Double-wheel polishing device

Abstract

The utility model discloses a double-wheel polishing device which comprises a jig assembly, a polishing assembly and a supporting assembly, the polishing assembly is connected with the supporting assembly, and the polishing assembly is located above the jig assembly. The polishing assembly comprises a first mounting frame, a first driving part, a connecting shaft and two polishing structures, the first mounting frame is connected with the supporting assembly, the first driving part is mounted on the first mounting frame, an output shaft of the first driving part is provided with a first meshing end, and each polishing structure is provided with a connecting end and a second meshing end; the two ends of the connecting shaft are connected with the first mounting frame correspondingly, the polishing structures are arranged on the connecting shaft in a sleeving mode, the connecting end is rotationally connected with the first mounting frame, and the two second meshing ends are oppositely arranged and meshed with the first meshing ends correspondingly so as to drive the two polishing structures to rotate. The two polishing wheels are driven by the first driving piece to rotate reversely so as to act on the surface of a workpiece from two directions at the same time, the material removing process is accelerated, and compared with single-wheel polishing, the polishing speed is greatly increased.

Description

Technical Field

[0001] The utility model relates to the technical field of polishing, in particular to a double-wheel polishing device. Background Art

[0002] In industries such as semiconductor manufacturing, optical component processing, and precision machinery manufacturing, the surface quality of substrates directly affects the performance and service life of the final product. Traditional polishing methods mainly rely on the rotation of a single polishing wheel to achieve material removal and flattening. However, when this method processes surfaces with high precision requirements, unidirectional rotation can easily cause local over-polishing or under-polishing, as well as surface scratches, and it is often difficult to simultaneously ensure polishing efficiency and surface quality. Utility Model Content

[0003] The technical problem to be solved by the utility model is that it is difficult for a single polishing wheel to simultaneously ensure polishing efficiency and surface quality.

[0004] In order to solve the above technical problems, the utility model provides a double-wheel polishing device, comprising a jig assembly, a polishing assembly and a supporting assembly, wherein the polishing assembly is connected to the supporting assembly, and the polishing assembly is located above the jig assembly;

[0005] The polishing assembly includes a first mounting frame, a first driving member, a connecting shaft and two polishing structures. The first mounting frame is connected to the supporting assembly, the first driving member is installed on the first mounting frame, the output shaft of the first driving member has a first engaging end, the polishing structure has a connecting end and a second engaging end, the two ends of the connecting shaft are respectively connected to the first mounting frame, and the polishing structure is sleeved on the connecting shaft, the connecting end is rotatably connected to the first mounting frame, and the two second engaging ends are arranged opposite to each other and respectively engage with the first engaging end to drive the two polishing structures to rotate.

[0006] In some embodiments, the polishing structure includes a polishing wheel and a polishing pad, the polishing wheel has a polishing body, the connecting end and the second engaging end, the connecting end and the second engaging end are arranged at two ends of the polishing body opposite to each other, and the polishing pad is installed on the polishing body.

[0007] In some embodiments, the second meshing end is a gear structure.

[0008] In some embodiments, the first mounting frame includes a first connecting plate and two side plates, the two side plates are installed on both sides of the first connecting plate to define a accommodating space for installing the two polishing structures, the first driving member is installed on the first connecting plate, and the output shaft of the first driving member passes through the first connecting plate and extends into the accommodating space.

[0009] In some embodiments, a lifting assembly is further included, wherein the lifting assembly is mounted on the supporting assembly and connected to the first mounting frame to drive the polishing structure to perform lifting motion.

[0010] In some embodiments, the lifting assembly includes a second driving member, the second driving member is connected to the supporting assembly, and the output shaft of the second driving member is connected to the first mounting bracket.

[0011] In some embodiments, the lifting assembly also includes a second mounting frame, the second mounting frame includes a second connecting plate and a third connecting plate, the third connecting plate is installed on the second connecting plate, and the third connecting plate is vertically arranged to the second connecting plate, and an avoidance groove is provided on the side of the third connecting plate facing away from the second connecting plate, the third driving member is connected to the second connecting plate, the third connecting plate is connected to the second mounting frame, and the first driving member is located in the avoidance groove.

[0012] In some embodiments, the support assembly includes two support columns and a third mounting plate, the two support columns are spaced apart, two sides of the third mounting plate are respectively connected to the corresponding support columns, and the lifting assembly is connected to the third mounting plate.

[0013] In some embodiments, the jig assembly includes a jig, a third driving member, a base and a vacuum suction member, the jig has a vacuum suction port, the vacuum suction member is connected to the vacuum suction port, the third driving member is installed on the base, and the output shaft of the third driving member is connected to the jig to drive the jig to rotate.

[0014] In some embodiments, the fixture assembly further includes a fourth driving member, wherein the fourth driving member is connected to the base to drive the base to reciprocate along the first direction.

[0015] Compared with the prior art, the double-wheel polishing device of the utility model has the following beneficial effects:

[0016] The utility model drives two polishing wheels to rotate in opposite directions through a first driving member, so as to act on the workpiece surface from two directions at the same time, accelerate the material removal process, and greatly improve the polishing rate compared with single-wheel polishing. In addition, the shear force generated by the polishing wheels rotating in opposite directions helps to reduce surface scratches and uneven wear, making the workpiece surface smoother and smoother, and improving the polishing quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of a double-wheel polishing device provided by an embodiment of the utility model;

[0018] Figure 2It is a structural schematic diagram of a polishing assembly provided by an embodiment of the utility model;

[0019] Figure 3 It is a structural schematic diagram of a lifting assembly provided by an embodiment of the utility model;

[0020] Figure 4 It is a structural schematic diagram of a fixture assembly provided by an embodiment of the utility model;

[0021] In the figure, 1. fixture assembly; 11. fixture; 12. third driving member; 13. base; 14. fourth driving member; 2. polishing assembly; 21. first mounting frame; 211. first connecting plate; 212. side plate; 22. first driving member; 23. connecting shaft; 24. polishing structure; 241. second meshing end; 242. polishing wheel; 2421. polishing body; 243. polishing pad; 25. first meshing end; 3. support assembly; 31. support column; 32. third mounting plate; 4. lifting assembly; 41. second driving member; 42. second mounting frame; 421. second connecting plate; 422. third connecting plate; 4221. avoidance groove. DETAILED DESCRIPTION

[0022] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0023] like Figure 1 and Figure 2 As shown, the utility model provides a double-wheel polishing device, including a fixture assembly 1, a polishing assembly 2 and a support assembly 3. The fixture assembly 1 is used to fix the workpiece to ensure that the workpiece is in a stable position during the polishing process to avoid deviation or vibration, thereby ensuring the accuracy and consistency of the polishing; the polishing assembly 2 is connected to the support assembly 3, and the polishing assembly 2 is located above the fixture assembly 1;

[0024] The polishing assembly 2 includes a first mounting frame 21, a first driving member 22, a connecting shaft 23 and two polishing structures 24. The first mounting frame 21 is used as a basic support structure, which is connected to the supporting assembly 3 and provides a mounting platform for the remaining structures of the polishing assembly 2. The first driving member 22 is mounted on the first mounting frame 21. The output shaft of the first driving member 22 has a first meshing end 25 for transmitting power. The polishing structure 24 has a connecting end and a second meshing end 241. The two ends of the connecting shaft 23 are respectively connected to the first mounting frame 21, and as the rotation axis of the polishing wheel 242, the polishing structure 24 is sleeved on the connecting shaft 23 through the polishing structure 24 to assist the rotation of the polishing structure 24. The connecting end is rotatably connected to the first mounting frame 21, and the two second meshing ends 241 are arranged opposite to each other and mesh with the first meshing end 25 respectively to drive the two polishing structures 24 to rotate in opposite directions.

[0025] Based on the above structure, in this embodiment, the first driving member 22 drives the two polishing wheels 242 to rotate in opposite directions, so as to act on the workpiece surface from two directions at the same time, accelerate the material removal process, and greatly improve the polishing rate compared with single-wheel polishing. In addition, the shear force generated by the polishing wheels 242 rotating in opposite directions helps to reduce surface scratches and uneven wear, making the workpiece surface smoother and smoother, and improving the polishing quality.

[0026] It should be noted that in this embodiment, the rotation speed and pressure of the polishing wheel 242 are controlled by the cooperation between the first meshing end 25 and the second meshing end 241 to reduce excessive cutting or damage to the workpiece. The workpiece is a substrate sheet, and the first driving member 22 is a rotating motor.

[0027] In some embodiments, the polishing structure 24 includes a polishing wheel 242 and a polishing pad 243. The polishing wheel 242 has a polishing body 2421, a connecting end and a second meshing end 241. The connecting end and the second meshing end 241 are arranged at two ends of the polishing body 2421 opposite to each other. The connecting end is used to be rotatably connected to the first mounting frame 21 to ensure that the polishing wheel 242 can be firmly installed and realize rotational motion. The second meshing end 241 cooperates with the first meshing end 25 on the output shaft of the first driving member 22 to transmit power through this mechanical meshing method, so that the polishing wheel 242 can rotate in a predetermined direction. The polishing pad 243 is installed on the polishing body 2421 to directly contact the surface of the workpiece, thereby reducing the damage directly caused to the workpiece by the hard material of the polishing wheel 242 and protecting the surface of the workpiece from scratches.

[0028] In some embodiments, the second meshing end 241 is a gear structure. In this embodiment, the rotational motion of the first driving member 22 can be transmitted to the polishing wheel 242 in a precise ratio through gear transmission, so as to ensure that the rotation speed of the polishing wheel 242 is stable and controllable. In addition, the gear structure can withstand large torque and force transmission, and while ensuring the reliability of power transmission, the directional rotation of the polishing wheel 242 can be achieved through the positive or reverse meshing of the gear structure, such as making the two polishing wheels 242 rotate in opposite directions, which is conducive to improving the polishing efficiency and effect, reducing scratches on the workpiece surface, and achieving better surface treatment quality.

[0029] It should be noted that the gear structure of this embodiment is a bevel gear, and the first meshing end 25 is also a bevel gear.

[0030] In some embodiments, the first mounting frame 21 includes a first connecting plate 211 and two side plates 212, and the two side plates 212 are installed on both sides of the first connecting plate 211 to define a housing space for installing two polishing structures 24, providing a stable and accurately positioned installation site for the two polishing structures 24, ensuring that the polishing wheels 242 maintain the correct relative position and spacing during operation; the first driving member 22 is installed on the first connecting plate 211, and the first connecting plate 211 provides a through path for the output shaft, so that the output shaft of the first driving member 22 passes through the first connecting plate 211 and extends into the housing space. In this embodiment, the housing space defined by the side plates 212 ensures that the polishing wheel 242 is fixed in position after installation and is not easily offset, thereby increasing the stability and safety of the entire polishing process.

[0031] In some embodiments, a lifting assembly 4 is further included. The lifting assembly 4 is installed on the supporting assembly 3 and connected to the first mounting frame 21 to drive the polishing structure 24 to perform lifting motion.

[0032] In this embodiment, the polishing structure 24 is driven to rise and fall by the lifting assembly 4, so that the polishing device can adapt to workpieces of different thicknesses. For workpieces with varying thicknesses, the vertical position of the polishing wheel 242 can be adjusted to ensure that the polishing wheel 242 always maintains effective contact with the workpiece surface, thereby applying force evenly on the entire polishing surface. In addition, during the loading and unloading of the workpiece, the lifting assembly 4 can lift the polishing structure 24 to provide sufficient space for the operator to facilitate the placement and removal of the workpiece, while reducing the potential risk of injury during operation.

[0033] It can be understood that in this embodiment, the polishing structure 24 can also be driven to move up and down by the lifting assembly 4 to adjust the pressure applied by the polishing structure 24 on the workpiece.

[0034] like Figure 3 As shown, the lifting assembly 4 includes a second driving member 41, the second driving member 41 is connected to the supporting assembly 3, and the output shaft of the second driving member 41 is connected to the first mounting frame 21. When the second driving member 41 is started and its output shaft is rotated, it will directly drive the first mounting frame 21 to move up and down in the vertical direction, thereby driving the entire polishing structure 24 (including the polishing wheel 242) to perform lifting and lowering movements.

[0035] It can be understood that the lifting assembly 4 has an independent second driving member 41, which allows the rotational movement (controlled by the first driving member 22) and the lifting movement of the polishing wheel 242 to be independently controlled without affecting each other, thereby improving the flexibility and efficiency of the operation. The second driving member 41 is a cylinder.

[0036] In some embodiments, the lifting assembly 4 also includes a second mounting frame 42, the second mounting frame 42 includes a second connecting plate 421 and a third connecting plate 422, the third connecting plate 422 is installed on the second connecting plate 421, and the third connecting plate 422 is vertically arranged to the second connecting plate 421 to enhance the stability of the structure; an avoidance groove 4221 is provided on the side of the third connecting plate 422 away from the second connecting plate 421, and the first driving member 22 is located in the avoidance groove 4221, so that when the polishing wheel 242 needs to be lifted, its rotational movement will not be disturbed, maintaining the independent operation of the two while ensuring the compactness of the equipment; the second driving member 41 is connected to the second connecting plate 421, and the third connecting plate 422 is connected to the second mounting frame 42 to ensure that the lifting action and the rotational movement of the polishing wheel 242 are independent of each other and work in coordination.

[0037] In some embodiments, the support assembly 3 includes two support columns 31 and a third mounting plate 32. The two support columns 31 are arranged at intervals, and the two sides of the third mounting plate 32 are respectively connected to the corresponding support columns 31. The third mounting plate 32 is not only used to connect the two support columns 31, but also serves as an installation platform for other components (such as the lifting assembly 4).

[0038] like Figure 4 As shown, the jig assembly 1 includes a jig 11, a third driving member 12, a base 13 and a vacuum adsorption member. The jig 11 has a vacuum adsorption port, and the vacuum adsorption member is connected to the vacuum adsorption port. By forming a negative pressure between the jig 11 and the workpiece, the workpiece can be firmly adsorbed to ensure that the position of the workpiece is stable during the polishing process and will not move or fall off. The third driving member 12 is installed on the base 13, and the output shaft of the third driving member 12 is connected to the jig 11 to drive the jig 11 to rotate, so that the surface of the workpiece can be evenly ground by the polishing wheel 242 in multiple directions, which helps to improve the comprehensiveness of polishing and the consistency of the surface. It should be noted that the third driving member 12 of this embodiment is a rotating motor.

[0039] In some embodiments, the jig assembly 1 also includes a fourth driving member 14, which is connected to the base 13 to drive the base 13 to reciprocate along the first direction, thereby realizing horizontal movement of the jig 11 and cooperating with the third driving member 12 to improve the flexibility and automation level of the polishing operation.

[0040] The fourth driving member 14 of this embodiment is a linear motor, and the first direction is the length direction of the linear motor.

[0041] The specific working process is as follows:

[0042] The substrate sheet is mounted on the jig 11, the first driving member 22 rotates, and the polishing wheel 242 is driven to rotate through the transmission of the first meshing end 25 and the second meshing end 241; the second driving member 41 drives the polishing wheel 242 downward until the polishing pad 243 contacts the substrate sheet, the polishing wheel 242 rotates and makes the polishing pad 243 contact the substrate sheet, the third driving member 12 rotates to drive the jig 11 and the substrate sheet to rotate, and the fourth driving member 14 reciprocates along the first direction to perform the polishing operation.

[0043] In summary, the embodiment of the utility model provides a double-wheel polishing device, which drives the two polishing wheels 242 to rotate in opposite directions through the first driving member 22, so as to act on the surface of the workpiece from two directions at the same time, accelerate the material removal process, and greatly improve the polishing rate compared with single-wheel polishing. In addition, the shear force generated by the polishing wheels 242 rotating in opposite directions helps to reduce surface scratches and uneven wear, making the surface of the workpiece smoother and smoother, and improving the polishing quality.

[0044] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A double-wheel polishing device, characterized in that: It comprises a jig assembly, a polishing assembly and a supporting assembly, wherein the polishing assembly is connected to the supporting assembly, and the polishing assembly is located above the jig assembly; The polishing assembly includes a first mounting frame, a first driving member, a connecting shaft and two polishing structures. The first mounting frame is connected to the supporting assembly, the first driving member is installed on the first mounting frame, the output shaft of the first driving member has a first engaging end, the polishing structure has a connecting end and a second engaging end, the two ends of the connecting shaft are respectively connected to the first mounting frame, and the polishing structure is sleeved on the connecting shaft, the connecting end is rotatably connected to the first mounting frame, and the two second engaging ends are arranged opposite to each other and respectively engage with the first engaging end to drive the two polishing structures to rotate.

2. The double-wheel polishing device according to claim 1, characterized in that: The polishing structure includes a polishing wheel and a polishing pad. The polishing wheel has a polishing body, the connecting end and the second meshing end. The connecting end and the second meshing end are arranged at two ends of the polishing body opposite to each other. The polishing pad is installed on the polishing body.

3. The double-wheel polishing device according to claim 1, characterized in that: The second meshing end is a gear structure.

4. The double-wheel polishing device according to claim 1, characterized in that: The first mounting frame includes a first connecting plate and two side plates, the two side plates are installed on both sides of the first connecting plate to define a accommodating space for installing the two polishing structures, the first driving member is installed on the first connecting plate, and the output shaft of the first driving member passes through the first connecting plate and extends into the accommodating space.

5. The double-wheel polishing device according to claim 1, characterized in that: It also includes a lifting component, which is installed on the supporting component and connected to the first mounting frame to drive the polishing structure to perform lifting movement.

6. The double-wheel polishing device according to claim 5, characterized in that: The lifting assembly includes a second driving member, the second driving member is connected to the supporting assembly, and an output shaft of the second driving member is connected to the first mounting bracket.

7. The double-wheel polishing device according to claim 6, characterized in that: The lifting assembly also includes a second mounting frame, the second mounting frame includes a second connecting plate and a third connecting plate, the third connecting plate is mounted on the second connecting plate, and the third connecting plate is vertically arranged with the second connecting plate, a side of the third connecting plate facing away from the second connecting plate is provided with an avoidance groove, the second driving member is connected to the second connecting plate, the third connecting plate is connected to the second mounting frame, and the first driving member is located in the avoidance groove.

8. The double-wheel polishing device according to claim 5, characterized in that: The support assembly includes two support columns and a third mounting plate. The two support columns are arranged at an interval. Both sides of the third mounting plate are respectively connected to the corresponding support columns. The lifting assembly is connected to the third mounting plate.

9. The double-wheel polishing device according to claim 1, characterized in that: The jig assembly includes a jig, a third driving member, a base and a vacuum adsorption member. The jig has a vacuum adsorption port, the vacuum adsorption member is connected to the vacuum adsorption port, the third driving member is installed on the base, and the output shaft of the third driving member is connected to the jig to drive the jig to rotate.

10. The double-wheel polishing device according to claim 9, characterized in that: The fixture assembly also includes a fourth driving member, which is connected to the base to drive the base to reciprocate along the first direction.

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