Vacuum probe adjusting structure

Abstract

The utility model discloses a vacuum probe adjusting structure, which belongs to the field of vacuum and comprises a probe, the probe is positioned in a vacuum chamber, the vacuum probe adjusting structure further comprises a supporting plate, a driving part, a two-dimensional adjusting assembly, a sealing assembly and a telescopic rod, the sealing assembly is positioned between the vacuum chamber and the atmosphere side and seals the vacuum chamber, and the telescopic rod is positioned in the vacuum chamber. The telescopic rod extends into the vacuum chamber through the sealing assembly, the probe is installed at the end, located in the vacuum chamber, of the telescopic rod, the two-dimensional adjusting assembly is fixed to the supporting plate, the driving piece is installed on the two-dimensional adjusting assembly, the two-dimensional adjusting assembly drives the driving piece to move on a two-dimensional plane, and the driving piece is in transmission connection with the telescopic rod. The driving part drives the telescopic rod to move in the direction perpendicular to the two-dimensional plane so as to adjust the length of the telescopic rod extending into the vacuum chamber, so that the position of the probe in the vacuum chamber is adjusted, the position of the probe in the vacuum chamber is adjusted through the driving part, misoperation is not prone to being generated, and devices are not prone to being damaged.

Description

Technical Field

[0001] The utility model relates to the vacuum field, in particular to a vacuum probe adjustment structure. Background Art

[0002] Vacuum technology is widely used in industry and scientific research. By setting up probes in a vacuum environment, it is possible to measure the temperature, liquid level, light, and gas generated in the vacuum environment.

[0003] However, when the probe is used, the position of the probe in the vacuum chamber needs to be adjusted. The prior art uses a manual adjustment method on the atmosphere side, which is prone to misoperation and damage to the device. Utility Model Content

[0004] In order to overcome the deficiencies of the prior art, one of the purposes of the present invention is to provide a vacuum probe adjustment structure that is adjusted by a driving member, which is not prone to misoperation and damage to the device.

[0005] One of the purposes of the utility model is achieved by the following technical solution:

[0006] A vacuum probe adjustment structure includes a probe, which is located in a vacuum chamber. The vacuum probe adjustment structure also includes a support plate, a drive, a two-dimensional adjustment component, a sealing component and a telescopic rod. The sealing component is located between the vacuum chamber and the atmosphere and seals the vacuum chamber. The telescopic rod extends into the vacuum chamber through the sealing component. The probe is installed at the end of the telescopic rod located in the vacuum chamber. The two-dimensional adjustment component is fixed to the support plate. The drive is installed on the two-dimensional adjustment component. The two-dimensional adjustment component drives the drive to move in a two-dimensional plane. The drive is connected to the telescopic rod in a transmission manner. The drive drives the telescopic rod to move in a direction perpendicular to the two-dimensional plane to adjust the length of the telescopic rod extending into the vacuum chamber, thereby adjusting the position of the probe in the vacuum chamber.

[0007] Furthermore, the support plate is fixedly connected to the sealing assembly.

[0008] Furthermore, the support plate includes a plate body, a mounting end and a connecting end, the mounting end and the connecting end are respectively located at two ends of the plate body, the two-dimensional adjustment component is fixed to the mounting end, and the sealing component is installed on the connecting end.

[0009] Furthermore, the driving member is a cylinder, and the telescopic direction of the cylinder is the same as the extending direction of the plate body.

[0010] Furthermore, the two-dimensional adjustment component includes a first direction adjusting member, a first mounting plate, a second direction adjusting member and a second mounting plate, the first direction adjusting member is fixed to the support plate, the first mounting plate is fixed to the output end of the first direction adjusting member, the second direction adjusting member is fixed to the first mounting plate, the second mounting plate is fixed to the output end of the second direction adjusting member, and the driving member is fixed to the second mounting plate.

[0011] Furthermore, the first direction adjusting member and the second direction adjusting member each include two slidingly connected sliders and a knob, the two sliders are an input slider and an output slider respectively, the knob is rotationally connected to the input slider and cooperates with the output slider, and the rotation of the knob drives the output slider to slide.

[0012] Furthermore, the first mounting plate is L-shaped, the output slider of the first direction adjusting member is fixed to one end of the first mounting plate, and the input slider of the second direction adjusting member is fixed to the other end of the first mounting plate.

[0013] Furthermore, the two-dimensional adjustment assembly also includes a mounting block, the mounting block is fixedly connected to the second mounting plate, and the driving member is installed between the mounting block and the second mounting plate.

[0014] Furthermore, the vacuum probe adjustment structure also includes a fine-tuning component, which includes an adjustment block and an adjustment member. The adjustment block is fixed to the telescopic rod and is located on the atmospheric side of the sealing assembly. The adjustment member is threadedly connected to the adjustment block and contacts the sealing assembly. The adjustment member rotates to cause the adjustment block to drive the telescopic rod to move.

[0015] Furthermore, the fine-tuning assembly also includes a fastener, which is threadedly connected to the adjustment block, and an end of the fastener is in contact with the telescopic rod.

[0016] Compared with the prior art, the vacuum probe adjustment structure of the utility model includes a support plate, a driving member, a two-dimensional adjustment component, a sealing component and a telescopic rod. The sealing component is located between the vacuum chamber and the atmosphere side and seals the vacuum chamber. The telescopic rod extends into the vacuum chamber through the sealing component. The probe is installed at the end of the telescopic rod located in the vacuum chamber. The two-dimensional adjustment component is fixed to the support plate. The driving member is installed on the two-dimensional adjustment component. The two-dimensional adjustment component drives the driving member to move in a two-dimensional plane. The driving member is connected to the telescopic rod by transmission. The driving member drives the telescopic rod to move in a direction perpendicular to the two-dimensional plane to adjust the length of the telescopic rod extending into the vacuum chamber, thereby adjusting the position of the probe in the vacuum chamber. The position of the probe in the vacuum chamber is adjusted by the driving member, which is not easy to cause misoperation and damage to the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional diagram of the vacuum probe adjustment structure of the utility model;

[0018] Figure 2 for Figure 1 A three-dimensional view of a support plate of a vacuum probe adjustment structure;

[0019] Figure 3 for Figure 1 A three-dimensional diagram of a two-dimensional adjustment component of a vacuum probe adjustment structure;

[0020] Figure 4 for Figure 3 Another stereoscopic view of the two-dimensional adjustment assembly;

[0021] Figure 5 for Figure 1 A perspective view of a sealing assembly of a vacuum probe adjustment structure;

[0022] Figure 6 for Figure 5 A three-dimensional cross-sectional view of a sealing assembly;

[0023] Figure 7 for Figure 1 A partial structural stereogram of the vacuum probe adjustment structure;

[0024] Figure 8 for Figure 7 A partial structural cross-sectional view of the vacuum probe adjustment structure.

[0025] In the figure: 10, support plate; 11, plate body; 12, mounting end; 13, connecting end; 130, connecting hole; 131, fixing hole; 20, driving member; 30, two-dimensional adjustment assembly; 31, first direction adjustment member; 32, first mounting plate; 33, second direction adjustment member; 34, second mounting plate; 340, first positioning groove; 341, fastening hole; 35, mounting block; 350, second positioning groove; 351, fixing groove; 40, sealing assembly; 41, first sealing member; 42, second sealing member; 43, third sealing member; 44, sealing ring; 50, telescopic rod; 60, probe; 70, fine-tuning assembly; 71, adjustment block; 72, adjustment member; 73, fastener. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may be another intermediate component through which it is fixed. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be another intermediate component at the same time. When a component is considered to be "set on" another component, it may be directly set on the other component or there may be another intermediate component at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0029] See also Figure 1 The utility model discloses a vacuum probe adjustment structure for adjusting the position of a probe 60 in a vacuum chamber. The vacuum probe adjustment structure includes a support plate 10, a driving member 20, a two-dimensional adjustment component 30, a sealing component 40, a telescopic rod 50, a probe 60 and a fine-tuning component 70.

[0030] Please continue reading Figure 2 The support plate 10 includes a plate body 11, a mounting end 12 and a connecting end 13. The plate body 11 is in an elongated shape, the mounting end 12 is located at one end of the plate body 11, and the connecting end 13 is located at the other end of the plate body 11. The connecting end 13 is perpendicular to the plate body 11. The plate body 11 includes two side plates, and a guide groove is formed between the two side plates for guiding the movement of the driving member. The connecting end 13 is provided with a connecting hole 130 and a fixing hole 131 located at the edge of the connecting hole 130. The connecting hole 130 is used to install the sealing assembly 40, and the fixing hole 131 is used to fix the support plate 10 to the sealing assembly 40.

[0031] The driving member 20 is used to drive the telescopic rod 50 to move in the extension direction. In this embodiment, the driving member 20 is a cylinder.

[0032] Please continue reading Figure 3 as well as Figure 4 The two-dimensional adjustment assembly 30 includes a first direction adjustment member 31 , a first mounting plate 32 , a second direction adjustment member 33 , a second mounting plate 34 , and a mounting block 35 .

[0033] The first direction adjusting member 31 includes two slidingly connected sliders and a knob. The two sliders are an input slider and an output slider. The knob is rotatably connected to the input slider and cooperates with the output slider. The rotation of the knob drives the output slider to slide. The input slider of the first direction adjusting member 31 is fixed to the mounting end 12.

[0034] The first mounting plate 32 is L-shaped. The output slider is fixed to the bottom end of the first mounting plate 32 .

[0035] The structure of the second direction adjusting member 33 is the same as that of the first direction adjusting member 31 . The input slider of the second direction adjusting member 33 is fixed to the vertical end of the first mounting plate 32 .

[0036] The second mounting plate 34 is fixed to the output slider of the second direction adjusting member 33. The second mounting plate 34 is provided with a first positioning groove 340 and a fastening hole 341 on the side facing the mounting block 35. The cross section of the first positioning groove 340 is V-shaped. The V-shaped first positioning groove 340 can be snapped with the driving member 20. The mounting block 35 is fixed to the second mounting plate 34. The mounting block 35 is provided with a second positioning groove 350 and a fixing groove 351. The screws extend into the fixing groove 351 and are fixed with the fastening hole 341. The second positioning groove 350 faces the second mounting plate 34. The cross section of the second positioning groove 350 is V-shaped. The second positioning groove 350 and the first positioning groove 340 form the mounting portion of the driving member 20.

[0037] Please continue reading Figure 5 as well as Figure 6 The sealing assembly 40 includes a first sealing member 41, a second sealing member 42, a third sealing member 43 and a sealing ring 44. The first sealing member 41 is located on the side close to the vacuum chamber, the second sealing member 42 is fixedly connected to the first sealing member 41, and the second sealing member 42 is located on the side close to the atmosphere. The third sealing member 43 is located inside the second sealing member 42 and installed between the second sealing member 42 and the telescopic rod, and the sealing ring 44 is located at both ends of the third sealing member 43. The second sealing member 42 extends into the connection hole 130 of the connection end 13 of the support plate 10.

[0038] The telescopic rod 50 is transmission-connected to the driving member 20. Specifically, the telescopic rod 50 is fixedly connected to the extension rod of the cylinder. The telescopic rod 50 passes through the sealing assembly 40 and extends into the vacuum chamber, so that part of the telescopic rod 50 is located on the atmosphere side and part of it is located in the vacuum chamber.

[0039] The probe 60 is fixed to the end of the telescopic rod 50 located in the vacuum chamber.

[0040] Please continue reading Figure 7 as well as Figure 8The fine-tuning assembly 70 includes an adjusting block 71, an adjusting member 72, and a fastener 73. The adjusting block 71 is fixedly connected to the telescopic rod 50, the adjusting member 72 is threadedly connected to the adjusting block 71, and the end of the adjusting member 72 contacts the second sealing member 42. When the adjusting member 72 is rotated, the adjusting block 71 drives the telescopic rod 50 to move axially, and the position of the probe 60 is finely adjusted axially. The fastener 73 is rotatably installed on the adjusting block 71 to contact the telescopic rod 50, so as to lock the telescopic rod 50.

[0041] When the vacuum probe adjustment structure is used, when the position of the probe 60 needs to be adjusted, the driving member 20 drives the telescopic rod 50 to extend and retract along the axial direction to adjust the position of the probe 60. When the axial position of the probe 60 needs to be fine-tuned, when the adjusting member 72 is rotated, the adjusting block 71 drives the telescopic rod 50 to move axially (in the Y direction) to fine-tune the position of the probe 60 in the axial direction. When the position of the probe 60 perpendicular to the axial direction of the telescopic rod 50 needs to be adjusted, the knob of the first direction adjusting member 31 is rotated to adjust the driving member 20 to move along the X direction, driving the telescopic rod 50 and the probe 60 to move along the X direction. The knob of the second direction adjusting member 33 is rotated to adjust the driving member 20 to move along the Z direction, driving the telescopic rod 50 and the probe 60 to move along the Z direction.

[0042] The present application uses a two-dimensional adjustment component 30 to move the probe 60 in the X direction and the Z direction, uses a driving component 20 to move the probe 60 in the Y direction, and uses a fine-tuning component 70 to fine-tune the position of the probe 60 in the Y direction, which is less likely to cause misoperation and damage the device.

[0043] The above embodiments only express several implementation methods of the utility model, and the descriptions are relatively specific and detailed, but they cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, without departing from the concept of the utility model, several modifications and improvements can be made, which are equivalent modifications and improvements made to the above embodiments based on the essential technology of the utility model, and all of them belong to the protection scope of the utility model.

Claims

1. A vacuum probe adjustment structure, comprising a probe, wherein the probe is located in a vacuum chamber, and characterized in that: The vacuum probe adjustment structure also includes a support plate, a driving member, a two-dimensional adjustment component, a sealing component and a telescopic rod. The sealing component is located between the vacuum chamber and the atmosphere side and seals the vacuum chamber. The telescopic rod extends into the vacuum chamber through the sealing component. The probe is installed at the end of the telescopic rod located in the vacuum chamber. The two-dimensional adjustment component is fixed to the support plate. The driving member is installed on the two-dimensional adjustment component. The two-dimensional adjustment component drives the driving member to move in a two-dimensional plane. The driving member is connected to the telescopic rod in a transmission manner. The driving member drives the telescopic rod to move in a direction perpendicular to the two-dimensional plane to adjust the length of the telescopic rod extending into the vacuum chamber, thereby adjusting the position of the probe in the vacuum chamber.

2. The vacuum probe adjustment structure according to claim 1, characterized in that: The support plate is fixedly connected to the sealing assembly.

3. The vacuum probe adjustment structure according to claim 2, characterized in that: The support plate includes a plate body, a mounting end and a connecting end, wherein the mounting end and the connecting end are respectively located at two ends of the plate body, the two-dimensional adjustment component is fixed to the mounting end, and the sealing component is installed at the connecting end.

4. The vacuum probe adjustment structure according to claim 3, characterized in that: The driving member is a cylinder, and the telescopic direction of the cylinder is the same as the extending direction of the plate body.

5. The vacuum probe adjustment structure according to claim 1, characterized in that: The two-dimensional adjustment component includes a first direction adjustment member, a first mounting plate, a second direction adjustment member and a second mounting plate, the first direction adjustment member is fixed to the support plate, the first mounting plate is fixed to the output end of the first direction adjustment member, the second direction adjustment member is fixed to the first mounting plate, the second mounting plate is fixed to the output end of the second direction adjustment member, and the driving member is fixed to the second mounting plate.

6. The vacuum probe adjustment structure according to claim 5, characterized in that: The first direction adjusting member and the second direction adjusting member both include two slidingly connected sliders and a knob, the two sliders are an input slider and an output slider respectively, the knob is rotationally connected to the input slider and cooperates with the output slider, and the rotation of the knob drives the output slider to slide.

7. The vacuum probe adjustment structure according to claim 6, characterized in that: The first mounting plate is L-shaped, the output slider of the first direction adjusting member is fixed to one end of the first mounting plate, and the input slider of the second direction adjusting member is fixed to the other end of the first mounting plate.

8. The vacuum probe adjustment structure according to claim 5, characterized in that: The two-dimensional adjustment assembly also includes a mounting block, which is fixedly connected to the second mounting plate, and the driving member is installed between the mounting block and the second mounting plate.

9. The vacuum probe adjustment structure according to claim 1, characterized in that: The vacuum probe adjustment structure also includes a fine-tuning component, which includes an adjustment block and an adjustment member. The adjustment block is fixed to the telescopic rod and is located on the atmospheric side of the sealing assembly. The adjustment member is threadedly connected to the adjustment block and contacts the sealing assembly. The adjustment member rotates so that the adjustment block drives the telescopic rod to move.

10. The vacuum probe adjustment structure according to claim 9, characterized in that: The fine-tuning assembly also includes a fastener, which is threadedly connected to the adjustment block, and an end of the fastener is in conflict with the telescopic rod.

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