Heater and ingot furnace

Abstract

The utility model discloses a heater and an ingot furnace, and relates to the technical field of polycrystal growth. The side heater is cylindrical; the side heater is composed of a first heating assembly and at least two foot plates distributed on the first heating assembly at intervals. The first electrode is arranged on at least one foot plate; a top heater; the top heater is square; the top heater is arranged on the side heater, the central axis of the top heater coincides with the central axis of the side heater, and the top heater is composed of a second heating assembly and second electrodes distributed on the second heating assembly at intervals. According to the utility model, the circular heater is adopted, so that the non-uniformity of a temperature field is made up, and the growth direction of the cast single crystal is more stable, thereby ensuring the overall quality of the cast single crystal silicon ingot, improving the yield of the single crystal and the feeding weight of a single furnace, and reducing the production cost.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal growth, in particular to a heater and an ingot casting furnace. Background Art

[0002] At present, most ingot furnaces use five-sided heating, including square top heaters and square side heaters. With the continuous expansion of the thermal field of the ingot furnace, the common thermal field has expanded from G5 to G7 or even G9, and the charge weight has increased from the earliest 500KG to 1300KG. The larger the built-in, the more difficult it is to ensure the uniformity of the entire temperature field, which is extremely unfavorable to the growth of cast single crystals, resulting in low yield of single crystals and more difficult to stabilize the quality. In addition, the existing heaters are mainly integral structures. Once the heater components are damaged, they need to be replaced as a whole, and the maintenance cost is expensive.

[0003] Therefore, a new heater is urgently needed. Utility Model Content

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a heater and an ingot casting furnace.

[0005] The first aspect of the utility model discloses a heater, comprising:

[0006] A side heater; the side heater is cylindrical; the side heater is composed of a first heating component and at least two foot plates spaced apart on the first heating component; a first electrode is disposed on at least one foot plate;

[0007] A top heater; the top heater is square; the top heater is arranged above the side heater, the central axis of the top heater coincides with the central axis of the side heater, and the top heater consists of a second heating component and second electrodes spaced apart on the second heating component.

[0008] In an optional manner, the first heating component includes:

[0009] A first heating element; the structure of the first heating element is at least one of a U-shaped plate, an n-shaped plate, an S-shaped plate or a serpentine plate; the first heating element includes two connected side portions;

[0010] A second heating element; the second heating element is a rectangular structure; the second heating element includes two connected side parts; the second heating element is distributed between the first heating elements at intervals;

[0011] One side portion of any one of the first heating elements is connected end to end with one side portion of another of the first heating elements or one side portion of the second heating element through a first connecting plate to enclose and form the first heating assembly;

[0012] The foot plate includes a first foot plate and a second foot plate, the first foot plate is provided with the first electrode and is connected to the second heating element; the second foot plate is arranged on the first heating element; the first foot plate and the second foot plate are alternately arranged on the first heating component.

[0013] In an optional manner, the first heating element is composed of a first heating plate with a U-shaped structure and a second heating plate with an n-type structure; one side portion of the first heating plate is connected end to end with one side portion of the second heating plate or one side portion of the second heating element; or; one side portion of the second heating plate is connected end to end with one side portion of the first heating plate or one side portion of the second heating element.

[0014] In an optional manner, the first heating plate and the second heating plate are flat plates; and / or the second heating element is a flat plate.

[0015] In an optional manner, the second foot plate is arranged on the second heating plate, the lower end surface of the second foot plate is aligned with the upper end surface of the n-type groove of the second heating element, and the central axis of the second foot plate is aligned with the central axis of the second heating plate; and / or, the lower end surface of the first foot plate is aligned with the lower end surface of the second heating element, and the central axis of the first foot plate is aligned with the central axis of the second heating element.

[0016] In an optional manner, the first connecting plate includes a first connecting portion and a second connecting portion, and the first connecting portion and the second connecting portion are at least partially connected to a side portion of the first heat-generating element or the second heat-generating element, respectively.

[0017] In an optional manner, the first connecting part and the second connecting part are formed as an arc-shaped plate or a V-shaped plate; and / or the first connecting part and / or the second connecting part have a through hole; the first heating element and / or the second heating element are connected to the first connecting part and / or the second connecting part by bolts, screws or pins.

[0018] In an optional manner, the second heating component includes at least two bent heating elements symmetrically arranged on the same plane; and the second electrodes are distributed on the second heating component at intervals.

[0019] In an optional manner, a second connecting plate is provided on the bent heating element.

[0020] In an optional manner, the foot plate is arranged in the same plane as the top heater along the direction of the axial center line of the side heater and away from the end surface of the first heating element.

[0021] In an optional manner, the first electrode and the second electrode are arranged on the same plane, and one second electrode is arranged between any two adjacent first electrodes; and one first electrode is arranged between any two adjacent second electrodes.

[0022] The second aspect of the utility model discloses an ingot casting furnace, comprising a heater disclosed in the first aspect of the utility model.

[0023] Compared with the prior art, the utility model has the following beneficial effects:

[0024] (1) The utility model adopts a circular heater to compensate for the unevenness of the temperature field, making the growth direction of the cast single crystal more stable, thereby ensuring the overall quality of the cast single crystal silicon ingot, improving the yield of the single crystal, the weight of the single furnace feed, and reducing the production cost.

[0025] (2) The utility model breaks the conventional idea and adopts the method of splicing flat plates, which is easy to disassemble and maintain, thus greatly reducing the maintenance cost of the heater.

[0026] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0028] Figure 1 A three-dimensional schematic diagram of a heater provided by the utility model;

[0029] Figure 2 for Figure 1 a side view of the heater shown;

[0030] Figure 3 for Figure 1 A top view of the heater.

[0031] Reference numerals:

[0032] 100-side heater; 110-first heating component; 111-first heating element; 1111-first heating plate; 1112-second heating plate; 112-second heating element; 120-first connecting plate; 121-first connecting portion; 122-second connecting portion; 123-through hole; 130-foot plate; 131-first foot plate; 132-second foot plate; 140-first electrode; 200-top heater; 210-second heating component; 211-bending heating element; 220-second connecting plate; 230-second electrode. DETAILED DESCRIPTION

[0033] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0034] The disclosure below provides many different embodiments or examples for realizing different structures of the utility model. In order to simplify the disclosure of the utility model, the components and settings of specific examples are described below. Of course, they are merely examples, and the purpose is not to limit the utility model. In addition, the utility model can repeat reference numbers and / or letters in different examples. This repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the utility model provides various specific examples of processes and materials, but those of ordinary skill in the art can be aware of the applicability of other processes and / or the use of other materials.

[0035] Below, refer to the attached Figure 1-3 , describing a heater disclosed in the first aspect of the embodiment of the utility model, as can be seen from the figure, the heater includes a side heater 100 and a top heater 200;

[0036] The side heater 100 is cylindrical and consists of a first heating component 110 and at least two foot plates 130. The at least two foot plates 130 are spaced apart on the first heating component 110. Preferably, the at least two foot plates 130 are evenly spaced apart on the first heating component 110, and at least one foot plate 130 is provided with a first electrode 140.

[0037] The top heater 200 is square; the top heater 200 is arranged above the side heater 100, and the central axis of the top heater 200 coincides with the central axis of the side heater 100; the top heater 200 is composed of a second heating component 210 and a second electrode 230, and the second electrodes 230 are distributed on the second heating component 210 at intervals; preferably, the second electrodes 230 are evenly distributed on the second heating component 210.

[0038] Therefore, by setting up a cylindrical side heater, the heat radiated to the silicon ingot by the heater is more uniform, so that the growth direction of the cast single crystal silicon ingot or the cast multicrystalline silicon ingot is more stable, thereby ensuring the overall quality of the cast single crystal silicon ingot or the cast multicrystalline silicon ingot, improving the single crystal yield, the single furnace charge weight, and reducing production costs.

[0039] In an optional manner, the first heating component 110 includes a first heating element 111 and a second heating element 112; the structure of the first heating element 111 is at least one of a U-shaped plate, an n-shaped plate, an S-shaped plate or a serpentine plate. The first heating element 111 includes two connected side portions; it is worth noting that the U-shaped plate and the n-shaped plate have the same structure, except that the opening directions are opposite during the connection process of the heater; the S-shaped plate is a structure prepared by connecting a U-shaped plate and an n-shaped plate end to end; the serpentine plate is prepared by connecting multiple S-shaped plates end to end.

[0040] The second heating element 112 is a rectangular structure; for example, it can be a rectangle or a square; the second heating element 112 includes two connected side parts;

[0041] The second heating elements 112 are distributed between the first heating elements 111 at intervals; preferably, the second heating elements 112 are evenly distributed between the first heating elements 111;

[0042] One side portion of any one of the first heating elements 111 is connected end to end with one side portion of another first heating element 111 or one side portion of the second heating element 112 through the first connecting plate 120 to enclose and form the first heating component 110;

[0043] The foot plate 130 includes a first foot plate 131 and a second foot plate 132. The first foot plate 131 is provided with a first electrode 140 and is connected to the second heating element 112. The second foot plate 132 is arranged on the first heating element 111. The first foot plate 131 and the second foot plate 132 are alternately arranged on the first heating component.

[0044] Thus, by connecting the first heating element 111 and the second heating element 112, the first heating component 110 is formed, and by connecting the first foot plate 131, the second foot plate 132 and the first electrode 140 with the first heating element 111 and the second heating element 112, the side heater 100 is formed.

[0045] Further, the first heating element 111 is composed of a first heating plate 1111 of a U-shaped structure and a second heating plate 1112 of an n-shaped structure; one side of the first heating plate 1111 is connected end to end with one side of the second heating plate 1112 or one side of the second heating element 112; or one side of the second heating plate 1112 is connected end to end with one side of the first heating plate 1111 or one side of the second heating element 112. Thus, the first heating element 111 is formed.

[0046] Furthermore, the first heating plate 1111 and the second heating plate 1112 are flat plates; the flat plates are plates with parallel upper and lower surfaces and are straight planes, and their manufacture is simpler and cheaper than that of curved plates or V-shaped plates, thereby further reducing the manufacturing cost of the heater.

[0047] Furthermore, the second heating element 112 is a flat plate, thereby further reducing the manufacturing cost of the heater.

[0048] In an optional manner, the second foot plate 132 is disposed on the second heating plate 1112, the lower end surface of the second foot plate 132 is aligned with the upper end surface of the n-type groove of the second heating element 112, and the central axis of the second foot plate 132 is aligned with the central axis of the second heating plate 1112; thereby better realizing the coordinated connection between the side heater 100 and the top heater 200.

[0049] In an optional manner, the lower end surface of the first foot plate 131 is aligned with the lower end surface of the second heating element 112, and the central axis of the first foot plate 131 (131) is aligned with the central axis of the second heating element 112 (112), thereby better achieving the matching connection between the side heater 100 and the top heater 200.

[0050] In an optional manner, the first connecting plate 120 includes a first connecting portion 121 and a second connecting portion 122, and the first connecting portion 121 and the second connecting portion 122 are respectively at least partially connected to the side of the first heating element 111 or the second heating element 112. In the process of connecting the first heating element 111 or the second heating element 112, the first connecting portion 121 and the second connecting portion 122 can be completely connected to the side of the first heating element 111 or the second heating element 112, or partially connected; thus, the heater is assembled by splicing, so that subsequent disassembly and assembly are simple, maintenance is convenient, and the maintenance cost of the heater is reduced.

[0051] Furthermore, the first connecting portion 121 and the second connecting portion 122 are formed as an arc-shaped plate or a V-shaped plate; since the first heating element 111 or the second heating element 112 is a flat plate and needs to be enclosed in a cylindrical shape; therefore, forming the first connecting plate 120 as an arc-shaped plate or a V-shaped plate can enable the first connecting plate 120 to better fit the side of the first heating element 111 or the second heating element 112, thereby further realizing the preparation of the heater.

[0052] Furthermore, the first connection part 121 and / or the second connection part 122 has a through hole 123; the first heating element 111 and / or the second heating element 112 is connected to the first connection part 121 and / or the second connection part 122 by bolts, screws or pins; thereby, the preparation of the heater can be further realized.

[0053] In an optional manner, the second heating component 210 includes at least two bent heating elements 211 symmetrically arranged on the same plane; the second electrodes 230 are distributed on the second heating component 210 at intervals; preferably, the second electrodes 230 are evenly distributed on the second heating component 210.

[0054] Furthermore, a second connecting plate 220 is provided on the bending type heating element 211. Thus, the second heating component 210 can be spliced, so that the second heating component 210 is easier to maintain.

[0055] In an optional manner, the foot plate 130 is arranged in the same plane as the top heater 200 along the axial centerline of the side heater 100, away from the end surface of the first heating element 111. Thus, the side heater 100 can better support the top heater 200 and make the temperature in the furnace more uniform.

[0056] In an optional manner, the first electrode 140 and the second electrode 230 are arranged on the same plane, and a second electrode 230 is arranged between any two adjacent first electrodes 140; and a first electrode 140 is arranged between any two adjacent second electrodes 230. This can make the temperature in the furnace more uniform, thereby ensuring the overall quality of the cast single crystal silicon ingot, improving the yield rate of single crystals, the weight of single furnace feed, and reducing production costs.

[0057] An ingot casting furnace disclosed in the second aspect of the utility model is described, comprising a heater disclosed in the first aspect of the utility model.

[0058] The use of circular heaters in the ingot casting furnace can compensate for the unevenness of the temperature field and make the growth direction of the cast single crystal more stable, thereby ensuring the overall quality of the cast single crystal silicon ingot, improving the single crystal yield, single furnace feed weight, and reducing production costs.

[0059] In addition, the heater is formed by splicing flat plates, which is easy to disassemble and maintain, greatly reducing the maintenance cost of the heater.

[0060] The heater disclosed in the first aspect of the present utility model is described in detail below with several specific embodiments. It is worth noting that the following description is only an exemplary description and not a specific limitation of the invention. Example

[0061] refer to Figure 1-3 The heater includes a top heater 200 and a side heater 100; the side heater 100 is cylindrical and the top heater 200 is square; the top heater 200 is arranged above the side heater 100, and the central axis of the top heater 200 coincides with the central axis of the side heater 100.

[0062] The side heater 100 is composed of a first heating component 110, a foot plate 130 and a first electrode 140;

[0063] The first heating assembly 110 is composed of a first heating element 111 and a second heating element 112. The first heating element 111 includes a first heating plate 1111 and a second heating plate 1112. The first heating plate 1111 is a flat plate with a U-shaped structure; the second heating plate 1112 is a flat plate with an n-shaped structure; the second heating element 112 is a flat plate with a rectangular structure; on the centerline axis of the side heater 100, the length of the first heating element 111 is greater than the length of the second heating element 112; the number of the first heating plates 1111 is composed of 6 U-shaped plates, 9 n-shaped plates and 3 second heating elements 112; the second heating elements 112 are evenly spaced on the first heating assembly 110, and the two side portions of the second heating element 112 are respectively connected to one side portion of the two second heating plates 1112; the other side portions of the two second heating plates 1112 are connected to one side portion of the first heating plate 1111; the side portions of the first heating element 111 plate (1111) are all connected to one side portion of the second heating plate 1112;

[0064] The foot plate 130 includes a first foot plate 131 and a second foot plate 132, and there are three first foot plates 131 and three second foot plates 132, and the first foot plates 131 and the second foot plates 132 are alternately and evenly spaced and distributed on the first heating component 110; there are three first electrodes 140, which are arranged on the first foot plate 131; the first foot plate 131 is connected to the second heating element 112, the lower end surface of the first foot plate 131 is aligned with the lower end surface of the second heating element 112, and the central axis of the first foot plate 131 is aligned with the central axis of the second heating element 112; the second foot plate 132 is arranged on the second heating plate 1112, the lower end surface of the second foot plate 132 is aligned with the upper end surface of the n-type groove of the second heating element 112, and the central axis of the second foot plate 132 is aligned with the central axis of the second heating plate 1112;

[0065] The first heating component 110 is formed by connecting the first connecting plate 120. The first connecting plate 120 is a V-shaped plate. The first connecting plate 120 includes a first connecting portion 121 and a second connecting portion 122. The first connecting portion 121 and the second connecting portion 122 are respectively connected to the side of the first heating element 111 or the second heating element 112. The first connecting portion 121 and / or the second connecting portion 122 have a through hole 123. The first heating element 111 and / or the second heating element 112 are connected to the first connecting portion 121 and / or the second connecting portion 122 by pins.

[0066] The top heater 200 is composed of a second heating component 210, a foot plate 130 and a second electrode 230; the second heating component 210 is composed of at least two bending heating elements 211 symmetrically arranged in the same plane; the bending heating element 211 is composed of three second electrodes 230 and two connecting plates; the three second electrodes 230 are evenly spaced and distributed on the second heating component 210, and the three second electrodes 230 can form an equilateral triangle in the same plane; a second electrode 230 is arranged between any two adjacent first electrodes 140, and a first electrode 140 is arranged between any two second electrodes 230.

[0067] The foot plate 130 is arranged in the same plane as the top heater 200 along the direction of the axial center line of the side heater 100 and away from the end surface of the first heating element 111 .

[0068] The first heating element 110 and the second heating element 210 are made of graphite. Example

[0069] The difference from the first embodiment is that the material of the first heating component 110 and the second heating component 112 is carbon-carbon. Example

[0070] The difference from the first embodiment is that there are four first foot plates 131 and four second foot plates 132, and the first foot plates and the second foot plates are alternately and evenly spaced on the first heating component; there are four first electrodes 140, which are arranged on the first foot plates;

[0071] The bent heating element is composed of four second electrodes 230 and two second connecting plates 220; the four second electrodes 230 are evenly spaced and distributed on the second heating component 210, and the four second electrodes 230 can form a rhombus or a square on the same plane; a second electrode 230 is arranged between any two adjacent first electrodes 140, and a first electrode 140 is arranged between any two second electrodes 130.

[0072] In the description of the present utility model, it is necessary to understand that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, features defined as "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0073] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0074] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0075] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A heater, characterized in that: include: A side heater (100); the side heater (100) is cylindrical; the side heater (100) is composed of a first heating component (110) and at least two foot plates (130) spaced apart and distributed on the first heating component (110); a first electrode (140) is disposed on at least one of the foot plates (130); A top heater (200); the top heater (200) is square; the top heater (200) is arranged above the side heater (100), the central axis of the top heater (200) coincides with the central axis of the side heater (100), and the top heater (200) is composed of a second heating component (210) and second electrodes (230) spaced apart on the second heating component (210).

2. The heater according to claim 1, characterized in that The first heating component (110) comprises: a first heating element (111); the structure of the first heating element (111) is at least one of a U-shaped plate, an n-shaped plate, an S-shaped plate or a serpentine plate; the first heating element (111) comprises two connected side portions; A second heating element (112); the second heating element (112) is a rectangular structure; the second heating element (112) comprises two connected side portions; the second heating element (112) is distributed between the first heating elements (111) at intervals; One side portion of any one of the first heating elements (111) is connected end to end with one side portion of another first heating element (111) or one side portion of the second heating element (112) via a first connecting plate (120), thereby enclosing and forming the first heating component (110); The foot plate (130) comprises a first foot plate (131) and a second foot plate (132); the first foot plate (131) is provided with the first electrode (140) and is connected to the second heating element (112); the second foot plate (132) is arranged on the first heating element (111); the first foot plate (131) and the second foot plate (132) are alternately arranged on the first heating component (110).

3. The heater according to claim 2, characterized in that The first heating element (111) is composed of a first heating plate (1111) of a U-shaped structure and a second heating plate (1112) of an n-shaped structure; one side of the first heating plate (1111) is connected end to end with one side of the second heating plate (1112) or one side of the second heating element (112); or one side of the second heating plate (1112) is connected end to end with one side of the first heating plate (1111) or one side of the second heating element (112).

4. The heater according to claim 3, characterized in that The first heating plate (1111) and the second heating plate (1112) are flat plates; and / or the second heating element (112) is a flat plate; and / or the second foot plate (132) is arranged on the second heating plate (1112), the lower end surface of the second foot plate (132) is aligned with the upper end surface of the n-type groove of the second heating element (112), and the central axis of the second foot plate (132) is aligned with the central axis of the second heating plate (1112); and / or the lower end surface of the first foot plate (131) is aligned with the lower end surface of the second heating element (112), and the central axis of the first foot plate (131) is aligned with the central axis of the second heating element (112).

5. The heater according to claim 2, characterized in that The first connecting plate (120) comprises a first connecting portion (121) and a second connecting portion (122), wherein the first connecting portion (121) and the second connecting portion (122) are at least partially connected to a side portion of the first heat generating element (111) or the second heat generating element (112), respectively.

6. The heater according to claim 5, characterized in that The first connecting portion (121) and the second connecting portion (122) are formed as arc-shaped plates or V-shaped plates; and / or the first connecting portion (121) and / or the second connecting portion (122) have a through hole (123); the first heating element (111) and / or the second heating element (112) are connected to the first connecting portion (121) and / or the second connecting portion (122) by means of bolts, screws or pins.

7. The heater according to claim 1, characterized in that The second heating component (210) comprises at least two bent heating elements (211) symmetrically arranged on the same plane; the second electrodes (230) are distributed on the second heating component (210) at intervals.

8. The heater according to claim 7, characterized in that A second connecting plate (220) is provided on the bent heating element (211).

9. The heater according to claim 1, characterized in that The foot plate (130) is arranged in the same plane as the top heater (200) along the direction of the axial centerline of the side heater (100) and away from the end surface of the first heating component (110).

10. The heater according to claim 9, characterized in that The first electrode (140) and the second electrode (230) are arranged on the same plane, and one second electrode (230) is arranged between any two adjacent first electrodes (140); and one first electrode (140) is arranged between any two adjacent second electrodes (230).

11. An ingot casting furnace, characterized in that: The heater comprises the heater described in any one of claims 1-10.

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