Semiconductor cryogenic pump testing device

Abstract

The utility model relates to the field of cryopump detection, in particular to a semiconductor cryopump testing device, which comprises a loading plate, an adjusting mechanism arranged above the loading plate, and a moving mechanism. After the device moves to a proper position, a rotating plate is rotationally connected with a loading plate, four fastening screws are screwed after the rotating plate is rotated to a proper direction, fastening blocks at the bottoms of the fastening screws are tightly attached to a rubber ring, and therefore the rotating plate is not prone to rotating easily, then two sliding blocks are connected through an adjusting mechanism, and the two sliding blocks are connected through an adjusting mechanism. One sliding block is in threaded connection with a one-way screw rod, and the other sliding block is in sliding connection with a limiting rod, so that when a first motor drives the one-way screw rod to rotate, an adjusting mechanism between the two sliding blocks can move along with the one-way screw rod, and a test cover in the adjusting mechanism can be movably arranged on the outermost edges of two upward extending frames; and the flexibility of the device is better, so that the device can be suitable for semiconductor cryogenic pumps at various positions.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor cryogenic pump detection, in particular to a semiconductor cryogenic pump testing device. Background Art

[0002] In the manufacturing process of semiconductor components, many require high vacuum, high cleanliness or low temperature environment, in which semiconductor cryopumps have very obvious advantages. Semiconductor cryopumps have no moving parts inside the vacuum chamber of the equipment, no lubrication and sealing are required, and no foreign matter will be introduced into the vacuum chamber, so a high cleanliness vacuum environment can be obtained.

[0003] After searching the patent document with the publication number CN218563864U, the patent document discloses "a semiconductor cryogenic pump test device, which can provide measurement angles for the semiconductor cryogenic pump to be tested in the axial and circumferential directions by installing a rotating frame and a rotating shaft, an inner ring and an outer ring arranged on the rotating frame, thereby achieving the beneficial effect of installation positioning test of various angles of the semiconductor cryogenic pump";

[0004] When the above-mentioned device is in operation, although the adjustment structure can be used to adjust the angle of the semiconductor cryopump to be tested, the frame structure of the above-mentioned device, such as the columns and horizontal columns used to support the detection structure, is fixed. As a result, the test cover in the above-mentioned device can only be adjusted in angle at a fixed position. As a result, after the above-mentioned device is moved to the test position, it is easy for the test cover to detect the pump body even if the frame structure of the device hits the semiconductor cryopump to be tested, resulting in certain deficiencies in the flexibility of the device. Utility Model Content

[0005] The purpose of the utility model is to provide a semiconductor cryopump testing device in order to solve the above problems.

[0006] The utility model achieves the above-mentioned purpose through the following technical solutions:

[0007] A semiconductor cryopump testing device comprises a loading plate, an adjusting mechanism for adjusting the angle of a testing structure is installed above the loading plate, and a moving mechanism for enabling the device to adjust the position and direction of the testing structure;

[0008] The moving mechanism includes a rotating plate, which is rotatably connected to the upper end of the loading plate, and the upper end surface of the rotating plate is threadedly connected with four fastening screws, and the lower end of the fastening screw is fixed with a fastening block, and a rubber ring is arranged on the periphery of the lower half of the rotating plate, and the rubber ring is fixed to the loading plate, and two upper extension frames are fixed to the upper end of the rotating plate, and the internal rotation of the upper end of one of the upper extension frames is connected with a one-way screw, and the input end of the one-way screw is installed with a first motor, and the internal fixed limit rod is arranged on the upper end of the other upper extension frame, and the periphery of the one-way screw and the limit rod are both provided with a slider, the slider is threadedly connected to the one-way screw, and the slider is slidably connected to the limit rod.

[0009] Preferably: a horizontal plate for rotation is arranged at the upper end of the fastening screw, and a rubber layer is arranged at the lower end surface of the fastening block.

[0010] Preferably, the adjusting mechanism is installed between the two sliding blocks, and the position of each fastening block corresponds to the rubber ring.

[0011] Preferably: the adjustment mechanism includes two fixed plates, the two fixed plates are respectively fixed at the corresponding ends of the two sliding blocks, the corresponding ends of the two fixed plates are rotatably connected to the porous turntable, the upper end of the fixed plate is fixed with a lower edge frame, the middle of the lower edge frame is slidably connected with a pin shaft, an outer ring is fixed between the two porous turntables, the inner ring of the outer ring is rotatably connected to the inner ring, a fixing box is fixed to the upper end of the outer ring, a bidirectional screw is rotatably connected inside the fixing box, a second motor is installed at the input end of the bidirectional screw, the outer periphery of the bidirectional screw is threadedly connected to two clamping blocks, and the clamping blocks are slidably connected to the fixing box, and a detection cover is fixed in the middle of the inner ring.

[0012] Preferably, the positions of the plurality of holes on the outer ring of the porous turntable correspond to the pin shafts.

[0013] Preferably, the two clamping blocks are located at two ends of the outer ring, and the corresponding ends of the two clamping blocks are provided with rubber layers.

[0014] The beneficial effects compared with the prior art are as follows:

[0015] When the device is moved to a suitable position, the rotating plate is connected to the loading plate through rotation, and the rotating plate is rotated to a suitable direction, and then the four fastening screws are screwed to make the fastening block at the bottom of the fastening screw fit tightly with the rubber ring, so that the rotating plate is not easily rotated. Subsequently, the two sliders are connected through an adjusting mechanism, and then one of the sliders is threadedly connected to the one-way screw and the other slider is slidably connected to the limit rod. When the first motor drives the one-way screw to rotate, the adjusting mechanism between the two sliders can move accordingly, so that the test cover in the adjusting mechanism can be moved to the outermost edge of the two upper extension frames, making the device more flexible, so that the device can be suitable for semiconductor cryogenic pumps in various positions. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0017] Figure 1 It is a structural schematic diagram of a semiconductor cryopump testing device described in the utility model;

[0018] Figure 2 It is a structural schematic diagram of a moving mechanism of a semiconductor cryopump testing device described in the utility model;

[0019] Figure 3 It is a rear cross-sectional view of a moving mechanism of a semiconductor cryopump testing device according to the utility model;

[0020] Figure 4 It is a structural schematic diagram of an adjustment mechanism of a semiconductor cryopump testing device described in the utility model;

[0021] Figure 5 It is a partial structural schematic diagram of an adjustment mechanism of a semiconductor cryopump testing device described in the utility model;

[0022] Figure 6 This is a semiconductor cryogenic pump testing device described in the utility model Figure 5 Main sectional view.

[0023] The following are the descriptions of the reference numerals:

[0024] 1. Loading plate; 11. Universal wheel; 12. Push frame; 2. Turntable; 21. Fastening screw; 22. Fastening block; 23. Rubber ring; 24. Upper extension frame; 25. One-way screw; 26. First motor; 27. Limit rod; 28. Slider; 3. Fixed plate; 31. Multi-hole turntable; 32. Lower edge frame; 33. Pin shaft; 34. Outer ring; 35. Inner ring; 36. Fixed box; 37. Two-way screw; 38. Second motor; 39. Clamping block; 310. Detection cover. DETAILED DESCRIPTION

[0025] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0026] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0027] The utility model is further described below in conjunction with the accompanying drawings:

[0028] like Figure 1-Figure 6 As shown, a semiconductor cryopump testing device includes a loading plate 1, above which is mounted an adjustment mechanism for adjusting the angle of a testing structure, and also includes a moving mechanism for enabling the device to adjust the position and direction of the testing structure.

[0029] Universal wheels 11 are installed at the four corners of the lower end of the loading plate 1, and the universal wheels 11 have a self-locking structure. A push frame 12 is fixed to one end of the loading plate 1; through the setting of the universal wheels 11, the entire device can be moved when the push frame 12 is pushed.

[0030] The moving mechanism includes a rotating plate 2, which is rotatably connected to the upper end of the loading plate 1. Four fastening screws 21 are threadedly connected to the upper end surface of the rotating plate 2. A fastening block 22 is fixed to the lower end of the fastening screw 21. A horizontal plate for rotation is arranged at the upper end of the fastening screw 21. A rubber ring 23 is arranged on the periphery of the lower half of the rotating plate 2, and the rubber ring 23 is fixed to the loading plate 1. A rubber layer is arranged on the lower end surface of the fastening block 22. The position of each fastening block 22 corresponds to the rubber ring 23. Two upper extension frames 24 are fixed to the upper end of the rotating plate 2. A one-way screw 25 is rotatably connected to the internal end of the upper end of one of the upper extension frames 24. A first motor 26 is installed at the input end of the one-way screw 25. A limiting rod 27 is fixed to the internal end of the other upper extension frame 24. A slider 28 is arranged on the periphery of the one-way screw 25 and the limiting rod 27. The slider 28 is threadedly connected to the one-way screw 25. The slider 28 is connected to the one-way screw 25. The limit rod 27 is slidably connected, and the adjustment mechanism is installed between the two sliders 28; when the device is moved to a suitable position, the rotating plate 2 is rotated to the appropriate direction through the rotation connection between the rotating plate 2 and the loading plate 1, and then the four fastening screws 21 are screwed to make the fastening block 22 at the bottom of the fastening screw 21 fit tightly with the rubber ring 23, so that the rotating plate 2 is not easy to rotate, and then the two sliders 28 are connected through the adjustment mechanism, and then one of the sliders 28 is threadedly connected to the one-way screw 25 and the other slider 28 is slidably connected to the limit rod 27. When the first motor 26 drives the one-way screw 25 to rotate, the adjustment mechanism between the two sliders 28 can move accordingly, so that the test cover in the adjustment mechanism can be moved to the outermost edge of the two upper extension frames 24, so that the flexibility of the device is better, so that the device can be suitable for semiconductor cryopumps in various positions.

[0031] The adjusting mechanism comprises two fixing plates 3, which are respectively fixed at the corresponding ends of the two sliding blocks 28, and the corresponding ends of the two fixing plates 3 are rotatably connected with a porous turntable 31, a lower edge frame 32 is fixed on the upper end of the fixing plate 3, and a pin shaft 33 is slidably connected in the middle of the lower edge frame 32, and the positions of the multiple holes in the outer ring of the porous turntable 31 correspond to the pin shaft 33, an outer ring 34 is fixed between the two porous turntables 31, and the inner ring of the outer ring 34 is rotatably connected with an inner ring 35, a fixing box 36 is fixed on the upper end of the outer ring 34, and a bidirectional screw 37 is rotatably connected inside the fixing box 36, and a second motor 38 is installed at the input end of the bidirectional screw 37, and the outer periphery of the bidirectional screw 37 is threadedly connected with two clamping blocks 39, and the clamping blocks 39 are slidably connected with the fixing box 36, and the two clamping blocks 39 are located at the two ends of the outer ring 34, and the corresponding ends of the two clamping blocks 39 are provided with The detection cover 310 is fixed in the middle of the inner ring 35; the detection cover 310 in the middle of the inner ring 35 can be turned over as needed through the rotation connection between the fixing plate 3 and the porous turntable 31, so that it can be adjusted to a suitable angle. After the angle adjustment is completed, the pin 33 can be inserted into the hole corresponding to the outer ring of the porous turntable 31, so that the porous turntable 31 cannot rotate, and the detection cover 310 in the middle of the inner ring 35 can be rotated through the rotation connection between the outer ring 34 and the inner ring 35. Through the sliding connection between the clamping block 39 and the fixing box 36 and the threaded connection between the clamping block 39 and the bidirectional screw 37, when the second motor 38 drives the bidirectional screw 37 to rotate, the two clamping blocks 39 can move in relative directions, so that the two clamping blocks 39 clamp the inner ring 35 in the middle of the outer ring 34, so that the detection cover 310 in the middle of the inner ring 35 cannot rotate.

[0032] Working principle: Before using the device, first push the device to move to the appropriate position, then connect the rotating plate 2 with the loading plate 1 through rotation, rotate the rotating plate 2 to the appropriate direction, and then screw the four fastening screws 21 to make the fastening block 22 at the bottom of the fastening screw 21 fit tightly with the rubber ring 23, so that the rotating plate 2 is not easy to rotate. After adjusting the direction, the detection cover 310 in the middle of the inner ring 35 can be turned over as needed through the rotation connection between the fixing plate 3 and the porous rotating disk 31, so that it can be adjusted to a suitable angle. After the angle adjustment is completed, the pin 33 can be inserted into the hole corresponding to the outer ring of the porous rotating disk 31, so that the porous rotating disk 31 cannot rotate, and the detection cover 310 in the middle of the inner ring 35 can be rotated through the rotation connection between the outer ring 34 and the inner ring 35, and the sliding connection between the clamping block 39 and the fixing box 36 is used. And the threaded connection between the clamping block 39 and the bidirectional screw 37. When the second motor 38 drives the bidirectional screw 37 to rotate, the two clamping blocks 39 can move in relative directions, so that the two clamping blocks 39 clamp the inner ring 35 in the middle of the outer ring 34, so that the detection cover 310 in the middle of the inner ring 35 cannot rotate. Then, the two sliders 28 are connected through the adjustment mechanism, and then one of the sliders 28 is threadedly connected to the one-way screw 25 and the other slider 28 is slidably connected to the limit rod 27. When the first motor 26 drives the one-way screw 25 to rotate, the adjustment mechanism between the two sliders 28 can move accordingly, so that the detection cover 310 in the adjustment mechanism can be moved to the outermost edge of the two upper extension frames 24, making the device more flexible. After the belt is fully adjusted, the semiconductor cryopump is tested using a test instrument.

[0033] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.

Claims

1. A semiconductor cryopump testing device, comprising a loading plate (1), an adjusting mechanism for adjusting the angle of a testing structure being installed above the loading plate (1), characterized in that: Also included is a moving mechanism for enabling the apparatus to adjust the position and orientation of the test structure; The moving mechanism comprises a rotating plate (2), the rotating plate (2) being rotatably connected to the upper end of the loading plate (1), the upper end surface of the rotating plate (2) being threadedly connected with four fastening screws (21), the lower ends of the fastening screws (21) being fixed with fastening blocks (22), the outer periphery of the lower half of the rotating plate (2) being provided with a rubber ring (23), and the rubber ring (23) being fixed to the loading plate (1), and the upper end of the rotating plate (2) being fixed with two upper extension frames (24), one of which is The upper end of the upper extension frame (24) is internally rotatably connected with a one-way screw (25), and the input end of the one-way screw (25) is installed with a first motor (26). The upper end of the other upper extension frame (24) is internally fixed with a limit rod (27). The one-way screw (25) and the limit rod (27) are both provided with a slider (28) on the periphery. The slider (28) is threadedly connected with the one-way screw (25), and the slider (28) is slidably connected with the limit rod (27).

2. A semiconductor cryopump testing device according to claim 1, characterized in that: The upper end of the fastening screw (21) is provided with a horizontal plate for rotation, and the lower end surface of the fastening block (22) is provided with a rubber layer.

3. A semiconductor cryopump testing device according to claim 1, characterized in that: The adjustment mechanism is installed between the two sliding blocks (28), and the position of each fastening block (22) corresponds to the rubber ring (23).

4. A semiconductor cryopump testing device according to claim 1, characterized in that: The adjustment mechanism comprises two fixed plates (3), the two fixed plates (3) are respectively fixed to the corresponding ends of the two sliders (28), the corresponding ends of the two fixed plates (3) are rotatably connected to a porous rotating disk (31), the upper end of the fixed plate (3) is fixed with a lower edge frame (32), the middle of the lower edge frame (32) is slidably connected with a pin shaft (33), an outer ring (34) is fixed between the two porous rotating disks (31), and the inner ring of the outer ring (34) is rotatable. An inner ring (35) is connected, a fixing box (36) is fixed on the upper end of the outer ring (34), a bidirectional screw (37) is rotatably connected inside the fixing box (36), a second motor (38) is installed on the input end of the bidirectional screw (37), two clamping blocks (39) are threadedly connected to the outer periphery of the bidirectional screw (37), and the clamping blocks (39) are slidably connected to the fixing box (36), and a detection cover (310) is fixed in the middle of the inner ring (35).

5. A semiconductor cryopump testing device according to claim 4, characterized in that: The positions of the multiple holes on the outer ring of the porous rotating disk (31) correspond to the pin shaft (33).

6. A semiconductor cryopump testing device according to claim 4, characterized in that: The two clamping blocks (39) are located at two ends of the outer ring (34), and the corresponding ends of the two clamping blocks (39) are both provided with a rubber layer.

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