Cutting device for photomask sample
By designing a photocoat sample cutting device including cutting blocks and pressure blocks, the problem of lack of photocoat cutting technology in the prior art is solved, high-quality contactless cutting of photocoat samples is achieved, and analysis accuracy is improved.
Patent Information
- Application Number
- CN202420633105.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-29
- Publication Date
- 2025-03-07
- Estimated Expiration
- 2034-03-29
AI Technical Summary
The prior art lacks effective photocap cutting technology or tools, and cannot cut the photocap, and thus cannot realize the analytical design of the photocap cutting surface.
A cutting device for a photocoat sample is provided, including a base, a threaded rod, a clamping mechanism, a pressure block and other components. By setting the cutting block and a pressure block, contactless cutting of the photocoat sample is achieved.
High-quality cutting of the mask sample is achieved, preventing cutting surface damage, improving cutting quality and analysis accuracy.
Smart Images
Figure CN222579640U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of photomask cutting, in particular to a photomask sample cutting device. Background Art
[0002] With the continuous development of semiconductor technology, the demand for semiconductor chip types is increasing. As a key tool for semiconductor chip production, the mask can transfer the designed pattern to the surface of the semiconductor chip, thereby manufacturing an integrated circuit with specific functions. In order to meet the diversified development needs of semiconductor chips, it is necessary to cut and analyze the mask samples.
[0003] Currently, there is a lack of mask cutting technology or tools in the market, so the mask cannot be cut, and thus the analysis and design of the mask cutting surface cannot be realized. Therefore, there is room for improvement. Utility Model Content
[0004] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a photomask sample cutting device, which can cut the photomask sample and facilitate the analysis and design of the cut surface of the photomask sample.
[0005] In order to solve the above technical problems, the utility model is realized by the following technical solutions:
[0006] The utility model provides a photomask sample cutting device, comprising:
[0007] a base, wherein a cutting block is formed on the base;
[0008] A threaded rod, sleeved on the base;
[0009] A clamping mechanism, provided on the threaded rod; and
[0010] A plurality of pressure blocks are arranged on the bottom side of the clamping mechanism;
[0011] Wherein, when the pressure block contacts the surface of the photomask sample, there is a gap between the bottom end of the threaded rod and the photomask sample.
[0012] In one embodiment of the utility model, the cutting device further comprises:
[0013] a handle disposed at one end of the threaded rod; and
[0014] The elastic member is sleeved on the threaded rod, and the elastic member is located between the base and the clamping mechanism.
[0015] In an embodiment of the present invention, the cutting block is fixedly connected to the base, a protrusion is provided on the cutting block, and the cutting block is placed with the protrusion facing upwards.
[0016] In an embodiment of the utility model, the threaded rod is threadably matched with the base.
[0017] In one embodiment of the utility model, the clamping mechanism comprises:
[0018] A fixed seat, rotatably connected to the threaded rod;
[0019] A plurality of clamping blocks, slidably connected to the fixing seat; and
[0020] A plurality of locking members, passing through the clamping block and the fixing seat in sequence, and the locking members are detachably connected to the fixing seat;
[0021] Wherein, two adjacent clamping blocks are symmetrically arranged.
[0022] In an embodiment of the utility model, a central through hole is formed on the fixing seat, a limiting member is arranged in the central through hole, and the threaded rod and the fixing seat are rotatably connected via the limiting member.
[0023] In an embodiment of the present invention, the limiting member is fixedly sleeved on the threaded rod, and the outer side wall of the limiting member is interference fit with the inner side wall of the central through hole.
[0024] In an embodiment of the present invention, the limiting member is a rolling bearing.
[0025] In an embodiment of the present invention, the pressure block is fixedly connected to the fixing seat, and a plurality of the pressure blocks are symmetrically arranged.
[0026] In an embodiment of the present invention, the handle is detachably connected to the threaded rod.
[0027] As described above, the utility model provides a cutting device for a mask sample, which can cut the mask sample and facilitate the analysis and design of the cut surface of the mask sample. The unexpected technical effect is: the utility model can realize non-contact cutting of the mask sample by setting a cutting block and a pressure block, prevent damage to the cut surface of the mask sample during the cutting process, improve the cutting quality of the mask sample, and thereby improve the analysis accuracy of the cut surface of the mask sample. BRIEF DESCRIPTION OF THE DRAWINGS
[0028] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for describing the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.
[0029] Figure 1Shown is a schematic diagram of the overall structure of a photomask sample cutting device of the utility model;
[0030] Figure 2 Display as Figure 1 Side view of
[0031] Figure 3 Display as Figure 1 Schematic diagram of the local structure;
[0032] Figure 4 Display as Figure 3 Schematic diagram of the local structure;
[0033] Figure 5 Display as Figure 1 A partial top view of .
[0034] Component number description:
[0035] 100, cutting device; 110, base; 111, cutting block; 112, base through hole;
[0036] 120, threaded rod;
[0037] 130, clamping mechanism; 131, fixing seat; 1311, central through hole; 1312, limiting member; 1313, fixing hole;
[0038] 132, a clamping block; 1321, a clamping through hole; 133, a locking member;
[0039] 140. Pressure block; 150. Handle; 160. Elastic member. DETAILED DESCRIPTION
[0040] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0041] See also Figures 1 to 5 The utility model provides a cutting device for a mask sample, which can be applied to the cutting process of the mask sample to improve the analysis accuracy of the cut surface of the mask sample. The cutting device 100 for a mask sample may include but is not limited to a base 110, a threaded rod 120, a clamping mechanism 130, a pressure block 140, a handle 150, and an elastic member 160. The base 110 may be in the shape of a letter "7", and a cutting block 111 may be formed on the base 110.
[0042] See also Figure 1Furthermore, the cutting block 111 can be fixedly arranged at the bottom end of the base 110, and a protrusion can be arranged on the cutting block 111, and the cutting block 111 can be arranged with the protrusion facing upward, so as to place the photomask sample on the cutting block 111 and cut the photomask sample through the protrusion. The cutting block 111 can be in a prism shape or other shapes, as long as it can cooperate with the pressure block 140 to cut the photomask sample. When the cutting block 111 is in a prism shape, the cutting block 111 is placed with the tip facing upward. For example, refer to Figure 1 The cutting block 111 may be in the shape of a triangular prism, and the tip of the cutting block 111 is placed upward. In addition, a base through hole 112 may be provided at the top of the base 110, and the base through hole 112 may be a threaded hole or other types of through holes. That is, the type of the base through hole 112 may be selected according to the type of the threaded rod 120.
[0043] See also Figure 1 , Figure 2 and Figure 3 , the threaded rod 120 can be sleeved on the base 110, and the threaded rod 120 can pass through the base through hole 112 and threadedly cooperate with the base through hole 112. That is, the threaded rod 120 can be rotatably connected to the base 110 by threading with the base through hole 112. Specifically, the threaded rod 120 is provided with a partial thread to facilitate threading with the base through hole 112.
[0044] See also Figure 1 , Figure 2 and Figure 3 The clamping mechanism 130 can be disposed on the threaded rod 120, and the clamping mechanism 130 can be located between the base 110 and the cutting block 111, so as to fix the photomask sample and cooperate with the cutting block 111 to cut the photomask sample. In addition, the clamping mechanism 130 can be rotatably connected to the threaded rod 120, so as to follow the movement of the threaded rod 120, so as to fix the photomask sample, and cut the photomask sample by cooperating with the cutting block 111.
[0045] See also Figure 2 , Figure 3 and Figure 4, further, the clamping mechanism 130 may include but is not limited to a fixing seat 131, and the fixing seat 131 may be rotatably connected to the threaded rod 120. The fixing seat 131 may be in a rectangular shape or in a cube shape, but is not limited thereto, and the fixing seat 131 may also be in other shapes. A central through hole 1311 may be provided in the fixing seat 131, and a limiting member 1312 may be provided in the central through hole 1311, and a rotatable connection between the threaded rod 120 and the fixing seat 131 may be achieved through the limiting member 1312. Among them, the limiting member 1312 may be fixedly mounted on the threaded rod 120, and the outer side wall of the limiting member 1312 may be interference fit with the inner side wall of the central through hole 1311, thereby achieving a rotatable connection between the threaded rod 120 and the fixing seat 131. For example, please refer to Figure 4 The stopper 1312 may be a rolling bearing, that is, the fixing seat 131 may follow the up and down movement of the threaded rod 120 through the rolling bearing, and simultaneously realize the rotation of the threaded rod 120. However, the stopper 1312 is not limited thereto, and may also be other types of bearings, as long as it can follow the movement of the threaded rod 120 in the axial direction and facilitate the relative rotation of the threaded rod 120.
[0046] See also Figure 2 , Figure 3 and Figure 5 Furthermore, a slide groove may be formed on the fixing seat 131, and the slide groove may be symmetrically arranged on both sides of the fixing seat 131. In addition, a fixing hole 1313 may be provided on the fixing seat 131, and the fixing hole 1313 may be located on the side wall of the fixing seat 131. There may be a plurality of fixing holes 1313, and the plurality of fixing holes 1313 may be arranged evenly or irregularly, or some may be arranged evenly and the other may be arranged irregularly, that is, the specific arrangement of the fixing holes 1313 may not be specifically limited. The fixing holes 1313 may be threaded holes or other types of holes.
[0047] See also Figure 1 , Figure 2 and Figure 3 It is worth further explaining that the clamping mechanism 130 may also include a clamping block 132, and the clamping block 132 may be slidably connected to the fixing seat 131 through a slide groove, so as to realize the clamping of the photomask sample. A plurality of clamping blocks 132 may be provided, and two adjacent clamping blocks 132 may be symmetrically arranged, so as to facilitate the clamping of the photomask sample. In addition, the clamping block 132 may be L-shaped, and the L-shaped clamping block 132 may be rotated 90° clockwise, that is, the longer side of the clamping block 132 may be slidably connected to the fixing seat 131, and the shorter side of the clamping block 132 is used to clamp and fix the photomask sample. For example, please refer to Figure 1There are two clamping blocks 132, and the two clamping blocks 132 are symmetrically arranged with the center line of the fixing seat 131 as the symmetry line, so as to achieve uniform force when the mask sample is fixed.
[0048] See also Figure 1 , Figure 2 and Figure 3 , wherein the shape of the longer side of the clamping block 132 can be determined by the setting of the slide groove. For example, when the front and rear sides of the fixing seat 131 are respectively provided with slide grooves, the two sides of the longer side of the clamping block 132 can be slidably connected to the fixing seat 131 through the slide grooves. When the slide groove is provided on the bottom side of the fixing seat 131, the side of the clamping block 132 that contacts the fixing seat 131 through the slide groove can be provided in a rectangular parallelepiped. However, it is not limited thereto, and the side of the clamping block 132 that contacts the fixing seat 131 through the slide groove can also be provided in other shapes.
[0049] See also Figure 1 , Figure 2 and Figure 3 In addition, a clamping through hole 1321 may be provided on the clamping block 132, and the number of the clamping through hole 1321 is at least one, and when the clamping block 132 clamps the mask sample, the position of the clamping through hole 1321 may correspond to the fixing hole 1313. Among them, the clamping through hole 1321 may be a threaded hole or other types of holes. The aperture size of the clamping through hole 1321 and the aperture size of the fixing hole 1313 may be set according to the specific position of the clamping block 132 on the fixing seat 131. When the clamping block 132 is slidably set on the outside of the fixing seat 131, the aperture size of the clamping through hole 1321 may be greater than or equal to the aperture size of the fixing hole 1313. When the clamping block 132 is slidably set in the fixing seat 131, the aperture size of the clamping through hole 1321 may be less than or equal to the aperture size of the fixing hole 1313. For example, please refer to Figure 1 When the two sides of the longer sides of the clamping block 132 are slidably connected to the outer wall of the fixing seat 131 through the sliding grooves, the aperture of the clamping through hole 1321 on the clamping block 132 can be equal to the aperture of the fixing hole 1313.
[0050] See also Figure 1 , Figure 2 , Figure 3 and Figure 5It is worth further explaining that the clamping mechanism 130 also includes a locking piece 133. The locking piece 133 can pass through the clamping block 132 and the fixing seat 131 in sequence, and the locking piece 133 can be detachably connected to the fixing seat 131, so as to adjust the length of the clamping block 132 and the fixing seat 131 to cooperate with each other, so that the clamping mechanism 130 can clamp photomask samples of different sizes, and then the cutting device 100 can cut photomask samples of different sizes. Specifically, the locking piece 133 can cooperate with the fixing hole 1313 and the clamping through hole 1321 to achieve a detachable connection with the fixing seat 131. Among them, a plurality of locking pieces 133 can be provided, and at least one locking piece 133 is provided on each clamping block 132. The locking piece 133 can be a hexagonal head bolt or a butterfly head bolt. However, it is not limited to this, and the locking piece 133 can also be other types of bolts. For example, please refer to Figure 1 When the two sides of the longer sides of the clamping block 132 are respectively slidably connected to the outer wall of the fixing seat 131 through the sliding grooves, the fixing hole 1313 on the fixing seat 131 can be a threaded hole, the clamping through hole 1321 on the clamping block 132 can be a smooth through hole, and the locking member 133 can be in the shape of a hexagonal bolt. The locking member 133 passes through the clamping through hole 1321 and the fixing hole 1313 in sequence, and is threadedly matched with the fixing hole 1313.
[0051] See also Figure 1 , Figure 2 and Figure 3 The pressure block 140 can be arranged at the bottom side of the clamping mechanism 130 so as to move up and down with the clamping mechanism 130 to apply pressure to the photomask sample placed on the cutting block 111 to achieve natural cutting of the photomask sample. The pressure block 140 can be fixedly connected to the fixing seat 131, and a plurality of pressure blocks 140 can be arranged. The plurality of pressure blocks 140 can be evenly and symmetrically arranged with the straight line position of the axis of the threaded rod 120 as the symmetry line so as to achieve uniform force on the photomask sample. For example, refer to Figure 1 Four pressure blocks 140 may be provided, and the four pressure blocks 140 are evenly and symmetrically arranged with the straight line position where the axis of the threaded rod 120 is located as the symmetry line.
[0052] See also Figure 1 and Figure 2Furthermore, the pressure block 140 may be cylindrical, rectangular, or cube-shaped, that is, the specific shape of the pressure block 140 may not be specifically limited. In addition, the shapes of the multiple pressure blocks 140 disposed on the same side of the threaded rod 120 may be all the same, partially the same, or different, that is, the shapes of the multiple pressure blocks 140 disposed on the same side of the threaded rod 120 may not be specifically limited. However, the shapes of the two symmetrical pressure blocks 140 disposed on both sides of the threaded rod 120 need to be set to be the same in order to ensure uniform force on both sides of the mask sample. For example, refer to Figure 1 The pressure block 140 is cylindrical in shape, and the shapes of the four pressure blocks 140 are all the same.
[0053] See also Figure 1 and Figure 2 Furthermore, when the pressure block 140 contacts the surface of the mask sample, there is a gap between the bottom end of the threaded rod 120 and the mask sample, so that the mask sample can naturally crack under the cooperation of the pressure block 140 and the cutting block 111, thereby improving the cutting quality of the mask sample.
[0054] See also Figure 1 , Figure 3 and Figure 5 , the handle 150 can be set at one end of the threaded rod 120, and the handle 150 can be detachably connected to the threaded rod 120, so that the threaded rod 120 can be rotated by rotating the handle 150. Among them, a groove can be formed on the handle 150, and a thread matching the threaded rod 120 can be formed on the inner wall of the groove, so that the threaded rod 120 can be detachably connected to the handle 150. However, it is not limited to this, and the handle 150 can also be fixedly connected to the threaded rod 120. For example, the handle 150 and the threaded rod 120 can be fixedly connected by welding. The handle 150 can be in a rectangular parallelepiped shape, a cube shape, or other shapes. When the handle 150 is provided with a groove, the groove can be located at the center of the bottom side of the handle 150, or at other positions on the bottom side of the handle 150, that is, the position of the groove can be not specifically limited.
[0055] See also Figure 1 , Figure 3 and Figure 5 The elastic member 160 can be sleeved on the threaded rod 120, and the elastic member 160 can be located between the base 110 and the clamping mechanism 130 to achieve buffering when the clamping mechanism 130 is lowered or raised, so that the force on the mask sample is uniform, and the cutting quality of the mask sample is further improved. The elastic member 160 can be a spring or other elastic element, as long as it can play a buffering role when the clamping mechanism 130 is lowered or raised.
[0056] See also Figures 1 to 5 In this embodiment, when it is necessary to cut the photomask sample, the photomask sample can first be placed horizontally on the cutting block 111 of the base 110. The cutting block 111 is in the shape of a triangular prism, and the cutting block 111 is fixedly arranged on the base 110. Then, the locking piece 133 can be loosened to allow the clamping block 132 to slide on the fixing seat 131, and the photomask sample can be clamped between two adjacent clamping blocks 132, and then the locking piece 133 can be tightened to achieve the clamping of the photomask sample. Then, the handle 150 can be turned to drive the rotation of the threaded rod 120. Since the threaded rod 120 is threadedly matched with the base through hole 112 on the base 110, the threaded rod 120 can be lowered by turning the handle 150. Since the threaded rod 120 is rotatably connected to the fixing seat 131 through the limiter 1312, the limiter 1312 can follow the threaded rod 120 to descend. Since four pressure blocks 140 are provided, and the four pressure blocks 140 are all fixedly connected to the fixing seat 131, and are symmetrically arranged with the central axis of the fixing seat 131 as the symmetry line, when the fixing seat 131 moves downward, the pressure blocks 140 also move downward to contact the surface of the photomask sample, and exert downward pressure on the photomask sample by continuously pressing down. Subsequently, under the cooperation of the pressure blocks 140 and the cutting block 111, the photomask sample begins to naturally crack from the contact point with the cutting block 111 to complete the contactless cutting of the photomask sample, avoid damage to the cutting surface of the photomask sample, and thus improve the analysis accuracy of the cutting surface of the photomask sample and the manufacturing accuracy of the semiconductor chip.
[0057] In summary, the photomask sample cutting device provided by the utility model can cut the photomask sample, which is convenient for analyzing and designing the cut surface of the photomask sample. The unexpected technical effect is that by setting the cutting block and the pressure block, the photomask sample can be cut without contact, which prevents the cut surface of the photomask sample from being damaged during the cutting process, improves the cutting quality of the photomask sample, and further improves the analysis accuracy of the cut surface of the photomask sample. Therefore, the utility model has a high industrial utilization value because it effectively overcomes various shortcomings in the prior art.
[0058] In the description of this specification, the description with reference to the terms "this embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.
[0059] The embodiments of the utility model disclosed above are only used to help illustrate the utility model. The embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.
Claims
1. A photomask sample cutting device, characterized in that: include: a base, wherein a cutting block is formed on the base; A threaded rod, sleeved on the base; A clamping mechanism, arranged on the threaded rod; as well as A plurality of pressure blocks are arranged on the bottom side of the clamping mechanism; Wherein, when the pressure block contacts the surface of the photomask sample, there is a gap between the bottom end of the threaded rod and the photomask sample.
2. The photomask sample cutting device according to claim 1, characterized in that: The cutting device also includes: a handle disposed at one end of the threaded rod; and The elastic member is sleeved on the threaded rod, and the elastic member is located between the base and the clamping mechanism.
3. The photomask sample cutting device according to claim 1, characterized in that: The cutting block is fixedly connected to the base, a protrusion is arranged on the cutting block, and the cutting block is placed with the protrusion facing upward.
4. The photomask sample cutting device according to claim 1, characterized in that: The threaded rod is threadably matched with the base.
5. The photomask sample cutting device according to claim 1, characterized in that: The clamping mechanism comprises: A fixed seat, rotatably connected to the threaded rod; A plurality of clamping blocks, slidably connected to the fixing seat; and A plurality of locking members, passing through the clamping block and the fixing seat in sequence, and the locking members are detachably connected to the fixing seat; Wherein, two adjacent clamping blocks are symmetrically arranged.
6. The photomask sample cutting device according to claim 5, characterized in that: A central through hole is formed on the fixing seat, a limiting member is arranged in the central through hole, and the threaded rod is rotatably connected to the fixing seat via the limiting member.
7. The photomask sample cutting device according to claim 6, characterized in that: The limiting member is fixedly sleeved on the threaded rod, and the outer side wall of the limiting member is interference fit with the inner side wall of the central through hole.
8. The photomask sample cutting device according to claim 6, characterized in that: The limiting member is a rolling bearing.
9. The photomask sample cutting device according to claim 1, characterized in that: The pressure block is fixedly connected to the fixing seat, and a plurality of the pressure blocks are symmetrically arranged.
10. The photomask sample cutting device according to claim 2, characterized in that: The handle is detachably connected to the threaded rod.