Fluid control device and negative pressure equipment

Abstract

The utility model relates to a fluid control device and negative pressure equipment. The fluid control device comprises a shell, a containing space is formed in the shell, and the shell is provided with an air inlet and an air outlet which are communicated with the containing space; the vibration unit is contained in the containing space, the vibration unit comprises a vibration driving body, a first structural layer, a second structural layer, a vibration body and a one-way breathable layer which are arranged in a stacked mode, and an air inlet channel is defined by the first structural layer and the second structural layer; the first structural layer is provided with a first hole part, the second structural layer is provided with a second hole part, the vibrating body is provided with a third hole part aligned with the second hole part, the air inlet channel is communicated with the air inlet through the first hole part, and the one-way breathable layer is arranged on the vibrating body and covers the third hole part. According to the scheme, the composition structure of the air inlet channel can be simplified, and the sealing performance of the air inlet channel is improved.

Description

Technical Field

[0001] The present application relates to the field of fluid delivery technology, and in particular to a fluid control device and a negative pressure device. Background Art

[0002] The fluid control device is a new type of fluid driver with the advantages of simple structure, small size, light weight, low energy consumption, no noise, no electromagnetic interference, etc., and can control the output of tiny flow according to the applied voltage or frequency.

[0003] In the related art, the fluid driving unit of the fluid control device is formed by stacking a number of sheet structures in sequence, and each functional component is located at a different structural layer. The structure of the fluid driving chamber has many layers and the assembly process is complicated. Utility Model Content

[0004] In order to solve or partially solve the problems existing in the related art, the present application provides a fluid control device and a negative pressure device, which can simplify the composition structure of the fluid driving chamber and improve the sealing performance of the fluid driving chamber.

[0005] A first aspect of the present application provides a fluid control device, comprising:

[0006] A housing having a storage space therein, and the housing is provided with an air inlet and an air outlet communicated with the storage space;

[0007] a vibration unit, contained in the accommodation space, the vibration unit comprising a stacked vibration driving body, a first structural layer, a second structural layer, a vibration body and a one-way air permeable layer, wherein the first structural layer and the second structural layer define an air inlet channel;

[0008] The first structural layer is provided with a first hole portion, the second structural layer is provided with a second hole portion, the vibrating body is provided with a third hole portion aligned with the second hole portion, the air intake passage is connected with the air intake port through the first hole portion, and the one-way air permeable layer is provided on the vibrating body and covers the third hole portion.

[0009] In some embodiments, the first structural layer or the second structural layer is provided with a connecting portion, the first structural layer and the second structural layer are fixedly connected at the connecting portion, and the first structural layer, the second structural layer and the connecting portion enclose the air intake channel.

[0010] In some embodiments, the first structural layer includes a first main body and a first flange protruding from the periphery of the first main body toward the second structural member, the first flange forms the connecting portion, a first adhesive layer is provided between the connecting portion and the second structural layer, and the connecting portion is sealed and connected to the second structural layer through the first adhesive layer.

[0011] In some embodiments, the second structural member includes a second main body and a second flange protruding from the periphery of the second main body toward the first structural member, the second flange forms the connecting portion, a second adhesive layer is provided between the connecting portion and the first structural layer, and the connecting portion is sealed and connected to the first structural layer through the second adhesive layer.

[0012] In some embodiments, an air inlet cavity and an exhaust cavity are provided in the accommodation space, the air inlet cavity and the exhaust cavity are respectively located on both sides of the vibration unit in the vibration direction, the air inlet cavity is communicated with the air inlet port, and the exhaust cavity is communicated with the exhaust port;

[0013] The vibration driving body, the first structural layer and the second structural layer are arranged on a side of the vibration body facing the air inlet cavity, and the air permeability direction of the one-way air permeable layer faces the air exhaust cavity.

[0014] In some embodiments, the vibration driving body is arranged in the middle of the first structural layer, the first hole portion includes a plurality of first through holes, and the plurality of first through holes are arranged along the outer circumference of the vibration driving body; the second hole portion includes a plurality of second through holes, and the plurality of second through holes are arranged in the middle of the second structural layer.

[0015] In some embodiments, a gap is formed between the first structural layer and the second structural layer, the gap is the air intake channel, and the gap is 0.05 mm-0.4 mm.

[0016] In some embodiments, the side of the first structural layer facing away from the second structural layer is fixedly connected to the vibration driving body, and the vibration driving body is connected to the first electrode; the side of the second structural layer facing away from the first structural layer is fixedly connected to the vibration body, and the vibration body is connected to the second electrode;

[0017] Among them, the vibration driving body, the first structural layer, the second structural layer, the vibrating body and the second electrode are circular sheets and are stacked in sequence. The one-way air permeable layer is arranged between the vibrating body and the second electrode, and the second electrode is provided with a fourth hole portion aligned with the third hole portion.

[0018] In some embodiments, the vibration driving body, the first structural layer, the second structural layer and the vibration body are arranged along the same center line, the second structural layer is fixed to the middle of the vibration body, and the outer periphery of the vibration body is fixed to the inner wall of the shell.

[0019] A second aspect of the present application provides a negative pressure device, comprising the fluid control device as described in the first aspect above.

[0020] The technical solution provided by this application may have the following beneficial effects:

[0021] The solution provided by the present application can allow external gas to flow in from the air inlet when the vibration unit vibrates, and be discharged to the outside from the exhaust port after passing through the air inlet channel and the one-way air permeable membrane. Since the first structural layer and the second structural layer of the air inlet channel are limited to a two-layer structure, not only the component structure of the air inlet channel can be simplified, but also the thickness of the fluid control device can be reduced, thereby avoiding the defect in the related art that the air inlet channel is composed of three or more structural layers, resulting in a complex assembly process and a large thickness of the fluid control device.

[0022] It should be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The above and other objects, features and advantages of the present application will become more apparent through a more detailed description of exemplary embodiments of the present application in conjunction with the accompanying drawings, wherein the same reference numerals generally represent the same components in the exemplary embodiments of the present application.

[0024] Figure 1 is a schematic diagram of the external structure of a fluid control device shown in an embodiment of the present application;

[0025] Figure 2 is an exploded view of a fluid control device shown in an embodiment of the present application;

[0026] Figure 3 is a schematic diagram of the coordination of a first structural member and a second structural member of a fluid control device shown in an embodiment of the present application;

[0027] Figure 4 is a schematic structural diagram of an air intake passage of a fluid control device shown in an embodiment of the present application;

[0028] Figure 5 It is a cross-sectional view of the air intake passage of the fluid control device shown in the embodiment of the present application.

[0029] Figure numerals: 100, shell; 101, air inlet; 1101, first hole portion; 1102, air inlet channel; 102, exhaust port; 103, cover body; 104, bottom shell; 110, first structural member; 111, vibration driving body; 113, first electrode; 120, second structural member; 1201, second hole portion; 1202, connecting portion; 130, vibrating body; 140, one-way air permeable layer; 150, second electrode; 105, air inlet cavity; 106, exhaust cavity. DETAILED DESCRIPTION

[0030] The preferred embodiments of the present application will be described in more detail below with reference to the accompanying drawings. Although the preferred embodiments of the present application are shown in the accompanying drawings, it should be understood that the present application can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to make the present application more thorough and complete, and to fully convey the scope of the present application to those skilled in the art.

[0031] The terms used in this application are for the purpose of describing specific embodiments only and are not intended to limit this application. The singular forms of "a", "said" and "the" used in this application and the appended claims are also intended to include plural forms unless the context clearly indicates other meanings. It should also be understood that the term "and / or" used herein refers to and includes any or all possible combinations of one or more associated listed items.

[0032] It should be understood that although the terms "first", "second", "third", etc. may be used in this application to describe various information, this information should not be limited to these terms. These terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of this application, the first information may also be referred to as the second information, and similarly, the second information may also be referred to as the first information. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0033] In the description of the present application, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0034] Unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0035] In the related art, the fluid driving unit of the fluid control device is formed by stacking a number of sheet structures in sequence, each functional component is located in a different structural layer, the number of layers of the composition structure of the fluid driving chamber is large, and the assembly process is complicated. In view of the above problems, the embodiment of the present application provides a fluid control device, which simplifies the composition structure of the air intake channel, improves the sealing performance of the air intake channel, and avoids the defect of the related art that the air intake channel adopts three or more structural layers, which leads to a complex assembly process of the fluid control device.

[0036] The technical solution of the embodiments of the present application is described in detail below with reference to the accompanying drawings.

[0037] See also Figure 1-Figure 5 The fluid control device of this embodiment includes a housing 100, wherein the housing 100 has a storage space, and the housing 100 is provided with an air inlet 101 and an air outlet 102 communicated with the storage space; a vibration unit is accommodated in the storage space 105, and the vibration unit includes a stacked vibration driving body 111, a first structural layer 110, a second structural layer 120, a vibration body 130 and a one-way air permeable layer 140, and the first structural layer 110 and the second structural layer 120 define an air inlet channel 1102 ( Figure 4 and Figure 5 Shown); the first structural layer 110 is provided with a first hole portion 1101, the second structural layer is provided with a second hole portion 1201, the vibrating body 130 is provided with a third hole portion 1301 aligned with the second hole portion 1201, the air intake passage 1102 is connected with the air intake port 101 through the first hole portion 1101, and the one-way air permeable layer 140 is provided on the vibrating body 130 and covers the third hole portion 1201.

[0038] According to the solution of the embodiment of the present application, when the vibration driving body 111 vibrates, external gas can flow in from the air inlet 101, pass through the air inlet channel 1102 and the one-way air permeable layer 140, and then be discharged to the outside from the exhaust port 102. Since the first structural layer 110 and the second structural layer 120 of the air inlet channel 1102 are defined as a two-layer structure, it is possible to not only simplify the component structure of the air inlet channel 1102 and improve the sealing performance of the air inlet channel, but also reduce the thickness of the fluid control device, thereby avoiding the defect in the related art that the air inlet channel adopts three or more structural layers, resulting in a complex assembly process and a large thickness of the fluid control device.

[0039] Continue to see Figure 3 and Figure 4In this embodiment, an air inlet cavity 105 and an exhaust cavity 106 are formed in the shell 100, and the air inlet cavity 105 and the exhaust cavity 106 are respectively located on both sides of the vibration unit in the vibration direction, the vibration direction is the thickness direction of the fluid control device, the air inlet cavity 105 is connected with the air inlet port 101, and the exhaust cavity 106 is connected with the exhaust port 102; in this embodiment, the vibration driving body 111, the first structural layer 110, and the second structural layer 120 are arranged on the side of the vibration body 130 facing the air inlet cavity 105, and the air permeability direction of the unidirectional air permeable layer 140 is toward the exhaust cavity 106, and the unidirectional air permeable layer 140 can be a unidirectional air permeable film. The air inlet side of the first hole portion 1101 of the first structural layer 110 is located in the space where the air inlet cavity 105 is located. When the vibration unit vibrates, the air in the air inlet cavity 105 enters the air inlet channel 1102 through the first hole portion 1011 under the action of negative pressure; the second hole portion 1201 of the second structural layer 120 is connected to the exhaust cavity 106, and the airflow derived from the second hole portion 1201 first enters the exhaust cavity 106, and then is derived from the exhaust port 102 to the outside of the shell. Since the air inlet cavity 105 and the exhaust cavity 106 are respectively located on both sides of the vibration unit in the vibration direction, and the vibration direction is the thickness direction of the fluid control device, the setting of the air inlet cavity 105 and the exhaust cavity 106 can not only provide space for the vibration of the vibration unit, but also enable the airflow to enter the air inlet channel 1102 more smoothly and be discharged more smoothly under the action of negative pressure.

[0040] See also Figure 2 In this embodiment, the shell 100 includes a bottom shell 104 and a cover body 103. A storage space is formed inside the bottom shell 104, and the cover body 103 covers the opening of the storage space. The air inlet 101 and the air outlet are arranged on the bottom shell 104, and are arranged at relative positions on the outer periphery of the bottom shell 104.

[0041] See also Figure 4 The first structural layer 110 or the second structural layer 120 is provided with a connecting portion 1202, and the first structural layer 110 and the second structural layer 120 are fixedly connected at the connecting portion 1202, and the first structural layer 110, the second structural layer 120 and the connecting portion 1202 enclose an air intake channel 1102; in this embodiment, the connecting portion 1202 and the first structural layer 110 are an integral structure, or the connecting portion 1202 and the second structural layer 120 are an integral structure, therefore, the air intake channel 1102 can be formed after the first structural layer 110 and the second structural layer 120 are connected, which is easy to process and the assembly process is more simplified.

[0042] In some embodiments, the first structural layer 110 includes a first main body and a first flange protruding from the periphery of the first main body toward the second structural member 120, and the first flange forms a connecting portion 1202; or, the first structural layer 110 includes a first main body and a first groove opened in the middle of the first main body, and the first main body outside the first groove forms a connecting portion 1202, and the first main body and the second structural layer 120 are separated by a set interval through the connecting portion 1202 to form an intake channel 1102. Among them, a first adhesive layer 121 is provided between the connecting portion 1202 and the second structural layer 120, and the connecting portion 1202 is sealed and connected to the second structural layer 120 through the first adhesive layer 121. In this way, by providing a layer of adhesive layer on the first structural layer 110 to be bonded to the second structural layer 120, the assembly of the first structural layer 110 and the second structural layer 120 can be achieved, which is not only more convenient to assemble, but also has better sealing performance, and avoids the defect of using a separate connecting portion 1202 in the related art that requires multiple layers of bonding and leads to complex processes.

[0043] In some embodiments, the second structural layer 120 includes a second body and a second flange protruding from the periphery of the second body toward the first structural layer 110, and the second flange forms a connecting portion 1202; or, the second structural layer 120 includes a second body and a second groove opened in the middle of the second body, and the second body outside the second groove forms a connecting portion 1202. The second body and the first structural layer 110 are separated by a set interval through the connecting portion 1202 to form an air intake channel 1102; or the space in the second groove is used to form the air intake channel 1102. Among them, a second adhesive layer is provided between the connecting portion 1202 and the first structural layer 110, and the connecting portion 1202 is sealed and connected to the first structural layer 110 through the second adhesive layer. In this way, by providing a layer of adhesive layer on the second structural layer 120 to be bonded to the first structural layer 110, the assembly of the first structural layer 110 and the second structural layer 120 can be realized, which is not only more convenient to assemble, but also has better sealing performance, avoiding the defect of using a separate connecting portion 1202 in the related art that requires multiple layers of bonding and leads to complex processes.

[0044] In some embodiments, a gap is formed between the first structural layer 110 and the second structural layer 120, the gap is the air inlet channel 1102, and the gap is 0.05mm-0.4mm. In this way, the gas flow rate passing through the air inlet channel 1102 per unit time can be increased while ensuring that the first structural layer 110 and the second structural layer 120 have a small thickness.

[0045] See also Figure 2 and Figure 3The side of the first structural layer 110 facing away from the second structural layer 120 is fixedly connected to the vibration driving body 111, and the vibration driving body 111 is connected to the first electrode 113; the side of the second structural layer 120 facing away from the first structural layer 110 is fixedly connected to the vibration body 130, and the vibration body 130 is connected to the second electrode 150; wherein, the vibration driving body 111, the first structural member 110, the second structural member 120, the vibration body 130 and the second electrode 150 are circular sheets and are stacked in sequence, which can reduce the overall thickness of the vibration unit and improve the connection sealing of the intake passage 1102. The one-way air permeable layer 140 is disposed between the vibrating body 130 and the second electrode 150. The second electrode 150 is provided with a fourth hole portion 1501 aligned with the third hole portion 1301. The gas in the air intake passage 1201 passes through the second hole portion 1201, the third hole portion 1301, the one-way air permeable layer 140, and the fourth hole portion 1501 and then enters the exhaust chamber 106. The present application realizes the one-way flow of the airflow through the one-way air permeable layer 140, that is, the airflow can flow from the air intake side to the exhaust side, but cannot flow from the exhaust side to the air intake side. Since the one-way air permeable layer 140 is disposed between the vibrating body 130 and the second electrode 150, the one-way air permeable layer 140 can be clamped after the vibrating body 130 and the second electrode 150 are fixed, thereby ensuring the stability of the one-way air permeable layer 140 during the vibration process.

[0046] See also Figure 2 and Figure 5 In some embodiments, the first hole portion 1101 is disposed on the first structural layer 110 in an area outside the vibration driving body 111, and the airflow can enter the air inlet channel 1102 from the first hole portion 1101. Specifically, the vibration driving body 111 is disposed in the middle of the first structural layer 110, and the first hole portion 1101 includes a plurality of first through holes, and the plurality of first through holes are disposed along the periphery of the vibration driving body 111. With such an arrangement, the airflow can enter different areas of the air inlet channel 1102 from the plurality of first through holes on the periphery of the vibration driving body 111, which can reduce the airflow path and resistance, so that the airflow can fill the air inlet channel 1201 more quickly.

[0047] In some embodiments, the second hole portion 1201 includes a plurality of second through holes, the plurality of second through holes are arranged in the middle of the second structural layer 120, the third hole portion 1301 includes a plurality of third through holes, the fourth hole portion 1501 includes a plurality of fourth through holes, the second through holes, the third through holes and the fourth through holes are relatively located, and the exhaust side of the fourth through holes is located within the space where the exhaust cavity 106 is located. When the vibration unit vibrates, the air in the air intake channel 1102 can be discharged to the exhaust cavity 106 through the relatively located second through holes, the third through holes and the fourth through holes. Since the second hole portion 1201 is arranged in the middle of the second structural layer 120, and the plurality of first through holes of the first hole portion 1101 are arranged in a ring shape, the second hole portion 1201 is arranged corresponding to the center of the plurality of first through holes, so that the airflow entering from the plurality of first through holes can quickly flow to the second through holes, thereby improving the flow speed of the airflow between the air intake cavity 105 and the exhaust cavity 106.

[0048] In some embodiments, the material of the vibration driver 111 is piezoelectric ceramic.

[0049] See also Figure 3 In some embodiments, the diameter of the vibration driver 111 is smaller than the first structure layer 110, the diameter of the first structure layer 110 may be equal to the diameter of the second structure layer 120, and the diameters of the first structure layer 110 and the second structure layer 120 are smaller than the diameter of the vibration body 130. The vibration transmission area of ​​the vibration driver 111 can be increased without affecting the intake volume, and the connection stability between the first structure layer 110 and the second structure layer 120 and the sealing of the intake passage 1102 can be improved. The vibration driver 111, the first structure layer 110, the second structure layer 120 and the vibration body 130 are arranged along the same center line, the second structure layer 120 is fixed to the middle of the vibration body 130, and the outer periphery of the vibration body 130 is fixed to the inner side wall of the housing 100. Specifically, a support platform is provided on the inner side of the bottom shell 104, the outer periphery of the vibration body 130 is supported and fixed to the support platform, and the vibration driver 111, the first structure layer 110, and the second structure layer 120 are fixed and carried on the vibration body 130. In this way, the installation stability of the vibration unit in the housing can be ensured, and the vibration driving body 111 , the first structure layer 110 , the second structure layer 120 and the vibration body 130 can be vibrated at a resonance frequency.

[0050] In some embodiments, the vibration driver 111 is fixed to the first structure layer 110, for example, via the third adhesive layer 112. The second structure layer 120 is bonded to the vibration body 130 via the fourth adhesive layer 131, the terminal of the first electrode 113 is bonded to the cover 103 via the fifth adhesive layer 114, the main body of the second electrode 150 is bonded to the vibration body 130 via the sixth adhesive layer, and the terminal 153 of the second electrode 150 is bonded to the bottom shell 104 via the seventh adhesive layer 152.

[0051] The working principle of the present application is as follows: when an alternating voltage is applied to the first electrode 113 and the second electrode 151, the vibration driver 111 vibrates. Since the first structure layer 110 is fixedly connected to the second structure layer 120, and the second structure layer 120 is fixedly connected to the vibration body, the vibration generated by the vibration driver 111 is transmitted to the vibration body 130 to vibrate the vibration body 130, that is, the vibration driver 111 is equivalent to a driver that causes the vibration body 130 to vibrate. When an alternating voltage of a specified frequency is applied, the first structure layer 110, the second structure layer 120 and the vibration body 130 are driven to vibrate at their resonant frequencies. Since the one-way air permeable layer 140 is disposed on the vibration body 130, the vibration body 130 drives the one-way air permeable layer 140 to vibrate at the same frequency. When the vibrating body 130 vibrates toward the exhaust side, the space on the exhaust side is compressed, so that the air on the exhaust side is discharged through the exhaust port 102; when the vibrating body 130 vibrates toward the intake side, external air is sucked into the exhaust side through the intake passage 1102 and the one-way air permeable layer 140. Due to the reciprocating vibration of the vibrating body 130 in opposite directions, external air can be continuously sucked in from the upstream intake port 101 and discharged to the outside from the downstream exhaust port 102.

[0052] The present application also provides a negative pressure device, including the fluid control device as described in the above embodiment. The features of the fluid control device refer to the description of the above embodiment and will not be repeated here.

[0053] The negative pressure device of the present application can be used for gas absorption, analysis device, breast pump, medical negative pressure adsorbent, massager, electrode adsorption device, etc.

[0054] The embodiments of the present application have been described above, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The selection of terms used herein is intended to best explain the principles of the embodiments, practical applications, or improvements to the technology in the market, or to enable other persons of ordinary skill in the art to understand the embodiments disclosed herein.

Claims

1. A fluid control device, characterized in that: include: A housing having a storage space therein, and the housing is provided with an air inlet and an air outlet communicated with the storage space; a vibration unit, contained in the accommodation space, the vibration unit comprising a stacked vibration driving body, a first structural layer, a second structural layer, a vibration body and a one-way air permeable layer, wherein the first structural layer and the second structural layer define an air inlet channel; The first structural layer is provided with a first hole portion, the second structural layer is provided with a second hole portion, the vibrating body is provided with a third hole portion aligned with the second hole portion, the air intake passage is connected with the air intake port through the first hole portion, and the one-way air permeable layer is provided on the vibrating body and covers the third hole portion.

2. The fluid control device according to claim 1, characterized in that: The first structural layer or the second structural layer is provided with a connecting portion, the first structural layer and the second structural layer are fixedly connected at the connecting portion, and the first structural layer, the second structural layer and the connecting portion enclose the air intake channel.

3. The fluid control device according to claim 2, characterized in that: The first structural layer includes a first main body and a first flange protruding from the periphery of the first main body toward the second structural member, the first flange forms the connecting portion, a first adhesive layer is provided between the connecting portion and the second structural layer, and the connecting portion is sealed and connected to the second structural layer through the first adhesive layer.

4. The fluid control device according to claim 2, characterized in that: The second structural member includes a second main body and a second flange protruding from the periphery of the second main body toward the first structural member, the second flange forms the connecting portion, a second adhesive layer is provided between the connecting portion and the first structural layer, and the connecting portion is sealed and connected to the first structural layer through the second adhesive layer.

5. The fluid control device according to claim 1, characterized in that: An air inlet cavity and an air exhaust cavity are provided in the accommodation space, the air inlet cavity and the air exhaust cavity are respectively located on both sides of the vibration unit in the vibration direction, the air inlet cavity is communicated with the air inlet port, and the air exhaust cavity is communicated with the air exhaust port; The vibration driving body, the first structural layer and the second structural layer are arranged on a side of the vibration body facing the air inlet cavity, and the air permeability direction of the one-way air permeable layer faces the air exhaust cavity.

6. The fluid control device according to claim 1, characterized in that: The vibration driving body is arranged in the middle of the first structural layer, the first hole portion includes a plurality of first through holes, and the plurality of first through holes are arranged along the outer circumference of the vibration driving body; the second hole portion includes a plurality of second through holes, and the plurality of second through holes are arranged in the middle of the second structural layer.

7. The fluid control device according to claim 1, characterized in that: A gap is formed between the first structural layer and the second structural layer, the gap is the air intake channel, and the gap is 0.05 mm-0.4 mm.

8. The fluid control device according to claim 1, characterized in that: The side of the first structural layer facing away from the second structural layer is fixedly connected to the vibration driving body, and the vibration driving body is connected to the first electrode; the side of the second structural layer facing away from the first structural layer is fixedly connected to the vibration body, and the vibration body is connected to the second electrode; Among them, the vibration driving body, the first structural layer, the second structural layer, the vibrating body and the second electrode are circular sheets and are stacked in sequence. The one-way air permeable layer is arranged between the vibrating body and the second electrode, and the second electrode is provided with a fourth hole portion aligned with the third hole portion.

9. The fluid control device according to claim 1, characterized in that: The vibration driving body, the first structural layer, the second structural layer and the vibration body are arranged along the same center line, the second structural layer is fixed to the middle of the vibration body, and the outer periphery of the vibration body is fixed to the inner wall of the shell.

10. A negative pressure device, characterized in that: Comprising the fluid control device as described in any one of claims 1-9.

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