Three-arm quartz wafer and resonator

Abstract

The utility model relates to a three-arm quartz wafer and a resonator, the three-arm quartz wafer comprises a base part, a pair of vibrating arms and a supporting part, the pair of vibrating arms are arranged on the base part in parallel along a first direction, and each vibrating arm comprises a vibrating part and a hammer head part; the supporting part comprises a center piece located between the pair of vibrating arms, the center piece comprises a bottom wall, a center arm and an upper arm which extend in the second direction and are sequentially connected, the end, away from the center arm, of the bottom wall is arranged on the base part, the upper arm is located between the pair of hammer head parts, and the two ends of the upper arm both protrude out of the pair of hammer head parts. The width of the central arm in the first direction is larger than that of the upper arm in the first direction, and the length of the central arm in the second direction accounts for 45-55% of the height of the central piece. The dispensing part extends in the first direction and is connected with the protruding end, located outside the vibrating arm, of the central arm. The method has the effects of reducing the vibration stress of the dispensing point and improving the mounting stability.

Description

Technical Field

[0001] The present application relates to a three-arm quartz crystal chip and a resonator. Background Art

[0002] A resonator is an electronic component that generates a resonant frequency. The commonly used ones are quartz crystal resonators and ceramic resonators. The frequency accuracy of a quartz crystal resonator is higher than that of a ceramic resonator. In addition, the power consumption of a quartz crystal resonator is low, only a few microwatts. It uses fewer frequency-dividing triggers for timing. When the system is in sleep mode, it can work for 5 to 7 years with just one button battery. It is the core device for working and waking up in the system power saving mode. Therefore, it is widely used in electronic systems with essential functional modules such as mobile phones, computers, smart bracelets, smart home appliances, health and medical devices, watches, and clocks.

[0003] A quartz crystal resonator is mainly composed of a quartz wafer, a base, a housing, etc. For example, a three-arm resonator is disclosed in the relevant documents, which can get rid of many problems encountered by traditional tuning fork resonators, including a tuning fork-shaped component with two parallel vibration arms, which are connected to each other through a connecting component, and a central arm extends from the connecting component and is located between the two vibration arms of the tuning fork-shaped component, wherein at least one groove is formed on the front and rear sides of each vibration arm, and a part of each groove of the vibration arm extends into the connecting component. In the three-arm resonator, by adjusting the extension length of the central arm, the central arm passes through the vibration arm to form a pair of dispensing points, so as to achieve comprehensive control of the package size and installation stability.

[0004] With regard to the above-mentioned related technologies, there is a problem that the vibration stress of the dispensing point cannot be effectively reduced to improve the installation stability. Utility Model Content

[0005] An object of the present invention is to solve at least the above problems and to provide at least the advantages which will be described below.

[0006] Another object of the utility model is to provide a three-arm quartz chip, extend the distance between the glue point and the vibration arm, and set a central arm at the same time, so as to effectively reduce the vibration stress of the glue point by adjusting the width and length of the central arm and improve the installation stability of the three-arm quartz chip.

[0007] In order to achieve these purposes and other advantages according to the utility model, a three-arm quartz wafer is provided, comprising a base, a pair of vibration arms, and a support portion, wherein the pair of vibration arms are arranged on the base in parallel along a first direction, each of the vibration arms comprises a vibration portion extending along a second direction orthogonal to the first direction, and a hammer head portion arranged at a free end of the vibration portion;

[0008] The support portion comprises:

[0009] A center piece, which is located between the pair of vibration arms, and includes a bottom wall, a central arm, and an upper arm extending in a second direction and connected in sequence, wherein an end of the bottom wall away from the central arm is arranged on the base, and the upper arm is located between a pair of hammer heads, and both ends of the upper arm protrude from the pair of hammer heads; the width of the central arm along the first direction is greater than the width of the upper arm along the first direction, and the length of the central arm along the second direction accounts for 45-55% of the height of the center piece;

[0010] The dispensing member is extended along the first direction and connected to the protruding end of the central arm outside the vibration arm.

[0011] Preferably, the width of the central arm along the first direction is 1.8-3 times the width of the upper arm along the first direction.

[0012] Preferably, the width of the bottom wall along the first direction is not greater than the width of the upper arm along the first direction, and is not less than 80% of the width of the vibration portion along the first direction.

[0013] Preferably, the length of the dispensing member along the first direction is not less than the width of the pair of vibration arms along the first direction.

[0014] Preferably, the length of the dispensing member along the first direction is not greater than 0.65 μm.

[0015] Preferably, the width of the bottom wall along the first direction decreases in a direction away from the central arm.

[0016] Preferably, the minimum width of the bottom wall along the first direction is not less than the width of the vibration part along the first direction, and not greater than the width of the upper arm along the first direction.

[0017] A resonator comprises the three-arm quartz crystal wafer.

[0018] The utility model at least has the following beneficial effects:

[0019] First, by setting the dispensing parts, the distance between the dispensing point and the vibration arm is extended. At the same time, the central arm is set. By adjusting the width and length of the central arm, the vibration stress of the dispensing point is effectively reduced and the installation stability of the three-arm quartz wafer is improved.

[0020] Second, by setting the bottom wall, on the basis of meeting the rigidity requirements, the transmission efficiency of the vibration stress of the vibration arm through the bottom wall to the central arm is reduced, so as to reduce the vibration stress of the dispensing point.

[0021] Other advantages, objectives and features of the present invention will be embodied in part through the following description, and in part will be understood by those skilled in the art through research and practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a cross-sectional view of a three-arm quartz wafer of one of the technical solutions of the present application;

[0023] Figure 2 It is a three-dimensional diagram of a three-arm quartz wafer of one of the technical solutions of the present application;

[0024] Figure 3 This is a circuit configuration diagram of a three-arm quartz chip of one of the technical solutions of the present application;

[0025] Figure 4 It is a cross-sectional view of a three-arm quartz wafer of one of the technical solutions of the present application;

[0026] Figure 5 It is a cross-sectional view of a resonator according to one of the technical solutions of the present application.

[0027] Explanation of the accompanying drawings: 100, three-arm quartz wafer; 1, base; 2, vibration arm; 20, vibration part; 21, hammer head; 22, groove; 3, support part; 4, center piece; 40, bottom wall; 41, notch; 42, central arm; 43, upper arm; 5, dispensing part; 6, packaging part; 60, container; 61, base; 62, cover; 7, assembly electrode; 8, excitation electrode. DETAILED DESCRIPTION

[0028] The present invention will be further described in detail below in conjunction with the accompanying drawings so that those skilled in the art can implement the invention with reference to the description.

[0029] It should be understood that the terms such as “having”, “including” and “comprising” used herein do not exclude the existence or addition of one or more other elements or combinations thereof.

[0030] like Figure 1-5 As shown, the utility model provides a three-arm quartz wafer obtained by etching, comprising a base 1, a pair of vibration arms 2, and a support part 3.

[0031] Reference Figure 1 The base 1 constitutes a foundation for installing a pair of vibration arms 2 and a support part 3.

[0032] A pair of vibration arms 2 are arranged side by side on the base 1 along the first direction. Figure 1 and Figure 2 , the first direction is the width direction of the pair of vibration arms 21 , that is, the X direction; in this embodiment, the pair of vibration arms 2 are spaced apart and arranged parallel to each other along the X direction, and the pair of vibration arms 2 are installed perpendicular to the base 1 .

[0033] Each vibration arm 2 includes a vibration part 20 extending along a second direction orthogonal to the first direction, and a hammer head 21 arranged at the free end of the vibration part 20; in the present embodiment, the second direction is parallel to the paper direction and perpendicular to the X direction, namely the Y direction, and the direction perpendicular to the paper direction and the Y direction is the Z direction. The vibration arm 2 is extended along the Y direction as a whole, including the vibration part 20 and the hammer head 21. The hammer head 21 is arranged at one end (the end) of the vibration part 20 away from the base 1, and is a widened part relative to the vibration part 20. As a counterweight part, its width is greater than the width of the vibration part 20, and the number of deflections and deformations of the vibration arm 2 per unit time can be adjusted by changing the mass of the hammer head.

[0034] The supporting part 3 includes a center piece 4 and a glue dispensing piece 5 which are arranged in a T-shaped row.

[0035] The center piece 4 is located between a pair of vibrating arms 2, and the center axis of the center piece 4 along the Y direction overlaps with the center axis of the base 1 along the Y direction. The center piece 4 includes a bottom wall 40, a central arm 42, and an upper arm 43 extending in sequence along the second direction (Y direction); wherein, one end of the bottom wall 40 away from the central arm 42 is arranged on the base 1, that is, it is integrally formed with the base 61.

[0036] In one embodiment, on the basis of satisfying the operation of the three-arm quartz crystal chip (that is, the vibration arm 2 does not interfere with the center piece 4), the width of the bottom wall 40 can be equal to the width of the central arm 42. This setting can largely meet the rigidity requirements of the center piece 4.

[0037] The upper arm 43 is located between the pair of hammer heads 21, and both ends thereof protrude from the pair of hammer heads 21. In this embodiment, one end of the upper arm 43 away from the central arm 42 protrudes from the pair of hammer heads 21, and is integrally formed with the dispensing component 5. The distance between the one end of the upper arm 43 away from the central arm 42 and the pair of hammer heads 21 is sufficient to prevent the dispensing component 5 from interfering with the hammer heads 21 after the dispensing component 5 is set; one end of the upper arm 43 close to the central arm 42 protrudes from the pair of hammer heads 21, and is integrally formed with the central arm 42. The distance between the one end of the upper arm 43 close to the central arm 42 and the pair of hammer heads 21 is sufficient to prevent the central arm 42 from interfering with the vibration arm 2;

[0038] The width of the central arm 42 along the first direction is greater than the width of the upper arm 43 along the first direction, and the width of the central arm 42 is set to ensure that it does not interfere with the vibration arm 2, that is, the distance between a pair of vibration parts 20 is set to meet the layout of the central arm 42; in this embodiment, the central arm 42 is widened relative to the upper arm 43 and the bottom wall 40, which helps to reduce stress.

[0039] Furthermore, the length of the central arm 42 along the second direction accounts for 45-55% of the height of the center piece 4. In this embodiment, the distance between the end of the central arm 42 away from the base 1 and the hammer head 21 is set to ensure that the setting of the central arm 42 does not interfere with the fixed resonant frequency vibration of the vibration arm 2; the distance between the end of the central arm 42 close to the base 1 and the base 1 is set to ensure that the fixed resonant frequency vibration of the vibration arm 2 does not interfere. At the same time, the setting is determined by comprehensively considering the vibration stress reduction effect, and the installation space provided by the vibration arm 2 to the center piece 4 can drive it to meet the above setting requirements. The central arm 42 can be 45% of the height of the center piece 4, or 50% of the height of the center piece 4, or 55% of the height of the center piece 4.

[0040] The dispensing member 5 is extended along the first direction and connected to the protruding end of the central arm 42 outside the vibration arm 2. Figure 3 The dispensing parts 5 are symmetrically arranged about the central axis of the center part 4 along the Y-axis direction, and the dispensing parts 5 are located on both sides of the center part 4 along the X-axis direction, and assembly electrodes 7 are formed on both sides of the dispensing parts 5.

[0041] During the use of the above technical solution, a pair of vibration arms 2 are provided with grooves 22, which extend along the Y direction. The pair of vibration arms 2 cooperate with their grooves 22 to form an excitation electrode 8 that causes the pair of vibration arms 2 to vibrate. Through the base 1 and the center piece 4, the assembly electrode 7 and the excitation electrode 8 are electrically connected. The dispensing piece 5 is used to assemble the three-arm quartz wafer in the package 6 described later, that is, to be glued with the subsequent base 61. The assembly electrode 7 forms a conductive connection point on the dispensing piece 5 to form a dispensing point; a predetermined voltage is applied to the excitation electrode 8 through the dispensing point, and the excitation electrodes 8 of the pair of vibration arms 2 interact with each other, causing the pair of vibration arms 2 to vibrate at a predetermined resonant frequency in the direction of approaching or leaving each other. With this technical solution, the distance between the dispensing point and the vibration arm 2 is extended by setting the dispensing piece 5, and the central arm 42 is set at the same time, and the width and length of the central arm 42 are adjusted, so as to effectively reduce the vibration stress of the dispensing point and improve the installation stability of the three-arm quartz wafer.

[0042] In another technical solution, the width of the central arm (42) along the first direction is 1.8-3 times the width of the upper arm (43) along the first direction. The width of the central arm 42 may be 1.8 times, 2 times, or 3 times the width of the upper arm. Furthermore, the width of the central arm (42) along the first direction is 2-2.6 times the width of the upper arm (43) along the first direction. By adopting this solution, the width of the vibration arm is limited while meeting the vibration requirements of the central arm, thereby improving the effect of reducing the vibration stress of the dispensing point.

[0043] In another technical solution, the width of the bottom wall 40 along the first direction is not greater than the width of the upper arm 43 along the first direction, and is not less than 80% of the width of the vibration part 20 along the first direction. In this embodiment, the distance between the pair of hammer heads 21 satisfies the setting of the upper arm 43, and the upper arm 43 does not interfere with the hammer heads 21. The width of the upper arm 43 along the first direction is not less than 80% of the width of the vibration part 20 along the first direction, which satisfies the flexibility requirement of the upper arm 43. Based on the above, the width of the bottom wall 40 along the first direction is set to be less than or equal to the width of the upper arm 43 along the first direction, and greater than or equal to 80% of the width of the vibration part 20 along the first direction. Figure 1 , which is reflected in that the bottom wall 40 cooperates with the base 1 and the central arm 42 to form a notch 41. With this solution, on the basis of meeting the rigidity requirements of the center piece 4, the transmission efficiency of the vibration stress of the vibration arm 2 through the bottom wall 40 to the central arm 42 is reduced, so as to reduce the vibration stress of the dispensing point. Figure 1 Setting,Through simulation analysis of the stress state of the three-arm quartz chip, it can be seen that when the central arm is widened, the stress at the glue point is reduced.

[0044] In another technical solution, the length of the dispensing member 5 along the first direction is not less than the width of the pair of vibration arms 2 along the first direction. In this embodiment, the two ends of the dispensing member 5 along the first direction are flush with or exceed the two ends of the pair of vibration arms 2 along the first direction. With this solution, the dispensing space of the dispensing point is increased, and the dispensing installation stability is improved.

[0045] In another technical solution, on the basis of satisfying that the length of the dispensing part 5 along the first direction is not less than the width of a pair of vibration arms 2 along the first direction, the length of the dispensing part 5 along the first direction (X direction) is limited to not more than 0.65 μm. In this embodiment, the length range of the three-arm quartz wafer size along the second direction (Y direction) is set to 1.15mm-1.25mm, and the length range along the first direction (X direction) is set to 0.45mm-0.65mm. This solution meets the needs of small-volume packaging and provides a miniature quartz wafer.

[0046] In another technical solution, referring to Figure 4 The width of the bottom wall 40 along the first direction decreases as it moves away from the central arm 42, that is, referring to Figure 4 The cross section of the bottom wall 40 is an inverted trapezoid, or the two sides of the bottom wall 40 along the first direction are arc-shaped. With this solution, the rigidity of the bottom wall 40 is further improved and the stress of the glue point is reduced.

[0047] In another technical solution, the minimum width of the bottom wall 40 along the first direction is not less than the width of the vibration part 20 along the first direction, and is not greater than the width of the upper arm 43 along the first direction. In this embodiment, the distance between the pair of hammer heads 21 is sufficient to set the upper arm 43, and the upper arm 43 does not interfere with the hammer heads 21, and the width of the upper arm 43 along the first direction is not less than the width of the vibration part 20 along the first direction, meeting the flexibility requirements of the upper arm 43. With this solution, the vibration stress of the dispensing point is reduced on the basis of improving the rigidity of the center piece 4.

[0048] A resonator, referring to Figure 5 , the resonator includes a three-arm quartz crystal wafer 100, a base 61 and a package 6;

[0049] The base 61 is glued to the glued parts 5 of the three-arm quartz wafer 100 at two glued points to support the three-arm quartz wafer 100;

[0050] The package 6 includes a container 60 and a cover 62 for packaging the container 60. A base 61 is arranged in the container 60, and the three-arm quartz wafer 100 is accommodated, and then packaged by the cover 62, so as to accommodate the three-arm quartz wafer 100. The number of equipment and processing scale described here are used to simplify the description of the utility model. The application, modification and variation of the three-arm quartz wafer of the utility model are obvious to those skilled in the art.

[0051] The embodiments of this specific implementation are all preferred embodiments of the present application, and are not intended to limit the protection scope of the present application. The same components are represented by the same figure marks. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A three-arm quartz crystal wafer, comprising a base (1), a pair of vibration arms (2), and a support (3), characterized in that: A pair of the vibration arms (2) are arranged on the base (1) in parallel along a first direction, and each of the vibration arms (2) comprises a vibration portion (20) extending along a second direction orthogonal to the first direction, and a hammer head portion (21) arranged at a free end of the vibration portion (20); The support portion (3) comprises: A center piece (4) is located between a pair of the vibration arms (2), the center piece (4) comprising a bottom wall (40), a central arm (42), and an upper arm (43) which are sequentially connected and extend along a second direction, wherein one end of the bottom wall (40) away from the central arm (42) is arranged on the base (1), the upper arm (43) is located between a pair of hammer heads (21), and both ends of the upper arm (43) protrude from the pair of hammer heads (21); the width of the central arm (42) along the first direction is greater than the width of the upper arm (43) along the first direction, and the length of the central arm (42) along the second direction accounts for 45-55% of the height of the center piece (4); The glue dispensing member (5) is extended along the first direction and connected to the protruding end of the central arm (42) outside the vibration arm (2).

2. The three-arm quartz wafer according to claim 1, characterized in that: The width of the central arm (42) along the first direction is 1.8-3 times the width of the upper arm (43) along the first direction.

3. The three-arm quartz wafer according to claim 1, characterized in that: The width of the bottom wall (40) along the first direction is not greater than the width of the upper arm (43) along the first direction, and is not less than 80% of the width of the vibration part (20) along the first direction.

4. The three-arm quartz wafer according to claim 1, characterized in that: The length of the dispensing member (5) along the first direction is not less than the width of the pair of vibration arms (2) along the first direction.

5. The three-arm quartz wafer according to claim 4, characterized in that: The length of the glue dispensing component (5) along the first direction is no more than 0.65 μm.

6. The three-arm quartz wafer according to claim 1, characterized in that: The width of the bottom wall (40) along the first direction decreases in a direction away from the central arm (42).

7. The three-arm quartz wafer according to claim 6, characterized in that: The minimum width of the bottom wall (40) along the first direction is not less than the width of the vibration part (20) along the first direction, and is not greater than the width of the upper arm (43) along the first direction.

8. A resonator, characterized in that It comprises the three-arm quartz wafer (100) as claimed in any one of claims 1 to 7.

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