Gluing unit splash-proof cup pressing jig

Abstract

The utility model belongs to the field of semiconductor gluing processes, and particularly relates to a gluing unit splash-proof cup pressing jig which comprises a central base, a gradienter mounting table, a gradienter, pressing block connecting blocks, a bearing suction cup clamping block and a splash-proof cup pressing block, and at least three pressing block connecting blocks are arranged on the periphery of the central base. The lower side of each pressing block connecting block is connected with a bearing suction cup clamping block, the other end, away from the center base, of each pressing block connecting block is connected with a splash-proof cup pressing block, and each splash-proof cup pressing block is located above the splash-proof cup and abuts against the top face of the splash-proof cup. The center base, the gradienter installation table, the gradienter, the pressing block connecting block, the bearing suction cup clamping block and the splash-proof cup pressing block are arranged in a matched mode, after the bearing suction cup and the splash-proof cup are preliminarily installed, it can be guaranteed that the splash-proof cup and the bearing suction cup are in a relative horizontal state, the splash-proof cup is pressed, the installation tightness of the splash-proof cup is guaranteed, and the splash-proof cup is prevented from being damaged. The structure is simple, manufacturing and dismounting are easy, and applicability is high.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor glue coating technology, in particular to a glue coating unit splash-proof cup pressing fixture. Background Art

[0002] During the wafer spin coating process, the wafer is placed on the carrier suction cup and rotates, and liquids such as photoresist will inevitably splash, so a splash cup is generally required to collect waste gas and waste liquid. If the splash cup is not installed tightly, the splashing liquid will pollute the unit cavity and increase the time required for maintenance and cleaning. At present, when maintaining and cleaning the glue coating unit, the splash cup is usually installed simply by hand, and it is impossible to ensure the tightness of the splash cup after installation and whether the splash cup as a whole is relatively level with the carrier suction cup. Utility Model Content

[0003] In view of the above problems, the purpose of the utility model is to provide a glue coating unit splash-proof cup pressing fixture.

[0004] The purpose of this utility model is achieved through the following technical solutions:

[0005] A glue coating unit splash cup pressing fixture, comprising a central base, a level mounting table, a level, a pressing block connecting block, a bearing suction cup clamping block and a splash cup pressing block;

[0006] The level installation platform is arranged above the central base, and the level is installed on the level installation platform;

[0007] The outer circumference of the central base is evenly connected with one end of at least three pressure block connecting blocks along the circumferential direction, and the lower side of each pressure block connecting block is connected with a supporting suction cup clamping block via a screw A, and each supporting suction cup clamping block is respectively located on the outer side of the supporting suction cup and presses against the outer circumferential surface of the supporting suction cup along the radial direction of the supporting suction cup, and the other end of each pressure block connecting block away from the central base is connected with a splash-proof cup pressure block via a screw B, and each splash-proof cup pressure block is respectively located above the splash-proof cup and presses against the top surface of the splash-proof cup.

[0008] A plurality of connection seats are extended from the periphery of the central base, which are respectively used for corresponding connection with each of the pressing block connection blocks. Each connection seat of the central base is connected to the corresponding pressing block connection block through a screw C.

[0009] The lower ends of several support columns are evenly arranged on the top surface of the central base, and the upper ends of the support columns are respectively connected to the level mounting platform. The heights of the support columns are the same, and the plane where the central base is located is parallel to the plane where the level mounting platform is located.

[0010] Each of the pressing block connecting blocks is L-shaped and is divided into a vertical section and a horizontal section connected together. The vertical section of each of the pressing block connecting blocks is located at the other end of the pressing block connecting block away from the central base and is connected to the corresponding splash-proof cup pressing block, and the part of the horizontal section of each of the pressing block connecting blocks close to the central base is connected to the central base.

[0011] A long groove A is provided on the portion of the horizontal section of each pressing block connecting block away from the central base, and each of the supporting suction cup clamping blocks is connected to the corresponding pressing block connecting block by at least two screws A, and each screw A on the same supporting suction cup clamping block passes through the adjacent long grooves A respectively.

[0012] The length direction of the long groove A on each of the pressing block connecting blocks is parallel to the length direction of the horizontal section of the pressing block connecting block.

[0013] A stepped surface A for accommodating the heads of the screws A on the corresponding bearing suction cup clamping block is formed on the long groove A of each pressing block connecting block.

[0014] A long slot B is provided on the vertical section of each of the pressing block connecting blocks, and each of the splash cup pressing blocks is connected to the corresponding pressing block connecting block by at least two screws B, and each screw B on the same splash cup pressing block passes through the adjacent long slots B.

[0015] The length direction of the long groove B on each of the pressing block connecting blocks is parallel to the length direction of the vertical section of the pressing block connecting block.

[0016] A step surface B for accommodating the heads of the screws B on the corresponding anti-splash cup pressing block is formed on the long groove B of each pressing block connecting block.

[0017] The advantages and positive effects of the utility model are:

[0018] The utility model can ensure that the splash-proof cup and the carrying suction cup are in a relatively horizontal state after the carrying suction cup and the splash-proof cup are initially installed through the coordinated arrangement of the central base, the spirit level mounting platform, the spirit level, the pressure block connecting block, the carrying suction cup clamping block and the splash-proof cup pressure block, and can press the splash-proof cup to ensure the tightness of the installation of the splash-proof cup. The utility model has a simple structure, is easy to manufacture and disassemble, and has strong applicability. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the utility model;

[0020] Figure 2 It is a schematic diagram of the connection structure between the pressing block connecting block and the bearing suction cup clamping block of the utility model;

[0021] Figure 3It is a schematic diagram of the connection structure between the pressing block connecting block and the splash cup pressing block of the utility model;

[0022] Figure 4 This is a schematic diagram of the use state of the utility model;

[0023] Figure 5 for Figure 4 Enlarged view of point A.

[0024] In the figure: 1 is the center base, 101 is the connecting seat, 2 is the level installation platform, 3 is the level, 4 is the pressure block connecting block, 401 is the long groove A, 402 is the long groove B, 5 is the bearing suction cup clamping block, 6 is the splash cup pressure block, and 7 is the support column;

[0025] 001 is the carrying suction cup and 002 is the splash-proof cup. DETAILED DESCRIPTION

[0026] The following is combined with Figure 1-5 The utility model is further described in detail.

[0027] A glue coating unit splash cup pressing fixture, such as Figure 1-5 As shown, this embodiment includes a central base 1, a level mounting platform 2, a level 3, a pressing block connecting block 4, a bearing suction cup clamping block 5 and a splash cup pressing block 6.

[0028] The level mounting platform 2 is arranged above the central base 1, and the level 3 is mounted on the level mounting platform 2. In this embodiment, the level 3 adopts a commercially available universal level product, which can be mounted on the level mounting platform 2 by bolts. In this embodiment, the interior of the central base 1 and the level mounting platform 2 can be a hollow structure to reduce the overall weight for easy use.

[0029] The outer circumference of the central base 1 is evenly connected to one end of three pressing block connecting blocks 4 along the circumferential direction, and the lower side of each pressing block connecting block 4 is connected to a supporting suction cup clamping block 5 via a screw A (not shown in the drawings of the specification), and each supporting suction cup clamping block 5 is respectively located on the outer side of the supporting suction cup 001 and presses against the outer circumferential surface of the supporting suction cup 001 along the radial direction of the supporting suction cup 001. The other end of each pressing block connecting block 4 away from the central base 1 is connected to a splash-proof cup pressing block 6 via a screw B (not shown in the drawings of the specification), and each splash-proof cup pressing block 6 is respectively located above the splash-proof cup 002 and presses against the top surface of the splash-proof cup 002.

[0030] Specifically, in this embodiment, three connecting seat portions 101 respectively used to connect to each pressure block connecting block 4 extend from the outer periphery of the central base 1. Each connecting seat portion 101 of the central base 1 is connected to the corresponding pressure block connecting block 4 via a screw C (not shown in the drawings of the specification).

[0031] Specifically, in this embodiment, the lower ends of three support columns 7 are evenly arranged on the top surface of the central base 1, and the upper ends of the support columns 7 are respectively connected to the level mounting platform 2. The heights of the support columns 7 are the same, and the plane where the central base 1 is located is parallel to the plane where the level mounting platform 2 is located. The support columns 7 are arranged using existing technology, such as by bolts.

[0032] Specifically, in the present embodiment, each pressing block connecting block 4 is L-shaped and is divided into a vertical section and a horizontal section connected together. The vertical section of each pressing block connecting block 4 is located at the other end of the pressing block connecting block 4 away from the central base 1 and is connected to the corresponding splash cup pressing block 6. The part of the horizontal section of each pressing block connecting block 4 close to the central base 1 is connected to each connecting seat 101 on the central base 1.

[0033] Specifically, in this embodiment, a long slot A 401 is provided on the portion of the horizontal section of each pressing block connecting block 4 away from the central base 1, and each bearing suction cup clamping block 5 is connected to the corresponding pressing block connecting block 4 by two screws A, and each screw A on the same bearing suction cup clamping block 5 passes through the adjacent long slot A 401, so as to facilitate the adjustment of the fixed position of the bearing suction cup clamping block 5 on the pressing block connecting block 4. The length direction of the long slot A 401 on each pressing block connecting block 4 is parallel to the length direction of the horizontal section of the pressing block connecting block 4. A stepped surface A is formed on the long slot A 401 of each pressing block connecting block 4 for accommodating the head of each screw A on the corresponding bearing suction cup clamping block 5, so as to save installation space and facilitate installation.

[0034] Specifically, in this embodiment, a long groove B 402 is formed on the vertical section of each pressing block connecting block 4, and each splash cup pressing block 6 is connected to the corresponding pressing block connecting block 4 by two screws B. Each screw B on the same splash cup pressing block 6 passes through the adjacent long groove B 402, which is convenient for adjusting the fixed position of the splash cup pressing block 6 on the pressing block connecting block 4. The length direction of the long groove B 402 on each pressing block connecting block 4 is parallel to the length direction of the vertical section of the pressing block connecting block 4. A stepped surface B is formed on the long groove B 402 of each pressing block connecting block 4 for accommodating the head of each screw B on the corresponding splash cup pressing block 6, so as to save installation space and facilitate installation.

[0035] Working principle:

[0036] When in use, after initially installing the supporting suction cup 001 and the splash cup 002, place the central base 1 on the top surface of the supporting suction cup 001, adjust each supporting suction cup clamping block 5 to the edge of the supporting suction cup 001, continue to push each supporting suction cup clamping block 5 against the outer circumference of the supporting suction cup 001 and ensure that the central base 1 and the top surface of the supporting suction cup 001 are tightly fitted, at this time, fix each supporting suction cup clamping block 5 on the pressing block connecting block 4 by screw A; then first fix and install the two splash cup pressing blocks 6 by screw B and press the splash cup 002, and then adjust the last Install a splash-proof cup pressing block 6 and observe the spirit level 3. Continue to adjust until the spirit level 3 shows horizontal, that is, the splash-proof cup 002 and the supporting suction cup 001 are in a relatively horizontal state. After the last splash-proof cup pressing block 6 is fixedly installed, the fixture can be pressed as a whole to press the splash-proof cup 002. When replacing wafers of different sizes, the diameter of the applicable supporting suction cup 001 will also be changed accordingly. At this time, each supporting suction cup clamp block 5 can be adjusted to a suitable position as needed. The pressing fixture in this embodiment is compatible with a variety of gluing units for processing three sizes of wafers: 6 / 8 / 12 inches.

Claims

1. A glue coating unit splash cup pressing fixture, characterized in that: It comprises a central base (1), a level installation platform (2), a level (3), a pressure block connecting block (4), a bearing suction cup clamping block (5) and a splash cup pressure block (6); The level mounting platform (2) is arranged above the central base (1), and the level (3) is mounted on the level mounting platform (2); The outer circumference of the central base (1) is evenly connected to one end of at least three pressing block connecting blocks (4) along the circumferential direction; the lower side of each pressing block connecting block (4) is connected to a supporting suction cup clamping block (5) via a screw A; each supporting suction cup clamping block (5) is located on the outer side of the supporting suction cup and presses against the outer circumferential surface of the supporting suction cup along the radial direction of the supporting suction cup; the other end of each pressing block connecting block (4) away from the central base (1) is connected to a splash-proof cup pressing block (6) via a screw B; each splash-proof cup pressing block (6) is located above the splash-proof cup and presses against the top surface of the splash-proof cup.

2. A glue coating unit splash cup pressing fixture according to claim 1, characterized in that: A plurality of connection seat portions (101) are extended from the outer periphery of the central base (1) and are respectively used for correspondingly connecting to each of the pressure block connecting blocks (4); each of the connection seat portions (101) of the central base (1) is respectively connected to the corresponding pressure block connecting block (4) via a screw C.

3. The anti-splash cup pressing fixture of the glue coating unit according to claim 1, characterized in that: The lower ends of a plurality of support columns (7) are evenly arranged on the top surface of the central base (1), and the upper ends of the support columns (7) are respectively connected to the level mounting platform (2), and the heights of the support columns (7) are all the same. The plane where the central base (1) is located is parallel to the plane where the level mounting platform (2) is located.

4. The anti-splash cup pressing fixture of the glue coating unit according to claim 1, characterized in that: Each of the pressing block connecting blocks (4) is L-shaped and is divided into a vertical section and a horizontal section connected together. The vertical section of each of the pressing block connecting blocks (4) is located at the other end of the pressing block connecting block (4) away from the central base (1) and is connected to the corresponding splash cup pressing block (6). The part of the horizontal section of each of the pressing block connecting blocks (4) close to the central base (1) is connected to the central base (1).

5. The anti-splash cup pressing jig of the glue coating unit according to claim 4, characterized in that: A long slot A (401) is provided on the portion of the horizontal section of each of the pressing block connecting blocks (4) away from the central base (1), and each of the supporting suction cup clamping blocks (5) is connected to the corresponding pressing block connecting block (4) by at least two screws A, and each screw A on the same supporting suction cup clamping block (5) passes through the adjacent long slots A (401).

6. A glue coating unit splash cup pressing jig according to claim 5, characterized in that: The length direction of the long groove A (401) on each of the pressing block connecting blocks (4) is parallel to the length direction of the horizontal section of the pressing block connecting block (4).

7. The anti-splash cup pressing fixture of the glue coating unit according to claim 5, characterized in that: A stepped surface A for accommodating the head of each screw A on the corresponding supporting suction cup clamp block (5) is formed on the long groove A (401) of each pressing block connecting block (4).

8. The anti-splash cup pressing fixture of the glue coating unit according to claim 4, characterized in that: A long slot B (402) is provided on the vertical section of each of the pressure block connecting blocks (4); each of the splash cup pressure blocks (6) is connected to the corresponding pressure block connecting block (4) via at least two screws B; each screw B on the same splash cup pressure block (6) passes through the adjacent long slots B (402).

9. The anti-splash cup pressing fixture of the glue coating unit according to claim 8, characterized in that: The length direction of the long groove B (402) on each of the pressing block connecting blocks (4) is parallel to the length direction of the vertical section of the pressing block connecting block (4).

10. The anti-splash cup pressing fixture of the glue coating unit according to claim 8, characterized in that: A step surface B for accommodating the head of each screw B on the corresponding anti-splash cup pressing block (6) is formed on the long groove B (402) of each pressing block connecting block (4).

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