure 5 It is an axial side view of the supporting mechanism structure of the utility model. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0019] Example

[0020] refer to Figure 1-Figure 5A flexible silicon wafer loading and unloading mechanism comprises a multi-moving transfer module 10, two sets of parallel double-layer drag chain support mechanisms 20, and a gantry transfer robot 30. The multi-moving transfer module 10 realizes the walking accuracy of the gantry transfer robot 30 through the power form of the gantry dual drive. The gantry transfer robot 30 is installed between the two sets of double-layer drag chain support mechanisms 20. The gantry transfer robot 30 uses multiple sets of flexible controls to enable each gantry transfer robot 30 to stay at any position in the entire travel range. The gantry transfer robot 30 adopts two protection modes, soft limit and hard limit. The double-layer drag chain support mechanism 20 comprises an upper transfer drag chain support sheet metal 201, a lower transfer drag chain support sheet metal 202, a fixed end upper drag chain support plate 203, and a fixed end The lower layer drag chain support plate 204 and the drag chain 205, the upper layer transfer drag chain support sheet metal 201 and the lower layer transfer drag chain support sheet metal 202 are respectively fixedly connected to their respective gantry transfer manipulators 30, and the drag chains are moved on their respective layers as the gantry transfer manipulator 30 drives them. The fixed end upper layer drag chain support plate 203 and the fixed end lower layer drag chain support plate 204 are divided into two layers, high and low, and drag chains 205 are respectively arranged. Different drag chains are placed on the high and low layers to save equipment width space. The gantry transfer manipulator 30 includes a support lifting mechanism 310, an opening and closing mechanism 320, a clamping mechanism 330 and a centering mechanism 340. The support lifting mechanism 310 is arranged at both ends and is respectively installed on the double-layer drag chain support mechanism 20. The opening and closing mechanism 320 drives the clamping mechanism 330 to open and close.

[0021] The opening and closing mechanism 320 includes a reduction motor 321, a slider mechanism 322, a cam 323, and a tension spring 324. The reduction motor 321 drives the cam 323 to rotate, thereby driving the clamping mechanism 330 connected to the slide rail slider mechanism 322 to open or close.

[0022] The centering mechanism 340 is driven by the cylinder 345 to push the slider mounting plate 347 to move, thereby moving the connecting rod connecting block 346, thereby driving the connecting rod 341 and the pin 342, the centering rod 343, and the limit block 344 to form a multi-link mechanism to swing, which can support the direction of the long film, reduce the amount of film under the tension, and improve stability.

[0023] The utility model can effectively reduce the equipment size and reduce the equipment cost, while increasing the sheet production capacity and reducing the space occupied by the workshop. At the same time, the capacity expansion can be achieved by adding linear movers or gear rack movers without increasing the equipment space, and the subsequent production improvement and transformation is also more convenient.

[0024] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A flexible silicon wafer loading and unloading mechanism, characterized in that: The invention comprises a multi-moving transfer module (10), two sets of double-layer drag chain support mechanisms (20) arranged in parallel, and a gantry transfer manipulator (30). The multi-moving transfer module (10) realizes the walking accuracy of the gantry transfer manipulator (30) through the power form of gantry double drive. The gantry transfer manipulator (30) is installed between the two sets of double-layer drag chain support mechanisms (20). The gantry transfer manipulator (30) is controlled by multiple sets of flexible controls so that each gantry transfer manipulator (30) can stay at any position in the entire travel range. The double-layer drag chain support mechanism (20) comprises an upper transfer drag chain support sheet metal (201), a lower transfer drag chain support sheet metal (202), a fixed end upper drag chain support plate (203), a fixed end lower drag chain support plate (204), and a drag chain support plate (205). The upper layer transfer drag chain support sheet metal (201) and the lower layer transfer drag chain support sheet metal (202) are respectively fixedly connected to their respective gantry transfer manipulators (30), and the drag chains are moved on their respective layers as the gantry transfer manipulator (30). The fixed end upper layer drag chain support plate (203) and the fixed end lower layer drag chain support plate (204) are divided into two layers, high and low, and the drag chains (205) are respectively arranged. The gantry transfer manipulator (30) includes a support lifting mechanism (310), an opening and closing mechanism (320), a clamping mechanism (330) and a centering mechanism (340). The support lifting mechanism (310) is arranged at both ends and is respectively installed on the double-layer drag chain support mechanism (20). The opening and closing mechanism (320) drives the clamping mechanism (330) to open and close.

2. The flexible silicon wafer loading and unloading mechanism according to claim 1, characterized in that: The gantry transfer robot (30) adopts two protection modes: soft limit and hard limit.

3. The flexible silicon wafer loading and unloading mechanism according to claim 1, characterized in that: The opening and closing mechanism (320) comprises a reduction motor (321), a slider mechanism (322), a cam (323), and a tension spring (324); the reduction motor (321) drives the cam (323) to rotate, thereby driving the clamping claw mechanism (330) connected to the slide rail slider mechanism (322) to open or close.

4. The flexible silicon wafer loading and unloading mechanism according to claim 1, characterized in that: The centering mechanism (340) is driven by a cylinder (345) to push a slider mounting plate (347) to move, thereby causing a connecting rod connecting block (346) to move, thereby driving a connecting rod (341) and a pin (342), a centering rod (343), and a limit block (344) to form a multi-link mechanism to swing.