MEMS radio device and MEMS microphone
By setting movable chokes in the MEMS radio device, the problem of inaccurate sound recognition of MEMS microphone in wind noise environment is solved, and effective reduction of wind noise and improvement of audio clarity is achieved.
Patent Information
- Application Number
- CN202420306728.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-19
- Publication Date
- 2025-03-21
- Estimated Expiration
- 2034-02-19
AI Technical Summary
MEMS microphones are susceptible to wind noise in high wind noise environments, resulting in inaccurate sound recognition and affecting usage performance.
A MEMS radio device is designed, which includes a movable choke, which is pushed by the airflow through the choke, converting the airflow energy into kinetic energy, thereby reducing the airflow energy and reducing the influence of wind noise.
It effectively reduces the impact of wind noise on MEMS radio device, improves the clarity of normal audio, and improves the audio quality.
Smart Images
Figure CN222655325U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of sound receiving devices, and in particular to a MEMS sound receiving device and a MEMS microphone. Background Art
[0002] MEMS (micro-electromechanical system) microphones are microphones manufactured based on MEMS technology. The specific structure is to integrate a capacitor on a micro silicon chip. It can be manufactured using a surface mount process. Its micro-capacitor head includes a silicon diaphragm and a silicon back electrode for receiving sound. The silicon diaphragm can directly receive the audio signal, and then after the audio signal is converted to electricity, the sound can be recognized by reading the electrical signal. In this way, when the MEMS microphone is in a windy environment, the silicon diaphragm will vibrate due to the wind, resulting in a large wind noise when recognizing the sound, and may even fail to accurately recognize the audio signal to be received, affecting the performance of the MEMS microphone. Utility Model Content
[0003] The main purpose of the utility model is to provide a MEMS sound receiving device and a MEMS microphone, aiming to reduce the influence of wind noise on the sound receiving quality of the MEMS sound receiving device.
[0004] To achieve the above object, the utility model provides a MEMS sound receiving device, wherein the MEMS sound receiving device comprises:
[0005] The main body is provided with a sound receiving hole; and
[0006] The noise reduction structure comprises a wind blocking member movably arranged at the sound receiving hole, wherein the wind blocking member is used to be pushed by the airflow and reduce the energy of the airflow passing through the sound receiving hole.
[0007] Optionally, the wind blocking member includes a rotatable wind blocking blade.
[0008] Optionally, a plurality of the choke blades are provided, and the plurality of choke blades are coaxially arranged.
[0009] Optionally, the noise reduction structure comprises a turbine, and the turbine comprises a plurality of coaxially arranged choke blades.
[0010] Optionally, a damper is provided at the rotating shaft of the turbine.
[0011] Optionally, the sound receiving hole is located in the axial direction of the turbine; or,
[0012] The sound receiving hole is located in the radial direction of the turbine.
[0013] Optionally, the turbine further comprises a casing, wherein the casing is located at the periphery of the plurality of choke blades.
[0014] Optionally, the sound receiving hole is located in the radial direction of the turbine, and an air inlet and an air outlet are provided on the shell, and the air outlet is arranged corresponding to the sound receiving hole.
[0015] Optionally, the MEMS sound receiving device further includes a substrate, the main body is fixed to one side of the substrate, and the substrate is provided with a via hole, the via hole forming the sound receiving hole.
[0016] The utility model also proposes a MEMS microphone, wherein the MEMS microphone includes a MEMS sound receiving device, the MEMS sound receiving device includes a main body and a noise reduction structure, the main body is provided with a sound receiving hole; the noise reduction structure includes a wind blocking member movably arranged at the sound receiving hole, the wind blocking member is used to be pushed by the airflow and reduce the airflow energy passing through the sound receiving hole.
[0017] In the technical solution of the utility model, the wind blocking member is provided at the corresponding sound receiving hole of the main body of the MEMS sound receiving device, so as to utilize the structural characteristics of the wind blocking member being movable, and when being pushed by the airflow, the airflow energy is converted into the kinetic energy of the wind blocking member, thereby reducing the airflow energy passing through the sound receiving hole. It can be understood that the normal audio vibration that the MEMS sound receiving device needs to pick up must be smaller than the vibration caused by the wind noise airflow. In order to avoid the vibration caused by the wind noise airflow affecting or even covering the normal audio vibration picked up by the MEMS sound receiving device, resulting in poor sound quality or even abnormal sound reception, the present application mainly reduces the airflow energy passing through the sound receiving hole by providing the noise reduction structure, i.e., the wind blocking member, so as to reduce the wind noise generated after the airflow is picked up by the MEMS sound receiving device, improve the clarity of the normal audio picked up, thereby improving the sound quality of the MEMS sound receiving device, and meeting the wind noise reduction requirements of the MEMS sound receiving device. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.
[0019] Figure 1 A schematic plan view of a first embodiment of a MEMS sound receiving device provided by the utility model;
[0020] Figure 2 This is a schematic plan view of a second embodiment of the MEMS sound receiving device provided by the utility model.
[0021] Description of Figure Numbers:
[0022] Label name Label name 100 MEMS sound receiving device 213 case 1 main body 213a Air Inlet 11 Sound hole 213b Air outlet 2 Noise reduction structure 3 substrate 21 turbine 31 Vias 211 Wind-blocking blade 4 Wind blocking parts 212 Damper
[0023] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION
[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0025] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.
[0026] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the meaning of "and / or" appearing in the full text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the utility model.
[0027] MEMS (micro-electromechanical system) microphones are microphones manufactured based on MEMS technology. The specific structure is to integrate a capacitor on a micro silicon chip. It can be manufactured using a surface mount process. Its micro-capacitor head includes a silicon diaphragm and a silicon back electrode for receiving sound. The silicon diaphragm can directly receive the audio signal, and then after the audio signal is converted to electricity, the sound can be recognized by reading the electrical signal. In this way, when the MEMS microphone is in a windy environment, the silicon diaphragm will vibrate due to the wind, resulting in a large wind noise when recognizing the sound, and may even fail to accurately recognize the audio signal to be received, affecting the performance of the MEMS microphone.
[0028] In view of this, the utility model provides a MEMS sound receiving device. Figure 1 to Figure 2 The embodiment of the MEMS sound receiving device provided by the present invention will be described below with reference to specific drawings.
[0029] See also Figure 1 to Figure 2 The MEMS sound receiving device includes a main body 1 and a noise reduction structure 2, wherein the main body 1 is provided with a sound receiving hole 11; the noise reduction structure 2 includes a wind blocking member 4 movably arranged at the sound receiving hole 11, and the wind blocking member 4 is used to be pushed by the airflow and reduce the airflow energy passing through the sound receiving hole 11.
[0030] In the technical solution of the utility model, the air blocking member 4 is provided at the sound receiving hole 11 of the main body 1 of the MEMS sound receiving device, so as to utilize the structural characteristics of the movable air blocking member 4 to convert the air flow energy into the kinetic energy of the air blocking member 4 when pushed by the air flow, thereby reducing the air flow energy passing through the sound receiving hole 11. It can be understood that the normal audio vibration that the MEMS sound receiving device needs to pick up must be smaller than the vibration caused by the wind noise air flow. In order to avoid the vibration caused by the wind noise air flow affecting or even covering the normal audio vibration picked up by the MEMS sound receiving device, resulting in poor sound quality or even abnormal sound reception, the present application mainly reduces the air flow energy passing through the sound receiving hole 11 by providing the noise reduction structure 2, i.e., the air blocking member 4, so as to reduce the wind noise generated after the air flow is picked up by the MEMS sound receiving device, improve the clarity of the normal audio picked up, thereby improving the sound quality of the MEMS sound receiving device, and meeting the wind noise reduction requirements of the MEMS sound receiving device.
[0031] It can be understood that the noise reduction structure 2 can reduce the airflow energy passing through the sound receiving hole 11 in many ways, including but not limited to restricting the airflow into the sound receiving hole 11, setting an energy-consuming structure to consume the airflow energy, etc., which can achieve the reduction of airflow energy and reduce the impact on the MEMS sound receiving device receiving normal audio signals. No limitation is made here, and the present application mainly proposes to set the structure of the wind blocking member 4 to achieve the above function.
[0032] Specifically, the wind blocking member 4 includes a rotatable wind blocking blade 211. It should be noted here that the wind blocking member 4 cannot completely block the sound receiving hole 11, so as to avoid the wind blocking member 4 blocking normal audio vibration from being received by the MEMS sound receiving device from the sound receiving hole 11. Therefore, in the present application, the wind blocking member 4 is set as the rotatable wind blocking blade 211, and its moving path is controllable when pushed by airflow, which is more convenient for structural setting on the basis of meeting the above requirements. According to the characteristic that the wind-blocking blade 211 can be rotatably arranged, when there is airflow at the sound receiving hole 11, the airflow acts on the wind-blocking blade 211 to push the wind-blocking blade 211 to rotate. In this process, on the one hand, the wind-blocking blade 211 is located at the sound receiving hole 11 and can directly block part of the airflow from flowing into the sound receiving hole 11. On the other hand, when the wind-blocking blade 211 is rotated by the wind, the airflow energy is converted into the power of the wind-blocking blade 211, thereby reducing the energy of the airflow. In summary, the wind-blocking blade 211 arranged at the sound receiving hole 11, on the one hand, restricts the airflow from flowing into the sound receiving hole 11, and on the other hand, consumes the airflow energy. In this way, the functional requirement of the noise reduction structure 2 to reduce the airflow energy passing through the sound receiving hole 11 is met, and the influence on the normal audio vibration received by the MEMS sound receiving device is relatively small, thereby realizing the noise reduction function of the MEMS sound receiving device.
[0033] Furthermore, the wind-blocking blades 211 are provided in plurality, and the plurality of wind-blocking blades 211 are coaxially arranged. To meet the noise reduction requirements, the number of the wind-blocking blades 211 can be set to be multiple, so as to increase the consumption of the airflow energy by the noise reduction structure 2, and the wind-blocking blades 211 corresponding to the sound receiving holes 11 can achieve the above function, but compared with setting a plurality of rotating shafts to carry the wind-blocking blades 211 respectively, setting only one rotating shaft to carry the plurality of wind-blocking blades 211 is less costly and more convenient for structural arrangement, so in the present application, the plurality of wind-blocking blades 211 are coaxially arranged.
[0034] Furthermore, the noise reduction structure 2 includes a turbine 21, and the turbine 21 includes a plurality of wind-blocking blades 211, and the turbine 21 includes a plurality of coaxially arranged wind-blocking blades 211. Based on the above description, the number and arrangement form of the wind-blocking blades 211 are not limited, and the above-mentioned effects of blocking airflow and reducing airflow energy can be achieved. In this embodiment, the noise reduction structure 2 is directly set as the turbine 21, and the turbine 21 is correspondingly provided with a plurality of wind-blocking blades 211, and the plurality of wind-blocking blades 211 rotate in the same rotation plane. Its structure is mature and stable, easy to manufacture, low cost and good effect.
[0035] In addition, a damper 212 is provided at the rotating shaft of the turbine 21. It is understandable that when the airflow energy is converted into the rotational kinetic energy of the turbine 21 by the turbine 21, its kinetic energy consumption is slow, and the turbine 21 rotates for a long time, which will inevitably have a certain impact on the sound reception of the MEMS sound receiving device during rotation. If the friction between the choke blade 211 and the rotating shaft is increased during rotation, the kinetic energy of the choke blade 211 is consumed by friction, and the function of improving the kinetic energy consumption of the turbine 21 can be achieved to accelerate the transfer and consumption of airflow energy. However, this method will obviously increase the wear of the choke blade 211 and the rotating shaft, affecting the service life. Therefore, in this embodiment, the damper 212 is provided at the rotating shaft of the turbine 21, so that the kinetic energy of the rotation of the turbine 21 is consumed by the damper 212, so that the kinetic energy is converted into internal energy, and then exported through the heat conduction structure, which can avoid the above problems and has a good energy consumption effect. Of course, the specific location and form of the damper 212 are not limited. It can be set at the shaft of the turbine 21 as in the present embodiment, or it can be set between the wind-blocking blade 211 and other adjacent structures, depending on the specific structure and usage requirements of the MEMS sound receiving device.
[0036] Further, the sound receiving hole 11 is located in the axial direction of the turbine 21; or, the sound receiving hole 11 is located in the radial direction of the turbine 21. It can be understood that the positional relationship between the turbine 21 and the sound receiving hole 11 can also be multiple, as long as the above energy consumption requirements can be achieved. Two embodiments are mainly given in this application. In the first embodiment, the axial direction of the turbine 21 extends toward the sound receiving hole 11, so that the turbine 21 is attached to the end surface where the sound receiving hole 11 is located; in the second embodiment, the axial direction of the turbine 21 is perpendicular to the extension direction of the sound receiving hole 11, so that the sound receiving hole 11 is located in the radial direction of the turbine 21. Both of them can achieve the required functions. The specific setting method is mainly based on actual needs and is not limited here.
[0037] In addition, the turbine 21 also includes a housing 213, and the housing 213 is located outside the plurality of wind-blocking blades 211. The turbine 21 includes the housing 213 disposed outside the wind-blocking blades 211, which can protect the wind-blocking blades 211 on the one hand, and is suitable for arranging a damper 212 between the housing 213 and the wind-blocking blades 211 on the other hand. On the other hand, the housing 213 can play a certain wind-blocking effect, blocking the airflow from the outside of the housing 213 into the inside of the housing 213 and flowing through the sound receiving hole 11, thereby indirectly improving the wind noise reduction performance.
[0038] Furthermore, the sound receiving hole 11 is located in the radial direction of the turbine 21, and the housing 213 is provided with an air inlet 213a and an air outlet 213b, and the air outlet 213b is arranged corresponding to the sound receiving hole 11. When the sound receiving hole 11 is arranged in the axial direction of the turbine 21, the sound receiving hole 11 can be covered during the movable stroke of the wind blocking blade 211, so the housing of the turbine 21 can be arranged only at its radial periphery, that is, an axial air duct can be formed to connect the sound receiving hole 11, which does not affect the sound reception at the sound receiving hole 11, and prevents the airflow from entering the sound receiving hole 11 without passing through the turbine 21, that is, avoiding the turbine 21. However, when the sound receiving hole 11 is located in the radial direction of the turbine 21, the movable stroke of the wind-blocking blade 211 cannot cover the sound receiving hole 11, so that the airflow can directly enter the sound receiving hole 11 without passing through the turbine 21, affecting the noise reduction performance of the noise reduction structure 2. Therefore, in this embodiment, the shell 213 is wrapped around the periphery of the turbine 21, and the air inlet 213a and the air outlet 213b are opened only at the position of the shell 213 located in the radial direction of the turbine 21, so that the air duct of the air inlet 213a, the inner cavity of the shell 213, and the air outlet 213b is connected to the sound receiving hole 11, so that the airflow and normal audio vibration can only enter the turbine 21 through the air inlet 213a, the airflow is reduced by the turbine 21, and the normal audio is less affected, thereby meeting the required wind noise reduction requirements and avoiding the airflow from entering the sound receiving hole 11 without passing through the turbine 21, that is, avoiding the turbine 21.
[0039] In addition, similar to the movable wind blocking member 4 provided in the present application to reduce the energy of the airflow to achieve the effect of reducing wind noise, an air duct may also be provided at the sound receiving hole 11, and the air duct may be bent to form a wind-blocking structure. According to the bending characteristics of the air duct, on the one hand, the flow path between the air duct and the sound receiving hole 11 is extended, which can limit the airflow into the sound receiving hole 11, and on the other hand, a curved structure is provided, and when the airflow enters the air duct, its energy is gradually weakened in the curved structure, so that the airflow energy is reduced, and the influence on the normal audio signal received by the MEMS sound receiving device is reduced, which also meets the wind noise reduction requirements proposed in the present application.
[0040] In addition, the MEMS sound receiving device further includes a substrate 3, the main body 1 is fixed on one side of the substrate 3, and the substrate 3 is provided with a through hole 31, and the through hole 31 forms the sound receiving hole 11. Generally, the main body 1 is integrated on the circuit substrate 3 for use, but the setting position of the sound receiving hole 11 on the main body 1 is not limited, and it can be set on the end surface of the main body 1 facing away from the substrate 3, or on the end surface between the main body 1 and the substrate 3. When the sound receiving hole 11 is set on the end surface of the main body 1 facing away from the substrate 3, the noise reduction structure 2 is set on the same side of the main body 1 on the substrate 3, and when the sound receiving hole 11 is set on the end surface between the main body 1 and the substrate 3, the noise reduction structure 2 is set on the opposite side of the main body 1 on the substrate 3. Obviously, setting the noise reduction structure 2 on the opposite side of the main body 1 on the substrate 3 is more convenient for structural arrangement and installation. Therefore, in this embodiment, the through hole 31 is opened on the substrate 3 to correspond to the sound receiving hole 11. Specifically, in this embodiment, based on this structure, one side end surface of the main body 1 can also be directly composed of the substrate 3, that is, the through hole 31 opened on the substrate 3 forms the sound receiving hole 11 connected to the inner cavity of the main body 1, thereby reducing the structure of the main body 1 and reducing costs.
[0041] The utility model also provides a MEMS microphone, the MEMS microphone includes a MEMS sound receiving device, and the specific structure of the MEMS sound receiving device refers to the above embodiment. Since the MEMS microphone adopts all the technical solutions of all the above embodiments, it at least has all the beneficial effects brought by the technical solutions of the above embodiments, which will not be repeated here one by one.
[0042] The above description is only a preferred embodiment of the utility model, and does not limit the patent scope of the utility model. All equivalent structural changes made by using the contents of the utility model specification and drawings under the utility model concept, or directly / indirectly used in other related technical fields are included in the patent protection scope of the utility model.
Claims
1. A MEMS sound receiving device, characterized in that: include: The main body is provided with a sound receiving hole; as well as, The noise reduction structure comprises a wind blocking member movably arranged at the sound receiving hole, wherein the wind blocking member is used to be pushed by the airflow and reduce the energy of the airflow passing through the sound receiving hole.
2. The MEMS sound receiving device according to claim 1, wherein: The wind blocking member comprises a wind blocking blade which is rotatably arranged.
3. The MEMS sound receiving device according to claim 2, wherein: A plurality of the wind-blocking blades are provided, and the plurality of the wind-blocking blades are coaxially arranged.
4. The MEMS sound receiving device according to claim 3, wherein: The noise reduction structure includes a turbine, and the turbine includes a plurality of coaxially arranged wind-blocking blades.
5. The MEMS sound receiving device according to claim 4, characterized in that: A damper is arranged at the rotating shaft of the turbine.
6. The MEMS sound receiving device as claimed in claim 4, characterized in that: The sound receiving hole is located in the axial direction of the turbine; or, The sound receiving hole is located in the radial direction of the turbine.
7. The MEMS sound receiving device as claimed in claim 4, characterized in that: The turbine further includes a casing, which is located around the plurality of choke blades.
8. The MEMS sound receiving device as claimed in claim 7, characterized in that: The sound receiving hole is located in the radial direction of the turbine, and an air inlet and an air outlet are provided on the shell, and the air outlet is arranged corresponding to the sound receiving hole.
9. The MEMS sound receiving device according to claim 1, wherein: The MEMS sound receiving device further comprises a substrate, the main body is fixed on one side of the substrate, and a through hole is penetrated through the substrate, and the through hole forms the sound receiving hole.
10. A MEMS microphone, characterized in that: It comprises the MEMS sound receiving device as described in any one of claims 1-9.