Automatic mask cleaning device

Abstract

The utility model belongs to the technical field of mask manufacturing, and particularly discloses an automatic mask cleaning device which comprises a cleaning box, a liquid drainage hole and a liquid inlet hole are formed in the cleaning box, valves are installed on the liquid drainage hole and the liquid inlet hole, a cross beam and two longitudinal supports are arranged at the top of the cleaning box, and the cross beam is provided with a liquid inlet and a liquid outlet. The cross beam is located between the two longitudinal supports and perpendicularly connected with the longitudinal supports, a transverse sliding block is arranged on the cross beam in a sliding fit mode, and a first driving unit for driving the transverse sliding block to slide in a reciprocating mode is arranged on the cross beam; the two longitudinal supports are in horizontal sliding fit with the top of the cleaning box in the direction perpendicular to the cross beam, and the top of the cleaning box is provided with a second driving unit for driving the longitudinal supports to slide in a reciprocating mode. The transverse sliding block is connected with a connecting rod, and the bottom of the connecting rod is connected with a brush head. According to the mask cleaning device, the mask can be automatically cleaned, and the risk of scratching and jacking damage to products is reduced, so that the product percent of pass is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of mask plate manufacturing, in particular to an automatic mask plate cleaning device. Background Art

[0002] The mask is also called a photomask or a mask. It is made of quartz glass as the substrate. When making a mask, a layer of metal chromium is first plated on the quartz glass substrate, and then a photoresist (also known as photoresist, a photosensitive material whose chemical properties change under the irradiation of a specific wavelength of light) is coated on the chromium layer. The designed circuit pattern is exposed to the photoresist through an electronic laser device, and the exposed area is formed through a process (photoresist development, chromium layer etching) to form a circuit that is consistent with the design. Figure 1 The same circuit pattern is formed, thus becoming a photomask master similar to the exposed film.

[0003] Masks are important key materials in the production and manufacturing process of semiconductor, flat panel display and other industries. As the benchmark and blueprint for photolithography replication, masks are the key to connecting industrial design and process manufacturing. The accuracy and quality level of masks will directly affect the quality rate of the final downstream products.

[0004] During the mask production process, dirt will be generated on the mask, so the mask needs to be cleaned to ensure the cleanliness of the mask surface and improve the quality of the mask. Currently, manual cleaning is often used to clean the mask, but due to the large size of the mask, manual cleaning is very labor-intensive and time-consuming, and manual cleaning is prone to incomplete cleaning, and even causes the risk of scratching or damaging the mask, resulting in product scrapping and huge losses to the company. Utility Model Content

[0005] The utility model provides an automatic mask cleaning device, which aims to realize automatic cleaning of the mask, reduce the risk of scratching and damaging the product, and thus improve the product qualification rate.

[0006] The utility model is realized by the following technical scheme: an automatic mask cleaning device comprises a cleaning box, the cleaning box is provided with a liquid discharge hole and a liquid inlet hole, valves are installed on the liquid discharge hole and the liquid inlet hole, a crossbeam and two longitudinal brackets are provided on the top of the cleaning box, the crossbeam is located between the two longitudinal brackets and vertically connected to the longitudinal brackets, a transverse slider is slidably matched on the crossbeam, and a first driving unit for driving the transverse slider to slide back and forth is provided on the crossbeam;

[0007] The two longitudinal brackets are horizontally slidably matched with the top of the cleaning box in a direction perpendicular to the cross beam, and a second driving unit for driving the longitudinal brackets to slide back and forth is provided on the top of the cleaning box; a connecting rod is connected to the transverse slider, and a brush head is connected to the bottom of the connecting rod.

[0008] Compared with the prior art, the present solution has the following advantages and beneficial effects: in the present solution, the mask can be cleaned by driving the brush head to slide back and forth horizontally through the first driving unit, and the second driving unit can drive the longitudinal bracket to slide in a direction perpendicular to the crossbeam, thereby driving the crossbeam and the brush head to move and clean the entire surface of the mask, so that the brush head can perform a composite reciprocating motion in the Y and X directions at the horizontal coordinate position, thereby achieving the purpose of automatic cleaning of the mask. Compared with manual cleaning, the present solution can improve operating efficiency, save labor costs, and is more convenient and quick to operate when cleaning larger masks.

[0009] Since no manual operation is required during the entire process, the risk of scratching and bruising the product can be reduced, thereby improving the product qualification rate.

[0010] Furthermore, it also includes a brush motor for driving the brush head to rotate, the brush head includes a brush disc and a plurality of bristles, the plurality of bristles are fixed to one end of the brush disc, and the other end of the brush disc is connected to the connecting rod.

[0011] Beneficial effect: In this solution, the bristles are fixed on the brush plate, which plays a role of connecting and fixing the bristles, and the brush motor can drive the entire brush head to rotate, so that it can also generate self-rotation during the process of driving the brush head to move horizontally, thereby improving the cleaning effect of the mask.

[0012] Furthermore, the plurality of bristles are staggeredly distributed.

[0013] Beneficial effect: The bristles on the brush plate are designed to be arranged in staggered rows. During the cleaning process, dirt can be discharged along the gaps between the bristles and is not easy to accumulate in the bristles to affect the cleaning effect.

[0014] Furthermore, the bottom of the brush head is lower than the upper surface of the mask placed in the cleaning box.

[0015] Beneficial effect: This allows the brush head to fully contact the mask product, improving the cleaning force and thus improving the cleaning cleanliness.

[0016] Furthermore, a water gun is connected to the side wall of the cleaning box, and a pure water pipeline connected to the water gun is provided on the cleaning box.

[0017] Beneficial effect: The water gun can initially flush the surface of the mask, which makes it easier to clean it with a brush head later and the cleaning effect is better.

[0018] Furthermore, a nitrogen gun is connected to the side wall of the cleaning box, and a nitrogen pipeline connected to the nitrogen gun is provided on the cleaning box.

[0019] Beneficial effect: Turning on the nitrogen gun after rinsing can effectively improve the efficiency of air drying the product surface.

[0020] Furthermore, the water gun and the nitrogen gun are provided in plurality, and the plurality of water guns and the plurality of nitrogen guns are distributed at intervals along the vertical direction of the cleaning box, and the water gun and the nitrogen gun are respectively located on both sides of the cleaning box.

[0021] Beneficial effect: The arrangement of multiple water guns can improve the cleaning efficiency and cleaning quality, while multiple nitrogen guns can improve the air-drying efficiency of the product surface.

[0022] Furthermore, the first driving unit includes a screw and a screw motor, a fixed block is connected to the top of the beam, the fixed block and the screw motor are respectively located at two ends of the beam, one end of the screw is rotatably connected to the fixed block, the other end of the screw is connected to the output shaft of the screw motor, and the upper part of the transverse slider is threadedly connected to the screw.

[0023] Beneficial effect: In this solution, the screw motor drives the screw to rotate to drive the lateral reciprocating motion of the lateral slider, thereby driving the brush head to perform comprehensive cleaning along the length direction of the mask. The structure is simple and easy to implement.

[0024] Furthermore, longitudinal bracket slide rails are installed on both sides of the top of the cleaning box, and the two longitudinal brackets are slidably matched with the two longitudinal bracket slide rails respectively.

[0025] Beneficial effects: The longitudinal bracket slide rail in this solution facilitates the installation of the longitudinal bracket and plays a guiding role in the sliding of the longitudinal bracket.

[0026] Furthermore, the drainage hole and the inlet hole are respectively located on both sides of the cleaning box, and the inlet hole is connected to a drainage pipe, the drainage hole is connected to a drainage pipe, and the valve is installed on the drainage pipe and the drainage pipe.

[0027] Beneficial effects: In this solution, the drain hole and the inlet hole are located on both sides of the cleaning box instead of the bottom, which makes it convenient to install the inlet pipe and the drain pipe, and to open or close the valve externally to open or close the drain hole or the inlet hole. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The drawings described herein are used to provide a further understanding of the embodiments of the present utility model, constitute a part of this application, and do not constitute a limitation of the embodiments of the present utility model. In the drawings:

[0029] Figure 1 It is a longitudinal cross-sectional view of Embodiment 1 of an automatic mask cleaning device of the utility model;

[0030] Figure 2 This is a schematic diagram of the structure of one group of bristles in Embodiment 2 of an automatic mask cleaning device of the utility model;

[0031] Figure 3 It is a longitudinal cross-sectional view of Embodiment 3 of an automatic mask cleaning device of the utility model;

[0032] Figure 4 It is a longitudinal cross-sectional view of Example 4 of an automatic mask cleaning device of the utility model.

[0033] Marks and corresponding parts names in the attached drawings:

[0034] Cleaning box 1, drainage hole 101, liquid inlet hole 102, cleaning solution 2, mask plate 3, water gun 4, longitudinal bracket 5, longitudinal bracket slide rail 6, crossbeam 7, brush plate 8, bristles 801, brush motor 9, nitrogen gun 10, transverse slider 11, connecting rod 12, screw 13, screw motor 14, fixed block 15, liquid inlet pipe 16, and liquid discharge pipe 17. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solutions and advantages of the utility model more clearly understood, the utility model is further described in detail below in conjunction with embodiments and drawings. The schematic implementation manner of the utility model and its description are only used to explain the utility model and are not intended to limit the utility model.

[0036] Example 1

[0037] like Figure 1 As shown, this embodiment 1 provides an automatic mask cleaning device, including a cleaning box 1, on which a drainage hole 101 and a liquid inlet hole 102 are provided, and valves are installed on the drainage hole 101 and the liquid inlet hole 102. In this embodiment, the drainage hole 101 and the liquid inlet hole 102 are respectively located on the left and right parts of the cleaning box 1, and are opened at the bottom of the cleaning box 1. In actual operation, pipes are connected to the drainage hole 101 and the liquid inlet hole 102 to discharge or discharge liquid.

[0038] A crossbeam 7 and two longitudinal brackets 5 are provided on the top of the cleaning box 1. The crossbeam 7 is located between the two longitudinal brackets 5 and is welded and fixed vertically to the longitudinal brackets 5. A cross slider 11 is slidably fitted on the crossbeam 7. A first driving unit for driving the cross slider 11 to slide back and forth is provided on the crossbeam 7. Specifically: In this embodiment, the first driving unit includes a screw rod 13 and a screw motor 14. A fixing block 15 is welded or screwed on the top of the crossbeam 7. The fixing block 15 and the screw motor 14 are respectively located at two ends of the crossbeam 7. One end of the screw rod 13 is rotatably connected to the fixing block 15 through a bearing, and the other end of the screw rod 13 is connected to the output shaft of the screw motor 14 through a coupling. The upper part of the cross slider 11 is threadedly connected to the screw rod 13, so that the screw motor 14 drives the screw rod 13 to rotate. Since the cross slider 11 is restricted by the crossbeam 7 and cannot rotate, it will slide horizontally along the crossbeam 7.

[0039] The two longitudinal brackets 5 slide horizontally with the top of the cleaning box 1 in a direction perpendicular to the cross beam 7. In this embodiment, longitudinal bracket slide rails 6 are installed on both sides of the top of the cleaning box 1. The two longitudinal brackets 5 slide with the two longitudinal bracket slide rails 6 respectively. When the longitudinal bracket slide rails 6 slide, they can drive the cross beam 7 and the first drive unit and the transverse slider 11 on the cross beam 7 to move synchronously as a whole.

[0040] A second driving unit for driving the longitudinal bracket 5 to slide back and forth is provided on the top of the cleaning box 1. In this embodiment, the second driving unit also adopts a screw substructure, that is, the structure of the second driving unit is the same as that of the first driving unit, and the screw is also threadedly connected to the longitudinal bracket 5. The motor drives the screw to rotate to make the longitudinal bracket 5 slide along the longitudinal bracket slide rail 6. The sliding direction of the longitudinal bracket 5 and the sliding direction of the transverse slider 11 are similar to the coordinate directions of the X-axis and the Y-axis in the plane coordinate system.

[0041] In this embodiment, a connecting rod 12 is connected to the transverse slider 11, and the connecting rod 12 is threaded or welded to the transverse slider 11. A brush head is connected to the bottom of the connecting rod 12. In this embodiment, the brush head includes a brush disk 8 and a plurality of bristles 801. The plurality of bristles 801 are fixed to one end of the brush disk 8, and the other end of the brush disk 8 is connected to the connecting rod 12. In this embodiment, a brush motor 9 for driving the brush head to rotate is also included. In this embodiment, the brush motor 9 is located between the brush disk 8 and the connecting rod 12. A protective shell is sleeved on the outside of the brush motor 9 to seal the brush motor 9 to prevent water from entering. The shell of the brush motor 9 is welded, clamped or otherwise fixedly connected to the top of the brush disk 8, and a sealing ring is provided between the shell of the brush motor 9 and the brush disk 8 to achieve a sealed connection. The output shaft of the brush motor 9 is coaxially connected to the brush disk 8, and the brush motor 9 can drive the brush head to rotate. The connecting rod 12 is connected to the top of the shell of the brush motor 9. In this embodiment, the connecting rod 12 is welded, clamped or screwed to the top of the shell.

[0042] The bottom of the brush head is lower than the upper surface of the mask 3 placed in the cleaning box 1. In this embodiment, the bottom of the bristles 801 of the brush head is located 0.1-1 cm above the upper surface of the mask 3 placed in the cleaning box 1. In this way, the bristles 801 on the brush head can have sufficient contact with the mask 3 product, thereby improving the cleaning effect on the mask 3.

[0043] In this embodiment, a plurality of water guns 4 are installed on the side wall of the cleaning box 1, and a pure water pipeline connected to the water gun 4 is provided on the cleaning box 1, and the pure water pipeline is connected to the existing high-pressure water pipe. A plurality of nitrogen guns 10 are also installed on the side wall of the cleaning box 1, and a nitrogen pipeline connected to the nitrogen gun 10 is provided on the cleaning box 1, and the nitrogen pipeline is connected to the existing high-pressure nitrogen pipe.

[0044] Multiple water guns 4 and multiple nitrogen guns 10 are distributed at intervals along the vertical direction of the cleaning box 1. The water guns 4 and the nitrogen guns 10 are respectively located on both sides of the cleaning box 1. During the actual installation process, the multiple water guns 4 can be staggered and the multiple nitrogen guns 10 can be staggered. This can increase the cleaning and purging range of the surface of the mask 3, and the cleaning and purging range is larger and the efficiency is higher.

[0045] The specific implementation process is as follows:

[0046] Put the mask 3 product at the bottom of the cavity of the cleaning box 1, open the water gun 4 on the inner wall of the cleaning box 1, and use high-pressure impact force to wash away the dust and obvious dirt on the surface of the mask 3. At the same time, open the valve on the drainage hole 101 so that the cleaned liquid can be discharged in time.

[0047] After flushing for a certain period of time, the valve of the liquid discharge hole 101 is closed, the valve of the liquid inlet hole 102 is opened, and the cleaning liquid 2 is discharged into the cavity of the cleaning box 1 so that the product is completely immersed in the liquid.

[0048] After the stubborn dirt on the product surface is fully soaked, turn on the brush motor 9 to make the brush plate 8 rotate automatically while moving in the X direction along the product surface, and then move in the Y direction through the longitudinal bracket 5 and then move in the X direction, thereby realizing a bow-shaped composite reciprocating motion, and then cleaning the entire surface of the mask plate 3 product.

[0049] After the brush head has finished cleaning the mask 3 product, the drain hole 101 is opened to drain all the liquid, and then the water gun 4 is opened to rinse the product surface again. After the rinsing is completed, the nitrogen gun 10 is opened to air-dry the cleaned mask 3 surface. The purge of the nitrogen gun 10 can effectively improve the efficiency of air drying the product surface, thereby finally completing the automatic cleaning of the product.

[0050] Embodiment 2, as Figure 2As shown, the difference between this embodiment and embodiment 1 is that the multiple bristles 801 are staggered. In this embodiment, the multiple bristles 801 are divided into multiple groups, and the multiple groups of bristles 801 are distributed on the brush plate 8 at intervals. The bristles 801 in each group have four bristles, and the four bristles 801 are arranged as shown in FIG. Figure 2 The shapes shown are staggered.

[0051] In this embodiment, since the brush heads on the brush plate 8 are designed to be arranged in a staggered manner, during the cleaning process, dirt can be discharged along the gaps between the brush heads and is not easy to accumulate in the brush heads, thereby effectively improving the cleaning effect.

[0052] Embodiment 3, as Figure 3 As shown, the difference between this embodiment and embodiment 1 is that in this embodiment, the drainage hole 101 and the inlet hole 102 are respectively located on both sides of the cleaning box 1, and the inlet hole 102 is connected to the inlet pipe 16, and the drainage hole 101 is connected to the drainage pipe 17, and the valve is installed on the inlet pipe 16 and the drainage pipe 17. In this way, the drainage hole 101 and the inlet hole 102 are respectively located on both sides of the cleaning box 1 instead of the bottom, which is convenient for installing the inlet pipe 16 and the drainage pipe 17, and it is convenient to open or close the valve externally to open or close the drainage hole 101 or the inlet hole 102, and the operation is more convenient.

[0053] Embodiment 4, as Figure 4 As shown, the difference between this embodiment and embodiment 1 is that in this embodiment, the brush motor 9 is fixedly connected to the transverse slider 11 by bolts, and the output shaft of the brush motor 9 is connected to the top end of the connecting rod 12 by a coupling, and the bottom end of the connecting rod 12 is connected and fixed to the brush plate 8 by screwing, clamping or welding.

[0054] This solution provides another way to install the brush motor 9. In this solution, the brush motor 9 is installed on the horizontal slider 11, so there is no need to install a protective shell, which can ensure that the brush motor 9 is dry and avoid being wetted by water.

[0055] It should be noted that the above description of the disclosed embodiments enables professionals and technicians in the field to implement or use the present application. Various modifications to these embodiments will be apparent to professionals and technicians in the field, and the general principles defined herein can be implemented in other embodiments without departing from the scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but should conform to the widest scope consistent with the principles and novel features disclosed herein.

[0056] In the description of the present invention, it should be noted that the terms "first", "second", "third", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0057] In the description of this document, terms such as "up", "down", "left", "right", "front", "back", "top", "bottom", "inside", "outside", "middle", "vertical", "horizontal", "lateral", and "longitudinal" indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only used to illustrate the relative positional relationships between the various components or components, and do not particularly limit the specific installation orientations of the various components or components.

[0058] In the description of this document, some terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to the specific circumstances.

[0059] In the description of this document, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0060] The structures, proportions, sizes, etc. drawn in the drawings in this application are only used to match the contents disclosed in this technical briefing book for technical personnel in this field to understand and read, and are not used to limit the restrictive conditions for the implementation of this application. Therefore, they have no substantive technical significance. Any structural modification, change in proportional relationship or adjustment of size should still fall within the scope of the technical content disclosed in this application without affecting the effects and purposes that can be achieved by this application.

[0061] The terms used in this document are those common terms currently widely used in the art in consideration of the functions of the present disclosure, but these terms may vary according to the intention of a person of ordinary skill in the art, precedents, or new technologies in the art. In addition, specific terms may be selected by the applicant, and in this case, their detailed meanings will be described in the detailed description of the present disclosure. Therefore, the terms used in the document should not be understood as simple names, but rather as an overall description based on the meaning of the terms and the present disclosure.

[0062] Flowcharts or text are used in this document to illustrate the operating steps performed according to the embodiments of the present application. It should be understood that the operating steps in the embodiments of the present application are not necessarily accurately performed in the order of recording. On the contrary, various steps can be processed in reverse order or simultaneously as needed. At the same time, other operations can also be added to these processes, or a certain step or several steps can be removed from these processes.

[0063] The above are only preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. An automatic mask cleaning device, comprising a cleaning box, wherein the cleaning box is provided with a liquid discharge hole and a liquid inlet hole, and valves are installed on the liquid discharge hole and the liquid inlet hole, characterized in that: A crossbeam and two longitudinal brackets are provided on the top of the cleaning box, wherein the crossbeam is located between the two longitudinal brackets and vertically connected to the longitudinal brackets, a transverse slider is slidably matched on the crossbeam, and a first driving unit for driving the transverse slider to slide back and forth is provided on the crossbeam; The two longitudinal brackets are horizontally slidably matched with the top of the cleaning box in a direction perpendicular to the cross beam, and a second driving unit for driving the longitudinal brackets to slide back and forth is provided on the top of the cleaning box; a connecting rod is connected to the transverse slider, and a brush head is connected to the bottom of the connecting rod.

2. The automatic mask cleaning device according to claim 1, characterized in that: It also includes a brush motor for driving the brush head to rotate. The brush head includes a brush disc and a plurality of bristles. The plurality of bristles are fixed to one end of the brush disc, and the other end of the brush disc is connected to the connecting rod.

3. The automatic mask cleaning device according to claim 2, characterized in that: The plurality of bristles are staggeredly distributed.

4. The automatic mask cleaning device according to any one of claims 1 to 3, characterized in that: The bottom of the brush head is lower than the upper surface of the mask placed in the cleaning box.

5. The automatic mask cleaning device according to claim 1, characterized in that: A water gun is connected to the side wall of the cleaning box, and a pure water pipeline connected to the water gun is provided on the cleaning box.

6. The automatic mask cleaning device according to claim 5, characterized in that: A nitrogen gun is also connected to the side wall of the cleaning box, and a nitrogen pipeline connected to the nitrogen gun is provided on the cleaning box.

7. The automatic mask cleaning device according to claim 6, characterized in that: There are multiple water guns and multiple nitrogen guns, which are distributed at intervals along the vertical direction of the cleaning box. The water guns and the nitrogen guns are respectively located on both sides of the cleaning box.

8. The automatic mask cleaning device according to claim 1, characterized in that: The first driving unit includes a screw and a screw motor. A fixed block is connected to the top of the beam. The fixed block and the screw motor are respectively located at two ends of the beam. One end of the screw is rotatably connected to the fixed block, and the other end of the screw is connected to the output shaft of the screw motor. The upper part of the transverse slider is threadedly connected to the screw.

9. The automatic mask cleaning device according to claim 1, characterized in that: Longitudinal bracket slide rails are installed on both sides of the top of the cleaning box, and the two longitudinal brackets are respectively slidably matched with the two longitudinal bracket slide rails.

10. The automatic mask cleaning device according to claim 1, characterized in that: The liquid discharge hole and the liquid inlet hole are respectively located on both sides of the cleaning box, and the liquid inlet hole is connected to a liquid inlet pipe, the liquid discharge hole is connected to a liquid discharge pipe, and the valve is installed on the liquid inlet pipe and the liquid discharge pipe.

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