Carbon tetrafluoride reaction system and reactor

Abstract

The utility model discloses a carbon tetrafluoride reaction system and a reactor, relates to the technical field of carbon tetrafluoride production, and aims to solve the problem that gas at the bottom of a carbon tetrafluoride reactor is short-circuited easily due to an existing gas inlet mode. The upper end of the reactor body is provided with a carbon adding port and a carbon tetrafluoride outlet which are both communicated with an inner cavity of the reactor body, the position, close to the lower end, of the reactor body is provided with an ash collecting barrel, and the ash collecting barrel is provided with an air inlet enabling inlet air flow to diffuse downwards, so that fluorine entering the reactor body firstly faces downwards and then can diffuse upwards. According to the carbon tetrafluoride reactor, the inner cavity of the reactor body is provided with a plurality of supporting pipes which are arranged at equal intervals, the pipe diameters of the supporting pipes are the same, and the periphery of the reactor body is provided with a water cooling jacket used for cooling, so that the situation that gas at the bottom of the carbon tetrafluoride reactor is short-circuited in the gas inlet process is avoided, loose carbon blocks are ignited by fluorine gas, and subsequent reaction is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of carbon tetrafluoride production, and more specifically to a carbon tetrafluoride reaction system and a reactor. Background Art

[0002] Carbon tetrafluoride gas is the most widely used plasma etching gas in the microelectronics industry. It is widely used in the etching of thin film materials such as silicon, silicon dioxide, silicon nitride, phosphosilicate glass and tungsten. It is also widely used in electronic device surface cleaning, solar cell production, laser technology, low-temperature refrigeration, gas insulation, leakage detection agent, control of space rocket attitude, detergent in printed circuit production, lubricant and brake fluid, etc.

[0003] The existing carbon tetrafluoride production process usually passes fluorine gas into a carbon tetrafluoride reactor filled with carbon, so that the fluorine gas reacts with carbon to generate carbon tetrafluoride gas. The carbon tetrafluoride reactor used in production usually has a fluorine gas inlet and a slag removal port at the bottom of the reactor body, a carbon tetrafluoride outlet and a carbon addition port at the top of the reactor body, a perforated plate tray near the bottom of the reactor body, and a water-cooled outer jacket for cooling the reactor body. During the production process, the fluorine gas inlet at the bottom of the carbon tetrafluoride reactor is connected to a fluorine gas source (a device for providing a source of fluorine gas), and fluorine gas is input into the reactor from the fluorine gas source. The carbon tetrafluoride outlet at the top of the carbon tetrafluoride reactor is connected to a carbon tetrafluoride collecting device, and the carbon tetrafluoride collecting device collects the carbon tetrafluoride gas obtained by the reaction. The carbon required for production is added into the carbon tetrafluoride reactor from the carbon addition port and falls onto the perforated plate tray. The carbon reacts with the fluorine gas to generate carbon tetrafluoride gas and waste slag, and the waste slag generated is discharged from the slag removal port. Thus, the system consisting of the fluorine gas source, the carbon tetrafluoride reactor and the carbon tetrafluoride collecting device is the carbon tetrafluoride reaction system.

[0004] However, the fluorine gas intake mode of the existing carbon tetrafluoride reactor is horizontal intake. When the intake volume is large, the gas directly diffuses upward from the side wall of the carbon tetrafluoride reactor, resulting in a gas short circuit at the bottom of the carbon tetrafluoride reactor. Moreover, the diameter and spacing of the support tubes in the existing carbon tetrafluoride reactor are not uniform, which easily causes the problem of ash bridging and blocking the upper combustion space.

[0005] Therefore, how to solve the problem that the existing gas intake method easily causes gas short circuit at the bottom of the carbon tetrafluoride reactor is an urgent problem to be solved by those skilled in the art. Utility Model Content

[0006] In view of this, the purpose of the utility model is to provide a carbon tetrafluoride reactor, in which the gas flow entering the reactor body through the air inlet diffuses downward, which can avoid the gas short-circuiting at the bottom of the carbon tetrafluoride reactor during the air intake process, and strengthen the reaction between the gas and the carbon block, thereby improving the reaction efficiency.

[0007] Another object of the utility model is to provide a carbon tetrafluoride reaction system including the carbon tetrafluoride reactor, which can improve the reaction efficiency of generating carbon tetrafluoride.

[0008] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0009] A carbon tetrafluoride reactor comprises a sealed reactor body, wherein the upper end of the reactor body is provided with a carbon feeding port and a carbon tetrafluoride outlet both of which are connected to the inner cavity of the reactor body, an ash collecting bucket is provided near the lower end of the reactor body, and the ash collecting bucket is provided with an air inlet for diffusing the intake air flow downward, the inner cavity of the reactor body is provided with a plurality of support pipes arranged at equal intervals, the support pipes have the same pipe diameter, and the outer periphery of the reactor body is provided with a water cooling jacket for cooling.

[0010] Preferably, the inner cavity of the reactor body is further provided with a temperature measuring device connected to the controller, and the temperature measuring device is arranged close to the upper end of the reactor body.

[0011] Preferably, the reactor body comprises:

[0012] The first inner cylinder is arranged at the upper end of the ash collecting bucket, the ash collecting bucket is a cavity structure with an upper cover and a lower bottom, and the upper cover of the ash collecting bucket is provided with a through hole connected to the lower end of the first inner cylinder;

[0013] The cone is arranged at the upper end of the first inner cylinder, the lower end of the cone is connected to the upper end of the first inner cylinder, and both the cone and the first inner cylinder are hollow structures without bottom or cover;

[0014] The second inner cylinder is arranged at the upper end of the cone cylinder, the lower end of the second inner cylinder is connected to the upper end of the cone cylinder, and the second inner cylinder is a cavity structure with an upper cover.

[0015] Preferably, the air inlet is arranged on the upper cover of the ash collecting bucket, the air inlet is connected to the fluorine gas source through the first flange and the first connecting pipe, and the fluorine gas source is connected to the controller.

[0016] Preferably, a discharge port is provided on one side of the ash collecting bucket, and the discharge port is connected to the dust removal device through the second flange and the second connecting pipe, and the dust removal device is connected to the controller.

[0017] Preferably, the tetrafluorocarbon outlet is connected to the purification device through the third flange and the third connecting pipe, the purification device is connected to the controller, and the purification device is connected to the collection device.

[0018] Preferably, the water cooling jacket comprises:

[0019] The first jacket cylinder is arranged on the outer periphery of the ash collecting barrel;

[0020] A second jacket cylinder is arranged on the outer periphery of the first inner cylinder;

[0021] The third jacket cylinder is arranged on the outer periphery of the lower end of the second inner cylinder, and the third jacket cylinder is connected with the second jacket cylinder through a connecting pipe.

[0022] Preferably, a water inlet is provided on the second jacket cylinder, and a water outlet is provided at the upper end of the third jacket cylinder. The water inlet is connected to a cold water source, and the cold water source is connected to a controller.

[0023] Preferably, rib plates are provided in the first jacket cylinder, the second jacket cylinder and the third jacket cylinder.

[0024] A carbon tetrafluoride reaction system comprises any one of the carbon tetrafluoride reactors described above.

[0025] The carbon tetrafluoride reactor provided by the utility model comprises a sealed reactor body, wherein the upper end of the reactor body is provided with a carbon adding port and a carbon tetrafluoride outlet both of which are connected with the inner cavity of the reactor body, and loose carbon blocks and high-purity carbon blocks are added into the reactor body through the carbon adding port, and an ash collecting bucket is provided near the lower end of the reactor body, and the ash collecting bucket is used to collect ashes (powder) after the reaction, and an air inlet for diffusing the intake air flow downward is provided on the ash collecting bucket, so that the fluorine gas entering the reactor body first goes downward and then diffuses upward, so as to avoid the gas short circuit at the bottom of the carbon tetrafluoride reactor during the intake process, and ensure that the fluorine gas ignites the loose carbon blocks to ensure the subsequent reaction.

[0026] The inner cavity of the reactor body is provided with a plurality of support tubes arranged at equal intervals, and the support tubes have the same diameter to prevent the carbon blocks from falling directly to the bottom of the reactor body, and to facilitate the falling of the ashes after combustion, and to prevent the ashes from bridging and blocking the upper combustion space of the reactor body. The outer periphery of the reactor body is provided with a water cooling jacket for cooling. The reaction process of fluorine gas and carbon blocks is an exothermic process. In order to prevent the high temperature generated by the combustion reaction of fluorine gas and carbon blocks from causing the carbon tetrafluoride reactor to overheat, a water cooling jacket is provided to improve the heat dissipation effect of the reactor body and extend the life of the carbon tetrafluoride reactor.

[0027] When carbon tetrafluoride needs to be generated, a small amount of easily ignited loose carbon blocks is first loaded through the carbon loading port, and fluorine gas is introduced into the reactor body through the air inlet at the same time. The loose carbon blocks and fluorine gas come into contact and a combustion reaction occurs. Then a high-purity carbon block is loaded into the inner cavity of the reactor body from the carbon loading port. The high-purity carbon block falls downward along the height direction of the reactor body to the support tube. With the help of the heat generated by the combustion of the loose carbon block, the reaction between the fluorine gas and the high-purity carbon block is further induced, and the high-purity carbon block and fluorine gas are gradually allowed to undergo a combustion reaction. As the high-purity carbon block undergoes a combustion reaction, the residual ash (powder) from the combustion of the high-purity carbon block falls into the ash collecting bucket from the gap between the support tubes, thereby separating the ash from the unreacted high-purity carbon block and ensuring the full reaction of the high-purity carbon block. The carbon tetrafluoride gas generated during the reaction is discharged from the carbon tetrafluoride outlet of the reactor body to the next device.

[0028] The carbon tetrafluoride reactor arranged in the above manner can avoid the gas short circuit at the bottom of the carbon tetrafluoride reactor during the gas intake process by controlling the gas flow entering the reactor body from the gas inlet to diffuse downward, and strengthen the reaction between the gas and the carbon block to improve the reaction efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0030] Figure 1 This is a schematic diagram of the structure of the carbon tetrafluoride reactor provided by the utility model;

[0031] Figure 2 This is a schematic structural diagram of the carbon tetrafluoride reactor provided by the utility model.

[0032] Reference numerals:

[0033] 1-reactor body, 11-ash collecting bucket, 12-first inner cylinder, 13-cone cylinder, 14-second inner cylinder;

[0034] 2-Carbon addition port;

[0035] 3- Carbon tetrafluoride export;

[0036] 4- Air inlet;

[0037] 5- Support tube;

[0038] 6-water cooling jacket, 61-first jacket cylinder, 62-second jacket cylinder, 63-third jacket cylinder, 64-connecting pipe, 65-water inlet, 66-water outlet;

[0039] 7- Temperature measuring device;

[0040] 8-Discharge port;

[0041] 9-rib plate. DETAILED DESCRIPTION

[0042] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0043] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0044] It should be noted that the directional words such as "upper" and "lower" mentioned below are defined based on the drawings in the specification.

[0045] The core of the utility model is to provide a carbon tetrafluoride reactor, in which the gas flow entering the reactor body 1 through the air inlet 4 diffuses downward, which can avoid the gas short circuit at the bottom of the carbon tetrafluoride reactor during the air intake process, and strengthen the reaction between the gas and the carbon block, thereby improving the reaction efficiency.

[0046] Another core of the utility model is to provide a carbon tetrafluoride reaction system including the carbon tetrafluoride reactor, which can improve the reaction efficiency of generating carbon tetrafluoride.

[0047] Please refer to Figure 1 , a carbon tetrafluoride reactor comprises a sealed reactor body 1.

[0048] Specifically, the upper end of the reactor body 1 is provided with a carbon adding port 2 and a carbon tetrafluoride outlet 3 which are both connected to the inner cavity of the reactor body 1. Loose carbon blocks and high-purity carbon blocks are added into the reactor body 1 through the carbon adding port 2. An ash collecting bucket 11 is provided near the lower end of the reactor body 1. The ash collecting bucket 11 is used to collect ashes (powder) after the reaction. The ash collecting bucket 11 is provided with an air inlet 4 for diffusing the intake air flow downward, so that the fluorine gas entering the reactor body 1 first goes downward and then diffuses upward, so as to avoid the gas short-circuiting at the bottom of the carbon tetrafluoride reactor during the intake process, and ensure that the fluorine gas ignites the loose carbon blocks to ensure the subsequent reaction.

[0049] The inner cavity of the reactor body 1 is provided with a plurality of support tubes 5 arranged at equal intervals, and the support tubes 5 have the same diameter to prevent the carbon blocks from falling directly to the bottom of the reactor body 1, and to facilitate the falling of the ashes after combustion, and to prevent the ashes from bridging and blocking the upper combustion space of the reactor body 1. The outer periphery of the reactor body 1 is provided with a water-cooling jacket 6 for cooling. The reaction process of fluorine gas and carbon blocks is an exothermic process. In order to prevent the high temperature generated by the combustion reaction of fluorine gas and carbon blocks from causing the carbon tetrafluoride reactor to overheat, a water-cooling jacket 6 is provided to improve the heat dissipation effect of the reactor body 1 and extend the life of the carbon tetrafluoride reactor.

[0050] When carbon tetrafluoride needs to be generated, a small amount of easily ignited loose carbon blocks are first loaded through the carbon loading port 2, and fluorine gas is introduced into the reactor body 1 through the air inlet 4. The loose carbon blocks and fluorine gas come into contact and a combustion reaction occurs. Then a high-purity carbon block is loaded into the inner cavity of the reactor body 1 from the carbon loading port 2, and the high-purity carbon block falls downward along the height direction of the reactor body 1 to the support tube 5. With the help of the heat generated by the combustion of the loose carbon block, the reaction of fluorine gas and the high-purity carbon block is further induced, and the high-purity carbon block and fluorine gas are gradually allowed to undergo a combustion reaction. As the high-purity carbon block undergoes a combustion reaction, the residual ash (powder) from the combustion of the high-purity carbon block falls into the ash collecting bucket 11 from the gap between the support tubes 5, thereby separating the ash from the unreacted high-purity carbon block and ensuring the full reaction of the high-purity carbon block. The carbon tetrafluoride gas generated during the reaction is discharged from the carbon tetrafluoride outlet 3 of the reactor body 1 to the next device.

[0051] Among them, in this embodiment, the loose carbon block is a non-high-purity carbon block with a loose structure, and a combustion reaction occurs when it comes into contact with pure fluorine gas. However, in actual applications, there is no limitation to this as long as the above-mentioned technical effects can be achieved.

[0052] The carbon tetrafluoride reactor arranged in the above manner can avoid the gas short circuit at the bottom of the carbon tetrafluoride reactor during the gas intake process by controlling the gas flow entering the reactor body 1 from the gas inlet 4 to diffuse downward, and strengthen the reaction between the gas and the carbon block to improve the reaction efficiency.

[0053] In the above embodiment, the inner cavity of the reactor body 1 is further provided with a temperature measuring device 7 connected to the controller, and the temperature measuring device 7 is arranged close to the upper end of the reactor body 1 .

[0054] It should be noted that the temperature measuring device 7 is used to monitor the temperature of the inner cavity of the reactor body 1 in real time, and feed back the monitored data to the controller. The controller determines whether to pass cooling water into the water-cooling jacket 6 based on the actual data. When the measured temperature is higher than the preset temperature, the controller controls the cooling water to pass into the water-cooling jacket 6 to reduce the temperature of the inner cavity of the reactor body 1 to avoid damage to the reactor body 1 due to excessive temperature.

[0055] Among them, in this embodiment, the temperature measuring device 7 is arranged near the top of the reactor body 1, but in actual application, there is no limitation on the position, quantity, specification, etc. of the temperature measuring device 7, as long as the above-mentioned technical effect can be achieved.

[0056] In the above case, the reactor body 1 includes a first inner cylinder 12, a conical cylinder 13 and a second inner cylinder 14. The first inner cylinder 12 is arranged at the upper end of the ash collecting bucket 11. The ash collecting bucket 11 is a cavity structure with an upper cover and a lower bottom. The upper cover of the ash collecting bucket 11 is provided with a through hole connected to the lower end of the first inner cylinder 12. The conical cylinder 13 is arranged at the upper end of the first inner cylinder 12. The lower end of the conical cylinder 13 is connected to the upper end of the first inner cylinder 12. The conical cylinder 13 and the first inner cylinder 12 are both bottomless and coverless cavity structures. The second inner cylinder 14 is arranged at the upper end of the conical cylinder 13. The lower end of the second inner cylinder 14 is connected to the upper end of the conical cylinder 13. The second inner cylinder 14 is a cavity structure with an upper cover.

[0057] It can be understood that the support tube 5 is arranged in the ash collecting bucket 11, the diameter of the support tube 5 is 60 mm, and the distance between two adjacent support tubes 5 is 95 mm. Such a setting can not only facilitate the falling of ashes after combustion and prevent the ashes from bridging and blocking the upper combustion space, but also meet the requirements of supporting loose carbon blocks and ensuring that the loose carbon blocks do not fall.

[0058] The reactor body 1 comprises, from top to bottom, a second inner cylinder 14, a conical cylinder 13, a first inner cylinder 12 and an ash collecting bucket 11. When fluorine gas is input into the reactor body 1, the fluorine gas first enters from the second inner cylinder 14, passes through the conical cylinder 13 and the first inner cylinder 12 to reach the ash collecting bucket 11, and undergoes combustion reaction with the loose carbon blocks on the support tube 5 in the ash collecting bucket 11, releasing a large amount of heat. Then, a high-purity carbon block is added to the reactor body 1, and the high-purity carbon block falls in sequence along the second inner cylinder 14, the conical cylinder 13, and the first inner cylinder 12, and finally falls on the support tube 5 of the ash collecting bucket 11. With the help of the heat generated by the combustion of the loose carbon block, the reaction between the fluorine gas and the high-purity carbon block is further induced, and the high-purity carbon block and the fluorine gas are gradually subjected to a combustion reaction. As the high-purity carbon block undergoes a combustion reaction, the residual ash (powder) of the combustion of the high-purity carbon block falls into the ash collecting bucket 11 from the gap between the support tubes 5, thereby separating the ash from the unreacted high-purity carbon block, and ensuring the full reaction of the high-purity carbon block.

[0059] Furthermore, the air inlet 4 is arranged on the upper cover of the ash collecting bucket 11 and is connected to the fluorine gas source through the first flange and the first connecting pipe, and the fluorine gas source is connected to the controller.

[0060] It should be noted that when fluorine gas needs to be introduced into the reactor body 1, the controller controls the fluorine gas source to deliver fluorine gas to the reactor body 1, and the fluorine gas from the fluorine gas source enters the ash collecting bucket 11 from the air inlet 4 on the ash collecting bucket 11 through the first connecting pipe, and diffuses downward along the height direction of the ash collecting bucket 11, and then diffuses upward, so as to avoid the occurrence of gas short circuit at the bottom of the carbon tetrafluoride reactor during the air intake process, and ensure that the fluorine gas ignites the loose carbon blocks to ensure the subsequent reaction.

[0061] In the above embodiment, a discharge port 8 is provided on one side of the ash collecting bucket 11 and is connected to the dust removal device through the second flange and the second connecting pipe, and the dust removal device is connected to the controller.

[0062] It is understandable that when the reactor body 1 needs to discharge the ash or powder after the reaction, the controller controls the dust removal device to open, so that the ash or powder in the ash collecting bucket 11 is discharged along the second connecting pipe.

[0063] On the basis of the above embodiment, the carbon tetrafluoride outlet 3 is connected to the purification device through the third flange and the third connecting pipe, the purification device is connected to the controller, and the purification device is connected to the collecting device.

[0064] It should be noted that, in the inner cavity of the reactor body 1, as the fluorine gas reacts with the loose carbon blocks and the high-purity carbon blocks, carbon tetrafluoride gas will be generated, and the carbon tetrafluoride gas will be discharged from the carbon tetrafluoride outlet 3 through the third connecting pipe. However, a small amount of unreacted fluorine gas will be entrained with the carbon tetrafluoride when it is discharged. At this time, the controller controls the purification device to start to remove the fluorine gas entrained in the carbon tetrafluoride gas, and re-transport the fluorine gas to the inner cavity of the reactor body 1. At the same time, the carbon tetrafluoride gas is dried and treated, and the treated carbon tetrafluoride gas enters the collection device.

[0065] Among them, in this embodiment, the carbon tetrafluoride outlet 3 is provided with a purification device and a collection device, but in practical applications, other devices can also be provided without limitation, as long as the above technical effects can be achieved.

[0066] In the above embodiment, the water-cooling jacket 6 includes a first jacket cylinder 61, a second jacket cylinder 62 and a third jacket cylinder 63. The first jacket cylinder 61 is arranged on the outer periphery of the ash collecting bucket 11, the second jacket cylinder 62 is arranged on the outer periphery of the first inner cylinder 12, and the third jacket cylinder 63 is arranged on the outer periphery of the lower end of the second inner cylinder 14. The third jacket cylinder 63 is connected to the second jacket cylinder 62 through a connecting pipe 64.

[0067] It can be understood that the reactor body 1 is composed of the first jacket cylinder 61, the second jacket cylinder 62 and the third jacket cylinder 63 from top to bottom. The first jacket cylinder 61 and the second jacket cylinder 62 are connected, and the second jacket cylinder 62 and the third jacket cylinder 63 are connected by a connecting pipe 64. When cooling water is introduced, the cooling water flows among the first jacket cylinder 61, the second jacket cylinder 62 and the third jacket cylinder 63.

[0068] Among them, in this embodiment, the water cooling jacket 6 is configured in this way, but in practical applications, there is no limitation to this, as long as the above technical effects can be achieved.

[0069] As a preferred embodiment, a water inlet 65 is provided on the second jacket cylinder 62, and a water outlet 66 is provided at the upper end of the third jacket cylinder 63. The water inlet 65 is connected to a cold water source, and the cold water source is connected to a controller.

[0070] It should be noted that when the reactor body 1 needs to be cooled, the controller controls the cold water source to pass water into the water-cooling jacket 6. The cooling water enters from the water inlet 65 on the second jacket cylinder 62, passes through the first jacket cylinder 61 and the second jacket cylinder 62, and flows out from the water outlet 66 of the third jacket cylinder 63, so that there is always cooling water flowing in the entire water-cooling jacket 6 to achieve effective cooling of the reactor body 1.

[0071] In the above case, rib plates 9 are provided in the first jacket cylinder 61 , the second jacket cylinder 62 and the third jacket cylinder 63 .

[0072] It can be understood that by providing ribs 9 in the first jacket cylinder 61, the second jacket cylinder 62 and the third jacket cylinder 63, the first jacket cylinder 61, the second jacket cylinder 62 and the third jacket cylinder 63 are prevented from being attached to the outer wall of the reactor body 1, so as to ensure the normal circulation of cooling water.

[0073] In summary, the carbon tetrafluoride reactor provided by the utility model firstly loads a small amount of easily ignited loose carbon blocks from the carbon adding port 2, and the loose carbon blocks fall onto the support tube 5, and then the controller controls the fluorine gas source to introduce fluorine gas into the reactor body 1, and the fluorine gas enters the ash collecting bucket 11 in the downward airflow direction, first reacts with the loose carbon blocks to ignite the loose carbon blocks, and then the high-purity carbon blocks broken into blocks are filled into the reactor body 1 from the carbon adding port 2, and the high-purity carbon blocks fall onto the support tube 5. The heat generated by the combustion of the loose carbon blocks further induces the reaction between the fluorine gas and the high-purity carbon blocks, and gradually allows the high-purity carbon blocks to react with the fluorine gas. As the carbon blocks undergo a combustion reaction, the residual ash (powder) from the combustion of the carbon blocks falls into the ash collecting bucket 11 from the gap of the support tube 5, so as to separate the ash from the unreacted carbon blocks and ensure the full reaction of the carbon blocks. The crude product produced by the reaction leaves the reactor body 1 from the carbon tetrafluoride outlet 3 and enters the purification process. The arrangement of the reactor strengthens the reaction between the fluorine gas and the carbon block, improves the reaction efficiency, improves the heat dissipation effect of the reactor, and prolongs the life of the reactor.

[0074] In addition to the carbon tetrafluoride reactor disclosed in the above embodiments, the present invention also provides a carbon tetrafluoride reaction system including the above carbon tetrafluoride reactor. The structures of other parts of the carbon tetrafluoride reaction system can be referred to the prior art and will not be described in detail herein.

[0075] It should be noted that, in this specification, relational terms such as first and second are merely used to distinguish one entity from other entities, but do not necessarily require or imply any actual relationship or order between these entities.

[0076] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0077] The above is a detailed introduction to a carbon tetrafluoride reaction system and reactor provided by the utility model. This article uses specific examples to illustrate the principle and implementation method of the utility model. The description of the above embodiments is only used to help understand the method and core idea of ​​the utility model. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the utility model, the utility model can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

Claims

1. A carbon tetrafluoride reactor, characterized in that: The invention comprises a sealed reactor body (1), wherein the upper end of the reactor body (1) is provided with a carbon addition port (2) and a carbon tetrafluoride outlet (3) both of which are connected to the inner cavity of the reactor body (1), the reactor body (1) is provided with an ash collecting bucket (11) near the lower end, the ash collecting bucket (11) is provided with an air inlet (4) for diffusing the intake air flow downward, the inner cavity of the reactor body (1) is provided with a plurality of support pipes (5) arranged at equal intervals, the support pipes (5) having the same pipe diameter, and the outer periphery of the reactor body (1) is provided with a water cooling jacket (6) for cooling.

2. The carbon tetrafluoride reactor according to claim 1, characterized in that: The inner cavity of the reactor body (1) is also provided with a temperature measuring device (7) connected to the controller, and the temperature measuring device (7) is arranged close to the upper end of the reactor body (1).

3. The carbon tetrafluoride reactor according to claim 2, characterized in that: The reactor body (1) comprises: A first inner cylinder (12) is arranged at the upper end of the ash collecting bucket (11); the ash collecting bucket (11) is a hollow structure having an upper cover and a lower bottom; the upper cover of the ash collecting bucket (11) is provided with a through hole connected to the lower end of the first inner cylinder (12); A cone (13) is arranged at the upper end of the first inner cylinder (12); the lower end of the cone (13) is connected to the upper end of the first inner cylinder (12); the cone (13) and the first inner cylinder (12) are both hollow structures without a bottom or a cover; The second inner cylinder (14) is arranged at the upper end of the cone cylinder (13); the lower end of the second inner cylinder (14) is connected to the upper end of the cone cylinder (13); the second inner cylinder (14) is a hollow structure with an upper cover.

4. The carbon tetrafluoride reactor according to claim 3, characterized in that: The air inlet (4) is provided on the upper cover of the ash collecting bucket (11), the air inlet (4) is connected to a fluorine gas source via a first flange and a first connecting pipe, and the fluorine gas source is connected to the controller.

5. The carbon tetrafluoride reactor according to claim 4, characterized in that: A discharge port (8) is provided on one side of the ash collecting bucket (11); the discharge port (8) is connected to a dust removal device via a second flange and a second connecting pipe; and the dust removal device is connected to the controller.

6. The carbon tetrafluoride reactor according to claim 5, characterized in that: The carbon tetrafluoride outlet (3) is connected to a purification device via a third flange and a third connecting pipe, the purification device is connected to the controller, and the purification device is connected to a collecting device.

7. The carbon tetrafluoride reactor according to claim 6, characterized in that: The water cooling jacket (6) comprises: A first jacket cylinder (61) is arranged on the outer periphery of the ash collecting bucket (11); A second jacket cylinder (62) is arranged on the outer periphery of the first inner cylinder (12); The third jacket cylinder (63) is arranged on the outer periphery of the lower end of the second inner cylinder (14), and the third jacket cylinder (63) is connected to the second jacket cylinder (62) via a connecting pipe (64).

8. The carbon tetrafluoride reactor according to claim 7, characterized in that: The second jacket cylinder (62) is provided with a water inlet (65), and the upper end of the third jacket cylinder (63) is provided with a water outlet (66). The water inlet (65) is connected to a cold water source, and the cold water source is connected to the controller.

9. The carbon tetrafluoride reactor according to claim 8, characterized in that: Rib plates (9) are provided in the first jacket cylinder (61), the second jacket cylinder (62) and the third jacket cylinder (63).

10. A carbon tetrafluoride reaction system, characterized in that: It comprises the carbon tetrafluoride reactor according to any one of claims 1 to 9.

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