PFA static dissipative tube for semiconductor industry

Abstract

The utility model belongs to the technical field of semiconductors, and particularly discloses a PFA static dissipative tube for the semiconductor industry, which comprises a PFA tube and a conductive PFA strip, and the conductive PFA strip is spirally wound on the outer wall of the PFA tube in a single-strand or multi-strand spring mode or spirally wound on the outer wall of the PFA tube in a double-strand opposite cross mode along the axial direction of the PFA tube. According to the PFA static dissipative tube, static electricity can be eliminated in time due to the existence of the conductive PFA strip, and static electricity accumulation and damage of static electricity in a semiconductor manufacturing process are avoided; the conductive PFA strip is spirally wound on the outer wall of the PFA tube in a single-strand or multi-strand spring mode or in a double-strand opposite cross mode in the axial direction of the PFA tube, so that the separation difficulty of the conductive PFA strip and the tube wall is improved, and the conductive PFA strip is not prone to failure.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductors, and in particular relates to a PFA static dissipation tube used in the semiconductor industry. Background Art

[0002] Ultra-clean high-purity reagents are commonly used chemical reagents in the semiconductor industry. They are one of the key basic chemical materials in the manufacturing process of integrated circuits (ICs) and very large-scale integrated circuits (VLSIs). They mainly include hydrochloric acid, acetone, ultra-pure water, isopropyl alcohol, etc., and the purity of their main components is generally greater than 99.99%. In the semiconductor production process, ultra-clean high-purity chemical reagents are widely used in cleaning, oxidation, corrosion and other processes. Their purity plays a vital role in the yield, electrical performance and reliability of semiconductor components and integrated circuits.

[0003] The storage and transportation of ultra-clean high-purity reagents has always been a pain point in the semiconductor industry. In order to maintain the high purity of ultra-clean high-purity reagents, the storage and transportation device materials are required to have considerable chemical inertness and low chemical ion content. Thermoplastic fluoroplastics are widely used in the field of electronic semiconductors for their excellent heat resistance, chemical resistance, weather resistance, non-stickiness, low friction factor, electrical properties and easy processing. Among them, PFA (soluble polytetrafluoroethylene) has the characteristics of inertness, low ion content and high temperature resistance, and is widely used in the transportation of ultra-clean high-purity reagents in the semiconductor industry to ensure product quality and production efficiency. PFA tubes can withstand many high-viscosity and high-purity chemical reagents, and are not easily affected by them to react, dissolve or contaminate, thereby maintaining the high-quality properties and stability of the reagents themselves. At the same time, the thermal expansion coefficient of the PFA tube material is also moderate, which can resist external factors such as temperature changes and pressure fluctuations, thereby ensuring the stability and safety of transportation. Due to the characteristics of inertness, low ion content and high temperature resistance, PFA tubes are widely used in the transportation of ultra-clean high-purity reagents in the semiconductor industry to ensure product quality and production efficiency. However, further research found that ultra-clean and high-purity reagents are very likely to generate static electricity during storage and transportation, and this phenomenon cannot be eliminated even if existing PFA tubes are used.

[0004] In order to prevent static electricity from damaging the semiconductor manufacturing process, it is very necessary to develop a PFA static dissipative tube for the semiconductor industry that can eliminate static electricity. Utility Model Content

[0005] The utility model aims to overcome the shortcomings of the prior art and provide a PFA static dissipation tube for the semiconductor industry.

[0006] In order to achieve the above objectives, the technical solution adopted by the utility model to solve its technical problems is:

[0007] A PFA static dissipation tube for the semiconductor industry comprises a PFA tube and a conductive PFA strip. The conductive PFA strip is wound around the outer wall of the PFA tube in a single-strand or multi-strand spring-like spiral along the axial direction of the PFA tube or in a double-strand oppositely crossed spiral.

[0008] In a preferred embodiment of the present invention, the outer surface of the conductive PFA strip is flush with the outer wall of the PFA tube.

[0009] In a preferred embodiment of the present invention, the helix angle of the spring-type winding or the double-strand cross-type winding is 30°-60°, preferably 45°.

[0010] In a preferred embodiment of the present invention, the outer diameter of the PFA tube is 1 / 8 to 1 inch, and the tube wall thickness is 1.1 to 1.7 mm.

[0011] In a preferred embodiment of the present invention, the width of the conductive PFA strip is 0.5-5 mm, and the thickness is 1 / 6 to 1 / 2 of the thickness of the PFA tube wall.

[0012] In a preferred embodiment of the present invention, the conductive PFA tape is a PFA resin filled with conductive carbon black.

[0013] In a preferred embodiment of the present invention, the PFA tube and the conductive PFA strip are co-extruded and integrally formed.

[0014] Compared with the background technology, this technical solution has the following advantages:

[0015] 1. The PFA static dissipation tube of the utility model has a conductive PFA strip, which can eliminate static electricity in time, thus avoiding the accumulation of static electricity and its harm in the semiconductor process;

[0016] 2. The conductive PFA strip of the utility model is wound around the outer wall of the PFA tube in a single-strand or multi-strand spring-like spiral or a double-strand cross-shaped spiral along the axial direction of the PFA tube, which is conducive to increasing the difficulty of separating the conductive PFA strip from the tube wall, thereby preventing failure. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0018] Figure 1 It is a cross-sectional schematic diagram of the conductive PFA of the PFA static dissipation tube of the utility model being wound in a single-strand spring-like spiral;

[0019] Figure 2 This is a schematic diagram of the conductive PFA of the utility model being wound in a single-strand spring-like spiral;

[0020] Figure 3 It is a cross-sectional schematic diagram of the conductive PFA of the PFA static dissipation tube of the utility model being wound in two strands in a cross-shaped spiral;

[0021] Figure 4 This is a schematic diagram of the conductive PFA of the utility model being wound in two oppositely intersecting spirals;

[0022] In the figure: 11-PFA tube, 12-conductive PFA strip, 21-PFA tube, 22-conductive PFA strip. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the utility model more clear, the technical solution of the utility model is further described below in conjunction with the accompanying drawings and embodiments. The implementation method can have different forms and should not be understood as being limited to the description set forth herein. The same reference numerals in the text always represent the same elements, and similar reference numerals represent similar elements.

[0024] A PFA static dissipation tube for the semiconductor industry comprises a PFA tube and a conductive PFA strip. The conductive PFA strip is wound around the outer wall of the PFA tube in a single-strand or multi-strand spring-like spiral along the axial direction of the PFA tube or in a double-strand oppositely crossed spiral.

[0025] The outer surface of the conductive PFA strip is flush with the outer wall of the PFA tube.

[0026] The helix angle of the spring-type winding or the double-strand cross-type winding is 30°-60°, preferably 45°.

[0027] The outer diameter of the PFA tube is 1 / 8 to 1 inch, and the wall thickness is 1.1 mm to 1.7 mm of the inner diameter.

[0028] The conductive PFA strip has a width of 0.5-5 mm and a thickness of 1 / 6 to 1 / 2 of the thickness of the PFA tube wall.

[0029] The conductive PFA strip is a PFA resin filled with conductive carbon black.

[0030] The PFA tube and the conductive PFA strip are co-extruded and integrally formed.

[0031] Example 1

[0032] like Figure 1 , Figure 2As shown, a PFA electrostatic dissipation tube for the semiconductor industry includes a PFA tube 11 and a conductive PFA strip 12. The conductive PFA strip 12 is wound around the outer wall of the PFA tube 11 in a single-strand spring-like spiral along the axial direction of the PFA tube 11, and the outer surface of the conductive PFA strip 12 is flush with the outer wall of the PFA tube 11. The spiral angle of the spring-like spiral winding is 30°, the outer diameter of the PFA tube 11 is 1 / 4 inch, the wall thickness is 1.2 mm, and the width of the conductive strip PFA 12 is 1 mm and the thickness is 0.6 mm. The conductive PFA strip 12 is a PFA resin filled with conductive carbon black. The PFA tube 11 and the conductive PFA strip 12 are co-extruded and integrally formed.

[0033] Example 2

[0034] like Figure 3 , Figure 4 As shown, a PFA electrostatic dissipation tube for the semiconductor industry includes a PFA tube 21 and a conductive PFA strip 22. The conductive PFA strip 22 is wound around the outer wall of the PFA tube 21 in a double-stranded, cross-spiral manner along the axial direction of the PFA tube 21, and the outer surface of the conductive PFA strip 22 is flush with the outer wall of the PFA tube 21. The helical lead angle of the double-stranded, cross-spiral winding is 60°. The outer diameter of the PFA tube 21 is 1 / 2 inch and the wall thickness is 1.6 mm. The width of the conductive PFA 22 is 1 mm and the thickness is 0.3 mm. The conductive PFA strip 22 is a PFA resin filled with conductive carbon black. The PFA tube 21 and the conductive PFA strip 22 are co-extruded and integrally formed.

[0035] The above description is only a preferred embodiment of the present invention, and therefore cannot be used to limit the scope of implementation of the present invention. That is, equivalent changes and modifications made according to the patent scope of the present invention and the contents of the specification should still fall within the scope covered by the present invention.

Claims

1. A PFA static dissipative tube for the semiconductor industry, characterized in that: The invention comprises a PFA tube and a conductive PFA strip. The conductive PFA strip is wound on the outer wall of the PFA tube in a single-strand or multi-strand spring-like spiral along the axial direction of the PFA tube or in a double-strand oppositely crossed spiral.

2. The PFA static dissipative tube according to claim 1, characterized in that The outer surface of the conductive PFA strip is flush with the outer wall of the PFA tube.

3. The PFA static dissipative tube according to claim 1, characterized in that The helical pitch angle of the spring-type winding or the double-strand cross-type winding is 30°-60°.

4. The PFA static dissipative tube according to claim 1, characterized in that The outer diameter of the PFA tube is 1 / 8 to 1 inch, and the tube wall thickness is 1.1 to 1.7 mm.

5. The PFA static dissipative tube according to claim 1, characterized in that The conductive PFA strip has a width of 0.5-5 mm and a thickness of 1 / 6 to 1 / 2 of the thickness of the PFA tube wall.

6. The PFA static dissipative tube according to claim 1, characterized in that The conductive PFA strip is a PFA resin filled with conductive carbon black.

7. The PFA static dissipative tube according to claim 1, characterized in that The PFA tube and the conductive PFA strip are co-extruded and integrally formed.

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