Electronic curtain vacuum device

Abstract

The utility model relates to an electronic curtain vacuum device which is characterized in that a vacuum sealed space is formed in a vacuum device shell, an output channel and an assembly channel are formed in the shell surface of the vacuum device shell and communicate with the vacuum sealed space, and an output window assembly is arranged in the output channel of the vacuum device shell and communicates with the assembly channel. The window cooling assembly is arranged on the vacuum device shell, the window cooling assembly is connected with the output window assembly and used for cooling the output window assembly, the high-voltage feed-in element is arranged in an assembling channel of the vacuum device shell, the high-voltage feed-in element and the assembling channel are mutually sealed, and the cathode filament assembly is arranged in a vacuum sealing space of the vacuum device shell. And the cathode filament assembly is connected with the high-voltage feed-in element. The window cooling assembly cools the output window assembly, deposited energy can be released, and it is avoided that part of energy generated in the working process of the electronic curtain vacuum device is deposited on the output window assembly, and the performance of the electronic curtain vacuum device is affected.

Description

Technical Field

[0001] The present application relates to the fields of vacuum electronics and irradiation technology, and in particular to an electronic curtain vacuum device. Background Art

[0002] Electronic curtain vacuum devices are widely used in the fields of irradiation sterilization, material modification, irradiation curing, irradiation preservation, irradiation breeding, etc., and have the characteristics of small size, high efficiency, high power, and easy use. When working, the electronic curtain vacuum device can control and focus the electron beam in the internal vacuum sealed space. After the electron beam is extracted, it can drift toward the output window under the action of the high voltage field strength, and finally pass through the output window to irradiate the irradiated object. However, during the use of the existing electronic curtain vacuum device, when the electrons pass through the output window, some energy will be deposited on the output window, affecting the performance of the electronic curtain vacuum device. Summary of the invention

[0003] Based on this, it is necessary to provide an electronic curtain vacuum device to address the above-mentioned technical problems.

[0004] The present application provides an electronic curtain vacuum device, the electronic curtain vacuum device comprising:

[0005] A vacuum device housing, wherein the interior of the vacuum device housing has a vacuum sealed space, an output channel and an assembly channel are provided on the housing surface of the vacuum device housing, and the output channel and the assembly channel are both connected to the vacuum sealed space;

[0006] An output window assembly, the output window assembly being arranged in an output channel of the vacuum device housing;

[0007] A window cooling assembly, the window cooling assembly being arranged on the vacuum device housing, wherein the window cooling assembly is connected to the output window assembly and is used to cool the output window assembly;

[0008] A high-voltage feed-in element, the high-voltage feed-in element being disposed in an assembly channel of the vacuum device housing, wherein the high-voltage feed-in element and the assembly channel are sealed to each other;

[0009] A cathode filament assembly is disposed in the vacuum sealed space of the vacuum device housing and is connected to the high voltage feeding element.

[0010] In one embodiment, the output window assembly includes an annular window frame, which is arranged on the shell surface of the vacuum device shell and surrounds the channel opening of the output channel. A cooling channel is opened inside the annular window frame. The window cooling assembly includes a cooling pipe, which is passed through the cooling channel. The cooling pipe is used to transport a cooling medium, and the cooling medium is used to cool the annular window frame.

[0011] In one embodiment, the cathode filament assembly comprises:

[0012] A cathode filament, one end of which is connected to the high voltage feeding element.

[0013] In one embodiment, the number of the cathode filaments is set to be multiple, and the multiple cathode filaments are connected in parallel or in series with each other.

[0014] In one embodiment, the cathode filament assembly further comprises:

[0015] a grid element, wherein the grid element is arranged in the vacuum sealed space, the grid element is connected to the high voltage feeding element, wherein the grid element is located on one side of the cathode filament, and the grid element is located between the cathode filament and the output channel; and / or,

[0016] A supporting element is disposed in the vacuum sealed space, and the supporting element is connected to the high voltage feeding element, wherein the supporting element is supported and connected to the cathode filament.

[0017] In one embodiment, the grid element is a grid plate, and a plurality of hollow holes are provided on the grid plate; and / or,

[0018] The support element includes a support base plate and two opposite support side plates located on both sides of the support base plate, the support base plate and the two support side plates enclose a receiving space, the spatial opening direction of the receiving space is toward the channel opening of the output channel on the vacuum device shell, and the cathode filament is located inside the receiving space, wherein one end of the support base plate is connected to the high-voltage feeding element, and the other end of the support base plate is supported and connected to the other end of the cathode filament.

[0019] In one embodiment, the vacuum device shell includes a first unit shell and a second unit shell, the first unit shell has a first sealed space, the second unit shell has a second sealed space, the space volume of the first sealed space is greater than the space volume of the second sealed space, the first unit shell and the second unit shell are connected, the first sealed space and the second sealed space are connected, the output channel is opened in the first unit shell, the cathode filament assembly is located in the first sealed space of the first unit shell, the assembly channel is opened in the second unit shell, and the high-voltage feeding element is located in the second sealed space of the second unit shell.

[0020] In one embodiment, the first unit shell is a square shell structure, the first sealed space is a square sealed space, the second unit shell is a circular shell structure, the second sealed space is a circular sealed space, and one end of the second unit shell is connected to one end of the first unit shell.

[0021] In one embodiment, the high-pressure feedback element includes a main cylinder and a connecting cylinder, the inner end of the main cylinder is connected to one end of the connecting cylinder, and the outer end of the main cylinder faces the outside of the vacuum device shell, wherein the diameter of the main cylinder gradually increases from its inner end to its outer end.

[0022] In one embodiment, the electronic curtain vacuum device comprises:

[0023] An exhaust pipe, an exhaust channel is provided on the shell surface of the vacuum device shell, the exhaust channel is connected to the vacuum sealed space, and the exhaust pipe is connected to the exhaust channel.

[0024] In the above-mentioned electronic curtain vacuum device, although part of the energy will be deposited in the output window assembly during the working process of the electronic curtain vacuum device, during the working process of the electronic curtain vacuum device, the output window assembly can be cooled based on the window cooling assembly to release the deposited energy. For example, liquid cooling media such as cooling water or other coolants with cooling function can be injected into the cooling pipe, so that the cooling medium can form energy exchange with the annular window frame of the output window assembly when passing through the cooling pipe and the cooling channel, thereby releasing the energy deposited in the output window assembly, thereby avoiding part of the energy generated by the electronic curtain vacuum device during the working process from being deposited on the output window assembly, affecting the performance of the electronic curtain vacuum device. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic diagram of the structure of an electronic curtain vacuum device provided in one embodiment of the present application.

[0026] Figure 2This is a schematic structural diagram of an electronic curtain vacuum device provided in another embodiment of the present application.

[0027] Figure 3 For Figure 2 A plan view of the electronic curtain vacuum device is shown.

[0028] Figure 4 For Figure 3 A cross-sectional schematic diagram of the electronic curtain vacuum device is shown.

[0029] Figure 5 This is a schematic diagram of the connection structure between a high voltage feed-in element and a cathode filament assembly provided in one embodiment of the present application.

[0030] Figure 6 For Figure 5 A plan view of the high voltage feed-in element and cathode filament assembly is shown.

[0031] Figure 7 For Figure 6 A cross-sectional schematic diagram of the high voltage feed-in element and cathode filament assembly is shown.

[0032] Figure 8 This is a schematic diagram of the connection structure between a high voltage feed-in element and a cathode filament assembly provided in another embodiment of the present application.

[0033] Figure Number:

[0034] 1000, vacuum device housing; 2000, output window assembly; 3000, window cooling assembly; 4000, high voltage feed element; 5000, cathode filament assembly; 6000, exhaust pipe;

[0035] 1100, first unit housing; 1200, second unit housing; 1000a, vacuum sealed space; 1000b, output channel; 1000c, assembly channel; 1000d, exhaust channel;

[0036] 2100, annular window frame; 2100a, cooling channel;

[0037] 4100, main cylinder; 4200, connecting cylinder;

[0038] 5100, cathode filament; 5200, grid element; 5300, supporting element;

[0039] 5200a, hollow hole; 5300a, supporting bottom plate; 5300b, supporting side plate. DETAILED DESCRIPTION

[0040] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0041] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0042] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0043] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0044] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0045] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0046] See also Figures 1 to 8 As shown, the present application provides an electronic curtain vacuum device, which includes a vacuum device housing 1000, an output window assembly 2000, a window cooling assembly 3000, a high-voltage feed-in element 4000, and a cathode filament assembly 5000. The vacuum device housing 1000 is used as a basic structure for assembling or accommodating components or elements such as the output window assembly 2000, the window cooling assembly 3000, the high-voltage feed-in element 4000, and the cathode filament assembly 5000. The vacuum device housing 1000 can be constructed in a suitable shape or size, for example, see Figure 1 As shown, the vacuum device housing 1000 can be constructed as a square structure, and the interior of the vacuum device housing 1000 has a vacuum sealed space 1000a. The vacuum sealed space 1000a formed inside the vacuum device housing 1000 can be a square structure space for accommodating components or elements such as the output window assembly 2000, the window cooling assembly 3000, the high-voltage feed-in element 4000, and the cathode filament assembly 5000. The housing surface of the vacuum device housing 1000 is provided with an output channel 1000b and an assembly channel 1000c, and the output channel 1000b and the assembly channel 1000c are both connected to the vacuum sealed space 1000a. In addition, the electronic curtain vacuum device includes an exhaust pipe 6000, and the housing surface of the vacuum device housing 1000 is provided with an exhaust channel 1000d, and the exhaust channel 1000d is connected to the vacuum sealed space 1000a, and the exhaust pipe 6000 is connected to the exhaust channel 1000d.

[0047] Based on the structure of the vacuum device housing 1000, the output window assembly 2000 is arranged in the output channel 1000b of the vacuum device housing 1000, and the window cooling assembly 3000 is arranged on the vacuum device housing 1000, wherein the window cooling assembly 3000 is connected to the output window assembly 2000, and the window cooling assembly 3000 has a cooling function, so that the cooling function of the window cooling assembly 3000 can be used to cool the output window assembly 2000. The high-voltage feed-in element 4000 is arranged in the assembly channel 1000c of the vacuum device housing 1000, wherein the high-voltage feed-in element 4000 and the assembly channel 1000c are sealed with each other. The cathode filament assembly 5000 is arranged in the vacuum sealing space 1000a of the vacuum device housing 1000, and the cathode filament assembly 5000 is connected to the high-voltage feed-in element 4000.

[0048] Another example Figures 2 to 4 As shown, in one embodiment, the vacuum device shell 1000 may also include a first unit shell 1100 and a second unit shell 1200, the first unit shell 1100 has a first sealed space, the second unit shell 1200 has a second sealed space, the space volume of the first sealed space is greater than the space volume of the second sealed space, the first unit shell 1100 and the second unit shell 1200 are connected, the first sealed space and the second sealed space are connected, and the output channel 1000b is opened in the first unit shell 1100.

[0049] Therefore, in one embodiment, when the vacuum device housing 1000 includes a first unit housing 1100 and a second unit housing 1200, the cathode filament assembly 5000 may be located in the first sealed space of the first unit housing 1100, the assembly channel 1000c is opened in the second unit housing 1200, and the high-voltage feed-in element 4000 is located in the second sealed space of the second unit housing 1200. The first unit housing 1100 and the second unit housing 1200 may be constructed into suitable shapes and sizes according to requirements. For example, in one embodiment, the first unit housing 1100 may be configured as a square housing structure, and the first sealed space is a square sealed space. The second unit housing 1200 may be configured as a circular housing structure, and the second sealed space is a circular sealed space. One end of the second unit housing 1200 is connected to one end of the first unit housing 1100.

[0050] In one embodiment, the output window assembly 2000 may include an annular window frame 2100, which may be arranged in accordance with the shape and size of the output channel 1000b of the vacuum device housing 1000. For example, the channel opening of the output channel 1000b may be arranged as a rectangular opening, so the annular window frame 2100 may also be arranged as a square structure, so that the annular window frame 2100 may be arranged on the housing surface of the vacuum device housing 1000 and surround the channel opening of the output channel 1000b. A cooling channel 2100a is provided inside the annular window frame 2100, and accordingly, the window cooling assembly 3000 includes a cooling pipe, which is arranged in the cooling channel 2100a, and is used to transport a cooling medium, and the cooling medium is used to cool the annular window frame 2100.

[0051] Therefore, although some energy will be deposited on the output window assembly 2000 during the operation of the electronic curtain vacuum device, during the operation of the electronic curtain vacuum device, the output window assembly 2000 can be cooled based on the window cooling assembly 3000 to release the deposited energy. For example, liquid cooling media such as cooling water or other coolants with cooling functions can be injected into the cooling pipe, so that the cooling medium can form energy exchange with the annular window frame 2100 of the output window assembly 2000 when passing through the cooling pipe and the cooling channel 2100a, thereby releasing the energy deposited on the output window assembly 2000, thereby avoiding that part of the energy generated by the electronic curtain vacuum device during operation is deposited on the output window assembly 2000, thereby affecting the performance of the electronic curtain vacuum device.

[0052] See also Figures 5 to 8 As shown, in one embodiment, the cathode filament assembly 5000 may include a cathode filament 5100, one end of which is connected to the high-voltage feeding element 4000. In one embodiment, the high-voltage feedback element may include a main cylinder 4100 and a connecting cylinder 4200, the inner end of the main cylinder 4100 is connected to one end of the connecting cylinder 4200, and the outer end of the main cylinder 4100 faces the outside of the vacuum device housing 1000, wherein the diameter of the main cylinder 4100 gradually increases from its inner end to its outer end. The number of cathode filaments 5100 may be set to one or more, for example, in one embodiment, the number of cathode filaments 5100 may be set to three, and the three cathode filaments 5100 may be connected to the high-voltage feeding element 4000 in a manner of being connected in parallel with each other, or the three cathode filaments 5100 may be connected to the high-voltage feeding element 4000 in a manner of being connected in series with each other, and the number and connection method of the cathode filaments 5100 are not limited here.

[0053] In addition, in one embodiment, the cathode filament assembly 5000 may further include a grid element 5200 and a supporting element 5300. The grid element 5200 is disposed in the vacuum sealed space 1000a, and the grid element 5200 is connected to the high voltage feeding element 4000, wherein the grid element 5200 is located on one side of the cathode filament 5100, and the grid element 5200 is located between the cathode filament 5100 and the output channel 1000b. In one embodiment, the grid element 5200 is a grid plate, and a plurality of hollow holes 5200a are provided on the grid plate.

[0054] The support element 5300 is disposed in the vacuum sealed space 1000a, and the support element 5300 is connected to the high voltage feeding element 4000, wherein the support element 5300 is supported and connected to the cathode filament 5100. In one embodiment, the support element 5300 includes a support bottom plate 5300a and two opposite support side plates 5300b located on both sides of the support bottom plate 5300a, the support bottom plate 5300a and the two support side plates 5300b enclose a receiving space, the spatial opening direction of the receiving space is toward the channel opening of the output channel 1000b on the vacuum device housing 1000, and the cathode filament 5100 is located inside the receiving space, wherein one end of the support bottom plate 5300a is connected to the high voltage feeding element 4000, and the other end of the support bottom plate 5300a is supported and connected to the other end of the cathode filament 5100.

[0055] Therefore, when the electron curtain vacuum device is in operation, the high voltage power supply can transmit the high voltage, filament power supply and grid voltage power supply to the cathode filament assembly 5000 through the high voltage feed-in element 4000, wherein the filament power supply heats the cathode filament 5100 to the operating temperature, and the grid voltage power supply is loaded onto the grid element 5200 to achieve control and focusing of the electron beam. After the electron beam is drawn out from the cathode filament assembly 5000, it can drift toward the output window assembly 2000 under the action of the high voltage field strength, and finally pass through the output window assembly 2000 to achieve irradiation of the irradiated object. The electron curtain vacuum device can withstand a voltage of 60kV to 250kV, and the pressure is adjustable between 60kV and 250kV. Moreover, the electron curtain vacuum device is a fully sealed, highly reliable device, which can provide more options for electron beam irradiation needs.

[0056] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0057] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. An electronic curtain vacuum device, characterized in that: The electronic curtain vacuum device comprises: A vacuum device housing, wherein the interior of the vacuum device housing has a vacuum sealed space, an output channel and an assembly channel are provided on the housing surface of the vacuum device housing, and the output channel and the assembly channel are both connected to the vacuum sealed space; An output window assembly, the output window assembly being arranged in an output channel of the vacuum device housing; A window cooling assembly, the window cooling assembly being arranged on the vacuum device housing, wherein the window cooling assembly is connected to the output window assembly and is used to cool the output window assembly; A high-voltage feed-in element, the high-voltage feed-in element being disposed in an assembly channel of the vacuum device housing, wherein the high-voltage feed-in element and the assembly channel are sealed to each other; A cathode filament assembly is disposed in the vacuum sealed space of the vacuum device housing and is connected to the high voltage feeding element.

2. The electronic curtain vacuum device according to claim 1, characterized in that: The output window assembly includes an annular window frame, which is arranged on the shell surface of the vacuum device shell and surrounds the channel opening of the output channel. A cooling channel is opened inside the annular window frame. The window cooling assembly includes a cooling pipe, which is passed through the cooling channel. The cooling pipe is used to transport a cooling medium, and the cooling medium is used to cool the annular window frame.

3. The electronic curtain vacuum device according to claim 1, characterized in that: The cathode filament assembly comprises: A cathode filament, one end of which is connected to the high voltage feeding element.

4. The electronic curtain vacuum device according to claim 3, characterized in that: The number of the cathode filaments is set to be multiple, and the multiple cathode filaments are connected in parallel or in series with each other.

5. The electronic curtain vacuum device according to claim 3, characterized in that: The cathode filament assembly also includes: a grid element, wherein the grid element is arranged in the vacuum sealed space, the grid element is connected to the high voltage feeding element, wherein the grid element is located on one side of the cathode filament, and the grid element is located between the cathode filament and the output channel; and / or, A supporting element is disposed in the vacuum sealed space, and the supporting element is connected to the high voltage feeding element, wherein the supporting element is supported and connected to the cathode filament.

6. The electronic curtain vacuum device according to claim 5, characterized in that: The grid element is a grid plate, and a plurality of hollow holes are provided on the grid plate; and / or, The support element includes a support base plate and two opposite support side plates located on both sides of the support base plate, the support base plate and the two support side plates enclose a receiving space, the spatial opening direction of the receiving space is toward the channel opening of the output channel on the vacuum device shell, and the cathode filament is located inside the receiving space, wherein one end of the support base plate is connected to the high-voltage feeding element, and the other end of the support base plate is supported and connected to the other end of the cathode filament.

7. The electronic curtain vacuum device according to claim 1, characterized in that: The vacuum device shell includes a first unit shell and a second unit shell, the first unit shell has a first sealed space, the second unit shell has a second sealed space, the space volume of the first sealed space is greater than the space volume of the second sealed space, the first unit shell and the second unit shell are connected, the first sealed space and the second sealed space are connected, the output channel is opened in the first unit shell, the cathode filament assembly is located in the first sealed space of the first unit shell, the assembly channel is opened in the second unit shell, and the high-voltage feeding element is located in the second sealed space of the second unit shell.

8. The electronic curtain vacuum device according to claim 7, characterized in that: The first unit shell is a square shell structure, the first sealed space is a square sealed space, the second unit shell is a circular shell structure, the second sealed space is a circular sealed space, and one end of the second unit shell is connected to one end of the first unit shell.

9. The electronic curtain vacuum device according to claim 1, characterized in that: The high-pressure feedback element includes a main cylinder and a connecting cylinder, wherein the inner end of the main cylinder is connected to one end of the connecting cylinder, and the outer end of the main cylinder faces the outside of the vacuum device shell, wherein the diameter of the main cylinder gradually increases from its inner end to its outer end.

10. The electronic curtain vacuum device according to claim 1, characterized in that: The electronic curtain vacuum device comprises: An exhaust pipe, an exhaust channel is provided on the shell surface of the vacuum device shell, the exhaust channel is connected to the vacuum sealed space, and the exhaust pipe is connected to the exhaust channel.

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