Heating electrode structure and heating equipment

Abstract

The utility model provides a heating electrode structure. The heating electrode structure comprises an electrode body, an electrode stem and an insulation protection assembly. The electrode body is used for being externally connected with a power source, the electrode stem comprises an installation section and an extension section, the installation section is embedded into the electrode body and electrically connected with the electrode body, and the extension section extends from the installation section and is located outside the electrode body. The insulation protection assembly is installed on the outer wall of the extension section and matched with the electrode body to accommodate the whole electrode rod, and stable heating is facilitated. The utility model further provides heating equipment.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic solar cell manufacturing, and in particular to a heating electrode structure and a heating device using the heating electrode structure. Background Art

[0002] Polysilicon is the basic material for manufacturing photovoltaic solar cells, and it is also commonly used in the electronic information industry to produce monocrystalline silicon. At present, the production of polysilicon / silicon wafers usually needs to be carried out in a vacuum and high-temperature reactor, so the temperature stability / control of the reactor is particularly important. However, the existing reactor is prone to corona phenomenon, resulting in equipment instability and excessive electrode load, resulting in fault alarms. Utility Model Content

[0003] In view of this, the present application provides a heating electrode structure that is conducive to stable heating.

[0004] In addition, a heating device using the above-mentioned heating electrode structure is also provided to facilitate stable heating.

[0005] The first aspect of the present application provides a heating electrode structure, comprising an electrode body, an electrode rod, and an insulating protection component. The electrode body is used for an external power supply, and the electrode rod comprises a mounting section and an extension section, wherein the mounting section is embedded in the electrode body and electrically connected to the electrode body, the extension section extends from the mounting section and is located outside the electrode body, and one end of the extension section away from the mounting section is used to connect to the heating wire. The insulating protection component is installed on the outer wall of the extension section and cooperates with the electrode body to accommodate the entire electrode rod, wherein one end of the extension section away from the mounting section is located inside the insulating protection component.

[0006] In the above heating electrode structure, the installation section is embedded in the electrode body, which is conducive to improving the stability of the connection between the electrode body and the electrode rod, thereby ensuring the stability of subsequent heating. The insulation protection component is installed on the outer wall of the extension section and cooperates with the electrode body to accommodate the entire electrode rod, which is conducive to protecting the entire electrode rod. When high voltage and high current pass through the electrode rod, the insulation protection component is also conducive to preventing the generation of corona between the electrode rod and the adjacent conductor in the environment, that is, preventing the electrode rod surface from causing local discharge in the gas medium, thereby facilitating the stability of subsequent heating.

[0007] In some possible implementations, the insulating protection component is a ceramic component or a Teflon component.

[0008] In some possible implementations, the insulating protection assembly includes a protection member, which includes a protection sleeve and a protection cap. The protection sleeve is sleeved outside the extension section, the protection cap is threadedly connected to the end of the protection sleeve away from the installation section, and the protection cap is provided with a through hole for passing the heating wire.

[0009] In some possible implementations, an end of the extension section facing away from the installation section is located outside the protective cover.

[0010] In some possible embodiments, the protective cap includes a first wall and a second wall. The first wall surrounds the extension section and the inner surface of the first wall is provided with a first thread, the outer surface of the end of the protective cover away from the installation section is provided with a second thread, and the first thread is threadedly connected with the second thread. The second wall seals the end of the first wall away from the protective cover, and the through hole is provided on the second wall.

[0011] In some possible implementations, the first wall forms a stepped receiving cavity. The receiving cavity includes a first portion and a second portion that are connected, the second portion is located on a side of the first portion that is away from the extension section, and the size of the second portion is smaller than that of the first portion.

[0012] In some possible implementations, a threaded hole is recessed on the end surface of the extension section away from the mounting section, and the heating electrode structure further includes a threaded connector for threadedly engaging with the threaded hole to fix the heating wire to the extension section.

[0013] In some possible implementations, the threaded connector is a ceramic connector.

[0014] The second aspect of the present application provides a heating device, comprising a furnace body and the heating electrode structure as described above. The furnace body is provided with a furnace cavity, the heating electrode structure is installed on the furnace body, and the electrode body is located outside the furnace cavity, and an extension section of the insulating protection component is extended into the furnace cavity.

[0015] In the above heating device, since the installation section is embedded in the electrode body, it is beneficial to improve the stability of the connection between the electrode body and the electrode rod, thereby ensuring the heating stability of the heating device. The insulation protection component is installed on the outer wall of the extension section and cooperates with the electrode body to accommodate the entire electrode rod, which is beneficial to protecting the entire electrode rod. When high voltage and high current pass through the electrode rod, the insulation protection component is also beneficial to prevent the generation of corona between the electrode rod and the furnace body, that is, to prevent the occurrence of local discharge on the surface of the electrode rod in the gas medium, thereby ensuring the heating stability of the heating device. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A three-dimensional schematic diagram of a heating electrode structure provided in an embodiment of the present application.

[0017] Figure 2 A cross-sectional schematic diagram of a heating device provided in an embodiment of the present application.

[0018] Figure 3 A cross-sectional schematic diagram of a protective member provided in an embodiment of the present application.

[0019] Figure 4 A cross-sectional schematic diagram of another protective member provided in an embodiment of the present application.

[0020] Main component symbols

[0021] Heating electrode structure 100

[0022] Electrode body 10

[0023] Electrode rod 20

[0024] Insulation protection component 30

[0025] Installation Section 21

[0026] Extension 23

[0027] Protective element 33

[0028] Heating wire 40

[0029] Protective cover 33a

[0030] Protective cap 33b

[0031] First Wall 331

[0032] Second wall 332

[0033] First thread 333

[0034] Second thread 334

[0035] Accommodation chambers 336, 337

[0036] First part 336a, 337a

[0037] Second part 336b, 337b

[0038] Through hole 335

[0039] End face 230

[0040] Connector 50

[0041] Threaded hole 231

[0042] Threaded section 51

[0043] Protrusion 53

[0044] Avoidance slot 530

[0045] High temperature resistant insulation parts 31

[0046] Protective cover 61

[0047] Sealing flange 63

[0048] Mounting holes 630

[0049] Accommodating chamber 640

[0050] Flange 33a1

[0051] Seal 65

[0052] Heating equipment 600

[0053] Furnace 70

[0054] Furnace chamber 71

[0055] The following specific implementation methods will further illustrate the present application in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0056] In order to further illustrate the technical means and effects adopted by the present application to achieve the intended application purpose, the following is combined with the drawings and implementation methods. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments.

[0057] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0058] In the description of the embodiments of the present application, when an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be a centrally disposed element at the same time. When an element is considered to be "disposed on" another element, it may be directly disposed on the other element or there may be a centrally disposed element at the same time. In the present application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected, or it may be indirectly connected through an intermediate medium, or it may be internal communication between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0059] The heating furnace used in the production of polysilicon / silicon wafers usually achieves heating and temperature rise by connecting an electrode structure to a heating wire. Since the electrode structure needs to pass high voltage and high current, it is easy for the electrode structure to generate corona phenomenon with the conductive furnace body, resulting in equipment instability and fault alarm due to excessive electrode load. At present, in order to deal with the corona phenomenon that is easy to generate in the heating furnace, the electrode and the furnace body are usually separated by an insulating member when the electrode is inserted into the furnace body. However, the above method cannot avoid the generation of corona phenomenon between the end of the electrode structure and the adjacent conductor. In view of this, in order to improve the stability of the equipment and the stability of heating, the present application provides a heating electrode structure and a heating device using the heating electrode structure.

[0060] In conjunction with the accompanying drawings, some embodiments of the present application are described in detail below. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0061] See also Figure 1 to Figure 2 , an embodiment of the present application provides a heating electrode structure 100. The heating electrode structure 100 includes an electrode body 10, an electrode rod 20 and an insulating protection component 30. Among them, the electrode body 10 is used for an external power supply. The electrode rod 20 includes a mounting section 21 and an extension section 23, the mounting section 21 is embedded in the electrode body 10, and the extension section 23 extends from the mounting section 21 and is located outside the electrode body 10. The insulating protection component 30 is installed on the outer wall of the extension section 23 and cooperates with the electrode body 10 to accommodate the entire electrode rod 20.

[0062] The above-mentioned heating electrode structure 100, the installation section 21 is embedded in the electrode body 10, which is conducive to improving the stability of the connection between the electrode body 10 and the electrode rod 20, thereby ensuring the stability of subsequent heating. The insulation protection component 30 is installed on the outer wall of the extension section 23 and cooperates with the electrode body 10 to accommodate the entire electrode rod 20, which is conducive to protecting the entire electrode rod 20, and when high voltage and high current pass through the electrode rod 20, the insulation protection component 30 is also conducive to preventing the entire electrode rod 20 from generating corona between the adjacent conductors in the environment, that is, preventing the surface of the electrode rod 20 from causing local discharge in the gas medium, thereby facilitating the stability of heating.

[0063] The insulating protection component 30 may be, but is not limited to, a ceramic component or a Teflon component.

[0064] In some embodiments, Figure 1 and Figure 2As described above, the insulating protection assembly 30 may include a protection member 33, which is sleeved outside the extension section 23 to accommodate the extension section 23. Since the protection member 33 has good high temperature resistance and good electrical insulation, the protection member 33 is sleeved outside the extension section 23 to effectively insulate the extension section 23 from other conductors in the environment under high temperature environment, thereby helping to reduce the risk of discharge of the electrode rod 20, and further facilitating the stability of heating.

[0065] The heating electrode structure 100 is used to electrically connect the heating wire 40. Specifically, one end of the heating wire 40 is connected to the extension section 23, and the other end extends from the insulating protection component 30. The heating wire 40 can generate heat when the electrode body 10 is energized by the power supply to achieve heating. Specifically, in the above embodiment, the heating wire 40 extends from the protection member 33.

[0066] In some embodiments, the protective member 33 may include a protective sleeve 33a and a protective cap 33b. The protective sleeve 33a may be substantially hollow barrel-shaped and sleeved outside the extension section 23, and the protective cap 33b may be detachably mounted on an end of the protective sleeve 33a away from the electrode body 10. The detachable design of the protective sleeve 33a and the protective cap 33b facilitates the disassembly, assembly and replacement of the heating wire 40. The heating wire 40 extends from the protective cap 33b.

[0067] Furthermore, one end of the extension section 23 facing away from the installation section 21 can be located outside the protective cover 33a, that is, protrude from the protective cover 33a, so that it can be exposed outside the protective cover 33a after the protective cap 33b is separated from the protective cover 33a, thereby further facilitating the disassembly and replacement of the heating wire 40 and helping to avoid damage to the protective component 33 when disassembling the heating wire 40.

[0068] like Figure 2 and Figure 3 As shown, the protective cap 33b can be sleeved on the end of the protective sleeve 33a, which is conducive to reducing the probability of the protective cap 33b hitting the electrode rod 20 when disassembling and assembling, thereby helping to reduce the risk of damage to the electrode rod 20 or the protective cap 33b. The protective cap 33b and the protective sleeve 33a can be threadedly connected, so that it is more convenient to disassemble and assemble the protective cap 33b without loss, which is conducive to the disassembly, assembly and replacement of the heating wire 40. Specifically, the protective cap 33b includes a first wall 331 arranged around the extension section 23, and the inner surface of the first wall 331 is provided with a first thread 333. Correspondingly, the outer surface of the end of the protective sleeve 33a away from the electrode body 10 is provided with a second thread 334, and the second thread 334 is threadedly connected with the first thread 333 to connect the protective sleeve 33a and the protective cap 33b.

[0069] In other embodiments, the connection between the protective cap 33b and the protective sleeve 33a may also be, but is not limited to, snap-fitting, bonding, and other connection methods.

[0070] The first wall 331 may enclose a stepped receiving cavity 336. Figure 2 and Figure 3 The receiving cavity 336 includes a first portion 336a and a second portion 336b that are connected, wherein the second portion 336b is located at a side of the first portion 336a that is away from the extension section 23, the first thread 333 corresponds to the first portion 336a, and the size of the second portion 336b is smaller than that of the first portion 336a, which is beneficial to the insulation between the end surface 230 of the extension section 23 away from the installation section 21 and the conductor in the environment, thereby further facilitating the prevention of discharge of the electrode rod 20.

[0071] In some embodiments, the receiving cavity surrounded by the first wall 331 may also be in other shapes, such as Figure 4 The accommodating cavity 337 shown in the figure comprises a first portion 337a and a second portion 337b which are connected, wherein along the connecting direction between the first portion 337a and the second portion 337b, the size of the second portion 337b gradually decreases from an end close to the first portion 337a toward an end away from the first portion 337a. At this time, the design of the second portion 337b is also conducive to the insulation between the end face 230 of the extension section 23 which is away from the mounting section 21 and the conductor in the environment, thereby further facilitating the prevention of discharge of the electrode rod 20.

[0072] The protective cap 33b may further include a second wall 332, the second wall 332 seals the end of the first wall 331 away from the protective cover 33a, and at this time, a through hole 335 with a small aperture is provided on the protective cap 33b for passing the heating wire 40. In some embodiments, the aperture of the through hole 335 may be smaller than the aperture of the second portion 337b, thereby further facilitating the prevention of end surface discharge of the electrode rod 20 and facilitating the stability of heating.

[0073] like Figure 1 and Figure 2 As shown, the heating wire 40 can be connected to the extension section 23 through a connector 50 to achieve the fixing of the heating wire 40 and the extension section 23. Specifically, in some embodiments, the connector 50 can be a threaded connector, such as but not limited to a screw. Accordingly, the end surface 230 of the extension section 23 facing away from the mounting section 21 is concavely provided with a threaded hole 231, and the threaded hole 231 is threadedly connected with the threaded connector to achieve the installation of the heating wire 40.

[0074] The connector 50 includes a screw-on section 51 and a protrusion 53 protruding from the outer wall of the screw-on section 51. In some embodiments, the protrusion 53 may be located at the end of the screw-on section 51. One end of the heating wire 40 is wound around the screw-on section 51, and after the screw-on section 51 is screwed and tightened with the threaded hole 231, the heating wire 40 wound around the screw-on section 51 abuts between the protrusion 53 and the end surface 230 of the extension section 23, thereby achieving electrical connection between the heating wire 40 and the extension section 23. The protrusion 53 may also be provided with an avoidance groove 530 for passing the heating wire 40, so as to avoid the heating wire 40 being protruded outside the protrusion 53 and occupying space, and to make the arrangement of the heating wire 40 smoother and avoid the movement of the heating wire 40.

[0075] The heating wire 40 may also be electrically connected to the extension section 23 in other ways, such as but not limited to pressing a portion of the heating wire 40 into the threaded hole 231 through the connector 50 .

[0076] In some embodiments, the threaded connector may be an insulating element, such as but not limited to a ceramic connector, so as to further prevent discharge on the end surface of the electrode rod 20, thereby facilitating heating stability.

[0077] The insulating protection component 30 may further include a high temperature resistant insulating member 31, which is sleeved outside the extension section 23 and located between the protection member 33 and the electrode body 10.

[0078] The heating electrode structure 100 may further include a protective cover 61 and a sealing flange 63. The electrode body 10 is mounted on the protective cover 61, and one end of the electrode body 10 connected to the electrode rod 20 is located in the protective cover 61. The sealing flange 63 is sleeved on the insulating protection assembly 30 and fixed to the protective cover 61.

[0079] The sealing flange 63 has a mounting hole 630, and the protective sleeve 33a passes through the mounting hole 630. The sealing flange 64 cooperates with the protective cover 61 to form a receiving cavity 640, and the high temperature resistant insulating member 31 is located in the receiving cavity 640. In some embodiments, the peripheral wall of the end of the protective sleeve 33a away from the protective cap 33b may be provided with a flange 33a1, which is located in the receiving cavity 640 and abuts against the surface of the sealing flange 63 facing the electrode body 10, so that the protective sleeve 33a can be positioned and fixed by the fixed cooperation between the sealing flange 63 and the protective cover 61.

[0080] The heating electrode structure 100 may further include a sealing ring 65 . The sealing ring 65 is embedded in a side of the sealing flange 63 facing away from the electrode body 10 , and the sealing ring 65 is disposed around the electrode rod 20 .

[0081] like Figure 2As shown, the heating electrode structure 100 can be applied to a heating device 600. The heating device 600 includes a furnace body 70, and the furnace body 70 is provided with a furnace cavity 71. The heating electrode structure 100 is installed in the furnace body 70, and the electrode body 10 is located outside the furnace cavity 71, and the extension section 23 of the insulating protection component 30 is provided to extend into the furnace cavity 71.

[0082] Specifically, the furnace body 70 is provided with a furnace hole 73 communicating with the furnace cavity 71, and the protective cover 33a and the extension section 23 extend from the furnace hole 73 into the furnace cavity 71. The sealing flange 63 is fixed to the outer wall of the furnace body 70 through a connecting member (not shown), wherein the sealing ring 65 abuts against the sealing flange 63 and the furnace body 70 to improve the sealing performance of the furnace cavity 71.

[0083] The furnace body 70 may be made of, but not limited to, cast iron, carbon steel, stainless steel, graphite, or silicon carbide. At this time, since the extension section 23 extending into the furnace cavity 71 is isolated from the furnace body 70 by the insulating protection component 30, when high voltage and high current pass through the electrode rod 20, it is possible to prevent the corona phenomenon from being generated between the electrode rod 20 and the furnace body 70, thereby facilitating the heating stability of the heating device 600.

[0084] The furnace body 70 may also be made of a non-conductive material. In this case, the design of the insulating protection component 30 can also prevent the electrode rod 20 and other conductive bodies in the furnace cavity 71 from generating corona phenomenon, which is beneficial to the stability of heating.

[0085] In some embodiments, the furnace body 70 may be provided with a plurality of the above-mentioned heating electrode structures 100 .

[0086] In addition, those skilled in the art should recognize that the above embodiments are only used to illustrate the present application and are not intended to be limiting of the present application. As long as they are within the spirit and scope of the present application, appropriate changes and modifications to the above embodiments are within the scope of the present application.

Claims

1. A heating electrode structure, characterized in that: include: The electrode body is used for connecting to an external power source; The electrode rod comprises a mounting section and an extension section, wherein the mounting section is embedded in the electrode body and electrically connected to the electrode body, the extension section extends from the mounting section and is located outside the electrode body, and an end of the extension section away from the mounting section is used for connecting the heating wire; as well as An insulating protection component is installed on the outer wall of the extension section and cooperates with the electrode body to accommodate the entire electrode rod, wherein the end of the extension section away from the installation section is located in the insulating protection component, and the insulating protection component is provided with a through hole for passing the heating wire.

2. The heating electrode structure according to claim 1, characterized in that: The insulating protection component is a ceramic component or a Teflon component.

3. The heating electrode structure according to claim 1, characterized in that: The insulating protection assembly includes a protection member, which includes a protection sleeve and a protection cap. The protection sleeve is sleeved outside the extension section. The protection cap is threadedly connected to the end of the protection sleeve away from the installation section, and the protection cap is provided with the through hole.

4. The heating electrode structure according to claim 3, characterized in that: One end of the extension section facing away from the installation section is located outside the protective sleeve.

5. The heating electrode structure according to claim 3, characterized in that: The protective cap includes a first wall and a second wall, the first wall surrounds the extension section and the inner surface of the first wall is provided with a first thread, the outer surface of the end of the protective sleeve facing away from the installation section is provided with a second thread, the first thread is threadedly connected with the second thread, the second wall seals the end of the first wall facing away from the protective sleeve, and the through hole is provided in the second wall.

6. The heating electrode structure according to claim 5, characterized in that: The first wall forms a stepped receiving cavity, which includes a first portion and a second portion that are connected, wherein the second portion is located on a side of the first portion that is away from the extension section, and the size of the second portion is smaller than that of the first portion.

7. The heating electrode structure according to any one of claims 4 to 6, characterized in that: The end surface of the extension section facing away from the mounting section is concavely provided with a threaded hole, and the heating electrode structure further comprises a threaded connector for screwing with the threaded hole to fix the heating wire to the extension section.

8. The heating electrode structure according to claim 7, characterized in that: The threaded connector is a ceramic connector.

9. A heating device, comprising a furnace body, wherein the furnace body is provided with a furnace cavity, characterized in that: The heating device also includes a heating electrode structure as described in any one of claims 1 to 8, wherein the heating electrode structure is installed on the furnace body, and the electrode body is located outside the furnace cavity, and the extension section of the insulating protection component extends into the furnace cavity.

10. The heating device according to claim 9, characterized in that The heating electrode structure also includes a protective cover, a sealing flange and a sealing ring, the electrode body is installed on the protective cover and one end of the electrode body connected to the electrode rod is located in the protective cover, the sealing flange is sleeved on the insulating protection component and fixed to the protective cover, the seal is embedded in the side of the sealing flange away from the electrode body and surrounds the electrode rod, the sealing flange is fixed to the outer wall of the furnace body and the sealing ring abuts against the sealing flange and the furnace body.

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