Isolation structure of coating machine

Abstract

The utility model relates to the technical field of coating machines, in particular to an isolation structure of a coating machine, which can isolate parts which do not need to be coated, can continuously coat, is convenient for dismounting and mounting a base material, and is good in practicability. Comprising a coating box and a target material, and the target material is installed on the inner wall of the front side of the coating box; a film coating hole is formed in the rear side wall of the film coating box, the mounting frame is slidably mounted in the film coating hole, the mold is detachably mounted on the mounting frame, the motor is mounted on the rear side wall of the film coating box, the reciprocating screw rod is mounted at one end of a rotating shaft of the motor, and the reciprocating screw rod is mounted at the other end of the rotating shaft of the motor; the reciprocating lead screw is located in a coating cavity of the coating box, the lead screw sliding block is rotationally connected to the reciprocating lead screw in a screwed mode and connected with the mounting frame through the support, the clamping mechanism is mounted at the other end of a rotating shaft of the motor and located outside the rear side of the coating box, and the multiple base material mounting assemblies are arranged on the clamping mechanism in the circumferential direction.

Description

Technical Field

[0001] The utility model relates to the technical field of coating machines, in particular to an isolation structure of a coating machine. Background Art

[0002] A coating machine is a device used to coat a thin film on the surface of an object. It is often used to manufacture high-tech products such as electronic components, optical devices, and solar panels. The working principle of a coating machine is to evaporate or sputter one or more materials onto the surface of an object to form a thin film. These materials can be metals, ceramics, polymers, etc. There are many types of coating machines, including vacuum coating machines, ion coating machines, magnetron sputtering coating machines, etc.

[0003] When coating the substrate through a coating machine, an isolation structure needs to be set up to prevent material from sputtering to other parts of the substrate that do not need coating. The Chinese utility model patent with application number CN202321331573.3 proposes an isolation protection device for a coating machine. The device installs the substrate on the substrate mounting assembly. The substrate corresponds to the target material. A protective plate is provided in front of the substrate. A through hole matching the shape of the coating area is opened on the protective plate. The material splashed from the target material enters the substrate through the through hole. Due to the existence of the protective plate, there will be no material sputtering in other areas of the substrate. There is no need to subsequently process the substrate, and the coating is more convenient and efficient.

[0004] However, the above-mentioned prior art only has one substrate installation assembly, which cannot realize continuous coating work, and the substrate installation assembly is located in the coating box, making it inconvenient to install and remove the substrate. Utility Model Content

[0005] In order to solve the above technical problems, the utility model provides a coating machine isolation structure which can isolate parts that do not need coating, can perform continuous coating, is convenient for substrate disassembly and installation, and has good practicality.

[0006] The utility model discloses an isolation structure of a coating machine, comprising a coating box and a target material, wherein a coating chamber is arranged inside the coating box, and the target material is mounted on the front inner wall of the coating box; the utility model also comprises a mounting frame, a mold, a motor, a reciprocating screw, a screw slider and a clamping mechanism, wherein a coating opening is arranged on the rear wall of the coating box, the mounting frame is slidably mounted in the coating opening, the mold is detachably mounted on the mounting frame, the motor is mounted on the rear wall of the coating box, a reciprocating screw is mounted on one end of the rotating shaft of the motor, the reciprocating screw is located in the coating chamber of the coating box, the screw slider is rotatably screwed on the reciprocating screw, the screw slider is connected to the mounting frame through a bracket, the clamping mechanism is mounted on the other end of the rotating shaft of the motor, the clamping mechanism is located on the rear outer side of the coating box, and a plurality of substrate mounting groups are arranged on the circumference of the clamping mechanism. When working, the mold matching the substrate is installed on the installation frame, and the substrate is installed on the installation assembly. The motor drives the rotating shaft to rotate, and the rotating shaft drives the reciprocating screw and the clamping mechanism to rotate. The clamping mechanism rotates the substrate to the outside of the mold, and the reciprocating screw drives the screw slider to reciprocate. When the screw slider moves toward the rear wall of the coating box, the screw slider drives the installation frame to move toward the rear side of the coating box through the bracket, so that the mold and the substrate are in close contact. The motor stops the target material and the splashed material enters the substrate from the mold to achieve coating of the substrate. The mold isolates the parts that do not need coating, and there is no need to subsequently process the substrate. By setting up multiple installation assemblies, continuous coating work is achieved, and the clamping mechanism and the substrate are located outside the coating box, which is convenient for disassembly and installation, and has good practicality.

[0007] Preferably, it also includes a slot and a sealing ring. The slot is set on the inner wall of the installation frame, and the outer wall of the mold is set with a sealing ring matching the slot. After the mold is inserted into the upper part of the installation frame, the sealing ring is elastically clamped in the sealing ring. The sealing ring and the slot cooperate to enable the installation frame and the mold to be quickly installed and disassembled and improve the sealing performance.

[0008] Preferably, the clamping mechanism includes a mounting plate, a plurality of mounting frames and a mounting assembly, the mounting assembly includes a support plate and two clamping plates, the mounting plate is concentrically mounted on the rotating shaft of the motor, the mounting plate is located on the rear outer side of the coating box, the inner end circumferences of the plurality of mounting frames are evenly mounted on the mounting plate, the plurality of support plates are respectively mounted on the outer ends of the plurality of mounting frames, and clamping plates are arranged on both sides of the plurality of support plates; the uncoated substrate is inserted between the two clamping plates on the support plate, the rotating shaft of the motor drives the mounting plate to rotate, so that one mounting frame drives the support plate thereon to rotate to the outside of the mold, the motor stops, and when the coating of the substrate is completed, the motor continues to drive the mounting plate to rotate, so that the support plate and the two clamping plates rotate the coated substrate out, and the substrate is removed from between the two clamping plates to realize continuous coating.

[0009] Preferably, it also includes multiple sliding rods, multiple pressure plates and multiple springs, the multiple sliding rods are slidably inserted on both sides of the multiple support plates, the multiple pressure plates are installed on the multiple sliding rods, one ends of the multiple springs are connected to the multiple pressure plates, and the other ends of the multiple springs are connected to the multiple support plates; the multiple springs elastically support the multiple pressure plates, so that the substrate is elastically clamped between the multiple clamping plates and the multiple pressure plates, thereby improving the reliability of substrate clamping.

[0010] Preferably, it also includes multiple screws and multiple nuts, the multiple screws are respectively installed on the rear sides of the multiple support plates, the multiple screws are respectively inserted on the outer ends of the multiple mounting frames, the multiple nuts are respectively rotatably threaded on the multiple screws, and the multiple nuts respectively lock the multiple screws on the multiple mounting frames; by adjusting the relative positions of the multiple mounting frames and the multiple support plates, adjusting the relative positions of the substrate and the mold, tightening the multiple nuts to lock the multiple screws on the multiple mounting frames, so that the mold is in close contact with the substrate.

[0011] Preferably, it also includes a dustproof box, which is installed on the rear wall of the coating box. A protective chamber is arranged inside the dustproof box, and the clamping mechanism is located in the protective chamber of the dustproof box. A take-in and put-out port is arranged on one side of the dustproof box, and the take-in and put-out port is connected with the protective chamber. The dustproof box protects the clamping mechanism and the substrate to reduce the contamination of the substrate by external dust.

[0012] Preferably, it also includes an air inlet and a purifier. The air inlet is arranged on the outer wall of the dustproof box, the air inlet is opposite to the loading and unloading port of the dustproof box, the purifier is installed on the inner wall of the dustproof box, the air inlet of the purifier is aligned with the air inlet, and the air outlet of the purifier is opposite to the loading and unloading port of the dustproof box; the purifier draws air from the outside through the air inlet, and after filtering by the purifier, it is input into the protective chamber of the dustproof box and discharged through the loading and unloading port, so that the inside of the protective chamber is under positive pressure, reducing the pollution of the substrate caused by external dust entering the protective chamber.

[0013] Compared with the prior art, the utility model has the following beneficial effects: when working, a mold matching the substrate is installed on the installation frame, and the substrate is installed on the installation assembly. The motor drives the rotating shaft to rotate, and the rotating shaft drives the reciprocating screw and the clamping mechanism to rotate. The clamping mechanism rotates the substrate to the outside of the mold, and the reciprocating screw drives the screw slider to reciprocate. When the screw slider moves toward the rear wall of the coating box, the screw slider drives the installation frame to move toward the rear side of the coating box through the bracket, so that the mold and the substrate are tightly attached. When the motor stops the target material, the splashed material enters the substrate from the mold to achieve coating of the substrate. The mold isolates the parts that do not need coating, and there is no need for subsequent processing of the substrate. By setting up multiple mounting assemblies, continuous coating work is achieved, and the clamping mechanism and the substrate are located outside the coating box, which is convenient for disassembly and installation, and has good practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1It is a structural schematic diagram of the utility model;

[0015] Figure 2 It is a schematic diagram of the axonometric structure of the utility model;

[0016] Figure 3 It is a schematic diagram of the side section structure of the utility model;

[0017] Figure 4 It is a schematic diagram of the structure of the installation frame, mold, motor, reciprocating screw, screw slider and clamping mechanism;

[0018] Figure 5 It is a schematic diagram of the structure of the installation frame, mold, screw slider and other structures;

[0019] Figure 6 It is an enlarged structural diagram of the installation frame, mold, screw slider and other structures in a fen exploded state;

[0020] Figure 7 It is a structural diagram of the motor and the clamping mechanism;

[0021] Figure 8 It is a schematic diagram of the structure when the structure such as the installation components is in an exploded state.

[0022] Markings in the attached drawings: 1. coating box; 2. target material; 3. mounting frame; 4. mold; 5. motor; 6. reciprocating screw; 7. screw slider; 8. clamping mechanism; 9. slot; 10. sealing ring; 11. mounting plate; 12. mounting frame; 13. support plate; 14. card plate; 15. slide rod; 16. pressure plate; 17. spring; 18. dustproof box; 19. air inlet; 20. air purifier; 21. screw; 22. nut. DETAILED DESCRIPTION

[0023] In order to facilitate the understanding of the utility model, the utility model will be described more comprehensively below with reference to the relevant drawings. The utility model can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the utility model more thorough and comprehensive.

[0024] Example 1

[0025] like Figures 1 to 6As shown, a coating machine isolation structure includes a coating box 1 and a target material 2. A coating chamber is arranged inside the coating box 1, and the target material 2 is installed on the front inner wall of the coating box 1; it also includes a mounting frame 3, a mold 4, a motor 5, a reciprocating screw 6, a screw slider 7 and a clamping mechanism 8. A coating opening is arranged on the rear side wall of the coating box 1, and the mounting frame 3 is slidably installed in the coating opening. The mold 4 is detachably installed on the mounting frame 3, and the motor 5 is installed on the rear side wall of the coating box 1. The reciprocating screw 6 is installed on one end of the rotating shaft of the motor 5, and the reciprocating screw 6 is located in the coating chamber of the coating box 1. The screw slider 7 is rotatably screwed on the reciprocating screw 6, and the screw slider 7 is connected to the mounting frame 3 through a bracket. The clamping mechanism 8 is installed on the other end of the rotating shaft of the motor 5, and the clamping mechanism 8 is located on the rear outer side of the coating box 1. A plurality of substrate mounting components are arranged on the circumference of the structure 8; it also includes a card slot 9 and a sealing ring 10, the card slot 9 is arranged on the inner wall of the mounting frame 3, and the sealing ring 10 matching the card slot 9 is arranged on the outer wall of the mold 4; it also includes a dustproof box 18, the dustproof box 18 is installed on the rear side wall of the coating box 1, a protective chamber is arranged inside the dustproof box 18, the clamping mechanism 8 is located in the protective chamber of the dustproof box 18, a take-in and put-out port is arranged on one side of the dustproof box 18, and the take-in and put-out port is connected with the protective chamber; it also includes an air inlet 19 and a purifier 20, the air inlet 19 is arranged on the outer wall of the dustproof box 18, the air inlet 19 is opposite to the take-in and put-out port of the dustproof box 18, the purifier 20 is installed on the inner wall of the dustproof box 18, the air inlet of the purifier 20 is aligned with the air inlet 19, and the air outlet of the purifier 20 is opposite to the take-in and put-out port of the dustproof box 18.

[0026] During operation, the mold 4 matching the substrate is installed on the installation frame 3. After the mold 4 is clamped into the upper portion of the installation frame 3, the sealing ring 10 is elastically clamped in the sealing ring 10. The sealing ring 10 and the card slot 9 cooperate to enable the installation frame 3 and the mold 4 to be quickly installed and disassembled and to improve the sealing performance. The substrate is installed on the installation assembly, and the motor 5 drives the rotating shaft to rotate. The rotating shaft drives the reciprocating screw 6 and the clamping mechanism 8 to rotate. The clamping mechanism 8 rotates the substrate to the outside of the mold 4. The reciprocating screw 6 drives the screw slider 7 to reciprocate. When the screw slider 7 moves toward the rear side wall of the coating box 1, the screw slider 7 drives the installation frame 3 to move toward the rear side of the coating box 1 through the bracket, so that the mold 4 and the substrate are fixed to the substrate. The material is tightly attached, the motor 5 stops the target material 2 and the splashed material enters the mold 4 onto the substrate to achieve coating on the substrate. The mold 4 isolates the parts that do not need coating, and there is no need to subsequently process the substrate. By setting up multiple installation components, continuous coating can be achieved, and the clamping mechanism 8 and the substrate are located outside the coating box 1, which is convenient for disassembly and installation. The dustproof box 18 protects the clamping mechanism 8 and the substrate, and the air purifier 20 draws air from the outside through the air inlet 19, and after being filtered by the air purifier 20, it is input into the protection chamber of the dustproof box 18 and discharged through the access port, so that the inside of the protection chamber is under positive pressure, reducing the pollution of the substrate caused by external dust entering the protection chamber.

[0027] Example 2

[0028] like Figure 7 and Figure 8 As shown, on the basis of Example 1, the clamping mechanism 8 includes a mounting plate 11, a plurality of mounting frames 12 and a mounting assembly, the mounting assembly includes a support plate 13 and two clamping plates 14, the mounting plate 11 is concentrically mounted on the rotating shaft of the motor 5, the mounting plate 11 is located on the rear outer side of the coating box 1, the inner ends of the plurality of mounting frames 12 are uniformly mounted on the mounting plate 11, the plurality of support plates 13 are respectively mounted on the outer ends of the plurality of mounting frames 12, and the clamping plates 14 are arranged on both sides of the plurality of support plates 13; it also includes a plurality of slide bars 15, a plurality of pressure plates 16 and a plurality of springs 17, the plurality of slide bars 15 are respectively It is slidably inserted on both sides of multiple support plates 13, multiple pressure plates 16 are respectively installed on multiple sliding rods 15, one end of multiple springs 17 is respectively connected to the multiple pressure plates 16, and the other ends of multiple springs 17 are respectively connected to the multiple support plates 13; it also includes multiple screw rods 21 and multiple nuts 22, the multiple screw rods 21 are respectively installed on the rear side surfaces of the multiple support plates 13, the multiple screw rods 21 are respectively inserted on the outer ends of the multiple mounting frames 12, the multiple nuts 22 are respectively rotatably threaded on the multiple screw rods 21, and the multiple nuts 22 respectively lock the multiple screw rods 21 on the multiple mounting frames 12.

[0029] Adjust the relative positions of multiple mounting frames 12 and multiple support plates 13, adjust the relative positions of the substrate and the mold 4, tighten multiple nuts 22 to lock multiple screws 21 on the multiple mounting frames 12 respectively, so that the mold 4 is in close contact with the substrate, and insert the uncoated substrate between the two clamping plates 14 on the clamping plate 13. Multiple springs 17 elastically support multiple pressure plates 16 respectively, so that the substrate is elastically clamped between the multiple clamping plates 14 and the multiple pressure plates 16. The rotating shaft of the motor 5 drives the mounting plate 11 to rotate, so that a mounting frame 12 drives the support plate 13 thereon to rotate to the outside of the mold 4, and the motor 5 stops. When the coating of the substrate is completed, the motor 5 continues to drive the mounting plate 11 to rotate, so that the support plate 13 and the two clamping plates 14 rotate the coated substrate out, and remove the substrate from between the two clamping plates 14 to achieve continuous coating.

[0030] like Figures 1 to 8As shown, a coating machine isolation structure of the utility model, when working, firstly installs the mold 4 matching the substrate on the installation frame 3, inserts the substrate between the two clamping plates 14, and then the motor 5 drives the rotating shaft to rotate, and the rotating shaft drives the reciprocating screw 6 and the mounting plate 11 to rotate, and the mounting plate 11 and the mounting frame 12 rotate the substrate to the outside of the mold 4, and the reciprocating screw 6 drives the screw slider 7 to move back and forth. When the screw slider 7 moves toward the rear side wall of the coating box 1, the screw slider 7 drives the mounting frame 3 to move toward the rear side of the coating box 1 through the bracket, so that The mold 4 is pressed against the substrate, and then the motor 5 stops the target material 2 and the splashed material enters the substrate from the mold 4 to achieve coating of the substrate. The mold 4 isolates the parts that do not need coating, and there is no need to subsequently process the substrate. The coated substrate is unloaded through the loading and unloading port of the dustproof box 18, and finally the air purifier 20 draws air from the outside through the air inlet 19, and after being filtered by the air purifier 20, it is input into the protective chamber of the dustproof box 18 and discharged through the loading and unloading port, so that the inside of the protective chamber is under positive pressure, thereby reducing the pollution of the substrate caused by external dust entering the protective chamber.

[0031] The main functions achieved by this utility model are:

[0032] 1. It can isolate the parts that do not need coating, without the need for subsequent substrate processing;

[0033] 2. Continuous coating can be achieved by setting up multiple mounting components;

[0034] 3. Convenient for disassembly and installation of substrate.

[0035] The utility model discloses a coating machine isolation structure, and its installation method, connection method or setting method are all common mechanical methods, and they can be implemented as long as they can achieve their beneficial effects; the coating box 1, target material 2, mold 4, motor 5, reciprocating screw 6, screw slider 7, sealing ring 10, slide bar 15, spring 17, dustproof box 18, air purifier 20, screw 21, nut 22 of the coating machine isolation structure of the utility model are purchased on the market, and technicians in the industry only need to install and operate them according to the accompanying instruction manual, without the need for creative labor by technicians in this field.

[0036] All technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0037] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principle of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A coating machine isolation structure, comprising a coating box (1) and a target material (2), wherein a coating chamber is arranged inside the coating box (1), and the target material (2) is mounted on the front inner wall of the coating box (1); characterized in that: It also includes a mounting frame (3), a mold (4), a motor (5), a reciprocating screw (6), a screw slider (7) and a clamping mechanism (8); a coating opening is arranged on the rear side wall of the coating box (1); the mounting frame (3) is slidably mounted in the coating opening; the mold (4) is detachably mounted on the mounting frame (3); the motor (5) is mounted on the rear side wall of the coating box (1); a reciprocating screw (6) is mounted on one end of the rotating shaft of the motor (5); the reciprocating screw (6) is located in the coating chamber of the coating box (1); the screw slider (7) is rotatably screwed on the reciprocating screw (6); the screw slider (7) is connected to the mounting frame (3) through a bracket; the clamping mechanism (8) is mounted on the other end of the rotating shaft of the motor (5); the clamping mechanism (8) is located on the rear side of the coating box (1); and a plurality of substrate mounting components are arranged on the circumference of the clamping mechanism (8).

2. A coating machine isolation structure as claimed in claim 1, characterized in that: It also comprises a card slot (9) and a sealing ring (10); the card slot (9) is arranged on the inner side wall of the installation frame (3), and the sealing ring (10) matching the card slot (9) is arranged on the outer side wall of the mold (4).

3. A coating machine isolation structure as claimed in claim 1, characterized in that: The clamping mechanism (8) comprises a mounting plate (11), a plurality of mounting frames (12) and a mounting assembly, wherein the mounting assembly comprises a support plate (13) and two clamping plates (14), wherein the mounting plate (11) is concentrically mounted on the rotating shaft of the motor (5), the mounting plate (11) is located on the rear outer side of the coating box (1), the inner ends of the plurality of mounting frames (12) are evenly mounted on the mounting plate (11), the plurality of support plates (13) are respectively mounted on the outer ends of the plurality of mounting frames (12), and clamping plates (14) are provided on both sides of the plurality of support plates (13).

4. A coating machine isolation structure as claimed in claim 3, characterized in that: It also includes a plurality of slide bars (15), a plurality of pressure plates (16) and a plurality of springs (17). The plurality of slide bars (15) are respectively slidably inserted on both sides of the plurality of support plates (13). The plurality of pressure plates (16) are respectively installed on the plurality of slide bars (15). One end of the plurality of springs (17) is respectively connected to the plurality of pressure plates (16), and the other end of the plurality of springs (17) is respectively connected to the plurality of support plates (13).

5. A coating machine isolation structure as claimed in claim 3, characterized in that: The invention also comprises a plurality of screw rods (21) and a plurality of nuts (22), wherein the plurality of screw rods (21) are respectively mounted on the rear side surfaces of the plurality of support plates (13), the plurality of screw rods (21) are respectively inserted on the outer ends of the plurality of mounting frames (12), the plurality of nuts (22) are respectively rotatably screwed on the plurality of screw rods (21), and the plurality of nuts (22) respectively lock the plurality of screw rods (21) on the plurality of mounting frames (12).

6. The coating machine isolation structure according to claim 1, characterized in that: It also includes a dustproof box (18), which is installed on the rear side wall of the coating box (1), a protective chamber is arranged inside the dustproof box (18), the clamping mechanism (8) is located in the protective chamber of the dustproof box (18), and a take-in and put-out port is arranged on one side of the dustproof box (18), and the take-in and put-out port is connected to the protective chamber.

7. A coating machine isolation structure as claimed in claim 6, characterized in that: It also includes an air inlet (19) and a purifier (20); the air inlet (19) is arranged on the outer wall of the dustproof box (18); the air inlet (19) is opposite to the access opening of the dustproof box (18); the purifier (20) is installed on the inner wall of the dustproof box (18); the air inlet of the purifier (20) is aligned with the air inlet (19); and the air outlet of the purifier (20) is opposite to the access opening of the dustproof box (18).

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