Source changing device and evaporation equipment

Abstract

The utility model relates to a source changing device and evaporation equipment, and the source changing device comprises a rack which is provided with a sub-cavity, and the sub-cavity is provided with a first through hole and an opening used for being communicated with an external filling door; the material storage platform is movably arranged below the sub-cavity; the material storage platform is provided with a plurality of accommodating cavities for accommodating evaporation sources, and the material storage platform can selectively communicate one of the accommodating cavities with the sub-cavities through the first through holes to form a negative pressure cavity; the vacuum pump is communicated with the negative pressure chamber; and a carrying unit; the carrying unit can transfer the evaporation source between the opening and the containing cavity used for forming the negative pressure cavity. The source changing device and the evaporation equipment have the advantage of being high in source changing efficiency.

Description

Technical Field

[0001] The present application relates to the technical field of battery production, and in particular to a source replacement device and a vapor deposition device. Background Art

[0002] Vacuum thermal evaporation refers to a technology that uses physical methods to vaporize the evaporation source, solid or liquid surface into gas atoms, molecules or partially ionize them into ions in a vacuum container, and then deposit them on the surface of a nearby substrate to form a thin film.

[0003] Currently, after completing the vacuum pumping of the main evaporation chamber of the evaporation equipment, the evaporation equipment can usually only use one evaporation source, resulting in low source replacement efficiency. Summary of the invention

[0004] Based on this, it is necessary to provide a source changing device and a vapor deposition equipment to address the problem of low source changing efficiency.

[0005] A first aspect of an embodiment of the present application provides a source changing device, comprising: a frame having a sub-cavity, the sub-cavity being provided with a first through hole and an opening for communicating with an external filling door; a material storage platform movably arranged below the sub-cavity; the material storage platform having a plurality of accommodating cavities for accommodating evaporation sources, the material storage platform being capable of selectively connecting one of the accommodating cavities to the sub-cavity through the first through hole to form a negative pressure chamber; a vacuum pump being connected to the negative pressure chamber; and a transport unit; the transport unit being capable of transferring the evaporation source between the opening and the accommodating cavity for forming the negative pressure chamber.

[0006] In this way, when it is necessary to provide an evaporation source to the main evaporation chamber, the specific accommodating chamber is selectively connected to the sub-chamber through the material storage platform, and the evaporation source is transferred from the accommodating chamber to the opening of the sub-chamber by the carrying unit, and then the evaporation source can enter the main evaporation chamber from the opening through the filling door for evaporation; and the vacuum pump is connected to the negative pressure chamber, so that the negative pressure chamber can be evacuated separately to ensure that the negative pressure chamber will not be broken when it is connected to the main evaporation chamber; and there is no need to re-evacuate the main evaporation chamber separately, which greatly improves the source replacement efficiency and evaporation efficiency.

[0007] In one embodiment, the carrier unit includes a lifting mechanism, a translation mechanism, and a feeding mechanism; the lifting mechanism is used to transfer the evaporation source in the accommodating cavity, and the feeding mechanism is used to transfer the evaporation source in the opening; the translation mechanism is used to transfer the evaporation source from the lifting mechanism to the feeding mechanism when loading, and to transfer the evaporation source from the feeding mechanism to the lifting mechanism when unloading. In this way, the carrier unit can transfer the evaporation source from the accommodating cavity to the opening of the sub-cavity, so that the evaporation source can enter the main evaporation cavity from the opening through the filling door to complete the evaporation.

[0008] In one embodiment, the lifting mechanism has a first working position located in the accommodating chamber and a second working position located in the sub-chamber; when the lifting mechanism is in the first working position, the lifting mechanism can obtain the evaporation source in the accommodating chamber; the translation mechanism has a third working position and a fourth working position located in the sub-chamber; when the translation mechanism is in the third working position and the lifting mechanism is in the second working position, the translation mechanism can obtain the evaporation source on the lifting mechanism; the feeding mechanism has a fifth working position located in the sub-chamber and a sixth working position located above the opening; when the translation mechanism is in the fourth working position and the feeding mechanism is in the fifth working position, the feeding mechanism can obtain the evaporation source on the translation mechanism. In this way, the carrier unit can transfer the evaporation source between the opening of the sub-chamber and the accommodating chamber used to form the negative pressure chamber.

[0009] In one embodiment, the material storage platform includes a fixed disk, a rotating material ring and a driver; the top surface of the fixed disk is recessed inward to form an annular rotating groove, the rotating material ring is rotatably disposed in the rotating groove, a plurality of the accommodating cavities are circumferentially arranged on the rotating material ring, and the driver is used to drive the rotating material ring to rotate relative to the fixed disk.

[0010] In this way, when it is necessary to provide an evaporation source to the main evaporation chamber, each accommodating chamber is relatively independent, and the evaporation source can be placed separately. It can be rotatably arranged in the rotating groove by rotating the material ring. The rotation of the rotating material ring can switch different accommodating chambers to be connected with the sub-cavity to form a negative pressure chamber. After the vacuum pump evacuates the negative pressure chamber, different evaporation sources can be switched to the main evaporation chamber, thereby improving the source replacement efficiency and the material storage platform has a compact structure and is easy to maintain.

[0011] In one embodiment, the frame includes an upper frame plate, a support column and a lower frame plate, the sub-cavity is located on the upper frame plate, the first through hole passes through the upper frame plate; the support column is supported between the upper frame plate and the lower frame plate; the fixed plate is mounted on the support column. In this way, the material storage platform and the upper frame plate collide with each other in the vertical direction, so that one of the accommodating chambers is connected to the sub-cavity through the first through hole to form a negative pressure chamber, which is convenient for the vacuum pump to evacuate the negative pressure chamber to avoid leakage.

[0012] In one embodiment, the material storage platform includes a locking mechanism and a connecting block fixed on the side of the fixed disk, and the support column can be slidably penetrated through the connecting block; the locking mechanism is used to drive the fixed disk to contact or separate from the upper shelf. In this way, the main evaporation chamber can also synchronously perform source setting and source switching operations on the source switching device during the evaporation process, and the evaporation and source switching operations do not affect each other. In this way, in actual production, the downtime of the evaporation equipment caused by source switching can be effectively shortened, thereby improving production efficiency.

[0013] In one embodiment, the locking mechanism includes a locking cylinder and a telescopic rod extending from the locking cylinder, wherein the locking cylinder is fixed to the lower shelf, and the telescopic rod is fixedly connected to the fixed plate. In this way, the fixed plate can be in contact with or separated from the upper shelf.

[0014] In one embodiment, a second through hole is formed on the bottom wall of each of the accommodating cavities; a third through hole is formed on the bottom wall of the rotating groove at a position corresponding to the first through hole; when one of the accommodating cavities is connected to the sub-cavity, the lifting mechanism can pass through the first through hole, the second through hole and the third through hole to switch between the first working position and the second working position. In this way, the lifting mechanism can transfer the evaporation source between the first working position and the second working position in the vertical direction.

[0015] In one embodiment, the lifting mechanism includes a lifting rod, a lifting drive and a lifting support; the lifting rod is telescopically arranged in the third through hole in the vertical direction, and the lifting drive is in transmission connection with the lifting rod; the lifting support is arranged at the top of the lifting rod near the accommodating cavity; when the lifting rod descends until the lifting support is located in the third through hole, the lifting mechanism is in the first working position; when the lifting rod rises until the lifting support passes through the second through hole and the first through hole in sequence and enters the sub-cavity, the lifting mechanism is in the second working position. In this way, the lifting mechanism can transfer the evaporation source between the first working position and the second working position in the vertical direction without causing corresponding interference with the rotating material ring.

[0016] In one embodiment, the lifting mechanism includes a first end cover, a first shell, a first screw, a first nut and a first rotating bearing; the first end cover is arranged at the top of the first shell, the first end cover sealing cover is arranged at the third through hole, and the lifting rod is telescopically arranged through the first end cover in the vertical direction; the lifting rod is a hollow rod body, the first nut is fixed in the lifting rod, the first screw is rotatably arranged in the first shell through the first rotating bearing, and the first screw is rotatably connected to the first nut; the lifting drive can drive the first screw to rotate forward and reverse to drive the lifting rod to move up and down relative to the first shell. In this way, it can be specifically realized that the lifting mechanism can transfer the evaporation source between the first working position and the second working position in the vertical direction.

[0017] In one embodiment, the translation mechanism includes a translation rod, a translation driving member, and a translation supporting portion; the translation rod is telescopically arranged in the sub-cavity, and the translation driving member is in transmission connection with the translation rod; the translation supporting portion is arranged on the front end of the translation rod in the sub-cavity; the translation supporting portion is formed with a notch; when the translation mechanism is in the third working position, the notch can allow the lifting supporting portion to pass through. In this way, the translation mechanism can switch between the third working position and the fourth working position in the horizontal direction without causing corresponding interference with the lifting mechanism.

[0018] In one embodiment, the translation support part includes a bottom plate and a guardrail, wherein the guardrail is arranged at the edge of the bottom plate and protrudes and extends in the vertical direction, and the notch is arranged in the middle of the bottom plate and extends along the axial direction of the translation rod until an open opening is formed at the edge of the bottom plate. In this way, the guardrail prevents the evaporation source from tipping over; the notch forms an open opening, which can facilitate the translation support part to be directly inserted into the two sides of the lifting support part in the horizontal direction, so as to facilitate the transportation of the evaporation source.

[0019] In one embodiment, the feeding mechanism includes a feeding rod, a feeding drive and a feeding support; a fifth through hole is formed on the upper shelf, the feeding rod is telescopically arranged in the fifth through hole in the vertical direction, and the feeding drive is in transmission connection with the feeding rod; the feeding support is arranged on the top of the feeding rod in the sub-cavity; when the translation mechanism is in the fourth working position, the notch can allow the feeding support to pass through; when the feeding rod descends until the feeding support is located below the translation mechanism, the feeding mechanism is in the fifth working position; when the feeding rod rises until the feeding support is located at the opening, the feeding mechanism is in the sixth working position. In this way, the feeding mechanism can switch between the fifth and sixth working positions in the vertical direction without causing corresponding interference with the translation mechanism.

[0020] In one embodiment, the notch is square, circular or elliptical; the lifting support portion is a square plate, a circular plate or an elliptical plate; the feeding support portion is a square plate, a circular plate or an elliptical plate.

[0021] In one of the embodiments, the source changing device comprises a gate valve mechanism, which is movably arranged on the opening of the sub-cavity and is used to close the external filling door.

[0022] A second aspect of an embodiment of the present application provides an evaporation device, comprising a main evaporation chamber and the above-mentioned source changing device; the main evaporation chamber has a filling door, and the opening is connected to the filling door.

[0023] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A schematic diagram of the structure of the evaporation equipment provided for some embodiments of the present application, wherein the fixed plate and the upper shelf plate are in conflict with each other.

[0025] Figure 2 A schematic structural diagram of the evaporation equipment provided in some embodiments of the present application from another perspective, wherein the fixed plate and the upper shelf plate are separated from each other.

[0026] Figure 3 A schematic structural diagram of a source changing device provided for some embodiments of the present application, wherein the fixed disk and the upper shelf plate are separated from each other.

[0027] Figure 4 for Figure 3 The source changing device shown in the figure has half of its structure omitted in order to show the internal structure.

[0028] Figure 5 A schematic structural diagram of a source changing device provided for some embodiments of the present application at another viewing angle, wherein the feeding mechanism is in the sixth working position, the translation mechanism is in the fourth working position, and the lifting mechanism is in the second working position.

[0029] Figure 6 for Figure 5 The source changing device shown in the figure has half of its structure omitted in order to show the internal structure.

[0030] Figure 7 A schematic diagram of the coordination between the material storage platform and the lifting mechanism provided in some embodiments of the present application, wherein the lifting mechanism is in the second working position.

[0031] Figure 8 A schematic diagram of the coordination of a sub-cavity, a translation mechanism and a gate valve mechanism provided in some embodiments of the present application, wherein the upper shelf is omitted and the translation mechanism is in the fourth working position.

[0032] Fig. 9 A schematic diagram of the internal structure of a lifting mechanism provided in some embodiments of the present application.

[0033] Fig.10 A schematic diagram of the structure of a source replacement device provided in some embodiments of the present application.

[0034] Fig.11 for Fig.10 The first state diagram of the AA section of the source changing device shown in the figure, wherein the lifting mechanism is in the first working position, the translation mechanism is in the fourth working position, and the feeding mechanism is in the fifth working position.

[0035] Fig.12 for Fig.11 The second state diagram of the source changing device is shown, in which the lifting mechanism is in the second working position, the translation mechanism is in the fourth working position, and the feeding mechanism is in the fifth working position.

[0036] Fig.13 for Fig.11 The third state diagram of the source changing device is shown, in which the lifting mechanism is in the second working position, the translation mechanism is in the third working position, and the feeding mechanism is in the fifth working position.

[0037] Fig.14 for Fig.11 The fourth state diagram of the source changing device is shown, wherein the lifting mechanism is in the first working position, the translation mechanism is in the fourth working position, and the feeding mechanism is in the fifth working position.

[0038] Fig.15 for Fig.11 The fifth state diagram of the source changing device is shown, in which the lifting mechanism is in the first working position, the translation mechanism is in the fourth working position, and the feeding mechanism is in the sixth working position.

[0039] The Z-axis direction shown in the figure is the vertical direction, and the X-axis direction is the horizontal direction.

[0040] Description of reference numerals:

[0041] Frame 10, sub-cavity 11, opening 11a, first through hole 12, upper plate 13, support column 14, enclosure 15, fourth through hole 151, seventh through hole 152, sixth through hole 153, lower plate 16, fifth through hole 17, material storage platform 20, accommodating chamber 21, fixed plate 22, convex cavity 221, bevel gear 222, rotating groove 223, clearance hole 224, rotating material ring 23, driver 24, second through hole 25, third through hole 26, connecting block 27, locking mechanism 28, locking cylinder 281, telescopic rod 282, vacuum pump 30, carrier unit 40, lifting mechanism 41 , lifting rod-411, lifting drive member-414, lifting support part-415, first end cover-412, first shell-413, first screw rod-416, first nut-417, first rotating bearing-418, anti-twist guide light axis-419, translation mechanism-42, translation rod-421, translation drive member-424, translation support part-425, notch-4251, bottom plate-4253, guardrail-4252, feeding mechanism-43, feeding rod-431, feeding drive member-434, feeding support part-435, gate valve mechanism-50, locking rod-51, locking drive member-54, sealing plate-55, evaporation source-90, main evaporation chamber-200. DETAILED DESCRIPTION

[0042] The following embodiments of the technical solution of the present application will be described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present application, and are therefore only used as examples, and cannot be used to limit the scope of protection of the present application.

[0043] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" in the specification and claims of this application and the above-mentioned figure descriptions and any variations thereof are intended to cover non-exclusive inclusions.

[0044] In the description of the embodiments of the present application, if the technical terms "first", "second", etc. appear, these terms are only used for descriptive purposes to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number, specific order or primary and secondary relationship of the indicated technical features.

[0045] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0046] In the description of the embodiments of the present application, the term "and / or" is only a description of the association relationship of the associated objects, indicating that there may be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0047] In the description of the embodiments of the present application, if the term "multiple" appears, "multiple" means at least two (including two), such as two, three, etc., unless otherwise clearly and specifically defined. Similarly, if the term "multiple groups" appears, "multiple groups" refers to more than two groups (including two groups), and if the term "multiple sheets" appears, "multiple sheets" refers to more than two sheets (including two sheets).

[0048] In the description of the embodiments of the present application, if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the embodiments of the present application and simplifying the description, and does not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present application.

[0049] In the description of the embodiments of the present application, unless otherwise clearly specified and limited, if the technical terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0050] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0051] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0052] At present, from the perspective of market development, the application of power batteries is becoming more and more extensive. Power batteries are not only used in energy storage power systems such as hydropower, thermal power, wind power and solar power stations, but also widely used in electric vehicles such as electric bicycles, electric motorcycles, electric cars, as well as aerospace and other fields. With the continuous expansion of the application field of power batteries, the market demand is also constantly expanding.

[0053] In the related technology, the production of battery components often applies the vacuum thermal evaporation process. However, the current equipment using vacuum thermal evaporation can only use one evaporation source after completing the vacuum pumping of the main evaporation chamber. If the evaporation source needs to be replaced, the main evaporation chamber needs to be re-injected with process gas, and the evaporation chamber needs to be vacuumed again after the evaporation source is replaced. The transportation process of different evaporation sources to the main evaporation chamber often relies on manual selection and transportation, and cannot be continuously automated. This ultimately leads to low source replacement efficiency of the evaporation equipment, which in turn affects the production efficiency of the battery.

[0054] In order to alleviate the problem of low source changing efficiency of the evaporation equipment, a source changing device that can automatically change the evaporation source can be designed for the evaporation equipment. It can simultaneously gather multiple evaporation sources and set a separate sub-chamber that is evacuated and then connected to the main evaporation chamber, thereby greatly improving the source changing efficiency.

[0055] See also Figures 1 to 15As shown, the first aspect of the embodiment of the present application provides a source changing device, which is applied to an evaporation device, can provide different evaporation sources for the evaporation device, and can improve the source changing efficiency. The source changing device includes a frame 10, a material storage platform 20, a vacuum pump 30 and a carrier unit 40.

[0056] Among them, the frame 10 has a sub-cavity 11, and the sub-cavity 11 is provided with a first through hole 12 and an opening 11a for communicating with an external filling door. Specifically, the first through hole 12 can be formed on the bottom wall of the sub-cavity 11, and the top of the sub-cavity 11 is formed with an opening 11a for sealing and docking with the filling door. The evaporation equipment has a main evaporation chamber 200, which is used to accommodate a substrate for vacuum thermal evaporation process. The main evaporation chamber 200 has a filling door, which can usually be set at the bottom of the main evaporation chamber 200. The evaporation source 90 can pass through the filling door to enter the main evaporation chamber 200. The opening 11a should be sealed and docked with the filling door. Specifically, the opening 11a at the top of the sub-cavity 11 can be sealed and abutted with the surrounding door frame of the filling door on the main evaporation chamber 200 to ensure that the connection remains airtight to prevent leakage.

[0057] The material storage platform 20 is movably arranged below the sub-cavity 11. The material storage platform 20 has a plurality of accommodating chambers 21 for accommodating evaporation sources 90, and each accommodating chamber 21 can store different or the same evaporation sources 90, which is subject to the specific design. The material storage platform 20 can selectively connect one of the accommodating chambers 21 with the sub-cavity 11 through the first through hole 12 to form a negative pressure chamber. The vacuum pump 30 is connected to the negative pressure chamber; the carrying unit 40 can transfer the evaporation source 90 between the opening 11a of the sub-cavity 11 and the accommodating chamber 21 used to form the negative pressure chamber.

[0058] When it is necessary to provide the evaporation source 90 to the main evaporation chamber 200, the specific accommodating chamber 21 is selectively connected to the sub-chamber 11 through the material storage platform 20, and the evaporation source 90 is transferred from the accommodating chamber 21 to the opening 11a of the sub-chamber 11 by the transport unit 40, and then the evaporation source 90 can enter the main evaporation chamber 200 through the opening 11a through the filling door for evaporation; and the vacuum pump 30 is connected to the negative pressure chamber, so that the negative pressure chamber can be evacuated separately to ensure that the negative pressure chamber will not be broken when it is connected to the main evaporation chamber 200; and there is no need to re-evacuate the main evaporation chamber 200 separately, which greatly improves the source replacement efficiency and the evaporation efficiency.

[0059] It can be understood that when the main evaporation chamber 200 needs to replace the evaporation source 90, after the vacuum pump 30 evacuates the negative pressure chamber, the used evaporation source 90 exits to the opening 11a through the filling door, and the evaporation source 90 is transferred from the opening 11a to the accommodating chamber 21 connected to the first through hole 12 by the carrier unit 40, thereby completing the placement of the used evaporation source 90; the material storage platform 20 moves to reconnect the specific accommodating chamber 21 with the sub-cavity 11, thereby forming a new negative pressure chamber, and the evaporation source 90 to be used in the specific accommodating chamber 21 can be transferred by the carrier unit 40 to the opening 11a of the sub-cavity 11, and then the evaporation source 90 to be used can enter the main evaporation chamber 200 from the opening 11a through the filling door for evaporation.

[0060] It should be noted that the evaporation material of the evaporation source 90 in each embodiment of the present application can be aluminum, nickel, copper, silver, titanium, silicon, vanadium, magnesium, tin, chromium, indium, gold, etc., or can be titanium-tantalum alloy, zirconium-titanium alloy, silicon-aluminum alloy, aluminum trioxide, zirconium dioxide, titanium pentoxide, quartz ring, quartz sheet, erbium oxide, lanthanum titanate and other compounds, which are subject to the design; the evaporation material of the evaporation source 90 is loaded in a crucible container for easy storage and transportation. The lifting, translation or transportation of the evaporation source 90 referred to in the present application are all operations on the crucible.

[0061] In some possible embodiments, see Figures 1 to 6 As shown, the carrier unit 40 includes a lifting mechanism 41, a translation mechanism 42 and a feeding mechanism 43. The lifting mechanism 41 is used to transfer the evaporation source 90 in the accommodating chamber 21, and the feeding mechanism 43 is used to transfer the evaporation source 90 in the opening 11a. The translation mechanism 42 is used to transfer the evaporation source 90 between the lifting mechanism 41 and the feeding mechanism 43; specifically, the translation mechanism 42 is used to transfer the evaporation source 90 from the lifting mechanism 41 to the feeding mechanism 43 when loading, and to transfer the evaporation source 90 from the feeding mechanism 43 to the lifting mechanism 41 when unloading. In this way, the carrier unit 40 can transfer the evaporation source 90 from the accommodating chamber 21 to the opening 11a of the sub-cavity 11, and then the evaporation source 90 can enter the main evaporation chamber 200 from the opening 11a through the filling door to complete the evaporation.

[0062] The lifting mechanism 41 can be partially disposed in the accommodating chamber 21 along the vertical direction. The lifting mechanism 41 has a first working position located in the accommodating chamber 21 and a second working position located in the sub-cavity 11. The lifting mechanism 41 can transfer the evaporation source 90 between the first working position and the second working position along the vertical direction.

[0063] Specifically, combined Fig.11 and Fig.12When the lifting mechanism 41 is in the first working position, the lifting mechanism 41 can obtain the evaporation source 90 in the accommodating cavity 21, and then the evaporation source 90 can be lifted from the first working position to the second working position in the vertical direction, which is convenient for subsequent transportation. Conversely, when the lifting mechanism 41 is in the second working position, the lifting mechanism 41 can obtain the evaporation source 90 transferred from the translation mechanism 42, and then the evaporation source 90 can be dropped from the second working position to the first working position in the vertical direction, thereby returning the used evaporation source 90 to the corresponding accommodating cavity 21.

[0064] The translation mechanism 42 can be partially arranged in the sub-cavity 11 along the horizontal direction; the translation mechanism 42 has a third working position and a fourth working position located in the sub-cavity 11; the translation mechanism 42 can transfer the evaporation source 90 between the third working position and the fourth working position along the horizontal direction.

[0065] Specifically, combined Figure 13 to Figure 14 When the translation mechanism 42 is in the third working position and the lifting mechanism 41 is in the second working position, the translation mechanism 42 can obtain the evaporation source 90 on the lifting mechanism 41; and then the evaporation source 90 can be horizontally translated from the third working position to the fourth working position, which is convenient for subsequent transportation. Conversely, when the translation mechanism 42 is in the third working position and the lifting mechanism 41 is in the second working position, the lifting mechanism 41 can obtain the evaporation source 90 on the translation mechanism 42, and then the evaporation source 90 can be dropped vertically from the second working position to the first working position, and finally the used evaporation source 90 can be returned to the corresponding accommodating cavity 21.

[0066] It is understandable that the third working position of the translation mechanism 42 and the second working position of the lifting mechanism 41 should be substantially coincident in the sub-chamber 11, so that the evaporation source 90 can be conveniently transferred between the two. In some other embodiments, the third working position of the translation mechanism 42 and the second working position of the lifting mechanism 41 may be different in the sub-chamber 11, and a mechanical arm can be used to grab them in the middle, which will not be described in detail here.

[0067] The feeding mechanism 43 can be partially disposed in the sub-cavity 11 along the vertical direction. The feeding mechanism 43 has a fifth working position located in the sub-cavity 11 and a sixth working position located above the opening 11a; the feeding mechanism 43 can transfer the evaporation source 90 between the fifth working position and the sixth working position along the vertical direction.

[0068] Specifically, combined Fig.14 and Fig.15When the translation mechanism 42 is in the fourth working position and the feeding mechanism 43 is in the fifth working position, the feeding mechanism 43 can obtain the evaporation source 90 on the translation mechanism 42, and then the evaporation source 90 can be lifted from the fifth working position to the sixth working position in the vertical direction, and then the evaporation source 90 can enter the main evaporation chamber 200 through the filling door from the opening 11a for evaporation. Conversely, when the translation mechanism 42 is in the fourth working position and the feeding mechanism 43 is in the fifth working position, the translation mechanism 42 can obtain the evaporation source 90 on the feeding mechanism 43, and then the evaporation source 90 can be translated from the fourth working position to the third working position, and then the evaporation source 90 can be returned to the corresponding accommodating chamber 21 through the lifting mechanism 41.

[0069] It is understandable that the fourth working position of the translation mechanism 42 and the fifth working position of the feeding mechanism 43 should be substantially coincident in the sub-chamber 11; thus, it is convenient for the evaporation source 90 to be transferred between the two. In some other embodiments, the fourth working position of the translation mechanism 42 and the fifth working position of the feeding mechanism 43 may be in different positions in the sub-chamber 11, and a mechanical arm may be used to grasp the intermediate positions, which will not be described in detail here.

[0070] In some possible embodiments, see Figures 1 to 6 As shown, the frame 10 includes an upper frame plate 13 , support columns 14 , a surrounding plate 15 and a lower frame plate 16 .

[0071] The sub-cavity 11 is located on the upper frame plate 13. Specifically, the enclosure 15 is arranged on the top surface of the upper frame plate 13 to define the sub-cavity 11, and the side of the enclosure 15 away from the upper frame plate 13 is formed as an opening 11a. The upper frame plate 13 serves as the bottom wall of the sub-cavity 11, and the first through hole 12 penetrates the upper frame plate 13. Specifically, the first through hole 12 is located on the partial area of ​​the upper frame plate 13 surrounded by the enclosure 15. The first through hole 12 can be a circular hole, or can be designed as a square hole or other irregularly shaped through holes as needed.

[0072] The support column 14 is supported between the upper shelf 13 and the lower shelf 16; the material storage platform 20 is movably arranged on the side of the upper shelf 13 away from the enclosure 15, and specifically, the fixed plate 22 (mentioned below) is mounted on the support column 14. The material storage platform 20 and the upper shelf 13 are in contact with each other in the vertical direction, so that one of the accommodating cavities 21 is connected with the sub-cavity 11 through the first through hole 12 to form a negative pressure chamber, which is convenient for the vacuum pump 30 to evacuate the negative pressure chamber to avoid leakage.

[0073] Optionally, combined Figure 1 and Figure 3 As shown, a sixth through hole 153 is opened on the enclosure 15, and the vacuum pump 30 can be connected to the sixth through hole 153 through a vacuum pipe, thereby realizing the communication between the vacuum pump 30 and the negative pressure chamber.

[0074] In some possible embodiments, see Figures 1 to 7 As shown, the material storage platform 20 includes a fixed plate 22, a rotating material ring 23 and a driver 24. The fixed plate 22 is mounted on the support column 14, and the top surface of the fixed plate 22 is inwardly recessed to form an annular rotating groove 223, and the rotating material ring 23 is rotatably disposed in the rotating groove 223, and the fixed plate 22 and the rotating material ring 23 are relatively fixed in the vertical direction.

[0075] A plurality of accommodating cavities 21 are arranged on the rotating material ring 23 along the circumferential direction; the driver 24 is used to drive the rotating material ring 23 to rotate relative to the fixed disk 22 .

[0076] In this way, when it is necessary to provide the evaporation source 90 to the main evaporation chamber 200, each accommodating chamber 21 is relatively independent, and the evaporation source 90 can be placed separately. It can be rotatably arranged in the rotating groove 223 through the rotating material ring 23. The rotation of the rotating material ring 23 can switch different accommodating chambers 21 to be connected with the sub-cavity 11 to form a negative pressure chamber. After the vacuum pump 30 evacuates the negative pressure chamber, different evaporation sources 90 can be switched to the main evaporation chamber 200, thereby improving the source replacement efficiency and the material storage platform 20 has a compact structure and is easy to maintain.

[0077] Optionally, the driver 24 may be a motor or a cylinder, and the driver 24 is directly connected to the driver 24 to drive the rotating material ring 23 to rotate relative to the fixed disk 22.

[0078] In some possible embodiments, the fixing plate 22 may be generally fixedly connected to the support column 14. In this way, it is ensured that the top surface of the fixing plate 22 facing the upper shelf plate 13 is closely fitted to the upper shelf plate 13 to prevent air leakage.

[0079] In some other possible embodiments, the fixing plate 22 is movably mounted on the supporting column 14 .

[0080] Combination Figure 1 , Figure 5 as well as Figure 6 As shown, when the main evaporation chamber 200 provides the evaporation source 90, the rotating material ring 23 is rotated to connect different accommodating chambers 21 with the sub-cavity 11 to form a negative pressure chamber, and the fixed plate 22 is vertically upward and keeps contact with the upper shelf 13 to prevent the negative pressure chamber from leaking, thereby facilitating the vacuum pump 30 to evacuate the negative pressure chamber. It can be understood that in this state, the carrier unit 40 can provide corresponding transportation for the evaporation source 90.

[0081] Combination Figure 2 , Figure 3 as well as Figure 4As shown, when the main evaporation chamber 200 is undergoing evaporation and the source changing device is undergoing maintenance or replenishing the evaporation source 90, the vacuum pump 30 is not required to evacuate the negative pressure chamber, and the fixed plate 22 is separated from the upper shelf 13 in the vertical direction downward, thereby exposing the operating space, which is not only more convenient for the operator to replace or replenish the evaporation source 90 on the material storage platform 20 or to perform maintenance and repair on the mechanism, saving the source changing time, but also will not delay the evaporation process of the main evaporation chamber 200. In other words, the process of evaporation in the main evaporation chamber 200 can also be synchronized with the source changing device to set the source and change the source, and the evaporation and source changing operations do not affect each other. In this way, in actual production, the downtime of the evaporation equipment caused by source changing can be effectively shortened, and production efficiency can be improved.

[0082] In some possible embodiments, see Figures 1 to 6 As shown, the material storage platform 20 includes a locking mechanism 28 and a connecting block 27 fixed to the peripheral side of the fixed plate 22. The support column 14 is slidably arranged in the connecting block 27; the connecting block 27 uses the support column 14 as a guide to guide the fixed plate 22 to move up and down in the vertical direction. The locking mechanism 28 is used to drive the fixed plate 22 to contact or separate from the upper shelf 13.

[0083] Optionally, a plurality of connection blocks 27 may be evenly distributed around the fixed disk 22 to prevent the fixed disk 22 from deflecting. For example, three, four or more connection blocks 27 may be evenly distributed around the fixed disk 22.

[0084] In some possible embodiments, the locking mechanism 28 may be a motor or a cylinder.

[0085] Take the cylinder as an example, see Figures 1 to 6 As shown, the locking mechanism 28 includes a locking cylinder 281 and a telescopic rod 282 extending from the locking cylinder 281 . The locking cylinder 281 is fixed on the lower frame plate 16 , and the telescopic rod 282 is fixedly connected to the fixed plate 22 .

[0086] The locking mechanism 28 is used as a power mechanism. Figure 1 , Figure 5 as well as Figure 6 As shown, when the main evaporation chamber 200 provides the evaporation source 90, the rotating material ring 23 is rotated to connect different accommodating chambers 21 with the sub-cavity 11 to form a negative pressure chamber, the locking cylinder 281 is fixed on the lower frame plate 16, and the telescopic rod 282 extends upward in the vertical direction to push the fixed plate 22 away from the lower frame plate 16, and the top surface of the fixed plate 22 and the bottom surface of the upper frame plate 13 are in contact with each other in the vertical direction to ensure sealing and prevent air leakage in the negative pressure chamber.

[0087] Combination Figure 1 , Figure 5 as well as Figure 6As shown, when the main evaporation chamber 200 is undergoing evaporation and the source changing device needs to be repaired or the evaporation source 90 needs to be supplemented, there is no need for the vacuum pump 30 to evacuate the negative pressure chamber, and the locking cylinder 281 is fixed on the lower frame plate 16, and the telescopic rod 282 retracts upward in the vertical direction, driving the fixed plate 22 downward to approach the lower frame plate 16, thereby separating the top surface of the fixed plate 22 from the bottom surface of the upper frame plate 13 in the vertical direction, thereby exposing the operating space, so that the process of evaporation in the main evaporation chamber 200 can also be synchronized with the source changing device to perform source setting and source changing operations, effectively shortening the downtime of the evaporation equipment caused by source changing and improving production efficiency.

[0088] In some possible embodiments, see Figure 7 As shown, the fixed disk 22 has a clearance hole 224 in the middle, and the inner side of the clearance hole 224 protrudes radially inward to form a convex cavity 221, which is connected to the rotating groove 223. A rotatable bevel gear 222 is arranged in the convex cavity 221, and the driver 24 is in driving connection with the bevel gear 222.

[0089] Combination Figure 4 As shown, the radial inner circumference of the rotating material ring 23 has a meshing portion (not marked), and the conical surface of the bevel gear 222 meshes with the meshing portion of the inner circumference of the rotating material ring 23. In this way, when the driver 24 drives the bevel gear 222 to rotate, the bevel gear 222 can drive the rotating material ring 23 to rotate relative to the fixed disk 22, and then the rotation of the rotating material ring 23 can switch different accommodating chambers 21 to be connected with the sub-cavity 11 to form a negative pressure chamber, and then the vacuum pump 30 performs a separate vacuum pumping on the negative pressure chamber, and cooperates with the lifting mechanism 41, the translation mechanism 42 and the feeding mechanism 43 to transport, and finally realize the provision of different evaporation sources 90 to the main evaporation chamber 200. The whole process can be automatically operated without human intervention, which effectively improves the source replacement efficiency.

[0090] Optionally, the rotating shaft of the driver 24 may be connected to the bevel gear 222 in a transmission manner, and the two may be directly connected or connected via a pulley transmission.

[0091] Optionally, multiple sets of drivers 24 and corresponding bevel gears 222, such as 2 sets, 3 sets or 4 sets, can be set on the material storage platform 20. The multiple sets of bevel gears 222 are evenly distributed on the inner circumferential surface of the clearance hole 224 along the circumferential direction, thereby ensuring that the rotating material ring 23 is evenly subjected to radial force to avoid deflection.

[0092] In some possible embodiments, see Figures 1 to 6 As shown, the bottom of the rotating material ring 23 is formed with a second through hole 25 connected to the accommodating cavity 21. In other words, a penetrating second through hole 25 is formed on the bottom wall of each accommodating cavity 21. A penetrating third through hole 26 is formed on the bottom wall of the rotating groove 223 of the fixed plate 22 at a position corresponding to the first through hole 12.

[0093] When the rotating material ring 23 rotates, one of the accommodating cavities 21 is connected to the sub-cavity 11, and the first through hole 12, the second through hole 25 connected to the accommodating cavity 21, and the third through hole 26 are connected in sequence. Then, the lifting mechanism 41 can pass through the first through hole 12, the second through hole 25, and the third through hole 26 in the vertical direction to switch between the first working position and the second working position. In this way, the lifting mechanism 41 can transfer the evaporation source 90 between the first working position and the second working position in the vertical direction.

[0094] In some possible embodiments, see Figures 1 to 6 , Fig. 9 , Fig.11 as well as Fig.12 As shown, the lifting mechanism 41 includes a lifting rod 411 , a lifting driving member 414 and a lifting supporting portion 415 .

[0095] The lifting rod 411 is telescopically disposed in the third through hole 26 in the vertical direction, and the lifting driving member 414 is transmission-connected with the lifting rod 411 to drive the lifting rod 411 to switch between the first working position and the second working position in the vertical direction. The lifting supporting portion 415 is disposed at the top of the lifting rod 411 near the accommodating chamber 21.

[0096] Combination Figure 6 and Fig.11 As shown, when the lifting rod 411 descends until the lifting support part 415 is located in the third through hole 26, the lifting mechanism 41 is in the first working position. That is to say, the lifting support part 415 is lower than the height position of the second through hole 25 at this time, and will not interfere with the rotating material ring 23. At this time, the rotating material ring 23 can rotate as needed to switch different accommodating chambers 21 to communicate with the sub-cavity 11 to form a negative pressure chamber.

[0097] Combination Figure 6 and Fig.12 As shown, when the lifting rod 411 rises until the lifting support portion 415 passes through the second through hole 25 and the first through hole 12 in sequence and enters the sub-cavity 11, the lifting mechanism 41 is in the second working position.

[0098] In this way, the lifting mechanism 41 can transfer the evaporation source 90 between the first working position and the second working position along the vertical direction without causing corresponding interference with the rotating material ring 23 .

[0099] Optionally, the lifting support part 415 can be a plate for bearing weight. The lifting support part 415 can be made of stainless steel, aluminum alloy or carbon steel, which is heat-resistant and has good strength. The lifting rod 411 and the lifting support part 415 can be made of the same material and the two can be formed in one piece.

[0100] In some possible embodiments, the lifting drive member 414 may be a cylinder or a motor.

[0101] Take the lifting drive member 414 as a motor as an example for explanation. Figures 1 to 6 ,as well as Fig. 9 As shown, the lifting mechanism 41 includes a first end cover 412 , a first housing 413 , a first screw rod 416 , a first nut 417 and a first rotating bearing 418 .

[0102] The first shell 413 is a cylindrical structure with an open top. The first end cover 412 is arranged at the top of the first shell 413 and is sealed and connected to the third through hole 26 of the fixed disk 22; a corresponding rubber sealing ring or sealing groove can be provided on the first end cover 412 to ensure the sealing performance between the first end cover 412 and the third through hole 26; the lifting rod 411 is telescopically provided through the first end cover 412 in the vertical direction; similarly, the peripheral side of the lifting rod 411 and the first end cover 412 should be dynamically sealed; for example, a corresponding rubber sealing ring or sealing groove can be provided. When the first through hole 12 is connected to the sub-cavity 11 to form a negative pressure chamber, the third through hole 26 can maintain sufficient sealing to ensure the vacuum degree of the negative pressure chamber.

[0103] The lifting rod 411 is a rod body with a hollow interior, the first nut 417 is fixed inside the lifting rod 411, the first screw rod 416 is rotatably arranged in the first shell 413 through the first rotating bearing 418, and the first screw rod 416 is rotatably connected to the first nut 417; the lifting drive member 414 can drive the first screw rod 416 to rotate forward and reverse to drive the lifting rod 411 to move up and down relative to the first shell 413.

[0104] When the lifting drive 414 rotates, it drives the first screw rod 416 to rotate, thereby rotating relative to the first nut 417. The first nut 417 moves up and down relative to the first screw rod 416, thereby driving the lifting rod 411 to rise and fall in the vertical direction, thereby ensuring that the lifting mechanism 41 can transfer the evaporation source 90 between the first working position and the second working position in the vertical direction.

[0105] Optionally, the lifting mechanism 41 further includes an anti-twist guide optical axis 419, which is disposed in the first shell 413 and passes through the first nut 417 to provide guidance in the vertical direction to ensure that the first nut 417 does not rotate.

[0106] Optionally, the lifting drive member 414 and the first screw rod 416 can be directly driven or can be driven by a conveyor belt, which is subject to the specific design.

[0107] Optionally, the first rotary bearing 418 may be a deep groove ball bearing.

[0108] In some possible embodiments, see Figures 1 to 6 The lower frame plate 16 has an avoidance hole 161 to avoid corresponding interference with the bottom end of the first shell 413.

[0109] In some possible embodiments, see Figures 1 to 6 , Figure 8 , Fig.12 as well as Fig.13 As shown, the translation mechanism 42 includes a translation rod 421 , a translation driving member 424 and a translation supporting portion 425 .

[0110] The translation rod 421 is telescopically arranged in the sub-cavity 11 in the horizontal direction; specifically, the enclosure 15 may be provided with a fourth through hole 151, and the translation rod 421 passes through the fourth through hole 151. The translation driving member 424 is in transmission connection with the translation rod 421 to drive the translation rod 421 to switch between the third working position and the fourth working position in the horizontal direction. The translation supporting portion 425 is arranged on the front end of the translation rod 421 located in the sub-cavity 11.

[0111] The translation support portion 425 is formed with a notch 4251 ; the notch 4251 is adapted to the lifting support portion 415 , and the adaptation here means that the shape of the lifting support portion 415 is similar to or the same as the notch 4251 , and the size of the lifting support portion 415 is smaller than the notch 4251 .

[0112] The third working position of the translation mechanism 42 is substantially overlapped with the second working position of the lifting mechanism 41; when the translation mechanism 42 is in the third working position, the gap 4251 allows the lifting support portion 415 to pass through in the vertical direction. In this way, the translation mechanism 42 can switch between the third working position and the fourth working position in the horizontal direction without causing corresponding interference with the lifting mechanism 41.

[0113] Optionally, the translation support part 425 is usually used for bearing. The translation support part 425 can be made of stainless steel, aluminum alloy or carbon steel, which is heat-resistant and has good strength. The translation rod 421 and the translation support part 425 can be made of the same material and the two can be formed in one piece.

[0114] Optionally, the translation drive member 424 may be a cylinder or a motor.

[0115] It should be noted that the structural arrangement and transmission mode of the translation drive member 424 can be completely the same as those of the lifting drive member 414. That is to say, if the translation drive member 424 is a motor, the translation mechanism 42 includes a second end cover (not marked), a second housing (not marked), a second screw rod (not marked), a second nut (not marked) and a second rotating bearing (not marked), and the specific connection relationship and arrangement thereof can be referred to by analogy. Fig. 9 The structure shown in will not be repeated here.

[0116] In some possible embodiments, see Figures 1 to 6 ,as well as Figure 8 As shown, the translation support portion 425 may be bucket-shaped. Specifically, the translation support portion 425 includes a bottom plate 4253 and a guardrail 4252. The guardrail 4252 is arranged at the edge of the bottom plate 4253 and protrudes and extends in the vertical direction. The notch 4251 is arranged in the middle of the bottom plate 4253 and extends along the axial direction of the translation rod 421 until an open mouth is formed at the edge of the bottom plate 4253. Projected in the vertical direction, the guardrail 4252 is arranged in a U-shape, and the open end of the guardrail 4252 is arranged along the axial direction of the translation rod 421. In this way, the guardrail 4252 prevents the evaporation source 90 from tipping over; the notch 4251 forms an open mouth, which can facilitate the translation support portion 425 to be directly inserted into the two sides of the lifting support portion 415 in the horizontal direction, so as to facilitate the transportation of the evaporation source 90.

[0117] In some possible embodiments, see Figures 1 to 6 , Fig.14 as well as Fig.15 As shown, the feeding mechanism 43 includes a feeding rod 431 , a feeding driving member 434 and a feeding supporting portion 435 .

[0118] A fifth through hole 17 is formed on the upper shelf 13, and the feed rod 431 is telescopically arranged in the fifth through hole 17 in the vertical direction. The feed drive member 434 is transmission-connected to the feed rod 431 to drive the feed rod 431 to switch between the fifth working position and the sixth working position in the vertical direction.

[0119] The feeding support part 435 is disposed on the top of the feeding rod 431 in the sub-cavity 11. The feeding support part 435 is adapted to the notch 4251; the adaptation here means that the shape of the feeding support part 435 is similar to or the same as the notch 4251, and the size of the feeding support part 435 is smaller than the notch 4251.

[0120] The fourth working position of the translation mechanism 42 and the fifth working position of the feeding mechanism 43; when the translation mechanism 42 is in the fourth working position, the gap 4251 can allow the feeding support part 435 to pass through in the vertical direction; when the feeding rod 431 descends until the feeding support part 435 is located below the translation mechanism 42, the feeding mechanism 43 is in the fifth working position; when the feeding rod 431 rises until the feeding support part 435 is located on the opening 11a, the feeding mechanism 43 is in the sixth working position.

[0121] In this way, the feeding mechanism 43 can switch between the fifth working position and the sixth working position along the vertical direction without causing corresponding interference with the translation mechanism 42 , thereby completing the function of transporting the evaporation source 90 .

[0122] Optionally, the feed support part 435 can be a plate for bearing weight. The feed support part 435 can be made of stainless steel, aluminum alloy or carbon steel, which is heat-resistant and has good strength. The feed rod 431 and the feed support part 435 can be made of the same material, and the two can be formed in one piece.

[0123] Optionally, the feeding drive 434 may be a cylinder or a motor.

[0124] It should be noted that the structural arrangement and transmission mode of the feeding drive member 434 can be completely the same as those of the lifting drive member 414. That is to say, if the feeding drive member 434 is a motor, the feeding mechanism 43 includes a third end cover (not marked), a third housing (not marked), a third screw rod (not marked), a third nut (not marked) and a third rotating bearing (not marked), and the specific connection relationship and arrangement thereof can be referred to by analogy. Fig. 9 The structure shown in will not be repeated here.

[0125] Generally, the size of the gap 4251 should be smaller than the evaporation source 90 , that is, the evaporation source 90 is not allowed to pass through.

[0126] Optionally, the notch 4251 may be a simple shape such as a square, a circle or an ellipse, and correspondingly, the lifting support portion 415 may be a simple shape such as a square, a circle or an ellipse; the feeding support portion 435 may be a simple shape such as a square, a circle or an ellipse. The notch 4251, the lifting support portion 415 and the feeding support portion 435 may also be irregular shapes formed by combining simple shapes; this embodiment of the application is not limited.

[0127] The size of the notch 4251 should be larger than the lifting support portion 415 and the feeding support portion 435 , so that the translation mechanism 42 can switch between the third working position and the fourth working position in the horizontal direction without causing corresponding interference with the lifting mechanism 41 and the feeding mechanism 43 .

[0128] In some possible embodiments, see Figures 1 to 6 As shown, the source changing device includes a gate valve mechanism 50, which is movably arranged on the opening 11a of the sub-cavity 11 and is used to close the external filling door.

[0129] Specifically, the gate valve mechanism 50 includes a locking rod 51, a locking drive 54 and a sealing plate 55; the locking rod 51 is telescopically inserted into a fifth through hole 152 on the enclosure 15. The locking drive 54 is in transmission connection with the locking rod 51 to drive its reciprocating motion, and the sealing plate 55 is disposed at one end of the locking rod 51 located in the sub-cavity 11.

[0130] When the main evaporation chamber 200 needs to replace the evaporation source 90, the locking drive 54 drives the locking rod 51 to retract, exposing the filling door, and the used evaporation source 90 can be withdrawn to the opening 11a through the filling door, and the evaporation source 90 to be used can enter the filling door through the opening 11a to complete the corresponding function of the evaporation device. When the main evaporation chamber 200 is already evaporating, the locking drive 54 can drive the locking rod 51 to extend, and the sealing plate 55 can cover the external filling door, thereby realizing the closing or opening of the external filling door.

[0131] In the vertical direction, the top surface of the sealing plate 55 protrudes from the opening 11a. In this way, the airtightness of the main evaporation chamber 200 can be further improved to ensure good quality of the evaporation process.

[0132] Optionally, the locking drive 54 may be a cylinder or a motor.

[0133] A second aspect of the present application provides an evaporation device, including an evaporation body 200 and the above-mentioned source changing device; the evaporation body 200 has a filling door, and the opening 11a is connected to the filling door.

[0134] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0135] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A source changing device, characterized in that: The source changing device comprises: The frame (10) has a sub-cavity (11), wherein the sub-cavity (11) is provided with a first through hole (12) and an opening (11a) for communicating with an external filling door; a material storage platform (20) movably arranged below the sub-cavity (11); the material storage platform (20) has a plurality of accommodating cavities (21) for accommodating evaporation sources (90), and the material storage platform (20) is capable of selectively connecting one of the accommodating cavities (21) to the sub-cavity (11) through the first through hole (12) to form a negative pressure chamber; A vacuum pump (30) connected to the negative pressure chamber; and a transport unit (40); the transport unit (40) is capable of transferring the evaporation source (90) between the opening (11a) and the accommodating chamber (21) used to form the negative pressure chamber.

2. The source changing device according to claim 1, characterized in that: The transport unit (40) comprises a lifting mechanism (41), a translation mechanism (42) and a feeding mechanism (43); The lifting mechanism (41) is used to transfer the evaporation source (90) in the accommodating cavity (21), and the feeding mechanism (43) is used to transfer the evaporation source (90) in the opening (11a); The translation mechanism (42) is used to transfer the evaporation source (90) from the lifting mechanism (41) to the feeding mechanism (43) during material loading, and to transfer the evaporation source (90) from the feeding mechanism (43) to the lifting mechanism (41) during material unloading.

3. The source changing device according to claim 2, characterized in that: The lifting mechanism (41) has a first working position located in the accommodating chamber (21) and a second working position located in the sub-chamber (11); when the lifting mechanism (41) is in the first working position, the lifting mechanism (41) can obtain the evaporation source (90) in the accommodating chamber (21); The translation mechanism (42) has a third working position and a fourth working position located in the sub-chamber (11); when the translation mechanism (42) is in the third working position and the lifting mechanism (41) is in the second working position, the translation mechanism (42) can acquire the evaporation source (90) on the lifting mechanism (41); The feeding mechanism (43) has a fifth working position located in the sub-cavity (11) and a sixth working position located above the opening (11a); when the translation mechanism (42) is in the fourth working position and the feeding mechanism (43) is in the fifth working position, the feeding mechanism (43) can acquire the evaporation source (90) on the translation mechanism (42).

4. The source changing device according to claim 3, characterized in that: The material storage platform (20) comprises a fixed disk (22), a rotating material ring (23) and a driver (24); the top surface of the fixed disk (22) is inwardly recessed to form an annular rotating groove (223), the rotating material ring (23) is rotatably disposed in the rotating groove (223), a plurality of the accommodating cavities (21) are circumferentially arranged on the rotating material ring (23), and the driver (24) is used to drive the rotating material ring (23) to rotate relative to the fixed disk (22).

5. The source changing device according to claim 4, characterized in that: The frame (10) comprises an upper frame plate (13), a support column (14) and a lower frame plate (16); the sub-cavity (11) is located on the upper frame plate (13); and the first through hole (12) passes through the upper frame plate (13); The support column (14) is supported between the upper frame plate (13) and the lower frame plate (16); and the fixed plate (22) is mounted on the support column (14).

6. The source changing device according to claim 5, characterized in that: The material storage platform (20) comprises a locking mechanism (28) and a connecting block (27) fixed to the peripheral side of the fixed plate (22), and the supporting column (14) is slidably disposed through the connecting block (27); The locking mechanism (28) is used to drive the fixed plate (22) to contact or separate from the upper shelf plate (13).

7. The source changing device according to claim 6, characterized in that: The locking mechanism (28) comprises a locking cylinder (281) and a telescopic rod (282) extending from the locking cylinder (281); the locking cylinder (281) is fixed on the lower frame plate (16); and the telescopic rod (282) is fixedly connected to the fixed plate (22).

8. The source changing device according to any one of claims 5 to 7, characterized in that: A second through hole (25) is formed on the bottom wall of each accommodating cavity (21); A third through hole (26) is formed on the bottom wall of the rotating groove (223) at a position corresponding to the first through hole (12); when one of the accommodating chambers (21) is connected to the sub-cavity (11), the lifting mechanism (41) can pass through the first through hole (12), the second through hole (25) and the third through hole (26) to switch between the first working position and the second working position.

9. The source changing device according to claim 8, characterized in that: The lifting mechanism (41) comprises a lifting rod (411), a lifting driving member (414) and a lifting supporting portion (415); The lifting rod (411) is telescopically arranged in the vertical direction and penetrates the third through hole (26), and the lifting drive member (414) is in driving connection with the lifting rod (411); The lifting support portion (415) is arranged at a top end of the lifting rod (411) close to the accommodating cavity (21); When the lifting rod (411) descends until the lifting support portion (415) is located in the third through hole (26), the lifting mechanism (41) is in the first working position; When the lifting rod (411) rises until the lifting support portion (415) passes through the second through hole (25) and the first through hole (12) in sequence and enters the sub-cavity (11), the lifting mechanism (41) is in the second working position.

10. The source changing device according to claim 9, characterized in that: The lifting mechanism (41) comprises a first end cover (412), a first housing (413), a first screw rod (416), a first nut (417) and a first rotating bearing (418); The first end cover (412) is arranged at the top end of the first shell (413); the first end cover (412) is sealed and covered on the third through hole (26); the lifting rod (411) is telescopically passed through the first end cover (412) in a vertical direction; The lifting rod (411) is a rod body with a hollow interior, the first nut (417) is fixed inside the lifting rod (411), the first screw rod (416) is rotatably disposed in the first housing (413) via the first rotating bearing (418), and the first screw rod (416) is rotatably connected to the first nut (417); The lifting drive member (414) can drive the first screw rod (416) to rotate forward and reverse to drive the lifting rod (411) to move up and down relative to the first shell (413).

11. The source changing device according to claim 9, characterized in that: The translation mechanism (42) comprises a translation rod (421), a translation driving member (424) and a translation supporting portion (425); The translation rod (421) is telescopically disposed in the sub-cavity (11); the translation driving member (424) is drivingly connected to the translation rod (421); The translation support portion (425) is arranged on the front end of the translation rod (421) located in the sub-cavity (11); The translation support portion (425) is formed with a notch (4251); When the translation mechanism (42) is in the third working position, the gap (4251) is capable of allowing the lifting support portion (415) to pass through.

12. The source changing device according to claim 11, characterized in that: The translation support portion (425) comprises a bottom plate (4253) and a guardrail (4252), wherein the guardrail (4252) is arranged at the edge of the bottom plate (4253) and protrudes and extends in a vertical direction, and the notch (4251) is arranged in the middle of the bottom plate (4253) and extends along the axial direction of the translation rod (421) until an open opening is formed at the edge of the bottom plate (4253).

13. The source changing device according to claim 11, characterized in that: The feeding mechanism (43) comprises a feeding rod (431), a feeding driving member (434) and a feeding supporting portion (435); A fifth through hole (17) is formed on the upper frame plate (13), the feeding rod (431) is telescopically arranged in the fifth through hole (17) in a vertical direction, and the feeding drive member (434) is drivingly connected to the feeding rod (431); The feeding support portion (435) is arranged on the top end of the feeding rod (431) located in the sub-cavity (11); When the translation mechanism (42) is in the fourth working position, the notch (4251) is capable of allowing the feeding support portion (435) to pass through; When the feeding rod (431) descends until the feeding support portion (435) is located below the translation mechanism (42), the feeding mechanism (43) is in the fifth working position; When the feeding rod (431) rises until the feeding support portion (435) is located at the opening (11a), the feeding mechanism (43) is in the sixth working position.

14. The source changing device according to claim 13, characterized in that: The notch (4251) is square, circular or oval; The lifting support portion (415) is a square plate, a circular plate or an elliptical plate; The feeding support portion (435) is a square plate, a circular plate or an elliptical plate.

15. The source changing device according to any one of claims 1 to 14, characterized in that: The source changing device comprises a gate valve mechanism (50), wherein the gate valve mechanism (50) is movably arranged on the opening (11a) of the sub-cavity (11) and is used to close an external filling door.

16. A vapor deposition device, characterized in that: It comprises a main evaporation chamber (200) and a source changing device as claimed in any one of claims 1 to 15; The main evaporation chamber (200) has a filling door, and the opening (11a) is connected to the filling door.

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