Auxiliary device for feeding of single crystal furnace

Abstract

The utility model belongs to the technical field of semiconductor manufacturing, and relates to an auxiliary device for feeding of a single crystal furnace, which comprises a movable vehicle body, the rotating disc is rotatably arranged on the vehicle body and is connected with a feeder through a supporting part; the limiting piece is arranged between the rotating disc and the vehicle body and used for limiting rotation of the rotating disc; and the reinforcing assembly is arranged between the rotating disc and the feeder and is used for fixing the feeder. The feeding device has the beneficial effects that the rotating disc rotationally connected with the vehicle body is arranged, and the feeder is rotated to the lower part of the re-throwing hook, so that a barrel erecting step is omitted, the manual operation intensity of personnel is greatly reduced, and meanwhile, manual contact and impurity influence on crystal formation are avoided; the containing grooves in the supporting parts are matched with the through holes in the reinforcing plates, and it is guaranteed that inclination or collision cannot occur in the transportation process; by arranging the limiting piece, rapid re-feeding is facilitated, and the working hour utilization rate is effectively increased.

Description

Technical Field

[0001] The utility model belongs to the technical field of single crystal silicon production equipment and relates to an auxiliary device for charging a single crystal furnace. Background Art

[0002] At present, single crystal furnaces need to be re-charged, that is, repeated charging, to increase production and reduce costs. If manual charging is adopted, it will not only be inefficient, but also bring in a lot of impurities, affecting the crystallization rate and production capacity, and causing pollution to polysilicon. In production, a circular tubular feeder is generally used for re-charging. The circular tubular feeder needs to be placed on a transport vehicle and transported to the single crystal furnace charging point. During this process, manual assistance is required to tilt or upright the feeder, which is not only inconvenient to operate and wastes a lot of labor, but also the feeder has poor stability during repeated tilting and uprighting, and is easy to overturn, posing a safety hazard. Therefore, an auxiliary device for charging a single crystal furnace is needed to solve the above technical problems. Utility Model Content

[0003] In order to solve the above-mentioned technical problems, the utility model provides an auxiliary device for charging a single crystal furnace, which eliminates the step of vertical drum during recharging, can reduce the manual operation intensity of personnel, save working hours, improve recharging efficiency, and thus increase production.

[0004] The technical solution adopted by the utility model is: an auxiliary device for charging a single crystal furnace, which can be used for transporting a feeder, comprising:

[0005] A movable vehicle body;

[0006] A rotating disk, which is rotatably disposed on the vehicle body and connected to the feeder via a supporting portion;

[0007] A limiting member, disposed between the rotating disk and the vehicle body, for limiting the rotation of the rotating disk;

[0008] A reinforcing assembly is arranged between the rotating disk and the feeder and is used for fixing the feeder.

[0009] Furthermore, the supporting portion is a circular boss on which a plurality of accommodating grooves are evenly arranged for placing the feeder.

[0010] Furthermore, the number of the containing tanks is the same as the number of the feeders, and support bars made of polytetrafluoroethylene are provided inside the containing tanks.

[0011] Furthermore, the reinforcement assembly includes a reinforcement plate and a reinforcement rod, the reinforcement plate is vertically arranged with respect to the feeder and is connected with the rotating disk via the reinforcement rod.

[0012] Furthermore, the reinforcing rod is arranged parallel to the feeder, and its length is adjustable.

[0013] Furthermore, the reinforcing plate is provided with a through hole for the feeder to pass through, and the through hole can be opened.

[0014] Furthermore, a reinforcing plate is provided on one side and / or both sides of the through hole, and the reinforcing plate is arranged perpendicular to the reinforcement plate.

[0015] Furthermore, a hanging ring is provided on the top of the feeder.

[0016] Furthermore, a plurality of sets of casters are provided at the bottom of the vehicle body to drive the vehicle body to move.

[0017] Furthermore, the limiting member is a pin shaft, which passes through the rotating disk and then is inserted into the vehicle body.

[0018] The utility model is designed to provide an auxiliary device for feeding a single crystal furnace. A rotating disk connected to a vehicle body is provided to rotate the feeder to the re-feed hook, eliminating the step of vertical barrel, greatly reducing the manual operation intensity of personnel, saving working hours, improving re-feed efficiency and increasing output, while avoiding manual contact and preventing impurities from affecting crystal formation; the receiving groove on the support part cooperates with the through hole on the reinforcement plate to achieve vertical stable reinforcement of the feeder, ensuring that there will be no tilting or collision during transportation, causing losses; a limiter is provided to ensure that the rotating disk and the vehicle body are relatively fixed during the re-feeding process, facilitating rapid re-feeding and effectively improving the utilization rate of working hours. The auxiliary device can also be connected to the master control system, which controls the movement of the vehicle body, as well as the rotation direction and rotation angle of the rotating disk, without the need to modify the existing structure, to achieve automated operation and improve the degree of automation. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of an embodiment provided by the utility model.

[0020] Figure 2 This is a top view of the embodiment provided by the utility model when the through-hole parts are all closed;

[0021] Figure 3 This is a top view of the through hole of the embodiment provided by the utility model when it is partially opened:

[0022] In the figure:

[0023] 1. Car body; 2. Rotating plate; 3. Support part; 4. Feeder; 5. Stopper; 6. Reinforcement assembly; 61. Reinforcement plate; 62. Reinforcement rod; 63. DETAILED DESCRIPTION

[0024] The utility model is further described below in conjunction with the accompanying drawings and specific embodiments.

[0025] like Figure 1 As shown, an auxiliary device for charging a single crystal furnace can be used to transport a feeder 4, including a vehicle body 1, a rotating disk 2, a supporting portion 3, a limiter 5 and a reinforcing assembly 6. A plurality of casters 11 are provided at the bottom of the vehicle body 1, and a foot brake is provided on the caster 11 to drive the vehicle body 1 to move. When recharging is required, the feeder is placed under the recharging hook, and the foot brake is stepped on to prevent the vehicle body from moving, thereby ensuring the normal progress of the recharging process.

[0026] A rotating disk 2 is provided on the top of the vehicle body 1, and the rotating disk 2 can be driven to rotate. In this embodiment, a motor is provided on the vehicle body 1, and the output shaft of the motor is connected to the rotating disk. The rotating disk is driven to rotate by the motor, and the rotation direction and angle can be controlled. A support portion 3 is provided on the top of the rotating disk 2, and a plurality of inwardly recessed receiving grooves are provided on the support portion 3 for carrying a feeder 4. The bottom of the feeder 4 is inserted into the receiving groove on the support portion 3, and the other end of the feeder 4 passes through a reinforcing plate 61, and the reinforcing plate 61 is fixed to the rotating disk 2 by a plurality of reinforcing rods 62.

[0027] The center of the rotating disk 2 and the center of the supporting part 3 are located on the same center line. When the load of the trolley increases, that is, the number of feeders 4 increases, the stability of the vehicle body 1 can still be guaranteed. All feeders 4 are placed vertically, which effectively solves the vertical barrel work steps of personnel, liberates labor, and effectively improves the utilization rate of working hours.

[0028] A hanging ring 41 is provided on the top of the feeder 4. When re-feeding, the vertical tube link is omitted. The feeder transported by the vehicle body 1 is directly hooked through the re-feeding hook of the single crystal furnace and enters the sub-chamber of the single crystal furnace for feeding, which greatly reduces the manual operation intensity of personnel, saves working hours, improves re-feeding efficiency, and increases production. At the same time, it avoids manual contact and prevents impurities from affecting crystal formation.

[0029] The reinforcement assembly 6 includes a reinforcement plate 61 and a reinforcement rod 62. In this embodiment, Figure 2 As shown, the reinforcing plate 61 is a circular structure, on which a plurality of through holes 63 are evenly arranged, and reinforcing plates 64 are arranged on the upper and lower sides of the through holes 63. The center of the through hole 63 where the same feeder 4 is located and the center of the receiving slot are located on the same center line, so that the feeder 4 can be transported upright, saving time and effort, and no manual assistance is required to ensure the uprightness of the feeder. In addition, Figure 3 As shown, each through hole 63 can be opened or partially opened. Of course, the corresponding receiving groove can also be opened laterally. The switches can be set on the same side, which is convenient for replacing or increasing the number of feeders 4 at any time, which is more flexible and highly adaptable.

[0030] A plurality of reinforcing rods 62 are provided circumferentially at the bottom of the reinforcing plate 61 to provide stable support for the reinforcing plate 61. The length of the reinforcing rod 62 is adjustable. The reinforcing rod 62 is arranged parallel to the feeder 4 and perpendicular to the reinforcing plate 61. The lifting height of the reinforcing rod 62 is adjusted according to the actual height of the feeder 4 to ensure stability during transportation. Of course, a plurality of reinforcing plates 61 can also be arranged in parallel on the reinforcing rod 62, which is not specifically limited here.

[0031] The through hole 63 located on the same center line cooperates with the receiving groove on the support part to achieve stable reinforcement of the feeder 4 and effectively prevent the feeder 4 from tilting or colliding. The through hole 63 and the inner side of the receiving groove are provided with support strips made of polytetrafluoroethylene material. Of course, support strips can also be provided on the surface where the feeder 4 contacts the through hole 63 to achieve relative fixation of the feeder 4, ensure that the feeder 4 is subjected to stable supporting force during transportation, remain relatively stable, and reduce the safety risk of tipping over.

[0032] The limiter 5 is a pin, which penetrates the rotating disk 2 and then is inserted into the vehicle body 1. In this embodiment, an annular groove is provided on the top of the vehicle body 1. When re-feeding, the pin is inserted and the foot brake is stepped on to fix the vehicle body and the mutual fixation between the rotating disk 2 and the vehicle body 1 to ensure the stable progress of the re-feeding process. When the feeder 4 next to it is needed, the pin is pulled out, and the rotating disk 2 is rotated so that the hanging ring 41 is located directly below the re-feeding hook. The feeder 4 is brought into the auxiliary chamber of the single crystal furnace through the re-feeding hook for re-feeding operation. Multiple feeders 4 are transported at the same time, which increases the load capacity of the vehicle body 1, liberates labor, and effectively improves the utilization rate of working hours.

[0033] Embodiment 1:

[0034] Reference Figure 1 As shown, an auxiliary device for charging a single crystal furnace can be used to transport a feeder 4, comprising: a movable vehicle body 1; a rotating disk 2, which is rotatably arranged on the vehicle body 1 and is connected to the feeder 4 via a supporting portion 3; a limiting member 5, which is arranged between the rotating disk 2 and the vehicle body 1 and is used to limit the rotation of the rotating disk 2; a reinforcing component 6, which is arranged between the rotating disk 2 and the feeder 4 and is used to fix the feeder 4.

[0035] The support part 3 is a circular boss, on which a plurality of receiving grooves are evenly arranged for placing the feeder 4. The number of the receiving grooves 31 is the same as the number of the feeder 4, and a support strip made of polytetrafluoroethylene is arranged inside the receiving grooves.

[0036] The reinforcement assembly 6 includes a reinforcement plate 61 and a reinforcement rod 62 . The reinforcement plate 61 is vertically arranged with respect to the feeder 4 and is connected with the rotating disk 2 via the reinforcement rod 62 .

[0037] The reinforcing rod 62 is arranged parallel to the feeder 4, and its length is adjustable.

[0038] The reinforcing plate 61 is provided with a through hole 63 for the feeder 4 to pass through, and the through hole 63 can be opened.

[0039] A reinforcing plate 64 is disposed on one side and / or both sides of the through hole 63 , and the reinforcing plate 64 is disposed perpendicular to the reinforcement plate 61 .

[0040] A hanging ring 41 is provided on the top of the feeder 4 .

[0041] A plurality of casters 11 are provided at the bottom of the vehicle body 1 to drive the vehicle body 1 to move. The stopper 5 is a pin which penetrates the rotating disk 2 and is then inserted into the vehicle body 1 .

[0042] The utility model is designed to provide an auxiliary device for feeding a single crystal furnace. A rotating disk connected to a vehicle body is provided to rotate the feeder to the re-feed hook, eliminating the step of vertical barrel, greatly reducing the manual operation intensity of personnel, saving working hours, improving re-feed efficiency and increasing output, while avoiding manual contact and preventing impurities from affecting crystal formation; the receiving groove on the support part cooperates with the through hole on the reinforcement plate to achieve vertical stable reinforcement of the feeder, ensuring that there will be no tilting or collision during transportation, causing losses; a limiter is provided to ensure that the rotating disk and the vehicle body are relatively fixed during the re-feeding process, facilitating rapid re-feeding and effectively improving the utilization rate of working hours. The auxiliary device can also be connected to the master control system, which controls the movement of the vehicle body, as well as the rotation direction and rotation angle of the rotating disk, without the need to modify the existing structure, to achieve automated operation and improve the degree of automation.

[0043] The above is a detailed description of the embodiments of the utility model, but the contents are only preferred embodiments of the utility model and cannot be considered to limit the scope of implementation of the utility model. All equivalent changes and improvements made within the scope of application of the utility model should still fall within the scope of the patent coverage of the utility model.

Claims

1. An auxiliary device for charging a single crystal furnace, which can be used for transporting a feeder, characterized in that: include: A movable vehicle body; A rotating disk, which is rotatably disposed on the vehicle body and connected to the feeder via a supporting portion; A limiting member, disposed between the rotating disk and the vehicle body, for limiting the rotation of the rotating disk; A reinforcing assembly is arranged between the rotating disk and the feeder and is used for fixing the feeder.

2. The auxiliary device for charging a single crystal furnace according to claim 1, characterized in that: The supporting part is a circular boss on which a plurality of accommodating grooves are evenly arranged for placing the feeder.

3. The auxiliary device for charging a single crystal furnace according to claim 2, characterized in that: The number of the containing tanks is the same as the number of the feeders, and a supporting strip made of polytetrafluoroethylene is arranged inside the containing tanks.

4. The auxiliary device for charging a single crystal furnace according to any one of claims 1 to 3, characterized in that: The reinforcement assembly comprises a reinforcement plate and a reinforcement rod. The reinforcement plate is vertically arranged with respect to the feeder and is connected with the rotating disk via the reinforcement rod.

5. The auxiliary device for charging a single crystal furnace according to claim 4, characterized in that: The reinforcing rod is arranged in parallel with the feeder, and the length of the reinforcing rod is adjustable.

6. The auxiliary device for charging a single crystal furnace according to claim 4, characterized in that: The reinforcing plate is provided with a through hole for the feeder to pass through, and the through hole can be opened.

7. The auxiliary device for charging a single crystal furnace according to claim 6, characterized in that: A reinforcing plate is provided on one side and / or both sides of the through hole, and the reinforcing plate is arranged perpendicular to the reinforcement plate.

8. The auxiliary device for charging a single crystal furnace according to any one of claims 5 to 6, characterized in that: A hanging ring is arranged on the top of the feeder.

9. The auxiliary device for charging a single crystal furnace according to claim 1, characterized in that: A plurality of casters are arranged at the bottom of the vehicle body to drive the vehicle body to move.

10. The auxiliary device for charging a single crystal furnace according to claim 1, characterized in that: The limiting member is a pin shaft, which passes through the rotating disk and then is inserted into the vehicle body.

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