Combined device for turning transmission of waste liquid of semiconductor equipment

Abstract

The utility model discloses a combined device for turning transmission of waste liquid of semiconductor equipment, which is applied to the field of turning transmission and comprises a turning component, and when the waste liquid of the semiconductor equipment is transmitted, a reversing connector is a right-angled elbow, so that the turning of a waste liquid conveying path can be conveniently realized; meanwhile, the extending pipeline is used for extending and conveying the reversed waste liquid so as to facilitate output of the waste liquid, the direction changing assembly can change the conveying path of the waste liquid in the using process, the flexibility of the functional part of the combined device is improved, and the corrugated pipe facilitates extension of the functional part of the combined device; the two ends of the corrugated pipe can be kept horizontally through the guide rods and the guide blocks, path keeping in the installation process of the combined device is improved, the situation that the middle section of the corrugated pipe droops due to gravity in the suspended installation process of the combined device is avoided, and meanwhile the situation that impurities in waste liquid accumulate dust in uneven positions in the drooping process of the corrugated pipe is avoided.

Description

Technical Field

[0001] The utility model belongs to the field of directional transmission, and particularly relates to a combined device for directional transmission of waste liquid of semiconductor equipment. Background Art

[0002] Semiconductor equipment is an indispensable foundation for the semiconductor manufacturing industry, including two major categories: manufacturing equipment and packaging and testing equipment. Semiconductor equipment is a highly automated, high-precision equipment required in the manufacturing process of semiconductor devices. It is a technological leader in the semiconductor industry. Chip design, wafer manufacturing, packaging and testing, etc. need to be designed and manufactured within the scope permitted by equipment technology. The advancement of equipment technology in turn promotes the development of the semiconductor industry. In the production and processing of semiconductor equipment, some waste liquid will be generated. The waste liquid is strongly acidic or alkaline and has strong corrosiveness. The current transmission of waste liquid is not convenient for efficient transmission according to actual conditions, and the flexibility of use is not high, which affects the transmission of waste liquid. Utility Model Content

[0003] The purpose of the utility model is to provide a combined device for redirecting waste liquid transmission of semiconductor equipment, which has the advantages of achieving efficient transmission, increasing convenience of use, and having flexible functions.

[0004] The above-mentioned technical purpose of the utility model is achieved through the following technical solutions: a combined device for redirecting waste liquid from semiconductor equipment, comprising a redirection component, a conveying component is provided at one end of the redirection component, the redirection component comprises a reversing connector, an extension pipe is integrally formed at the bottom of the reversing connector, the conveying component comprises a bellows, connecting blocks and guide blocks are fixedly installed on the surfaces of both ends of the bellows, a guide rod that penetrates one side of the guide block is fixedly installed on one side of the connecting block, an external connector and a reducing connector 1 are threadedly connected at both ends of the bellows, an internal connector that penetrates into the interior of the external connector is sleeved on the surface of one end of the reversing connector, a protrusion is fixedly installed on the surface of one end of the reversing connector, and one end of the reducing connector 1 is threadedly connected to reducing connector 2.

[0005] The above technical solution is adopted: when the waste liquid of the semiconductor equipment is transmitted, the reversing connector is a right-angle elbow, which is convenient for realizing the degree of reversal of the waste liquid conveying path, and the extension pipeline is used for the extended conveying of the waste liquid after the reversal, so as to facilitate the output of the waste liquid. The reversing component can change the conveying path of the waste liquid during use, thereby improving the flexibility of the functional part of the combined device. The bellows is convenient for extending the functional part of the combined device. At the same time, during the extension and telescoping of the bellows, the horizontality of the two ends can be maintained by the guide rod and the guide block, thereby improving the path maintenance during the installation of the combined device, avoiding the gravity sagging of the middle section of the bellows during the suspended installation of the combined device, and avoiding The situation in which impurities and dust in the waste liquid accumulate in uneven places when the bellows is drooping is avoided. In addition, in the connection between the reversing connector and the bellows, the connection between the inner connector and the outer connector, and the outer connector and the bellows can be realized in sequence through threaded connection. In the clamping connection between the reversing connector and the inner connector, the splicing can be realized through the protrusion and the clamping groove. Then, when the inner connector and the outer connector are threadedly connected, the inner connector is squeezed, and the reversing connector can be inserted into the protrusion and the clamping groove to realize the adjustment of the right angle of the reversing connector, so that the position of the flange connector is more adjustable, further improving the flexibility of use of the combined device, and facilitating the improvement of the installation compatibility in the use environment.

[0006] The utility model is further configured that the reversing connector is a right-angle elbow.

[0007] The above technical solution is adopted: the right-angle elbow is used to facilitate the degree of change of direction of the conveying path.

[0008] The utility model is further configured that a flange connector is welded at the bottom of the extension pipe.

[0009] The above technical solution is adopted: the flange connector is used to connect with flange joints of the same specification.

[0010] The utility model is further configured that a guide hole for matching with a guide rod passing through is provided inside the guide block.

[0011] The above technical solution is adopted: the guide rod passes through the guide block through the guide hole.

[0012] The utility model is further configured that the outer connector and the inner connector are threadedly connected to each other.

[0013] The above technical solution is adopted: the installation between the outer connector and the inner connector is facilitated by the threaded connection.

[0014] The utility model is further configured that a rubber sheet is fixedly adhered to the outer side of the protrusion.

[0015] The above technical solution is adopted: the contact sealing performance between the reversing connector and the inner connector is increased by using a rubber sheet.

[0016] The utility model is further configured that a clamping groove for cooperating with the protrusion for insertion is provided inside the inner connector.

[0017] The above technical solution is adopted: the plug-in is performed through the engaging groove and the protrusion.

[0018] The utility model is further configured such that the direction-changing component, the conveying component and the reducing connector are all made of stainless steel.

[0019] The above technical solution is adopted: stainless steel material is used to prevent the strong acidic or alkaline waste liquid generated by semiconductor equipment from corroding the combined device.

[0020] In summary, the utility model has the following beneficial effects:

[0021] 1. When the utility model transmits waste liquid of semiconductor equipment, the reversing connector is a right-angle elbow, which is convenient for realizing the degree of reversal of the waste liquid conveying path. At the same time, the extension pipeline is used for the extended conveying of the waste liquid after the reversal, so as to facilitate the output of the waste liquid. The reversing component can change the conveying path of the waste liquid during use, and improve the flexibility of the functional part of the combined device. The bellows is convenient for extending the functional part of the combined device. At the same time, during the extension and telescoping of the bellows, the horizontality of the two ends can be maintained by the guide rod and the guide block, so as to improve the path maintenance during the installation of the combined device, and avoid the situation that the middle section of the bellows sags due to gravity during the suspended installation of the combined device, and at the same time, avoid the situation that impurities in the waste liquid accumulate in uneven places during the sag of the bellows;

[0022] 2. In the connection between the reversing connector and the bellows, the utility model can realize the connection and use of the inner connector and the outer connector, and the outer connector and the bellows in sequence through threaded connection. In the clamping connection between the reversing connector and the inner connector, the splicing can be realized through the protrusion and the clamping groove. Then, when the inner connector and the outer connector are threadedly connected, the inner connector is squeezed, and the reversing connector can be inserted into the protrusion and the clamping groove to realize the adjustment of the right angle of the reversing connector, so that the position of the flange connector is more adjustable, further improving the use flexibility of the combined device, and facilitating the improvement of the installation compatibility in the use environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0024] Figure 2 It is a front view schematic diagram of the structure of the utility model;

[0025] Figure 3It is a partial cross-sectional enlarged schematic diagram of the utility model;

[0026] Figure 4 It is an enlarged schematic diagram of the left side cross-section of the reversing connector of the utility model;

[0027] Figure 5 It is an enlarged schematic diagram of the left side cross-section of the inner connector of the utility model.

[0028] Figure numerals: 1. Direction-changing assembly; 101. Direction-changing connector; 102. Extension pipe; 103. Flange connector 1; 104. Bump; 105. Rubber sheet; 2. Conveying assembly; 201. Bellows; 202. External connector; 203. Reducer connector 1; 204. Internal connector; 205. Snap-in groove; 3. Reducer connector 2; 4. Connecting block; 5. Guide block; 6. Guide hole; 7. Guide rod. DETAILED DESCRIPTION

[0029] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0030] Embodiment 1:

[0031] refer to Figure 1 , Figure 2 and Figure 3 A combined device for redirecting waste liquid from semiconductor equipment comprises a redirection component 1, one end of which is provided with a conveying component 2, the redirection component 1 comprises a reversing connector 101, the bottom of which is integrally formed with an extension pipe 102, the conveying component 2 comprises a bellows 201, the surfaces of both ends of the bellows 201 are respectively fixedly mounted with a connecting block 4 and a guide block 5, one side of the connecting block 4 is fixedly mounted with a guide rod 7 penetrating to one side of the guide block 5, when the waste liquid from semiconductor equipment is transmitted, the reversing connector 101 is a right-angle elbow, which is convenient for realizing a 90-degree redirection of the waste liquid conveying path, and extending The pipe 102 is used for extending the conveying of waste liquid after the reversal to facilitate the output of the waste liquid. The direction-changing component 1 can change the conveying path of the waste liquid during use, thereby improving the flexibility of the functional part of the combined device. The bellows 201 is convenient for extending the functional part of the combined device. At the same time, during the extension and telescoping of the bellows 201, the horizontality of both ends can be maintained by the guide rod 7 and the guide block 5, thereby improving the path maintenance during the installation of the combined device, thereby avoiding the gravity sagging of the middle section of the bellows 201 during the suspended installation of the combined device, and at the same time avoiding the accumulation of impurities in the waste liquid in uneven places when the bellows 201 is sagging.

[0032] refer to Figure 1 The reversing connector 101 is a right-angle elbow, which facilitates the 90-degree change of direction of the conveying path.

[0033] refer to Figure 2A flange connector 103 is welded to the bottom of the extension pipe 102, and the flange connector 103 is used to connect with a flange joint of the same specification.

[0034] refer to Figure 1 A guide hole 6 for the guide rod 7 to pass through is provided inside the guide block 5 , and the guide rod 7 passes through the guide hole 6 and passes through the guide block 5 .

[0035] Brief description of the use process: When transmitting waste liquid from semiconductor equipment, the flange connector 103 is used with a flange connector of the same specification, wherein the reversing connector 101 is a right-angle elbow, which is convenient for realizing a 90-degree change in the waste liquid conveying path, and the extension pipe 102 is used for extending the waste liquid after the reversal. The reversing component 1 can form an interface of the system with other devices to facilitate the output of the waste liquid. The reversing component 1 can change the conveying path of the waste liquid during use, thereby improving the flexibility of the functional part of the combined device. The bellows 201 is made of retractable stainless steel. Used for the transmission of waste liquid, so as to extend the functional part of the combined device, the conveying component 2 can extend or shorten the transmission distance within a certain range according to the actual installation needs, thereby improving the flexibility of the functional part of the combined device. At the same time, during the extension and telescoping of the bellows 201, the horizontality of the two ends can be maintained by the guide rod 7 and the guide block 5, thereby improving the path maintenance during the installation of the combined device, avoiding the gravity sagging of the middle section of the bellows 201 during the suspended installation of the combined device, and avoiding the accumulation of impurities in the waste liquid in the uneven place of the bellows 201 during the sagging.

[0036] Embodiment 2:

[0037] refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5A combined device for redirecting waste liquid from semiconductor equipment comprises a redirecting assembly 1, wherein both ends of a bellows 201 are respectively threadedly connected with an outer connector 202 and a reducer connector 203, an inner connector 204 penetrating into the inner part of the outer connector 202 is sleeved on the surface of one end of the redirecting connector 101, a bump 104 is fixedly mounted on the surface of one end of the redirecting connector 101, and one end of the reducer connector 203 is threadedly connected with a reducer connector 23, and in the connection between the redirecting connector 101 and the bellows 201, the inner connector 204 and the outer connector 202 and the outer connector 203 can be connected in sequence through threaded connection. The connector 202 is connected to the bellows 201 for use. When the reversing connector 101 is clamped with the inner connector 204, the connection can be achieved through the protrusion 104 and the clamping groove 205. Then, when the inner connector 204 is threadedly connected to the outer connector 202, the inner connector 204 is squeezed, and the reversing connector 101 can be plugged into the protrusion 104 and the clamping groove 205 to achieve the right-angle adjustment of the reversing connector 101, so that the position of the flange connector 103 is more adjustable, further improving the flexibility of use of the combined device and facilitating the improvement of the installation compatibility in the use environment.

[0038] refer to Figure 3 The outer connector 202 and the inner connector 204 are threadedly connected to each other, and the threaded connection facilitates the installation between the outer connector 202 and the inner connector 204.

[0039] refer to Figure 4 A rubber sheet 105 is fixedly bonded to the outer side of the protrusion 104 , and the rubber sheet 105 increases the contact sealing performance between the reversing connector 101 and the inner connector 204 .

[0040] refer to Figure 5 A snap-in slot 205 for mating with the protrusion 104 is provided inside the inner connector 204 , and the protrusion 104 is mated with the snap-in slot 205 for mating.

[0041] refer to Figure 1 The direction-changing component 1, the conveying component 2 and the reducer connector 3 are all made of stainless steel, so as to prevent the strong acidic or alkaline waste liquid generated by the semiconductor equipment from corroding the combined device.

[0042] Brief description of the use process: In the connection between the reversing connector 101 and the bellows 201, the connection between the inner connector 204 and the outer connector 202, and the outer connector 202 and the bellows 201 can be realized in sequence through threaded connection. In the clamping connection between the reversing connector 101 and the inner connector 204, the splicing can be realized through the protrusion 104 and the clamping groove 205. Then, when the inner connector 204 and the outer connector 202 are threadedly connected, the inner connector 204 is squeezed and squeezed close to the reversing connector 101, and the rubber sheet 105 is cooperated to increase the contact sealing between the reversing connector 101 and the inner connector 204. The reversing connector 101 can adjust the right angle of the reversing connector 101 through the insertion of the protrusion 104 and the clamping groove 205, so that the position of the flange connector 103 is more adjustable, further improving the flexibility of use of the combined device, and facilitating the improvement of the compatibility of installation in the use environment.

[0043] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed, but such modifications are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. A combined device for redirecting waste liquid from semiconductor equipment, comprising a redirecting component (1), characterized in that: A conveying assembly (2) is provided at one end of the direction-changing assembly (1), the direction-changing assembly (1) comprising a direction-changing connector (101), the bottom of the direction-changing connector (101) being integrally formed with an extension pipe (102), the conveying assembly (2) comprising a bellows (201), the surfaces of both ends of the bellows (201) being respectively fixedly mounted with a connection block (4) and a guide block (5), one side of the connection block (4) being fixedly mounted with a guide rod (7) penetrating through one side of the guide block (5), the two ends of the bellows (201) being respectively threadedly connected with an external connector (202) and a first reducer connector (203), the surface of one end of the direction-changing connector (101) being sleeved with an internal connector (204) penetrating through the interior of the external connector (202), the surface of one end of the direction-changing connector (101) being fixedly mounted with a protrusion (104), and one end of the first reducer connector (203) being threadedly connected with a second reducer connector (3).

2. A combined device for redirecting waste liquid from semiconductor equipment according to claim 1, characterized in that: The reversing connector (101) is a right-angle elbow.

3. The combined device for redirecting waste liquid from semiconductor equipment according to claim 1, characterized in that: A flange connector (103) is welded to the bottom of the extension pipe (102).

4. The combined device for redirecting waste liquid from semiconductor equipment according to claim 1, characterized in that: A guide hole (6) is provided inside the guide block (5) and is used to fit the guide rod (7) to penetrate through.

5. The combined device for redirecting waste liquid from semiconductor equipment according to claim 1, characterized in that: The outer connector (202) and the inner connector (204) are threadedly connected to each other.

6. The combined device for redirecting waste liquid from semiconductor equipment according to claim 1, characterized in that: A rubber sheet (105) is fixedly bonded to the outer side of the protrusion (104).

7. The combined device for redirecting waste liquid from semiconductor equipment according to claim 1, characterized in that: The inner connector (204) is provided with a snap-in slot (205) for plugging with the protrusion (104).

8. The combined device for redirecting waste liquid from semiconductor equipment according to claim 1, characterized in that: The direction-changing component (1), the conveying component (2) and the second reducing connector (3) are all made of stainless steel.

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