Vacuum high-low temperature water-cooling heat insulation device
By designing a water-cooled baffle in a vacuum equipment and using the structure of condensed copper tubes and oblique copper sheets, the problem of excessive temperature caused by thermal radiation of the condensation pump is solved, efficient vacuum insulation is achieved, and the service life and operation safety of the equipment are improved.
Patent Information
- Application Number
- CN202420574664.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-25
- Publication Date
- 2025-03-04
- Estimated Expiration
- 2034-03-25
AI Technical Summary
In traditional vacuum equipment, the temperature of the condensation pump is too high due to thermal radiation and cannot work normally. The super cold trap increases flow conduction loss, affecting the vacuum efficiency.
A vacuum high and low temperature water-cooling insulation device is designed. By setting up a water-cooled baffle, a structure composed of condensed copper tubes and oblique copper sheets is effectively shielded from heat radiation and reduced flow conduction losses.
It effectively reduces the thermal radiation of the condensing pump, ensures its normal operation, improves the vacuum efficiency, and is safe and efficient in operation, with a flow conduction loss of less than 10%.
Smart Images
Figure CN222557039U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of vacuum high and low temperature water cooling and heat insulation, in particular to a vacuum high and low temperature water cooling and heat insulation device. Background Art
[0002] The working principle of magnetron sputtering equipment is that electrons collide with argon atoms in the process of flying to the substrate under the action of the electric field E, ionizing them to produce Ar positive ions and new electrons; the new electrons fly to the substrate, and the Ar ions are accelerated to fly to the cathode target under the action of the electric field, and bombard the target surface with high energy, causing the target material to sputter. Among the sputtered particles, neutral target atoms or molecules are deposited on the substrate to form a thin film. When the magnetron sputtering machine is working in the cavity, the temperature rises to about 400°C, and the substrate temperature is nearly 300°C. Such a high temperature radiates the 80K blades of the condensation pump, causing the condensation pump temperature to be too high and increase the heat load, thus causing it to fail to work normally. The traditional general solution is to install a super cold trap to shield thermal radiation, but the super cold trap will increase the conductance loss by up to 40%, affecting the vacuum efficiency. In particular, if the operation is improper, such as not opening the cooling water valve, the temperature of the condensation pump is extremely low when it is working, which will cause the water in the super cold trap to cool and freeze and burst the copper pipe.
[0003] Therefore, it is necessary to provide a vacuum high and low temperature water-cooled insulation device that can reduce heat radiation, extend the service life of the condensing pump, and operate safely and efficiently. Utility Model Content
[0004] The purpose of the utility model is to provide a vacuum high and low temperature water cooling and heat insulation device to solve the problems raised in the above background technology.
[0005] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions: a vacuum high and low temperature water cooling and heat insulation device, comprising:
[0006] A frame body, wherein a liquid return pipeline is arranged on the left side of the frame body, a one-way liquid inlet pipeline is arranged on the right side of the frame body, a condensation copper tube is arranged inside the frame body; and a fixed bracket is arranged outside the frame body.
[0007] Preferably, the lower end of the liquid return pipeline is sealed by welding.
[0008] Preferably, a one-way valve is provided at the lower end of the one-way liquid inlet pipeline.
[0009] Preferably, the water-cooling baffle is composed of a condensing copper tube and beveled copper leaves.
[0010] Preferably, the condensing copper tube is composed of a plurality of copper tubes arranged side by side, and the beveled copper sheet is composed of a plurality of copper plates arranged side by side.
[0011] Preferably, the interval between the copper tubes or copper plates is 30 to 100 mm, and the inclination angle of each copper tube or copper plate is 20 to 40 degrees.
[0012] The utility model has at least the following beneficial effects:
[0013] The utility model provides a vacuum high and low temperature water-cooled heat-insulating device, which effectively shields the heat radiation to the condensation pump by arranging a water-cooling baffle, thereby ensuring the normal operation of the condensation pump, guaranteeing the vacuuming efficiency, and ensuring safe and efficient operation. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 It is a schematic diagram of the structure of the utility model;
[0015] Figure 2 This is a schematic diagram of the front view structure of the utility model;
[0016] Figure 3 This is a rear view structural diagram of the utility model;
[0017] Figure 4 This is a left-side structural schematic diagram of the utility model;
[0018] Figure 5 It is a right side structural schematic diagram of the utility model.
[0019] In the figure: 1. Liquid return pipeline; 2. One-way liquid inlet pipeline; 3. Condensation copper tube; 4. Fixed bracket; 5. Beveled copper leaf; 6. Frame body. DETAILED DESCRIPTION
[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0021] See also Figure 1-5 The utility model provides a technical solution: a vacuum high and low temperature water cooling and heat insulation device, comprising:
[0022] The frame body 6 has a liquid return pipeline 1 on the left side thereof, a one-way liquid inlet pipeline 2 on the right side thereof, a condensation copper tube 3 inside the frame body 6 ; and a fixing bracket 4 outside the frame body 6 .
[0023] The lower end of the liquid return pipeline 1 is sealed by welding to prevent liquid from leaking out of the liquid return pipeline 1.
[0024] A one-way valve is provided at the lower end of the one-way liquid inlet pipeline 2 to prevent liquid backflow in the one-way liquid inlet pipeline 2.
[0025] The water-cooled baffle is composed of a condensing copper tube 3 and an angled copper sheet 5. The condensing copper tube 3 is composed of a plurality of copper tubes arranged side by side, and the angled copper sheet 5 is composed of a plurality of copper plates arranged side by side. The interval between the copper tubes or copper plates is 30 to 100 mm, and the inclination angle of each copper tube or copper plate is 20 to 40 degrees, which can reduce heat radiation. The condensing copper tube 3 and the angled copper sheet 5 themselves are affected by heat radiation and will not cause the copper tube to bulge and crack. The conductance loss is small and can be less than 10%.
[0026] The cooling liquid flows to the return liquid pipeline 1 through the one-way liquid inlet pipeline 2, which is supported by the frame body 6. The required equipment and the condensation pump that needs to be isolated from the temperature of the front pole are connected by a fixed bracket 4. The condensation copper tube 3 and the beveled copper sheet 5 are welded in the frame body 6. The condensation copper tube 3 and the beveled copper sheet 5 are composed of multiple copper tubes or copper plates arranged side by side. The interval between the copper tubes or copper plates is 30 to 100 mm, preferably 60 mm. The inclination angle of each copper tube or copper plate is 20 to 40 degrees, preferably 30 degrees. The material of the condensation copper tube 3 and the beveled copper sheet 5 is preferably copper, which can reduce heat radiation. The condensation copper tube 3 and the beveled copper sheet 5 themselves are affected by heat radiation and will not cause the copper tube to rupture. The flow conductance loss is small and can be less than 10%.
[0027] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.
[0028] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A vacuum high and low temperature water cooling and heat insulation device, comprising a frame body (6), characterized in that: A liquid return pipeline (1) is arranged on the left side of the frame body (6), a one-way liquid inlet pipeline (2) is arranged on the right side of the frame body (6), a water cooling baffle is arranged inside the frame body (6), and a fixed bracket (4) is arranged outside the frame body (6).
2. A vacuum high and low temperature water cooling and heat insulation device according to claim 1, characterized in that: The lower end of the liquid return pipeline (1) is sealed by welding.
3. A vacuum high and low temperature water cooling and heat insulation device according to claim 1, characterized in that: A one-way valve is provided at the lower end of the one-way liquid inlet pipeline (2).
4. A vacuum high and low temperature water cooling and heat insulation device according to claim 1, characterized in that: The water-cooling baffle is composed of a condensing copper tube (3) and an angled copper sheet (5).
5. A vacuum high and low temperature water cooling and heat insulation device according to claim 4, characterized in that: The condensing copper tube (3) is composed of a plurality of copper tubes arranged side by side, and the beveled copper sheet (5) is composed of a plurality of copper plates arranged side by side.
6. A vacuum high and low temperature water cooling and heat insulation device according to claim 5, characterized in that: The interval between the copper tubes or copper plates is 30-100 mm, and the inclination angle of each copper tube or copper plate is 20-40 degrees.