Sample table for scanning electron microscope

Abstract

The utility model belongs to the technical field of scanning electron microscopes, in particular to a sample table for a scanning electron microscope, which comprises a supporting mechanism, a placing table and a connecting mechanism, the supporting mechanism comprises a support, a fixed groove, a movable groove and a slot, the top of the support is provided with the fixed groove, the side edge of the fixed groove is provided with the movable groove, and the side edge of the movable groove is provided with the slot communicated with the outside; the placing table is arranged on the fixing groove and comprises a circular truncated cone, a fixing rod and a ball head, the fixing rod inserted into the fixing groove is arranged in the center of the bottom of the circular truncated cone, the circular truncated cone is prevented from being separated from the fixing groove, during disassembly, the connecting mechanism is pulled outwards to separate the plug from the ball head, then the connecting mechanism is rotated to enable the plug to be located below the ball head, and after the connecting mechanism is loosened, the plug is separated from the ball head. The plug gets close to the ball head under the action of the spring and extrudes the lower end of the ball head, the fixing rod is extruded out of the fixing groove, and the circular truncated cone is convenient to assemble and disassemble.

Description

Technical Field

[0001] The utility model relates to the technical field of scanning electron microscopes, in particular to a sample stage for scanning electron microscopes. Background Art

[0002] The scanning electron microscope is a common testing instrument that can test a variety of types, including liquids, powders, films, and cross-sections. Samples must be prepared first, and the items to be tested must be fixed on the sample stage using conductive glue. After the samples are prepared, the sample stage is placed in the sample chamber for testing.

[0003] A common sample table includes a cylindrical base with multiple single truncated tables on the base. The objects to be inspected are fixed on the single truncated tables and threadedly connected through threaded columns. However, in the prior art, during inspection, one base is often equipped with 6 single truncated tables to inspect multiple objects at the same time. Each single truncated table needs to be manually rotated to fix the table on the base, which is relatively cumbersome to operate.

[0004] To this end, the present application proposes a sample stage for a scanning electron microscope. Utility Model Content

[0005] The purpose of this section is to summarize some aspects of the embodiments of the utility model and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the abstract of the specification and the name of the utility model of this application to avoid blurring the purpose of this section, the abstract of the specification and the name of the utility model, and such simplifications or omissions cannot be used to limit the scope of the utility model.

[0006] In view of the above problems and / or the problems existing in the existing sample stage for scanning electron microscope, the present utility model is proposed.

[0007] Therefore, the purpose of the utility model is to provide a sample stage for a scanning electron microscope. After the fixing rod of the truncated table is inserted into the fixing groove, the plug of the connecting mechanism is stuck at the upper end of the ball head to prevent the truncated table from falling out of the fixing groove. When disassembling, the connecting mechanism is pulled outward to separate the plug from the ball head, and then the connecting mechanism is rotated to make the plug located under the ball head. After loosening the connecting mechanism, the plug approaches the ball head under the action of the spring, and the plug is used to squeeze the lower end of the ball head to squeeze the fixing rod out of the fixing groove, which is convenient for assembling and disassembling the truncated table.

[0008] In order to solve the above technical problems, according to one aspect of the present invention, the present invention provides the following technical solutions:

[0009] A sample stage for a scanning electron microscope, comprising:

[0010] The support mechanism comprises a support, a fixed groove, a movable groove and a slot, wherein the top of the support is provided with a fixed groove, the side of the fixed groove is provided with a movable groove, and the side of the movable groove is provided with a slot connected to the outside;

[0011] A placing table is arranged on the fixing groove, and the placing table comprises a truncated table, a fixing rod and a ball head. The fixing rod inserted into the fixing groove is arranged at the bottom center of the truncated table, and the ball head is arranged at the bottom of the fixing rod;

[0012] The connecting mechanism is arranged on the movable groove, and the connecting mechanism includes an insert rod, a plug, a pull handle and a spring. The insert rod is inserted into the slot, the plug is arranged at the inner end of the insert rod, the pull handle is arranged at the outer end of the insert rod, and the spring is arranged outside the insert rod.

[0013] As a preferred solution of the sample stage for a scanning electron microscope described in the utility model, a sliding groove is provided on the side of the fixing groove, and a sliding block slidably connected to the sliding groove is provided on the side wall of the fixing rod.

[0014] As a preferred solution of the sample stage for a scanning electron microscope described in the utility model, a slope is arranged at the left end of the plug, and the protruding end of the slope is a bump.

[0015] As a preferred solution of the sample stage for a scanning electron microscope described in the utility model, wherein: an indicating tip is arranged on the top of the pull handle, and the indicating tip and the protrusion are both located at the top.

[0016] As a preferred solution of the sample stage for a scanning electron microscope described in the utility model, wherein: when the spring is in a natural state, the convex block is clamped on the upper end of the ball head.

[0017] As a preferred solution of the sample stage for a scanning electron microscope described in the utility model, an anti-slip sheath is arranged outside the pull handle.

[0018] As a preferred solution of the sample stage for a scanning electron microscope described in the utility model, the plug is a cylinder connected to the movable groove.

[0019] Compared with the prior art: the utility model opens a movable groove on the side of the fixed groove of the support, a connecting mechanism is arranged in the movable groove, and a ball head is arranged at the lower end of the fixed rod of the truncated table. After the fixed rod of the truncated table is inserted into the fixed groove, the plug of the connecting mechanism is stuck at the upper end of the ball head to prevent the truncated table from falling out of the fixed groove. When disassembling, the connecting mechanism is pulled outward to separate the plug from the ball head, and then the connecting mechanism is rotated to make the plug located under the ball head. After loosening the connecting mechanism, the plug approaches the ball head under the action of the spring, and the plug is used to squeeze the lower end of the ball head to squeeze the fixing rod out of the fixing groove, which is convenient for assembling and disassembling the truncated table. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solution of the implementation of the utility model, the utility model will be described in detail below in combination with the drawings and detailed implementation. Obviously, the drawings described below are only some implementations of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

[0021] Figure 1 This is a schematic diagram of the shaft side structure of the utility model;

[0022] Figure 2 This is a schematic diagram of the internal connection structure of the utility model;

[0023] Figure 3 This is a schematic diagram of the support mechanism structure of the utility model;

[0024] Figure 4 This is a schematic diagram of the structure of the placement table of the utility model;

[0025] Figure 5 It is a schematic diagram of the structure of the connecting mechanism of the utility model.

[0026] In the figure: 100 supporting mechanism, 110 bearing, 120 fixed groove, 130 movable groove, 140 slot, 150 slide groove, 200 placing table, 210 round table, 220 fixing rod, 230 ball head, 240 slider, 300 connecting mechanism, 310 plug rod, 320 plug, 321 slope, 322 bump, 330 handle, 331 indicating tip, 340 spring. DETAILED DESCRIPTION

[0027] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below with reference to the accompanying drawings.

[0028] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific implementation methods disclosed below.

[0029] Secondly, the present invention is described in detail with reference to the schematic diagram. When describing the implementation of the present invention, for the sake of convenience, the cross-sectional diagram showing the device structure will not be partially enlarged according to the general proportion, and the schematic diagram is only an example, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0030] In order to make the purpose, technical solution and advantages of the present invention more clear, the implementation mode of the present invention will be further described in detail below with reference to the accompanying drawings.

[0031] The utility model provides a sample stage for a scanning electron microscope. After the fixing rod of the round table is inserted into the fixing groove, the plug of the connecting mechanism is clamped on the upper end of the ball head to prevent the round table from falling out of the fixing groove. When disassembling, the connecting mechanism is pulled outward to separate the plug from the ball head, and then the connecting mechanism is rotated to make the plug located under the ball head. After the connecting mechanism is loosened, the plug is close to the ball head under the action of the spring, and the fixing rod is squeezed out of the fixing groove by using the plug to squeeze the lower end of the ball head, so that it is easy to assemble and disassemble the round table. Please refer to Figure 1-Figure 5 , including: a supporting mechanism 100, a placing table 200 and a connecting mechanism 300.

[0032] The support mechanism 100 includes a support 110, a fixed groove 120, a movable groove 130 and a slot 140. The support 110 has a fixed groove 120 at the top, a movable groove 130 at the side of the fixed groove 120, and a slot 140 communicating with the outside at the side of the movable groove 130.

[0033] The support 110 adopts a circular base, the fixed grooves 120 are evenly distributed on the support 110 , and the movable grooves 130 and the slots 140 are evenly opened on the outer circle of the support 110 .

[0034] The placement table 200 is arranged on the fixing groove 120, and the placement table 200 includes a truncated table 210, a fixing rod 220 and a ball head 230. The fixing rod 220 inserted into the fixing groove 120 is arranged at the bottom center of the truncated table 210, and the ball head 230 is arranged at the bottom of the fixing rod 220;

[0035] The truncated platform 210 is inserted into the fixing groove 120 through the fixing rod 220. After the insertion, the bottom of the truncated platform 210 fits with the top of the support 110. The ball head 230 is as shown in FIG. Figure 4 As shown, it is thin at the upper and lower ends and thick in the middle.

[0036] The connecting mechanism 300 is arranged on the movable slot 130, and the connecting mechanism 300 includes an insert rod 310, a plug 320, a handle 330 and a spring 340. The insert rod 310 is inserted into the slot 140, the plug 320 is arranged at the inner end of the insert rod 310, the handle 330 is arranged at the outer end of the insert rod 310, and the spring 340 is arranged outside the insert rod 310;

[0037] Among them, the plug 320 adopts a cylinder connected to the movable groove 130. When the spring 340 is in a natural state, the protrusion 322 is stuck on the upper end of the ball head 230. The plug 320 is separated from the ball head 230 by pulling the handle 330. After letting go, the spring 340 rebounds, driving the plug 320 to contact the ball head 230.

[0038] Among them, since the fixing groove 120 is a round groove and the fixing rod 220 is a round rod, after the connection, the table 210 is prone to unstable rotation. For this reason, a sliding groove 150 is opened on the side of the fixing groove 120, and a slider 240 is provided on the side wall of the fixing rod 220 for sliding connection with the sliding groove 150. The connection between the sliding groove 150 and the slider 240 provides anti-rotation limit and guidance.

[0039] Since the plug 320 needs to clamp the ball head 230 , a slope 321 is provided at the left end of the plug 320 , and a protruding end of the slope 321 is a bump 322 that is clamped on the ball head 230 through the slope 321 .

[0040] In order to facilitate observation of the direction of the protrusion 322 and determination of the position of the protrusion 322 , an indicating tip 331 is provided on the top of the handle 330 . The indicating tip 331 and the protrusion 322 are both located at the top, and the position of the protrusion 322 is displayed by the indicating tip 331 .

[0041] In order to facilitate pulling the handle 330 , an anti-skid sheath is provided on the outside of the handle 330 to improve the anti-skid effect and facilitate operation and use.

[0042] When in use, during installation, the handle 330 is rotated so that the protrusion 322 is located at the top, and then the handle 330 is pulled, and then the table 210 is inserted into the fixing groove 120 through the fixing rod 220, and then the handle 330 is released, the spring 340 rebounds, and the plug 320 contacts the ball head 230, so that the slope 321 of the plug 320 is stuck on the upper end of the ball head 230 to prevent the table 210 from loosening. When disassembling, the handle 330 is pulled outward, and then the handle 330 is rotated so that the protrusion 322 is located at the bottom, and then the handle 330 is released, the spring 340 rebounds, and the plug 320 contacts the ball head 230, and the slope 321 squeezes the ball head 230 from the bottom, drives the ball head 230 to move upward, and pushes the table 210 out, so that the table 210 is easy to remove.

[0043] Although the present invention has been described above with reference to the embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present invention. In particular, as long as there is no structural conflict, the various features in the embodiments disclosed in the present invention may be used in combination with each other in any manner, and the fact that these combinations are not exhaustively described in this specification is only for the sake of omitting space and saving resources. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A sample stage for a scanning electron microscope, characterized in that: include: The support mechanism (100) comprises a support (110), a fixed groove (120), a movable groove (130) and a slot (140), wherein the support (110) has a fixed groove (120) on the top, the fixed groove (120) has a movable groove (130) on the side, and the movable groove (130) has a slot (140) on the side that is connected to the outside; A placement table (200) is arranged on the fixing groove (120), the placement table (200) comprising a truncated table (210), a fixing rod (220) and a ball head (230), the fixing rod (220) inserted into the fixing groove (120) is arranged at the bottom center of the truncated table (210), and the ball head (230) is arranged at the bottom of the fixing rod (220); A connecting mechanism (300) is arranged on the movable groove (130), and the connecting mechanism (300) includes an insert rod (310), a plug (320), a pull handle (330) and a spring (340). The insert rod (310) is inserted into the slot (140), the plug (320) is arranged at the inner end of the insert rod (310), the pull handle (330) is arranged at the outer end of the insert rod (310), and the spring (340) is arranged outside the insert rod (310).

2. A sample stage for a scanning electron microscope according to claim 1, characterized in that: A sliding groove (150) is provided on the side of the fixing groove (120), and a sliding block (240) slidably connected to the sliding groove (150) is provided on the side wall of the fixing rod (220).

3. A sample stage for a scanning electron microscope according to claim 1, characterized in that: The left end of the plug (320) is provided with a slope (321), and the protruding end of the slope (321) is a convex block (322).

4. A sample stage for a scanning electron microscope according to claim 3, characterized in that: The top of the pull handle (330) is provided with an indicating tip (331), and the indicating tip (331) and the protrusion (322) are both located at the top.

5. The sample stage for a scanning electron microscope according to claim 3, characterized in that: When the spring (340) is in a natural state, the protrusion (322) is stuck on the upper end of the ball head (230).

6. A sample stage for a scanning electron microscope according to claim 1, characterized in that: The handle (330) is provided with an anti-slip protective cover on its exterior.

7. The sample stage for a scanning electron microscope according to claim 1, characterized in that: The plug (320) is a cylindrical column connected to the movable groove (130).

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