Epitaxial jig capable of effectively positioning

Abstract

The utility model discloses an effective positioning extension jig which comprises a top cover, a first pressing block is machined at the bottom of the top cover, a first limiting step is machined on one side of the first pressing block, a separation disc is arranged below the top cover, and the upper surface of the separation disc and a first supporting block are integrally formed. A positioning groove is formed in the front end of the inner cavity, and the positioning groove and the clamping groove are formed in the inner wall of the gasket. According to the extension jig capable of effectively positioning, through cooperation of the first pressing block, the first limiting step, the second pressing block and the second limiting step with the inner cavity and the clamping groove, the top cover and the separation disc can be buckled with the gasket, it is guaranteed that relative rotation cannot occur, and the positioning effect is achieved; and through cooperation of a first supporting block, a first positioning block, a first clamping block, a second supporting block, a second positioning block and a second clamping block with an inner cavity, a positioning groove and a clamping groove, buckling of the gasket, the separation disc and the bottom plate is achieved, it is guaranteed that relative rotation cannot be achieved, the positioning capacity is further improved, and practicability is high.

Description

Technical Field

[0001] The utility model relates to the technical field of epitaxial fixtures, in particular to an epitaxial fixture for effective positioning. Background Art

[0002] Epitaxial wafers need to be calcined at high temperature without oxygen before use, but during this process, the epitaxial substrate is prone to deformation, so an epitaxial fixture is needed to restrict it in order to reduce the deformation rate of the epitaxial wafer. In the existing technology, the epitaxial wafer is clamped by a splint to prevent it from deforming, but the splint used in this method has no effective positioning and is prone to relative rotation, which makes the epitaxial wafer easy to be scratched, and when multiple pieces are clamped, the operation is difficult. Summary of the invention

[0003] The purpose of the utility model is to provide an effectively positioned epitaxial fixture to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an effective positioning epitaxial jig comprises a top cover, a first pressing block is processed on the bottom of the top cover, a first limiting step is processed on one side of the first pressing block, a separating plate is arranged below the top cover, the upper surface of the separating plate is integrally formed with the first supporting block, the front end of the first supporting block is integrally formed with the first positioning block, the rear end of the first supporting block is integrally formed with the first clamping block, the bottom of the separating plate is integrally formed with the second pressing block, a second limiting step is processed on one side of the second pressing block, a bottom plate is arranged below the separating plate, the top of the bottom plate is integrally formed with the second supporting block, the front end of the second supporting block is integrally formed with the second positioning block, the rear end of the second supporting block is integrally formed with the second clamping block, a gasket is arranged between the top cover, the separating plate and the bottom plate, an inner cavity is opened in the middle position of the gasket, a positioning groove is arranged at the front end of the inner cavity, a clamping groove is arranged at the rear end of the inner cavity, and the positioning groove and the clamping groove are both opened on the inner wall of the gasket.

[0005] Preferably, the separation plate, the gasket and the bottom plate are all processed with a plurality of positioning holes, the plurality of positioning holes are evenly distributed on the separation plate, the gasket and the bottom plate, and the plurality of positioning holes are socketed with the pin rods.

[0006] Preferably, the upper surface of the top cover is processed with a first positioning reference, and the lower surface of the bottom plate is processed with a second positioning reference.

[0007] Preferably, the matching tolerance grade of the positioning hole and the pin rod is F grade.

[0008] Preferably, the upper surface of the top cover and the lower surface of the bottom plate are mirror-polished.

[0009] Compared with the prior art, the beneficial effects of the utility model are as follows: the effective positioning epitaxial fixture, through the cooperation of the first pressure block, the first limiting step, the second pressure block and the second limiting step with the inner cavity and the card slot, enables the top cover and the separator plate to be buckled with the gasket, and ensures that they cannot rotate relative to each other, thereby playing a positioning role; through the cooperation of the first support block, the first positioning block, the first card block, the second support block, the second positioning block and the second card block with the inner cavity, the positioning slot and the card slot, the gasket is buckled with the separator plate and the bottom plate, and ensures that they cannot rotate relative to each other, thereby further improving the positioning ability; and through the cooperation of the positioning hole and the pin rod, the relative stability of the gasket, the separator plate and the bottom plate is improved, effectively reducing the accuracy difference caused by wear, and the number of separator plates and gaskets can be increased or decreased according to actual needs to meet the use requirements of different numbers of epitaxial wafers, thereby having strong practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a schematic diagram of the structure of the utility model;

[0011] Figure 2 for Figure 1 Schematic diagram of the explosion structure;

[0012] Figure 3 for Figure 2 A schematic diagram of a top cover and a first positioning reference structure;

[0013] Figure 4 for Figure 3 Schematic diagram of the bottom structure;

[0014] Figure 5 for Figure 2 A schematic structural diagram of a separation plate and a first support block;

[0015] Figure 6 for Figure 5 Schematic diagram of the bottom structure;

[0016] Figure 7 for Figure 2 A schematic diagram of the structure of the bottom plate and the second support block;

[0017] Figure 8 for Figure 7 Schematic diagram of the bottom structure;

[0018] Fig. 9 for Figure 2 Schematic diagram of the gasket structure.

[0019] In the figure: 1, top cover, 2, first pressure block, 3, first limiting step, 4, partition plate, 5, first support block, 6, first positioning block, 7, first clamping block, 8, second pressure block, 9, second limiting step, 10, bottom plate, 11, second support block, 12, second positioning block, 13, second clamping block, 14, gasket, 15, inner cavity, 16, positioning groove, 17, clamping groove, 18, positioning hole, 19, pin rod, 20, first positioning reference, 21, second positioning reference. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] See also Figure 1-9 The utility model provides a technical solution: an effective positioning epitaxial fixture, comprising a top cover 1, a first pressing block 2 is processed on the bottom of the top cover 1, the first pressing block 2 can be sleeved with a gasket 14, a first limiting step 3 is processed on one side of the first pressing block 2, the first limiting step 3 is sleeved with a card slot 17, a separator 4 is arranged below the top cover 1, the upper surface of the separator 4 is integrally formed with the first support block 5, the first support block 5 is sleeved with the inner cavity 15 of the gasket 14, the front end of the first support block 5 is integrally formed with the first positioning block 6, the first positioning block 6 is sleeved with the positioning groove 16, the rear end of the first support block 5 is integrally formed with the first card block 7, the first card block 7 is sleeved with the card slot 17, the bottom of the separator 4 is integrally formed with the second pressing block 8, the second pressing block 8 is socketed with the inner cavity 15 of the gasket 14, a second limiting step 9 is processed on one side of the second pressure block 8, a bottom plate 10 is arranged under the separator disk 4, the top of the bottom plate 10 is integrally formed with the second support block 11, the front end of the second support block 11 is integrally formed with the second positioning block 12, and the rear end of the second support block 11 is integrally formed with the second clamping block 13, a gasket 14 is arranged between the top cover 1, the separator disk 4 and the bottom plate 10, an inner cavity 15 is opened in the middle position of the gasket 14, a positioning groove 16 is arranged at the front end of the inner cavity 15, and a clamping groove 17 is arranged at the rear end of the inner cavity 15, the positioning groove 16 and the clamping groove 17 are both opened on the inner wall of the gasket 14, and the number of separator disks 4 and gaskets 14 can be increased or decreased according to actual use requirements to realize the carrying of different numbers of epitaxial wafers.

[0022] Multiple positioning holes 18 are processed on the separator plate 4, the gasket 14 and the bottom plate 10. The multiple positioning holes 18 are evenly distributed on the separator plate 4, the gasket 14 and the bottom plate 10, and the multiple positioning holes 18 are connected with the pin rod 19. The upper surface of the top cover 1 is processed with a first positioning reference 20, and the lower surface of the bottom plate 10 is processed with a second positioning reference 21. The first positioning reference 20 and the second positioning reference 21 are used for laser recognition. The matching tolerance grade of the positioning hole 18 and the pin rod 19 is Class F. The upper surface of the top cover 1 and the lower surface of the bottom plate 10 are mirror-polished to ensure the accuracy of laser recognition and reduce the adverse effects caused by surface defects.

[0023] When in use, the gasket 14 is socketed with the base plate 10, so that the inner cavity 15 of the gasket 14 is socketed with the second supporting block 11 of the base plate 10. During this process, the positioning groove 16 of the gasket 14 is socketed with the second positioning block 12 of the base plate 10, and the clamping groove 17 of the gasket 14 is socketed with the second clamping block 13 of the base plate 10. Then the pulling pin 19 is inserted into the positioning hole 18 of the gasket 14, and passes through the gasket 14 and the positioning hole 18 of the base plate 10. The epitaxial wafer to be heated is placed in the inner cavity 15 of the gasket 14. The separator 4 and the gasket 14 are selected according to actual needs, and the gasket 14 is socketed with the separator 4, so that the inner cavity 15 of the gasket 14 is socketed with the first supporting block 5 of the separator 4. The positioning groove 16 and the clamping groove 17 of the gasket 14 are matched with the first positioning block 6 and the first clamping block 7 of the separator 4. The gasket 14 and the separator plate 4 are assembled and further connected with each other through the pin rod 19 and the pin hole. After the epitaxial wafer to be heated is placed in the inner cavity 15 of the gasket 14, multiple separator plates 4 are pulled and connected with the remaining gaskets 14 in turn, so that the second pressure block 8 at the bottom of the separator plate 4 is connected with the inner cavity 15 and the groove 17 of the gasket 14 under the action of the second limiting step 9, and fits tightly with the upper surface of the epitaxial wafer to be heated in the corresponding gasket 14, and the connection of multiple separator plates 4 is completed in turn, and finally the top cover 1 is pulled, so that the first pressure block 2 of the top cover 1 is connected with the inner cavity 15 and the groove 17 of the top gasket 14 under the action of the first limiting step 3 to realize the installation of the top cover. Through the above operations, the assembly of multiple epitaxial wafers to be heated is completed, and finally they are sent into the furnace body for heating.

[0024] In the description of the present invention, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inside", "front", "center", "both ends" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0025] In the present utility model, unless otherwise clearly stipulated and limited, the terms "installation", "setting", "connection", "fixation", "screw-on" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the present utility model according to the specific circumstances.

[0026] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An effective positioning epitaxial fixture, comprising a top cover (1), characterized in that: The bottom of the top cover (1) is processed with a first pressing block (2), one side of the first pressing block (2) is processed with a first limiting step (3), a partition plate (4) is arranged below the top cover (1), the upper surface of the partition plate (4) is integrally formed with the first support block (5), the front end of the first support block (5) is integrally formed with the first positioning block (6), the rear end of the first support block (5) is integrally formed with the first clamping block (7), the bottom of the partition plate (4) is integrally formed with the second pressing block (8), one side of the second pressing block (8) is processed with a second limiting step (9), and a bottom plate (10) is arranged below the partition plate (4). The top of the bottom plate (10) is integrally formed with the second support block (11), the front end of the second support block (11) is integrally formed with the second positioning block (12), the rear end of the second support block (11) is integrally formed with the second clamping block (13), a gasket (14) is provided between the top cover (1), the partition plate (4) and the bottom plate (10), an inner cavity (15) is provided at the middle position of the gasket (14), a positioning groove (16) is provided at the front end of the inner cavity (15), a clamping groove (17) is provided at the rear end of the inner cavity (15), and the positioning groove (16) and the clamping groove (17) are both provided on the inner wall of the gasket (14).

2. The effective positioning epitaxial fixture according to claim 1, characterized in that: The separation plate (4), the gasket (14) and the bottom plate (10) are all processed with a plurality of positioning holes (18), the plurality of positioning holes (18) are evenly distributed on the separation plate (4), the gasket (14) and the bottom plate (10), and the plurality of positioning holes (18) are sleeved with the pin rods (19).

3. The effective positioning epitaxial fixture according to claim 1, characterized in that: The upper surface of the top cover (1) is processed with a first positioning reference (20), and the lower surface of the bottom plate (10) is processed with a second positioning reference (21).

4. The effective positioning epitaxial fixture according to claim 2, characterized in that: The matching tolerance grade of the positioning hole (18) and the pin rod (19) is grade F.

5. The effective positioning epitaxial fixture according to claim 1, characterized in that: The upper surface of the top cover (1) and the lower surface of the bottom plate (10) are mirror-polished.

Images