Special-shaped opening structure of guide cylinder for capturing liquid opening distance of single crystal furnace

Abstract

The utility model discloses a guide cylinder special-shaped opening structure for capturing the liquid opening distance of a single crystal furnace. The guide cylinder special-shaped opening structure comprises a single crystal furnace body and a single crystal furnace guide cylinder arranged in the single crystal furnace body, a guide cylinder flange is arranged at the upper tail end of the guide cylinder of the single crystal furnace, a special-shaped opening is formed in the guide cylinder flange, dark spots are presented in a camera picture and are locally parallel to the edge of the guide cylinder opening due to the special-shaped opening, and measurement results can be consistent when measurement is performed at any position within the range of parallel lines. Therefore, the phenomenon that actual measurement positions are different due to the installation deviation of a thermal field and the angle deviation of a camera is effectively reduced, and the improvement of pressing and supporting the flange of the guide cylinder has the advantages that the flange of the guide cylinder can be prevented from being installed and attached too tightly; therefore, the use practicability of the flow guide cylinder of the single crystal furnace is effectively improved.

Description

Technical Field

[0001] The utility model belongs to the technical field related to single crystal furnaces, and in particular relates to a guide tube special-shaped opening structure used for capturing the liquid mouth distance of a single crystal furnace. Background Art

[0002] Monocrystalline silicon is an important material for high-precision equipment such as integrated circuits and solar panels. It has strict requirements on the oxygen content in silicon wafers to prevent the manufactured chips from burning during use and other serious accidents. In the process of monocrystalline silicon growth, oxygen mainly comes from the adsorbed oxygen on the surface of polycrystalline raw materials and the crucible. Reducing the concentration of oxygen in the melt is the primary problem faced by monocrystalline silicon growth. Since the oxygen in the melt mostly exists in the form of silicon oxide, the argon gas flow is converged to the center of the crucible through the guide tube, thereby accelerating the volatilization of silicon oxide and greatly reducing the oxygen concentration in the melt. At the same time, the converged argon gas flow can accelerate the cooling of the ingot, increase the axial temperature gradient of the ingot, and increase the growth rate of the ingot. The guide tube is an indispensable and important component in the monocrystalline silicon growth furnace and plays a very important role in the growth of monocrystalline silicon materials. The processing technology and material selection of the guide tube have a great relationship with the growth rate control of the crystal and the life of the guide tube itself. The guide tube can not only reduce the argon flow vortex cells on the upper part of the furnace body during the growth of single crystal silicon, but also reduce the deposition of silicon oxide on the upper part of the single crystal furnace. The distance from the bottom of the guide tube to the molten silicon liquid surface in the thermal field of the single crystal furnace, the liquid mouth distance is one of the important parameters in the single crystal process. Since the middle opening of the guide tube has no reflective effect, when looking from top to bottom, there will be a dark spot as large as the opening on the liquid surface (the brightness is lower than other liquid surfaces); the furnace picture captured by the camera is used to measure the distance between the edge of the black spot and the edge of the guide tube opening, and converted into the liquid mouth distance. However, since the edge of the black spot and the edge of the guide tube are not parallel, and there are thermal field installation deviations and camera angle deviations, the actual measurement positions are different, which in turn affects the measurement results. The utility model is aimed at improving the above-mentioned problems, and specifically relates to a guide tube special-shaped opening structure for capturing the liquid mouth distance of a single crystal furnace. Utility Model Content

[0003] The purpose of the utility model is to provide a special-shaped opening structure of a guide tube for capturing the liquid mouth distance of a single crystal furnace, so as to solve the problem proposed in the above background technology that the edge of the black spot and the edge of the guide tube are not parallel, and there are thermal field installation deviations and camera angle deviations, resulting in different actual measurement positions, thereby affecting the measurement results.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a guide tube special-shaped opening structure for capturing the single crystal furnace liquid mouth distance, comprising

[0005] A single crystal furnace body and a single crystal furnace guide tube arranged inside the single crystal furnace body;

[0006] A guide tube flange is arranged at the upper end position of the single crystal furnace guide tube, and an anisotropic opening is arranged in the guide tube flange. The anisotropic opening makes the dark spot in the camera image partially parallel to the edge of the guide tube opening, and the measurement results can be consistent when any position is selected within the range of parallel lines.

[0007] Preferably, a single crystal furnace mouth is provided at the top of the single crystal furnace body, and the single crystal furnace mouth is provided with a furnace mouth flange.

[0008] Preferably, an extrusion connecting column is provided at the side position of the guide tube flange, an extrusion column limiting block is provided at the upper side position of the extrusion connecting column, a downward pressure column is provided at the inner side position of the extrusion connecting column, a downward pressure limiting block is provided at the side position of the downward pressure column, and a return spring is provided at the lower side position of the downward pressure limiting block. The contact ends of the extrusion connecting column and the downward pressure column are both slope structures. Pressing the extrusion connecting column can extrude the downward pressure column to generate a downward component force. When the pressing force is removed, the downward pressure column will be reset due to the return spring and the extrusion connecting column will be lifted to reset at the same time.

[0009] Preferably, a support frame is provided at the lower side surface of the guide tube flange, and the support frame is connected to the single crystal furnace body by screws.

[0010] Preferably, a graphite crucible is provided at the lower end of the single crystal furnace guide tube, and a quartz crucible is provided at the lower end of the graphite crucible.

[0011] Preferably, a crucible connecting support shaft is provided at the lower end of the quartz crucible, and the upper portion of the crucible connecting support shaft is in a funnel structure.

[0012] Preferably, a furnace bottom protection plate is provided at the upper side of the bottom of the single crystal furnace body, and the furnace bottom protection plate is made of graphite material.

[0013] Compared with the prior art, the utility model provides a guide tube special-shaped opening structure for capturing the single crystal furnace liquid mouth distance, which has the following beneficial effects:

[0014] 1. In the special-shaped opening structure of the guide tube used for capturing the liquid mouth distance of the single crystal furnace, a guide tube flange is arranged at the upper end position of the guide tube of the single crystal furnace, and an anisotropic opening is arranged in the guide tube flange. The anisotropic opening makes the dark spot in the camera image partially parallel to the edge of the guide tube opening, and the measurement results can be consistent when any position is selected within the range of parallel lines, thereby effectively reducing the phenomenon of different actual measurement positions caused by thermal field installation deviation and camera angle deviation.

[0015] 2. In the special-shaped opening structure of the guide tube for capturing the liquid mouth distance of a single crystal furnace, an extrusion connecting column is arranged at the side position of the guide tube flange, an extrusion column limiting block is arranged at the upper side position of the extrusion connecting column, a downward pressure column is arranged at the inner side position of the extrusion connecting column, a downward pressure limiting block is arranged at the side position of the downward pressure column, and a reset spring is arranged at the lower side position of the downward pressure limiting block. The contact ends of the extrusion connecting column and the downward pressure column are both slope structures. Pressing the extrusion connecting column can extrude the downward pressure column to generate a downward component force. When the pressing force is removed, the downward pressure column will reset due to the reset spring and the extrusion connecting column will be lifted to reset at the same time. The advantage of the improvement of the utility model is that it can avoid the guide tube flange being installed too tightly, which makes it inconvenient for the staff to take out when replacing it, affecting the work efficiency of the staff, thereby effectively improving the practicality of the single crystal furnace guide tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The utility model is a schematic diagram of the overall structure of the installation of the special-shaped opening structure of the guide tube for capturing the liquid mouth distance of a single crystal furnace.

[0017] Figure 2 This is a schematic diagram of the top view of the special-shaped opening structure of the guide tube for capturing the liquid mouth distance of a single crystal furnace of the utility model when it is not improved.

[0018] Figure 3 The utility model is a schematic diagram of a top view of the improved special-shaped opening structure of the guide tube for capturing the liquid mouth distance of a single crystal furnace.

[0019] Figure 4 It is a schematic diagram of the local structure of the flange of the guide tube with a special-shaped opening structure for capturing the liquid mouth distance of a single crystal furnace of the utility model.

[0020] In the figure: 1. single crystal furnace body; 2. single crystal furnace mouth; 3. crystal rod in single crystal furnace; 4. single crystal furnace guide tube; 5. guide tube flange; 6. graphite crucible; 7. quartz crucible; 8. support frame; 9. crucible connecting support shaft; 10. furnace bottom guard plate; 11. anisotropic opening; 12. extrusion connecting column; 13. extrusion column limit block; 14. downward pressure column; 15. downward pressure limit block; 16. reset spring. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] The utility model provides Figure 1-4 As shown, a guide tube special-shaped opening structure for capturing the liquid mouth distance of a single crystal furnace comprises a single crystal furnace body 1 and a single crystal furnace guide tube 4 arranged inside the single crystal furnace body 1;

[0023] A guide tube flange 5 is provided at the upper end position of the single crystal furnace guide tube 4, and an anisotropic opening 11 is provided in the guide tube flange 5. The anisotropic opening 11 makes the dark spot in the camera image partially parallel to the edge of the guide tube opening, and the measurement results can be consistent when any position is selected within the range of parallel lines, thereby effectively reducing the phenomenon of different actual measurement positions caused by thermal field installation deviation and camera angle deviation.

[0024] like Figure 1 As shown, a single crystal furnace mouth 2 is provided at the top of the single crystal furnace body 1, and the single crystal furnace mouth 2 is provided with a furnace mouth flange. The circular diameter of the single crystal furnace mouth 2 is smaller than that of the single crystal furnace body 1, which can reduce heat loss and thus reduce waste of resources.

[0025] like Figure 4 As shown, an extrusion connecting column 12 is provided at the side position of the guide tube flange 5, an extrusion column limit block 13 is provided at the upper side position of the extrusion connecting column 12, a downward pressure column 14 is provided at the inner side position of the extrusion connecting column 12, a downward pressure limit block 15 is provided at the side position of the downward pressure column 14, and a return spring 16 is provided at the lower side position of the downward pressure limit block 15. The contact ends of the extrusion connecting column 12 and the downward pressure column 14 are both slope structures. Pressing the extrusion connecting column 12 can squeeze the downward pressure column 14 to generate a downward component force. When the pressing force is removed, the downward pressure column 14 will be reset due to the return spring 16 and the extrusion connecting column 12 will be lifted to reset. The advantage of the improvement of the utility model is that it can avoid the guide tube flange 5 being installed too tightly, which makes it inconvenient for the staff to take out when replacing it, affecting the work efficiency of the staff, thereby effectively improving the practicality of the single crystal furnace guide tube 4.

[0026] like Figure 1 As shown, a support frame 8 is provided at the lower side of the guide tube flange 5, and the support frame 8 is connected to the single crystal furnace body 1 by screws. The support frame 8 is used to support the single crystal furnace guide tube 4, and the ring formed by the support frame is located on the bottom side of the guide tube flange 5 of the single crystal furnace guide tube 4 for support.

[0027] like Figure 1 As shown, a graphite crucible 6 is disposed at the lower end of the single crystal furnace guide tube 4, and a quartz crucible 7 is disposed at the lower end of the graphite crucible 6. The graphite crucible 6 and the quartz crucible 7 are used to place silicon oxide crystals that need to be processed.

[0028] like Figure 1As shown, a crucible connecting support shaft 9 is arranged at the lower end of the quartz crucible 7, and the upper part of the crucible connecting support shaft 9 is a funnel structure. The crucible connecting support shaft 9 is a tool for supporting the crucible and placing it in a high temperature environment.

[0029] like Figure 1 As shown, a furnace bottom protection plate 10 is arranged at the upper side of the bottom of the single crystal furnace body 1. The furnace bottom protection plate 10 is made of graphite material. The furnace bottom protection plate 10 is a graphite leak-proof plate. The graphite material has the advantages of high mechanical strength, good sliding performance, high thermal stability, high thermal shock resistance, low wettability, high corrosion resistance, high thermal conductivity, good electrical conductivity, good oxidation performance, strong chemical stability, easy processing, etc.

[0030] During operation, the single crystal furnace body 1 is heated at high temperature to heat and melt the silicon oxide crystals inside the graphite crucible 6, making it a high-temperature liquid. This process needs to be completed by heating, generally using resistance heating or induction heating. While heating, an inert gas needs to be used to protect the molten pool to avoid contamination by impurities. Then, after the polycrystalline material is melted, it needs to be crystallized into a single crystal. During the crystallization process, a crystal rod 3 in a single crystal furnace is used to guide the growth and formation of the single crystal.

[0031] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A guide tube special-shaped opening structure for capturing the liquid mouth distance of a single crystal furnace, comprising: A single crystal furnace body (1) and a single crystal furnace guide tube (4) arranged inside the single crystal furnace body (1); Features: A guide tube flange (5) is arranged at the upper end position of the single crystal furnace guide tube (4), and an anisotropic opening (11) is arranged in the guide tube flange (5). The anisotropic opening (11) makes the dark spot in the camera image partially parallel to the edge of the guide tube opening, and the measurement results can be consistent when any position is selected within the range of parallel lines.

2. The special-shaped opening structure of the guide tube for capturing the liquid mouth distance of a single crystal furnace according to claim 1, characterized in that: A single crystal furnace opening (2) is provided at the top of the single crystal furnace body (1), and the single crystal furnace opening (2) is provided with a furnace opening flange.

3. The special-shaped opening structure of the guide tube for capturing the liquid mouth distance of a single crystal furnace according to claim 1, characterized in that: An extrusion connection column (12) is arranged at the side position of the guide tube flange (5), an extrusion column limit block (13) is arranged at the upper side position of the extrusion connection column (12), a downward pressure column (14) is arranged at the inner side position of the extrusion connection column (12), a downward pressure limit block (15) is arranged at the side position of the downward pressure column (14), and a return spring (16) is arranged at the lower side position of the downward pressure limit block (15). The contact ends of the extrusion connection column (12) and the downward pressure column (14) are both slope structures. Pressing the extrusion connection column (12) can extrude the downward pressure column (14) so ​​that it generates a downward component force. When the pressing force is removed, the downward pressure column (14) will be reset due to the return spring (16) and the extrusion connection column (12) will be lifted to reset at the same time.

4. The special-shaped opening structure of the guide tube for capturing the liquid mouth distance of a single crystal furnace according to claim 1, characterized in that: A support frame (8) is provided at the lower side of the guide tube flange (5), and the support frame (8) is connected to the single crystal furnace body (1) by means of screws.

5. The special-shaped opening structure of the guide tube for capturing the liquid mouth distance of a single crystal furnace according to claim 1, characterized in that: A graphite crucible (6) is arranged at the lower end of the single crystal furnace guide tube (4), and a quartz crucible (7) is arranged at the lower end of the graphite crucible (6).

6. The guide tube special-shaped opening structure for capturing the single crystal furnace liquid mouth distance according to claim 5, characterized in that: A crucible connection support shaft (9) is provided at the lower end of the quartz crucible (7), and the upper part of the crucible connection support shaft (9) is in a funnel structure.

7. The guide tube special-shaped opening structure for capturing the single crystal furnace liquid mouth distance according to claim 1, characterized in that: A furnace bottom protection plate (10) is arranged at the upper side of the bottom of the single crystal furnace body (1), and the furnace bottom protection plate (10) is made of graphite material.

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