Filtering mechanism and silicon powder filter

Abstract

The utility model provides a filtering mechanism and a silicon powder filter, and relates to the technical field of polycrystalline silicon. The filtering mechanism comprises a disc chuck which is arranged at the upper part of the inner side of the tank body and divides the interior of the tank body into an exhaust chamber and a filtering chamber from top to bottom; the center cylinder is arranged in the filter chamber, the lower end of the center cylinder is connected with the tail gas inlet, and the upper end is close to the bottom center of the disc chuck; the filter pipe is arranged in the filter chamber and is used for filtering silicon powder in the waste gas; the flow dispersing structure is arranged at the upper end of the central cylinder and is used for uniformly dispersing the air flow of the central cylinder; and the flow baffle is arranged between the flow diffusing structure and the filter pipe. The silicon powder filter comprises the filtering mechanism. The flow dispersing structure is used for dispersing and uniformly distributing upward airflow to the periphery so as to uniformly disperse the airflow in the central cylinder and prevent the situation that local airflow is too large; the flow baffle is arranged between the flow diffusing structure and the filter pipe, so that the filter pipe 23 is prevented from being directly scoured by high-speed airflow.

Description

Technical Field

[0001] The utility model relates to the technical field of polysilicon, in particular to a filtering mechanism and a silicon powder filter. Background Art

[0002] In the exhaust gas recovery process of polysilicon production equipment, the traditional silicon powder filter used has problems in design such as uneven air intake, easy breakage and wear at the root (upper end) of the filter tube, which causes an increase in the equipment failure rate. Each time the equipment is repaired after a failure, it is necessary to replace the filter tube, repair the disc, etc., which consumes manpower and spare parts, and the maintenance cost is high, which needs to be improved. Utility Model Content

[0003] In view of the above situation, the utility model provides a filtering mechanism and a silicon powder filter, aiming to solve the technical problems of uneven air intake, easy breakage and wear of the root (upper end) of the filter tube in the design of the existing traditional silicon powder filter.

[0004] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0005] In a first aspect, the utility model provides a filtering mechanism, comprising:

[0006] A flower disc is arranged on the inner upper part of the tank body, and the flower disc divides the interior of the tank body into an exhaust chamber and a filter chamber from top to bottom;

[0007] The central tube is arranged in the filter chamber, the lower end of the central tube is connected to the exhaust gas inlet, and the upper end is close to the bottom center of the faceplate;

[0008] A filter tube, arranged in the filter chamber, for filtering silicon powder in the exhaust gas;

[0009] The diffuser structure is arranged at the upper end of the central tube and is used to evenly disperse the airflow in the central tube;

[0010] The baffle is arranged between the diffuser structure and the filter tube.

[0011] In some embodiments of the present invention, the flow dispersion structure includes a plurality of bell mouths arranged at intervals in the vertical direction, and the air flow can be discharged from each bell mouth.

[0012] In some embodiments of the present invention, a plurality of flow balancing holes are distributed on the baffle plate.

[0013] In some embodiments of the present invention, a plurality of baffles are distributed along the circumference of the diffuser structure.

[0014] In some embodiments of the present invention, the filter tube includes a mounting section and a filtering section which are connected to each other; the mounting section is connected to the faceplate, and the wall thickness of the mounting section is greater than the wall thickness of the filtering section.

[0015] In some embodiments of the present invention, the faceplate is threadedly connected to the mounting section.

[0016] In some embodiments of the present invention, the installation section has no filter holes.

[0017] In some embodiments of the utility model, a hollow plate is arranged below the filter tube, and the lower end of the filter tube directly or indirectly extends into the hole of the hollow plate.

[0018] In a second aspect, the utility model provides a silicon powder filter, comprising:

[0019] A tank body having a silicon powder outlet, an exhaust gas inlet and an exhaust gas outlet;

[0020] The above-mentioned filtering mechanism.

[0021] In some embodiments of the utility model, a back-blowing ring pipe is further included, and a plurality of back-blowing pipes are evenly distributed on the inner side of the back-blowing ring pipe. The back-blowing pipe is located in the exhaust chamber, and a plurality of back-blowing nozzles facing the faceplate are distributed on the back-blowing pipe.

[0022] The embodiments of the present invention have at least the following advantages or beneficial effects:

[0023] 1. The diffuser structure is used to disperse and evenly distribute the upward airflow to the surroundings, so as to evenly disperse the airflow in the central tube and prevent the occurrence of excessive local airflow.

[0024] 2. The baffle is arranged between the diffuser structure and the filter tube to prevent the high-speed airflow from directly scouring the filter tube 23.

[0025] Other features and advantages of the present invention will be set forth in the following description, and in part will become apparent from the description, or may be understood by practicing the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0027] Figure 1 It is a schematic diagram of the structure of a silicon powder filter;

[0028] Figure 2 It is a structural schematic diagram of the backflush ring pipe and the backflush pipe;

[0029] Figure 3 It is a schematic diagram of the structure of the filter tube and the flower disc;

[0030] Figure 4It is a structural schematic diagram of the diffuser structure and the baffle.

[0031] icon:

[0032] 1-tank body, 11-silicon powder outlet, 12-fluidization loosening port, 13-exhaust gas inlet, 14-exhaust gas outlet, 15-venting port, 16-manhole, 17-nitrogen inlet, 18-exhaust chamber, 19-filter chamber,

[0033] 21-disc, 22-center tube,

[0034] 23-filter tube, 231-installation section, 232-filter section,

[0035] 24-hollow plate, 25-scattering structure, 261-bell mouth, 26-baffle, 261-flow balancing hole,

[0036] 31-backflush ring pipe, 32-backflush pipe, 33-backflush nozzle. DETAILED DESCRIPTION

[0037] In the following, only some exemplary embodiments are briefly described. As those skilled in the art can appreciate, the described embodiments can be modified in various different ways without departing from the spirit or scope of the embodiments of the present invention.

[0038] In the description of the embodiments of the present invention, it needs to be understood that the terms "upper", "lower", "bottom", "inner", "outer", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present invention.

[0039] In addition, the term "plurality" means two or more than two, unless clearly and specifically defined otherwise.

[0040] In the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral body; it can be directly connected, or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0041] The embodiments of the present utility model are described in detail below with reference to the accompanying drawings.

[0042] Example 1

[0043] See also Figure 1 to Figure 3 This embodiment provides a silicon powder filter, including a tank body 1, a filtering mechanism and a back-blowing mechanism. The filtering mechanism is used to filter the silicon powder in the polysilicon tail gas, and the back-blowing mechanism clears the filtering mechanism with the help of reverse airflow.

[0044] The tank body 1 has a plurality of interfaces, such as a silicon powder outlet 11 , a fluidizing loosening port 12 , an exhaust gas inlet 13 , an exhaust gas outlet 14 , a venting port 15 , a manhole 16 and a nitrogen inlet 17 .

[0045] The filtering mechanism includes a faceplate 21 , a central tube 22 , a filter tube 23 and a hollow plate 24 .

[0046] The faceplate 21 is disposed at the upper inner portion of the tank body 1 , and the faceplate 21 divides the interior of the tank body 1 into an exhaust chamber 18 and a filter chamber 19 from top to bottom.

[0047] The central tube 22 is disposed in the filter chamber 19 , with its lower end connected to the exhaust gas inlet 13 and its upper end close to the bottom center of the faceplate 21 .

[0048] The filter tube 23 is arranged in the filter chamber 19 between the flower disc 21 and the hollow plate 24. The gas in the exhaust gas passes through the exhaust gas inlet 13, the central tube 22, the filter tube 23, the exhaust chamber 18 and the exhaust gas outlet 14 in sequence. The silicon powder in the exhaust gas is blocked by the filter tube 23 in the filter chamber 19 and falls and is discharged from the silicon powder outlet 11.

[0049] The filter tube 23 includes a mounting section 231 and a filtering section 232 which are connected to each other; the mounting section 231 is connected to the faceplate 21, and the wall thickness of the mounting section 231 is greater than the wall thickness of the filtering section 232. Specifically, the faceplate 21 is provided with a connecting hole (not marked in the figure) matching the mounting section 231, and the mounting section 231 is threadedly connected to the connecting hole. Preferably, the mounting section 231 does not have a filtering hole. Through the provision of the mounting section 231, the upper end (root) of the filter tube 23 is structurally strengthened (there was no mounting section 231 with the above structural features before), so as to prevent the upper end of the filter tube 23 from being easily worn and damaged by the airflow carrying silicon powder.

[0050] The hollow plate 24 is arranged below the filter tube 23, and the lower end of the filter tube 23 directly or indirectly extends into the hole of the hollow plate 24, so as to limit the swing of the lower end of the filter tube 23 through the hollow plate 24, thereby preventing the upper end of the filter tube 23 from breaking due to excessive vibration.

[0051] The back-blowing mechanism includes a back-blowing ring pipe 31 , a back-blowing pipe 32 and a back-blowing nozzle 33 .

[0052] The back-blowing ring pipe 31 is arranged inside or outside the tank body 1 , and a plurality of (18) back-blowing pipes 32 are evenly distributed on the inner side of the back-blowing ring pipe 31 . The back-blowing pipe 32 is located in the exhaust chamber 18 , and a plurality of back-blowing nozzles 33 facing the faceplate 21 are distributed on the back-blowing pipe 32 .

[0053] Example 2

[0054] See also Figure 1 to Figure 4 Different from the first embodiment, the filtering mechanism of the present embodiment further includes a diffuser structure 25 and a baffle plate 26 .

[0055] The diffuser structure 25 is disposed at the upper end of the central tube 22. The diffuser structure 25 is used to evenly disperse the airflow of the central tube 22 to prevent excessive local airflow. Specifically, the diffuser structure 25 includes a plurality of vertically spaced bell mouths 261, and the airflow can be discharged from each bell mouth 261.

[0056] The baffle plate 26 is arranged between the diffuser structure 25 and the filter tube 23 to prevent the high-speed airflow from directly scouring the filter tube 23. A plurality of baffle plates 26 are distributed along the circumference of the diffuser structure 25, and a plurality of flow-balancing holes 261 are distributed on the baffle plates 26 to block and evenly distribute the high-speed airflow, thereby reducing the hidden dangers caused by the airflow directly scouring the filter tube 23.

[0057] In combination with the above content, the above silicon powder filter has at least the following beneficial effects:

[0058] 1. By setting the installation section 231, the upper end of the filter tube 23 is structurally strengthened (previously, the installation section 231 with the above structural features was not provided), so as to prevent the upper end of the filter tube 23 from being easily worn and damaged by the silicon powder-carrying airflow.

[0059] Second, the hollow plate 24 is used to limit the swing of the lower end of the filter tube 23 to prevent the upper end of the filter tube 23 from breaking due to excessive vibration.

[0060] 3. The back-blowing mechanism dredges the filtering mechanism with the help of reverse airflow; a plurality of back-blowing pipes 32 are evenly distributed on the inner side of the back-blowing ring pipe 31, and the back-blowing pipes 32 are located in the exhaust chamber 18. A plurality of back-blowing nozzles 33 facing the faceplate 21 are distributed on the back-blowing pipes 32 to achieve a good back-blowing dredging effect.

[0061] Fourth, the flow dispersion structure 25 is used to disperse and evenly distribute the upward airflow to the surroundings, so as to evenly disperse the airflow in the central tube 22 and prevent the occurrence of excessive local airflow.

[0062] 5. The baffle plate 26 is arranged between the diffuser structure 25 and the filter tube 23 to prevent the high-speed airflow from directly scouring the filter tube 23.

[0063] 6. Multiple baffles 26 are distributed along the circumference of the diffuser structure 25. Multiple flow equalization holes 261 are distributed on the baffles 26 to block and evenly distribute the high-speed airflow, further reducing the hidden dangers caused by the airflow directly scouring the filter tube 23, and at the same time, preventing the baffles 26 from being damaged by the high-speed airflow.

[0064] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may be subject to various modifications and variations. In the absence of conflicts, the embodiments of the present application and the features in the embodiments may be combined with each other at will. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A filtering mechanism, characterized in that: include: A faceplate is arranged on the inner upper part of the tank body, and the faceplate divides the interior of the tank body into an exhaust chamber and a filter chamber from top to bottom; A central tube is arranged in the filter chamber, wherein the lower end of the central tube is connected to the exhaust gas inlet and the upper end of the central tube is close to the bottom center of the faceplate; A filter tube, arranged in the filter chamber, for filtering silicon powder in the exhaust gas; A flow dispersion structure, arranged at the upper end of the central tube, for uniformly dispersing the airflow of the central tube; The baffle is arranged between the diffuser structure and the filter tube.

2. The filtering mechanism according to claim 1, characterized in that: The flow dispersion structure comprises a plurality of bell mouths arranged at intervals in the vertical direction, and the air flow can be discharged from each of the bell mouths.

3. The filtering mechanism according to claim 1, characterized in that: A plurality of flow balancing holes are distributed on the baffle plate.

4. The filtering mechanism according to claim 1, characterized in that: The plurality of baffles are distributed along the circumference of the flow dispersion structure.

5. The filtering mechanism according to claim 1, characterized in that: The filter tube comprises a mounting section and a filtering section which are connected to each other; the mounting section is connected to the faceplate, and the wall thickness of the mounting section is greater than the wall thickness of the filtering section.

6. The filtering mechanism according to claim 5, characterized in that: The faceplate is threadedly connected to the mounting section.

7. The filtering mechanism according to claim 5, characterized in that: The installation section has no filter holes.

8. The filtering mechanism according to any one of claims 1 to 7, characterized in that: A hollow plate is arranged below the filter tube, and the lower end of the filter tube directly or indirectly extends into the hole of the hollow plate.

9. A silicon powder filter, characterized in that: include: A tank body having a silicon powder outlet, an exhaust gas inlet and an exhaust gas outlet; A filter mechanism as claimed in any one of claims 1 to 8.

10. The silicon powder filter according to claim 9, characterized in that: It also includes a back-blowing ring pipe, a plurality of back-blowing pipes are evenly distributed on the inner side of the back-blowing ring pipe, the back-blowing pipe is located in the exhaust chamber, and a plurality of back-blowing nozzles facing the faceplate are distributed on the back-blowing pipe.

Images