Wet etching spraying device

Abstract

The utility model discloses a wet etching spraying device which comprises a spraying head, the upper end of the spraying head is connected with a spraying pipe, the spraying pipe is connected with an etching liquid supply pipe, the etching liquid supply pipe is connected with a compressed air supply pipe, and the bottom of the spraying head is provided with spraying holes. And the etching uniformity is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of glass processing, and specifically relates to a wet etching spray device. Background Art

[0002] Wet etching equipment is a common semiconductor manufacturing equipment, which is used to evenly spray the etching liquid onto the surface of the material for etching. At present, some wet etching equipment uses relatively viscous phosphoric acid and oxalic acid, which is easy to crystallize. These etching liquids are sprayed out with pressure through the small holes of the nozzle of the equipment, and then evenly sprayed onto the surface of the material for etching.

[0003] However, some of these liquid chemicals will remain in the spray head after the spraying is completed, and the diameter of the nozzle orifice is very small and easy to be clogged. After a period of time, solid particles such as colloids or crystals will be generated to clog the nozzle, affecting the spraying effect of subsequent operations, and then affecting the uniformity of etching. Therefore, it is necessary to clean the nozzle of the etching machine regularly and frequently. The nozzle cleaning process is time-consuming and laborious. The etching chamber needs to be opened during installation and maintenance, which affects production efficiency. At the same time, the etching liquid will cause certain pollution when exposed to the environment, affecting the etching effect. Therefore, the etching liquid needs to be replaced frequently, which increases the cost of waste liquid treatment and shortens the use cycle of the liquid chemical. It not only pollutes the environment, but also has certain harm to the health of maintenance personnel.

[0004] The existing wet etching shower head is a single-hole shower head, which also has some problems: the etching rate is unstable, the etching liquid cannot form a thin film evenly on the material surface, the uniformity of the etching surface cannot be guaranteed, and there are abnormal operating conditions such as the accumulation of etching residues at the edges and corners.

[0005] The utility model patent with announcement number CN210765517U disclosed a special spray etching machine on June 16, 2020. The spray etching machine includes a base, a shell, a transmission mechanism, a metal plate, a support plate, a dosing tank, an adjustment device, a drug outlet pipe, a heating wire, a spray nozzle and a recovery pipe. The spray etching machine cannot solve the problem of spray head blockage and cannot improve etching uniformity. Utility Model Content

[0006] The utility model aims to provide a wet etching spray device which reduces spray blockage and improves etching uniformity in view of the deficiencies in the prior art.

[0007] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0008] The wet etching spray device comprises a spray head, wherein the upper end of the spray head is connected with a spray pipe, the spray pipe is connected with an etching liquid supply pipe, the etching liquid supply pipe is connected with a compressed air supply pipe, and a spray hole is arranged at the bottom of the spray head.

[0009] A gas flow meter is provided on the compressed air supply pipe.

[0010] A mounting seat is provided at one end of the spray pipe, and a driving seat is provided at the other end. Both ends of the spray pipe are rotatably connected to the mounting seat and the driving seat respectively.

[0011] The spray pipes are arranged at equal intervals between the mounting seat and the driving seat, and the spray heads are arranged at equal intervals on the spray pipes.

[0012] The spray hole is arranged in the middle of the bottom end of the spray head, and three spray holes are arranged at equal intervals.

[0013] A first solenoid valve is provided on the etching liquid supply pipe, and a second solenoid valve is provided on the compressed air supply pipe; the first solenoid valve and the second solenoid valve are connected to a PLC system, a first intermediate relay is connected between the PLC system and the first solenoid valve, and a second intermediate relay is connected between the PLC system and the second solenoid valve.

[0014] The etching liquid supply pipe is also provided with a first throttle valve, and the compressed air supply pipe is also provided with a second throttle valve.

[0015] The technical effect of the utility model is as follows: the wet etching spray device of the utility model is adopted, and a PLC-controlled anti-clogging device is set, and compressed air is used to filter impurities in the etching liquid to prevent clogging of the spray head, thereby ensuring the uniformity and continuity of the spraying, and solving the problem that the spray head is easily blocked due to etching conditions or etching liquid sediment and residues, effectively preventing the occurrence of spray blockage, ensuring the normal use of the equipment and stable etching effect, and being able to achieve a more stable etching rate and a more uniform etching surface shape during the etching process; replacing the current complex and cumbersome maintenance process, avoiding the etching liquid from being exposed to the environment, greatly reducing the waste liquid treatment cost, and improving the use cycle of the liquid medicine, while ensuring the process working environment of the wet etching; by setting a structure that can realize the reciprocating shaking of the spray pipe, it can effectively avoid the situation where the etching liquid is etched and residually gathered at the corners of the product, ensuring the uniformity of the distribution of the etching liquid and the uniformity of the etching surface shape.

[0016] In summary, the advantages include the following:

[0017] 1. Improved the stability of etching rate and ensured the uniformity of etching surface;

[0018] 2. Reduce the blockage of sprinkler heads and improve the efficiency of equipment use;

[0019] 3. Reducing the opening of the etching chamber reduces the cost of waste liquid treatment, extends the use cycle of the etching liquid, and is beneficial to environmental protection;

[0020] 4. The equipment has a compact structure, which is convenient for installation and maintenance, and can ensure the safety of maintenance personnel to a certain extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] This specification includes the following drawings, which show the following contents:

[0022] Figure 1 It is a control schematic diagram of the wet etching spray device of the utility model;

[0023] Figure 2 It is a schematic diagram of the top view of the spray pipe of the utility model;

[0024] Figure 3 It is a side view of the sprinkler head of the utility model;

[0025] Figure 4 It is a structural schematic diagram of the spray hole of the utility model.

[0026] Marked in the figure are: 1. Etching liquid supply pipe; 2. Compressed air supply pipe; 3. Spray pipe; 4. Spray head; 5. Spray hole; 6. Gas flow meter; 7. Mounting seat; 8. Drive seat; 9. First solenoid valve; 10. Second solenoid valve; 11. First throttle valve; 12. Second throttle valve; 13. First intermediate relay; 14. Second intermediate relay. DETAILED DESCRIPTION

[0027] The specific implementation methods of the utility model are further explained in detail below with reference to the accompanying drawings through the description of embodiments, with the aim of helping those skilled in the art to have a more complete, accurate and in-depth understanding of the inventive concept and technical solution of the present invention and to facilitate their implementation.

[0028] like Figures 1 to 4 As shown, the wet etching spray device comprises a spray head 4, the upper end of the spray head 4 is connected to a spray pipe 3, the spray pipe 3 is connected to an etching liquid supply pipe 1, the etching liquid supply pipe 1 is connected to a compressed air supply pipe 2, and a spray hole 5 is provided at the bottom of the spray head 4. The compressed air supply pipe 2 is an anti-clogging device of the device, which can use compressed air to filter and remove impurities or particles in the etching liquid left in the spray head 4, prevent the spray head 4 from being blocked, and ensure the uniformity and continuity of spraying.

[0029] A gas flow meter 6 is provided on the compressed air supply pipe 2. The gas flow meter 6 can detect the gas flow in the compressed air supply pipe 2. When the spray head 4 is cleaning, the gas flow is a stable value, which means that the particles have been cleaned.

[0030] A mounting seat 7 is provided at one end of the spray pipe 3, and a driving seat 8 is provided at the other end. Both ends of the spray pipe 3 are rotatably connected to the mounting seat 7 and the driving seat 8, respectively. When the product to be etched is placed on the base, the base can reciprocate within a certain angle to make the etching liquid evenly distributed. At the same time, through the setting of the mounting seat 7 and the driving seat 8, a driving motor is provided in the driving seat 8. The driving motor drives the reciprocating shaking of the entire spray pipe 3 through gear transmission, thereby changing the spraying angle and range of the liquid from the spray head 4. When the spray pipe 3 and the base move synchronously, the synchronous movement of the spray head 4 and the product to be etched can be achieved, ensuring that the relative distance between the two is always consistent, ensuring that the amount of liquid sprayed in the area to be etched of the product is uniform, thereby improving the uniformity of the distribution of the etching liquid, and avoiding the abnormal situation of residual accumulation of etching at the corners of the product, thereby improving the uniformity of the etching effect of the product. Among them, the movable angle range of the spray pipe 3 is 30° on the left and right.

[0031] The spray pipe 3 is arranged at equal intervals between the mounting seat 7 and the driving seat 8, and the spray head 4 is arranged at equal intervals on the spray pipe 3. The above structure not only expands the spray range of the etching liquid, but also increases the amount of liquid spray per unit time. Combined with the synchronous shaking of the spray pipe 3 and the product, the spray efficiency and etching uniformity can be effectively improved. The upper end of the spray head 4 is a cylindrical structure, which can be easily installed on the spray pipe 3, which is convenient for the maintenance process of the equipment in the later stage.

[0032] The spray hole 5 is arranged in the middle of the bottom end of the spray head 4, and there are three spray holes 5, which are arranged at equal intervals. The spray hole 5 adopts a three-hole design, and the aperture and distribution of the three-hole spray head 4 are more uniform, and can also be adjusted to a spray effect with a circular or conical cross-section. The etching liquid can be evenly sprayed on the surface of the material to form a thin film, which can reduce the residual aggregation of the etching liquid at the corners of the material, ensure the uniform dispersion of the etching liquid, make the etching effect uniform, and improve the etching quality of the product.

[0033] The spray hole 5 adopts a three-hole design, and the spray pressure value, flow rate, flow velocity, spray range and spray cone angle and other parameters can be controlled by PLC, so that the liquid can be sprayed onto the product surface in a cylindrical or conical shape, thereby meeting the production requirements of the product. Control the pressure value, flow rate, flow velocity, spray range and spray cone angle before and after the spray, and also consider the pressure loss formula after the single hole becomes multi-hole, and the relationship between the pressure and flow velocity of the front and rear nozzles; the formula involved in the spray design is as follows (the following parameters can be calculated through the flow rate, flow velocity, pressure of the equipment and the existing spray head 4):

[0034] Spray flow formula: Q = C*A*√2gh or Q = V*A, where C is the flow coefficient, A is the cross-sectional area of ​​the spray head 4, V is the flow rate of the etching liquid, g is the acceleration of gravity, and h is the outlet height of the spray head 4;

[0035] Spray flow formula: Q = C*A*√2gh or Q = V*A, where C is the flow coefficient, A is the nozzle cross-sectional area, V is the etching liquid flow rate, g is the gravitational acceleration, and h is the nozzle outlet height;

[0036] Spray jet angle formula: θ = arctan (Q / πd 2 A), where d is the diameter of the sprinkler head aperture;

[0037] Spray range formula: R = 1 / 2*sqrt((d 2 +h 2 ) / g), where R is the spray distance, d is the spray head aperture, and h is the nozzle outlet height;

[0038] Spray pressure formula: P = ρgh, where ρ is the density of the etching solution, g is the acceleration of gravity, and h is the nozzle outlet height;

[0039] Spray flow rate formula: V = Q / (π*(D / 2) 2 ), where D is the diameter of the sprinkler head;

[0040] Pressure loss formula: ΔP = f*(L / D)*(ρv 2 / 2), where L is the length of the shower head, D is the diameter of the shower head, f is the friction coefficient of the shower head, and V is the spray velocity of the etching liquid;

[0041] The relationship between the pressure and flow rate of the front and rear nozzles is: P1 / P2=ρ1V1 / ρ2V2, where P1 and V1 are the pressure and flow rate before spraying, and P2 and V2 are the pressure and flow rate before spraying.

[0042] A first solenoid valve 9 is provided on the etching liquid supply pipe 1, and a second solenoid valve 10 is provided on the compressed air supply pipe 2; the first solenoid valve 9 and the second solenoid valve 10 are connected to a PLC system, a first intermediate relay 13 is connected between the PLC system and the first solenoid valve 9, and a second intermediate relay 14 is connected between the PLC system and the second solenoid valve 10. The first solenoid valve 9 is used to control the supply and disconnection of the etching liquid, and the second solenoid valve 10 is used to control the supply and disconnection of compressed air. The PLC control system has high reliability and is easy to adjust. The PLC control system is used to control the spraying amount and spraying method of the etching liquid. The working parameters of the spray head 4 can be adjusted as needed to achieve uniform spraying of the etching liquid. The intermediate relay is used to monitor the transmission of electrical signals of the solenoid valves. The use of the PLC control system and the intermediate relay can effectively control the on and off of the two solenoid valves.

[0043] The etching liquid supply pipe 1 is also provided with a first throttle valve 11, and the compressed air supply pipe 2 is also provided with a second throttle valve 12. The first throttle valve 11 prevents the residual etching liquid from damaging the solenoid valve due to excessive pressure, and plays a protective and throttling role; the second throttle valve 12 can control the gas flow.

[0044] When uneven etching is found in the equipment spraying effect, and after investigation it is determined that the cause is spray blockage, there is no need to open the equipment etching chamber. The blockage of the spray head 4 can be maintained without contaminating the etching liquid and the exposed etching liquid polluting the environment.

[0045] The specific steps are as follows:

[0046] 1. The equipment is switched to manual mode and the etching liquid supply valve is closed at the same time;

[0047] 2. The equipment end closes the first solenoid valve 9 and the first throttle valve 11 at the same time;

[0048] 3. The equipment end opens the second solenoid valve 10 and the second throttle valve 12 at the same time;

[0049] 4. Allow the compressed gas to work in the sprinkler system for a period of time, and observe the gas flow meter 6 at the same valve pressure for the same period of time. If the subsequent values ​​are consistent, it means that the blockage has been repaired;

[0050] 5. If the blockage has not been resolved, you only need to circulate and switch the compressed air and etching liquid, adjust and switch the spraying amount and spraying method of the etching liquid through the PLC control system, and observe the gas flow and spraying conditions. When the gas flow meter 6 subsequently displays a stable value for a period of time, it means that the blockage has been resolved.

[0051] The wet etching spray device is provided with a PLC-controlled anti-clogging device, and compressed air is used to filter impurities in the etching solution to prevent clogging of the spray head 4, thereby ensuring uniformity and continuity of spraying, solving the problem that the spray head 4 is easily clogged due to etching conditions or etching solution sediment and residues, effectively preventing spray clogging from occurring, ensuring normal use of the equipment and stable etching effect, and being able to achieve a more stable etching rate and a more uniform etching surface shape during the etching process; replacing the current complex and cumbersome maintenance process, avoiding exposure of the etching solution to the environment, greatly reducing the cost of waste liquid treatment, and increasing the use cycle of the liquid medicine, while ensuring the process working environment of the wet etching; and providing a structure that can realize reciprocating shaking of the spray pipe 3, effectively avoiding the situation where the etching solution accumulates at the corners of the product after etching, thereby ensuring the uniformity of the distribution of the etching solution and the uniformity of the etching surface shape.

[0052] In summary, the advantages include the following:

[0053] 1. Improved the stability of etching rate and ensured the uniformity of etching surface;

[0054] 2. Reduce the blockage of the sprinkler head 4 and improve the efficiency of the equipment;

[0055] 3. Reducing the opening of the etching chamber reduces the cost of waste liquid treatment, extends the use cycle of the etching liquid, and is beneficial to environmental protection;

[0056] 4. The equipment has a compact structure, which is convenient for installation and maintenance, and can ensure the safety of maintenance personnel to a certain extent.

[0057] The above is an exemplary description of the utility model in conjunction with the accompanying drawings. Obviously, the specific implementation of the utility model is not limited to the above-mentioned method. As long as various non-substantial improvements are made using the method concept and technical solution of the utility model; or the above concept and technical solution of the utility model are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.

Claims

1. A wet etching spray device, characterized in that: It comprises a spray head (4), the upper end of the spray head (4) is connected to a spray pipe (3), the spray pipe (3) is connected to an etching liquid supply pipe (1), the etching liquid supply pipe (1) is connected to a compressed air supply pipe (2), and the bottom of the spray head (4) is provided with a spray hole (5).

2. The wet etching spray device according to claim 1, characterized in that: The compressed air supply pipe (2) is provided with a gas flow meter (6).

3. The wet etching spray device according to claim 2, characterized in that: One end of the spray pipe (3) is provided with a mounting seat (7), and the other end is provided with a driving seat (8), and the two ends of the spray pipe (3) are rotatably connected to the mounting seat (7) and the driving seat (8) respectively.

4. The wet etching spray device according to claim 3, characterized in that: The spray pipes (3) are arranged at equal intervals between the mounting seat (7) and the driving seat (8), and the spray heads (4) are arranged at equal intervals on the spray pipes (3).

5. The wet etching spray device according to any one of claims 1 to 4, characterized in that: The spray hole (5) is arranged at the middle of the bottom end of the spray head (4), and there are three spray holes (5), which are arranged at equal intervals.

6. The wet etching spray device according to claim 5, characterized in that: The etching liquid supply pipe (1) is provided with a first solenoid valve (9), and the compressed air supply pipe (2) is provided with a second solenoid valve (10); the first solenoid valve (9) and the second solenoid valve (10) are connected to a PLC system, a first intermediate relay (13) is connected between the PLC system and the first solenoid valve (9), and a second intermediate relay (14) is connected between the PLC system and the second solenoid valve (10).

7. The wet etching spray device according to claim 6, characterized in that: The etching liquid supply pipe (1) is also provided with a first throttle valve (11), and the compressed air supply pipe (2) is also provided with a second throttle valve (12).

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