Boat temporary storage device and purification table

Abstract

The utility model discloses a boat temporary storage device and a purification table, the boat temporary storage device comprises a boat temporary storage frame, a plurality of preheating temporary storage positions and a plurality of cooling temporary storage positions are arranged in the boat temporary storage frame at intervals, the preheating temporary storage positions are all arranged above the cooling temporary storage positions, and the cooling temporary storage positions are used for placing processed hot boat bodies; the preheating cache position is used for placing an unprocessed cold boat body; the cooling buffer position is provided with a first cooling mechanism, the first cooling mechanism comprises a first fan assembly and a first cooling pipe assembly, the first cooling pipe assembly is suitable for being arranged at the bottom of the hot boat body in the cooling buffer position, and the first cooling pipe assembly is used for circulating a cooling medium to cool the hot boat body; the first fan assembly is arranged on the side, in the first direction, of the cooling buffer storage positions, the first direction is perpendicular to the arrangement direction of the multiple cooling buffer storage positions, and the first fan assembly is used for dissipating heat of the hot boat body. And through cooperation of the first cooling pipe assembly and the first fan assembly, the cooling efficiency and the cooling effect of the hot boat body can be improved.

Description

Technical Field

[0001] The present application belongs to the field of film coating technology, and specifically relates to a boat buffer device and a clean bench. Background Art

[0002] Graphite boat is a carrier tool for coating operation using Plasma Enhanced Chemical Vapor Deposition (PECVD) process. The graphite boat can carry silicon wafers that have been processed by processes such as texturing and diffusion into the PECVD tube furnace for thin film coating deposition.

[0003] In the related art, the hot graphite boat that has completed the PECVD coating process is placed on a cache rack by a robotic arm for heat dissipation. The existing cache rack is provided with multiple cache positions, and the processed hot graphite boat and the unprocessed cold graphite boat are usually mixed in the cache rack, and the cache positions are not reasonably allocated, resulting in slow heat dissipation of the graphite boat. Utility Model Content

[0004] The present application aims to provide a boat caching device and a clean bench, which can solve the problem that the existing cache racks store processed hot graphite boats and unprocessed cold graphite boats together, and the cache positions are not reasonably allocated, resulting in slow heat dissipation of the graphite boats.

[0005] In order to solve the above technical problems, this application is implemented as follows:

[0006] In a first aspect, an embodiment of the present application proposes a boat buffer device, comprising: a boat buffer rack, wherein the boat buffer rack is provided with a plurality of preheating buffer positions and a plurality of cooling buffer positions arranged at intervals, and the preheating buffer positions are all arranged above the cooling buffer positions, the cooling buffer positions are used to place processed hot boat bodies, and the preheating buffer positions are used to place unprocessed cold boat bodies;

[0007] The cooling cache position is provided with a first cooling mechanism, which includes a first fan assembly and a first cooling pipe assembly. The first cooling pipe assembly is arranged at the bottom of the heat boat body in the cooling cache position, and the first cooling pipe assembly is used to circulate cooling medium to cool the heat boat body; the first fan assembly is arranged on one side of the cooling cache position along a first direction, and the first direction is perpendicular to the arrangement direction of the plurality of cooling cache positions, and the first fan assembly is used to dissipate heat from the heat boat body.

[0008] Optionally, the first cooling mechanism further includes a second fan assembly, which is arranged on a side of the first cooling tube assembly facing the heat boat body, the second fan assembly is suitable for placing the heat boat body, and the second fan assembly is used to blow the airflow on one side of the first cooling tube assembly toward the heat boat body.

[0009] Optionally, the first cooling pipe assembly includes a heat conducting plate and a first cooling pipe, the heat conducting plate is arranged on a side of the second fan assembly away from the heat boat body, the first cooling pipe is embedded in the heat conducting plate, and the first cooling pipe is used to circulate cooling medium.

[0010] Optionally, the first cooling tube assembly further includes a plurality of heat-conducting fins, and the plurality of heat-conducting fins are sequentially and spaced apart from each other on the surface of the heat-conducting plate.

[0011] Optionally, the first cooling pipe includes a plurality of straight pipe portions and a plurality of elbow portions, the straight pipe portions and the elbow portions are connected end to end in sequence, the plurality of straight pipe portions are arranged at intervals, and an extension direction of the straight pipe portions is consistent with a length direction of the heat boat body in the cooling cache position.

[0012] Optionally, the second fan assembly includes a second fan plate and a plurality of second fans, the second fan plate is arranged at the cooling cache position, the second fan plate is arranged on the side of the first cooling pipe assembly facing the heat boat body, and the plurality of second fans are arranged in the second fan plate at intervals in sequence, the air inlet of the second fan faces the first cooling pipe assembly, and the air outlet of the second fan faces the heat boat body.

[0013] Optionally, the first fan assembly includes a first fan plate and a plurality of first fans, the first fan plate is arranged on one side of the cooling cache position along the first direction, the plurality of first fans are arranged at intervals in the first fan plate, the air inlet of the first fan faces the heat boat body, and the air outlet of the first fan faces a direction away from the heat boat body.

[0014] Optionally, the first cooling mechanism further comprises a protective net, the protective net being arranged on the first cooling mechanism.

[0015] The cooling duct assembly is located away from the side of the second fan assembly;

[0016] And / or, the first cooling mechanism also includes: a first detection component and an early warning component, the first detection component is connected to the first cooling pipe assembly and is used to detect the operation status of the first cooling pipe assembly, and the early warning component is electrically connected to the first detection component and is used to issue an early warning based on the detection result of the first detection component.

[0017] Optionally, the boat buffer device further comprises a second detection member, and the cooling buffer position is provided with the second detection member, and the second detection member is used to detect the storage condition of the hot boat body in the cooling buffer position to control the operation of the first cooling mechanism.

[0018] In a second aspect, an embodiment of the present application further provides a clean bench, comprising the boat buffer device described in any one of the above items.

[0019] Optionally, the purification station further comprises a paddle rack, which is arranged opposite to the boat buffer rack; a plurality of paddle positions arranged at intervals are arranged in the paddle rack, and a second cooling mechanism is arranged in the paddle positions.

[0020] Optionally, the second cooling mechanism includes a receiving tray and a second cooling pipe, the receiving tray is arranged in the paddle position, the second cooling pipe is embedded in the receiving tray, and the second cooling pipe is used for circulating cooling medium.

[0021] In an embodiment of the present application, a plurality of preheating cache positions and a plurality of cooling cache positions are arranged in the boat cache rack, so that the preheating cache position is used to store the unprocessed cold boat body, and the cooling cache position is used to store the processed hot boat body, and a first cooling mechanism is arranged in the cooling cache position, so that the first cooling mechanism is used to cool down the hot boat body stored in the cooling cache position. Then, the hot boat body is cooled from the bottom of the hot boat body by the first cooling pipe assembly, and the hot boat body is dissipated from the side of the hot boat body by the first fan assembly. Through the cooperation of the first cooling pipe assembly and the first fan assembly, the cooling efficiency and cooling effect of the hot boat body can be improved, and the problems of battery cell warping and scratches caused by insufficient heat dissipation of the hot boat body can be reduced, thereby helping to improve the yield rate. In addition, the preheating cache position is arranged above the cooling cache position, and the heat emitted by the hot boat body below can be used to preheat the cold boat body above, and the heat is fully utilized, so that the layout structure of the boat cache rack is more reasonable, which is conducive to the preheating of the cold boat body and the cooling of the hot boat body, and can improve production efficiency.

[0022] Additional aspects and advantages of the present application will be given in part in the following description and in part in the following

[0023] It may become apparent from the description or may be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0025] Figure 1 is a schematic diagram of a clean bench according to an embodiment of the present application;

[0026] Figure 2 is a side view of a clean bench according to an embodiment of the present application;

[0027] Figure 3 is a schematic diagram of a boat cache rack according to an embodiment of the present application;

[0028] Figure 4 is a schematic diagram of a first cooling mechanism according to an embodiment of the present application;

[0029] Figure 5 is an exploded view of a first cooling mechanism according to an embodiment of the present application;

[0030] Figure 6 is a schematic diagram of a first cooling pipe assembly according to an embodiment of the present application;

[0031] Figure 7 is a schematic diagram of another first cooling pipe assembly according to an embodiment of the present application;

[0032] Figure 8 is a layout diagram of a first cooling pipe in a first cooling pipe assembly according to an embodiment of the present application;

[0033] Fig. 9 It is a schematic diagram of the structure at the paddle position in the paddle rack according to an embodiment of the present application.

[0034] Reference numerals:

[0035] 10: boat cache rack; 10a: preheating cache position; 10b: cooling cache position; 100: first cooling mechanism; 110: first cooling pipe assembly; 111: heat conduction plate; 112: first cooling pipe; 1121: straight pipe portion; 1122: elbow portion; 113: heat conduction fin; 120: second fan assembly; 121: second fan plate; 122: second fan; 130: first fan assembly; 131: first fan plate; 132: first fan; 140: protective net; 150: first detection member; 170: second detection member; 20: paddle rack; 21: paddle position; 210: second cooling mechanism; 211: receiving tray; 212: second cooling pipe; 30: furnace tube; 31: boat body; 32: paddle; 40: removal mechanism; X: first direction; Y: second direction; Z: vertical direction. DETAILED DESCRIPTION

[0036] The embodiments of the present application will be described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and should not be construed as limitations on the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0037] The term "first" or "second" in the specification and claims of this application may include one or more of the features explicitly or implicitly. In the description of this application, unless otherwise specified, "plurality" means two or more. In addition, "and / or" in the specification and claims means at least one of the connected objects, and the character " / " generally means that the objects connected before and after are in an "or" relationship.

[0038] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0039] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0040] The boat buffer device and the clean bench provided in the embodiments of the present application are described in detail below through specific embodiments and their application scenarios in conjunction with the accompanying drawings.

[0041] like Figures 1 to 3 As shown, according to some embodiments of the present application, the boat cache device includes: a boat cache rack 10, wherein the boat cache rack 10 is provided with a plurality of preheating cache positions 10a and a plurality of cooling cache positions 10b arranged at intervals, and the preheating cache positions 10a are all arranged above the cooling cache positions 10b, and the cooling cache positions 10b are arranged at intervals.

[0042] The preheating buffer position 10a is used to place processed hot boat bodies, and the preheating buffer position 10a is used to place unprocessed cold boat bodies.

[0043] Furthermore, the cooling cache position 10b is provided with a first cooling mechanism 100, and the first cooling mechanism 100 includes a first fan assembly 130 and a first cooling pipe assembly 110. The first cooling pipe assembly 110 is arranged at the bottom of the heat boat body in the cooling cache position 10b, and the first cooling pipe assembly 110 is used to circulate the cooling medium to cool the heat boat body; the first fan assembly 130 is arranged on one side of the cooling cache position along the first direction X, and the first direction X is perpendicular to the arrangement direction of the plurality of cooling cache positions, and the first fan assembly 130 is used to dissipate heat from the heat boat body.

[0044] In the embodiment of the present application, a plurality of preheating cache positions 10a and a plurality of cooling cache positions 10b are arranged in the boat cache rack 10, so that the preheating cache positions 10a are used to store the unprocessed cold boat body, and the cooling cache positions 10b are used to store the processed hot boat body, and a first cooling mechanism 100 is arranged in the cooling cache position 10b, so that the first cooling mechanism 100 is used to cool down the hot boat body stored in the cooling cache position 10b. Furthermore, the first cooling pipe assembly 110 is used to cool the hot boat body from the bottom of the hot boat body, and the first fan assembly 130 is used to dissipate heat from the side of the hot boat body. Through the cooperation of the first cooling pipe assembly 110 and the first fan assembly 130, the cooling efficiency and cooling effect of the hot boat body can be improved, and the problems of warping and scratching of the battery cell caused by insufficient heat dissipation of the hot boat body can be reduced, thereby helping to improve the yield rate.

[0045] In addition, the preheating cache position 10a is set above the cooling cache position 10b, so that the heat emitted by the hot boat body below can be used to preheat the cold boat body above, and the heat is fully utilized to make the layout structure of the boat buffer rack 10 more reasonable, which is beneficial to the preheating of the cold boat body and the cooling of the hot boat body, and can improve production efficiency.

[0046] It can be understood that the boat buffer device in the embodiment of the present application can be applied to the PECVD coating process. In the PECVD coating process, the boat 31 is used to carry the workpiece to be plated, such as a battery cell, and enters the furnace tube 30 of the PECVD equipment for coating operation. After the coating is completed, the boat 31 carrying the workpiece to be plated is taken out by the paddle 32. Among them, the boat 31 that has undergone the coating process has a relatively high temperature and needs to be cooled down, which is called a hot boat; the boat 31 that has not undergone the coating process has a relatively low temperature and is called a cold boat.

[0047] In a specific application, after the hot boat body is taken out by the paddle 32, if it is directly

[0048] The natural cooling on the paddle position 21 takes a long time, which affects the production efficiency. To this end, the embodiment of the present application provides a boat buffer device, including a boat buffer rack 10, in which a plurality of preheating buffer positions 10a and a plurality of cooling buffer positions 10b are arranged in sequence from top to bottom, so that the cooling buffer positions 10b can be used to store processed hot boat bodies, and the preheating buffer positions 10a can be used to store unprocessed cold boat bodies.

[0049] Furthermore, a plurality of preheating cache positions 10a are arranged above a plurality of cooling cache positions 10b. Based on the principle that hot air flows upward, the heat emitted by the hot boat in the lower cooling cache position 10b can preheat the cold boat in the upper preheating cache position 10a. While cooling the hot boat, the cold boat can be preheated, thereby improving the energy utilization rate. Furthermore, a first cooling mechanism 100 is arranged in the cooling cache position 10b to cool the hot boat, thereby accelerating the cooling efficiency of the hot boat stored in the cooling cache position 10b.

[0050] It should be noted that the specific number of preheating cache positions 10a and cooling cache positions 10b provided in the boat cache rack 10 can be flexibly set according to actual needs, and the embodiment of the present application does not limit this. For example, the specific number of preheating cache positions 10a and cooling cache positions 10b can be determined according to the number of furnace tubes 30 in the coating equipment.

[0051] It can be understood that the heat boat body in the cooling cache position 10b has a certain length, a certain width and a certain thickness, and the length of the heat boat body is greater than the width and height, respectively. The height direction of the heat boat body is set as the vertical direction Z (that is, the arrangement direction of the cooling cache positions), the width direction of the heat boat body is set as the first direction X, and the length direction of the heat boat body is set as the second direction Y.

[0052] Specifically, the first cooling mechanism 100 includes a first fan assembly 130 and a first cooling pipe assembly 110. The first cooling pipe assembly 110 is arranged at the bottom of the heat boat body in the cooling cache position 10b, and the first fan assembly 130 is arranged on one side of the heat boat body in the cooling cache position 10b along the first direction X.

[0053] Furthermore, by introducing a cooling medium into the first cooling pipe assembly 110, the cooling medium can exchange heat with the air around the hot boat body based on the heat exchange effect, thereby achieving a cooling effect on the hot boat body. At the same time, the first fan assembly 130 can exhaust and dissipate heat from the side of the hot boat body to promote the cooling of the hot boat body. In this way, through the cooperation of the first cooling pipe assembly 110 and the first fan assembly 130, the cooling efficiency of the hot boat body can be improved, the cooling effect of the hot boat body can be enhanced, and the hot boat body can be cooled in the cooling buffer.

[0054] The position can be fully cooled.

[0055] Alternatively, if Figures 3 to 5 As shown, the first cooling mechanism 100 also includes a second fan assembly 120, which is arranged on the side of the first cooling tube assembly 110 facing the heat boat body. The heat boat body is suitable for being placed on the second fan assembly 120, and the second fan assembly 120 is used to blow the airflow on one side of the first cooling tube assembly 110 toward the heat boat body.

[0056] In the embodiment of the present application, a first cooling pipe assembly 110 and a second fan assembly 120 are arranged at the bottom of the hot boat body in each cooling cache position 10b, and then, by passing a cooling medium into the first cooling pipe assembly 110, heat exchange can be performed between the cooling medium and the air around the first cooling pipe assembly 110 based on the heat exchange effect. At the same time, the cold air around the first cooling pipe assembly 110 can be blown toward the hot boat body by the second fan assembly 120 to cool the hot boat body. Through the cooperation of the first cooling pipe assembly 110 and the second fan assembly 120, the cooling effect on the hot boat body can be improved and the cooling speed can be accelerated.

[0057] It should be noted that the cooling medium circulating in the first cooling pipe assembly 110 can be liquid cooling media such as cooling water and cooling oil, or gas cooling media such as ammonia and carbon dioxide. Of course, other types of media capable of exchanging heat can also be selected. Technical personnel in this field can flexibly select according to actual needs, and no limitation is made here.

[0058] Alternatively, if Figure 8 As shown, the first cooling pipe assembly 110 includes a heat conducting plate 111 and a first cooling pipe 112. The heat conducting plate 111 is disposed on a side of the second fan assembly 120 away from the heat boat body. The first cooling pipe 112 is embedded in the heat conducting plate 111 and is used to circulate cooling medium.

[0059] In the embodiment of the present application, a first cooling tube 112 is embedded in the heat conducting plate 111 to form a first cooling tube assembly 110, and then a cooling medium is introduced into the first cooling tube 112. The heat emitted by the hot boat body can be taken away by the heat exchange effect of the cooling medium, thereby achieving a cooling effect on the hot boat body.

[0060] Specifically, the inlet end and the outlet end of the first cooling pipe 112 can be connected to an external cooling medium supply device respectively, and then the cooling medium supply device introduces the cooling medium into the first cooling pipe 112 through the inlet end. The cooling medium flows in the first cooling pipe 112 and flows back to the cooling medium supply device from the outlet end.

[0061] It is understandable that when the cooling medium flows in the first cooling pipe 112, the air around the first cooling pipe 112 is cooled by heat exchange, and the cold air around the first cooling pipe 112 can be blown toward the hot boat body through the second fan assembly 120 to cool the hot boat body.

[0062] The heat conducting plate 111 and the first cooling tube 112 can be made of heat conducting metal materials such as copper, aluminum, and iron, and of course, other heat conducting materials can also be used. The heat conducting plate 111 and the first cooling tube 112 can be made of the same material or different materials, and can be flexibly selected according to actual needs, and this application does not limit this.

[0063] Alternatively, if Figures 6 to 8 As shown, the first cooling tube assembly 110 further includes a plurality of heat-conducting fins 113 , and the plurality of heat-conducting fins 113 are sequentially and spaced apart from each other on the surface of the heat-conducting plate 111 .

[0064] In the embodiment of the present application, by providing a plurality of spaced heat-conducting fins 113 on the surface of the heat-conducting plate 111, the heat exchange area on the surface of the heat-conducting plate 111 can be increased, thereby facilitating the improvement of the heat exchange effect of the first cooling tube assembly 110, thereby improving the cooling effect on the heat boat body.

[0065] Specifically, a plurality of spaced heat conducting fins 113 may be provided on the outer surface of the heat conducting plate 111 , and each heat conducting fin 113 extends from the outer surface of the heat conducting plate 111 toward a direction away from the heat conducting plate 111 , thereby increasing the heat exchange area of ​​the surface of the heat conducting plate 111 .

[0066] The heat-conducting fins 113 may be made of the same heat-conducting material as the heat-conducting plate 111 , or may be made of a heat-conducting material different from that of the heat-conducting plate 111 , which is not limited here.

[0067] In some embodiments, the first cooling pipe 112 includes a plurality of straight pipe portions 1121 and a plurality of elbow portions 1122, the straight pipe portions 1121 and the elbow portions 1122 are connected end to end in sequence, the plurality of straight pipe portions 1121 are arranged at intervals, and the extension direction of the straight pipe portions 1121 is consistent with the width direction of the heat boat body in the cooling cache position 10b (i.e., the first direction X). The first cooling pipe 112 is formed by connecting the plurality of straight pipe portions 1121 and the plurality of elbow portions 1122 to increase the heat exchange area of ​​the first cooling pipe 112 and improve the heat exchange effect.

[0068] Alternatively, if Figure 7 and Figure 8As shown, the first cooling pipe 112 includes a plurality of straight pipe portions 1121 and a plurality of elbow portions 1122. The straight pipe portions 1121 and the elbow portions 1122 are connected end to end in sequence. The plurality of straight pipe portions 1121 are arranged at intervals, and the extension direction of the straight pipe portions 1121 is consistent with the length direction of the heat boat body in the cooling cache position 10b (i.e., the second direction Y).

[0069] In the embodiment of the present application, the extension direction of the straight tube portion 1121 in the first cooling tube 112 is set to be consistent with the length direction of the heat boat in the preheating buffer position 10a, so that the number of elbows 1122 in the first cooling tube 112 can be reduced. The fewer the elbows 1122, the smaller the resistance to the circulation of the cooling medium in the first cooling tube 112, thereby reducing the pressure drop during the flow of the cooling medium, which is beneficial to improving the heat exchange effect of the cooling medium.

[0070] Specifically, the plurality of straight tube portions 1121 in the first cooling tube 112 may be arranged to extend along the second direction Y, and the elbow portions 1122 may be arranged at both ends of the straight tube portions 1121 along the second direction Y. Under the premise that the heat exchange area of ​​the first cooling tube 112 is the same, compared with setting the straight tube portion 1121 in the first cooling tube 112 as a structure extending along the first direction X, the number of the elbow portions 1122 may be further reduced, thereby reducing the impact on the flow of the cooling medium.

[0071] Alternatively, if Figure 5 As shown, the second fan assembly 120 includes a second fan plate 121 and a plurality of second fans 122. The second fan plate 121 is arranged at the cooling cache position 10b. The second fan plate 121 is arranged on the side of the first cooling pipe assembly 110 facing the heat boat body. The plurality of second fans 122 are arranged in the second fan plate 121 in sequence. The air inlet of the second fan 122 faces the first cooling pipe assembly 110, and the air outlet of the second fan 122 faces the heat boat body.

[0072] In the embodiment of the present application, a second fan plate 121 is provided at the cooling buffer position 10b, and a plurality of second fans 122 are provided in the second fan plate 121. The hot boat body that has undergone the coating process can be placed on the second fan plate 121, and then the cold air around the first cooling pipe assembly 110 can be blown toward the hot boat body through the second fan plate 121 to cool the hot boat body and accelerate the cooling of the hot boat body.

[0073] In some embodiments, a fault detection module and an early warning module may be provided in the second fan 122. Furthermore, the operation status of the second fan 122 may be detected by the fault detection module. When the second fan 122 operates abnormally, the early warning module may automatically issue an early warning so that the second fan 122 can be repaired and replaced in time to ensure the cooling effect of the second fan assembly 120.

[0074] Alternatively, if Figure 4 As shown, the first fan assembly 130 includes a first fan plate 131 and a plurality of first fans 132. The first fan plate 131 is arranged on one side of the cooling cache position along the first direction X, and the plurality of first fans 132 are arranged at intervals in the first fan plate 131. The air inlet of the first fan 132 faces the heat boat body, and the air outlet of the first fan 132 faces the direction away from the heat boat body.

[0075] In the embodiment of the present application, by

[0076] A first fan plate 131 is provided, and a plurality of first fans 132 are provided in the first fan plate 131. The first fans 132 can promote convection of gas around the heat boat, thereby accelerating the heat dissipation of the heat boat and improving the cooling effect on the heat boat.

[0077] It is understandable that the first fan 132 may have the same structure as the second fan 122, or may have a different structure from the second fan 122, and may be flexibly configured according to actual conditions, which is not limited in the embodiments of the present application.

[0078] Alternatively, if Figure 4 and Figure 5 As shown, the first cooling mechanism 100 further includes a protective net 140 , which is disposed on a side of the first cooling pipe assembly 110 away from the second fan assembly 120 .

[0079] In the embodiment of the present application, a protective net 140 is provided on the side of the first cooling pipe assembly 110 away from the second fan assembly 120 to isolate and protect the first cooling pipe assembly 110, thereby preventing the first cooling pipe assembly 110 from being damaged by collision during the transfer of the hot boat, thereby improving safety.

[0080] Among them, the protective net 140 includes a frame and a mesh hollow structure. The frame surrounds the mesh hollow structure to provide support and reinforcement. The mesh hollow structure can not only isolate and protect the first cooling pipe assembly 110, but also facilitate air convection through the hollow structure.

[0081] Alternatively, if Figure 3 As shown, the first cooling mechanism 100 also includes: a first detection component 150 and an early warning component (not shown in the figure), the first detection component 150 is connected to the first cooling pipe assembly 110, and is used to detect the operation status of the first cooling pipe assembly 110, and the early warning component is electrically connected to the first detection component 150, and is used to issue an early warning based on the detection result of the first detection component 150.

[0082] In the embodiment of the present application, a first detection component 150 is provided in the first cooling pipe assembly 110 so that the first detection component 150 can be used to detect the operation status of the first cooling pipe assembly 110. When the first cooling pipe assembly 110 operates abnormally, an early warning component can be used to issue an early warning so that the first cooling pipe assembly 110 can be repaired or replaced in time to ensure the cooling effect of the first cooling pipe assembly 110.

[0083] Specifically, the first detection component 150 can be a flow meter, which is arranged in the cooling pipe in the first cooling pipe assembly 110. The flow meter can monitor the flow of cooling medium in the cooling pipe. When abnormal flow occurs, the early warning component can issue an early warning so as to eliminate the fault in time.

[0084] Alternatively, the first detection member 150 may be a thermometer connected to the first cooling tube assembly 110, and the temperature change around the first cooling tube assembly 110 may be detected by the thermometer.

[0085] When an abnormality occurs, the early warning component can issue an early warning so that the fault can be eliminated in time.

[0086] Of course, the first detection member 150 may also select other components for detecting the operation status of the first cooling pipe assembly 110, and may be flexibly configured according to actual conditions, which is not limited in the embodiment of the present application.

[0087] Alternatively, if Figure 2 As shown, the boat buffer device further includes a second detection member 170 . The cooling buffer position 10 b is provided with the second detection member 170 . The second detection member 170 is used to detect the storage condition of the hot boat in the cooling buffer position 10 b to control the operation of the first cooling mechanism 100 .

[0088] In the embodiment of the present application, a second detection member 170 is provided in the cooling cache position 10b to detect whether a heat boat is placed in the cooling cache position 10b, thereby controlling the operation of the first cooling mechanism 100 according to the storage status of the heat boat.

[0089] Specifically, each cooling cache position 10b is provided with a second detection member 170, and the second detection member 170 may include a detection module and a control module. The detection module is provided in the cooling cache position 10b, and the control module is electrically connected to the detection module. The control module is connected to the first cooling mechanism 100. The detection module can detect whether the corresponding cooling cache position 10b stores a hot boat body, and then send a detection signal to the control module. The control module controls the operation of the first cooling mechanism 100 according to the detection signal to achieve precise control of the first cooling mechanism 100.

[0090] For example, when the detection module detects that a hot boat is stored in the cooling cache position 10b, the control module controls the second fan 122 and the first fan 132 to be turned on, and controls the first cooling pipe 112 to be turned on, thereby cooling the hot boat. When the detection module detects that no hot boat is stored in the cooling cache position 10b, the control module controls the second fan 122 and the first fan 132 to be stopped, and controls the first cooling pipe 112 to be turned off, thereby reducing energy loss.

[0091] In some embodiments, the cooling effect of the hot boat body is compared by using the boat buffer rack 10 in the present application to store the hot boat body and placing the hot boat body on the paddle position 21 for natural cooling. Among them, the embodiment is to store the processed hot boat body in the cooling buffer position 10b of the boat buffer rack 10 for cooling, and the cooling buffer position 10b is provided with the first cooling mechanism 100 in the above embodiment. The comparative example is to store the processed hot boat body on the paddle position 21 for natural cooling. The specific experimental results are shown in Table 1:

[0092] Table 1

[0093] Cooling time / min 2 3 6 7 12 15 18 21 24 27 30 33 36 39 Comparative Example (℃) 410 370 300 236 179 144 111 90 73 60 53 46 42 39.4 Example (℃) - 267 184 120 85 60 49 42.3 - - - - - -

[0094] It can be seen from the experimental data in Table 1 above that if natural cooling is adopted in the paddle position 21 to cool down to 42°C, it takes 36 minutes, while using the boat buffer rack 10 in the present application to store the hot boat body, it only takes 21 minutes to cool down to 42°C, which can greatly reduce the cooling time.

[0095] Alternatively, if Figure 1 As shown, an embodiment of the present application further provides a clean bench, comprising the boat buffer device in the above embodiment.

[0096] In the embodiment of the present application, a plurality of preheating cache positions 10a and a plurality of cooling cache positions 10b are arranged in the boat buffer rack 10, so that the preheating cache positions 10a are used to store unprocessed cold boat bodies, and the cooling cache positions 10b are used to store processed hot boat bodies, and a first cooling mechanism 100 is arranged in the cooling cache position 10b, so that the first cooling mechanism 100 is used to cool down the hot boat bodies stored in the cooling cache position 10b. In addition, the preheating cache position 10a is arranged above the cooling cache position 10b, so that the heat emitted by the hot boat body below can be used to preheat the cold boat body above, and the heat is fully utilized, so that the layout structure of the boat buffer rack 10 is more reasonable, which is conducive to the preheating of the cold boat body and the cooling of the hot boat body, and can improve the production efficiency.

[0097] Alternatively, if Figure 1 and Figure 2As shown, the purification station further includes a paddle rack 20 , which is arranged opposite to the boat buffer rack 10 ; a plurality of paddle positions 21 arranged at intervals are arranged in the paddle rack 20 , and a second cooling mechanism 210 is arranged in the paddle position 21 .

[0098] Specifically, a plurality of paddle positions 21 are provided in the paddle position frame 20, and the paddle positions 21 are used to store paddles 32. The paddles 32 can be used to send the boat 31 carrying the workpiece to be plated into the furnace tube 30 for coating, and the boat 31 after coating is removed from the furnace tube 30. A second cooling mechanism 210 is provided in each paddle position 21, and the second cooling mechanism 210 is located below the paddle 32.

[0099] Furthermore, after the processed hot boat body is taken out of the furnace tube 30 by the paddle 32, the hot boat body is first cooled by the second cooling mechanism 210, and then the hot boat body is transferred to the cooling buffer position 10b in the boat buffer rack 10 for secondary cooling. In this way, the cooling of the hot boat body can be accelerated.

[0100] Temperature rate, thereby improving production efficiency.

[0101] In some embodiments, a transfer mechanism 40 may be provided between the paddle rack 20 and the boat buffer rack 10, and the transfer mechanism 40 may be used to transfer the cold boat body stored in the preheating buffer position 10a in the boat buffer rack 10 to the paddle position in the paddle rack 20, and to transfer the hot boat body in the paddle position 21 to the cooling buffer position 10b in the boat buffer rack 10. The transfer mechanism 40 may be a mechanism integrated in the clean bench, or may be a mechanism independent of the clean bench, and may be flexibly provided according to actual conditions, and is not limited here.

[0102] Alternatively, if Fig. 9 As shown, the second cooling mechanism 210 includes a receiving tray 211 and a second cooling pipe 212. The receiving tray 211 is arranged in the paddle position 21, and the second cooling pipe 212 is embedded in the receiving tray 211. The second cooling pipe 212 is used for circulating cooling medium.

[0103] In the embodiment of the present application, a receiving tray 211 is provided in the paddle position 21 so that the receiving tray 211 can be used to receive the residues dropped from the boat body 31. At the same time, a second cooling pipe 212 is embedded in the receiving tray 211. By passing a cooling medium into the second cooling pipe 212, the processed hot boat body can be cooled.

[0104] The structure of the second cooling tube 212 may refer to the structure of the first cooling tube 112 , and will not be described in detail in the embodiment of the present application.

[0105] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0106] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims

1. A boat buffer device, characterized in that: include: A boat buffer rack, wherein the boat buffer rack is provided with a plurality of preheating buffer positions and a plurality of cooling buffer positions which are arranged at intervals, and the preheating buffer positions are all arranged above the cooling buffer positions, the cooling buffer positions are used to place processed hot boat bodies, and the preheating buffer positions are used to place unprocessed cold boat bodies; The cooling cache position is provided with a first cooling mechanism, which includes a first fan assembly and a first cooling pipe assembly. The first cooling pipe assembly is arranged at the bottom of the heat boat body in the cooling cache position, and the first cooling pipe assembly is used to circulate cooling medium to cool the heat boat body; the first fan assembly is arranged on one side of the cooling cache position along a first direction, and the first direction is perpendicular to the arrangement direction of the plurality of cooling cache positions, and the first fan assembly is used to dissipate heat from the heat boat body.

2. The boat buffer device according to claim 1, characterized in that: The first cooling mechanism further includes a second fan assembly, which is arranged on a side of the first cooling tube assembly facing the heat boat body, the second fan assembly is suitable for placing the heat boat body, and the second fan assembly is used to blow the airflow on one side of the first cooling tube assembly toward the heat boat body.

3. The boat buffer device according to claim 2, characterized in that: The first cooling pipe assembly includes a heat conducting plate and a first cooling pipe. The heat conducting plate is arranged on a side of the second fan assembly away from the heat boat body. The first cooling pipe is embedded in the heat conducting plate. The first cooling pipe is used to circulate cooling medium.

4. The boat buffer device according to claim 3, characterized in that: The first cooling tube assembly further includes a plurality of heat-conducting fins, which are sequentially and spaced apart from each other on the surface of the heat-conducting plate.

5. The boat buffer device according to claim 3, characterized in that: The first cooling pipe includes a plurality of straight pipe portions and a plurality of elbow portions, wherein the straight pipe portions are connected end to end in sequence, the plurality of straight pipe portions are arranged at intervals, and the extension direction of the straight pipe portions is consistent with the length direction of the heat boat body in the cooling cache position.

6. The boat buffer device according to claim 2, characterized in that: The second fan assembly includes a second fan plate and a plurality of second fans, the second fan plate is arranged at the cooling cache position, the second fan plate is arranged on the side of the first cooling pipe assembly facing the heat boat body, and the plurality of second fans are sequentially arranged in the second fan plate at intervals, the air inlet of the second fan faces the first cooling pipe assembly, and the air outlet of the second fan faces the heat boat body.

7. The boat buffer device according to claim 2, characterized in that: The first cooling mechanism further comprises a protective net, which is arranged on a side of the first cooling pipe assembly away from the second fan assembly; And / or, the first cooling mechanism further includes: a first detection member and an early warning member, the first detection member is connected to the first cooling pipe assembly and is used to detect the operation of the first cooling pipe assembly, and the early warning member is electrically connected to the first detection member and is used to issue an early warning based on the detection result of the first detection member; And / or, the boat cache device further comprises a second detection member, the cooling cache position is provided with the second detection member, the second detection member is used to detect the storage condition of the hot boat body in the cooling cache position to control the operation of the first cooling mechanism.

8. The boat buffer device according to claim 1, characterized in that: The first fan assembly includes a first fan plate and a plurality of first fans, the first fan plate is arranged on one side of the cooling cache position along the first direction, the plurality of first fans are arranged at intervals in the first fan plate, the air inlet of the first fan faces the heat boat body, and the air outlet of the first fan faces a direction away from the heat boat body.

9. A clean bench, characterized in that: Comprising a boat caching device as described in any one of claims 1-8.

10. The clean bench according to claim 9, characterized in that: The purification station also includes a paddle rack, which is arranged opposite to the boat buffer rack; the paddle rack is provided with a plurality of paddle positions arranged at intervals, and the paddle positions are provided with a second cooling mechanism; The second cooling mechanism includes a receiving tray and a second cooling pipe, wherein the receiving tray is arranged in the paddle position, and the second cooling pipe is embedded in the receiving tray, and the second cooling pipe is used for circulating cooling medium.

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