Anti-explosion vacuumizing pipeline of single crystal furnace

Abstract

The utility model discloses a single crystal furnace anti-explosion vacuumizing pipeline which comprises at least two vacuumizing pipelines communicated with each other, a communication pipeline and a gas collection pipeline, each vacuumizing pipeline is communicated with a furnace body, each vacuumizing pipeline is provided with a first anti-explosion opening and a downward first cleaning opening, the first anti-explosion opening is sealed through a first anti-explosion assembly, and the second anti-explosion assembly is sealed through a second cleaning opening. The first anti-explosion assembly is configured to be automatically opened when the pressure intensity in the vacuumizing pipeline reaches a corresponding value or manually opened during cleaning; a second cleaning opening is formed in the communicating pipeline, at least one second anti-explosion opening is formed in the gas collecting pipeline, the second anti-explosion opening is sealed through a second anti-explosion assembly, and the second anti-explosion assembly is configured to be automatically opened when the pressure intensity in the gas collecting pipeline reaches a corresponding value or manually opened during cleaning; and sealing pieces are respectively arranged at the two cleaning openings in an openable and closable manner. All the pipelines of the explosion-proof vacuumizing pipeline of the single crystal furnace can be conveniently cleaned, so that the vacuumizing effect of the single crystal furnace is ensured; and the explosion-proof effect is good.

Description

Technical Field

[0001] The present application belongs to the field of single crystal furnace manufacturing, and in particular relates to an explosion-proof vacuum pipeline for a single crystal furnace. Background Art

[0002] In a single crystal furnace, the lower end of the furnace body is usually connected to a vacuum line, which is connected to a vacuum pump to evacuate the inside of the furnace body. When a single crystal furnace is in use, silicon material needs to be added to the crucible inside the furnace body. The existing feeding technology will generate a lot of dust in the furnace body when adding materials. At the same time, many impurities will be precipitated in the process of drawing silicon rods after the silicon material is melted. The crucible heat field and other high temperature environments will also precipitate a lot of oxide impurities. The above dust and oxide impurities need to be vacuumed away to prevent contamination of the silicon rods. However, after the vacuum line is used for a long time, dust and impurities will accumulate in the pipe, which needs to be cleaned. The dirt in the existing vacuum line of the single crystal furnace is not easy to clean, the maintenance time is long, the economic effect is not good, and it is not friendly to the production staff. In addition, the existing vacuum line has a poor explosion-proof effect and is prone to safety hazards. Utility Model Content

[0003] The purpose of the present application is to provide an explosion-proof vacuum pipeline for a single crystal furnace, so as to solve the problem that the vacuum pipeline of the existing single crystal furnace is difficult to clean and has poor explosion-proof effect.

[0004] To achieve this goal, this application adopts the following technical solutions:

[0005] An explosion-proof vacuum pipeline for a single crystal furnace, comprising at least two vacuum pipelines, a connecting pipeline and a gas collecting pipeline, wherein:

[0006] Each vacuuming pipeline is connected to the furnace body, and each vacuuming pipeline is provided with a first explosion-proof opening and a first cleaning opening facing downwards, the first explosion-proof opening is sealed by a first explosion-proof component, and the first explosion-proof component is configured to open automatically when the pressure in the vacuuming pipeline reaches a corresponding value, or can be opened manually during cleaning;

[0007] The communication pipe is connected with all the vacuum pipes, the gas collection pipe is connected with the communication pipe, a second cleaning port is provided on the communication pipe, and at least one second explosion-proof port is provided on the gas collection pipe. The second explosion-proof port is sealed by a second explosion-proof component, and the second explosion-proof component is configured to open automatically when the pressure in the gas collection pipe reaches a corresponding value, or can be opened manually during cleaning;

[0008] The first cleaning port and the second cleaning port are respectively provided with sealing members which can be opened or closed.

[0009] The explosion-proof vacuum pumping pipeline of the single crystal furnace proposed in the present application includes at least two vacuum pumping pipelines, a connecting pipeline and a gas collecting pipeline that are interconnected, and a first downward cleaning port is provided on the vacuum pumping pipeline to facilitate cleaning of dirt in the vacuum pumping pipeline; a second cleaning port is provided on the connecting pipeline to facilitate cleaning of dirt in the connecting pipeline; at least one second explosion-proof port is provided on the gas collecting pipeline, and the second explosion-proof port can also be used as a cleaning port to clean the dirt in the gas collecting pipeline. In summary, each pipeline in the explosion-proof vacuum pumping pipeline of the single crystal furnace of the present application can be easily cleaned, ensuring the vacuum pumping effect of the single crystal furnace. In addition, by providing a first explosion-proof component on the vacuum pumping pipeline and a second explosion-proof component on the gas collecting pipeline, the explosion-proof effect of the explosion-proof vacuum pumping pipeline of the single crystal furnace is improved.

[0010] Optionally, the vacuum pipe includes a vertical section, a branch section and an inclined section that are interconnected, the vertical section is vertically installed at the bottom of the furnace body, the upper end of the vertical section is connected to the furnace body, the lower port of the vertical section constitutes a first cleaning port, the first end of the branch section is connected to the side wall of the vertical section, the second port of the branch section constitutes a first explosion-proof port, the first end of the inclined section is connected to the side wall of the vertical section, the second end of the inclined section is connected to the connecting pipe, and the inclined section is arranged to extend downward from the first end to the second end.

[0011] By setting the first cleaning port at the lower port of the vertical section, it is convenient to clean the dirt in the vertical section; by setting the first explosion-proof port on the branch section, the explosion-proof function of the vacuum pipe is achieved, and by setting the inclined section, the connection between the vacuum pipe and the connecting pipe is achieved, providing a vacuum pipe with a simple structure, explosion-proof and easy to clean dirt in the pipe.

[0012] Optionally, the branch segment is arranged horizontally, and the first port of the branch segment and the first port of the inclined segment are directly opposite to each other.

[0013] By setting the branch section horizontally and setting the first port of the branch section opposite to the first port of the inclined section, the dirt in the inclined section can be cleaned by opening the first explosion-proof component, without the need to set a separate cleaning port on the inclined section, thereby simplifying the overall structure.

[0014] Optionally, the seal includes a first cover plate and a locking assembly, the first cover plate is hinged on the tube wall at the corresponding first cleaning port or the second cleaning port, the locking assembly is configured to lock the first cover plate at the corresponding first cleaning port or the second cleaning port to close the corresponding first cleaning port or the second cleaning port, and the locking assembly is also configured to be able to unlock to open the first cover plate.

[0015] Through the cooperation of the first cover plate and the locking assembly, the first cleaning opening or the second cleaning opening is closed and opened, providing a sealing member with a simple structure and low cost.

[0016] Optionally, the locking assembly includes a first pin, a first pivot bolt and a first locking nut, the first pin is installed on the tube wall at the corresponding first cleaning port or the second cleaning port, the first end of the first pivot bolt is hinged on the first pin, the first locking nut is mounted on the first pivot bolt, and a first notch is provided on the edge of the first cover plate for the first pivot bolt to pass through. The first pivot bolt is rotated around the first pin by a corresponding angle so that the first pivot bolt passes through the first notch, and the first locking nut is located on the outer side of the first cover plate. The first locking nut is rotated to press and fix the first cover plate to the corresponding first cleaning port or the second cleaning port through the first locking nut.

[0017] Through the cooperation of the first pin shaft, the first articulated bolt and the first locking nut, the first cover plate is pressed and fixed at the corresponding first cleaning port or the second cleaning port to close the corresponding cleaning port, and the first cover plate at the first cleaning port or the second cleaning port is opened, providing a locking assembly that is easy to implement and quick and convenient to operate.

[0018] Optionally, the first explosion-proof assembly includes a second cover plate, a second pin shaft, a second articulated bolt, a second locking nut, an elastic member and a limit member, the second cover plate is hinged on the tube wall of the first explosion-proof opening, the second pin shaft is installed on the tube wall of the first explosion-proof opening, the first end of the second articulated bolt is hinged on the second pin shaft, the second end of the second articulated bolt is installed with the limit member, the second locking nut is sleeved on the second articulated bolt, the edge of the second cover plate is provided with a second notch for the second articulated bolt to pass through, the elastic member is sleeved on the second articulated bolt, the first end of the elastic member abuts against the second articulated bolt, and the second end of the elastic member abuts against the limit member;

[0019] The second articulated bolt is rotated around the second pin shaft by a corresponding angle, so that the second articulated bolt passes through the second notch, and the second locking nut is located outside the second cover plate, and the second locking nut is rotated to press the second cover plate against and fix it at the first explosion-proof opening through the second locking nut;

[0020] When the pressure in the vacuum pipe reaches a corresponding value, the pressure impacts the second cover plate and compresses the elastic member, so that the second cover plate automatically opens.

[0021] By cooperating with the second cover plate, the second pin shaft, the second articulated bolt, the second locking nut, the elastic member and the limit member, the second cover plate is pressed and fixed on the first explosion-proof opening. When the pressure in the vacuum pipe reaches a corresponding value, the second cover plate is automatically opened to implement pressure relief and explosion prevention. A first explosion-proof component is provided which is easy to implement and convenient and quick to operate.

[0022] Optionally, a pneumatic ball valve for controlling the on-off of the gas gathering pipeline is provided on the gas gathering pipeline, and a second explosion-proof component is provided on both sides of the pneumatic ball valve on the gas gathering pipeline.

[0023] By setting up a pneumatic ball valve, the on-off control of the gas collecting pipeline is achieved; by setting up a second explosion-proof component on the gas collecting pipeline on both sides of the pneumatic ball valve, when the pneumatic ball valve is closed, the second explosion-proof port close to the furnace body is connected to the furnace body, and pressure relief and explosion prevention can still be achieved, further improving the explosion-proof effect.

[0024] Optionally, the second explosion-proof assembly includes a third cover plate, the opening of the second explosion-proof opening faces upward, and the third cover plate is hinged on the pipe wall of the second explosion-proof opening;

[0025] The third cover plate closes the second explosion-proof opening by its own weight. When the pressure in the gas collecting pipeline reaches a corresponding value, the pressure overcomes the self-weight of the third cover plate to open it.

[0026] By setting the second explosion-proof opening upward and hingedly connecting the third cover plate to the pipe wall of the second explosion-proof opening, the second explosion-proof opening is closed by the deadweight of the third cover plate, and when the pressure in the gas collecting pipe reaches a corresponding value, the pressure overcomes the deadweight of the third cover plate to open it, thereby implementing pressure relief and explosion prevention; a second explosion-proof component with a simple structure and low cost is provided.

[0027] Optionally, the second end of the inclined section of the vacuum pumping pipe is connected to a first bellows, the vacuum pumping pipe is connected to the connecting pipe through the first bellows, and the vacuum pumping pipe is connected to the gas collecting pipe through the second bellows.

[0028] By providing the first bellows and the second bellows, assembly errors can be compensated, making installation and disassembly of the entire vacuum pipeline easier.

[0029] Optionally, there are two vacuum pipes, there are two first bellows, the connecting pipes include a collecting pipe and two branch pipes, the first end of the collecting pipe is connected to the gas collecting pipe through the second bellows, the second end of the collecting pipe is connected to the two branch pipes at the same time, the two branch pipes are connected to the corresponding inclined sections through the first bellows respectively, and the second cleaning port is opened at the connection between the second ends of the two branch pipes and the collecting pipe.

[0030] By setting up a collecting pipe and two branch pipes, a single collecting pipe is used to implement the vacuum operation on the furnace body through two vacuum pipes, thereby simplifying the pipeline structure; by opening the second cleaning port at the connection between the second ends of the two branch pipes and the collecting pipe, it is convenient to clean the dirt in the two branch pipes and the collecting pipe, which helps to improve the cleaning efficiency of the pipeline. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a schematic diagram of the three-dimensional structure of the explosion-proof vacuum pipeline of the single crystal furnace provided in the embodiment of the present application;

[0032] Figure 2 It is a schematic diagram of the three-dimensional structure of a seal of an explosion-proof vacuum pipeline of a single crystal furnace provided in an embodiment of the present application;

[0033] Figure 3 yes Figure 1 A partial enlarged view of the middle A;

[0034] Figure 4 It is a schematic diagram of the three-dimensional structure of the first explosion-proof component of the crystal furnace explosion-proof vacuum pipeline provided in an embodiment of the present application.

[0035] Figures 1 to 4 The following reference numerals are included:

[0036] Vacuuming pipe 10, vertical section 100, branch section 101, inclined section 102, first explosion-proof assembly 11, second cover plate 110, second pin 111, second articulated bolt 112, second locking nut 113, elastic member 114, stopper 115, second notch 116;

[0037] The connecting pipe 20, the collecting pipe 200, and the diverter pipe 201;

[0038] Gas collecting pipeline 30, pneumatic ball valve 31, second explosion-proof assembly 32, third cover plate 320, hinge 321, second explosion-proof port 33,

[0039] Furnace body 40,

[0040] The sealing member 50, the first cover plate 51, the first handle 510, the first notch 511, the locking assembly 52, the first pin 520, the first articulated bolt 521, and the first locking nut 522;

[0041] A first bellows 60 and a second bellows 61 . DETAILED DESCRIPTION

[0042] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0043] In a single crystal furnace, the lower end of the furnace body is usually connected to a vacuum line, which is connected to a vacuum pump to evacuate the inside of the furnace body. When a single crystal furnace is in use, silicon material needs to be added to the crucible inside the furnace body. The existing feeding technology will generate a lot of dust in the furnace body when adding materials. At the same time, many impurities will be precipitated in the process of drawing silicon rods after the silicon material is melted. The crucible heat field and other high temperature environments will also precipitate a lot of oxide impurities. The above dust and oxide impurities need to be vacuumed away to prevent contamination of the silicon rods. However, after the vacuum line is used for a long time, dust and impurities will accumulate in the pipe, which needs to be cleaned. The dirt in the existing vacuum line of the single crystal furnace is not easy to clean, the maintenance time is long, the economic effect is not good, and it is not friendly to the production staff. In addition, the existing vacuum line has a poor explosion-proof effect and is prone to safety hazards.

[0044] Therefore, the present application provides a single crystal furnace explosion-proof vacuum pipeline, which is used to cooperate with a vacuum pump to vacuum the inside of the single crystal furnace. Figure 1 As shown, the explosion-proof vacuum pipeline of a single crystal furnace provided in an embodiment of the present application includes at least two vacuum pipes 10, a connecting pipe 20 and a gas collecting pipe 30, wherein: each vacuum pipe 10 is connected to a furnace body 40, and each vacuum pipe 10 is provided with a first explosion-proof port and a first downward cleaning port, the first explosion-proof port is sealed by a first explosion-proof component 11, and the first explosion-proof component 11 is configured to automatically open when the pressure in the vacuum pipe 10 reaches a corresponding value, or can be manually opened during cleaning; the connecting pipe 20 is connected to all the vacuum pipes 10, and the gas collecting pipe 30 is connected to the connecting pipe 20, and a second cleaning port is provided on the connecting pipe 20, and at least one second explosion-proof port 31 is provided on the gas collecting pipe 30, and the second explosion-proof port 31 is sealed by a second explosion-proof component 32, and the second explosion-proof component 32 is configured to automatically open when the pressure in the gas collecting pipe 30 reaches a corresponding value, or can be manually opened during cleaning; sealing members 50 are respectively provided at the first cleaning port and the second cleaning port, which can be opened or closed.

[0045] The explosion-proof vacuum pumping pipeline of the single crystal furnace proposed in the present application includes at least two mutually connected vacuum pumping pipes 10, a connecting pipe 20 and a gas collecting pipe 30, and a first downward cleaning port is provided on the vacuum pumping pipe 10 to facilitate cleaning of dirt in the vacuum pumping pipe 10; a second cleaning port is provided on the connecting pipe 20 to facilitate cleaning of dirt in the connecting pipe 20; at least one second explosion-proof port is provided on the gas collecting pipe 30, and the second explosion-proof port can also be used as a cleaning port to clean the dirt in the gas collecting pipe 30. In summary, each pipeline in the explosion-proof vacuum pumping pipeline of the single crystal furnace of the present application can be easily cleaned, ensuring the vacuum pumping effect of the single crystal furnace. In addition, by providing a first explosion-proof component 11 on the vacuum pumping pipe 10 and a second explosion-proof component 32 on the gas collecting pipe 30, the explosion-proof effect of the explosion-proof vacuum pumping pipeline of the single crystal furnace is improved.

[0046] As an embodiment, the vacuum pipe 10 includes a vertical section 100, a branch section 101 and an inclined section 102 that are interconnected. The vertical section 100 is vertically installed at the bottom of the furnace body 40. The upper end of the vertical section 100 is connected to the furnace body 40. The lower port of the vertical section 100 constitutes a first cleaning port. The first end of the branch section 101 is connected to the side wall of the vertical section 100. The second port of the branch section 101 constitutes a first explosion-proof port. The first end of the inclined section 102 is connected to the side wall of the vertical section 100. The second end of the inclined section 102 is connected to the connecting pipe 20. The inclined section 102 is arranged to extend downward from the first end to the second end.

[0047] Specifically, the vertical section 100, the branch section 101 and the inclined section 102 are all arranged with equal diameters to facilitate cleaning of dirt.

[0048] By setting the first cleaning port at the lower end of the vertical section 100, it is convenient to clean the dirt in the vertical section 100; by setting the first explosion-proof port on the branch section 101, the explosion-proof function of the vacuum pipe 10 is achieved, and by setting the inclined section 102, the connection between the vacuum pipe 10 and the connecting pipe 20 is achieved, providing a vacuum pipe 10 with a simple structure, explosion-proof and easy to clean dirt in the pipe.

[0049] As an implementation manner, the branch segment 101 is arranged horizontally, and the first port of the branch segment 101 and the first port of the inclined segment 102 are directly opposite.

[0050] The first explosion-proof component 11 is installed at the second port of the branch section 101. Since the branch section 101 is horizontally arranged and the first port of the branch section 101 is arranged opposite to the first port of the inclined section 102, the dirt in the branch section 101 and the inclined section 102 can be cleaned by opening the first explosion-proof component 11, which is more convenient and does not require a separate cleaning port on the inclined section 102, thereby simplifying the overall structure.

[0051] See also Figures 1 to 3 As shown, as an embodiment, the seal 50 includes a first cover plate 51 and a locking assembly 52. ​​The first cover plate 51 is hinged on the tube wall at the corresponding first cleaning port or the second cleaning port. The locking assembly 52 is configured to lock the first cover plate 51 at the corresponding first cleaning port or the second cleaning port to close the corresponding first cleaning port or the second cleaning port. The locking assembly 52 is also configured to be able to unlock to open the first cover plate 51.

[0052] Specifically, a first handle 510 for easy operation is provided on the outer side of the first cover plate 51 .

[0053] Through the cooperation of the first cover plate 51 and the locking assembly 52, the first cleaning opening or the second cleaning opening is closed and opened, providing a sealing member 50 with a simple structure and low cost.

[0054] As an embodiment, the locking assembly 52 includes a first pin shaft 520, a first pivot bolt 521 and a first locking nut 522. The first pin shaft 520 is installed on the pipe wall at the corresponding first cleaning port or the second cleaning port. The first end of the first pivot bolt 521 is hinged on the first pin shaft 520. The first locking nut 522 is sleeved on the first pivot bolt 521. The edge of the first cover plate 51 is provided with a first notch 511 for the first pivot bolt 521 to pass through. The first pivot bolt 521 rotates around the first pin shaft 520 by a corresponding angle so that the first pivot bolt 521 passes through the first notch 511, and the first locking nut 522 is located on the outer side of the first cover plate 51. The first locking nut 522 is rotated to press and fix the first cover plate 51 at the corresponding first cleaning port or the second cleaning port through the first locking nut 522.

[0055] Specifically, the first locking nut 522 is screwed with the first movable bolt 521, and the first movable bolt 521 rotates around the first pin 520 close to the first cover plate 51, so that the first movable bolt 521 passes through the first notch 511, and the first locking nut 522 is located on the outside of the first cover plate 51, and the first locking nut 522 is tightened, and the first cover plate 51 is pressed and fixed to the corresponding first cleaning port or the second cleaning port by the first locking nut 522 to close the corresponding first cleaning port or the second cleaning port; when the corresponding pipeline needs to be cleaned, the first locking nut 522 is loosened, and the first movable bolt 521 is operated to rotate around the first pin 520 away from the first cover plate 51, and then the first cover plate 51 is completely opened from the corresponding first cleaning port or the second cleaning port. The angle of rotation of the first movable bolt 521 around the first pin 520 close to the first cover plate 51 and the angle of rotation of the first movable bolt 521 around the first pin 520 away from the first cover plate 51 are about 90°.

[0056] Specifically, the first locking nut 522 is an existing star-shaped handle.

[0057] Through the cooperation of the first pin shaft 520, the first pivot bolt 521 and the first locking nut 522, the first cover plate 51 is pressed and fixed at the corresponding first cleaning port or the second cleaning port to close the corresponding cleaning port, and the first cover plate 51 at the first cleaning port or the second cleaning port is opened, providing a locking assembly 52 that is easy to implement and convenient and quick to operate.

[0058] See also Figure 1 and Figure 4As shown, as an embodiment, the first explosion-proof component 11 includes a second cover plate 110, a second pin shaft 111, a second movable bolt 112, a second locking nut 113, an elastic member 114 and a limiting member 115. The second cover plate 110 is hinged on the pipe wall of the first explosion-proof opening, the second pin shaft 111 is installed on the pipe wall of the first explosion-proof opening, the first end of the second movable bolt 112 is hinged on the second pin shaft 111, the second end of the second movable bolt 112 is installed with the limiting member 115, the second locking nut 113 is sleeved on the second movable bolt 112, the edge of the second cover plate 110 is provided with a second notch 116 for the second movable bolt 112 to pass through, and the elastic member 114 is sleeved on the second movable bolt 112. On the joint bolt 112, the elastic member 114 can be a spring, the first end of the elastic member 114 abuts on the second joint bolt 112, and the second end of the elastic member 114 abuts on the limit member 115; the second joint bolt 112 rotates a corresponding angle around the second pin shaft 111, so that the second joint bolt 112 passes through the second notch 116, and the second locking nut 113 is located on the outside of the second cover plate 110, and the second locking nut 113 is rotated to press the second cover plate 110 against and fix it at the first explosion-proof port through the second locking nut 113; when the pressure in the vacuum pipe 10 reaches a corresponding value, the pressure impacts the second cover plate 110 and compresses the elastic member 114, so that the second cover plate 110 opens automatically.

[0059] Specifically, a second handle 1100 for easy operation is provided on the outer side of the second cover plate 110 .

[0060] Specifically, the second locking nut 113 is threadedly connected to the second articulated bolt 112 , and the second locking nut 113 is also an existing star-shaped handle.

[0061] Through the cooperation of the second cover plate 110, the second pin shaft 111, the second articulated bolt 112, the second locking nut 113, the elastic member 114 and the limit member 115, the second cover plate 110 is pressed and fixed at the first explosion-proof opening, and when the pressure in the vacuum pipe reaches a corresponding value, the second cover plate 110 is automatically opened to implement pressure relief and explosion prevention; a first explosion-proof component 11 that is easy to implement and convenient and quick to open and close is provided.

[0062] See also Figure 1 As shown, as an embodiment, a pneumatic ball valve 31 for controlling the on-off of the gas collecting pipeline is provided on the gas collecting pipeline 30 , and a second explosion-proof component 32 is provided on both sides of the pneumatic ball valve 31 on the gas collecting pipeline 30 .

[0063] By setting up the pneumatic ball valve 31, the on-off control of the gas collecting pipe 30 is achieved; by setting the second explosion-proof component 32 on the gas collecting pipe 30 on both sides of the pneumatic ball valve 31, when the pneumatic ball valve 31 is closed, the second explosion-proof port 33 close to the furnace body 40 is connected to the furnace body, and pressure relief and explosion prevention can still be achieved, thereby further improving the explosion-proof effect.

[0064] As an embodiment, the second explosion-proof component 32 includes a third cover plate 320, the opening of the second explosion-proof port 33 faces upward, and the third cover plate 320 is hinged on the pipe wall of the second explosion-proof port 33; the third cover plate 320 closes the second explosion-proof port 33 by its own weight, and when the pressure in the gas collecting pipe 30 reaches a corresponding value, the pressure overcomes the self-weight of the third cover plate 320 to open it.

[0065] Specifically, the third cover plate 320 is hinged to the pipe wall of the second explosion-proof opening 33 through a hinge 321 .

[0066] By setting the second explosion-proof opening 33 upward and hingedly connecting the third cover plate 320 to the pipe wall of the second explosion-proof opening 33, the second explosion-proof opening 33 is closed by the deadweight of the third cover plate 320, and when the pressure in the gas collecting pipe 30 reaches a corresponding value, the pressure overcomes the deadweight of the third cover plate 30 to open it, thereby implementing pressure relief and explosion prevention; a second explosion-proof component 32 with a simple structure and low cost is provided.

[0067] As an embodiment, the second end of the inclined section 102 of the vacuum pipe 10 is connected to the first bellows 60 , the vacuum pipe 10 is connected to the connecting pipe 20 through the first bellows 60 , and the vacuum pipe 10 is connected to the gas collecting pipe 30 through the second bellows 61 .

[0068] By providing the first bellows 60 and the second bellows 61 , assembly errors can be compensated, and installation and disassembly of the entire vacuum pipeline can be facilitated.

[0069] As an implementation mode, there are two vacuum pipes 10, there are two first bellows 60, the connecting pipe 20 includes a collecting pipe 200 and two branch pipes 201, the first end of the collecting pipe 200 is connected to the gas collecting pipe 30 through the second bellows 61, the second end of the collecting pipe 200 is connected to the two branch pipes 201 at the same time, the two branch pipes 201 are respectively connected to the corresponding inclined section 102 through the first bellows 60, and the second cleaning port is opened at the connection between the second ends of the two branch pipes 201 and the collecting pipe 200.

[0070] By opening the second cleaning port at the connection between the second ends of the two branch pipes 201 and the collecting pipe 200, it is convenient to clean the dirt in the two branch pipes 201 and the collecting pipe 200, which helps to improve the cleaning efficiency of the pipeline.

[0071] The single crystal furnace explosion-proof vacuum pipeline provided in the embodiment of the present application can open the seal 50 on the corresponding vertical section 100 and the first explosion-proof component 11 on the corresponding branch section 101 when cleaning the vacuum pipe 10; when cleaning the connecting pipe 20, the first explosion-proof component 11 of the branch section 101 and the seal 50 at the second cleaning port can be opened; when cleaning the gas collection pipe 30, the seal 50 at the second cleaning port and the two second explosion-proof components 32 can be opened.

[0072] The single crystal furnace explosion-proof vacuum pipeline provided in this application has the following advantages:

[0073] 1) Each pipeline can be easily cleaned, which improves the cleaning efficiency of the vacuum pipeline of the single crystal furnace and ensures the vacuum effect of the single crystal furnace;

[0074] 2) A first explosion-proof component is arranged on the vacuum pumping pipeline and a second explosion-proof component is arranged on the gas collecting pipeline, thereby improving the explosion-proof effect of the explosion-proof vacuum pumping pipeline of the single crystal furnace;

[0075] 3) The locking assembly is easy and quick to operate, saving time and effort;

[0076] 4) The opening and closing operation of the first explosion-proof component is convenient and quick, saving time and effort;

[0077] 5) The second explosion-proof component closes the second explosion-proof port by its own weight, and the overall structure is simple and the cost is low.

[0078] The above embodiments are only to illustrate the basic principles and characteristics of the present application. The present application is not limited by the above examples. Without departing from the spirit and scope of the present application, the present application may be subject to various changes and modifications, which are within the scope of the present application to be protected. The scope of protection claimed in the present application is defined by the attached claims and their equivalents.

Claims

1. An explosion-proof vacuum pipeline for a single crystal furnace, characterized in that: The explosion-proof vacuum pipeline of the single crystal furnace includes at least two vacuum pipelines, a connecting pipeline and a gas collecting pipeline, wherein: Each of the vacuuming pipes is connected to the furnace body, and each of the vacuuming pipes is provided with a first explosion-proof port and a first cleaning port facing downward, the first explosion-proof port is sealed by a first explosion-proof component, and the first explosion-proof component is configured to open automatically when the pressure in the vacuuming pipe reaches a corresponding value, or can be opened manually during cleaning; The communicating pipe is in communication with all the vacuuming pipes, the gas collecting pipe is in communication with the communicating pipe, a second cleaning port is provided on the communicating pipe, and at least one second explosion-proof port is provided on the gas collecting pipe, the second explosion-proof port is sealed by a second explosion-proof component, and the second explosion-proof component is configured to open automatically when the pressure in the gas collecting pipe reaches a corresponding value, or can be opened manually during cleaning; The first cleaning port and the second cleaning port are respectively provided with sealing members which can be opened or closed.

2. The explosion-proof vacuum pumping pipeline for a single crystal furnace according to claim 1, characterized in that: The vacuum extraction pipe includes a vertical section, a branch section and an inclined section that are interconnected. The vertical section is vertically installed at the bottom of the furnace body. The upper end of the vertical section is connected to the furnace body. The lower port of the vertical section constitutes the first cleaning port. The first end of the branch section is connected to the side wall of the vertical section. The second port of the branch section constitutes the first explosion-proof port. The first end of the inclined section is connected to the side wall of the vertical section. The second end of the inclined section is connected to the connecting pipe. The inclined section is arranged to extend downward from the first end to the second end.

3. The explosion-proof vacuum pumping pipeline for a single crystal furnace according to claim 2, characterized in that: The branch segment is arranged horizontally, and the first port of the branch segment is directly opposite to the first port of the inclined segment.

4. The explosion-proof vacuum pumping pipeline for a single crystal furnace according to claim 1, characterized in that: The sealing member includes a first cover plate and a locking assembly, wherein the first cover plate is hinged on the tube wall at the corresponding first cleaning port or the second cleaning port, and the locking assembly is configured to lock the first cover plate at the corresponding first cleaning port or the second cleaning port to close the corresponding first cleaning port or the second cleaning port, and the locking assembly is also configured to be able to unlock to open the first cover plate.

5. The explosion-proof vacuum pumping pipeline for a single crystal furnace according to claim 4, characterized in that: The locking assembly includes a first pin shaft, a first pivot bolt and a first locking nut. The first pin shaft is installed on the tube wall at the corresponding first cleaning port or the second cleaning port. The first end of the first pivot bolt is hinged on the first pin shaft. The first locking nut is mounted on the first pivot bolt. A first notch is provided on the edge of the first cover plate for the first pivot bolt to pass through. The first pivot bolt rotates around the first pin shaft by a corresponding angle so that the first pivot bolt passes through the first notch. The first locking nut is located on the outer side of the first cover plate. The first locking nut is rotated to press and fix the first cover plate to the corresponding first cleaning port or the second cleaning port through the first locking nut.

6. The explosion-proof vacuum pumping pipeline for a single crystal furnace according to claim 1, characterized in that: The first explosion-proof assembly includes a second cover plate, a second pin shaft, a second articulated bolt, a second locking nut, an elastic member and a limiter, the second cover plate is hinged on the tube wall of the first explosion-proof opening, the second pin shaft is installed on the tube wall of the first explosion-proof opening, the first end of the second articulated bolt is hinged on the second pin shaft, the second end of the second articulated bolt is installed with the limiter, the second locking nut is sleeved on the second articulated bolt, the edge of the second cover plate is provided with a second notch for the second articulated bolt to pass through, the elastic member is sleeved on the second articulated bolt, the first end of the elastic member abuts against the second articulated bolt, and the second end of the elastic member abuts against the limiter; The second articulated bolt is rotated about the second pin shaft by a corresponding angle, so that the second articulated bolt passes through the second notch, and the second locking nut is located on the outer side of the second cover plate, and the second locking nut is rotated to press and fix the second cover plate against the first explosion-proof opening through the second locking nut; When the pressure in the vacuum pipe reaches a corresponding value, the pressure impacts the second cover plate and compresses the elastic member, so that the second cover plate automatically opens.

7. The explosion-proof vacuum pumping pipeline for a single crystal furnace according to claim 1, characterized in that: The gas collection pipeline is provided with a pneumatic ball valve for controlling the on-off of the gas collection pipeline, and the gas collection pipeline is provided with a second explosion-proof component on both sides of the pneumatic ball valve.

8. The explosion-proof vacuum pumping pipeline for a single crystal furnace according to claim 1, characterized in that: The second explosion-proof assembly comprises a third cover plate, the opening of the second explosion-proof opening faces upward, and the third cover plate is hinged on the pipe wall of the second explosion-proof opening; The third cover plate closes the second explosion-proof opening by its own weight. When the pressure in the gas collecting pipeline reaches a corresponding value, the pressure overcomes the self-weight of the third cover plate to open it.

9. The explosion-proof vacuum pumping pipeline for a single crystal furnace according to claim 2, characterized in that: The second end of the inclined section of the vacuum pumping pipeline is connected to a first bellows, the vacuum pumping pipeline is connected to the connecting pipeline through the first bellows, and the vacuum pumping pipeline is connected to the gas collecting pipeline through a second bellows.

10. The explosion-proof vacuum pumping pipeline for a single crystal furnace according to claim 9, characterized in that: There are two vacuum pipes and two first bellows. The connecting pipe includes a collecting pipe and two branch pipes. The first end of the collecting pipe is connected to the gas collecting pipe through the second bellows. The second end of the collecting pipe is connected to the two branch pipes at the same time. The two branch pipes are connected to the corresponding inclined sections through the first bellows respectively. The second cleaning port is opened at the connection between the second ends of the two branch pipes and the collecting pipe.

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