Crystal growth workshop cooling system

Abstract

The embodiment of the utility model provides a crystal growth workshop cooling system, and relates to the technical field of semiconductor equipment. The crystal growth workshop cooling system comprises a circulation pipeline, a quartz branch pipe and a transfer device. A first water tank, a second water tank and a first pump are sequentially arranged on the circulating pipeline, the circulating pipeline comprises a water outlet pipe, a connecting branch pipe, a water inlet pipe and a first connecting pipe, the water outlet pipe is connected with the first water tank, and the water inlet pipe is connected with the second water tank; the transfer device is provided with a second connecting pipe and a third connecting pipe, the end, away from the transfer device, of the second connecting pipe is connected with the other end of the quartz branch pipe, and the end, away from the transfer device, of the third connecting pipe is connected with the second water tank. The transfer device is used for reducing the return water pressure of the quartz branch pipe. Therefore, the quartz branch pipe is prevented from being broken.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a cooling system for a crystal growth workshop. Background Art

[0002] Silicon carbide (SiC), as an emerging third-generation semiconductor core material, has excellent properties such as wide bandgap, high critical breakdown electric field strength, high electron mobility, good radiation resistance and chemical stability, which makes it an important substrate wafer material with wide applications. It has shown good application prospects in the fields of aviation devices, new energy vehicles, rail transportation and household appliances. During the crystal growth process, a cooling water system is generally required to cool the crystal growth furnace.

[0003] The inventors have found through research that there are quartz branches in the circulation pipeline of the cooling water system of the crystal growth furnace workshop. The return water pressure in the quartz branches in some existing cooling water systems of the crystal growth furnace workshops is too high, which may cause the quartz branches to rupture. Utility Model Content

[0004] The utility model aims to provide a cooling system for a crystal growth workshop, which can reduce the return water pressure in a quartz branch pipe, thereby avoiding the occurrence of quartz branch pipe rupture.

[0005] The embodiment of the utility model is achieved as follows:

[0006] In a first aspect, the utility model provides a cooling system for a crystal growth workshop, comprising:

[0007] A circulation pipeline, wherein a first water tank, a second water tank and a first pump are sequentially arranged on the circulation pipeline, and the circulation pipeline comprises a water outlet pipe, a connecting branch pipe, a water inlet pipe and a first connecting pipe, wherein the water outlet pipe is connected to the first water tank, the water inlet pipe is connected to the second water tank, the two ends of the connecting branch pipe are respectively connected to the water outlet pipe and the water inlet pipe, the two ends of the first connecting pipe are respectively connected to the first water tank and the second water tank, and the first pump is arranged on the first connecting pipe, and the first pump is used to pump water in the first water tank back to the first water tank through the water outlet pipe and the second water tank;

[0008] A quartz branch pipe, one end of which is connected to the water outlet pipe;

[0009] The transfer device is provided with a second connecting pipe and a third connecting pipe. The end of the second connecting pipe away from the transfer device is connected to the other end of the quartz branch pipe, and the end of the third connecting pipe away from the transfer device is connected to the second water tank. The transfer device is used to reduce the return water pressure of the quartz branch pipe.

[0010] In an optional embodiment, the transfer device includes a third water tank, the third water tank is connected to the end of the quartz branch pipe away from the water outlet pipe through a second connecting pipe, and the third water tank is connected to the second water tank through a third connecting pipe.

[0011] In an optional embodiment, the transfer device further includes a second pump, and the second pump is disposed in the third connecting pipe.

[0012] In an optional embodiment, the maximum height of the second connecting tube is equal to or less than the minimum height of the quartz branch tube.

[0013] In an optional embodiment, the third water tank is further provided with a first valve and a second valve, the first valve is connected to the second connecting pipe, and the second valve is connected to the third connecting pipe.

[0014] In an optional embodiment, the cooling system of the crystal growth workshop further includes a pressure sensor, and at least one of the water outlet pipe, the water inlet pipe, the first connecting pipe, the second connecting pipe and the third connecting pipe is provided with a pressure sensor.

[0015] In an optional embodiment, the cooling system of the crystal growth workshop further includes a refrigeration device, the first connecting pipe is connected to the first water tank through the refrigeration device, and the refrigeration device is used for exchanging heat with the coolant passing through the first connecting pipe.

[0016] In an optional embodiment, the quartz branch tube includes a first quartz tube and a second quartz tube, the first quartz tube is sleeved in the second quartz tube, a cooling channel for coolant to flow is provided between the inner wall of the first quartz tube and the outer wall of the second quartz tube, the water outlet pipe is connected to one end of the cooling channel, and the second connecting pipe is connected to the other end of the cooling channel.

[0017] In an optional embodiment, the first water tank is provided with a third valve and a fourth valve, the third valve is connected to the end of the water outlet pipe away from the second water tank, and the fourth valve is connected to the first connecting pipe; and / or the second water tank is provided with a fifth valve and a sixth valve, the fifth valve is connected to the water inlet pipe, and the sixth valve is connected to the end of the first connecting pipe away from the first water tank.

[0018] In an optional embodiment, at least one of the first water tank, the second water tank and the third water tank is provided with a liquid level sensor.

[0019] The beneficial effects of the embodiment of the utility model are as follows: the embodiment of the utility model provides a cooling system for a crystal growth workshop including a circulation pipeline, a quartz branch pipe and a transfer device. The circulation pipeline is sequentially provided with a first water tank, a second water tank and a first pump, the circulation pipeline includes a water outlet pipe, a connecting branch pipe, a water inlet pipe and a first connecting pipe, the water outlet pipe is connected to the first water tank, the water inlet pipe is connected to the second water tank, the two ends of the connecting branch pipe are respectively connected to the water outlet pipe and the water inlet pipe, the two ends of the first connecting pipe are respectively connected to the first water tank and the second water tank, the first pump is arranged on the first connecting pipe, and the first pump is used to pump the water in the first water tank back to the first water tank through the water outlet pipe and the second water tank. One end of the quartz branch pipe is connected to the water outlet pipe. The transfer device is provided with a second connecting pipe and a third connecting pipe, and the end of the second connecting pipe away from the transfer device is connected to the other end of the quartz branch pipe, that is, the end of the second connecting pipe away from the transfer device is connected to the end of the quartz branch pipe away from the water outlet pipe. One end of the third connecting pipe away from the transfer device is connected to the second water tank, and the transfer device is used to reduce the return water pressure of the quartz branch pipe, so as to avoid the quartz branch pipe from breaking. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 A schematic diagram of a cooling system for a crystal growth workshop provided in an embodiment of the utility model.

[0022] Icons: 1- cooling system of crystal growth workshop; 100- circulation pipeline; 110- water outlet pipe; 120- water inlet pipe; 130- first connecting pipe; 140- connecting branch pipe; 200- first water tank; 300- second water tank; 400- first pump; 500- quartz branch pipe; 610- third water tank; 620- second connecting pipe; 630- third connecting pipe; 640- second pump; 700- refrigeration device. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0026] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0027] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0028] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0029] The specific structure of a cooling system 1 for a crystal growth workshop provided by an embodiment of the utility model and the corresponding technical effects thereof are described in detail below in conjunction with the patent drawings.

[0030] Please refer to Figure 1 The cooling system 1 for a crystal growth workshop provided by an embodiment of the utility model includes a circulation pipeline 100, a quartz branch pipe 500 and a transfer device.

[0031] A first water tank 200, a second water tank 300 and a first pump 400 are sequentially arranged on the circulation pipeline 100. The circulation pipeline 100 includes a water outlet pipe 110, a connecting branch pipe 140, a water inlet pipe 120 and a first connecting pipe 130. The water outlet pipe 110 is connected to the first water tank 200, the water inlet pipe 120 is connected to the second water tank 300, both ends of the connecting branch pipe 140 are respectively connected to the water outlet pipe 110 and the water inlet pipe 120, both ends of the first connecting pipe 130 are respectively connected to the first water tank 200 and the second water tank 300, and the first pump 400 is arranged on the first connecting pipe 130. The first pump 400 is used to pump the water in the first water tank 200 back to the first water tank 200 through the water outlet pipe 110 and the second water tank 300.

[0032] It can be understood that the above-mentioned first water tank 200 can be understood as an inlet water tank, which is used to store coolant and supply cooling water to the entire circulation pipeline 100. The second water tank 300 can be understood as a return water tank, which collects the circulated coolant and can pump the coolant in the return water tank back to the first water tank 200 through the first connecting pipe 130 through the first pump 400 to complete the circulation of the coolant.

[0033] One end of the quartz branch pipe 500 is connected to the water outlet pipe 110. The transfer device is provided with a second connecting pipe 620 and a third connecting pipe 630. The end of the second connecting pipe 620 away from the transfer device is connected to the other end of the quartz branch pipe 500, that is, the end of the second connecting pipe 620 away from the transfer device is connected to the end of the quartz branch pipe 500 away from the water outlet pipe 110. The end of the third connecting pipe 630 away from the transfer device is connected to the second water tank 300. The transfer device is used to reduce the return water pressure of the quartz branch pipe 500.

[0034] The first branch tube and the quartz branch tube 500 are used to contact some equipment in the crystal growth workshop, that is, the coolant in the first branch tube and the quartz branch tube 500 is used to cool down some equipment in the crystal growth workshop.

[0035] It should be noted that in some existing circulation systems, the two ends of the quartz branch pipe 500 are respectively connected to the water outlet pipe 110 and the water inlet pipe 120. In this embodiment, the end of the quartz branch pipe 500 away from the water outlet pipe 110 is connected to the transfer device through the second connecting pipe 620 to reduce the return water pressure of the quartz branch pipe 500, thereby avoiding the quartz branch pipe 500 from breaking.

[0036] It should be noted that, in this embodiment, the quartz branch tube 500 includes a first quartz tube and a second quartz tube (not shown in the figure), the first quartz tube is sleeved in the second quartz tube, and a cooling channel for the flow of coolant is provided between the inner wall of the first quartz tube and the outer wall of the second quartz tube, the water outlet pipe 110 is connected to one end of the cooling channel, and the second connecting pipe 620 is connected to the other end of the cooling channel, wherein the second quartz tube is part of the induction furnace in the crystal growth workshop, and the induction furnace is cooled through the cooling channel.

[0037] In some existing circulation systems, the return water pressure in the interlayer of the quartz branch pipe 500 is too high, which can easily cause the quartz pipe to rupture. In this embodiment, the end of the cooling channel in the quartz branch pipe 500 away from the water outlet pipe 110 is connected to the transfer device through the second connecting pipe 620 to reduce the return water pressure of the quartz branch pipe 500, thereby avoiding the quartz branch pipe 500 from rupturing.

[0038] In detail, in the present embodiment, the transfer device is the third water tank 610. It can be understood that the third water tank 610 can be understood as a transfer water tank. Through the setting of the transfer water tank, a return water buffer zone can be provided for the quartz branch pipe 500 through the transfer water tank, thereby reducing the return water pressure of the quartz branch pipe 500.

[0039] In this embodiment, the transfer device also includes a second pump 640, which is arranged on the third connecting pipe 630. It can be understood that the second pump 640 is used to pump the coolant in the cooling channel to the second water tank 300 through the second connecting pipe 620, the third water tank 610 and the third connecting pipe 630 in sequence.

[0040] In this embodiment, the cooling system 1 of the crystal growth workshop also includes a refrigeration device 700. The first connecting pipe 130 is connected to the first water tank 200 through the refrigeration device 700. The refrigeration device 700 is used to exchange heat with the coolant passing through the first connecting pipe 130. That is to say, after the coolant passes through the connecting branch pipe 140 and the quartz branch pipe 500 to exchange heat with the equipment in the crystal growth workshop, the temperature of the coolant returning to the second water tank 300 increases. After passing through the refrigeration device 700, the refrigeration device 700 can cool down the coolant flowing from the second water tank 300 through the first water tank 200, so that the coolant flowing out of the first water tank 200 can cool down the equipment in the crystal growth workshop again.

[0041] In some embodiments, two temperature sensors are further provided on the first connecting pipe 130, and the two temperature sensors are respectively provided on both sides of the refrigeration device 700, that is, the two temperature sensors respectively detect the temperature of the coolant that exchanges heat with the refrigeration device 700 and the temperature of the coolant after heat exchange with the refrigeration device 700.

[0042] Optionally, in some embodiments, the maximum height of the second connecting tube 620 is equal to or less than the minimum height of the quartz branch tube 500 , so that the coolant in the cooling channel in the quartz branch tube 500 can flow into the second connecting tube 620 better.

[0043] Optionally, the cooling system 1 of the crystal growth workshop further includes a pressure sensor, and at least one of the water outlet pipe 110, the water inlet pipe 120, the first connecting pipe 130, the second connecting pipe 620, and the third connecting pipe 630 is provided with a pressure sensor. In some embodiments, the water outlet pipe 110, the water inlet pipe 120, the first connecting pipe 130, the second connecting pipe 620, and the third connecting pipe 630 are all provided with pressure sensors, so as to facilitate timely sensing of the pressure in the water outlet pipe 110, the water inlet pipe 120, the first connecting pipe 130, the second connecting pipe 620, and the third connecting pipe 630.

[0044] Optionally, the third water tank 610 is also provided with a first valve (not shown in the figure) and a second valve (not shown in the figure), the first valve is connected to the first connecting pipe 130, and the second valve is connected to the third connecting pipe 630. That is to say, the first valve and the second valve can facilitate the user to control the connectivity between the third water tank 610 and the second connecting pipe 620 and the third connecting pipe 630.

[0045] Optionally, the first water tank 200 is provided with a third valve (not shown in the figure) and a fourth valve (not shown in the figure), the third valve is connected to the end of the water outlet pipe 110 away from the second water tank 300, and the fourth valve is connected to the first connecting pipe 130, and the connectivity between the first water tank 200 and the first connecting pipe 130 and the water outlet pipe 110 is controlled by the third valve and the fourth valve.

[0046] Optionally, the second water tank 300 is provided with a fifth valve (not shown in the figure) and a sixth valve (not shown in the figure), the fifth valve is connected to the water inlet pipe 120, and the sixth valve is connected to the end of the first connecting pipe 130 away from the first water tank 200. Similarly, the communication between the second water tank 300 and the first connecting pipe 130 and the water inlet pipe 120 can be controlled by the fifth valve and the sixth valve.

[0047] Of course, in some embodiments, the second water tank 300 is also provided with a seventh valve (not shown in the figure), and the seventh valve is connected to the third connecting pipe 630, and the second water tank 300 and the third connecting pipe 630 can be controlled by the seventh valve.

[0048] Optionally, at least one of the first water tank 200, the second water tank 300 and the third water tank 610 is provided with a liquid level sensor. In some embodiments, the first water tank 200, the second water tank 300 and the third water tank 610 are all provided with a liquid level sensor to facilitate detection of the liquid level in the first water tank 200, the second water tank 300 and the third water tank 610.

[0049] In summary, the embodiment of the utility model provides a cooling system 1 for a crystal growth workshop, including a circulation pipeline 100, a quartz branch pipe 500 and a transfer device. The circulation pipeline 100 is sequentially provided with a first water tank 200, a second water tank 300 and a first pump 400, the circulation pipeline 100 includes a water outlet pipe 110, a connecting branch pipe 140, a water inlet pipe 120 and a first connecting pipe 130, the water outlet pipe 110 is connected to the first water tank 200, the water inlet pipe 120 is connected to the second water tank 300, the two ends of the connecting branch pipe 140 are respectively connected to the water outlet pipe 110 and the water inlet pipe 120, the two ends of the first connecting pipe 130 are respectively connected to the first water tank 200 and the second water tank 300, the first pump 400 is arranged on the first connecting pipe 130, and the first pump 400 is used to pump the water in the first water tank 200 back to the first water tank 200 through the water outlet pipe 110 and the second water tank 300. One end of the quartz branch pipe 500 is connected to the water outlet pipe 110. The transfer device is provided with a second connecting pipe 620 and a third connecting pipe 630. One end of the second connecting pipe 620 away from the transfer device is connected to the other end of the quartz branch pipe 500, that is, one end of the second connecting pipe 620 away from the transfer device is connected to one end of the quartz branch pipe 500 away from the water outlet pipe 110. One end of the third connecting pipe 630 away from the transfer device is connected to the second water tank 300. The transfer device is used to reduce the return water pressure of the quartz branch pipe 500. This prevents the quartz branch pipe 500 from breaking.

[0050] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may be subject to various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A cooling system for a crystal growth workshop, characterized in that: include: A circulation pipeline (100), wherein a first water tank (200), a second water tank (300) and a first pump (400) are sequentially arranged on the circulation pipeline (100), wherein the circulation pipeline (100) comprises a water outlet pipe (110), a connecting branch pipe (140), a water inlet pipe (120) and a first connecting pipe (130), wherein the water outlet pipe (110) is connected to the first water tank (200), the water inlet pipe (120) is connected to the second water tank (300), and the connecting branch pipe (140) is connected to the second water tank (300). The two ends of the first connecting pipe (140) are respectively connected to the water outlet pipe (110) and the water inlet pipe (120), the two ends of the first connecting pipe (130) are respectively connected to the first water tank (200) and the second water tank (300), the first pump (400) is arranged on the first connecting pipe (130), and the first pump (400) is used to pump water in the first water tank (200) back to the first water tank (200) through the water outlet pipe (110) and the second water tank (300); A quartz branch pipe (500), one end of which is connected to the water outlet pipe (110); A transfer device, wherein the transfer device is provided with a second connecting pipe (620) and a third connecting pipe (800), wherein one end of the second connecting pipe (620) away from the transfer device is connected to the other end of the quartz branch pipe (500), and one end of the third connecting pipe (800) away from the transfer device is connected to the second water tank (300), and the transfer device is used to reduce the return water pressure of the quartz branch pipe (500).

2. The cooling system for a crystal growth workshop according to claim 1, characterized in that: The transfer device comprises a third water tank (600), wherein the third water tank (600) is connected to an end of the quartz branch pipe (500) away from the water outlet pipe (110) via the second connecting pipe (620), and the third water tank (600) is connected to the second water tank (300) via a third connecting pipe (800).

3. The cooling system for a crystal growth workshop according to claim 2, characterized in that: The transfer device further comprises a second pump (640), and the second pump (640) is arranged on the third connecting pipe (800).

4. The cooling system for a crystal growth workshop according to claim 2, characterized in that: The maximum height of the second connecting tube (620) is equal to or less than the minimum height of the quartz branch tube (500).

5. The cooling system for a crystal growth workshop according to claim 2, characterized in that: The third water tank (600) is further provided with a first valve and a second valve, wherein the first valve is connected to the second connecting pipe (620), and the second valve is connected to the third connecting pipe (800).

6. The cooling system for a crystal growth workshop according to claim 2, characterized in that: The crystal growth workshop cooling system also includes a pressure sensor, and at least one of the water outlet pipe (110), the water inlet pipe (120), the first connecting pipe (130), the second connecting pipe (620) and the third connecting pipe (800) is provided with a pressure sensor.

7. The cooling system for a crystal growth workshop according to claim 1, characterized in that: The cooling system of the crystal growth workshop further comprises a refrigeration device (700), the first connecting pipe (130) is connected to the first water tank (200) via the refrigeration device (700), and the refrigeration device (700) is used for exchanging heat with the cooling liquid passing through the first connecting pipe (130).

8. The cooling system for a crystal growth workshop according to claim 1, characterized in that: The quartz branch tube (500) comprises a first quartz tube and a second quartz tube, the first quartz tube is sleeved in the second quartz tube, a cooling channel for coolant to flow is provided between the inner wall of the first quartz tube and the outer wall of the second quartz tube, the water outlet pipe (110) is connected to one end of the cooling channel, and the second connecting pipe (620) is connected to the other end of the cooling channel.

9. The cooling system for a crystal growth workshop according to claim 1, characterized in that: The first water tank (200) is provided with a third valve and a fourth valve, the third valve is connected to an end of the water outlet pipe (110) away from the second water tank (300), and the fourth valve is connected to the first connecting pipe (130); and / or the second water tank (300) is provided with a fifth valve and a sixth valve, the fifth valve is connected to the water inlet pipe (120), and the sixth valve is connected to an end of the first connecting pipe (130) away from the first water tank (200).

10. The cooling system for a crystal growth workshop according to claim 2, characterized in that: At least one of the first water tank (200), the second water tank (300) and the third water tank (600) is provided with a liquid level sensor.

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