Reading circuit microscopic examination tool
By designing the limit slot and column structure on the mirror inspection tray, the problem of falling and contamination of the readout circuit during the mirror inspection process is solved, efficient batch microscopy inspection is achieved, and production efficiency is improved.
Patent Information
- Application Number
- CN202420360781.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-27
- Publication Date
- 2025-03-11
- Estimated Expiration
- 2034-02-27
AI Technical Summary
In the existing microscopic examination process, the readout circuit is easily dropped and fragmented during placement and movement, and the microscopic microscopic examination platform is easily contaminated, resulting in low production efficiency.
A readout circuit mirror inspection tool is designed, including a mirror inspection tray. The pallet is equipped with multiple limit grooves and columns. The limit groove is adapted to the readout circuit structure. The column height is smaller than the limit groove depth, reducing the contact area on the back and avoiding contamination.
The readout circuit position is fixed through the mirror inspection tray to avoid falling and fragmentation, and batch microscopic inspection is achieved, which improves production efficiency and reduces the risk of back contamination.
Smart Images

Figure CN222599532U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of microscopic inspection tooling components, in particular to a readout circuit microscopic inspection tooling. Background Art
[0002] The flip-chip device consists of three parts from top to bottom: chip, bump (indium column) and readout circuit. The flip-chip process can form an effective interconnection between the chip, bump and readout circuit, realizing the vertical expansion of the device in space. The bump can be arranged in a planar array on the inner surface of the chip and readout circuit, and its electrode density is much higher than that of wire bonding. At the same time, the device using flip-chip technology also has the advantages of high alignment accuracy, small device size, small interconnection parasitic parameters, and fast transmission rate.
[0003] At present, before flip-chip production, the readout circuit needs to be placed under a metallographic microscope for microscopic inspection to ensure that the readout circuit has no abnormalities such as indium pillar interconnection and edge collapse. In the existing microscopic inspection process, the readout circuit needs to be clamped out of the chip box with tweezers and placed on the microscope microscopic inspection platform. During the placement process, there is a risk of the readout circuit falling, which can easily lead to fragmentation of the readout circuit. There is also a risk that the microscope microscopic inspection platform will contaminate the back of the readout circuit. At the same time, during the movement of the microscopic inspection platform, the readout circuit is easy to slide and fall off the platform and break. Moreover, it is difficult to transfer microscopic inspection in batches, resulting in low production efficiency. Utility Model Content
[0004] The utility model provides a readout circuit microscopic inspection tool, which solves the problem that in the existing microscopic inspection process, the readout circuit needs to be clamped out of the chip box by tweezers and placed on the microscopic inspection platform of a microscope. During the placement process, there is a risk that the readout circuit falls, which easily leads to fragments of the readout circuit, and there is also a risk that the microscopic inspection platform contaminates the back of the readout circuit. At the same time, during the movement of the microscopic inspection platform, the readout circuit is easy to slide, fall from the platform and break, and it is difficult to transfer microscopic inspection in batches, resulting in low production efficiency. Technical problems.
[0005] In view of this, the utility model provides a readout circuit microscopic inspection tool, comprising: a microscopic inspection tray;
[0006] The microscopic examination tray is provided with a plurality of limit slots, the limit slots being adapted to the structure of the readout circuit, a plurality of columns being arranged in the limit slots, the plurality of columns having the same height, and the height of the columns being less than the depth of the limit slots.
[0007] Preferably, the plurality of limit grooves are evenly arranged in multiple rows and columns.
[0008] Preferably, the inner wall of the limiting groove is provided with a plurality of clamping grooves toward the periphery of the groove, and the clamping grooves are semicircular groove structures.
[0009] Preferably, the number of the clamping slots is an even number, and the positions of every two clamping slots are arranged correspondingly.
[0010] Preferably, the microscopic examination tray is provided with codes corresponding to the positions of the limiting grooves, and the code corresponding to each limiting groove is a unique code.
[0011] Preferably, the microscopic examination tray is provided with a fixing through hole.
[0012] Preferably, the microscopic examination tray is made of aluminum alloy.
[0013] It can be seen from the above technical solutions that the utility model has the following advantages:
[0014] The utility model limits or fixes the position of the readout circuit by means of a plurality of limit grooves on the microscopic inspection tray, and uniformly places the readout circuits on the microscopic inspection tray, thereby shortening the transfer distance, avoiding the risk of the readout circuits falling, and also realizing batch transfer microscopic inspection, thereby improving production efficiency; and by providing a plurality of columns, the contact area between the back side of the readout circuit and the limit grooves can be reduced, thereby avoiding contamination of the back side of the readout circuit. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 A schematic structural diagram of a readout circuit microscopic inspection tool provided in an embodiment of the utility model.
[0016] Reference numerals:
[0017] 1. Microscope inspection tray; 2. Limiting groove; 3. Column; 4. Clamping groove; 5. Coding; 6. Fixed through hole. DETAILED DESCRIPTION
[0018] In order to enable those skilled in the art to better understand the solution of the utility model, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0019] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "top / bottom" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.
[0020] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "set / connected", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0021] At present, before flip-chip production, the readout circuit needs to be placed under a metallographic microscope for microscopic inspection to ensure that the readout circuit has no abnormalities such as indium pillar interconnection and edge collapse. In the existing microscopic inspection process, the readout circuit needs to be clamped out of the chip box with tweezers and placed on the microscope microscopic inspection platform. During the placement process, there is a risk of the readout circuit falling, which can easily lead to fragmentation of the readout circuit. There is also a risk that the microscope microscopic inspection platform will contaminate the back of the readout circuit. At the same time, during the movement of the microscopic inspection platform, the readout circuit is easy to slide and fall off the platform and break. Moreover, it is difficult to transfer microscopic inspection in batches, resulting in low production efficiency.
[0022] In view of this, the utility model provides a readout circuit microscopic inspection tool, such as Figure 1 As shown, it includes: a microscopic examination tray 1;
[0023] The microscopic examination tray 1 is provided with a plurality of limit slots 2 , which are adapted to the structure of the readout circuit. A plurality of upright posts 3 are arranged in the limit slots 2 , and the heights of the plurality of upright posts 3 are equal, and the height of the upright posts 3 is less than the depth of the limit slots 2 .
[0024] It can be understood that the limit groove 2 is used to limit or fix the position of the readout circuit. By placing the readout circuits uniformly on the microscopic inspection tray 1, the transfer distance is shortened. The microscopic inspection tray 1 is then placed on the microscopic inspection platform of the microscope to avoid the risk of the readout circuit falling.
[0025] Meanwhile, the limiting slots 2 are provided in a plurality, and the plurality of limiting slots 2 are evenly arranged in a plurality of rows and columns. In this embodiment, the limiting slots 2 are 16, and the 16 limiting slots are evenly arranged in four rows and four columns. The microscopic inspection tray 1 can simultaneously place 16 readout circuits, and the 16 circuits can be microscopically inspected at the same time, thereby improving production efficiency.
[0026] In this embodiment, by providing a plurality of pillars 3, the contact area between the back of the readout circuit and the limiting groove 2 can be reduced to prevent the back of the readout circuit from being contaminated. After the pillars 3 raise the readout circuit, the contact area between the side of the readout circuit and the tweezers can be increased to prevent the readout circuit from falling when clamping.
[0027] It is understandable that in order to prevent the readout circuit from falling, the height of the pillar 3 is smaller than the depth of the limiting groove 2 , and at the same time, the sum of the height of the pillar 3 and the thickness of the readout circuit should be smaller than the depth of the limiting groove 2 .
[0028] It should be noted that, in this embodiment, the position of the readout circuit is limited or fixed by a plurality of limit grooves 2 provided on the microscopic examination tray 1. By placing the readout circuits uniformly on the microscopic examination tray 1, the transfer distance is shortened, the risk of the readout circuit falling is avoided, batch transfer microscopic examination is achieved, and production efficiency is improved. Furthermore, by providing a plurality of columns 3, the contact area between the back side of the readout circuit and the limit grooves 2 can be reduced, thereby avoiding contamination of the back side of the readout circuit.
[0029] In one practicable manner, a plurality of clamping grooves 4 are formed on the inner wall of the limiting groove 2 toward the outer periphery of the groove, and the clamping grooves 4 are semicircular groove structures.
[0030] In a general example, the clamping groove 4 is used to accommodate the tip of the forceps, so the number of the clamping grooves 4 is an even number, and the positions of every two clamping grooves 4 are correspondingly arranged.
[0031] Exemplarily, the limiting groove 2 can be a rectangular structure, and a clamping groove 4 is opened at the four corners and four sides of the limiting groove 2 to accommodate the tip of the tweezers, and any direction can be selected to clamp the readout circuit at will to meet the different clamping requirements of different readout circuits, thereby facilitating the clamping of the readout circuit.
[0032] In one practicable manner, in order to avoid mixed batches, the microscopic inspection tray 1 is provided with a code 5 corresponding to the position of the limiting slot 2, and the code 5 corresponding to each limiting slot 2 is a unique code, and the code 5 can be used to number the readout circuit.
[0033] In a feasible manner, the microscopic inspection tray 1 is provided with a fixing through hole 6 , through which the tooling can be fixed on the microscopic inspection platform to prevent the tooling from sliding off the microscopic inspection platform.
[0034] In one practicable manner, the microscopic examination tray 1 is made of aluminum alloy, thereby making the tooling lighter.
[0035] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims
1. A readout circuit microscopy tool, characterized in that: include: Microscopic examination tray; The microscopic examination tray is provided with a plurality of limit slots, the limit slots being adapted to the structure of the readout circuit, a plurality of columns being arranged in the limit slots, the plurality of columns having the same height, and the height of the columns being less than the depth of the limit slots.
2. The readout circuit inspection tool according to claim 1, characterized in that: The plurality of limit grooves are evenly arranged in multiple rows and columns.
3. The readout circuit inspection tool according to claim 1, characterized in that: The inner wall of the limiting groove is provided with a plurality of clamping grooves toward the periphery of the groove, and the clamping grooves are semicircular groove structures.
4. The readout circuit microscopy tooling according to claim 3, characterized in that: The number of the clamping slots is an even number, and the positions of every two clamping slots are arranged correspondingly.
5. The readout circuit microscopy tooling according to claim 1, characterized in that: The microscopic examination tray is provided with a code corresponding to the position of the limiting groove, and the code corresponding to each limiting groove is a unique code.
6. The readout circuit microscopy tooling according to claim 1, characterized in that: The microscopic examination tray is provided with a fixing through hole.
7. The readout circuit microscopy tooling according to claim 1, characterized in that: The microscopic examination tray is made of aluminum alloy.