Ammonia water mixing device
By designing an ammonia water mixing device for the semiconductor industry, the special structure of mixed particles can achieve high-efficiency gas-liquid mixing between ammonia and pure water, the problem that the existing technology cannot meet the purity requirements of high-purity ammonia water is solved, and the efficient and low-cost ammonia water mixing effect is achieved.
Patent Information
- Application Number
- CN202421332992.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-12
- Publication Date
- 2025-03-11
- Estimated Expiration
- 2034-06-12
AI Technical Summary
The prior art is difficult to meet the purity requirements of the semiconductor industry for high-purity ammonia water, and conventional mixing devices cannot effectively improve the purity of ammonia water.
An ammonia water mixing device is designed, including a pipeline connection piece, a mixing piece and a plurality of mixed particles. By connecting and arranging multiple groups of mixed particles in the axial direction of the mixing piece, high-efficiency gas-liquid mixing of ammonia and ultrapure water is achieved.
It improves the efficiency and quality of mixing ammonia with pure water, meets the semiconductor industry's demand for high-purity ammonia water, while reducing pressure loss and mixing costs.
Smart Images
Figure CN222586172U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of semiconductor cleaning, and specifically relates to an ammonia water mixing device. Background Art
[0002] Electronic-grade ammonia is a wet electronic chemical with high purity. It is used in industries such as semiconductors, panels, and photovoltaic cells. It is an important material required for wafer cleaning and etching processes. There are currently two methods for preparing electronic-grade ultra-pure ammonia: one is liquid-liquid mixing, and the other is gas-liquid mixing. Semiconductor-related industries have extremely high requirements for material purity, and conventional mixing devices cannot be used in this industry because they cannot meet the purity requirements. Summary of the invention
[0003] The utility model provides an ammonia water mixing device, which realizes efficient gas-liquid mixing of ammonia gas and ultrapure water, and improves the efficiency and quality of high-purity ammonia water production.
[0004] In order to solve the above technical problems, the utility model adopts the following technical solutions:
[0005] An ammonia water mixing device, characterized in that it comprises two pipe connectors, a mixing element, and a plurality of mixing particles;
[0006] The pipeline connector includes a first joint and a second joint that are coaxially connected, the inner diameter of the first joint is larger than the inner diameter of the second joint; the second joint is used to connect the delivery pipeline;
[0007] The mixing element is cylindrical, and both ends thereof extend into the first joints of the two pipe connectors respectively and are fixedly connected to the first joints;
[0008] The mixing particles adopt ball rings; a plurality of the mixing particles are placed in axial sequence along the length direction of the mixing element; a plurality of the mixing particles are arranged in the radial direction of the mixing element; the circumferences of adjacent mixing particles are tangentially connected, and the circumferences of the mixing particles located at the periphery are tangentially connected to the inner wall of the mixing element.
[0009] In some specific embodiments, a sealing member is further included, which includes a first portion, a second portion, and a third portion which are coaxially connected in sequence, and a first through hole is formed which penetrates the first portion, the second portion, and the third portion; the first portion is truncated cone-shaped; the second portion is truncated cone-shaped; the third portion is cylindrical; the large end of the first portion is connected to the large end of the second portion, and the diameters are equal; the outer diameter of the third portion is equal to that of the mixing member;
[0010] The end of the mixing piece is located at one end of the sealing piece close to the first part, and the flared end is sleeved on the sealing piece; the first joint is sleeved on the end of the mixing piece, and the inner wall is crimped with the end of the mixing piece.
[0011] In some specific embodiments, the mixing component and the sealing component are both made of ultra-pure PFA material; the mixing component is mounted on the sealing component by means of heating and expanding.
[0012] In some specific embodiments, a fastener is further included, which includes a connecting portion having a cylindrical structure and formed with an internal thread, and a columnar fastening portion located at one end of the connecting portion and connected thereto; the fastening portion is formed with a coaxial second through hole;
[0013] The first joint is formed with an external thread adapted to the internal thread of the fastener; the fastener is threadedly connected to the first joint by the end thereof; the first part is installed in the second through hole; the fastening part is crimped to the end of the mixing piece.
[0014] In some specific embodiments, a flow divider is further included, which is a cylindrical body; a plurality of third through holes of equal diameter and evenly distributed are formed in the axial direction of the flow divider;
[0015] The flow dividing member is adapted to be installed in the first through hole and is installed in the first through hole.
[0016] In some specific embodiments, the sealing member further comprises a fourth portion, which is coaxially integrated with the first portion, the second portion and the third portion, is formed with a fourth through hole, and one end of the fourth portion is connected to the third portion;
[0017] A diameter of the fourth through hole is smaller than a diameter of the first through hole.
[0018] In some specific embodiments, the outer diameter of the fourth portion is adapted to fit the first joint, and a fifth through hole is formed at the end thereof, which is connected to the fourth through hole and has a diameter greater than that of the first through hole;
[0019] A groove adapted to be installed with the end of the fourth part is formed in the first joint, and the groove is annular along the axis direction of the first joint; the end of the fourth part is installed in the groove.
[0020] In some specific embodiments, an end surface facing the opening direction of the groove is formed on the inner side of the groove in the radial direction;
[0021] An annular axial protrusion is formed between the fifth through hole and the fourth through hole and is pressed tightly with the end surface.
[0022] In some specific embodiments, the protrusion is pointed.
[0023] In some specific embodiments, three mixing particles are arranged in the radial direction of the mixing element, and are tangentially connected to each other and to the inner wall of the mixing element.
[0024] Compared with the prior art, the advantages and positive effects of the utility model are as follows: the ammonia water mixing device of the utility model can be directly connected to the conveying pipeline, and ammonia and pure water passing through the mixing element are mixed by arranging multiple groups of mixing particles in the axial direction in the mixing element, thereby improving the mixing efficiency of ammonia and pure water; the inner diameter of the mixing element is larger than the inner diameter of the conveying pipeline, thereby ensuring sufficient mixing space in the mixing element while reducing pressure loss and ensuring supply speed; since the outer diameter of the mixing particles is equal to the height, two rows of windows with inwardly extending tongues are opened on the annular wall, and each layer of window holes has five tongues, so the flux is large and the resistance is small, and multiple layers of mixing particles are stacked in the axial direction, and each layer of mixing particles is randomly arranged, so that the entire mixing channel has a tortuous and changeable channel structure, which fully cuts the gas, realizes full mixing of the gas-liquid two-phase flow, and improves the mixing efficiency and quality.
[0025] The ammonia water mixing device of the utility model has the advantages of small volume, long service life, convenient installation, high mixing efficiency, maintenance-free, small pressure loss, and greatly reduced mixing cost. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, a brief introduction will be given below to the drawings required for use in the embodiments. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.
[0027] Figure 1 This is a schematic diagram of the axial cross-sectional structure of an embodiment of an ammonia water mixing device proposed by the utility model;
[0028] Figure 2 yes Figure 1 A local enlarged structural diagram of the part;
[0029] Figure 3 It is a structural schematic diagram of the pipeline connector;
[0030] Figure 4 It is a schematic diagram of the structure of the seal;
[0031] Figure 5 It is a structural schematic diagram of the diverter;
[0032] Figure 6 It is a schematic diagram of the structure of the mixing particles in the mixing element.
[0033] In the figure,
[0034] 1. Pipeline connector; 2. Mixing element; 3. Mixing particles; 4. Sealing element; 5. Fastener; 6. Diverter; 11. First joint; 12. Second joint; 111. Groove; 112. End face; 61. Third through hole; 41. First portion; 42. Second portion; 43. Third portion; 44. First through hole; 45. Fourth portion; 451. Fourth through hole; 452. Fifth through hole; 453. Protrusion; 51. Connecting portion; 52. Fastening portion; 521. Second through hole. DETAILED DESCRIPTION
[0035] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.
[0036] Reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 The utility model discloses an ammonia water mixing device, which comprises two pipeline connectors 1, a mixing element 2, and a plurality of mixing particles 3.
[0037] The pipeline connector 1 comprises a first joint 11 and a second joint 12 which are coaxially connected. The inner diameter of the first joint 11 is larger than the inner diameter of the second joint 12. The second joint 12 is used for connecting the delivery pipeline.
[0038] The mixing element 2 is cylindrical, and its two ends extend into the first joints 11 of the two pipe connectors 1 respectively and are fixedly connected to the first joints 11; the first joint 11 is used to connect the mixing element 2 whose inner diameter is larger than the inner diameter of the conveying pipeline; so that the mixing device is directly connected to the conveying pipeline, and mixing is carried out in the mixing element 2 whose inner diameter is larger than the conveying pipeline.
[0039] The mixing particles 3 are ball rings; each mixing particle 3 is axially connected in sequence along the length direction of the mixing element 2 or arranged radially in the mixing element 2; that is, multiple mixing particles 3 can be placed along the length direction of the mixing element 2; multiple mixing particles 3 can also be placed in the radial direction of the mixing element 2, and the mixing particles 3 arranged in the radial direction include multiple groups, which are arranged in a connected manner along the axial direction. The circumferences of adjacent mixing particles 3 are tangentially connected, and the circumferences of each mixing particle 3 located at the periphery are tangentially connected to the inner wall of the mixing element 2.
[0040] The ammonia-water mixing device of the utility model can be directly connected to a conveying pipeline, and ammonia and pure water passing through the mixing element 2 are mixed by arranging a plurality of groups of mixing particles 3 in a connected manner in the axial direction inside the mixing element 2, thereby improving the mixing efficiency of ammonia and pure water; the inner diameter of the mixing element 2 is larger than the inner diameter of the conveying pipeline, thereby ensuring sufficient mixing space inside the mixing element 2 while reducing pressure loss and ensuring supply speed; since the outer diameter of the ball ring is equal to the height, two rows of windows with inwardly extending tongues are opened on the ring wall, and each layer of window holes has five tongues, so the flux is large and the resistance is small, and multiple layers of ball rings are stacked in the axial direction, and each layer of ball rings is randomly arranged, so that the entire mixing channel has a tortuous and changeable channel structure, which fully cuts the gas, realizes full mixing of the gas-liquid two-phase flow, and improves the mixing efficiency and quality.
[0041] The ammonia water mixing device of the utility model has the advantages of small volume, long service life, convenient installation, high mixing efficiency, maintenance-free, small pressure loss, and greatly reduced mixing cost.
[0042] The specific structure and principle of the ammonia water mixing device of the present utility model are described in detail below through specific embodiments.
[0043] In some specific embodiments, reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 The ammonia water mixing device also includes a sealing member 4, which includes a first portion 41, a second portion 42, and a third portion 43 which are coaxially connected in sequence, and a first through hole 44 is formed that penetrates the first portion 41, the second portion 42, and the third portion 43; the first portion 41 is truncated cone-shaped; the second portion 42 is truncated cone-shaped; the third portion 43 is cylindrical; the large end of the first portion 41 is connected to the large end of the second portion 42, and the diameters are equal; the outer diameter of the third portion 43 is equal to that of the mixing member 2;
[0044] The end of the mixing element 2 is located at one end of the sealing element 4 close to the first portion 41 , and the expanded opening is sleeved on the sealing element 4 ; the first joint 11 is sleeved on the end of the mixing element 2 , and the inner wall is crimped with the end of the mixing element 2 .
[0045] The ammonia water mixing device of this embodiment is configured such that the mixing element 2 is sealed and connected to the sealing element 4 by expanding the end of the mixing element 2 and putting it on the sealing element 4; the connection area and the tight connection are increased to improve the sealing performance; the end of the mixing element 2 is put on the first part 41 and the second part 42 of the sealing element 4 and then extends into the first joint 11 and is connected to the inner wall of the first joint 11, and the end of the mixing element 2 corresponding to the large end part of the first part 41 and the second part 42 is crimped to the inner wall of the first joint 11, so that the mixing element 2 is fixedly connected to the first joint 11.
[0046] In some specific embodiments, reference Figure 1 , Figure 2 , Figure 3 , Figure 4 The mixing element 2, the sealing element 4 and the pipe connector 1 are all made of ultra-pure PFA material; the mixing element 2 is sleeved on the sealing element 4 by heating and expanding.
[0047] The ammonia water mixing device of this embodiment reduces the probability of impurities entering the ammonia water by using ultra-pure PFA material, thereby ensuring the quality of high-purity ammonia water and improving the reliability of providing high-purity ammonia water.
[0048] In some specific embodiments, reference Figure 1 , Figure 2 , Figure 3 , Figure 4 The ammonia water mixing device also includes a fastener 5, which includes a connecting portion 51 of a cylindrical structure and formed with an internal thread, and a columnar fastening portion 52 located at one end of the connecting portion 51 and connected thereto; the fastening portion 52 is formed with a coaxial second through hole 521.
[0049] The first joint 11 is formed with an external thread adapted to the internal thread of the fastener 5 ; the fastener 5 is threadedly connected to the first joint 11 by the end thereof; the first portion 41 is installed in the second through hole 521 ; the fastening portion 52 is crimped to the end of the mixing element 2 .
[0050] The ammonia water mixing device of this embodiment is crimped with the end of the mixing piece 2 outside the first part 41 through the end of the second through hole 521 of the fastening portion 52 of the fastener 5, and the crimping force is increased during the deepening of the threaded connection between the connecting portion 51 and the first joint 11, so that the threaded connection between the connecting portion 51 and the first joint 11 is always in a tight connection, preventing the threaded connection from becoming loose due to the vibration of the ammonia water mixing, thereby improving the stability and reliability of the ammonia water mixing device.
[0051] In some specific embodiments, reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , and also includes a diverter 6, which is a cylinder; a plurality of third through holes 61 of equal diameter and uniform distribution are formed in the axial direction of the diverter 6; the diverter 6 is installed and adapted to the first through hole 44, and is installed in the first through hole 44.
[0052] The ammonia water mixing device of this embodiment performs preliminary distribution of the incoming gas and liquid through the diverter 6 installed at the end of the mixing element 2, ensuring that the gas and liquid pass through all the mixing particles 3, ensuring full utilization of each mixing particle 3 as a mixing particle, and improving the mixing effect.
[0053] In some specific embodiments, reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 The seal 4 also includes a fourth part 45, which is coaxially integrated with the first part 41, the second part 42, and the third part 43, forming a fourth through hole 451, one end of which is connected to the third part 43; the diameter of the fourth through hole 451 is smaller than the diameter of the first through hole 44; the diverter 6 is installed in the first through hole 44 inside the fourth through hole 451.
[0054] The ammonia water mixing device of this embodiment sets a fourth through hole 451 smaller than the first through hole 44 in the sealing member 4, so that the diverter 6 will not slide toward the second joint 12 of the pipe connector 1, thereby ensuring the position of the diverter 6 in the sealing member 4, and further compressing the mixing particles 3 located on the inner side of the diverter 6 so that it does not rotate under the action of gas and liquid, thereby ensuring the effect of separating gas and liquid and ensuring the mixing efficiency and quality.
[0055] In some specific embodiments, reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 The outer diameter of the fourth part 45 is mounted and adapted to the first joint 11, and a fifth through hole 452 is formed at the end thereof, which is connected to the fourth through hole 451 and has a diameter larger than that of the first through hole 44; a groove 111 is formed in the first joint 11 and is mounted and adapted to the end of the fourth part 45, and is annular along the axial direction of the first joint 11; the end of the fourth part 45 is mounted in the groove 111.
[0056] The ammonia water mixing device of this embodiment increases the connection area by connecting the ring and the groove, thereby improving the sealing performance. A sealing ring can be arranged in the groove 111 to further improve the sealing performance.
[0057] In some specific embodiments, reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 An annular end face 112 facing the opening direction of the groove 111 is formed on the inner side of the groove 111 in the radial direction; an annular axial protrusion 453 is formed between the fifth through hole 452 and the fourth through hole 451 and is pressed and connected to the end face 112 .
[0058] The ammonia water mixing device of this embodiment further improves the sealing performance of the connection between the sealing member 4 and the pipeline connection joint by pressing the protrusion 453 and the end surface 112.
[0059] Preferably, the protrusion 453 is pointed.
[0060] In some specific embodiments, reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 Three mixing particles 3 are arranged in the radial direction of the mixing element 2 , and are tangentially connected to each other and to the inner wall of the mixing element 2 .
[0061] The mixing particles 3 of the ammonia water mixing device of this embodiment are arranged in multiple layers in the mixing element 2, and three mixing particles 3 are arranged tangentially in each layer. Due to the different axial directions between each layer, the entire mixing element 2 can be fully filled; each mixing particle 3 itself has a different axial direction angle, and the mixing of each layer can also achieve a staggered structure, which can fully cut and mix the gas and liquid and improve the mixing quality.
[0062] In some specific embodiments, the mixed particles 3 and the flow divider 6 are both made of ultra-pure PFA material.
[0063] In the description of the present invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.
[0064] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0065] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.
[0066] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations of the present invention. Ordinary technicians in the field can change, modify, replace and modify the above embodiments within the scope of the present invention.
Claims
1. An ammonia water mixing device, characterized in that: include: Two pipeline connectors; the pipeline connector comprises a first connector and a second connector which are coaxially connected, the inner diameter of the first connector is larger than the inner diameter of the second connector; the second connector is used to connect the delivery pipeline; A mixing element, which is cylindrical, with two ends extending into the first joints of the two pipe connectors respectively and fixedly connected to the first joints; A plurality of mixing particles are provided in the form of ball rings; the plurality of mixing particles are placed in axial sequence in the length direction of the mixing element; the plurality of mixing particles are arranged in the radial direction of the mixing element; the circumferences of adjacent mixing particles are tangentially connected, and the circumferences of the mixing particles located at the periphery are tangentially connected to the inner wall of the mixing element.
2. The ammonia water mixing device according to claim 1, characterized in that: It also includes a sealing member, which includes a first portion, a second portion, and a third portion which are coaxially connected in sequence, and a first through hole is formed that penetrates the first portion, the second portion, and the third portion; the first portion is truncated cone-shaped; the second portion is truncated cone-shaped; the third portion is cylindrical; the large end of the first portion is connected to the large end of the second portion, and the diameters are the same; the outer diameter of the third portion is equal to that of the mixing member; The end of the mixing piece is located at one end of the sealing piece close to the first part, and the flared end is sleeved on the sealing piece; the first joint is sleeved on the end of the mixing piece, and the inner wall is crimped with the end of the mixing piece.
3. The ammonia water mixing device according to claim 2, characterized in that: The mixing component and the sealing component are both made of ultra-pure PFA material; the mixing component is sleeved on the sealing component by means of heating and expanding.
4. The ammonia water mixing device according to claim 3, characterized in that: Also included is a fastener, which includes a connecting portion with a cylindrical structure and formed with an internal thread, and a columnar fastening portion located at one end of the connecting portion and connected thereto; the fastening portion is formed with a coaxial second through hole; The first joint is formed with an external thread adapted to the internal thread of the fastener; the fastener is threadedly connected to the first joint by the end thereof; the first part is installed in the second through hole; the fastening part is crimped to the end of the mixing piece.
5. The ammonia water mixing device according to claim 4, characterized in that: It also includes a flow divider, which is a cylinder; a plurality of third through holes of equal diameter and evenly distributed are formed in the axial direction of the flow divider; The flow dividing member is adapted to be installed in the first through hole and is installed in the first through hole.
6. The ammonia water mixing device according to claim 5, characterized in that: The sealing member further comprises a fourth portion, which is coaxially integrated with the first portion, the second portion and the third portion, is formed with a fourth through hole, and one end of the fourth portion is connected to the third portion; A diameter of the fourth through hole is smaller than a diameter of the first through hole.
7. The ammonia water mixing device according to claim 6, characterized in that: The outer diameter of the fourth portion is adapted to fit the first joint, and a fifth through hole is formed at the end thereof, which is connected to the fourth through hole and has a diameter larger than that of the first through hole; A groove adapted to be installed with the end of the fourth part is formed in the first joint, and the groove is annular along the axis direction of the first joint; the end of the fourth part is installed in the groove.
8. The ammonia water mixing device according to claim 7, characterized in that: An end surface facing the opening direction of the groove is formed on the inner side of the groove in the radial direction; An annular axial protrusion is formed between the fifth through hole and the fourth through hole and is pressed tightly with the end surface.
9. The ammonia water mixing device according to claim 8, characterized in that: The protrusion is in a pointed shape.
10. The ammonia water mixing device according to any one of claims 1 to 9, characterized in that: Three mixing particles are arranged in the radial direction of the mixing element, and are tangentially connected to each other and to the inner wall of the mixing element.