Sample clamping platform and apparatus

Abstract

The utility model discloses a sample clamping platform and equipment, and relates to the technical field of sample clamping tools, and the sample clamping platform comprises a base table and a clamping mechanism; grooves are formed in the base table, the grooves are used for accommodating samples, and the number of the grooves is at least two; the clamping mechanism is connected with the base table, the clamping mechanism is connected to the peripheral area of the groove of the base table, and a part of the clamping mechanism extends to the groove and is used for fixing the sample in the groove; the number of the clamping mechanisms is at least two, and the at least two clamping mechanisms extend to the same groove. The at least two grooves are formed in the base table of the sample clamping platform, so that the number of samples loaded on the sample clamping platform at a time can be increased, and the working efficiency of equipment is improved.

Description

Technical Field

[0001] The present application relates to the technical field of sample clamping tools, and in particular to a sample clamping platform and equipment. Background Art

[0002] A light processing device is a light processing device that transfers a desired pattern to the surface of a sample. The sample is usually placed on a sample holding platform and placed inside the light processing device together with the sample holding platform. When the light processing device is working, it emits rays to the sample clamped on the sample holding platform to transfer the pattern on the surface of the sample.

[0003] However, the sample holding platform can usually only load one sample, and the optical processing device can only process one sample at a time. The processing efficiency of the optical processing device will be greatly reduced during the frequent replacement of samples. Utility Model Content

[0004] The present application discloses a sample clamping platform and a device. By arranging at least two grooves on a base of the sample clamping platform, the number of samples loaded on the sample clamping platform at one time can be increased, thereby improving the working efficiency of the device.

[0005] In a first aspect, the present application provides a sample clamping platform, comprising a base and a clamping mechanism; a groove is provided on the base, the groove is used to accommodate a sample, and the number of the grooves is at least two; the clamping mechanism is connected to the base, the clamping mechanism is connected to the peripheral area of ​​the groove of the base, a part of the clamping mechanism extends to the groove and is used to fix the sample in the groove; the number of the clamping mechanisms is at least two, and at least two of the clamping mechanisms extend to the same groove.

[0006] The sample clamping platform provided in the present application can be used to be set in the equipment, and at least two grooves are provided on the sample clamping platform, and samples can be placed in each groove. The sample clamping platform can place at least two samples at a time, which can increase the number of samples placed, so that the equipment can process at least two samples at a time, improve the working efficiency of the equipment, reduce the frequency of changing samples, and avoid starting and stopping the equipment many times to reduce the service life of the equipment. In addition, the sample clamping platform also includes a clamping mechanism, which can clamp the sample placed in the groove to prevent the sample from moving relative to the groove after being placed in the groove, and ensure the stability of the sample placed in the groove, so that when the equipment processes the sample, it can avoid the pattern from being offset or deformed during the process of transferring to the sample surface. After the pattern is formed on the sample surface, the sample can be developed and cleaned to remove impurities remaining on the sample surface, and the sample with a pattern on the surface finally obtained can be used to make semiconductor devices.

[0007] In a possible implementation, the clamping mechanism includes a clip, a connecting column and an elastic member, a connecting hole is provided on the base, the connecting hole passes through the base, and the connecting hole is located at the periphery of the groove; the connecting column passes through the connecting hole, the clip is located on one side of the base where the groove is provided and is fixedly connected to the connecting column, the elastic member connects the base and the connecting column, and when the elastic member is deformed, it is used to give the connecting column an ​​elastic force along the opening of the groove toward the bottom surface.

[0008] The clip is located on one side of the groove set on the base, the connecting column is fixedly connected to the clip, one end of the elastic member can be connected to the base, and the other end can be connected to the connecting column. When the elastic member is deformed, it can give the connecting column an ​​elastic force along the opening of the groove toward the bottom surface. Under the action of the elastic force, the connecting column can apply a pulling force along the opening of the groove toward the bottom surface to the clip. When the sample is placed in the groove, the clip can contact the surface of the sample and apply a clamping force to the sample along the opening of the groove toward the bottom surface, so that the sample can be fixed in the groove.

[0009] In a possible implementation, the connecting column is cylindrical. The cylindrical shape of the connecting column facilitates the movement of the connecting column in the connecting hole. The connecting column can move relative to the connecting hole along the axial direction of the connecting hole, and the connecting column can also rotate relative to the connecting hole in the connecting hole. The connecting column is fixedly connected to the clamping piece, and when the connecting column moves relative to the connecting hole, the clamping piece can be driven to move, thereby changing the relative position relationship between the clamping piece and the opening of the groove, so that the clamping piece can clamp the sample located in the groove.

[0010] In a possible implementation, the elastic member includes a spring, the spring is located on a side of the base away from the clip, the spring ring is sleeved on the connecting column, one end of the spring is in contact with the base, the other end of the spring is connected to the connecting column, and the spring is in a compressed state. The compressed spring can apply elastic force to the connecting column, and the direction of the elastic force can be along the opening of the groove toward the bottom surface. Under the action of the elastic force, the connecting column can drive the clip to move along the opening of the groove toward the bottom surface of the groove. Driven by the connecting column, the clip applies a clamping force along the opening of the groove toward the bottom surface of the groove to the sample located in the groove, thereby fixing the sample in the groove and preventing the sample from moving relative to the groove.

[0011] In a possible implementation, one end of the connecting column is provided with a radial convex eave, and the other end of the spring abuts against the convex eave. The convex eave can provide a plane for the connecting column to abut against the spring, the connecting column is fixedly connected to the clip, when the clamping mechanism is installed on the base, the spring is sleeved on the connecting column, the connecting column is inserted into the connecting hole, the clip is fixedly connected to the connecting column and is located on the side of the base away from the spring, one end of the spring is connected to the convex eave of the connecting column, and the other end is connected to the surface of the base away from the sample, the convex eave of the connecting column and the base can squeeze the spring at the same time, the spring located between the convex eave of the connecting column and the base is compressed, and the compressed spring can apply elastic force to the convex eave of the connecting column, and the direction of the elastic force can be along the opening of the groove toward the bottom surface. Under the action of the elastic force, the connecting column can drive the clip to move along the opening of the groove toward the bottom surface of the groove, and the clip, driven by the connecting column, applies a clamping force along the opening of the groove toward the bottom surface of the groove to the sample located in the groove, so that the sample can be fixed in the groove to prevent the sample from moving relative to the groove.

[0012] In a possible implementation, the connection hole includes an elongated hole, the elongated hole extends along the extension direction of at least part of the side wall of the groove, and the connection column is used to slide in the elongated hole to drive the clamp to move to different positions of the groove. The connection column is fixedly connected to the clamp, and when the connection column slides in the elongated hole, the clamp can slide to different positions of the opening of the groove. After the sample is placed in the groove, the clamp can slide to different positions of the groove according to the actual situation of the sample, so that various different samples can be stably placed in the groove.

[0013] In a possible implementation, at least one of the clamping mechanisms extends to at least two of the grooves. When the sample is placed in the groove, at least one clamping mechanism can extend to at least two samples to clamp the sample. The clamping mechanism can clamp at least two samples at the same time, and the number of clamping mechanisms is reduced, so that too many clamping mechanisms occupy space on the sample surface and affect the formation of patterns on the sample surface. In addition, the time required for the clamping mechanism to clamp the sample can be shortened, thereby improving work efficiency.

[0014] In a possible implementation, the depth of the groove is in the range of 0.15 mm to 0.25 mm. If the depth of the groove is too shallow, the sample placed in the groove will be unstable, and if the depth of the groove is too deep, it will be unfavorable for the clamping mechanism to fix the sample. The depth of the groove in the range of 0.15 mm to 0.25 mm can ensure that the sample is stably fixed in the groove.

[0015] In a possible implementation, a light hole is provided on the base, the light hole passes through the base, the light hole is located at the periphery of the groove, and the number of the light holes is at least two. The rays emitted by the light source device in the device can be divided into at least two light beams by structures such as a beam splitter in the device, and the light beams can pass through the light hole on the base to irradiate the sample. The light hole can also be used for calibration and alignment of the optical path. By monitoring the light beam passing through the light hole, the position of the light source device or the sample clamping platform and other structures can be adjusted to ensure that the light beam can accurately fall on the predetermined position of the sample.

[0016] In a possible implementation, the groove is square, the number of the grooves is at least three, the at least three grooves are arranged in multiple rows, and the grooves in each row are arranged in a matrix. The grooves are arranged in a matrix on the base, and the grooves are arranged evenly on the base, which is conducive to ensuring the consistency of the pattern formed on the surface of each sample located in the groove.

[0017] In a possible implementation, the groove is circular, the number of the grooves is at least three, and the at least three grooves are arranged in a ring. The grooves are arranged in a ring on the base, and the grooves are arranged evenly on the base, which is conducive to ensuring the consistency of the pattern formed on the surface of each sample located in the groove.

[0018] In a second aspect, the present application provides an apparatus comprising a light source device and a sample holding platform as described in any of the above embodiments, wherein the light source device emits radiation to a sample held on the sample holding platform when in operation, so as to transfer a pattern on the surface of the sample.

[0019] The device provided by the present application includes a sample clamping platform, on which at least two samples can be loaded at a time, and the device can process at least two samples at a time during operation, thereby improving work efficiency. The sample is fixed in the groove of the base by a clamping mechanism, and the clamping mechanism can reduce damage to the sample surface while fixing the sample.

[0020] In a third aspect, the present application also provides a semiconductor device, comprising a sample and a patterned material located on the sample, wherein the patterned material is prepared by any of the above-mentioned devices. The sample is clamped on a sample clamping platform and placed in the device together with the sample clamping platform. The light source device of the device can emit rays, which can pass through the light holes on the sample clamping platform and irradiate the patterned material on the sample. The irradiated patterned material can form a functional layer with a certain pattern on the surface of the sample. The sample processed by the device and the functional layer with a certain pattern on the surface of the sample can be used to prepare a semiconductor device with a specific function. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 is a schematic structural diagram of a sample clamping platform provided in an embodiment of the present application;

[0023] Figure 2 This is a schematic diagram of the structure of the sample clamping platform provided in the embodiment of the present application after clamping the sample;

[0024] Figure 3 is a top view of a sample base provided in an embodiment of the present application;

[0025] Figure 4 is a top view of a sample clamping platform provided in an embodiment of the present application;

[0026] Figure 5 is a top view of a sample holding platform provided in another embodiment of the present application;

[0027] Figure 6 is a top view of a sample holding platform provided in another embodiment of the present application;

[0028] Figure 7 is a schematic structural diagram of a clamping mechanism provided in an embodiment of the present application;

[0029] Figure 8 yes Figure 4 Cross-section at AA in the middle;

[0030] Fig. 9 yes Figure 5 Cross-section at the middle BB;

[0031] Fig.10 is a schematic diagram of a fan-shaped structure of a clip provided in an embodiment of the present application;

[0032] Fig.11 It is a schematic diagram of the structure of the clip provided in the embodiment of the present application rotated to different angles;

[0033] Fig.12 is a structural schematic diagram of a clamping mechanism provided in another embodiment of the present application;

[0034] Fig.13 It is a schematic diagram of a structure in which a gasket is arranged in a groove provided in an embodiment of the present application;

[0035] Fig.14 yes Fig.13Sectional view at CC;

[0036] Fig.15 A schematic structural diagram of a sample clamping platform provided in another embodiment of the present application;

[0037] Fig.16 yes Fig.15 Sectional view at DD in the middle;

[0038] Fig.17 is a cross-sectional view of a sample clamping platform provided in another embodiment of the present application;

[0039] Fig.18 It is a structural schematic diagram of a clamping mechanism provided in an embodiment of the present application in which a limiting protrusion is provided;

[0040] Fig.19 It is a schematic diagram of the structure of setting a limit groove on the base provided in the embodiment of the present application;

[0041] Fig. 20 is a schematic diagram of the structure of the connection hole on the base provided in the embodiment of the present application;

[0042] Fig.21 is a schematic structural diagram of a connection hole on a base provided in another embodiment of the present application;

[0043] Fig. 22 is a schematic diagram of a structure in which a clip is located at different positions in a connecting hole provided by another embodiment of the present application;

[0044] Fig.23 is a schematic structural diagram of a connection hole on a base provided in another embodiment of the present application;

[0045] Fig.24 A top view of a sample holding platform provided in another embodiment of the present application;

[0046] Fig.25 A schematic diagram of the structure of a device provided in an embodiment of the present application.

[0047] Description of reference numerals:

[0048] 100-sample holding platform;

[0049] 110-base; 120-clamping mechanism; 130-sleeve;

[0050] 111-groove; 112-connecting hole; 113-limiting groove; 114-light-through hole; 115-gasket; 116-through hole;

[0051] 121-clip; 122-connecting column; 123-elastic member; 124-buffer layer; 125-limiting protrusion;

[0052] 1221-column; 1222-eaves;

[0053] 200-samples;

[0054] 300- Light source device. DETAILED DESCRIPTION

[0055] The embodiments of the present application are described below in conjunction with the drawings in the embodiments of the present application.

[0056] For ease of understanding, the English abbreviations and related technical terms involved in the embodiments of the present application are explained and described below.

[0057] It should be clear that the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0058] The terms used in the embodiments of the present application are only for the purpose of describing specific embodiments, and are not intended to limit the present application. The singular forms "a", "said" and "the" used in the embodiments of the present application and the appended claims are also intended to include plural forms, unless the context clearly indicates other meanings.

[0059] It should be understood that the term "and / or" used in this article is only a description of the same field of the associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0060] It should be understood that the terms “first”, “second”, etc. used in the present application are only used for the purpose of distinguishing the description, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying an order.

[0061] In the description of the present application, the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0062] When used in this application, “within the range of…”, unless it is separately specified that an end value is not included, it is assumed that both end values ​​of the range are included. For example, in the range of 1 to 5, the two values ​​1 and 5 are included.

[0063] In the description of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, a conflicting connection or an integrated connection. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0064] The present application provides a sample holding platform 100, which can be used to be set in a device. The sample 200 is clamped on the sample holding platform 100. After the sample 200 is placed on the sample holding platform 100, the sample holding platform 100 clamps the sample 200 and is fixed together in the sample injection holder of the device. Then, the light source device in the device emits rays to the sample 200 clamped on the sample holding platform 100 when working, so as to transfer a pattern on the surface of the sample 200.

[0065] See also Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the sample clamping platform 100 includes a base 110 and a clamping mechanism 120; the base 110 is used to place the sample 200, and the sample 200 can be a wafer. For example, the shape of the base 110 can be a square piece or a round piece. The material for preparing the base 110 can be metal, for example, the base 110 can be prepared from a titanium alloy. A groove 111 is provided on the base 110, and the groove 111 is used to accommodate the sample 200, at least part of the sample 200 is accommodated in the groove 111, and the sample 200 can be completely accommodated in the groove 111, or partially accommodated in the groove 111. The number of grooves 111 is at least two, for example, the number of grooves 111 can be two, three or four. The groove 111 can be opened on the base 110 by laser cutting, turning or mechanical stamping. The size and shape of each groove 111 may be the same, or the size and shape of each groove 111 may be different, or among all the grooves 111, some grooves 111 may be the same in size and shape, and some grooves 111 may be different in size and shape. The opening shape of the groove 111 includes but is not limited to a square or a circle, and the opening shape of the groove 111 may be adaptively designed according to the shape of the sample 200 to be placed, so that the sample 200 can be stably placed in the groove 111 and is not easy to move relative to the groove 111. The present application does not limit the number of grooves 111, and the number of grooves 111 is at least two. The number of samples 200 that can be clamped by the sample clamping platform 100 at one time can be at least two, and the number of clamped samples 200 has increased compared to the past, which effectively shortens the time for the equipment to process the sample 200 and improves work efficiency.

[0066] In one embodiment, see Figure 5 As shown, the base 110 may be a disc-shaped structure, and the diameter of the base 110 may be in the range of 110 mm to 140 mm, for example, 110 mm, 120 mm, 130 mm or 140 mm. Two circular grooves 111 are provided on the base 110, and the diameters of the two circular grooves 111 are equal, and the diameters are in the range of 51 mm to 60 mm, for example, 51 mm, 55 mm or 60 mm.

[0067] The clamping mechanism 120 is connected to the base 110. The clamping mechanism 120 is connected to the outer area of ​​the groove 111 of the base 110. The clamping mechanism 120 is used to clamp the sample 200. When the sample 200 is placed in the groove 111, the clamping mechanism 120 can contact the sample 200. A portion of the clamping mechanism 120 extends to the groove 111 and is used to fix the sample 200 in the groove 111. The clamping mechanism 120 applies a clamping force to the sample 200 toward the bottom surface of the groove 111 to fix the sample 200 in the groove 111.

[0068] It can be understood that in one embodiment, referring to Figure 1 and Figure 2 As shown, the sample 200 is placed in the groove 111, and the depth of the groove 111 can be the same as the thickness of the sample 200. When the sample 200 is placed in the groove 111, the surface of the sample 200 in the positive Z direction (the surface of the sample 200 on the side away from the bottom surface of the groove 111) is coplanar with the plane where the opening of the groove 111 is located, and part of the clamping mechanism 120 extends to the surface of the sample 200 in the positive Z direction and fits with the surface of the sample 200 in the positive Z direction. The clamping mechanism 120 can give the sample 200 a clamping force in the direction of the bottom surface of the groove 111, thereby fixing the sample 200 in the groove 111, preventing the sample 200 from shifting relative to the groove 111 when the device is in operation, thereby causing the pattern transferred to the surface of the sample 200 to deviate from the sample 200, or causing the position of the pattern on the sample 200 to be inaccurate. The sample 200 can be stably fixed in the groove of the base 110 by the clamping mechanism 120. Compared with fixing the sample 200 on the base 110 by means of tape bonding, fixing the sample 200 by the clamping mechanism 120 will not cause damage to the sample 200, nor will impurities such as tape remain on the surface of the sample 200.

[0069] The number of the clamping mechanisms 120 is at least two, for example, the number of the clamping mechanisms 120 can be two, three or four. A single groove 111 matches at least two clamping mechanisms 120, for example, a single groove 111 can match two clamping mechanisms 120. Or a single groove 111 can match three clamping mechanisms 120. Or a single groove 111 can match four clamping mechanisms. A single groove 111 matches at least two clamping mechanisms 120. It can be understood that when a sample is placed in the groove 111, the sample in each groove 111 can be clamped by at least two clamping mechanisms 120. A single groove 111 matches at least two clamping mechanisms 120, which can increase the clamping force applied by the clamping mechanism 120 to the sample in the groove 111, so that the sample is more stably fixed in the groove 111.

[0070] In one embodiment, see Figure 4 As shown, four square grooves 111 are provided on the base 110, and the four grooves 111 are of the same size and shape. A clamping mechanism 120 is also provided on the base 110, and a single groove 111 is matched with two clamping mechanisms 120, and the clamping mechanism 120 is located at the corners of the groove 111.

[0071] In one embodiment, see Figure 5 As shown, two circular grooves 111 of the same size and shape are provided on the base 110 , and a clamping mechanism 120 is also provided on the base 110 . A single groove 111 is matched with two clamping mechanisms 120 , and the two clamping mechanisms 120 matched with the single groove 111 are respectively located on opposite sides of the groove 111 .

[0072] In one embodiment, see Figure 6 As shown, seven grooves 111 of the same size and shape may be provided on the base 110, and a clamping mechanism 120 may also be provided on the base 110. Part of the single grooves 111 may be matched with two clamping mechanisms 120, and another part of the single grooves 111 may be matched with three clamping mechanisms 120.

[0073] In one embodiment, see Fig.24 As shown, a single groove can match three clamping mechanisms, and the three clamping mechanisms can be distributed in a triangle so that the sample is subjected to uniform clamping force.

[0074] It is understandable that when there are multiple grooves, the grooves can be distributed on the base in a circular arrangement or a matrix arrangement according to the shape of the sample (e.g. Figure 6 and Fig.24 As shown in FIG. 1 , the area of ​​the base occupied by the groove on the base is minimized. Two adjacent grooves can share a clamping mechanism.

[0075] The sample clamping platform 100 provided in the present application can be arranged in the device, and at least two grooves 111 are arranged on the sample clamping platform 100, and a sample 200 can be placed in each groove 111. The sample clamping platform 100 can place at least two samples 200 at a time, which can increase the number of samples 200 placed, so that the device can process at least two samples 200 at a time, improve the working efficiency of the device, reduce the frequency of replacing samples 200, and avoid starting and stopping the device many times to reduce the service life of the device. In addition, the sample clamping platform 100 also includes a clamping mechanism 120, which can clamp the sample 200 placed in the groove 111, prevent the sample 200 from moving relative to the groove 111 after being placed in the groove 111, and ensure the stability of the sample 200 placed in the groove 111, so that when the device processes the sample 200, it can avoid the pattern from being offset or deformed during the process of transferring to the surface of the sample 200. After the pattern is formed on the sample surface, the sample can be developed and cleaned to remove impurities remaining on the sample surface. The sample with a pattern on the surface finally obtained can be used to manufacture semiconductor devices.

[0076] In one possible implementation, see Figure 1 , Figure 4 and Figure 7 As shown, the clamping mechanism 120 includes a clamping piece 121, a connecting column 122 and an elastic member 123. The clamping piece 121 can be circular, square or fan-shaped. The present application does not limit the shape of the clamping piece 121. In one embodiment, refer to Figure 6 and Figure 7 As shown, the clip 121 is generally in a square sheet structure, and the four corners of the clip 121 are rounded. The thickness (Z direction) of the clip 121 can be in the range of 0.3 mm to 0.7 mm, for example, 0.3 mm, 0.5 mm or 0.7 mm. The length (X direction) of the clip 121 can be in the range of 10 mm to 15 mm, for example, 10 mm, 12 mm or 15 mm. The width (Y direction) of the clip can be in the range of 5 mm to 10 mm, for example, 5 mm, 7 mm or 10 mm. In one embodiment, refer to Fig.10 As shown, the shape of the clip 121 can also be fan-shaped.

[0077] See also Figure 1 , Figure 3 , Figure 7 and Figure 8As shown, a connection hole 112 is provided on the base 110, and the connection hole 112 penetrates the base 110 along the thickness direction of the base 110, and the connection hole 112 is located at the periphery of the groove 111, and the connection hole 112 is provided in the area where the groove 111 is not provided on the base 110. The connection hole 112 can pass through the connection column 122. The clip 121 is located on the side of the base 110 where the groove 111 is provided and is fixedly connected to the connection column 122. The clip 121 is fixedly connected to the connection column 122. In one embodiment, the clip 121 and the connection column 122 can also be connected by screws. The connection column 122 has a cavity inside, the opening of the cavity faces the clip 121, and the inner wall surface of the cavity has a thread. The clip 121 has a through hole that penetrates the clip 121 along the thickness direction of the clip, and the screw passes through the through hole on the clip 121 and is connected with the thread in the cavity of the connection column 122 through the threaded cooperation, so that the clip 121 and the connection column 122 are fixedly connected. The clip 121 and the connecting column 122 are fixedly connected by screws, and the clip 121 and the connecting column 122 can be detached to facilitate the detachable installation between the clamping mechanism and the base. In one embodiment, the clip 121 can be fixedly connected to the connecting column 122 by welding.

[0078] The clamping mechanism 120 also includes an elastic member 123, one end of which can be connected to the base 110, and the other end of which can be connected to the connecting column 122, so that the elastic member 123 is connected to the base 110 and the connecting column 122 respectively. When the elastic member 123 is deformed, it gives the connecting column 122 an elastic force in the Z-opposite direction (the opening of the groove 111 is toward the bottom surface). The connecting column 122 is fixedly connected to the clamping piece 121. When the elastic member 123 is deformed, it can give the connecting column 122 an elastic force in the Z-opposite direction. Under the action of the elastic force, the connecting column 122 can apply a pulling force in the Z-opposite direction to the clamping piece 121. When the sample is placed in the groove 111, the clamping piece 121 can contact the surface of the sample and apply a clamping force in the Z-opposite direction to the sample, so that the sample can be fixed in the groove 111.

[0079] In one possible implementation, see Figure 1 , Figure 3 , Figure 7 , Figure 8 and Fig. 9As shown, the connecting column 122 is cylindrical, and the outer wall surface of the connecting column 122 can be a smooth wall surface. The connecting hole 112 is used for the connecting column 122 to pass through, and the connecting column 122 can move in the connecting hole 112 along the thickness direction of the base 110. The connecting column 122 is cylindrical to facilitate the movement of the connecting column 122 in the connecting hole 112. The connecting column 122 can move relative to the connecting hole 112 along the axial direction of the connecting hole 112, and the connecting column 122 can also rotate relative to the connecting hole 112. The connecting column 122 is fixedly connected to the clamp 121. When the connecting column 122 moves relative to the connecting hole 112, it can drive the clamp 121 to move, thereby changing the relative position relationship between the clamp 121 and the opening of the groove 111, which is convenient for replacing the sample and also convenient for the clamp 121 to clamp the sample located in the groove 111.

[0080] When the sample clamping platform 100 is in use, the connecting column 122 can be pressed first to move the connecting column 122 along the positive Z direction (the bottom surface of the groove 111 is toward the opening), and then the sample is placed in the groove 111. After that, the connecting column 122 is released, and the connecting column 122 moves along the negative Z direction under the action of elastic force, so that the clamp 121 contacts the surface of the sample and fixes the sample.

[0081] In one embodiment, after the sample is placed in the groove 111, the surface of the sample 200 in the positive Z direction protrudes from the opening of the groove 111, and the connecting column 122 can move in the connecting hole 112 along the thickness direction of the base 110 so that the clamp 121 can contact the surface of the sample 200 in the positive Z direction. The surface of the sample 200 in the positive Z direction can drive the clamp 121 and the connecting column 122 to further squeeze the elastic member 123. The elastic member 123 can give the connecting column 122 a greater elastic force in the negative Z direction, and then the connecting column 122 drives the clamp 121 to further squeeze the sample to fix the sample in the groove 111.

[0082] The connecting post 122 is fixedly connected to the clip 121, and the connecting post 122 can also rotate in the connecting hole 112. When the connecting post 122 rotates in the connecting hole 112, the clip 121 can be driven to rotate, so that the clip 121 does not cover the partial opening of the groove 111. In particular, when the sample is placed in the groove 111, the clip 121 can be first rotated to other areas on the base 110, so that the clip 121 does not extend to the partial opening of the groove 111, so that the sample is placed in the groove 111. After the sample is placed in the groove 111, the clip 121 can be rotated again, so that a partial surface of the clip 121 is in contact with the surface of the sample on the side away from the bottom surface of the groove 111, so as to fix the sample in the groove 111. Fig.11 FIG. 1 shows the situation where the clip 121 rotates at different angles. The clip 121 can be rotated at different angles according to Fig.11 Rotate in the direction of the dashed arrow. Fig.11The dotted lines in the figure represent the states where the same clip 121 is rotated to different angles.

[0083] In one possible implementation, see Figure 1 , Figure 3 , Figure 7 and Figure 8 As shown, the elastic member 123 includes a spring, which is located on the side of the base 110 away from the clamping piece 121. The spring can be looped on the connecting column 122, one end of the spring is in contact with the base 110, and the other end of the spring is connected to the connecting column 122. The connecting column 122 and the base 110 can squeeze the spring at the same time to make the spring compressed. The compressed spring can apply elastic force to the connecting column 122, and the direction of the elastic force can be in the opposite direction of Z. Under the action of the elastic force, the connecting column 122 can drive the clamping piece 121 to move in the opposite direction of Z. Driven by the connecting column 122, the clamping piece 121 applies a clamping force in the opposite direction of Z to the sample located in the groove 111, which can fix the sample in the groove 111 and prevent the sample from moving relative to the groove 111.

[0084] In one possible implementation, see Figure 1 , Figure 3 , Figure 7 and Figure 8As shown, one end of the connecting column 122 is connected to the clip 121, and the connecting column 122 may include a column 1221 and a convex 1222. One end of the connecting column 122 is provided with a radial convex 1222, and the convex 1222 may be located at one end of the column 1221 away from the clip 121. The convex 1222 extends outwardly from the connection with the column 1221 in the radial direction so that the convex 1222 protrudes from the column 1221. The column 1221 and the convex 1222 may be an integrally formed structure. The spring ring is sleeved on the outside of the connecting column 122, and one end of the spring may abut against the base 110, and the other end of the spring may abut against the convex 1222. The convex eave 1222 can provide a plane for the connecting column 122 to abut against the spring. The connecting column 122 is fixedly connected to the clip 121. When the clamping mechanism 120 is installed on the base 110, the spring is sleeved on the connecting column 122. The connecting column 122 is inserted into the connecting hole 112. The clip 121 is fixedly connected to the connecting column 122 and is located on the side of the base 110 away from the spring. One end of the spring is connected to the convex eave 1222 of the connecting column, and the other end is connected to the surface of the base 110 away from the sample. The convex eave 1222 of the connecting column 122 and the base 110 can squeeze the spring at the same time. The spring located between the convex eave 1222 of the connecting column 122 and the base 110 is in a compressed state. The compressed spring can apply elastic force to the convex eave 1222 of the connecting column 122, and the direction of the elastic force can be in the opposite direction of Z. The connecting column 122 can drive the clamp 121 to move in the opposite Z direction under the action of elastic force. Driven by the connecting column 122, the clamp 121 applies a clamping force in the opposite Z direction to the sample in the groove 111, thereby fixing the sample in the groove 111 and preventing the sample from moving relative to the groove 111.

[0085] In one possible implementation, see Figure 1 and Fig.12As shown, the surface of the clip 121 facing the connecting column 122 may be provided with a buffer layer 124. When the clamping mechanism 120 clamps the sample, the buffer layer 124 of the clip 121 contacts the surface of the sample. The buffer layer 124 may be prepared by a combination of one or more of a foam material, a rubber material or a foaming material. It can be understood that when the thickness of the sample is greater than the depth of the groove 111, the sample drives the clip 121 and the connecting column 122 to move along the positive Z direction, the connecting column 122 compresses the elastic member 123, and the elastic force of the elastic member 123 causes the clip 121 to apply a clamping force to the sample along the negative Z direction. Compared with the case where the thickness of the sample is the same as the depth of the groove 111, when the thickness of the sample is greater than the depth of the groove 111, the clamping force applied by the clip 121 to the sample is greater. The buffer layer 124 can absorb a part of the clamping force when the clip 121 applies the clamping force to the sample, so as to prevent the sample from being broken due to the large clamping force or the surface of the sample from being scratched. In one embodiment, a buffer layer may be provided only on the portion of the clip extending to the groove, that is, on the surface where the clip contacts the sample. This can save material usage for the buffer layer while preventing the sample from being broken due to a large clamping force or scratches on the sample surface.

[0086] In one possible implementation, see Fig.15 , Fig.16 and Fig.17As shown, the sample clamping platform also includes a sleeve 130, the outer wall surface of the sleeve 130 is provided with an external thread, and the sleeve 130 is provided with a receiving cavity that penetrates the sleeve along the axial direction of the sleeve. The sleeve 130 can be sleeved on the outer side of the connecting column 122, and the length of the connecting column 122 along the axial direction can be greater than the length of the sleeve 130 along the axial direction. The connecting column 122 can move in the axial direction of the sleeve 130 in the receiving cavity. The base 110 is provided with a mounting hole (not shown in the figure) that penetrates the base 110 along the thickness direction of the base, and the inner wall surface of the mounting hole is provided with an internal thread. The mounting hole can be connected with the sleeve 130 through threaded cooperation, so that the sleeve 130 is fixed on the base 110. The sleeve 130 can adjust the height of the surface of the sleeve 130 relative to the side of the base 110 facing the clamp 121 by cooperating with the thread of the mounting hole. The clamp 121 is located on the side of the base 110 where the groove 111 is provided and is fixedly connected with the connecting column 122. One end of the elastic member 123 of the clamping mechanism 120 abuts against the connecting column 122, and the other end abuts against the end surface of the sleeve 130 away from the base 110, and the elastic member 123 is in a compressed state. The elastic member 123 in a compressed state can apply elastic force to the connecting column 122, and the direction of the elastic force can be the reverse direction Z. Under the action of the elastic force, the connecting column 122 can drive the clamping piece 121 to move in the reverse direction Z. Driven by the connecting column 122, the clamping piece 121 applies a clamping force in the reverse direction Z to the sample located in the groove 111, and can fix the sample in the groove 111 to prevent the sample from moving relative to the groove 111.

[0087] When the thickness of the sample is the same as the depth of the groove 111, see Fig.14 As shown, the end surface of the sleeve 130 facing the clamping piece 121 can be coplanar with the surface of the base 110 facing the clamping piece 121. When the thickness of the sample is greater than the depth of the groove 111, refer to Fig.15As shown, the surface of the sample facing away from the bottom surface of the groove 111 protrudes from the opening of the groove 111. At this time, the relative position between the sleeve 130 and the base 110 can be adjusted so that the end surface of the sleeve 130 facing the clamp 121 can protrude from the surface of the base 110 facing the clamp 121, and the end surface of the sleeve 130 facing the clamp 121 is coplanar with the surface of the sample facing away from the bottom surface of the groove 111. The relative position between the end face of the sleeve 130 facing the clamp 121 and the surface of the base 110 facing the clamp 121 can be adjusted according to the actual thickness of the sample, so that the end face of the sleeve 130 facing the clamp 121 and the surface of the sample on the side away from the bottom surface of the groove 111 can always be coplanar, thereby ensuring that the compression amount of the elastic member 123 will remain unchanged when the thickness of the sample is different, and the elastic force of the elastic member 123 will remain unchanged, so that the clamping force applied by the clamp 121 to the sample will not change due to the different thickness of the sample. The clamp 121 can always maintain the same clamping force when clamping samples of different thicknesses, thereby avoiding the situation where the sample is broken or the surface of the sample is scratched due to a large clamping force when the thickness is too large.

[0088] Understandably, Fig.15 , Fig.16 and Fig.17 The size relationship among the base 110, the clip 121, the connecting column 122, the elastic member 123 and the sleeve 130 shown in the figure is only for illustration.

[0089] In one possible implementation, see Fig.13 and Fig.14 As shown, the bottom surface of the groove 111 may be provided with a removable gasket 115 , and the size of the gasket 115 may be the same as the size of the bottom surface of the groove 111 , so that the gasket 115 will not move relative to the bottom surface of the groove 111 after being placed on the bottom surface of the groove 111 . Fig.131 shows a situation where a gasket 115 is set in one of the grooves 111. It is understandable that whether a gasket 115 needs to be set in the groove 111 can be determined according to the actual situation of the sample. When the thickness of the sample is less than the depth of the groove 111, the gasket 115 can be placed on the bottom surface of the groove 111 first, and then the sample is placed in the groove. The sum of the thickness of the gasket 115 and the sample is greater than or equal to the depth of the groove 111, so that the sample can be stably clamped by the clamp 121. It is understandable that the thickness of the gasket 115 is not unique, and a variety of gaskets 115 with different thicknesses can be set according to the actual situation of different samples to ensure that the sum of the thickness of the sample and the gasket 115 can be greater than or equal to the depth of the groove 111. In some other possible embodiments, a through hole 116 may be further provided on the gasket 115, and the through hole 116 may provide a gripping position. The operator may use a tool to clamp the gasket 115 through the through hole, place the gasket 115 into the groove 111, or take the gasket 115 out of the groove 111, thereby improving the convenience of operation.

[0090] In one possible implementation, see Fig.18 and Fig.19 As shown, a limiting protrusion 125 may also be provided on the surface of the clamp 121 on the side facing the connecting column 122. A limiting groove 113 is also provided on the surface of the base 110, and the limiting groove 113 is coplanar with the opening of the groove 111. When the thickness of the sample is the same as the depth of the groove 111, after the clamp 121 clamps the sample, the limiting protrusion 125 on the clamp 121 can be located in the limiting groove 113 on the base 110. The limiting protrusion 125 and the limiting groove 113 cooperate with each other to limit the movement of the clamp relative to the base 110 after the clamp 121 clamps the sample. In particular, the device may vibrate during operation, and the clamping mechanism 120 of the sample clamping platform placed in the device rotates in the connecting hole 112 due to the vibration, so that the clamp 121 deviates from the surface of the sample, resulting in a reduction in the clamping force of the clamp 121 on the sample or even failure to clamp the sample. The cooperation between the limiting groove 113 and the limiting protrusion 125 can fix the clamping piece 121 on the base 110, and will not rotate due to vibration or other reasons after clamping the sample. The clamping piece 121 can always provide clamping force to the sample in the groove 111, so that the sample is stably fixed in the groove 111. It can be understood that the positions of the limiting protrusion 125 and the limiting groove 113 can be interchanged, and the limiting groove 113 can also be provided on the surface of the side of the clamping piece 121 facing the connecting column 122, and the opening of the limiting groove 113 faces the connecting column 122, and the surface of the base 110 is also provided with a limiting protrusion 125.

[0091] In a possible implementation, the connection hole 112 includes an elongated hole, which extends along the extension direction of at least a portion of the side wall of the groove 111. The extension direction of the elongated hole may be the Y direction and the X direction. The connection column 122 can slide in the elongated hole to drive the clip 121 to move to different positions of the groove 111. Figure 7 and Fig. 20 As shown, the base 110 is provided with a connection hole 112, and the connection hole 112 includes an elongated hole, and the extension direction of the elongated hole can be the Y direction. The connection column 122 can slide in the elongated hole along the Y direction, and the connection column 122 is fixedly connected to the clamping piece 121. When the connection column 122 slides in the elongated hole, it can slide in the Y direction, so that the clamping piece 121 slides to different positions of the opening of the groove 111. After the sample is placed in the groove 111, the clamping piece 121 can slide to different positions of the groove 111 according to the actual situation of the sample, so that various different samples can be stably placed in the groove 111. Fig. 20 The extending direction of the long holes shown in the figure is for reference only.

[0092] In some other possible embodiments, see Fig.21 and Fig. 22 As shown, the connecting hole 112 in the shape of an elongated hole can also extend along the X direction, and the connecting column can drive the clip 121 to move to different positions in the elongated hole, and two connecting columns can pass through one elongated hole. Fig.23 As shown, the long holes are arranged on the periphery of the groove 111, and the long holes on the periphery of the groove 111 are enclosed to form a ring. The clamping mechanism has a larger range of movement in the long holes, and can adapt to more different samples to clamp different samples.

[0093] In a possible implementation, at least one clamping mechanism 120 extends to at least two grooves 111. When the sample is placed in the groove 111, at least one clamping mechanism 120 can extend to at least two samples to clamp the sample. The clamping mechanism 120 can clamp at least two samples at the same time, and the number of clamping mechanisms 120 is reduced, so that too many clamping mechanisms 120 occupy the space on the sample surface and affect the formation of the pattern on the sample surface. In addition, the time required for the clamping mechanism 120 to clamp the sample can be shortened, thereby improving work efficiency.

[0094] In one embodiment, see Figure 1 , Figure 2 and Figure 4As shown, four grooves 111 of the same size and shape are arranged on the base 110, and the four grooves 111 are arranged in a matrix of two rows and two columns on the base 110, and a sample 200 can be placed in each groove 111. The sample clamping platform 100 includes four clamping mechanisms 120, and a clamping mechanism 120 is arranged between each two adjacent grooves 111. The clamping mechanism 120 between two adjacent grooves 111 can extend to the two grooves 111 and cover part of the opening of the two grooves 111 at the same time. After the sample is placed in the groove 111, a clamping mechanism 120 can simultaneously fix the samples 200 respectively located in the two adjacent grooves 111 in the groove 111 to prevent the sample 200 from moving. Figure 4 The four clamping mechanisms 120 shown in FIG. 1 all extend to the two grooves 111 .

[0095] In one embodiment, see Figure 6 As shown, seven grooves 111 of the same size and shape may be provided on the base 110, and a clamping mechanism 120 may also be provided on the base 110. Part of the single clamping mechanism 120 may extend to three grooves 111, and part of the single clamping mechanism 120 may extend to only one groove 111. Figure 6 The single clamping mechanism 120 shown in FIG. 1 may extend to three grooves 111 . The clamping mechanism 120 may have three grooves 111 .

[0096] In a possible implementation, the depth of the groove 111 is in the range of 0.15 mm to 0.25 mm. For example, the depth of the groove 111 may be 0.15 mm, 0.2 mm, or 0.25 mm. The depth of the groove 111 may be adaptively designed according to the thickness of the sample placed in the groove 111. If the depth of the groove 111 is too shallow, the sample placed in the groove 111 may be unstable. If the depth of the groove 111 is too deep, it may be detrimental to the fixation of the sample by the clamping mechanism 120. The depth of the groove 111 in the range of 0.15 mm to 0.25 mm can ensure that the sample is stably fixed in the groove 111.

[0097] In one embodiment, the depth of the groove 111 is adaptively designed according to the thickness of the sample placed in the groove 111. The depth of the groove 111 is less than the thickness of the sample 200. The difference between the depth of the groove 111 and the thickness of the sample 200 is between 0.1 mm and 0.2 mm, for example, 0.1 mm, 0.15 mm or 0.2 mm, so that the sample protrudes from the groove 111 by 0.1 mm to 0.2 mm, which facilitates the clamping mechanism 120 to clamp the sample 200 and fix the sample 200 in the groove 111.

[0098] In one possible implementation, see Figure 1 and Figure 2As shown, a light-through hole 114 is provided on the base 110, and the light-through hole 114 may be a circular hole or a hole of other shapes. The light-through hole 114 may penetrate the base 110 along the thickness direction of the base 110, and the light-through hole 114 is located at the periphery of the groove 111. The light-through hole 114 may be provided at a position other than the groove 111 and the clamping mechanism 120 on the base 110. The number of the light-through holes 114 is at least two, for example, the number of the light-through holes 114 may be two, four or six. The number of the light-through holes 114 is at least two, and the size and shape of each light-through hole 114 may be the same. The rays emitted by the light source device in the equipment can be divided into at least two light beams by structures such as a beam splitter in the equipment. The light beams can pass through the light hole 114 on the base 110 to irradiate the sample. The light hole 114 can also be used for calibration and alignment of the optical path. By monitoring the light beam passing through the light hole 114, the position of structures such as the light source device or the sample clamping platform can be adjusted to ensure that the light beam can accurately fall on the predetermined position of the sample.

[0099] The size and position of the light hole 114 on the base 110 also need to take into account the size of the sample and the layout of the sample on the base 110 to ensure that the radiation beam can evenly cover the entire or specified area of ​​the sample regardless of how the sample is placed. Figure 1 , Figure 2 and Figure 4As shown, the base 110 is in the shape of a disc, and the diameter of the base 110 can be in the range of 90 mm to 120 mm, for example, 90 mm, 100 mm, 110 mm or 120 mm. Four square grooves 111 of the same size and shape are provided on the base 110, and the side length of the groove 111 can be in the range of 15 mm to 25 mm, for example, 15 mm, 20 mm or 25 mm. The depth of the groove 111 can be in the range of 0.15 mm to 0.25 mm, for example, 0.15 mm, 0.2 mm or 0.25 mm. The four grooves 111 are arranged on the base 110 in a matrix arrangement of two rows and two columns, wherein any two grooves 111 can be symmetrically distributed with a straight line passing through the center of the base 110 as the symmetry axis. Two light-through holes 114 are provided on the base 110. Both light-through holes 114 are circular holes. The diameter of the light-through holes 114 can be between 5 mm and 20 mm, for example, 5 mm, 8 mm, 10 mm or 20 mm. The distance between the centers of the two light-through holes 114 can be in the range of 20 mm to 40 mm, for example, 20 mm, 28 mm, 35 mm or 40 mm. The straight line where the connection between the centers of the two light-through holes 114 lies is parallel to one of the edges of the square groove 111. The distance between the center of the light-through hole 114 and the edge of the groove 111 closest to the light-through hole 114 is between 5 mm and 15 mm, for example, 5 mm, 9 mm, 10 mm or 15 mm. The relative position between the groove 111 and the light hole 114 can be kept fixed, and the light hole 114 can be used as a reference to place the sample holding platform 100 and the sample 200 into the device. When the device is working, the position of the light hole 114 in the optical path of the device is used as the zero point coordinate. The position of the groove 111 can be determined by the relative position between the groove 111 and the light hole 114, and the pattern can be accurately transferred to each sample 200 in the groove 111, ensuring the position accuracy of the pattern formed on the sample 200. In particular, when a larger number of grooves 111 are provided on the base 110, the number of grooves 111 increases, and accordingly, the size of the sample that can be placed in the groove 111 is reduced. The position of the light hole 114 in the optical path of the device is used as the zero point coordinate, which can prevent the pattern from deviating from the surface of the sample 200 when being transferred to the surface of the sample 200, thereby improving the yield rate of the sample 200 processed by the device.

[0100] In one embodiment, see Figure 6As shown, the base 110 is in the shape of a disc, and the diameter of the base 110 can be in the range of 90 mm to 120 mm, for example, 90 mm, 100 mm, 110 mm or 120 mm. Seven grooves 111 of the same size and shape are provided on the base 110, and the side length of the groove 111 can be in the range of 15 mm to 25 mm, for example, 15 mm, 20 mm or 25 mm. The depth of the groove 111 can be in the range of 0.15 mm to 0.25 mm, for example, 0.15 mm, 0.2 mm or 0.25 mm. Along the Y direction, the seven grooves 111 are distributed in three rows on the base 110. Along the positive direction of Y, each row has two grooves 111, three grooves 111 and two grooves 111 respectively, and the grooves 111 in each row are distributed in a matrix, and the grooves 111 in each row are equally spaced. Two light-through holes 114 are provided on the base 110. Both light-through holes 114 are circular holes. The diameter of the light-through holes 114 can be between 5 mm and 20 mm, for example, 5 mm, 8 mm, 10 mm or 20 mm. The distance between the centers of the two light-through holes 114 can be in the range of 20 mm to 40 mm, for example, 20 mm, 28 mm, 35 mm or 40 mm. The straight line where the connection line between the centers of the two light-through holes 114 lies is parallel to the edge of the first row of square grooves 111 in the Y direction extending along the X direction. The distance between the center of the light-through hole 114 and the edge of the groove 111 closest to the light-through hole 114 is between 5 mm and 15 mm, for example, 5 mm, 9 mm, 10 mm or 15 mm. The relative position between the groove 111 and the light hole 114 can remain fixed, and the light hole 114 can be used as a reference. The position of the light path of the light hole 114 in the device is taken as the zero point coordinate. The position of the groove 111 can be determined by the relative position between the groove 111 and the light hole 114, and the pattern can be accurately transferred to each sample 200 located in the groove 111, ensuring the position accuracy of the pattern formed on the sample 200.

[0101] In one embodiment, see Figure 5As shown, the base 110 can be a disc-shaped structure, and the diameter of the base 110 can be in the range of 110 mm to 140 mm, for example, 110 mm, 120 mm, 130 mm or 140 mm. Two circular grooves 111 are provided on the base 110, and the diameters of the two circular grooves 111 are equal, and the diameters are in the range of 51 mm to 60 mm, for example, 51 mm, 55 mm or 60 mm. The two grooves 111 are symmetrically arranged with the diameter of the base 110 in the Y direction. Two light holes 114 are provided on the base 110, and the two light holes 114 are circular holes, and the diameter of the light holes 114 can be between 5 mm and 20 mm, for example, 5 mm, 8 mm, 10 mm or 20 mm. The distance between the centers of the two light holes 114 can be in the range of 20 mm to 40 mm, for example, 20 mm, 28 mm, 35 mm or 40 mm. In the Y direction, the distance between the center of the light hole 114 and the edge of the groove 111 closest to the light hole 114 is between 5 mm and 15 mm, for example, 5 mm, 9 mm, 10 mm or 15 mm. The relative position between the groove 111 and the light hole 114 can be kept fixed, and the light hole 114 can be used as a reference, and the position of the light hole 114 in the optical path of the device is taken as the zero point coordinate. The position of the groove 111 can be determined by the relative position between the groove 111 and the light hole 114, and the pattern can be accurately transferred to each sample 200 located in the groove 111, ensuring the position accuracy of the pattern formed on the sample 200.

[0102] In a possible implementation, the grooves 111 are square, and the number of the grooves 111 is at least three, for example, the number of the grooves 111 may be three, four or five, and at least three grooves 111 are arranged in multiple rows, and the grooves 111 in each row are arranged in a matrix. The grooves 111 are arranged in a matrix on the base 110, and the grooves 111 are evenly arranged on the base 110, which helps to ensure the consistency of the pattern formed on the surface of each sample located in the groove 111.

[0103] In one embodiment, see Figure 4 As shown, four grooves 111 of the same size and shape are arranged on the base 110 , and the four grooves 111 are distributed on the base 110 in a matrix of two rows and two columns.

[0104] In one embodiment, see Figure 6 As shown, seven grooves 111 of the same size and shape are provided on the base 110, and along the Y direction, the seven grooves 111 are distributed in three rows on the base 110. Along the positive Y direction, each row has two grooves 111, three grooves 111, and two grooves 111, respectively, and the grooves 111 in each row are distributed in a matrix, and the grooves 111 in each row are equally spaced.

[0105] In a possible implementation, the groove 111 is circular, and the number of the grooves 111 is at least three, for example, the number of the grooves 111 may be three, four or five, and at least three grooves 111 may be arranged in a ring with the geometric center of the base 110 as the base point. The grooves 111 are arranged in a ring on the base 110, and the grooves 111 are arranged uniformly on the base 110, which helps to ensure the consistency of the pattern formed on the surface of each sample located in the groove 111.

[0106] In one embodiment, see Fig.24 As shown, the base 110 is disc-shaped, and three circular grooves 111 of the same size and shape are provided on the base 110. The three circular grooves 111 are arranged in a ring with the center of the base 110 on the XY plane as the base point.

[0107] The present application also provides a device, see Fig.25 The light source device 300 and the sample holding platform 100 described in any of the above embodiments are included. The light source device 300 can provide a ray light source, and the ray light source has coherence. The sample is fixed on the sample holding platform 100. When the light source device 300 is working, it emits rays to the sample clamped on the sample holding platform 100. The rays can be divided into at least two beams by a structure such as a beam splitter, and reach the surface of the sample through the light hole 114 on the base 110. The beams divided by the rays produce interference on the surface of the sample. The surface of the sample is provided with a patterned material capable of forming a pattern. The patterned material on the surface of the sample will change due to the irradiation of the rays, so that the pattern transfer can occur on the surface of the sample to form a pattern. The sample can then be developed and cleaned to remove impurities remaining on the surface of the sample. The sample with a pattern on the surface can be used to make a semiconductor device.

[0108] The device provided in the present application includes a sample clamping platform 100, on which at least two samples can be loaded at a time. The device can process at least two samples at a time when working, thereby improving work efficiency. The sample is fixed in the groove 111 of the base 110 by the clamping mechanism 120, and the clamping mechanism 120 can reduce damage to the surface of the sample while fixing the sample. After the sample is placed into the device along with the sample clamping platform, the device can form a pattern on the surface of the sample, and the sample can be further processed through steps such as development and cleaning to participate in the formation of semiconductor devices.

[0109] The present application also provides a semiconductor device, including a sample and a patterned material located on the sample, wherein the patterned material is prepared by any of the above-mentioned devices. The sample is clamped on a sample clamping platform and placed in the device together with the sample clamping platform. The light source device of the device can emit rays, which can pass through the light holes on the sample clamping platform and irradiate the patterned material on the sample. The irradiated patterned material can form a functional layer with a certain pattern on the surface of the sample. The sample processed by the device and the functional layer with a certain pattern on the surface of the sample can be used to prepare a semiconductor device with a specific function.

[0110] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A sample clamping platform, comprising a base and a clamping mechanism, wherein the clamping mechanism is connected to the base, characterized in that: The base is provided with a groove, and the groove is used to accommodate the sample; The clamping mechanism is used to fix the sample in the groove, and the clamping mechanism includes a connecting column and an elastic member, the elastic member connects the base and the connecting column, and the elastic member is used to abut against the connecting column along the opening of the groove toward the bottom surface.

2. The sample holding platform according to claim 1, characterized in that: The base is provided with a connecting hole, the connecting hole passes through the base, the connecting hole is located at the periphery of the groove, the connecting column passes through the connecting hole, and the clamping mechanism includes a clip, the clip is located at one side of the base where the groove is provided and is fixedly connected to the connecting column.

3. The sample holding platform according to claim 2, characterized in that: The connecting column is cylindrical.

4. The sample holding platform according to claim 2, characterized in that: The elastic member includes a spring, which is located on the side of the base away from the clip. The spring ring is sleeved on the connecting column. One end of the spring abuts against the base, and the other end of the spring is connected to the connecting column. The spring is in a compressed state.

5. The sample holding platform according to claim 4, characterized in that: One end of the connecting column is provided with a radial convex flange, and the other end of the spring abuts against the convex flange.

6. The sample holding platform according to claim 2, characterized in that: The connecting hole comprises an elongated hole extending along an extension direction of at least a portion of a side wall of the groove, and the connecting column is used to slide in the elongated hole to drive the clip to move to different positions of the groove.

7. The sample holding platform according to any one of claims 2 to 6, characterized in that: The number of the grooves is at least two, and at least one of the clamping mechanisms extends to at least two of the grooves.

8. The sample holding platform according to any one of claims 2 to 6, characterized in that: The depth of the groove is in the range of 0.15 mm to 0.25 mm.

9. The sample holding platform according to any one of claims 2 to 6, characterized in that: The base is provided with a light-through hole, the light-through hole passes through the base, the light-through hole is located at the periphery of the groove, and the number of the light-through holes is at least two.

10. The sample holding platform according to any one of claims 2 to 6, characterized in that: The grooves are square in shape, the number of the grooves is at least three, at least three grooves are arranged in multiple rows, and the grooves in each row are arranged in a matrix.

11. The sample holding platform according to any one of claims 2 to 6, characterized in that: The groove is circular, the number of the grooves is at least three, and at least three grooves are arranged in a ring shape.

12. A device, characterized in that: It comprises a light source device and the sample holding platform according to any one of claims 1 to 11, wherein the light source device emits rays to the sample held on the sample holding platform when in operation, so as to transfer a pattern on the surface of the sample.

Images