The invention belongs to the technical field of
sensor array detection, and provides a
sensor array device based on stepping scanning and a detection method, and the method comprises the steps: collecting signals through the comparison of a
test group and a control group, and precisely judging whether
aliasing occurs or not through the analysis of spectrum
peak value and
time domain performance; further defining a risk super-
harmonic frequency band through multi-gradient driving
fundamental frequency test, and verifying and positioning a super-
harmonic order and an interference source in combination with dynamic
fine tuning; and finally, eliminating
aliasing by adopting a driving parameter
fine tuning or reverse digital compensation mode according to working condition limitation, and extracting a real detection
signal. The device adaptive to the method adopts a
modular design, and all modules cooperate and are efficient, so that the device can be stably adaptive to a high-speed stepping working condition; according to the invention, accurate determination, positioning and
elimination of
aliasing are realized, the detection accuracy and stability are improved, different
process requirements are adapted, and the detection error is reduced.