Stepped cleaning equipment

Abstract

The utility model belongs to the technical field of silicon wafer cleaning, and particularly relates to stepped cleaning equipment which comprises a cleaning box, a plurality of pairs of supporting seats are arranged in the cleaning box in an array mode, and a plurality of pairs of supporting assemblies are arranged on the supporting seats. The supporting assembly comprises a first supporting strip and a second supporting strip, a first supporting notch is formed in the first supporting strip, a second supporting notch is formed in the second supporting strip, and the depth of the first supporting notch is larger than that of the second supporting notch; the flower basket body is erected in the first supporting notch and the second supporting notch; the basket body can be effectively limited through the first supporting notch and the second supporting notch, and the depth of the first supporting notch is larger than that of the second supporting notch, so that the basket body can be obliquely placed, silicon wafers in the basket body can always fall to one side, the silicon wafers are prevented from being stirred by a cleaning medium in the cleaning process, and the cleaning efficiency is improved. Therefore, the silicon wafer is prevented from being broken.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon wafer cleaning, and in particular relates to a step-type cleaning device. Background Art

[0002] During the preparation of solar cells, the cells need to pass through a variety of process tanks, including liquid tanks, water tanks, drying tanks, etc. In existing tank-type cleaning equipment, the cell box is used to hold the cells for easy cleaning and transfer, and the cell box is transferred by a robotic arm. However, the existing cell box is usually placed horizontally in the cleaning tank. During the flow of the cleaning medium, the silicon wafers in the cell box will be disturbed, causing the silicon wafers to shake left and right, which is easy to cause the silicon wafers to break;

[0003] Therefore, it is necessary to provide a step-type cleaning device that can tilt the silicon wafer to one side to fit the side wall of the gap in the wafer box. Utility Model Content

[0004] The utility model aims to provide a step-type cleaning device which can tilt a silicon wafer to one side to fit the side wall of a notch in a wafer box.

[0005] In order to solve the above technical problems, the utility model provides a stepped cleaning device, including: a cleaning box, a plurality of pairs of support seats are arrayed in the cleaning box, and a plurality of pairs of support assemblies are arranged on the support seats; the support assemblies include a first support bar and a second support bar, the first support bar is provided with a first support notch, the second support bar is provided with a second support notch, and the depth of the first support notch is greater than the depth of the second support notch; a flower basket body is mounted in the first support notch and the second support notch.

[0006] Preferably, the transverse surface of the first support notch is a horizontal surface, and the top of the vertical surface of the first support notch is inclined outward.

[0007] Preferably, the transverse surface of the second support notch is a horizontal surface, and the top of the vertical surface of the second support notch is inclined outward.

[0008] Preferably, the cleaning box comprises an outer cleaning tank and an inner cleaning tank; the inner cleaning tank is arranged in the outer cleaning tank, a plurality of liquid inlets are arranged at the bottom of the inner cleaning tank, an overflow notch is arranged at the top of the inner cleaning tank; a liquid discharge port is arranged at the bottom of the outer cleaning tank.

[0009] Preferably, the bottom wall of the outer cleaning tank is inclined, and the drain port is located at a lower point.

[0010] Preferably, the outer wall of the inner cleaning tank is provided with a first buckle, the bottom of the first buckle is provided with a first buckle notch, the inner wall of the outer cleaning tank is provided with a second buckle, the top of the second buckle is provided with a second buckle notch, and the head of the first buckle is buckled in the second buckle notch, and the head of the second buckle is buckled in the first buckle notch.

[0011] Preferably, the flower basket body includes a pair of mounting plates and mounting strips inserted between the mounting plates; the mounting plates are respectively clamped at the top corners of the first supporting notch and the second supporting notch, and the mounting strips are provided with a plurality of pairs of mounting notches, and the mounting notches are parallel to the mounting plates.

[0012] The beneficial effects of the utility model are:

[0013] 1. Through the cleaning box and the basket body, the silicon wafer can be effectively installed and cleaned;

[0014] 2. The first support notch and the second support notch can effectively limit the flower basket body, and the depth of the first support notch is greater than the depth of the second support notch, so that the flower basket body can be placed at an angle, and the silicon wafers in the flower basket body can always fall to one side, avoiding being stirred by the cleaning medium during the cleaning process, causing the silicon wafers to shake left and right, thereby avoiding the breakage of the silicon wafers.

[0015] Other features and advantages of the present invention will be set forth in the following description, and in part will become apparent from the description, or may be understood by implementing the present invention.

[0016] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a top view of a preferred embodiment of the cleaning device of the utility model;

[0019] Figure 2 It is a cross-sectional view of a preferred embodiment of the cleaning device of the utility model;

[0020] Figure 3It is a cross-sectional view of a preferred embodiment of the cleaning device of the present utility model.

[0021] In the figure:

[0022] 100, cleaning box; 1001, cleaning outer tank; 1002, cleaning inner tank; 1003, liquid inlet; 1004, overflow notch; 1005, liquid discharge port; 1006, first buckle; 1007, first buckle notch; 1008, second buckle; 1009, second buckle notch;

[0023] 101, support seat; 102, support assembly; 1021, first support bar; 1022, second support bar; 1023, first support notch; 1024, second support notch;

[0024] 200. Flower basket body; 201. Mounting board; 202. Mounting strip; 203. Mounting gap. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] Example 1

[0027] like Figure 1-3As shown, a stepped cleaning device of this embodiment includes: a cleaning box 100, wherein a plurality of pairs of support seats 101 are arranged in an array in the cleaning box 100, and a plurality of pairs of support assemblies 102 are arranged on the support seats 101; the support assemblies 102 include a first support bar 1021 and a second support bar 1022, wherein the first support bar 1021 is provided with a first support notch 1023, and the second support bar 1022 is provided with a second support notch 1024, and the depth of the first support notch 1023 is greater than the depth of the second support notch 1024; a support assembly 102 is mounted on the first support notch 1023. and the flower basket body 200 in the second supporting gap 1024; in short, through the cleaning box 100 and the flower basket body 200, the silicon wafer can be effectively installed and cleaned; further, the first supporting gap 1023 and the second supporting gap 1024 can effectively complete the limiting of the flower basket body 200, and the depth of the first supporting gap 1023 is greater than the depth of the second supporting gap 1024, which can make the flower basket body 200 tilted, and the silicon wafer in the flower basket body 200 can always fall to one side, avoiding being stirred by the cleaning medium during the cleaning process, causing the silicon wafer to shake left and right, thereby avoiding the breakage of the silicon wafer.

[0028] The transverse surface of the first support notch 1023 is a horizontal surface, and the top of the vertical surface of the first support notch 1023 is tilted outward; in short, the transverse surface of the first support notch 1023 can limit the vertical direction of the flower basket body 200, and the vertical surface of the first support notch 1023 can limit the horizontal direction of the flower basket body 200; further, since the flower basket body 200 is tilted, in order not to interfere with the flower basket body 200, the vertical surface of the first support notch 1023 is tilted outward.

[0029] The transverse surface of the second support notch 1024 is a horizontal surface, and the top of the vertical surface of the second support notch 1024 is tilted outward; in short, the transverse surface of the second support notch 1024 can limit the vertical direction of the flower basket body 200, and the vertical surface of the second support notch 1024 can limit the horizontal direction of the flower basket body 200; further, since the flower basket body 200 is tilted, in order not to interfere with the flower basket body 200, the vertical surface of the second support notch 1024 is tilted outward.

[0030] The cleaning box 100 includes an outer cleaning tank 1001 and an inner cleaning tank 1002; the inner cleaning tank 1002 is mounted in the outer cleaning tank 1001, a plurality of liquid inlets 1003 are arranged at the bottom of the inner cleaning tank 1002, and an overflow notch 1004 is arranged at the top of the inner cleaning tank 1002; a liquid discharge port 1005 is arranged at the bottom of the outer cleaning tank 1001; in short, by separately setting the inner cleaning tank 1002 and the outer cleaning tank 1001, and cooperating with the liquid inlet 1003 at the bottom of the inner cleaning tank 1002, the inner cleaning tank 1002 can always be filled with clean cleaning medium, and the dirty cleaning medium can overflow to the outer cleaning tank 1001 through the overflow notch 1004 at the top, thereby ensuring the cleaning effect of the silicon wafer.

[0031] The bottom wall of the cleaning outer tank 1001 is tilted, and the drain port 1005 is located at a lower point; in short, the bottom wall of the cleaning outer tank 1001 is tilted, which can guide the dirty cleaning medium to a lower place and discharge it through the drain port 1005.

[0032] The outer wall of the cleaning inner tank 1002 is provided with a first buckle 1006, and the bottom of the first buckle 1006 is provided with a first buckle notch 1007, and the inner wall of the cleaning outer tank 1001 is provided with a second buckle 1008, and the top of the second buckle 1008 is provided with a second buckle notch 1009, and the head of the first buckle is clamped in the second buckle notch 1009, and the head of the second buckle 1008 is clamped in the first buckle notch 1007; in short, through the setting of the first buckle 1006 and the second buckle 1008, the horizontal position of the cleaning inner tank 1002 can be limited, and the cleaning inner tank 1002 can be pressed tightly at the second buckle 1008 by the dead weight of the cleaning inner tank 1002.

[0033] The flower basket body 200 includes a pair of mounting plates 201 and a mounting strip 202 inserted between the mounting plates 201; the mounting plates 201 are respectively clamped at the top corners of the first supporting notch 1023 and the second supporting notch 1024, and the mounting strip 202 is provided with a plurality of pairs of mounting notches 203, and the mounting notches 203 are parallel to the mounting plates 201; in short, the mounting notches 203 are arranged parallel to the mounting plates 201, so that the silicon wafer can be tilted to one side of the mounting notch 203, so that the silicon wafer applies a pressure to the side wall of the mounting notch 203 through its own weight, thereby ensuring that the silicon wafer does not shake during the cleaning process.

[0034] All devices (parts without specific structure) selected in this application are universal standard parts or parts known to those skilled in the art, and their structures and principles can be known by those skilled in the art through technical manuals or conventional experimental methods. In addition, the software programs involved in this application are all prior art, and this application does not involve any improvement to the software programs.

[0035] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0037] In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, and the indirect coupling or communication connection of devices or units can be electrical, mechanical or other forms.

[0038] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0039] In addition, each functional unit in each embodiment of the present utility model may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0040] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A step-type cleaning device, characterized in that: include: A cleaning box, wherein a plurality of pairs of support seats are arranged in an array in the cleaning box, and a plurality of pairs of support components are arranged on the support seats; The support assembly includes a first support bar and a second support bar, the first support bar is provided with a first support notch, the second support bar is provided with a second support notch, and the depth of the first support notch is greater than the depth of the second support notch; A flower basket body is mounted in the first supporting notch and the second supporting notch.

2. The step-type cleaning device according to claim 1, characterized in that: The transverse surface of the first support notch is a horizontal surface, and the top of the vertical surface of the first support notch is inclined outward.

3. The step-type cleaning device according to claim 2, characterized in that: The transverse surface of the second support notch is a horizontal surface, and the top of the vertical surface of the second support notch is inclined outward.

4. The step-type cleaning device according to claim 3, characterized in that: The cleaning box includes an outer cleaning tank and an inner cleaning tank; The inner cleaning tank is clamped in the outer cleaning tank, a plurality of liquid inlets are arranged at the bottom of the inner cleaning tank, and an overflow notch is opened at the top of the inner cleaning tank; A liquid discharge port is provided at the bottom of the outer cleaning tank.

5. The step-type cleaning device according to claim 4, characterized in that: The bottom wall of the cleaning outer tank is inclined, and the drain port is located at a lower point.

6. The step-type cleaning device according to claim 5, characterized in that: The outer wall of the cleaning inner tank is provided with a first buckle, and the bottom of the first buckle is provided with a first buckle notch. The inner wall of the cleaning outer tank is provided with a second buckle, and the top of the second buckle is provided with a second buckle notch, and The head of the first buckle is locked in the second locking notch, and the head of the second buckle is locked in the first locking notch.

7. The step-type cleaning device according to claim 6, characterized in that: The flower basket body comprises a pair of erection plates and erection bars inserted between the erection plates; The erection plates are respectively clamped at the top corners of the first supporting notch and the second supporting notch, and a plurality of pairs of erection notches are opened on the erection strip, and the erection notches are parallel to the erection plates.

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