Vacuum sample transfer device with limiting function and vacuum sample transfer system

Abstract

The utility model relates to the technical field of vacuum equipment, and discloses a vacuum sample transfer device with a limiting function and a vacuum sample transfer system. The vacuum sample transferring device with the limiting function comprises a sample transferring cavity, a sample transferring rod, a sample transferring table, a transmission assembly, a driving assembly and at least one limiting rod. And the near end of the sample transfer rod is arranged in the sample transfer cavity. And the sample transfer table is connected with the far end of the sample transfer rod. The transmission assembly is connected with the near end of the sample transfer rod. The driving assembly is arranged on the sample transfer cavity in a sleeving mode, the driving assembly is used for sliding along the sample transfer cavity and / or rotating around the sample transfer cavity to drive the transmission assembly to move so as to drive the sample transfer table to move, and the driving assembly comprises a limiting piece. The at least one limiting rod is arranged around the sample transfer cavity in the axial direction of the sample transfer cavity, and the at least one limiting rod is used for blocking the limiting piece so as to limit the movement of the driving assembly.

Description

Technical Field

[0001] The present disclosure relates to the technical field of vacuum equipment, and in particular to a vacuum sample transfer device with a limiter and a vacuum sample transfer system. Background Art

[0002] In the field of vacuum equipment, the sample transfer rod is a device used for sample transfer. The existing sample transfer rod limit mechanism can only limit the front and rear positions of the linear motion of the sample transfer rod, because the lifting sample transfer rod has other degrees of freedom, such as the degree of freedom in the up and down directions, and it is not easy to control the accuracy by manual operation, especially in the system with rectangular flange, because the width of the rectangular flange is narrow, if the sample transfer rod is lifted and lowered beyond the opening of the flange, it will collide with the flange or the cavity. Utility Model Content

[0003] In some embodiments of the present disclosure, a vacuum sample transfer device with a limiter includes:

[0004] Sample transfer cavity;

[0005] A sample transfer rod, the proximal end of which is arranged in the sample transfer cavity;

[0006] A sample transfer platform connected to the distal end of the sample transfer rod;

[0007] A transmission assembly connected to the proximal end of the sample transfer rod;

[0008] A driving assembly is sleeved on the sample transfer chamber, and is used to slide along the sample transfer chamber and / or rotate around the sample transfer chamber to drive the transmission assembly to move, thereby driving the sample transfer platform to move, and the driving assembly includes a limiter; and

[0009] At least one limiting rod is arranged around the sample transfer cavity along the axial direction of the sample transfer cavity, and the at least one limiting rod is used to block the limiting member to limit the movement of the driving component.

[0010] In some embodiments of the present disclosure, at least one of the at least one limiting rods includes at least one linear motion limiting block for cooperating with the limiting member to limit the sliding of the driving assembly.

[0011] In some embodiments of the present disclosure, the vacuum sample transfer device with limiter further includes a plurality of support plates, at least two of the plurality of support plates are fixedly mounted on the sample transfer chamber to support at least one limiter rod.

[0012] In some embodiments of the present disclosure, the plurality of support plates include:

[0013] A first support plate, disposed at the proximal end of the sample transfer cavity;

[0014] The second support plate is arranged at the far end of the sample transfer cavity,

[0015] The at least one limiting rod includes a first limiting rod installed between the first support plate and the second support plate.

[0016] In some embodiments of the present disclosure, the support plate includes at least one long hole, and the at least one long hole is used to install at least one limiting rod and allows the installation position of the limiting rod to be adjusted.

[0017] In some embodiments of the present disclosure, the first limiting rod includes a first linear motion limiting block.

[0018] In some embodiments of the present disclosure, the plurality of support plates further include a third support plate, the third support plate is disposed in the middle of the sample transfer chamber, and the third support plate includes a through hole for allowing the driving assembly and the sample transfer chamber to pass through;

[0019] The at least one limiting rod further comprises a second limiting rod, and the second limiting rod is installed between the first support plate and the third support plate;

[0020] The second limiting rod and the first limiting rod are arranged at intervals along the circumference of the sample transfer cavity.

[0021] In some embodiments of the present disclosure, the at least one limiting rod further includes a third limiting rod, and the third limiting rod is installed between the first support plate and the second support plate.

[0022] The third limiting rod and the second limiting rod are arranged at intervals along the circumference of the sample transfer cavity.

[0023] In some embodiments of the present disclosure, the at least one limiting rod further includes a fourth limiting rod, and the fourth limiting rod is installed between the second support plate and the third support plate.

[0024] The fourth limiting rod and the third limiting rod are arranged at intervals along the circumference of the sample transfer cavity.

[0025] In some embodiments of the present disclosure, the transmission assembly includes a transmission magnetic mechanism, which is disposed in the sample transfer cavity.

[0026] The driving assembly includes a driving magnetic mechanism, which is arranged outside the sample transfer cavity and coupled with the transmission magnetic mechanism to drive the transmission magnetic mechanism to drive the sample transfer rod to perform linear motion or rotational motion, wherein the rotational motion is used to drive the sample transfer rod to drive the sample transfer platform to rise and fall.

[0027] In some embodiments of the present disclosure, a vacuum sample transfer system includes:

[0028] a vacuum chamber; and

[0029] According to the vacuum sample transfer device with a limit in any one of the embodiments of the present disclosure, the sample transfer chamber of the vacuum sample transfer device with a limit is vacuum-tightly connected to the vacuum chamber.

[0030] The vacuum sample transfer device and vacuum sample transfer system with position limits according to some embodiments of the present disclosure can bring beneficial technical effects. For example, the vacuum sample transfer device and vacuum sample transfer system with position limits according to some embodiments of the present disclosure have a simple structure, can be improved on the basis of the existing sample transfer device, have low cost, and can adjust the rotation angle of the sample transfer rod without dead angles, and the accuracy is easy to control. For another example, the vacuum sample transfer device and vacuum sample transfer system with position limits according to some embodiments of the present disclosure can be limited at multiple points of travel to achieve high-precision and reliable sample transfer. For another example, the vacuum sample transfer device and vacuum sample transfer system with position limits according to some embodiments of the present disclosure can be programmed and adjusted according to actual conditions to meet the requirements of various sample transfer scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0032] Figure 1 A schematic structural diagram of a vacuum sample transfer device with position limiting according to some embodiments of the present disclosure is shown;

[0033] Figure 2 A schematic cross-sectional structure diagram of a vacuum sample transfer device with position limiting according to some embodiments of the present disclosure is shown;

[0034] Figure 3 A schematic structural diagram of a first support plate according to some embodiments of the present disclosure is shown;

[0035] Figure 4 A schematic structural diagram of a third support plate according to some embodiments of the present disclosure is shown;

[0036] Figure 5 A schematic diagram showing the structure of a sample transfer station according to some embodiments of the present disclosure is shown;

[0037] Figure 6 A schematic diagram showing the structure of a sample transfer station according to other embodiments of the present disclosure is shown;

[0038] Figure 7 A schematic structural diagram of a vacuum sample transfer system according to some embodiments of the present disclosure is shown;

[0039] Figure 8A-8E A schematic diagram showing a vacuum sample transfer device according to some embodiments of the present disclosure operating in a vacuum sample transfer system.

[0040] In the above drawings, the reference numerals represent:

[0041] 1000-Vacuum Sample Transfer System

[0042] 100-Vacuum Sample Transfer Device

[0043] 110-sample transfer chamber, 111-sample transfer rod, 112-sample transfer platform, 1121-guide, 11211-guide groove, 1122-connector, 1123-sliding member, 1124-bearing fixed seat, 1125-gear, 1126-lifting seat, 1127-rack, 1128-cross roller guide, 113-transmission assembly, 1131-transmission magnetic mechanism, 114-limit block

[0044] 120-driving assembly, 121-limiting member, 122-driving magnetic mechanism

[0045] 130-limiting rod, 131-first limiting rod, 1311-first linear motion limiting block, 132-second limiting rod, 133-third limiting rod, 134-fourth limiting rod

[0046] 140-support plate, 141-first support plate, 1411a, 1411b, 1432a, 1432b-long holes, 1412-protrusions, 14121-screw holes, 142-second support plate, 143-third support plate, 1431-through holes

[0047] 150-Connectors

[0048] 200-Vacuum Chamber

[0049] 210-Fast Injection Chamber

[0050] 220-Processing chamber DETAILED DESCRIPTION

[0051] Some embodiments of the present disclosure will be described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, rather than all embodiments.

[0052] In the description of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", "top", "bottom" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "coupled" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements. In the description of the present disclosure, the distal end or the distal side refers to an end or a side that penetrates into a vacuum environment (e.g., a vacuum chamber), and the proximal end or the proximal side refers to an end or a side opposite to the distal end or the distal side (e.g., an end or a side that is away from the vacuum chamber, or an end or a side that is close to the vacuum chamber wall in the vacuum chamber, etc.). Alternatively, the end or the side that is close to the driving device is the proximal end or the proximal side, and the end or the side that is away from the driving device is the distal end or the distal side. For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0053] Figure 1 A schematic structural diagram of a vacuum sample transfer device 100 with limiting according to some embodiments of the present disclosure is shown. Figure 2 A schematic cross-sectional structure diagram of a vacuum sample transfer device 100 with limiting according to some embodiments of the present disclosure is shown.

[0054] like Figure 1 and Figure 2 As shown, in some embodiments of the present disclosure, the vacuum sample transfer device 100 with a limit position may include a sample transfer chamber 110, a drive assembly 120 and at least one limit rod 130 (for example, Figure 1 The first limiting rod 131, the second limiting rod 132, the third limiting rod 133, and the fourth limiting rod 134 are shown.

[0055] like Figure 1 and Figure 2As shown, the vacuum sample transfer device 100 with position limiting may further include a sample transfer rod 111, a sample transfer platform 112 and a transmission assembly 113. The proximal end of the sample transfer rod 111 is disposed in the sample transfer chamber 110, the sample transfer platform 112 is connected to the distal end of the sample transfer rod 111, and the transmission assembly 113 is connected to the proximal end of the sample transfer rod 111. The drive assembly 120 is sleeved on the sample transfer chamber 110, and the drive assembly 120 is used to slide along the sample transfer chamber 110 and / or rotate around the sample transfer chamber 110 to drive the transmission assembly 113 to move, thereby driving the sample transfer platform 112 to move.

[0056] like Figure 1 As shown, the driving assembly 120 may include a stopper 121. Those skilled in the art will appreciate that the stopper 121 may take various suitable forms. Figure 1 As shown, the stopper 121 includes a protrusion disposed on the periphery of the driving assembly 120. In other embodiments, the stopper 121 may also be in other forms, such as a groove disposed on the peripheral flange of the driving assembly 120. Figure 1 The first limiting rod 131, the second limiting rod 132, the third limiting rod 133, and the fourth limiting rod 134 are arranged around the sample transfer chamber 110 along the axial direction of the sample transfer chamber 110, and are used to block the limiting member 121 to limit the motion of the driving assembly 120. The limiting member 121 and at least one limiting rod 130 are used to limit the motion of the driving assembly 120, which has a simple structure and can be improved on the basis of the existing sample transfer device, with low cost, and the rotation angle of the sample transfer rod can be adjusted without dead angle, and the accuracy is easy to control.

[0057] Those skilled in the art will appreciate that although Figure 1 Four limiting rods are shown in the figure, but the vacuum sample transfer device 100 with limiting function may also include other number of limiting rods arranged around the sample transfer chamber 110 to limit different rotation angles of the sample transfer rod.

[0058] In some embodiments, the stopper 121 can be integrally formed with the driving assembly 120 and protrude from the driving assembly 120, so that when the driving assembly 120 rotates around the sample transfer chamber 110, the stopper 121 can be controlled by at least one stopper rod 130 (e.g., Figure 1 The first limiting rod 131, the second limiting rod 132, the third limiting rod 133, and the fourth limiting rod 134 shown in the figure block the rotational movement of the driving assembly 120, and can also provide guidance for the sliding of the driving assembly 120. Figure 1As shown, in some embodiments, the limiting member 121 can also be separately formed and then installed on the driving assembly 120. For example, the limiting member 121 can include a hoop, which is installed on the driving assembly 120. The hoop forms a convex portion on the surface of the driving assembly 120 to engage with at least one limiting rod 130 (for example, Figure 1 The first limiting rod 131, the second limiting rod 132, the third limiting rod 133, and the fourth limiting rod 134 shown cooperate to limit the rotational movement of the driving assembly 120. The clamp is used as a limiting member, which is easy to disassemble and easy to adjust the limiting rod of the vacuum sample transfer device.

[0059] In some embodiments of the present disclosure, at least one of the at least one limiting rods includes at least one linear motion limiting block (e.g., Figure 1 The first linear motion limiting block 1311 on the first limiting rod 131 is used to cooperate with the limiting member 121 to limit the sliding of the driving assembly 120.

[0060] like Figure 1 As shown, in some embodiments of the present disclosure, the first limiting rod 131 includes a first linear motion limiting block 1311. After the limiting member 121 of the driving assembly 120 touches the first limiting rod 131, it moves linearly along the first limiting rod 131. When the limiting member 121 touches the first linear motion limiting block 1311 of the first limiting rod 131, the linear motion of the driving assembly 120 is limited. In this way, the rotation angle of the sample transfer rod can be adjusted without dead angles, and the stroke can be limited to realize blind transfer without observation.

[0061] In some embodiments of the present disclosure, the vacuum sample transfer device 100 with a limit position may further include a plurality of support plates 140 (e.g. Figure 1 At least two of the plurality of support plates 140 are fixedly mounted on the sample transfer chamber 110 to support at least one limiting rod 130 (e.g., Figure 1 In some embodiments, the support plates 140 located at both ends of the sample transfer chamber 110 (e.g., Figure 1 The first support plate 141 and the second support plate 142 are fixedly mounted on the sample transfer chamber 110 .

[0062] like Figure 1 and Figure 2As shown, in some embodiments of the present disclosure, the plurality of support plates may include a first support plate 141 and a second support plate 142. The first support plate 141 is disposed at the proximal end of the sample transfer chamber 110. The second support plate 142 is disposed at the distal end of the sample transfer chamber 110. At least one limiting rod includes a first limiting rod 131, which is installed between the first support plate 141 and the second support plate 142.

[0063] Figure 3 A schematic structural diagram of a first support plate 141 according to some embodiments of the present disclosure is shown.

[0064] like Figure 3 As shown, in some embodiments of the present disclosure, the first support plate 141 includes two semicircular structures, and a protrusion 1412 is provided on one side of the semicircular structure. Screw holes 14121 are provided at both ends of the protrusion 1412 to fix the two semicircular structures to the proximal end of the sample transfer chamber 110. The first support plate 141 with such a structure is easy to install, stable and reliable, and provides convenience for the maintenance and replacement of the vacuum sample transfer device 100.

[0065] In some embodiments of the present disclosure, similarly, the second support plate 142 may also include two semicircular structures similar to the first support plate 141 , which will not be described in detail herein.

[0066] In some embodiments of the present disclosure, the support plate includes at least one long hole, and the at least one long hole is used to install at least one limiting rod and allows the installation position of the limiting rod to be adjusted. Figure 3 As shown, the at least one long hole of the first support plate 141 includes two long holes 1411a and 1411b. In some embodiments, the long holes 1411a and 1411b of the first support plate 141 extend along the circumference of the sample transfer chamber 110.

[0067] like Figure 1 As shown, in some embodiments of the present disclosure, the proximal end and the distal end of the first limiting rod 131 pass through the long holes of the first support plate 141 and the second support plate 142, respectively. The first support plate 141 and the second support plate 142 are provided with nuts adapted to the first limiting rod 131 and the long holes 1411a and 1411b of the first support plate 141 on both sides of the long holes, for fixing the first limiting rod 131. When it is necessary to adjust the position of the first limiting rod, it is only necessary to loosen the nut, adjust the first limiting rod 131 to the desired position, and then tighten the nut. The adjustment is convenient, and by adjusting the position of the limiting rod, the vacuum sample transfer device 100 can be adapted to different types of vacuum chambers and sample transfer operations.

[0068] Those skilled in the art will appreciate that although Figure 3Only two long holes are shown in the first support plate 141, but this is only exemplary. The first support plate 141, the second support plate 142, the third support plate 143 or other support plates may also include other numbers of long holes, such as one long hole, or three or more long holes.

[0069] Figure 4 A schematic structural diagram of a third support plate 143 according to some embodiments of the present disclosure is shown.

[0070] like Figure 1 and Figure 2 As shown, in some embodiments of the present disclosure, the plurality of support plates further include a third support plate 143, and the third support plate 143 is disposed in the middle of the sample transfer chamber 110, such as Figure 4 As shown, the third support plate 143 includes a through hole 1431 for allowing the drive assembly 120 and the sample transfer chamber 110 to pass through. The at least one limiting rod also includes a second limiting rod 132, and the second limiting rod 132 is installed between the first support plate 141 and the third support plate 143. The second limiting rod 132 and the first limiting rod 131 are arranged at intervals along the circumference of the sample transfer chamber 110.

[0071] like Figure 4 As shown, in some embodiments of the present disclosure, the at least one slot of the third support plate 143 includes two slots 1432a and 1432b. Figure 4 Only two long holes are shown in the third support plate 143, but this is only exemplary, and the third support plate 143 may also include other numbers of long holes. Figure 4 The third support plate 143 shown is an integrated structure, but this is only exemplary, and the third support plate 143 may also be formed by combining two semicircular structures, for example.

[0072] like Figure 4 As shown, in some embodiments of the present disclosure, the vacuum sample transfer device 100 may further include a plurality of connectors 150, and the third support plate 143 may be connected to a limiting rod (e.g., as shown in FIG. 1 ) installed between the first support plate 141 and the second support plate 142 through the connectors 150. Figure 1 The first limiting rod 131 and the third limiting rod 133 are mounted on the third support plate 143. Figure 1 The second limiting rod 132 and the fourth limiting rod 134 shown in the figure can also be fixedly mounted on the third supporting plate 143 through the connecting member 150.

[0073] like Figure 4 As shown, in some embodiments of the present disclosure, the connecting member 150 is in an "L" shape.

[0074] The horizontal section and the vertical section of the "L"-shaped connecting member 150 are both provided with screw holes. At least one limiting rod 130 (for example, Figure 1 The first limiting rod 131, the second limiting rod 132, the third limiting rod 133, and the fourth limiting rod 134 are provided with at least one threaded hole, which cooperates with the screw hole provided on the transverse section of the "L"-shaped connecting member 150, and the "L"-shaped connecting member 150 is connected to at least one limiting rod 130 (for example, Figure 1 The screw holes provided on the vertical section of the "L"-shaped connector 150 cooperate with the long holes 1432a or 1432b on the third support plate 143, and the "L"-shaped connector 150 is connected to the third support plate 143 by screws and bolts.

[0075] In some embodiments, a limiting rod (e.g., Figure 1 The second limiting rod 132 and the fourth limiting rod 134 shown in the figure can be provided with two, three or more threaded holes at one end close to the third support plate 143, and the limiting rod (for example, as shown in the figure) passing through the through hole 1431 of the third support plate 143 can be provided with two, three or more threaded holes. Figure 1 The first limiting rod 131 and the third limiting rod 133 shown in the figure are provided with 2, 3 or more, for example 10 threaded holes on both sides close to the third supporting plate 143, so that the position of the third supporting plate 143 can be conveniently adjusted as needed.

[0076] Those skilled in the art will appreciate that, although in some embodiments of the present disclosure, the connector 150 is in an "L" shape, this is merely exemplary, and the connector 150 may also be in other suitable shapes, such as an "I" shape, a "T" shape, a "Z" shape, etc.

[0077] In some embodiments of the present disclosure, a support plate (such as the third support plate 143) disposed in the middle of the sample transfer chamber 110 may be used as a limit indicator for a certain position of the linear motion of the sample transfer rod 111. Of course, a second linear motion limit block (not shown in the figure) may also be disposed on the second limit rod 132 to limit a certain position of the linear motion of the sample transfer rod 111.

[0078] In some embodiments of the present disclosure, the at least one limiting rod may further include a third limiting rod 133. The third limiting rod 133 is installed between the first support plate 141 and the second support plate 142. The third limiting rod 133 and the second limiting rod 132 are arranged at intervals along the circumference of the sample transfer chamber 110.

[0079] In some embodiments of the present disclosure, when two limiting rods are used to limit the rotation of the driving assembly 120 around the sample transfer chamber 110 in the same direction, the two limiting rods include non-overlapping axial regions. Figure 1 As shown, in some embodiments, the second limiting rod 132 and the third limiting rod 133 are used to limit the driving assembly 120 when it rotates counterclockwise around the sample transfer chamber 110. Between the second support member 142 and the third support member 143 is the axial non-overlapping area between the second limiting rod 132 and the third limiting rod 133. The driving assembly 120 rotates counterclockwise around the sample transfer chamber 110 until the limiting member 121 touches the second limiting rod 132. Figure 1 After the left side moves linearly to the left side of the third support plate 143 , the driving assembly 120 can continue to rotate counterclockwise, and the limiting member 121 contacts the third limiting rod 133 .

[0080] In some embodiments of the present disclosure, Figure 1 As shown, a limit block 114 is provided at the distal end of the sample transfer chamber 110. The distal end position of the sliding of the driving assembly 120 can be limited by the limit block 114. When the distal end of the driving assembly 120 touches the limit block 114, the limit position is reached. Of course, a third linear motion limit block (not shown in the figure) can also be provided on the third limit rod 133 for limiting.

[0081] In some embodiments of the present disclosure, the at least one limiting rod may further include a fourth limiting rod 134. The fourth limiting rod 134 is installed between the second support plate 142 and the third support plate 143. The fourth limiting rod 134 and the third limiting rod 133 are arranged at intervals along the circumference of the sample transfer chamber 110.

[0082] like Figure 2 As shown, in some embodiments of the present disclosure, the transmission assembly 113 may include a transmission magnetic mechanism 1131, which is disposed in the sample transfer chamber 110. The driving assembly 120 may include a driving magnetic mechanism 122, which is disposed outside the sample transfer chamber 110 and coupled with the transmission magnetic mechanism 1131, and is used to drive the transmission magnetic mechanism 1131 to drive the sample transfer rod 111 to perform linear motion or rotational motion, wherein the rotational motion is used to drive the sample transfer rod 111 to drive the sample transfer stage 112 to move up and down.

[0083] Figure 5 A schematic structural diagram of a sample transfer station 112 according to some embodiments of the present disclosure is shown.

[0084] like Figure 5As shown, the sample transfer platform 112 may include a transmission gear (not shown in the figure), a transmission rack (not shown in the figure), a guide 1121, a connecting member 1122, and a sliding member 1123. The guide 1121 is fixedly connected to the distal end of the sample transfer rod 111 through the connecting member 1122. Guide grooves 11211 are provided on both sides of the guide 1121. The sliding member 1123 is sleeved on the guide 1121 and has a guide screw (not shown in the figure) that can cooperate with the guide groove 11211, so that the sliding member 1123 is slidably connected with the guide 1121 and can slide on the guide 1121 along the guide groove. A sample transfer core rod (not shown in the figure) is inserted into the sample transfer rod 111, and the transmission rack is fixed on the sliding member 1123 and meshes with the transmission gear fixed at the distal end of the sample transfer core rod. The sample transfer core rod drives the transmission gear to rotate, so that the transmission rack can move up and down, thereby driving the sliding member 1123 to move up and down along the guide 1121.

[0085] Figure 6 A schematic structural diagram of the sample transfer station 112 according to other embodiments of the present disclosure is shown.

[0086] like Figure 6 As shown, the sample transfer platform 112 may include a bearing fixing seat 1124, a gear 1125, a lifting seat 1126 and a rack 1127. A sample transfer core rod (not shown in the figure) is inserted into the sample transfer rod 111, and the bearing fixing seat 1124 is rotatably connected to the sample transfer core rod, and the bearing fixing seat 1124 is fixedly connected to the distal end of the sample transfer rod 111. The gear 1125 is connected to the sample transfer core rod, and the gear 1125 is driven to rotate by the sample transfer core rod. The lifting seat 1126 is connected to the bearing fixing seat 1124 through a cross roller guide 1128. The back of the rack 1127 is fixedly connected to the lifting seat 1126, and the rack 1127 is meshed with the gear 1125, driving the lifting seat 1126 to move up and down through the cross roller guide 1128.

[0087] Figure 7 A schematic structural diagram of a vacuum sample transfer system 1000 according to some embodiments of the present disclosure is shown.

[0088] like Figure 7 As shown, in some embodiments of the present disclosure, the vacuum sample transfer system 1000 may include a vacuum chamber 200 and a vacuum sample transfer device 100 with a limit according to any embodiment of the present disclosure, and the sample transfer chamber 110 of the vacuum sample transfer device 100 with a limit is vacuum-sealed and connected to the vacuum chamber 200.

[0089] In some embodiments of the present disclosure, Figure 7 As shown, the vacuum chamber 200 may include a fast sample introduction chamber 210 and a processing chamber 220 .

[0090] like Figure 1 and Figure 7As shown, the installation and debugging process of the vacuum sample transfer device 100 in some embodiments of the present disclosure is as follows:

[0091] A first support plate 141 is installed at the proximal end of the sample transfer chamber 110, and a second support plate 142 is installed at the distal end of the sample transfer chamber 110. The driving assembly 120 rotates clockwise around the sample transfer chamber 110 to lower the sample transfer table 112 to the lowest position. According to the position of the limiting member 121 of the driving assembly 120 at this time, the position of the first limiting rod 131 is adjusted, and the first limiting rod 131 is installed on the first support plate 141 and the second support plate 142.

[0092] The driving assembly 120 slides along the sample transfer chamber 110, driving the sample transfer rod 111 to slide to the sampling position of the fast sample injection chamber (or straight section, transfer chamber) 210, and according to this position, the first linear motion limit block 1311 is installed on the first limit rod 131. The driving assembly 120 rotates counterclockwise around the sample transfer chamber 110, raising the sample transfer rod 111 to the sampling position and this position can safely pass through the flange (e.g., rectangular flange) of the fast sample injection chamber 210, adjusting the second limit rod 132, and installing the second limit rod 132 on the first support plate 141 and the third support plate 143.

[0093] The driving assembly 120 continues to slide along the sample transfer chamber 110, and the sample transfer rod 111 sends the sample out of the flange (e.g., rectangular flange) of the sample injection chamber 210. The point after passing through the flange can be limited by setting a second linear motion limit block (not shown in the figure) on the second limit rod 132. The third support plate 143 can also be adjusted to the point where the limit member 121 passes through the through hole 1431 of the third support plate 143, and the sample transfer rod 111 will send the sample out of the flange of the sample injection chamber 210. Install the second linear motion limit block or the third support plate 143 according to the adjustment position. After passing through the flange, the driving assembly 120 continues to rotate counterclockwise around the sample transfer chamber 110, sends the sample to the highest point, adjusts the third limit rod 133, and installs the third limit rod 133 on the first support plate 141 and the second support plate 142.

[0094] The driving assembly 120 continues to slide along the sample transfer chamber 110, and the sample transfer rod 111 delivers the sample to the sample delivery position of the processing chamber 220. The sample delivery position can be limited by setting a limit block 114 at the far end of the sample transfer chamber 110, or by setting a third linear motion limit block (not shown in the figure) on the third limit rod 133. Install the limit block 114 or the third linear motion limit block according to the debugged position. After reaching the sample delivery position, the driving assembly 120 rotates clockwise around the sample transfer chamber 110, and lowers the sample to the parking table of the processing chamber 220. The lowered position meets the sample delivery and does not interfere with the flanges of the processing chamber 220 and the fast sample injection chamber 210 when retreating. The position of the fourth limit rod 134 is debugged, and the fourth limit rod 134 is installed on the second support plate 142 and the third support plate 143.

[0095] Figure 8A-8E A schematic diagram showing a vacuum sample transfer device 100 operating in a vacuum sample transfer system 1000 according to some embodiments of the present disclosure.

[0096] like Figure 8A-8E As shown, the operation process of the vacuum sample transfer device 100 in some embodiments of the present disclosure is as follows:

[0097] The driving assembly 120 rotates clockwise around the sample transfer chamber 110 ( Fig. 8A The limiting member 121 touches the first limiting rod 131, and the sample transfer platform 112 is at the lowest position;

[0098] The driving assembly 120 slides along the sample transfer chamber 110 until the stopper 121 contacts the first linear motion stopper 1311 (eg, Figure 8B The driving assembly 120 rotates counterclockwise around the sample transfer chamber 110 until the stopper 121 touches the second stopper rod 132. At this time, the sample transfer platform 112 rises to the sampling position and can safely pass through the flange of the fast sample injection chamber 210.

[0099] The driving assembly 120 continues to slide along the sample transfer chamber 110 until the limiting member 121 touches the second linear motion limiting block (not shown in the figure) of the second limiting rod 132 or when the limiting member 121 on the driving assembly 120 passes through the through hole 1431 in the middle of the third support plate 143 (such as Figure 8C As shown in FIG. 1 , the sample transfer rod 111 has sent the sample out of the flange of the sample injection chamber 210. After passing through the flange, the driving assembly 120 continues to rotate counterclockwise around the sample transfer chamber 110, and when the stopper 121 touches the third stopper rod 133, the sample transfer platform 112 is at the highest point.

[0100] The driving assembly 120 continues to slide along the sample transfer chamber 110, and when the distal end of the driving assembly 120 touches the stop block 114 (eg Fig.8DAs shown), the sample transfer rod 111 delivers the sample to the sample delivery position of the processing chamber 220; the driving assembly 120 rotates clockwise around the sample transfer chamber 110, and when the limiting member 121 touches the fourth limiting rod 134 (as shown Fig. 8E As shown), it means that the position where the sample transfer stage 112 descends satisfies the sample delivery and does not interfere with the flange (such as a rectangular flange) of the processing chamber 220 and the fast injection chamber 210 when retracting.

[0101] The driving assembly 120 slides to the right along the sample transfer chamber 110. When the limiting member 121 on the driving assembly 120 is observed to pass through the through hole 1431 in the middle of the third support plate 143, the driving assembly 120 rotates counterclockwise around the sample transfer chamber until the limiting member 121 touches the second limiting rod 132, and then returns to the bottom, completing a sample transfer operation.

[0102] It should be pointed out that the above are only exemplary embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A vacuum sample transfer device with a limiter, characterized in that: include: Sample transfer cavity; A sample transfer rod, the proximal end of which is arranged in the sample transfer cavity; A sample transfer platform connected to the distal end of the sample transfer rod; A transmission assembly connected to the proximal end of the sample transfer rod; a driving assembly, sleeved on the sample transfer chamber, the driving assembly being used to slide along the sample transfer chamber and / or rotate around the sample transfer chamber to drive the transmission assembly to move, thereby driving the sample transfer stage to move, the driving assembly comprising a limiting member; and At least one limiting rod is arranged around the sample transfer cavity along the axial direction of the sample transfer cavity, and the at least one limiting rod is used to block the limiting member to limit the movement of the driving component.

2. The vacuum sample transfer device with position limiting according to claim 1, characterized in that: At least one of the at least one limiting rods includes at least one linear motion limiting block, which is used to cooperate with the limiting member to limit the sliding of the driving assembly.

3. The vacuum sample transfer device with position limiter according to claim 1, characterized in that: It also includes a plurality of support plates, at least two of which are fixedly mounted on the sample transfer chamber to support the at least one limiting rod.

4. The vacuum sample transfer device with position limiting according to claim 3, characterized in that: The plurality of support plates include: A first support plate, disposed at the proximal end of the sample transfer cavity; A second support plate is disposed at the distal end of the sample transfer cavity, The at least one limiting rod includes a first limiting rod installed between the first supporting plate and the second supporting plate.

5. The vacuum sample transfer device with position limiting according to claim 3, characterized in that: The support plate comprises at least one long hole, and the at least one long hole is used to install the at least one limiting rod and allows the installation position of the limiting rod to be adjusted.

6. The vacuum sample transfer device with position limiter according to claim 4, characterized in that: The first limiting rod includes a first linear motion limiting block.

7. The vacuum sample transfer device with position limiting according to claim 4, characterized in that: The plurality of support plates further include a third support plate, the third support plate being disposed in the middle of the sample transfer chamber, the third support plate including a through hole for allowing the driving assembly and the sample transfer chamber to pass through; The at least one limiting rod further comprises a second limiting rod, wherein the second limiting rod is installed between the first support plate and the third support plate; The second limiting rod and the first limiting rod are arranged at intervals along the circumference of the sample transfer cavity.

8. The vacuum sample transfer device with position limiting according to claim 7, characterized in that: The at least one limiting rod further comprises a third limiting rod, wherein the third limiting rod is installed between the first supporting plate and the second supporting plate. The third limiting rod and the second limiting rod are arranged at intervals along the circumference of the sample transfer cavity.

9. The vacuum sample transfer device with position limiting according to claim 8, characterized in that: The at least one limiting rod further comprises a fourth limiting rod, wherein the fourth limiting rod is installed between the second support plate and the third support plate. The fourth limiting rod and the third limiting rod are arranged at intervals along the circumference of the sample transfer cavity.

10. The vacuum sample transfer device with position limiting according to claim 1, characterized in that: The transmission assembly includes a transmission magnetic mechanism, which is arranged in the sample transfer cavity. The driving assembly includes a driving magnetic mechanism, which is arranged outside the sample transfer cavity and coupled with the transmission magnetic mechanism, and is used to drive the transmission magnetic mechanism to drive the sample transfer rod to perform linear motion or rotational motion, wherein the rotational motion is used to drive the sample transfer rod to drive the sample transfer platform to rise and fall.

11. A vacuum sample transfer system, characterized in that: include: Vacuum chamber; as well as According to the vacuum sample transfer device with a limiter according to any one of claims 1 to 10, the sample transfer chamber of the vacuum sample transfer device with a limiter is vacuum-tightly connected to the vacuum chamber.

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