Czochralski rod taking safety protection device

Abstract

The utility model discloses a czochralski method rod taking safety protection device, and particularly relates to the field of czochralski method rod taking, the czochralski method rod taking safety protection device comprises a first supporting rod arranged on a crystal taking vehicle supporting frame, one end of the first supporting rod is fixedly connected with a supporting plate, and the two sides of the end, close to the first supporting rod, of the supporting plate are symmetrically and fixedly connected with limiting blocks; and a groove is formed in one side of the supporting plate. The first supporting rod is installed on one side of the supporting frame of the crystal taking vehicle through the threads, the installation stability of the first supporting rod is improved through the limiting block, the crystal bar passes through the middle of the stabilizing ring when the crystal bar moves downwards and does not reach the clamping hoop, and the crystal bar is stably limited through the stabilizing ring; the protection device is simple in structure and easy to implement, the condition that the crystal bar is broken, inclined and falls off to hurt people due to external force is avoided, the protection effect is improved, and higher safety is achieved under the condition that the production cost is not increased too much.

Description

Technical Field

[0001] The utility model relates to the technical field of taking a rod by a straight-pull method, and more specifically, to a safety protection device for taking a rod by a straight-pull method. Background Art

[0002] The silicon material for growing single crystal silicon by the Czochralski method is high-purity polycrystalline silicon. The commonly used preparation method is to obtain high-purity silicon powder through multiple refining, reduction and chlorination steps of silicon ore, and then prepare it into polycrystalline silicon by electric melting or thermal decomposition. The polycrystalline silicon is heated and melted to obtain silicon melt. The adjusted silicon melt is injected from the bottom of the melt chamber into the quartz crucible of the CZ furnace, and then the single crystal silicon is slowly lifted out under constant process parameters (such as pulling speed, temperature gradient, etc.). In this process, the melt is continuously heated, melted, and crystallized, and finally a single crystal silicon rod several meters long is obtained;

[0003] In the Czochralski method of producing single crystals, when the single crystal silicon rod is being taken out, the crystal support frame of the crystal rod taking vehicle needs to be moved to the bottom of the crystal rod, and the clamping clamp is located directly below the crystal rod. The crystal rod is then controlled to descend by the crystal taking mechanism until the bottom end of the crystal rod is moved to the clamping clamp, and the crystal rod is fixed by the clamping clamp to complete the crystal taking process.

[0004] However, when the crystal rod moves down and does not reach the clamping clamp, the crystal rod is generally in a suspended state, and it is easy for the crystal rod to shake due to external force, resulting in breakage, tilting, falling and injuring workers. Therefore, a safety protection device for removing the crystal rod by the direct pulling method is proposed. Utility Model Content

[0005] In order to overcome the above-mentioned defects of the prior art, the utility model provides a safety protection device for taking out a rod by a straight-pull method, so as to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a safety protection device for taking a rod by a straight-pull method, comprising a first support rod arranged on a support frame of a crystal taking vehicle, one end of the first support rod being fixedly connected to a support plate, two sides of the support plate close to one end of the first support rod being symmetrically fixedly connected to limit blocks, one side of the support plate being provided with a groove, the middle part of the groove being provided with a second support rod, one end of the second support rod being fixedly connected to a stabilizing ring;

[0007] Through holes are symmetrically formed on both sides of one end of the support plate close to the limit block, a connecting hole is formed on one end of the second support rod away from the stabilizing ring, and a latch is inserted in the middle of the through hole.

[0008] Preferably, a thread is provided on the outer surface of one end of the first support rod away from the support plate.

[0009] Preferably, the latch pin is matched with the through hole, the through hole and the connecting hole have the same diameter, and the latch pin passes through the middle of the through hole and the connecting hole.

[0010] Preferably, the second support rod is matched with the groove, and the stabilizing ring is arranged at an end of the support plate away from the first support rod.

[0011] Preferably, the diameter of the first support rod is matched with the mounting hole on the wafer retrieval vehicle support frame.

[0012] Preferably, the limit blocks are arranged on both sides of the first support rod close to one end of the support plate.

[0013] Preferably, the maximum rotation angle of the second support rod about the latch pin is ninety degrees.

[0014] Technical effects and advantages of the utility model:

[0015] 1. The utility model firstly installs the first support rod on one side of the support frame of the crystal retrieval vehicle through a thread, and improves the installation stability of the first support rod through a limit block, so that when the crystal rod is moving downward and the crystal rod has not reached the clamping clamp, the crystal rod is passed through the middle of the stabilizing ring, and the crystal rod is stably limited by the stabilizing ring to avoid the crystal rod being broken, tilted, and falling due to external force, thereby improving the protection effect. The structure of the protective device is simple and easy to implement, and higher safety is achieved without increasing too much production cost.

[0016] 2. The utility model also connects the second support rod with the support plate through a latch, so that when the second support rod and the stabilizing ring are not in use, the second support rod drives the stabilizing ring to rotate 90 degrees with the latch as the axis to retract the stabilizing ring, thereby ensuring sufficient lifting space and facilitating use. The groove can improve the stability of the second support rod and the stabilizing ring, improve the use effect, and can replace stabilizing rings of different sizes by disassembling the latch, thereby improving practicality.

[0017] In summary, through the mutual influence of the above-mentioned multiple effects, the crystal rod can pass through the middle of the stabilizing ring when it moves down and fails to reach the clamping clamp, and the crystal rod can be stably limited by the stabilizing ring to prevent the crystal rod from breaking, tilting, falling and injuring people due to external force, thereby improving the protection effect. The structure is simple and easy to implement, and higher safety is achieved without increasing production costs too much. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0019] Figure 2 It is a schematic diagram of the expanded structure of the utility model.

[0020] Figure 3 It is a schematic diagram of the connection structure between the first support rod and the support plate of the utility model.

[0021] Figure 4 It is a structural schematic diagram of the stabilizing ring of the utility model.

[0022] The figures are marked as follows: 1. first support rod; 2. support plate; 3. limit block; 4. groove; 5. through hole; 6. second support rod; 7. stabilizing ring; 8. connecting hole; 9. pin; 10. thread. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] As attached Figure 1-4 The device for preventing the crystal rod from being swayed by the lifting device is provided with a first support rod 1 and a second support rod 2 is provided on the support frame of the crystal rod swaying vehicle. The first support rod 1 is conveniently installed on the support frame of the crystal rod swaying vehicle, and multiple support rods can be installed as needed. One end of the first support rod 1 is fixedly connected to a support plate 2, and the support plate 2 is symmetrically fixedly connected to a limiting block 3 on both sides of one end of the support plate 2 close to the first support rod 1. A groove 4 is provided on one side of the support plate 2, and a second support rod 6 is provided in the middle of the groove 4. The second support rod 6 is located inside the groove 4, and the second support rod 6 and the stabilizing ring 7 can be supported by the first support rod 1 and the support plate 2, and the second support rod 6 can be rotated to be perpendicular to the support plate 2 to ensure sufficient crystal rod lifting space without affecting the normal crystal removal process of the crystal rod. One end of the second support rod 6 is fixedly connected to a stabilizing ring 7, so that the crystal can pass through the stabilizing ring 7 when the crystal rod does not reach the clamping clamp during the crystal removal process. The stabilizing ring 7 can assist in limiting the crystal, so as to avoid the situation where the crystal rod is broken, tilted, and falls and injures people due to external force, thereby improving the protection effect.

[0025] Through holes 5 are symmetrically provided on both sides of one end of the support plate 2 close to the limit block 3, a connecting hole 8 is provided on the end of the second support rod 6 away from the stabilizing ring 7, and a latch 9 is inserted in the middle of the through hole 5. By cooperating with the through hole 5 and the connecting hole 8 and inserting the latch 9 into the through hole 5 and the connecting hole 8, the second support rod 6 and the support plate 2 can be conveniently connected, and the relative position of the stabilizing ring 7 on the support plate 2 can be adjusted as needed, so that the position of the stabilizing ring 7 can be conveniently rotated and adjusted.

[0026] As attached Figure 1-3As shown, a thread 10 is provided on the outer surface of one end of the first support rod 1 away from the support plate 2 , and the thread 10 is used to facilitate the installation of the first support rod 1 on the support frame of the wafer retrieval vehicle.

[0027] As attached Figure 1-4 As shown, the latch 9 is matched with the through hole 5, the through hole 5 and the connecting hole 8 have the same diameter, the latch 9 passes through the middle of the through hole 5 and the connecting hole 8, and the latch 9 passes through the connecting hole 8 and the through hole 5, so that the second support rod 6 and the support plate 2 are connected conveniently, and the second support rod 6 is conveniently rotated.

[0028] As attached Figure 1 , 2 As shown, the second support rod 6 is matched with the groove 4, and the stabilizing ring 7 is arranged at the end of the support plate 2 away from the first support rod 1. The second support rod 6 is limited by the groove 4 so that the second support rod 6 can be rotated and adjusted.

[0029] As attached Figure 1 As shown, the diameter of the first support rod 1 is matched with the mounting hole on the support frame of the crystal retrieval vehicle, so as to facilitate the installation and fixation of the protective device.

[0030] As attached Figure 1-3 As shown, the limit blocks 3 are arranged on both sides of the first support rod 1 close to one end of the support plate 2. Through the limit blocks 3, when the first support rod 1 is installed on the crystal retrieval vehicle support frame, the limit blocks 3 can squeeze the corresponding wall of the crystal retrieval vehicle support frame, thereby improving the installation stability and installation strength of the first support rod 1, and at the same time preventing the first support rod 1 from rotating during use, thereby improving the stability of the installation position of the stabilizing ring 7, preventing the stabilizing ring 7 from tilting, and improving the installation and use effect.

[0031] As attached Figure 1-2 As shown, the second support rod 6 can rotate at a maximum angle of ninety degrees with the latch pin 9 as the axis. When not in use, the stabilizing ring 7 and the second support rod 6 can be rotated ninety degrees to make the second support rod 6 and the support plate 2 vertical, thereby retracting the stabilizing ring 7 to ensure sufficient space for the crystal rod to be lifted and lowered, and facilitating the deployment of the stabilizing ring 7, providing position-limiting protection for the crystal rod, and improving the use effect.

[0032] Working principle of the utility model: when in use, the first support rod 1 is installed on the upper end of the crystal retrieval vehicle support frame through the thread 10, and the stability of the installation of the first support rod 1 is improved by the limit block 3 to prevent the stabilizing ring 7 from rotating during use. Multiple protective devices can be installed as needed to increase the protective effect;

[0033] When not in use, the stabilizing ring 7 and the second support rod 6 are rotated 90 degrees with the latch 9 as the axis, so that the stabilizing ring 7 is retracted, thereby ensuring sufficient lifting space for the wafer retrieval vehicle support frame;

[0034] When the crystal rod needs to be protected, the second support rod 6 is rotated so that the second support rod 6 is located inside the groove 4. When the crystal rod moves downward and does not reach the clamping clamp, the crystal passes through the stabilizing ring 7. The stabilizing ring 7 assists in limiting the crystal to prevent the crystal rod from breaking, tilting, falling and injuring people due to external force, thereby improving the protection effect.

[0035] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A safety protection device for obtaining a rod by a direct pulling method, comprising a first support rod (1) arranged on a support frame of a wafer obtaining vehicle, characterized in that: One end of the first support rod (1) is fixedly connected to a support plate (2); two sides of one end of the support plate (2) close to the first support rod (1) are symmetrically fixedly connected to limit blocks (3); one side of the support plate (2) is provided with a groove (4); a second support rod (6) is arranged in the middle of the groove (4); one end of the second support rod (6) is fixedly connected to a stabilizing ring (7); Through holes (5) are symmetrically formed on both sides of one end of the support plate (2) close to the limit block (3), a connecting hole (8) is formed on one end of the second support rod (6) away from the stabilizing ring (7), and a latch (9) is inserted in the middle of the through hole (5).

2. A safety protection device for taking out rods by straight pulling method according to claim 1, characterized in that: A thread (10) is provided on the outer surface of one end of the first support rod (1) away from the support plate (2).

3. A safety protection device for taking out rods by straight pulling method according to claim 1, characterized in that: The latch pin (9) is matched with the through hole (5); the through hole (5) and the connecting hole (8) have the same diameter; and the latch pin (9) passes through the middle of the through hole (5) and the connecting hole (8).

4. A safety protection device for taking out rods by straight pulling method according to claim 1, characterized in that: The second support rod (6) is matched with the groove (4), and the stabilizing ring (7) is arranged at an end of the support plate (2) away from the first support rod (1).

5. A safety protection device for taking out rods by straight pulling method according to claim 1, characterized in that: The diameter of the first support rod (1) is adapted to the mounting hole on the support frame of the crystal retrieval vehicle.

6. A safety protection device for taking out rods by straight pulling method according to claim 1, characterized in that: The limit blocks (3) are arranged on both sides of the first support rod (1) close to one end of the support plate (2).

7. A safety protection device for taking out rods by straight pulling method according to claim 1, characterized in that: The second support rod (6) can rotate at a maximum angle of ninety degrees with the latch pin (9) as the axis.

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