Sheet carrier feeding and discharging device and reacting furnace system

Abstract

The utility model relates to the technical field of semiconductors or photovoltaics, in particular to a sheet carrier feeding and discharging device and a reacting furnace system, and solves the problem that the position of a sheet carrier is difficult to adjust relative to a reacting furnace when the sheet carrier enters and exits the reacting furnace due to paddle deformation of a cantilever paddle structure. The sheet carrier feeding and discharging device comprises at least one out-of-furnace rail, a boat pushing assembly and an elastic limiting assembly, the out-of-furnace rail can be in butt joint with an in-furnace rail of a reaction furnace, and the boat pushing assembly is used for applying pushing force or pulling force in the extending direction of the out-of-furnace rail to a sheet carrier placed on the out-of-furnace rail. The elastic limiting assembly is configured to limit the roller. When the rail outside the furnace is in butt joint with the rail inside the furnace, the boat pushing assembly exerts pushing force or pulling force on the sheet carrier so that the sheet carrier can be pushed into or pulled out of the reacting furnace, the mode that a cantilever paddle structure bears the sheet carrier is replaced, the problem of deformation does not exist, and the adjusting difficulty of the position, relative to the reacting furnace, of the sheet carrier when the sheet carrier enters and exits from the reacting furnace is reduced.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor or photovoltaic technology, and in particular to a sheet carrier loading and unloading device and a reaction furnace system. Background Art

[0002] When processing semiconductor or photovoltaic materials, it is usually necessary to feed the sheet materials to be processed into a specific reactor and process them under certain temperature and pressure conditions. At present, the industry usually uses a boat structure to carry the sheet materials to be processed, in processing or after processing. The boat structure is carried by a boat support, which is placed on the blade support end of the cantilever paddle structure. The cantilever paddle structure is set on the boat pusher assembly. Under the drive of the boat pusher assembly, the cantilever paddle structure feeds the boat structure and the sheet materials carried by the boat structure into the reactor or takes them out of the reactor.

[0003] As the weight and length of the boat structure continue to increase, the paddle of the cantilever paddle structure usually needs to be made very long, and the paddle blade support end is affected by its own gravity and the gravity of the boat support, boat structure, and sheet material, and inevitably deforms and sags. Therefore, it is necessary to set up multiple sets of adjustment structures to adjust the position of the boat support and the boat structure relative to the reactor when entering and exiting the reactor, which makes the adjustment difficult. Utility Model Content

[0004] In view of this, the embodiments of the present disclosure provide a sheet carrier loading and unloading device and a reactor system, which solves the problem of difficulty in adjusting the position of the sheet carrier relative to the reactor when entering and exiting the reactor due to deformation of the paddle of the cantilever paddle structure.

[0005] In the first aspect, an embodiment of the present disclosure provides a sheet carrier loading and unloading device, which is applied to a reaction furnace, wherein the reaction furnace has a reaction chamber and a furnace mouth, the furnace mouth is located on the side of the reaction chamber, and the reaction furnace also includes at least one furnace track, and the furnace track is arranged at the bottom of the reaction chamber; wherein the sheet carrier loading and unloading device includes: at least one furnace track outside the furnace, which can be docked with the furnace track inside the furnace and is configured to carry the sheet carrier, and the sheet carrier includes rollers, and the rollers can roll on the furnace track outside the furnace and the furnace track inside the furnace; a push boat assembly is configured to apply a thrust or a pull along the extension direction of the furnace track outside the furnace to the sheet carrier placed on the furnace track outside the furnace; an elastic limiting assembly is arranged below the furnace track outside the furnace and extends to the side of the furnace track outside the furnace, and is configured to limit the roller; wherein, when the furnace track outside the furnace is docked with the furnace track inside the furnace The extension direction of the outer-furnace track is the same as the extension direction of the inner-furnace track, wherein the push-boat assembly applies a thrust along the extension direction of the outer-furnace track to the sheet carrier on the outer-furnace track, so that the roller rolls relative to the outer-furnace track and the inner-furnace track, and the sheet carrier is pushed into the reaction chamber; or, the push-boat assembly applies a pulling force along the extension direction of the outer-furnace track to the sheet carrier on the inner-furnace track, so that the roller rolls relative to the outer-furnace track and the inner-furnace track, and the sheet carrier is pulled out of the reaction chamber; wherein, in the process of the push-boat assembly applying a thrust or pulling force along the extension direction of the outer-furnace track to the sheet carrier on the outer-furnace track, the roller applies pressure to the elastic limiting assembly to compress the elastic limiting assembly, so that the roller passes over the elastic limiting assembly and continues to roll on the outer-furnace track.

[0006] In some embodiments, the elastic limiting assembly also includes: a limiting member, which is arranged below the outer-furnace track, and the limiting member has a limiting portion, which extends to the side of the outer-furnace track and is configured to limit the roller; an elastic member, which is arranged below the limiting member; wherein, in the process of the push boat assembly applying a thrust or a pull along the extension direction of the outer-furnace track to the sheet carrier on the outer-furnace track, the roller applies pressure to the limiting member to compress the elastic member, so that the roller passes over the limiting member and continues to roll on the outer-furnace track.

[0007] In some embodiments, the roller includes: a first limiting wheel; a second limiting wheel; a connecting shaft, wherein the connecting shaft connects the first limiting wheel and the second limiting wheel; wherein the connecting shaft contacts the top of the outer-furnace track, the first limiting wheel contacts one side of the outer-furnace track, and the second limiting wheel contacts the other side of the outer-furnace track; wherein the limiting member has a first bearing groove, and the first bearing groove is configured to accommodate the bottom of the outer-furnace track and a portion of the side surface of the outer-furnace track connected to the bottom of the outer-furnace track; wherein the upper surface of the limiting portion has an arc-shaped groove, and the extension direction of the arc-shaped groove is perpendicular to the extension direction of the first bearing groove, and the arc-shaped groove can accommodate at least part of the first limiting wheel and / or at least part of the second limiting wheel.

[0008] In some embodiments, the push boat assembly includes: a clamping assembly configured to clamp the sheet carrier; a driving assembly connected to the clamping assembly and configured to drive the clamping assembly to move along the extension direction of the external furnace track to apply a thrust or pull to the sheet carrier along the extension direction of the external furnace track.

[0009] In some embodiments, the sheet carrier loading and unloading device also includes: a first push boat slide rail, the extension direction of the first push boat slide rail is the same as the extension direction of the external furnace track; a first push boat slider, which is slidably connected to the first push boat slide rail and is connected to the clamping assembly so that the clamping assembly can move along the first push boat slide rail under the drive of the driving assembly.

[0010] In some embodiments, the sheet carrier loading and unloading device also includes: a driving source configured to provide driving force; a second push boat slide rail, the extension direction of the second push boat slide rail is the same as the extension direction of the external furnace track; at least one second push boat slider, which is slidably connected to the second push boat slide rail, and is located below the external furnace track and connected to the external furnace track, and the driving source is connected to the external furnace track, wherein, under the drive of the driving source, the external furnace track drives the second push boat slider to move along the second push boat slide rail to make the external furnace track dock with the internal furnace track.

[0011] In some embodiments, the number of the second push boat sliders is multiple; wherein the sheet carrier loading and unloading device also includes: a connecting plate, which is arranged on the multiple second push boat sliders and connected to the multiple second push boat sliders; a support block, which is arranged on the connecting plate and connected to the connecting plate, and the support block has a second bearing groove, and the second bearing groove is configured to accommodate the bottom of the outer-furnace rail and a portion of the side of the outer-furnace rail connected to the bottom of the outer-furnace rail.

[0012] In some embodiments, the sheet carrier loading and unloading device further includes: at least one sensor configured to detect whether the sheet carrier exists on the external track of the furnace, and / or detect the position of the sheet carrier.

[0013] In some embodiments, there are multiple external furnace rails, and the multiple external furnace rails are symmetrically arranged relative to the push boat assembly.

[0014] In a second aspect, an embodiment of the present disclosure provides a reaction furnace system, comprising: a reaction furnace having a reaction chamber and a furnace mouth, wherein the furnace mouth is located on the side of the reaction chamber, and the reaction furnace further comprises at least one furnace rail, wherein the furnace rail is arranged at the bottom of the reaction chamber; the sheet carrier loading and unloading device as described in the first aspect is configured to deliver the sheet carrier from the furnace mouth into the reaction chamber by docking with the furnace rail.

[0015] A sheet carrier loading and unloading device provided in an embodiment of the present disclosure is applied to a reaction furnace. The reaction furnace has a reaction chamber and a furnace mouth, and the furnace mouth is located on the side of the reaction chamber. The reaction furnace also includes at least one furnace track, and the furnace track is arranged at the bottom of the reaction chamber. The sheet carrier loading and unloading device includes: at least one furnace track outside the furnace, a push boat assembly and an elastic limit assembly. The furnace track outside the furnace can be docked with the furnace track inside the furnace, and is configured to carry the sheet carrier. The sheet carrier includes rollers, and the rollers can roll on the furnace track outside the furnace and the furnace track inside the furnace. The push boat assembly is configured to apply a thrust or a pull along the extension direction of the furnace track outside the furnace to the sheet carrier placed on the furnace track outside the furnace. The elastic limit assembly is arranged below the furnace track outside the furnace and extends to the side of the furnace track outside the furnace, and is configured to limit the roller. When the outer track of the furnace is docked with the inner track of the furnace, the extension direction of the outer track of the furnace is the same as the extension direction of the inner track of the furnace, and the push boat assembly applies a thrust along the extension direction of the outer track of the furnace to the sheet carrier on the outer track of the furnace, so that the roller rolls relative to the outer track of the furnace and the inner track of the furnace, and the sheet carrier is pushed into the reaction chamber; the push boat assembly applies a pulling force along the extension direction of the outer track of the furnace to the sheet carrier on the inner track of the furnace, so that the roller rolls relative to the outer track of the furnace and the inner track of the furnace, and the sheet carrier is pulled out of the reaction chamber. In the process of the push boat assembly applying a thrust or pulling force along the extension direction of the outer track of the furnace to the sheet carrier on the outer track of the furnace, the roller applies pressure to the elastic limit assembly to compress the elastic limit assembly, so that the roller passes over the elastic limit assembly and continues to roll on the outer track of the furnace. The sheet carrier loading and unloading device adopts the outer track of the furnace and the inner track of the furnace to carry the sheet carrier, replacing the cantilever paddle structure. The track has a strong supporting force and there is no deformation problem, thereby reducing the difficulty of adjusting the position of the sheet carrier relative to the reactor when entering and exiting the reactor.

[0016] In addition, the sheet carrier loading and unloading device adopts a rolling connection method, and uses an elastic limiting component to limit the roller, which ensures the stability and accuracy of the sheet carrier placed on the track outside the furnace, making it easier for the sheet carrier to be pushed into the reactor, and further reducing the difficulty of adjusting the position of the sheet carrier relative to the reactor when entering and exiting the reactor. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 Shown is a schematic structural diagram of a reactor system provided in one embodiment of the present disclosure.

[0018] Figure 2 Shown is a schematic structural diagram of a sheet carrier loading and unloading device and a sheet carrier provided in one embodiment of the present disclosure.

[0019] Figure 3 Shown Figure 2 A partial enlarged view of area A is shown.

[0020] Figure 4 Shown is a schematic structural diagram of a limiter and an outer furnace rail provided in an embodiment of the present disclosure.

[0021] Figure 5 Shown is a schematic structural diagram of a position limiting member and an outer furnace rail provided in another embodiment of the present disclosure.

[0022] Figure 6 Shown is a cross-sectional view of a limiting member and an outer furnace rail provided in another embodiment of the present disclosure.

[0023] Figure 7 Shown is a schematic structural diagram of a push boat assembly and a load-bearing plate provided in one embodiment of the present disclosure.

[0024] Figure 8 Shown Figure 7 A partial enlarged view of area B is shown.

[0025] Fig. 9 The figure shows a top view of a push boat assembly and a load-bearing plate provided in one embodiment of the present disclosure.

[0026] Fig.10 The figure shows a top view of a sheet carrier loading and unloading device provided by an embodiment of the present disclosure, excluding a push boat assembly.

[0027] Fig.11 Shown Fig.10 A partial enlarged view of region C is shown.

[0028] Fig.12 Shown is a schematic structural diagram of a support block and an outer furnace rail provided in an embodiment of the present disclosure.

[0029] Fig.13Shown is a cross-sectional view of a support block and an outer furnace rail provided in accordance with an embodiment of the present disclosure.

[0030] Fig.14 Shown is a top view of a sheet carrier loading and unloading device provided in one embodiment of the present disclosure.

[0031] Fig.15 The figure shows a side view of a furnace outer rail and a furnace inner rail provided by an embodiment of the present disclosure when they are not docked.

[0032] Fig.16 The figure shows a side view of a furnace outer rail and a furnace inner rail provided by an embodiment of the present disclosure when they are docked.

[0033] Reference numerals:

[0034] 1. Reactor system; 10. Sheet carrier loading and unloading device; 100. Carrying plate; 200. External furnace track; 210. Top of external furnace track; 220. Bottom of external furnace track; 300. Push boat assembly; 310. Clamping assembly; 3110. Clamping claw; 3120. Clamping support seat; 320. Driving assembly; 3210. Servo motor; 3220. Lead screw; 45. Elastic limit assembly; 400. Limiting member; 410. Limiting part; 4101. Arc groove; 420. First bearing groove; 500. Elastic member; 600, first boat push rail; 700, first boat push slider; 800, driving source; 900, second boat push rail; 1000, second boat push slider; 1100, connecting plate; 1200, supporting block; 1201, second bearing slot; 1300, sensor; 20, reactor; 201, reaction chamber; 202, furnace mouth; 203, furnace track; 2, sheet carrier; 21, boat support; 211, roller; 2111, first limiting wheel; 2112, second limiting wheel; 2113, connecting shaft; 22, boat structure. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0036] When processing semiconductor or photovoltaic materials, it is usually necessary to feed the sheet materials to be processed into a specific reactor and process them under certain temperature and pressure conditions. At present, the industry usually uses a boat structure to carry the sheet materials to be processed, in processing or after processing. The boat structure is carried by a boat support, which is placed on the blade support end of the cantilever paddle structure. The cantilever paddle structure is set on the boat pusher assembly. Under the drive of the boat pusher assembly, the cantilever paddle structure feeds the boat structure and the sheet materials carried by the boat structure into the reactor or takes them out of the reactor.

[0037] As the weight and length of the boat structure continue to increase, the paddle of the cantilever paddle structure usually needs to be made very long, and the paddle blade support end is affected by its own gravity and the gravity of the boat support, boat structure, and sheet material, and inevitably deforms and sags. Therefore, it is necessary to set up multiple sets of adjustment structures to adjust the position of the boat support and the boat structure relative to the reactor when entering and exiting the reactor, which makes the adjustment difficult.

[0038] In addition, when the boat structure carries different quantities or different types of sheet materials, the force conditions of the paddles of the cantilever paddle structure are different, resulting in different degrees of deformation of the paddles of the cantilever paddle structure, resulting in different degrees of adjustment of the boat structure and the boat support, further increasing the adjustment difficulty, adjustment time and adjustment cost.

[0039] In addition, the cantilever paddle structure will vibrate when entering and exiting the reactor, and its operation stability is poor, which may cause the sheet material to collide with the boat structure and be damaged, affecting the yield of the sheet material, and may also cause the boat structure and the boat support to deform or be damaged. In addition, due to the deformation problem of the paddle of the cantilever paddle structure, the number of sheet materials that the paddle can carry at a time is limited to a certain range, affecting the improvement of the overall production capacity of the reactor.

[0040] In view of the above problems, an embodiment of the present disclosure provides a sheet carrier loading and unloading device, which is applied to a reaction furnace. The reaction furnace has a reaction chamber and a furnace mouth, and the furnace mouth is located on the side of the reaction chamber. The reaction furnace also includes at least one furnace track, and the furnace track is arranged at the bottom of the reaction chamber. The sheet carrier loading and unloading device includes: at least one furnace track outside the furnace, a push boat assembly and an elastic limit assembly. The furnace track outside the furnace can be docked with the furnace track inside the furnace, and is configured to carry the sheet carrier. The sheet carrier includes rollers, and the rollers can roll on the furnace track outside the furnace and the furnace track inside the furnace. The push boat assembly is configured to apply a thrust or a pull along the extension direction of the furnace track outside the furnace to the sheet carrier placed on the furnace track outside the furnace. The elastic limit assembly is arranged below the furnace track outside the furnace and extends to the side of the furnace track outside the furnace, and is configured to limit the roller. When the outer track of the furnace is docked with the inner track of the furnace, the extension direction of the outer track of the furnace is the same as the extension direction of the inner track of the furnace, and the push boat assembly applies a thrust along the extension direction of the outer track of the furnace to the sheet carrier on the outer track of the furnace, so that the roller rolls relative to the outer track of the furnace and the inner track of the furnace, and the sheet carrier is pushed into the reaction chamber; the push boat assembly applies a pulling force along the extension direction of the outer track of the furnace to the sheet carrier on the inner track of the furnace, so that the roller rolls relative to the outer track of the furnace and the inner track of the furnace, and the sheet carrier is pulled out of the reaction chamber. In the process of the push boat assembly applying a thrust or pulling force along the extension direction of the outer track of the furnace to the sheet carrier on the outer track of the furnace, the roller applies pressure to the elastic limit assembly to compress the elastic limit assembly, so that the roller passes over the elastic limit assembly and continues to roll on the outer track of the furnace. The sheet carrier loading and unloading device adopts the outer track of the furnace and the inner track of the furnace to carry the sheet carrier, replacing the cantilever paddle structure. The track has a strong supporting force and there is no deformation problem, thereby reducing the difficulty of adjusting the position of the sheet carrier relative to the reactor when entering and exiting the reactor.

[0041] In addition, the sheet carrier loading and unloading device adopts a rolling connection method, and uses an elastic limiting component to limit the roller, which ensures the stability and accuracy of the sheet carrier placed on the track outside the furnace, making it easier for the sheet carrier to be pushed into the reactor, and further reducing the difficulty of adjusting the position of the sheet carrier relative to the reactor when entering and exiting the reactor.

[0042] In addition, the sheet carrier loading and unloading device does not shake during movement and has good operating stability, so the sheet material will not collide with the sheet carrier and be damaged, the yield of the sheet material is higher, and the sheet carrier will not be deformed or damaged. Moreover, since it is no longer restricted by the deformation problem of the cantilever paddle structure, the sheet carrier can carry more sheet materials at a time, and the overall production capacity of the reactor is higher under the premise that the reactor's external dimensions are the same.

[0043] The specific structure of the sheet carrier loading and unloading device is described below in conjunction with the embodiments.

[0044] Figure 1Shown is a schematic structural diagram of a reactor system provided in one embodiment of the present disclosure. Figure 2 Shown is a schematic structural diagram of a sheet carrier loading and unloading device and a sheet carrier provided in one embodiment of the present disclosure. Figure 3 Shown Figure 2 A partial enlarged view of area A shown in Figure 1. Figures 1 to 3 As shown, the sheet carrier loading and unloading device 10 is applied to a reaction furnace 20, the reaction furnace 20 has a reaction chamber 201 and a furnace opening 202, the furnace opening 202 is located on the side of the reaction chamber 201, and the reaction furnace 20 also includes at least one furnace track 203, and the furnace track 203 is arranged at the bottom of the reaction chamber 201. The sheet carrier loading and unloading device 10 includes: at least one furnace external track 200, a boat pusher assembly 300 and an elastic limit assembly 45.

[0045] The outer rail 200 can dock with the inner rail 203 and is configured to carry the sheet carrier 2 . The sheet carrier 2 includes rollers 211 . The rollers 211 can roll on the outer rail 200 and the inner rail 203 .

[0046] The boat pusher assembly 300 is configured to apply a thrust or a pull to the sheet carrier 2 placed on the outer furnace track 200 along the extension direction of the outer furnace track 200. When the outer furnace track 200 is docked with the inner furnace track 203, the extension direction of the outer furnace track 200 is the same as the extension direction of the inner furnace track 203. The boat pusher assembly 300 applies a thrust to the sheet carrier 2 on the outer furnace track 200 along the extension direction of the outer furnace track 200, so that the roller 211 rolls relative to the outer furnace track 200 and the inner furnace track 203, and the sheet carrier 2 is pushed into the reaction chamber 201; the boat pusher assembly 300 applies a pull to the sheet carrier 2 on the inner furnace track 203 along the extension direction of the outer furnace track 200, so that the roller 211 rolls relative to the outer furnace track 200 and the inner furnace track 203, and the sheet carrier 2 is pulled out of the reaction chamber 201.

[0047] The elastic limiting assembly 45 is arranged below the outer track 200 and extends to the side of the outer track 200, and is configured to limit the roller 211. The elastic limiting assembly 45 can be an elastic structure, such as a spring, a rubber block, etc. In the process that the boat push assembly 300 applies a thrust or a pull along the extension direction of the outer track 200 to the sheet carrier 2 on the outer track 200, the roller 211 applies pressure to the elastic limiting assembly 45 to compress the elastic limiting assembly 45, so that the roller 211 passes over the elastic limiting assembly 45 and continues to roll on the outer track 200. When the roller 211 is driven to the elastic limiting assembly 45 and the boat push assembly 300 no longer applies force to the sheet carrier 2, the elastic limiting assembly 45 limits the roller 211.

[0048] In some embodiments, the sheet carrier loading and unloading device 10 further includes a carrier plate 100, which is horizontally placed on the ground or a frame. The external furnace track 200 is disposed on the carrier plate 100 and can be slidably connected to the carrier plate 100, and the sliding direction of the external furnace track 200 can be the same as the extension direction of the external furnace track 200. The boat pusher assembly 300 is disposed on the carrier plate 100.

[0049] The sheet carrier 2 includes a boat support 21 and a boat structure 22, and a plurality of rollers 211 are disposed below both sides of the boat support 21 and are rotatably connected to the boat support 21. The boat support 21 is configured to carry the boat structure 22, and the boat structure 22 is configured to carry sheet materials, which may be silicon wafers, battery panels, glass substrates and other products.

[0050] The boat pusher assembly 300 may be a mechanical arm or other structures, which is not specifically limited in the present disclosure.

[0051] The sheet carrier loading and unloading device 10 provided in the embodiment of the present disclosure is applied to a reaction furnace 20, which has a reaction chamber 201 and a furnace opening 202, wherein the furnace opening 202 is located on the side of the reaction chamber 201, and the reaction furnace 20 also includes at least one furnace track 203, which is arranged at the bottom of the reaction chamber 201. The sheet carrier loading and unloading device 10 includes: at least one furnace external track 200 and a push boat assembly 300. The furnace external track 200 can dock with the furnace internal track 203, and is configured to carry the sheet carrier 2, and the sheet carrier 2 includes a roller 211, which can roll on the furnace external track 200 and the furnace internal track 203. The push boat assembly 300 is configured to apply a thrust or a pull along the extension direction of the furnace external track 200 to the sheet carrier 2 placed on the furnace external track 200. When the external track 200 is docked with the internal track 203, the extension direction of the external track 200 is the same as the extension direction of the internal track 203, and the boat pusher assembly 300 applies a thrust along the extension direction of the external track 200 to the sheet carrier 2 on the external track 200, so that the roller 211 rolls relative to the external track 200 and the internal track 203, and the sheet carrier 2 is pushed into the reaction chamber 201; the boat pusher assembly 300 applies a pulling force along the extension direction of the external track 200 to the sheet carrier 2 on the internal track 203, so that the roller 211 rolls relative to the external track 200 and the internal track 203, and the sheet carrier 2 is pulled out of the reaction chamber 201. The sheet carrier loading and unloading device 10 uses an external furnace rail 200 and an internal furnace rail 203 to carry the sheet carrier 2, replacing the cantilever paddle structure. The rail has a strong supporting force and there is no deformation problem, thereby reducing the difficulty of adjusting the position of the sheet carrier 2 relative to the reactor 20 when entering and exiting the reactor 20.

[0052] In addition, the sheet carrier loading and unloading device 10 adopts a rolling connection method, and uses an elastic limiting component 45 to limit the roller 211, thereby ensuring the stability and accuracy of the sheet carrier 2 on the external track 200, making it easier for the sheet carrier 2 to be pushed into the reactor 20, and further reducing the difficulty of adjusting the position of the sheet carrier 2 relative to the reactor 20 when entering and exiting the reactor 20.

[0053] In addition, the sheet carrier loading and unloading device 10 does not shake during the movement and has good operation stability, so the sheet material will not collide with the sheet carrier 2 and be damaged, the yield of the sheet material is higher, and the sheet carrier 2 will not be deformed or damaged. In addition, since it is no longer restricted by the deformation problem of the paddle of the cantilever paddle structure, the sheet carrier 2 can carry more sheet materials at a time, and under the premise that the outer dimensions of the reactor 10 are the same, the overall production capacity of the reactor 10 is higher.

[0054] In some embodiments, the elastic limiting assembly 45 includes: a limiting member 400 and an elastic member 500. The limiting member 400 is disposed below the external furnace track 200, and the limiting member 400 has a limiting portion 410, which extends to the side of the external furnace track 200 and is configured to limit the roller 211 so that the sheet carrier 2 can be accurately placed on the external furnace track 200, thereby facilitating the accurate connection between the push boat assembly 300 and the sheet carrier 2 on the external furnace track 200. The elastic member 500 is disposed below the limiting member 400. When the boat pusher assembly 300 applies a thrust or a pull along the extension direction of the outer furnace track 200 to the sheet carrier 2 on the outer furnace track 200, the roller 211 applies pressure to the stopper 400 to compress the elastic member 500, so that the roller 211 passes over the stopper 400 and continues to roll on the outer furnace track 200. The elastic member 500 can prevent the roller 211 from vibrating when passing over the stopper 400, thereby preventing the sheet material from being broken due to vibration. For example, the stopper 400 can be disposed on the carrier plate 100.

[0055] Figure 5 Shown is a schematic structural diagram of a position limiting member and an outer furnace rail provided in another embodiment of the present disclosure.

[0056] Figure 6 FIG. 2 is a cross-sectional view of a stopper and an outer furnace rail provided by another embodiment of the present disclosure. Figure 5 to Figure 6 As shown, the limiting member 400 is disposed above the top 210 of the outer furnace track. The limiting member 400 has an arc-shaped groove. The central part of the roller 211 is located in the arc-shaped groove to limit the roller 211 .

[0057] Exemplarily, a limiting hole is provided on the external furnace track 200 , and the limiting hole longitudinally penetrates the external furnace track 200 . A limiting block is provided on the roller 211 , and the limiting block is inserted into the limiting hole to limit the roller 211 .

[0058] Exemplarily, a limiting member 400 is sleeved on the outer furnace track 200 , the top of the limiting member 400 exceeds the top 210 of the outer furnace track, and the limiting member 400 abuts against the outer edge of the hub of the roller 211 to limit the roller 211 .

[0059] Exemplarily, the limiting member 400 is arranged below the outer-furnace rail 200, and accommodates the bottom 220 of the outer-furnace rail and part of the side of the outer-furnace rail 200 connected to the bottom 220 of the outer-furnace rail. An arc-shaped groove is arranged on the limiting member 400, and the outer edge of the hub of the roller 211 is located in the arc-shaped groove to limit the roller 211.

[0060] In some embodiments, the roller 211 includes: a first limiting wheel 2111, a second limiting wheel 2112 and a connecting shaft 2113, the connecting shaft 2113 connects the first limiting wheel 2111 and the second limiting wheel 2112, the connecting shaft 2113 contacts the top 210 of the external rail, the first limiting wheel 2111 contacts one side of the external rail 200, and the second limiting wheel 2112 contacts the other side of the external rail 200. The limiting member 400 has a first bearing groove 420, and the first bearing groove 420 is configured to accommodate the bottom 220 of the external rail and a part of the side surface of the external rail 200 connected to the bottom 220 of the external rail. The upper surface of the limiting portion 410 has an arc groove 4101, and the extension direction of the arc groove 4101 is perpendicular to the extension direction of the first bearing groove 420.

[0061] In some embodiments, there is one limiting portion 410 , which extends to the side of the external furnace track 200 , and the arc-shaped groove 4101 can accommodate at least a portion of the first limiting wheel 2111 .

[0062] In some embodiments, the number of the limiting portion 410 is one, and the limiting portion 410 extends to the other side of the external furnace track 200 , and the arc-shaped groove 4101 can accommodate at least a portion of the second limiting wheel 2112 .

[0063] In some embodiments, there are two limiting portions 410, one limiting portion 410 extends to the side of the external furnace track 200, and the other limiting portion 410 extends to the other side of the external furnace track 200, and the two arc-shaped grooves 4101 can respectively accommodate at least part of the first limiting wheel 2111 and at least part of the second limiting wheel 2112.

[0064] The arc groove 4101 is used to limit the roller 211 so that when the boat push assembly 300 applies a thrust or a pull along the extension direction of the outer furnace track 200 to the sheet carrier 2 on the outer furnace track 200 , the roller 211 rolls out of or into the arc groove 4101 .

[0065] In some embodiments, the boat pusher assembly 300 includes: a clamping assembly 310 and a driving assembly 320, wherein the clamping assembly 310 is configured to clamp the sheet carrier 2, and the driving assembly 320 is connected to the clamping assembly 310 and configured to drive the clamping assembly 310 to move along the extension direction of the external furnace track 200, so as to apply a thrust or a pull force along the extension direction of the external furnace track 200 to the sheet carrier 2. The sheet carrier 2 is clamped by the clamping assembly 310 to prevent the sheet carrier 2 from shaking during the movement along the extension direction of the external furnace track 200.

[0066] In some embodiments, the clamping assembly 310 includes at least one clamping jaw 3110 and a clamping support seat 3120, wherein the clamping jaw 3110 is connected to the clamping support seat 3120 and is configured to clamp the sheet carrier 2. The driving assembly 320 includes a servo motor 3210 and a lead screw 3220, wherein the servo motor 3210 is disposed on the carrier plate 100 and connected to one side of the lead screw 3220, wherein the other side of the lead screw 3220 is rotatably connected to the carrier plate 100, wherein the extension direction of the lead screw 3220 is the same as the extension direction of the external furnace track 200, and the clamping support seat 3120 is rotatably connected to the lead screw 3220. The servo motor 3210 drives the lead screw 3220 to rotate, and the lead screw 3220 drives the clamping support seat 3120 to move, thereby causing the clamping assembly 310 to move along the extension direction of the external furnace track 200, so as to apply a thrust or a pull along the extension direction of the external furnace track 200 to the sheet carrier 2.

[0067] For example, Fig. 9 As shown, the clamping assembly 310 includes two clamping jaws 3110 , and the two clamping jaws 3110 are symmetrically arranged relative to the lead screw 3220 to improve the stability of the clamping jaws 3110 on the sheet carrier 2.

[0068] The vertical cross-sectional shape of the clamping support seat 3120 can be L-shaped, U-shaped, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0069] In some embodiments, the sheet carrier loading and unloading device 10 further includes: a first push boat slide rail 600 and a first push boat slider 700, and the extension direction of the first push boat slide rail 600 is the same as the extension direction of the furnace outer track 200. The first push boat slider 700 is slidably connected to the first push boat slide rail 700 and is connected to the clamping assembly 310, so that the clamping assembly 310 can move along the first push boat slide rail 600 under the drive of the driving assembly 320. The first push boat slide rail 600 guides the movement of the clamping assembly 310.

[0070] Exemplarily, the sheet carrier loading and unloading device 10 includes two first boat push rails 600 and two first boat push sliders 700 , which are symmetrically arranged relative to the lead screw 3220 , and the two first boat push sliders 700 are fixedly connected to the lower sides of the clamping support seat 3120 .

[0071] In some embodiments, the sheet carrier loading and unloading device 10 further includes: a driving source 800, a second push boat slide rail 900 and at least one second push boat slider 1000, the driving source 800 is configured to provide driving force, and the extension direction of the second push boat slide rail 900 is the same as the extension direction of the external furnace track 200. The second push boat slider 1000 is slidably connected to the second push boat slide rail 900, and is located below the external furnace track 200 and connected to the external furnace track 200, the driving source 800 is connected to the external furnace track 200, and under the drive of the driving source 800, the external furnace track 200 drives the second push boat slider 1000 to move along the second push boat slide rail 900, so that the external furnace track 200 is docked with the internal furnace track 203.

[0072] When the outer-furnace track 200 moves along the second push-boat slide rail 900, the push-boat assembly 300 clamps the sheet carrier 2 and drives the sheet carrier 2 to move synchronously and in the same direction as the outer-furnace track 200. During this process, there is no relative movement between the sheet carrier 2 and the outer-furnace track 200 until the outer-furnace track 200 docks with the inner-furnace track 203 or moves away from the inner-furnace track 203.

[0073] The driving source 800 may be a gas cylinder, an oil cylinder, or other structure capable of providing driving force, which is not specifically limited in the present disclosure.

[0074] In some embodiments, there are multiple second push boat sliders 1000, and the sheet carrier loading and unloading device 10 further includes: a connecting plate 1100 and a supporting block 1200. The connecting plate 1100 is disposed on the multiple second push boat sliders 1000 and connected to the multiple second push boat sliders 1000. The supporting block 1200 is disposed on the connecting plate 1100 and connected to the connecting plate 1100. The supporting block 1200 has a second bearing groove 1201, and the second bearing groove 1201 is configured to accommodate the bottom 220 of the furnace outer rail and a part of the side of the furnace outer rail 200 connected to the bottom 220 of the furnace outer rail. The gravity of the sheet carrier 2 is dispersed on the multiple second push boat sliders 1000, so that the second push boat sliders 1000 and the second push boat slide rail 900 are evenly stressed, so as to improve the sliding effect.

[0075] The vertical cross-sectional shape of the second bearing groove 1201 may be an arc, a rectangle, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0076] Exemplarily, the shape of the outer furnace rail 200 is circular, the shape of the second supporting groove 1201 is arc-shaped, the bottom 220 of the outer furnace rail and part of the side surface of the outer furnace rail 200 connected to the bottom 220 of the outer furnace rail are placed in the second supporting groove 1201, and the outer furnace rail 200 is fixedly connected to the support block 1200 by screws.

[0077] Fig.13 Shown is a cross-sectional view of a support block and an outer furnace rail provided in accordance with another embodiment of the present disclosure. Fig.13 Four other vertical cross-sectional shapes and connection methods of the external furnace rail 200 and the support block 1200 are shown.

[0078] In some embodiments, the sheet carrier loading and unloading device 10 further includes: at least one sensor 1300 configured to detect whether there is a sheet carrier 2 on the external furnace track 200 and / or detect the position of the sheet carrier 2 .

[0079] Exemplarily, the sensor 1300 may be disposed on the carrier plate 100 .

[0080] The sensor 1300 may be a photoelectric sensor, a micro switch, or other types of sensors, which is not specifically limited in the present disclosure.

[0081] In some embodiments, there are multiple external furnace rails 200 , and the multiple external furnace rails 200 are symmetrically arranged relative to the boat pusher assembly 300 so that the sheet carrier 2 is subjected to uniform force.

[0082] For example, Fig.14 As shown, there are two external furnace rails 200 , and the two external furnace rails 200 are symmetrically arranged relative to the boat pusher assembly 300 .

[0083] The present disclosure also provides a reactor system, such as Figures 1 to 3 As shown, the reaction furnace system 1 includes: the sheet carrier loading and unloading device 10 mentioned in the above embodiment and a reaction furnace 20. The reaction furnace 20 has a reaction chamber 201 and a furnace opening 202, the furnace opening 202 is located on the side of the reaction chamber 201, and the reaction furnace 20 also includes at least one furnace track 203, the furnace track 203 is arranged at the bottom of the reaction chamber 201, and the sheet carrier loading and unloading device 10 is configured to deliver the sheet carrier 2 from the furnace opening 202 into the reaction chamber 201 by docking with the furnace track 203.

[0084] Since the reaction furnace system 1 includes the sheet carrier loading and unloading device 10 , the reaction furnace system 1 has all the technical features and technical effects of the sheet carrier loading and unloading device 10 , which will not be described in detail herein.

[0085] In the embodiments of the present application, if the connection form is not clearly defined, the connection form may be a detachable connection form such as bolts and nuts, screws, buckles, magnets, etc. If there is no special requirement for a non-detachable connection form in some connections, a non-detachable connection may be made by welding, bonding, etc.

[0086] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.

[0087] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0088] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0089] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0090] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A sheet carrier loading and unloading device, characterized in that: Applied to a reaction furnace, the reaction furnace comprises a reaction chamber and a furnace opening, the furnace opening is located at the side of the reaction chamber, the reaction furnace further comprises at least one furnace track, the furnace track is arranged at the bottom of the reaction chamber; Wherein, the sheet carrier loading and unloading device comprises: At least one external furnace track, capable of docking with the internal furnace track, and configured to carry a sheet carrier, wherein the sheet carrier includes rollers, and the rollers are capable of rolling on the external furnace track and the internal furnace track; A push boat assembly, configured to apply a pushing force or a pulling force along an extension direction of the outer furnace track to the sheet carrier placed on the outer furnace track; An elastic limiting assembly is arranged below the outer rail of the furnace and extends to the side of the outer rail of the furnace, and is configured to limit the roller; Wherein, when the outer track of the furnace is docked with the inner track of the furnace, the extension direction of the outer track of the furnace is the same as the extension direction of the inner track of the furnace, wherein the push boat assembly applies a thrust along the extension direction of the outer track of the furnace to the sheet carrier on the outer track of the furnace, so that the roller rolls relative to the outer track of the furnace and the inner track of the furnace, and the sheet carrier is pushed into the reaction chamber; or, the push boat assembly applies a pulling force along the extension direction of the outer track of the furnace to the sheet carrier on the inner track of the furnace, so that the roller rolls relative to the outer track of the furnace and the inner track of the furnace, and the sheet carrier is pulled out of the reaction chamber; In the process that the push boat assembly applies a thrust or a pull along the extension direction of the outer furnace track to the sheet carrier on the outer furnace track, the roller applies pressure to the elastic limiting assembly to compress the elastic limiting assembly so that the roller passes over the elastic limiting assembly and continues to roll on the outer furnace track.

2. The sheet carrier loading and unloading device according to claim 1, characterized in that: The elastic limiting component comprises: A limiting member is arranged below the outer rail of the furnace, wherein the limiting member has a limiting portion, the limiting portion extends to the side of the outer rail of the furnace, and is configured to limit the roller; An elastic member, disposed below the limiting member; In the process that the push boat assembly applies a thrust or a pull along the extension direction of the outer furnace track to the sheet carrier on the outer furnace track, the roller applies pressure to the limit member to compress the elastic member so that the roller passes over the limit member and continues to roll on the outer furnace track.

3. The sheet carrier loading and unloading device according to claim 2, characterized in that: The roller comprises: The first limiting wheel; The second limiting wheel; A connecting shaft, wherein the connecting shaft connects the first limiting wheel and the second limiting wheel; Wherein, the connecting shaft contacts the top of the outer rail of the furnace, the first limiting wheel contacts one side of the outer rail of the furnace, and the second limiting wheel contacts the other side of the outer rail of the furnace; Wherein, the limiting member has a first bearing groove, and the first bearing groove is configured to accommodate the bottom of the outer furnace rail and a part of the side surface of the outer furnace rail connected to the bottom of the outer furnace rail; The upper surface of the limiting portion has an arc-shaped groove, the extension direction of the arc-shaped groove is perpendicular to the extension direction of the first bearing slot, and the arc-shaped groove can accommodate at least part of the first limiting wheel and / or at least part of the second limiting wheel.

4. The sheet carrier loading and unloading device according to any one of claims 1 to 3, characterized in that: The push boat assembly comprises: a clamping assembly configured to clamp the sheet carrier; The driving assembly is connected to the clamping assembly and is configured to drive the clamping assembly to move along the extension direction of the outer furnace track so as to apply a pushing force or a pulling force along the extension direction of the outer furnace track to the sheet carrier.

5. The sheet carrier loading and unloading device according to claim 4, characterized in that: Also includes: a first boat-pushing slide rail, wherein the extending direction of the first boat-pushing slide rail is the same as the extending direction of the furnace outer track; The first boat pushing sliding block is slidably connected to the first boat pushing sliding rail and is connected to the clamping assembly, so that the clamping assembly can move along the first boat pushing sliding rail under the drive of the driving assembly.

6. The sheet carrier loading and unloading device according to any one of claims 1 to 3, characterized in that: Also includes: a driving source configured to provide a driving force; a second boat-pushing slide rail, wherein the extension direction of the second boat-pushing slide rail is the same as the extension direction of the furnace outer track; At least one second boat push slider is slidably connected to the second boat push slide rail, and is located below the external furnace track and connected to the external furnace track, and the driving source is connected to the external furnace track, wherein, driven by the driving source, the external furnace track drives the second boat push slider to move along the second boat push slide rail so that the external furnace track is docked with the internal furnace track.

7. The sheet carrier loading and unloading device according to claim 6, characterized in that: The number of the second boat pushing sliders is multiple; Wherein, the sheet carrier loading and unloading device further comprises: a connecting plate, disposed on the plurality of second boat pushing sliders and connected to the plurality of second boat pushing sliders; A support block is arranged on the connecting plate and connected to the connecting plate, wherein the support block has a second bearing groove, and the second bearing groove is configured to accommodate the bottom of the outer furnace rail and a part of the side surface of the outer furnace rail connected to the bottom of the outer furnace rail.

8. The sheet carrier loading and unloading device according to any one of claims 1 to 3, characterized in that: Also includes: At least one sensor is configured to detect the presence of the sheet carrier on the external furnace track and / or to detect the position of the sheet carrier.

9. The sheet carrier loading and unloading device according to any one of claims 1 to 3, characterized in that: There are multiple external furnace rails, and the multiple external furnace rails are symmetrically arranged relative to the boat pusher assembly.

10. A reactor system, characterized in that: include: A reaction furnace, comprising a reaction chamber and a furnace opening, wherein the furnace opening is located at a side of the reaction chamber, and the reaction furnace further comprises at least one furnace track, wherein the furnace track is arranged at the bottom of the reaction chamber; The sheet carrier loading and unloading device according to any one of claims 1 to 9 is configured to deliver the sheet carrier from the furnace opening into the reaction chamber by docking with the rail in the furnace.

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