Single crystal furnace

Abstract

The single crystal furnace comprises a base, a main furnace chamber, an auxiliary furnace chamber, a balance adjusting mechanism, a lifting head mechanism and a vacuumizing pipeline, the main furnace chamber is arranged on the base, the auxiliary furnace chamber is arranged above the main furnace chamber, the auxiliary furnace chamber is communicated with the main furnace chamber, and the main furnace chamber is communicated with a vacuum pump through the vacuumizing pipeline; the lifting head mechanism is mounted on the balance adjusting mechanism, and the lifting head mechanism is configured to pull and lift a crystal bar; and the balance adjusting mechanism is installed at the upper end of the auxiliary furnace chamber, the balance adjusting mechanism is configured to adjust the levelness of installation of the lifting head mechanism, the balance adjusting mechanism comprises a cooling assembly, and the cooling assembly is configured to cool heat transferred from the auxiliary furnace chamber. The single crystal furnace is additionally provided with the cooling assembly, and heat transferred from the auxiliary furnace chamber can be cooled through the cooling assembly when passing through the cavity in the single crystal furnace, so that the service lives of the balance adjusting mechanism and the lifting head mechanism are prolonged, and the production cost is reduced.

Description

Technical Field

[0001] The present application belongs to the technical field of crystal rod production equipment, and in particular, relates to a single crystal furnace. Background Art

[0002] The single crystal furnace is a professional industrial equipment that uses the Czochralski method to produce single crystals. The lifting head mechanism of the single crystal furnace is set above the auxiliary furnace chamber. There is a traction rope inside the lifting head mechanism, and the silicon rod is pulled by the traction rope. In order to ensure that the traction rope can pull the silicon rod vertically normally, it is necessary to install a balancing mechanism between the lifting head mechanism and the auxiliary furnace chamber. The balancing mechanism is used to ensure the horizontality of the lifting head mechanism installation. The traction rope is introduced into the auxiliary furnace chamber through the balancing mechanism.

[0003] During the operation of the existing single crystal furnace's balancing mechanism, the heat in the auxiliary furnace chamber will rise to the lifting head mechanism through the balancing mechanism. The balancing mechanism and the lifting head mechanism are in a high temperature environment for a long time, resulting in a short service life of the balancing mechanism and the lifting head mechanism, which in turn causes a high maintenance and use cost of the single crystal furnace. Utility Model Content

[0004] The purpose of the present application is to provide a single crystal furnace to solve the problem of high maintenance and use costs of single crystal furnaces in the prior art.

[0005] To achieve this goal, this application adopts the following technical solutions:

[0006] A single crystal furnace comprises a base, a main furnace chamber, an auxiliary furnace chamber, a balancing mechanism, a lifting head mechanism and a vacuum pipeline, wherein:

[0007] The main furnace chamber is arranged on the base, the auxiliary furnace chamber is arranged above the main furnace chamber, the auxiliary furnace chamber is connected with the main furnace chamber, and the main furnace chamber is connected with the vacuum pump through the vacuum pipeline;

[0008] The pulling head mechanism is installed on the balancing mechanism, and the pulling head mechanism is configured to pull and pull the crystal rod;

[0009] The balancing mechanism is installed at the upper end of the auxiliary furnace chamber, and is configured to adjust the horizontality of the installation of the lifting head mechanism. The balancing mechanism includes a cooling component, and the cooling component is configured to cool the heat transferred from the auxiliary furnace chamber.

[0010] The single crystal furnace proposed in the present application realizes the adjustment of the horizontal degree of the installation of the lifting head mechanism through the balancing mechanism, thereby ensuring that the traction rope of the lifting head mechanism can normally lift the silicon rod vertically; the present application can realize the cooling of the heat rising from the auxiliary furnace chamber by arranging a cooling component on the balancing mechanism, thereby reducing the temperature of the balancing mechanism and the lifting head mechanism, avoiding the balancing mechanism and the lifting head mechanism from being in a high temperature environment for a long time, extending the service life of the balancing mechanism and the lifting head mechanism, reducing the maintenance and use cost of the single crystal furnace, and ensuring the long-term and efficient operation of the single crystal furnace.

[0011] Optionally, the balancing mechanism further includes a base, a horizontal adjustment seat, a connecting piece and an adjustment component, wherein:

[0012] The base is fixedly installed on the auxiliary furnace chamber;

[0013] The horizontal adjustment seat is arranged above the base at intervals, and a lifting head mechanism is installed on the horizontal adjustment seat;

[0014] The connecting piece has a cavity for passing the traction rope of the pulling head mechanism, the first end of the connecting piece is connected to the base, the cavity of the connecting piece is connected to the auxiliary furnace chamber, and the second end of the connecting piece is connected to the horizontal adjustment seat;

[0015] The first end of the adjustment component is connected to the base, the second end of the adjustment component is connected to the horizontal adjustment seat, and the adjustment component is configured to adjust the horizontality of the horizontal adjustment seat to ensure the horizontality of the lifting head mechanism installation;

[0016] The cooling assembly is configured to cool the heat in the cavity.

[0017] The horizontality of the horizontal adjustment seat is adjusted through the adjustment component, and the pulling head mechanism is installed on the horizontal adjustment seat, so as to ensure the horizontality of the installation of the pulling head mechanism, and further ensure that the traction rope of the pulling head mechanism can normally lift the silicon rod vertically; in addition, the heat generated by thermal radiation is cooled by the cooling component, thereby reducing the temperature of the balancing mechanism and the pulling head mechanism, avoiding the balancing mechanism and the pulling head mechanism from being in a high temperature environment for a long time, extending the service life of the balancing mechanism and the pulling head mechanism, and reducing the production cost.

[0018] Optionally, the connecting piece includes a compensator, a first through hole is opened at the center of the horizontal adjustment seat, a second through hole is opened at the center of the base, the second end of the compensator is connected to the first through hole, the first end of the compensator is connected to the second through hole, the traction rope of the lifting head mechanism passes through the cavity of the compensator and is introduced into the auxiliary furnace chamber, and the compensator is configured to compensate for the displacement caused by the horizontal adjustment seat when adjusting the horizontality.

[0019] By arranging a compensator between the horizontal adjustment seat and the base, the traction rope of the lifting head mechanism is introduced into the auxiliary furnace chamber through the cavity of the compensator. At the same time, the compensator can also compensate for the displacement of the horizontal adjustment seat when adjusting the horizontality, which is convenient for adjusting the horizontality of the horizontal adjustment seat, thereby providing a connecting piece with both connection and compensation functions.

[0020] Optionally, the cooling component includes a cooling medium inlet pipe, a cooling medium outlet pipe and a cooling chamber, the compensator includes an inner tube and an outer tube, the outer tube is mounted on the outer periphery of the inner tube, a cooling chamber is formed between the inner tube and the outer tube, the cooling medium inlet pipe and the cooling medium outlet pipe are arranged on the outer tube, the cooling medium inlet pipe and the cooling medium outlet pipe are connected to the cooling chamber, and the cooling medium enters the cooling chamber from the cooling medium inlet pipe and flows out through the cooling medium outlet pipe.

[0021] By setting the compensator as a double-layer structure including an inner tube and an outer tube, a cooling cavity is formed between the inner and outer tubes, and a circulating cooling medium is introduced into the cooling cavity, a compensator with connection, compensation and cooling functions is provided, the overall structure is simple, and the space occupied is small; at the same time, the inner tube directly exchanges heat with the heat generated by thermal radiation, thereby improving the efficiency of heat exchange and ensuring the cooling effect of the cooling component.

[0022] Optionally, the adjustment component includes three pillars, which are distributed at three vertices of a triangle, the first end of each pillar is fixed on the base, and the second end of each pillar is equipped with an adjustment member which can be lifted and lowered, and the adjustment member is detachably fixed to the horizontal adjustment seat; the adjustment member includes a stud, and an adjustment threaded hole is provided at the end face of the second end of each pillar, and three third through holes are provided on the horizontal adjustment seat, each third through hole corresponds to a stud, the first end of the stud is installed in the adjustment threaded hole, and the second end of the stud passes through the third through hole and is fixed to the horizontal adjustment seat by a nut.

[0023] By adjusting the height of each adjusting piece, the height adjustment of the connection between each adjusting piece and the horizontal adjusting seat is achieved, thereby achieving the horizontal adjustment of the horizontal adjusting seat; by setting three pillars distributed in a triangle, an adjusting piece is installed on each pillar, so that the horizontality of the horizontal adjusting seat can be guaranteed; in addition, each stud is equipped with two nuts, and the two nuts are respectively locked on the upper and lower sides of the horizontal adjusting seat. By loosening each nut, the horizontal adjusting seat is adjusted to a suitable height and adjusted to a horizontal state, and then the nut is locked, the horizontality of the horizontal adjusting seat is adjusted, thereby providing an adjusting piece with a simple structure, low cost and easy operation.

[0024] Optionally, the single crystal furnace also includes a lifting magnetic field device, which includes a magnetic field and a first lifting mechanism. The magnetic field can be lifted and lowered on the periphery of the main furnace chamber. The first lifting mechanism is installed on the base. The driving end of the first lifting mechanism is connected to the magnetic field. The first lifting mechanism is configured to drive the magnetic field to lift and lower.

[0025] The magnetic field is raised and lowered by controlling the first lifting mechanism, so that a uniform magnetic field is generated in the furnace chamber of the single crystal furnace, thereby ensuring the processing quality of the crystal rod.

[0026] Optionally, the first lifting mechanism includes a mounting bracket, a screw drive mechanism, n screws, a magnetic field bearing mechanism and m magnetic field anti-fall mechanisms, wherein:

[0027] The mounting bracket is fixed to the base;

[0028] The screw drive mechanism is mounted on the mounting bracket;

[0029] n screw rods are arranged along the circumferential direction, each screw rod is transmission-connected to a screw rod driving mechanism, each screw rod is rotationally connected to a mounting bracket, and the screw rod driving mechanism is used to drive the n screw rods to rotate synchronously;

[0030] The magnetic field bearing mechanism includes a bearing part and n connecting parts arranged at the bottom of the bearing part along the circumferential direction, the n connecting parts correspond to the screw rods one by one, the bearing part is used to bear the magnetic field, the connecting part is screwed to the corresponding screw rod through a nut, and the corresponding connecting part is driven to rise and fall when the screw rod rotates;

[0031] Each magnetic field anti-falling mechanism is used to lock a corresponding screw rod to prevent the screw rod from rotating, and the magnetic field anti-falling mechanism is arranged on the mounting bracket and the corresponding screw rod; n≥3, m≤n.

[0032] By providing a magnetic field anti-falling mechanism, when the screw drive mechanism adjusts the magnetic field on the magnetic field bearing mechanism to a predetermined height through the screw, the magnetic field anti-falling mechanism can lock the screw, thereby positioning the magnetic field bearing mechanism to prevent the magnetic field bearing mechanism from falling and causing the magnetic field to fall.

[0033] Optionally, the magnetic field anti-fall mechanism includes a limit flange and a limit assembly, wherein:

[0034] The limiting flange is fixedly connected to the upper end of the corresponding screw rod, and the limiting flange is provided with a plurality of slots along the circumferential direction;

[0035] The limiting assembly includes a first driving member and a limiting pin, the first driving member is fixedly installed relative to the mounting bracket, the limiting pin is connected to the driving end of the first driving member and points to the limiting flange, and the first driving member is used to drive the limiting pin to move toward or away from the limiting flange;

[0036] When the first driving member drives the limiting pin to move toward the limiting flange, the limiting pin is inserted into the slot to lock the screw rod; when the first driving member drives the limiting pin to move away from the limiting flange, the limiting pin is disengaged from the slot.

[0037] A magnetic field anti-falling mechanism with a simple structure is provided by arranging a limiting component fixedly mounted relative to the mounting bracket to be inserted into or disengaged from a limiting flange mounted on the upper end of the screw rod to lock or release the screw rod.

[0038] Optionally, the magnetic field anti-fall mechanism further includes a screw bearing seat, the screw bearing seat is arranged on the mounting bracket, and the upper end of the screw is rotatably connected in the screw bearing seat via a bearing;

[0039] The limiting flange is located in the screw bearing seat, and a limiting hole is arranged on one side of the screw bearing seat facing the limiting pin, and the limiting pin is inserted into the card slot through the limiting hole.

[0040] By setting up a screw bearing seat, the rotational installation and limiting of the upper end of the screw and the limit flange are achieved to prevent the upper end of the screw and the limit flange from moving during rotation; and by setting a limit hole on the screw bearing seat, it is ensured that the limit pin can penetrate into the screw bearing seat and be inserted into the slot of the limit flange to lock the screw.

[0041] Optionally, the magnetic field anti-fall mechanism further includes an induction sheet and an induction member, wherein:

[0042] The induction sheet is arranged on the limit pin, the induction element is fixedly installed relative to the mounting bracket and arranged opposite to the induction sheet, and the induction element is connected to the lead screw drive mechanism by signal;

[0043] When the limit pin is inserted into the slot, the sensing sheet is away from the sensing element;

[0044] When the limit pin is separated from the slot, the sensing sheet approaches the sensing element or abuts against the sensing element, and the sensing element is triggered by the sensing sheet to generate a sensing signal, and transmits the sensing signal to the screw drive mechanism.

[0045] Through the cooperation of the induction sheet and the induction part, when the limit assembly releases the lock on the screw rod, the induction part transmits the induction signal to the screw rod driving mechanism. After receiving the induction signal, the screw rod driving mechanism can drive the screw rod to rise and fall to implement the height adjustment of the magnetic field.

[0046] Optionally, the single crystal furnace further includes a column, a main furnace chamber moving mechanism and an auxiliary furnace chamber moving mechanism, wherein:

[0047] The column is fixedly arranged on one side of the base, and the main furnace chamber moving mechanism is installed on the column, and the main furnace chamber moving mechanism is configured to assist in disassembling and assembling the main furnace chamber;

[0048] The auxiliary furnace chamber moving mechanism is installed on the column, and the auxiliary furnace chamber moving mechanism is configured to drive the auxiliary furnace chamber, the balancing mechanism and the lifting head mechanism to rotate or lift together, or the auxiliary furnace chamber moving mechanism is configured to drive the furnace cover, the auxiliary furnace chamber, the balancing mechanism and the lifting head mechanism on the main furnace chamber to rotate or lift together.

[0049] Through the main furnace chamber moving mechanism, the main furnace chamber can be automatically disassembled to facilitate cleaning of the main furnace chamber, saving manpower, with a high degree of automation, and improving the cleaning efficiency of the main furnace chamber; through the auxiliary furnace chamber moving mechanism, the auxiliary furnace chamber, single crystal furnace and pulling head mechanism can be rotated or lifted together, or the furnace cover, control valve, auxiliary furnace chamber, single crystal furnace and pulling head mechanism on the main furnace chamber can be rotated or lifted together, thereby realizing automatic unloading of drawn silicon rods and automatic feeding of silicon materials, thereby improving the production efficiency of the single crystal furnace.

[0050] Optionally, the auxiliary furnace chamber moving mechanism includes a second lifting mechanism, a first lifting seat, a first rotating mechanism and a first rotating arm. The second lifting mechanism is installed on the column, the driving end of the second lifting mechanism is connected to the first lifting seat, and the second lifting mechanism is configured to drive the first lifting seat to lift and lower. The first rotating mechanism is installed on the first lifting seat, the driving end of the first rotating mechanism is connected to the first end of the first rotating arm, the second end of the first rotating arm is connected to the auxiliary furnace chamber, and the first rotating mechanism is configured to drive the first rotating arm to rotate.

[0051] The lifting and lowering of the auxiliary furnace chamber is achieved through the second lifting mechanism, and the rotation of the auxiliary furnace chamber is achieved through the first rotating mechanism, thereby meeting the action requirements of the auxiliary furnace chamber's rotation and lifting.

[0052] Optionally, a crystal receiving assembly is installed at the bottom of the auxiliary furnace chamber, and the crystal receiving assembly is configured to block the lower port of the auxiliary furnace chamber before the auxiliary furnace chamber moving mechanism drives the auxiliary furnace chamber to rotate, so as to prevent the crystal rod from accidentally falling during the rotation of the auxiliary furnace chamber.

[0053] By setting up the crystal connecting assembly, the crystal rod can be effectively prevented from accidentally falling during the rotation of the auxiliary furnace chamber, making the production process safer.

[0054] Optionally, the crystal bonding assembly includes a second driving member and a crystal bonding frame, the fixed end of the second driving member is hinged on the auxiliary furnace chamber, the crystal bonding frame is hinged on the auxiliary furnace chamber, and the driving end of the second driving member is connected to the crystal bonding frame;

[0055] The second driving member is configured to drive the crystal receiving rack to move to the outside of the auxiliary furnace chamber to avoid the lower port of the auxiliary furnace chamber;

[0056] The second driving member is further configured to drive the crystal receiving rack to move below the lower end of the auxiliary furnace chamber to block the lower port of the auxiliary furnace chamber.

[0057] The second driving member drives the crystal receiving frame to switch between two positions located outside the auxiliary furnace chamber and below the lower end of the auxiliary furnace chamber, which does not affect the normal assembly of the auxiliary furnace chamber and can effectively prevent the crystal rod from accidentally falling during the rotation of the auxiliary furnace chamber.

[0058] Optionally, a control valve is installed on the furnace cover on the main furnace chamber, and the control valve is configured to control the opening or closing of the port on the main furnace chamber. A locking ring assembly is arranged between the control valve and the auxiliary furnace chamber, and the locking ring assembly is configured to control the connection or separation of the control valve and the auxiliary furnace chamber.

[0059] The connection or blocking between the main furnace chamber and the auxiliary furnace chamber is controlled by a control valve, and the connection or separation between the main furnace chamber and the auxiliary furnace chamber is controlled by a locking ring assembly, so as to realize actions such as adding materials and cleaning the main furnace chamber.

[0060] Optionally, the main furnace chamber moving mechanism includes a third lifting mechanism, a second lifting seat, a second rotating mechanism, a second rotating arm and a clamping member, the third lifting mechanism is installed on the column, the driving end of the third lifting mechanism is connected to the second lifting seat, the third lifting mechanism is configured to drive the second lifting seat to lift and lower, the second rotating mechanism is installed on the second lifting seat, the driving end of the second rotating mechanism is connected to the first end of the second rotating arm, the second rotating mechanism is configured to drive the second rotating arm to rotate, and the clamping member is arranged at the second end of the second rotating arm, and the clamping member is configured to clamp or release the main furnace chamber.

[0061] The lifting and lowering of the main furnace chamber is achieved through the third lifting mechanism, and the rotation of the main furnace chamber is achieved through the second rotating mechanism, thereby meeting the action requirements of the main furnace chamber's rotation and lifting, so as to facilitate the disassembly and assembly of the main furnace chamber.

[0062] Optionally, the vacuum pipeline includes a connecting pipeline, a gas collecting pipeline and at least two vacuum pipelines, wherein:

[0063] Each vacuuming pipeline is connected to the main furnace chamber, and each vacuuming pipeline is provided with a first explosion-proof opening and a first cleaning opening facing downwards, the first explosion-proof opening is sealed by a first explosion-proof component, and the first explosion-proof component is configured to open automatically when the pressure in the vacuuming pipeline reaches a corresponding value, or can be opened manually during cleaning;

[0064] The connecting pipe is connected to all vacuum pipes, one end of the gas collecting pipe is connected to the connecting pipe, and the other end of the gas collecting pipe is connected to the vacuum pump. The connecting pipe is provided with a second cleaning port, and the gas collecting pipe is provided with at least one second explosion-proof port. The second explosion-proof port is sealed by a second explosion-proof component. The second explosion-proof component is configured to open automatically when the pressure in the gas collecting pipe reaches a corresponding value, or can be opened manually during cleaning;

[0065] The first cleaning port and the second cleaning port are respectively provided with sealing members which can be opened or closed.

[0066] By setting the first cleaning port, it is convenient to clean the dirt in the vacuum pipeline; by setting the second cleaning port, it is convenient to clean the dirt in the connecting pipeline; by setting the second explosion-proof port, it is convenient to clean the dirt in the gas collection pipeline, so that each pipeline of the vacuum pipeline can be easily cleaned, ensuring the vacuum effect of the single crystal furnace. In addition, by setting the first explosion-proof component on the vacuum pipeline and the second explosion-proof component on the gas collection pipeline, the explosion-proof effect of the explosion-proof vacuum pipeline of the single crystal furnace is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0067] Figure 1 is a schematic diagram of the three-dimensional structure of a single crystal furnace provided in an embodiment of the present application;

[0068] Figure 2 is a structural schematic diagram of a first perspective of a balancing mechanism in a single crystal furnace provided in an embodiment of the present application;

[0069] Figure 3 is a structural schematic diagram of a balancing mechanism provided in an embodiment of the present application from a second perspective;

[0070] Figure 4 is a cross-sectional view of a balancing mechanism provided in an embodiment of the present application;

[0071] Figure 5 It is a structural schematic diagram of a lifting magnetic field device in a single crystal furnace provided in an embodiment of the present application in a working state;

[0072] Figure 6 is a structural schematic diagram of the lifting magnetic field device provided in an embodiment of the present application in another working state;

[0073] Figure 7 It is a structural schematic diagram of the lifting magnetic field device without the mounting bracket provided in the embodiment of the present application;

[0074] Figure 8 It is a schematic diagram of the assembly of the magnetic field bearing mechanism, the lead screw and the guide rod in the lifting magnetic field device provided in the embodiment of the present application;

[0075] Fig. 9 It is a disassembled schematic diagram of a mounting seat in a lifting magnetic field device provided in an embodiment of the present application at a viewing angle;

[0076] Fig.10 is a schematic diagram of a disassembled mounting base provided in an embodiment of the present application at another viewing angle;

[0077] Fig.11 This is a schematic diagram of the structure of the magnetic field anti-fall mechanism in the lifting magnetic field device provided in the embodiment of the present application. Figure 1 ;

[0078] Fig.12This is a schematic diagram of the structure of the magnetic field anti-fall mechanism in the lifting magnetic field device provided in the embodiment of the present application. Figure 2 ;

[0079] Fig.13 It is a structural schematic diagram of a limit flange and a screw bearing seat in a lifting magnetic field device provided in an embodiment of the present application;

[0080] Fig.14 It is a structural schematic diagram of the auxiliary furnace chamber moving mechanism in the single crystal furnace provided in an embodiment of the present application;

[0081] Fig.15 Schematic diagram of the bottom structure of the auxiliary furnace chamber in the single crystal furnace provided in the embodiment of the present application;

[0082] Fig.16 It is a structural schematic diagram of the main furnace chamber moving mechanism in the single crystal furnace provided in an embodiment of the present application;

[0083] Fig.17 yes Fig.16 Enlarged view of point A in the middle;

[0084] Fig.18 It is a structural schematic diagram of a vacuum pumping pipeline in a single crystal furnace provided in an embodiment of the present application;

[0085] Fig.19 It is a schematic diagram of the structure of a sealing member in a vacuum pipeline provided in an embodiment of the present application;

[0086] Fig. 20 It is a schematic diagram of the structure of the first explosion-proof component in the vacuum pipeline provided in an embodiment of the present application. DETAILED DESCRIPTION

[0087] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0088] At present, a lifting head mechanism is installed on the auxiliary furnace chamber of the single crystal furnace. The lifting head mechanism has a traction rope inside, and the silicon rod is pulled and lifted by the traction rope. In order to ensure that the traction rope can normally pull the silicon rod vertically, it is necessary to install a balancing mechanism between the lifting head mechanism and the auxiliary furnace chamber. The balancing mechanism is used to ensure the horizontality of the lifting head mechanism installation. The traction rope is introduced into the auxiliary furnace chamber through the balancing mechanism.

[0089] During the operation of the existing single crystal furnace's balancing mechanism, the heat in the auxiliary furnace chamber will rise to the lifting head mechanism through the balancing mechanism. The balancing mechanism and the lifting head mechanism are in a high temperature environment for a long time, resulting in a short service life of the balancing mechanism and the lifting head mechanism, which in turn causes a high maintenance and use cost of the single crystal furnace.

[0090] In this regard, the present application provides a single crystal furnace, see Figures 1 to 20 As shown, the single crystal furnace provided in the embodiment of the present application includes a base 1, a main furnace chamber 2, an auxiliary furnace chamber 3, a balancing mechanism 4, a pulling head mechanism 5 and a vacuum pipeline 6, wherein the main furnace chamber 2 is arranged on the base 1, the auxiliary furnace chamber 3 is arranged above the main furnace chamber 2, the auxiliary furnace chamber 3 is connected to the main furnace chamber 2, and the main furnace chamber 2 is connected to the vacuum pump through the vacuum pipeline 6; the pulling head mechanism 5 is installed on the balancing mechanism 4, and the pulling head mechanism 5 is configured to pull the pulled crystal rod; the balancing mechanism 4 is installed at the upper end of the auxiliary furnace chamber 3, and the balancing mechanism 4 is configured to adjust the horizontality of the installation of the pulling head mechanism 5, and the balancing mechanism 4 includes a cooling component 45, and the cooling component 45 is configured to cool the heat transferred from the auxiliary furnace chamber 3.

[0091] The single crystal furnace proposed in the present application realizes the adjustment of the horizontal degree of the installation of the pulling head mechanism 5 through the balancing mechanism 4, thereby ensuring that the traction rope of the pulling head mechanism 5 can normally lift the silicon rod vertically. In addition, by arranging a cooling component 45 on the balancing mechanism 4, it is possible to cool the heat transferred from the auxiliary furnace chamber 3, thereby reducing the temperature of the balancing mechanism 4 and the pulling head mechanism 5, avoiding the balancing mechanism 4 and the pulling head mechanism 5 from being in a high temperature environment for a long time, extending the service life of the balancing mechanism 4 and the pulling head mechanism 5, reducing the maintenance and use cost of the single crystal furnace, and ensuring the long-term and efficient operation of the single crystal furnace.

[0092] As an implementation method, see Figures 2 to 4 The balancing mechanism 4 also includes a base 41, a horizontal adjustment seat 42, a connecting piece 43 and an adjusting component 44, wherein the base 41 is fixedly mounted on the auxiliary furnace chamber 3; the horizontal adjustment seat 42 is spaced above the base 41, and a pulling head mechanism 5 is installed on the horizontal adjustment seat 42; the connecting piece 43 has a cavity for providing a traction rope of the pulling head mechanism 5 to pass through, a first end of the connecting piece 43 is connected to the base 41, the cavity of the connecting piece 43 is connected to the auxiliary furnace chamber 3, and a second end of the connecting piece 43 is connected to the horizontal adjustment seat 42; a first end of the adjusting component 44 is connected to the base 41, and a second end of the adjusting component 44 is connected to the horizontal adjustment seat 42, and the adjusting component 44 is configured to adjust the horizontality of the horizontal adjustment seat 42 to ensure the horizontality of the pulling head mechanism 5; the cooling component 45 is configured to cool the heat transferred from the auxiliary furnace chamber 3 in the cavity.

[0093] Therefore, the horizontal adjustment of the horizontal adjustment seat 42 is achieved through the adjustment component 44, and the lifting head mechanism 5 is installed on the horizontal adjustment seat 42, so as to ensure the horizontal installation of the lifting head mechanism 5, and then ensure that the traction rope of the lifting head mechanism 5 can normally lift the silicon rod vertically; in addition, the heat transferred by thermal radiation is cooled by the cooling component 45, thereby reducing the temperature of the balancing mechanism 4 and the lifting head mechanism 5, avoiding the balancing mechanism 4 and the lifting head mechanism 5 from being in a high temperature environment for a long time, extending the service life of the balancing mechanism 4 and the lifting head mechanism 5, and reducing the production cost.

[0094] As an embodiment, the connecting piece 43 includes a compensator 431, a first through hole 421 is opened at the center of the horizontal adjustment seat 42, a second through hole 411 is opened at the center of the base 41, the second end of the compensator 431 is connected to the first through hole 421, the first end of the compensator 431 is connected to the second through hole 411, the traction rope of the lifting head mechanism 5 passes through the cavity of the compensator 431 and is introduced into the auxiliary furnace chamber 3, and the compensator 431 is configured to compensate for the displacement generated by the horizontal adjustment seat 42 when adjusting the horizontality.

[0095] Therefore, by setting a compensator 431 between the horizontal adjustment seat 42 and the base 41, the traction rope of the lifting head mechanism 5 is introduced into the auxiliary furnace chamber 3 through the cavity of the compensator 431. At the same time, the compensator 431 can also compensate for the displacement of the horizontal adjustment seat 42 when adjusting the horizontality, which is convenient for adjusting the horizontality of the horizontal adjustment seat 42, thereby providing a connecting piece 43 with both connection and compensation functions.

[0096] As an embodiment, the cooling assembly 45 includes a cooling medium inflow pipe 451, a cooling medium outflow pipe 452 and a cooling cavity 453, the compensator 431 includes an inner cylinder 4311 and an outer cylinder 4312, the outer cylinder 4312 is sleeved on the periphery of the inner cylinder 4311, and a cooling cavity 453 is formed between the inner cylinder 4311 and the outer cylinder 4312, the cooling medium inflow pipe 451 and the cooling medium outflow pipe 452 are arranged on the outer cylinder 4312, the cooling medium inflow pipe 451 and the cooling medium outflow pipe 452 are connected with the cooling cavity 453, and the cooling medium enters the cooling cavity 453 from the cooling medium inflow pipe 451 and flows out through the cooling medium outflow pipe 452. Preferably, the cooling medium here uses cooling water or cooling oil.

[0097] Therefore, by setting the compensator 431 as a double-layer structure including an inner cylinder 4311 and an outer cylinder 4312, a cooling chamber 453 is formed between the inner and outer cylinders 4312, and a circulating cooling medium is introduced into the cooling chamber 453, thereby providing a compensator 431 with connectivity, compensation and cooling functions, with a simple overall structure and small space occupation; at the same time, the inner cylinder 4311 directly exchanges heat with the heat transferred by thermal radiation, thereby improving the efficiency of heat exchange and ensuring the cooling effect of the cooling component 45.

[0098] As an implementation mode, both the inner cylinder 4311 and the outer cylinder 4312 are made of metal bellows.

[0099] Therefore, under the premise of realizing the compensation function, the heat conduction effect of the cooling component 45 can be guaranteed, and the contact area between the cooling medium and the inner cylinder 4311 and the outer cylinder 4312 can be increased, thereby further improving the cooling effect of the cooling component 45.

[0100] As an embodiment, the cooling component 45 includes a cooling jacket (not shown in the figure), which is covered on the outer wall of the connecting piece 43, and has a cooling cavity 453 inside the cooling jacket. The cooling jacket is provided with a cooling medium inlet and a cooling medium outlet connected to the cooling cavity 453. The cooling medium enters the cooling cavity 453 from the cooling medium inlet and flows out through the cooling medium outlet.

[0101] By arranging a cooling jacket on the outer wall of the connecting piece 43, the heat rising from the auxiliary furnace chamber 3 to the cavity of the connecting piece 43 is cooled, providing a cooling component 45 that is easy to implement and convenient for subsequent maintenance and repair.

[0102] As an embodiment, the adjustment component 44 includes three pillars 441, and the three pillars 441 are distributed at the three vertices of a triangle. The first end of each pillar 441 is fixed on the base 41, and the second end of each pillar 441 is liftably mounted with an adjustment member 442, and the adjustment member 442 is detachably fixedly connected to the horizontal adjustment seat 42; the adjustment member 442 includes a stud 4421, and an adjustment threaded hole is provided at the end face of the second end of each pillar 441, and three third through holes are provided on the horizontal adjustment seat 42, and each third through hole corresponds to a stud 4421, and the first end of the stud 4421 is installed in the adjustment threaded hole, and the second end of the stud 4421 passes through the third through hole and is fixed to the horizontal adjustment seat 42 by a nut.

[0103] Thus, by adjusting the height of each adjusting member 442, the height adjustment of each adjusting member 442 at the connection of the horizontal adjustment seat 42 is achieved, thereby achieving the horizontal adjustment of the horizontal adjustment seat 42; by setting three pillars 441 distributed in a triangle, and installing an adjusting member 442 on each pillar 441, the horizontality of the horizontal adjustment seat 42 can be ensured. Specifically, each stud 4421 is matched with two nuts, and the two nuts are respectively locked on the upper and lower sides of the horizontal adjustment seat 42. By loosening each nut, the horizontal adjustment seat 42 is adjusted to a suitable height and adjusted to a horizontal state, and then the nut is locked, the horizontal adjustment of the horizontal adjustment seat 42 is completed, thereby providing an adjusting member 442 with a simple structure, low cost and easy operation.

[0104] As an embodiment, an air inlet is provided on one side of the base 1 close to the horizontal adjustment seat 42, and an air distribution plate 47 is provided on one side of the base 1 close to the auxiliary furnace chamber 3. The air distribution plate 47 is located on the periphery of the second through hole 411, and a plurality of air outlets 471 are circumferentially provided on the air distribution plate 47. The air inlet is connected to the plurality of air outlets 471, and protective gas is introduced into the air inlet and blown into the auxiliary furnace chamber 3 circumferentially through the plurality of air outlets 471.

[0105] Specifically, the air inlet is connected to a gas supply pipe 46 , and the gas supply pipe 46 is connected to a gas source for supplying a protective gas; the protective gas is argon.

[0106] By arranging a gas distribution plate 47 on the periphery of the second through hole 411, the protective gas is uniformly delivered into the auxiliary furnace chamber 3 along the circumferential direction, so that the protective gas in the auxiliary furnace chamber 3 is evenly distributed, which is beneficial to ensuring the quality of crystal pulling.

[0107] It can be seen that the balancing mechanism 4 has the following advantages:

[0108] 1) A cooling component 45 is added to cool the heat rising from the auxiliary furnace chamber 3, thereby preventing the balancing mechanism 4 and the lifting head mechanism 5 from being in a high temperature environment for a long time, thereby extending the service life of the balancing mechanism 4 and the lifting head mechanism 5 and reducing the production cost;

[0109] 2) High integration, the compensator 431 has the functions of connection, compensation and cooling, the overall structure is compact and occupies little space;

[0110] 3) Both the inner tube 4311 and the outer tube 4312 are made of metal bellows, which can ensure the heat conduction effect of the cooling component 45 and improve the cooling effect of the cooling component 45 while achieving the compensation function;

[0111] 4) The overall structure of the adjustment component 44 is simple, low cost and easy to operate.

[0112] As an implementation method, see Figure 5 and Figure 7 The single crystal furnace also includes a lifting magnetic field device 7, which includes a magnetic field 71 and a first lifting mechanism. The magnetic field 71 can be lifted and lowered on the periphery of the main furnace chamber 2. The first lifting mechanism is installed on the base 1. The driving end of the first lifting mechanism is connected to the magnetic field 71. The first lifting mechanism is configured to drive the magnetic field 71 to lift and lower.

[0113] The magnetic field 71 is controlled to rise and fall by the first lifting mechanism, so that a uniform magnetic field 71 is generated in the furnace chamber of the single crystal furnace to ensure the processing quality of the crystal rod.

[0114] As an embodiment, the first lifting mechanism includes a mounting bracket 72, a screw drive mechanism 73, n screws 74, a magnetic field bearing mechanism 75 and m magnetic field anti-falling mechanisms 76, wherein the mounting bracket 72 is fixed on the base 1; the screw drive mechanism 73 is installed on the mounting bracket 72; n screws 74 are arranged along the circumferential direction, each screw 74 is connected to the screw drive mechanism 73 in a transmission manner, each screw 74 is rotatably connected to the mounting bracket 72, and the screw drive mechanism 73 is used to drive the n screws 74 to rotate synchronously; the magnetic field bearing mechanism 75 includes a bearing portion 751 and n connecting portions 752 arranged at the bottom of the bearing portion 751 along the circumferential direction, and n connecting portions The part 752 corresponds to the screw rod 74 one by one, the bearing part 751 is used to bear the magnetic field 71, the connecting part 752 is screwed on the corresponding screw rod 74 through a nut, and when the screw rod 74 rotates, the corresponding connecting part 752 is driven to rise and fall; each magnetic field anti-falling mechanism 76 is used to lock a corresponding screw rod 74 to prevent the screw rod 74 from rotating, and the magnetic field anti-falling mechanism 76 is arranged on the mounting bracket 72 and the corresponding screw rod 74; n≥3, m≤n, that is, at least three screw rods 74 are arranged, and at least one screw rod 74 is correspondingly provided with a magnetic field anti-falling mechanism 76. The figure takes four screw rods 74 as an example, and two non-adjacent screw rods 74 are provided with a magnetic field anti-falling mechanism 76.

[0115] Therefore, by providing a magnetic field anti-falling mechanism 76, when the screw drive mechanism 73 adjusts the magnetic field 71 on the magnetic field bearing mechanism 75 to a predetermined height through the screw 74, the magnetic field anti-falling mechanism 76 can lock the screw 74, thereby positioning the magnetic field bearing mechanism 75 to prevent the magnetic field bearing mechanism 75 from descending and causing the magnetic field 71 to fall.

[0116] It should be noted that the magnetic field 71 mentioned in the present application is an annular component with a certain thickness and used to generate a magnetic field in the furnace chamber of the single crystal furnace.

[0117] As an implementation method, see Figures 11 to 13The magnetic field anti-fall mechanism 76 includes a limiting flange 761 and a limiting assembly 762, wherein the limiting flange 761 is fixedly connected to the upper end of the corresponding screw rod 74, and the limiting flange 761 is provided with a plurality of (four examples in the figure) slots 7611 along the circumferential direction; the limiting assembly 762 includes a first driving member 7621 and a limiting pin 7622, ​​the first driving member 7621 is fixedly installed relative to the mounting bracket 72, and the limiting pin 7622 is connected to the first driving member 762 1 and points to the limiting flange 761, the first driving member 7621 is used to drive the limiting pin 7622 to move toward or away from the limiting flange 761; when the first driving member 7621 drives the limiting pin 7622 to move toward the limiting flange 761, the limiting pin 7622 is inserted into the slot 7611 to lock the screw rod 74; when the first driving member 7621 drives the limiting pin 7622 to move away from the limiting flange 761, the limiting pin 7622 is disengaged from the slot 7611.

[0118] The first driving member 7621 here may be a cylinder, which may be directly mounted on the mounting bracket 72 , or may be mounted on a connecting frame independent of the mounting bracket 72 .

[0119] Therefore, by setting a limit assembly 762 fixedly installed relative to the mounting bracket 72 to insert or disengage the limit flange 761 installed on the upper end of the screw rod 74 to lock or release the screw rod 74, a magnetic field anti-fall mechanism 76 with a simple structure is provided.

[0120] As an embodiment, the magnetic field anti-fall mechanism 76 also includes a screw bearing seat 763, the screw bearing seat 763 is arranged on the mounting bracket 72, and the upper end of the screw 74 is rotatably connected to the screw bearing seat 763 via a bearing; the limiting flange 761 is located in the screw bearing seat 763, and a limiting hole 7631 is provided on the side of the screw bearing seat 763 facing the limiting pin 7622, ​​and the limiting pin 7622 is inserted into the slot 7611 through the limiting hole 7631.

[0121] Therefore, by setting the screw bearing seat 763, the rotation installation and limitation of the upper end of the screw 74 and the limiting flange 761 are realized to prevent the upper end of the screw 74 and the limiting flange 761 from moving during the rotation process; and by setting the limiting hole 7631 on the screw bearing seat 763, it is ensured that the limiting pin 7622 can penetrate into the screw bearing seat 763 and be inserted into the slot 7611 of the limiting flange 761 to lock the screw 74.

[0122] As an implementation method, see Fig.12The magnetic field anti-fall mechanism 76 also includes an induction sheet 764 and an induction member 765, wherein the induction sheet 764 is arranged on the limit pin 7622, ​​the induction member 765 is fixedly installed relative to the mounting bracket 72 and arranged opposite to the induction sheet 764, and the induction member 765 is connected with the screw drive mechanism 73 by signal; when the limit pin 7622 is inserted into the slot 7611, the induction sheet 764 is away from the induction member 765; when the limit pin 7622 is out of the slot 7611, the induction sheet 764 is close to the induction member 765 or abuts against the induction member 765, and the induction member 765 is triggered by the induction sheet 764 to generate an induction signal, and transmits the induction signal to the screw drive mechanism 73.

[0123] The screw drive mechanism 73 can drive the screw 74 to rise and fall after receiving the induction signal to adjust the height of the magnetic field 71. In this way, on the one hand, it can prevent the screw drive mechanism 73 from driving the screw 74 to rotate when the screw 74 is locked, causing damage to the screw 74, the nut and other parts.

[0124] The sensing element 765 here can be a micro switch with a trigger head. When the limit pin 7622 is separated from the groove 7611 of the flange, the sensing sheet 764 can be driven to abut against the trigger head of the micro switch, so that the micro switch is triggered to generate a sensing signal.

[0125] Therefore, through the cooperation of the sensing sheet 764 and the sensing part 765, when the limit assembly 762 releases the lock on the screw rod 74, the sensing part 765 transmits the sensing signal to the screw rod driving mechanism 73. After receiving the sensing signal, the screw rod driving mechanism 73 can drive the screw rod 74 to rise and fall to implement the height adjustment of the magnetic field 71.

[0126] See Figure 7 and Figure 8 Optionally, the single crystal furnace magnetic field lifting mechanism in the embodiment of the present application also includes n guide rods 77 corresponding one to one with the screw rods 74, and the upper and lower ends of the guide rods 77 are fixedly connected to the mounting bracket 72, and the connecting part 752 is slidably connected to the corresponding guide rods 77 and can slide up and down along the guide rods 77.

[0127] The guide rod 77 is provided to guide the lifting of the bearing part 751 and the magnetic field 71, thereby preventing the bearing part 751 and the magnetic field 71 from deviating during the lifting process and damaging components such as the screw rod 74 and the nut.

[0128] like Figures 8 to 10As shown, optionally, the connecting portion 752 includes a transfer arm 7521, a mounting seat 7522 and a linear bearing 7523, wherein the upper end of the transfer arm 7521 is connected to the bottom of the bearing portion 751, the mounting seat 7522 is connected to the lower end of the transfer arm 7521, the nut is fixedly arranged on the mounting seat 7522 and is threaded on the screw rod 74, and the linear bearing 7523 is fixedly arranged on the mounting seat 7522 and is sleeved on the guide rod.

[0129] By configuring the connection part 752 in this way, on the one hand, the connection strength between the connection part 752 and the bearing part 751 is ensured, and on the other hand, it is ensured that the screw rod 74 and the guide rod are connected to the connection part 752 in a manner that they can be raised and lowered.

[0130] Of course, the linear bearing 7523 may also be replaced with a bushing to support the guide rod 77 .

[0131] like Fig. 9 and Fig.10 As shown, optionally, the mounting seat 7522 includes a first mounting block 75221, a second mounting block 75222 and a third mounting block 75223, wherein the first end of the first mounting block 75221 is connected to the lower end of the transfer arm 7521, a mounting notch 75224 is provided at the bottom of the second end of the first mounting block 75221, a first mounting hole 75225 is also provided on the second end of the first mounting block 75221, and the lower half of the first mounting hole 75225 is connected to the mounting notch 75224 to form a first half-section hole.

[0132] The second mounting block 75222 is installed in the mounting notch 75224. The second mounting block 75222 has a second half-hole 75226 connected to the first half-hole on one side thereof facing the first half-hole. The second mounting block 75222 has a third half-hole 75227 on the other side thereof away from the first half-hole.

[0133] The third mounting block 75223 is connected to the top of the second end of the first mounting block 75221 and extends outward from the first mounting block 75221. The third mounting block 75223 is provided with a second mounting hole 75228 vertically interpenetrating the first mounting hole 75225. The third mounting block 75223 is also provided with a third mounting hole 75229 vertically interpenetrating the third half-section hole 75227.

[0134] The nut is inserted into the first mounting hole 75225, and the screw rod 74 passes through the nut and the second mounting hole 75228. The linear bearing 7523 is inserted into the third mounting hole 75229, and the third half-cut hole 75227 is used to avoid the linear bearing 7523.

[0135] By configuring the mounting seat 7522 to be a detachable split structure consisting of a first mounting block 75221 , a second mounting block 75222 and a third mounting block 75223 , it is convenient to repair and replace the nut and the linear bearing 7523 .

[0136] In order to facilitate the disassembly and assembly of the magnetic field 71 and ensure the installation stability of the magnetic field 71 to prevent the magnetic field 71 from falling or tilting, the bearing portion 751 is optionally an annular mounting flange matching the bottom shape of the magnetic field 71, and the magnetic field 71 is fixedly mounted on the mounting flange through the mounting holes on the mounting flange.

[0137] like Figures 5 to 7 As shown, optionally, the lifting and lowering magnetic field device 7 also includes a limiting support mechanism arranged below the magnetic field bearing mechanism 75, and the limiting support mechanism includes a plurality of support seats 78 arranged along the circumferential direction, and the support seats 78 are arranged one by one below the connecting portion 752, and the upper surfaces of the plurality of support seats 78 are on the same horizontal plane to constitute a support surface of the limiting support mechanism.

[0138] When installing the magnetic field 71 , firstly, the connecting parts 752 of the magnetic field bearing mechanism 75 are supported one by one on the support seat 78 to ensure the horizontality of the bearing part 751 and finally ensure the horizontality of the magnetic field 71 installed on the bearing part 751 .

[0139] Optionally, a buffer pad is installed on the upper surface of the support seat 78. When the magnetic field 71 falls accidentally, the support seat 78 can provide buffer support for the magnetic field 71 through the buffer pad thereon.

[0140] It should be noted that the buffer pad will be installed on the support seat 78 only after the magnetic field 71 is installed. It is necessary to ensure that the connecting part 752 and the support seat 78 are in hard contact during the installation of the magnetic field 71, so as to avoid the buffer pad affecting the horizontality of the installation of the magnetic field 71.

[0141] like Figure 7 As shown, optionally, the screw drive mechanism 73 includes a motor and a reducer corresponding to the screw 74, wherein: n reducers are arranged along the circumferential direction and are all connected to the motor in a transmission manner, and the lower end of the screw 74 is connected to the output end of the corresponding reducer. The motor drives n screws 74 to rotate synchronously through n reducers, thereby realizing the lifting and lowering drive of the bearing part 751 and the magnetic field 71.

[0142] Of course, other existing driving mechanisms can also be used to drive the n screw rods 74 to rotate synchronously. For example, the screw driving mechanism 73 includes n independent rotation driving motors, each of which is connected to a screw rod 74 by transmission. The n rotation driving motors are controlled by the same controller, and the controller drives the n rotation driving motors to synchronously drive the n screw rods 74 to rotate, so as to realize the lifting and lowering drive of the bearing part 751 and the magnetic field 71.

[0143] Specifically, the working process of the lifting magnetic field device 7 is as follows:

[0144] 1) driving the n screws 74 to rotate synchronously in a first direction (e.g., clockwise) through the screw driving mechanism 73 to drive the magnetic field bearing mechanism 75 to the installation low position;

[0145] 2) installing the magnetic field 71 onto the magnetic field bearing mechanism 75 at the installation low position;

[0146] 3) driving the n screws 74 to rotate synchronously in a second direction (such as counterclockwise) through the screw drive mechanism 73 to adjust the magnetic field bearing mechanism 75 and the magnetic field 71 to a predetermined height;

[0147] 4) Control each magnetic field anti-fall mechanism 76 to lock the corresponding screw rod 74.

[0148] As an implementation method, see Figure 1 The single crystal furnace also includes a column 8, a main furnace chamber moving mechanism 9 and an auxiliary furnace chamber moving mechanism 10, wherein the column 8 is fixedly arranged on one side of the base 1, the main furnace chamber moving mechanism 9 is installed on the column 8, and the main furnace chamber moving mechanism 9 is configured to assist in disassembling and assembling the main furnace chamber 2; the auxiliary furnace chamber moving mechanism 10 is installed on the column 8, and the auxiliary furnace chamber moving mechanism 10 is configured to drive the auxiliary furnace chamber 3, the balancing mechanism 4 and the pulling head mechanism 5 to rotate or rise and fall together, or the auxiliary furnace chamber moving mechanism 10 is configured to drive the furnace cover 11 on the main furnace chamber 2, the auxiliary furnace chamber 3, the balancing mechanism 4 and the pulling head mechanism 5 to rotate or rise and fall together.

[0149] Thus, through the main furnace chamber moving mechanism 9, the main furnace chamber 2 can be automatically disassembled to facilitate the cleaning of the main furnace chamber 2, which saves manpower, has a high degree of automation, and improves the cleaning efficiency of the main furnace chamber 2. The main furnace chamber 2 can also be installed with the help of the main furnace chamber moving mechanism 9; through the auxiliary furnace chamber moving mechanism 10, the auxiliary furnace chamber 3, the single crystal furnace and the pulling head mechanism 5 are rotated or lifted together, or the furnace cover 11, the control valve 12, the auxiliary furnace chamber 3, the single crystal furnace and the pulling head mechanism 5 on the main furnace chamber 2 are rotated or lifted together, thereby realizing the automatic unloading of the drawn silicon rods and the automatic feeding of silicon materials, thereby improving the production efficiency of the single crystal furnace.

[0150] As an implementation method, see Fig.14The auxiliary furnace chamber moving mechanism 10 includes a second lifting mechanism 101, a first lifting seat 102, a first rotating mechanism 103 and a first rotating arm 104. The second lifting mechanism 101 is installed on the column 8, and the driving end of the second lifting mechanism 101 is connected to the first lifting seat 102. The second lifting mechanism 101 is configured to drive the first lifting seat 102 to rise and fall. The first rotating mechanism 103 is installed on the first lifting seat 102. The driving end of the first rotating mechanism 103 is connected to the first end of the first rotating arm 104. The second end of the first rotating arm 104 is connected to the auxiliary furnace chamber 3. The first rotating mechanism 103 is configured to drive the first rotating arm 104 to rotate.

[0151] The second lifting mechanism 101 here is preferably a motor screw pair, and the first rotating mechanism 103 is preferably a gear pair.

[0152] Therefore, the auxiliary furnace chamber 3 is lifted and lowered by the second lifting mechanism 101 , and the auxiliary furnace chamber 3 is rotated by the first rotating mechanism 103 , thereby satisfying the action requirements of the auxiliary furnace chamber 3 for rotation and lifting.

[0153] As an implementation method, see Fig.15 A crystal receiving assembly 13 is installed at the bottom of the auxiliary furnace chamber 3. The crystal receiving assembly 13 is configured to block the lower port of the auxiliary furnace chamber 3 before the auxiliary furnace chamber moving mechanism 10 drives the auxiliary furnace chamber 3 to rotate, so as to prevent the crystal rod from accidentally falling during the rotation of the auxiliary furnace chamber 3.

[0154] Therefore, by providing the crystal receiving assembly 13, it is possible to effectively prevent the crystal rod from accidentally falling during the rotation of the auxiliary furnace chamber 3, thereby making the production process safer.

[0155] Specifically, the crystal receiving assembly 13 includes a second driving member 131 and a crystal receiving frame 132, the fixed end of the second driving member 131 is hinged on the auxiliary furnace chamber 3, the crystal receiving frame 132 is hinged on the auxiliary furnace chamber 3, and the driving end of the second driving member 131 is connected to the crystal receiving frame 132; the second driving member 131 is preferably a cylinder, which is configured to drive the crystal receiving frame 132 to move to the outside of the auxiliary furnace chamber 3 to avoid the lower port of the auxiliary furnace chamber 3, and is also configured to drive the crystal receiving frame 132 to move below the lower end of the auxiliary furnace chamber 3 to block the lower port of the auxiliary furnace chamber 3.

[0156] Therefore, the second driving member 131 drives the crystal receiving frame 132 to switch between the two positions located outside the auxiliary furnace chamber 3 and below the lower end of the auxiliary furnace chamber 3, which does not affect the normal assembly of the auxiliary furnace chamber 3 and can effectively prevent the crystal rod from accidentally falling during the rotation of the auxiliary furnace chamber 3.

[0157] As an implementation method, see Figure 1A control valve 12 is installed on the furnace cover 11 on the main furnace chamber 2, and the control valve 12 is configured to control the opening or closing of the port on the main furnace chamber 2. A locking ring assembly 14 is arranged between the control valve 12 and the auxiliary furnace chamber 3, and the locking ring assembly 14 is configured to control the connection or separation of the control valve 12 and the auxiliary furnace chamber 3.

[0158] Thus, the connection or blockage between the main furnace chamber 2 and the auxiliary furnace chamber 3 is controlled by the control valve 12, and the connection or separation between the main furnace chamber 2 and the auxiliary furnace chamber 3 is controlled by the locking ring assembly 14, so as to realize the actions of adding materials to the main furnace chamber 2, cleaning, etc.

[0159] As an implementation method, see Fig.16 and Fig.17 The main furnace chamber moving mechanism 9 includes a third lifting mechanism 91, a second lifting seat 92, a second rotating mechanism 93, a second rotating arm 94 and a clamping member 95. The third lifting mechanism 91 is installed on the column 8, and the driving end of the third lifting mechanism 91 is connected to the second lifting seat 92. The third lifting mechanism 91 is configured to drive the second lifting seat 92 to rise and fall. The second rotating mechanism 93 is installed on the second lifting seat 92. The driving end of the second rotating mechanism 93 is connected to the first end of the second rotating arm 94. The second rotating mechanism 93 is configured to drive the second rotating arm 94 to rotate. The clamping member 95 is arranged at the second end of the second rotating arm 94. The clamping member 95 is configured to clamp or release the main furnace chamber 2.

[0160] The third lifting mechanism 91 here can also be a motor screw pair, and the second rotating mechanism 93 is a gear pair. Three clamping members 95 can be selected, and the three clamping members 95 are arranged at intervals along the circumferential direction. The clamping member 95 includes a hook and a rotating cylinder. The hook is hingedly mounted on the second rotating arm 94, and the cylinder body of the rotating cylinder is hingedly mounted on the second rotating arm 94. The piston rod end of the rotating cylinder is hinged to the hook. A plurality of lifting rings are arranged on the outer periphery of the main furnace chamber 2, and the hook is controlled by the rotating cylinder to hook or release the lifting ring.

[0161] Therefore, the lifting and lowering of the main furnace chamber 2 is achieved through the third lifting mechanism 91, and the rotation of the main furnace chamber 2 is achieved through the second rotating mechanism 93, thereby meeting the action requirements of the main furnace chamber 2 for rotation and lifting, so that the main furnace chamber 2 can be disassembled and assembled.

[0162] As an implementation method, see Fig.18The vacuum pipeline 6 includes a connecting pipeline 61, a gas collecting pipeline 62 and at least two vacuum pipelines 63, wherein each vacuum pipeline 63 is connected to the main furnace chamber 2, and each vacuum pipeline 63 is provided with a first explosion-proof port and a first downward cleaning port, the first explosion-proof port is sealed by a first explosion-proof component 634, and the first explosion-proof component 634 is configured to open automatically when the pressure in the vacuum pipeline 63 reaches a corresponding value, or can be opened manually during cleaning; the connecting pipeline 61 is connected to all the vacuum pipelines 63, and the gas collecting pipeline 62 is connected to the main furnace chamber 2. One end of the pipe 62 is connected to the connecting pipe 61, and the other end of the gas collecting pipe 62 is connected to the vacuum pump. A second cleaning port is provided on the connecting pipe 61, and at least one second explosion-proof port 623 is provided on the gas collecting pipe 62. The second explosion-proof port 623 is sealed by a second explosion-proof component 622. The second explosion-proof component 622 is configured to open automatically when the pressure in the gas collecting pipe 62 reaches a corresponding value, or can be manually opened during cleaning; seals 64 are respectively provided at the first cleaning port and the second cleaning port, which can be opened or closed.

[0163] Thus, by setting the first cleaning port, it is convenient to clean the dirt in the vacuum pipe 63; by setting the second cleaning port, it is convenient to clean the dirt in the connecting pipe 61; by setting the second explosion-proof port 623, it is convenient to clean the dirt in the gas collecting pipe 62, so that each pipe of the vacuum pipe 6 can be easily cleaned, ensuring the vacuum effect of the single crystal furnace. In addition, by setting the first explosion-proof component 634 on the vacuum pipe 63 and the second explosion-proof component 622 on the gas collecting pipe 62, the explosion-proof effect of the explosion-proof vacuum pipe 6 of the single crystal furnace is improved.

[0164] As an embodiment, the vacuum pipe 63 includes a vertical section 631, a branch section 632 and an inclined section 633 that are interconnected. The vertical section 631 is vertically installed at the bottom of the main furnace chamber 2. The upper end of the vertical section 631 is connected to the main furnace chamber 2. The lower end of the vertical section 631 constitutes a first cleaning port. The first end of the branch section 632 is connected to the side wall of the vertical section 631. The second end of the branch section 632 constitutes a first explosion-proof port. The first end of the inclined section 633 is connected to the side wall of the vertical section 631. The second end of the inclined section 633 is connected to the connecting pipe 61. The inclined section 633 is arranged to extend downward from the first end to the second end.

[0165] Specifically, the vertical section 631, the branch section 632 and the inclined section 633 are all set with equal diameters to facilitate cleaning of dirt.

[0166] By setting the first cleaning port at the lower port of the vertical section 631, it is convenient to clean the dirt in the vertical section 631; by setting the first explosion-proof port on the branch section 632, the explosion-proof function of the vacuum pipe 63 is achieved, and by setting the inclined section 633, the connection between the vacuum pipe 63 and the connecting pipe 61 is achieved, providing a vacuum pipe 63 with a simple structure, explosion-proof and easy to clean dirt in the pipe.

[0167] As an implementation manner, the branch segment 632 is arranged horizontally, and the first port of the branch segment 632 and the first port of the inclined segment 633 are directly opposite.

[0168] The first explosion-proof component 634 is installed at the second port of the branch section 632. Since the branch section 632 is horizontally arranged and the first port of the branch section 632 is arranged opposite to the first port of the inclined section 633, the dirt in the branch section 632 and the inclined section 633 can be cleaned by opening the first explosion-proof component 634, which is more convenient and does not require a separate cleaning port on the inclined section 633, thereby simplifying the overall structure.

[0169] See also Fig.18 and Fig.19 As shown, as an embodiment, the seal 64 includes a first cover plate 641 and a locking assembly 642. The first cover plate 641 is hinged on the tube wall at the corresponding first cleaning port or the second cleaning port. The locking assembly 642 is configured to lock the first cover plate 641 at the corresponding first cleaning port or the second cleaning port to close the corresponding first cleaning port or the second cleaning port. The locking assembly 642 is also configured to be able to unlock to open the first cover plate 641.

[0170] Specifically, a first handle 6411 for easy operation is provided on the outer side of the first cover plate 641 .

[0171] Through the cooperation of the first cover plate 641 and the locking assembly 642, the first cleaning port or the second cleaning port is closed and opened, providing a sealing member 64 with a simple structure and low cost.

[0172] As an embodiment, the locking assembly 642 includes a first pin shaft 6421, a first pivot bolt 6422 and a first locking nut 6423. The first pin shaft 6421 is installed on the pipe wall at the corresponding first cleaning port or the second cleaning port. The first end of the first pivot bolt 6422 is hinged on the first pin shaft 6421. The first locking nut 6423 is sleeved on the first pivot bolt 6422. The edge of the first cover plate 641 is provided with a first notch 6412 for the first pivot bolt 6422 to pass through. The first pivot bolt 6422 rotates around the first pin shaft 6421 by a corresponding angle so that the first pivot bolt 6422 passes through the first notch 6412, and the first locking nut 6423 is located on the outer side of the first cover plate 641. The first locking nut 6423 is rotated to press and fix the first cover plate 641 at the corresponding first cleaning port or the second cleaning port through the first locking nut 6423.

[0173] Specifically, the first locking nut 6423 is threadedly connected to the first pivot bolt 6422, and the first pivot bolt 6422 rotates around the first pin shaft 6421 close to the first cover plate 641, so that the first pivot bolt 6422 passes through the first notch 6412, and the first locking nut 6423 is located on the outer side of the first cover plate 641. The first locking nut 6423 is tightened, and the first cover plate 641 is pressed and fixed to the corresponding first cleaning port or the second cleaning port through the first locking nut 6423 to close the corresponding first cleaning port or the second cleaning port; when the corresponding pipeline needs to be cleaned, the first locking nut 6423 is loosened, and the first pivot bolt 6422 is operated to rotate around the first pin shaft 6421 away from the first cover plate 641, and then the first cover plate 641 is completely opened from the corresponding first cleaning port or the second cleaning port. The angle at which the first articulated bolt 6422 rotates around the first pin shaft 6421 to approach the first cover plate 641 and the angle at which the first articulated bolt 6422 rotates around the first pin shaft 6421 to move away from the first cover plate 641 may be approximately 90°.

[0174] Specifically, the first locking nut 6423 is an existing star-shaped handle.

[0175] Through the cooperation of the first pin shaft 6421, the first pivot bolt 6422 and the first locking nut 6423, the first cover plate 641 is fixed to the corresponding first cleaning port or the second cleaning port to close the corresponding cleaning port, and the first cover plate 641 at the first cleaning port or the second cleaning port is opened, providing a locking assembly 642 that is easy to implement and convenient and quick to operate.

[0176] See also Fig.18 and Fig. 20As shown, as an embodiment, the first explosion-proof component 634 includes a second cover plate 6341, a second pin shaft 6342, a second articulated bolt 6343, a second locking nut 6344, an elastic member 6345 and a limiting member 6346. The second cover plate 6341 is hinged on the pipe wall of the first explosion-proof opening, the second pin shaft 6342 is installed on the pipe wall of the first explosion-proof opening, the first end of the second articulated bolt 6343 is hinged on the second pin shaft 6342, the second end of the second articulated bolt 6343 is installed with a limiting member 6346, the second locking nut 6344 is sleeved on the second articulated bolt 6343, the edge of the second cover plate 6341 is provided with a second notch 6347 for the second articulated bolt 6343 to pass through, and the elastic member 6345 is sleeved on the second articulated bolt 6343. On the joint bolt 6343, the elastic member 6345 can be a spring, the first end of the elastic member 6345 abuts on the second joint bolt 6343, and the second end of the elastic member 6345 abuts on the limit member 6346; the second joint bolt 6343 rotates around the second pin shaft 6342 by a corresponding angle, so that the second joint bolt 6343 passes through the second notch 6347, and the second locking nut 6344 is located on the outer side of the second cover plate 6341, and the second locking nut 6344 is rotated to press the second cover plate 6341 against the first explosion-proof port through the second locking nut 6344; when the pressure in the vacuum pipe 63 reaches a corresponding value, the pressure impacts the second cover plate 6341 and compresses the elastic member 6345, so that the second cover plate 6341 opens automatically.

[0177] Specifically, a second handle for easy operation is provided on the outer side of the second cover plate 6341 .

[0178] Specifically, the second locking nut 6344 is threadedly connected to the second articulated bolt 6343, and the second locking nut 6344 is also an existing star-shaped handle.

[0179] Through the cooperation of the second cover plate 6341, the second pin shaft 6342, the second articulated bolt 6343, the second locking nut 6344, the elastic member 6345 and the limit member 6346, the second cover plate 6341 is pressed and fixed at the first explosion-proof opening, and when the pressure in the vacuum pipe 63 reaches a corresponding value, the second cover plate 6341 is automatically opened to implement pressure relief and explosion prevention; a first explosion-proof component 634 that is easy to implement and convenient and quick to open and close is provided.

[0180] See also Fig.18 As shown, as an implementation mode, a pneumatic ball valve 621 for controlling the on-off of the gas collecting pipeline 62 is provided on the gas collecting pipeline 62 , and a second explosion-proof component 622 is provided on both sides of the pneumatic ball valve 621 on the gas collecting pipeline 62 .

[0181] By setting up the pneumatic ball valve 621, the on-off control of the gas collecting pipe 62 is achieved; by setting the second explosion-proof component 622 on the gas collecting pipe 62 on both sides of the pneumatic ball valve 621, when the pneumatic ball valve 621 is closed, the second explosion-proof port 623 close to the main furnace chamber 2 is connected to the main furnace chamber 2, and pressure relief and explosion prevention can still be achieved, thereby further improving the explosion-proof effect.

[0182] As an embodiment, the second explosion-proof component 622 includes a third cover plate 6221, the opening of the second explosion-proof port 623 faces upward, and the third cover plate 6221 is hinged on the pipe wall of the second explosion-proof port 623; the third cover plate 6221 closes the second explosion-proof port 623 by its own weight, and when the pressure in the gas collecting pipe 62 reaches a corresponding value, the pressure overcomes the self-weight of the third cover plate 6221 and opens it.

[0183] Specifically, the third cover plate 6221 is hinged to the pipe wall of the second explosion-proof opening 623 through a hinge 6222 .

[0184] By setting the second explosion-proof port 623 upward and hingedly connecting the third cover plate 6221 to the pipe wall of the second explosion-proof port 623, the second explosion-proof port 623 is closed by the deadweight of the third cover plate 6221, and when the pressure in the gas collecting pipe 62 reaches a corresponding value, the pressure overcomes the deadweight of the third cover plate 6221 to open it, thereby implementing pressure relief and explosion prevention; a second explosion-proof component 622 with a simple structure and low cost is provided.

[0185] As an embodiment, the second end of the inclined section 633 of the vacuum pipe 63 is connected to the first bellows 65, the vacuum pipe 63 is connected to the connecting pipe 61 through the first bellows 65, and the vacuum pipe 63 is connected to the gas collecting pipe 62 through the second bellows 66.

[0186] By providing the first bellows 65 and the second bellows 66 , assembly errors can be compensated, and installation and disassembly of the entire vacuum pipeline 6 are facilitated.

[0187] As an implementation mode, there are two vacuum pipes 63, there are two first bellows 65, the connecting pipe 61 includes a collecting pipe 611 and two branch pipes 612, the first end of the collecting pipe 611 is connected to the gas collecting pipe 62 through the second bellows 66, the second end of the collecting pipe 611 is connected to the two branch pipes 612 at the same time, the two branch pipes 612 are respectively connected to the corresponding inclined sections 633 through the first bellows 65, and the second cleaning port is opened at the connection between the second ends of the two branch pipes 612 and the collecting pipe 611.

[0188] By opening the second cleaning port at the connection between the second ends of the two branch pipes 612 and the collecting pipe 611, it is convenient to clean the dirt in the two branch pipes 612 and the collecting pipe 611, which helps to improve the cleaning efficiency of the pipeline.

[0189] The single crystal furnace explosion-proof vacuum pipeline 6 provided in the embodiment of the present application can open the seal 64 on the corresponding vertical section 631 and the first explosion-proof component 634 of the corresponding branch section 632 when cleaning the vacuum pipeline 63; when cleaning the connecting pipeline 61, the first explosion-proof component 634 of the branch section 632 and the seal 64 at the second cleaning port can be opened; when cleaning the gas collecting pipeline 62, the seal 64 at the second cleaning port and the two second explosion-proof components 622 can be opened.

[0190] It can be seen that the vacuum line 6 has the following advantages:

[0191] 1) Each pipeline can be easily cleaned, which improves the cleaning efficiency of the vacuum pipeline 63 and ensures the vacuum effect;

[0192] 2) A first explosion-proof component 634 is provided on the vacuum pipeline 63 and a second explosion-proof component 622 is provided on the gas collecting pipeline 62, thereby improving the explosion-proof effect of the vacuum pipeline 6;

[0193] 3) The locking assembly 642 is easy and quick to operate, saving time and effort;

[0194] 4) The opening and closing operation of the first explosion-proof component 634 is convenient and quick, saving time and effort;

[0195] 5) The second explosion-proof component 622 seals the second explosion-proof opening 623 by its own weight, and the overall structure is simple and the cost is low.

[0196] The working principle of the single crystal furnace is:

[0197] For the convenience of explanation, the auxiliary furnace chamber 3, the balancing mechanism 4 and the lifting head mechanism 5 are regarded as component 1, and the furnace cover 11 on the main furnace chamber 2, the control valve 12, the auxiliary furnace chamber 3, the balancing mechanism 4 and the lifting head mechanism 5 are regarded as component 2. The furnace cover 11 on the main furnace chamber 2 is connected to the auxiliary furnace chamber 3 through the control valve 12.

[0198] There is silicon material in the crucible inside the main furnace chamber 2, and the pulling head mechanism 5 releases the traction rope downward. The lower end of the traction rope is connected to the seed crystal. The traction rope moves downward to drive the seed crystal into the silicon material in the crucible. The traction rope slowly pulls the seed crystal upward, so that the lower end of the seed crystal slowly grows until a silicon rod is formed. The silicon rod is inside the auxiliary furnace chamber 3, and the control valve 12 is closed. The auxiliary furnace chamber moving mechanism 10 drives the component to rotate to one side, and the traction rope is released to release the silicon rod in the auxiliary furnace chamber 3 into the crystal retrieval vehicle. Then, the traction rope is used to pull the feeding bucket into the auxiliary furnace chamber 3, and the auxiliary furnace chamber moving mechanism 10 is used to drive the component As soon as it returns to its original position, the control valve 12 is opened, and the silicon material in the feeding barrel is added into the crucible. The auxiliary furnace chamber moving mechanism 10 then drives component one to rotate to one side, releases the feeding barrel, and the auxiliary furnace chamber moving mechanism 10 drives component one to return to its original position to continue drawing the second silicon rod; repeat the above actions. When all silicon rods are drawn and need to be disassembled, the auxiliary furnace chamber moving mechanism 10 drives component two (wherein the last silicon rod is in the auxiliary furnace chamber 3) to rotate to one side, and the last silicon rod is placed on the crystal retrieval car. The main furnace chamber 2 is disassembled and cleaned by the main furnace chamber moving mechanism 9.

[0199] The above embodiments are only to illustrate the basic principles and characteristics of the present application. The present application is not limited by the above examples. Without departing from the spirit and scope of the present application, the present application may be subject to various changes and modifications, which are within the scope of the present application to be protected. The scope of protection claimed in the present application is defined by the attached claims and their equivalents.

Claims

1. A single crystal furnace, characterized in that: The single crystal furnace comprises a base, a main furnace chamber, an auxiliary furnace chamber, a balancing mechanism, a lifting head mechanism and a vacuum pipeline, wherein: The main furnace chamber is arranged on the base, the auxiliary furnace chamber is arranged above the main furnace chamber, the auxiliary furnace chamber is connected with the main furnace chamber, and the main furnace chamber is connected with the vacuum pump through the vacuum extraction pipeline; The pulling head mechanism is installed on the balancing mechanism, and the pulling head mechanism is configured to pull and pull the crystal rod; The balancing mechanism is installed at the upper end of the auxiliary furnace chamber, and is configured to adjust the horizontality of the installation of the lifting head mechanism. The balancing mechanism includes a cooling component, and the cooling component is configured to cool the heat transferred from the auxiliary furnace chamber.

2. The single crystal furnace according to claim 1, characterized in that: The balancing mechanism further comprises a base, a level adjustment seat, a connecting piece and an adjustment assembly, wherein: The base is fixedly mounted on the auxiliary furnace chamber; The horizontal adjustment seat is arranged above the base at intervals, and a lifting head mechanism is installed on the horizontal adjustment seat; The connecting piece has a cavity for the traction rope of the lifting head mechanism to pass through, the first end of the connecting piece is connected to the base, the cavity of the connecting piece is connected to the auxiliary furnace chamber, and the second end of the connecting piece is connected to the horizontal adjustment seat; The first end of the adjustment component is connected to the base, and the second end of the adjustment component is connected to the horizontal adjustment seat. The adjustment component is configured to adjust the horizontality of the horizontal adjustment seat to ensure the horizontality of the lifting head mechanism installation; The cooling assembly is configured to cool the heat in the cavity.

3. The single crystal furnace according to claim 2, characterized in that: The connecting piece includes a compensator, a first through hole is opened at the center of the horizontal adjustment seat, a second through hole is opened at the center of the base, the second end of the compensator is connected to the first through hole, the first end of the compensator is connected to the second through hole, the traction rope of the lifting head mechanism passes through the cavity of the compensator and is introduced into the auxiliary furnace chamber, and the compensator is configured to compensate for the displacement of the horizontal adjustment seat when adjusting the horizontality.

4. The single crystal furnace according to claim 3, characterized in that: The cooling component includes a cooling medium inlet pipe, a cooling medium outlet pipe and a cooling cavity. The compensator includes an inner tube and an outer tube. The outer tube is sleeved on the periphery of the inner tube. The cooling cavity is formed between the inner tube and the outer tube. The cooling medium inlet pipe and the cooling medium outlet pipe are arranged on the outer tube. The cooling medium inlet pipe and the cooling medium outlet pipe are connected to the cooling cavity. The cooling medium enters the cooling cavity from the cooling medium inlet pipe and flows out through the cooling medium outlet pipe.

5. The single crystal furnace according to claim 2, characterized in that: The adjustment assembly includes three pillars, which are distributed at three vertices of a triangle. The first end of each pillar is fixed on a base, and an adjustment member is liftably mounted on the second end of each pillar, and the adjustment member is detachably fixedly connected to the horizontal adjustment seat; the adjustment member includes a stud, and an adjustment threaded hole is provided at the end surface of the second end of each pillar, and three third through holes are provided on the horizontal adjustment seat, and each of the third through holes corresponds to one stud, and the first end of the stud is installed in the adjustment threaded hole, and the second end of the stud passes through the third through hole and is fixed to the horizontal adjustment seat by a nut.

6. The single crystal furnace according to claim 1, characterized in that: The single crystal furnace also includes a lifting magnetic field device, which includes a magnetic field and a first lifting mechanism. The magnetic field can be lifted and lowered on the periphery of the main furnace chamber. The first lifting mechanism is installed on the base. The driving end of the first lifting mechanism is connected to the magnetic field. The first lifting mechanism is configured to drive the magnetic field to rise and fall.

7. The single crystal furnace according to claim 6, characterized in that: The first lifting mechanism includes a mounting bracket, a screw drive mechanism, n screws, a magnetic field bearing mechanism and m magnetic field anti-falling mechanisms, wherein: The mounting bracket is fixed on the base; The screw drive mechanism is mounted on the mounting bracket; The n screw rods are arranged along the circumferential direction, each of the screw rods is transmission-connected to the screw rod driving mechanism, each of the screw rods is rotationally connected to the mounting bracket, and the screw rod driving mechanism is used to drive the n screw rods to rotate synchronously; The magnetic field bearing mechanism comprises a bearing portion and n connecting portions arranged circumferentially at the bottom of the bearing portion, the n connecting portions corresponding to the screw rods one by one, the bearing portion is used to bear the magnetic field, the connecting portion is screwed to the corresponding screw rods through nuts, and the corresponding connecting portion is driven to rise and fall when the screw rods rotate; Each of the magnetic field anti-falling mechanisms is used to lock a corresponding screw rod to prevent the screw rod from rotating, and the magnetic field anti-falling mechanism is arranged on the mounting bracket and the corresponding screw rod; n≥3, m≤n.

8. The single crystal furnace according to claim 7, characterized in that: The magnetic field anti-fall mechanism comprises a limit flange and a limit assembly, wherein: The limiting flange is fixedly connected to the upper end of the corresponding screw rod, and the limiting flange is provided with a plurality of slots along the circumferential direction; The limiting assembly includes a first driving member and a limiting pin, wherein the first driving member is fixedly mounted relative to the mounting bracket, the limiting pin is connected to the driving end of the first driving member and points to the limiting flange, and the first driving member is used to drive the limiting pin to move toward or away from the limiting flange; When the first driving member drives the limit pin to move toward the limit flange, the limit pin is inserted into the slot to lock the screw rod; when the first driving member drives the limit pin to move away from the limit flange, the limit pin is disengaged from the slot.

9. The single crystal furnace according to claim 8, characterized in that: The magnetic field anti-fall mechanism also includes a screw bearing seat, the screw bearing seat is arranged on the mounting bracket, and the upper end of the screw is rotatably connected to the screw bearing seat via a bearing; The limiting flange is located in the screw bearing seat, and a limiting hole is provided on a side of the screw bearing seat facing the limiting pin, and the limiting pin is inserted into the slot through the limiting hole.

10. The single crystal furnace according to claim 8, characterized in that: The magnetic field anti-fall mechanism also includes an induction sheet and an induction member, wherein: The induction sheet is arranged on the limit pin, the induction element is fixedly installed relative to the mounting bracket and arranged opposite to the induction sheet, and the induction element is connected to the lead screw drive mechanism by signal; When the limiting pin is inserted into the card slot, the sensing sheet is away from the sensing element; When the limit pin is disengaged from the slot, the sensing sheet approaches the sensing element or abuts against the sensing element, and the sensing element is triggered by the sensing sheet to generate a sensing signal, and transmits the sensing signal to the screw drive mechanism.

11. The single crystal furnace according to claim 1, characterized in that: The single crystal furnace further comprises a column, a main furnace chamber moving mechanism and an auxiliary furnace chamber moving mechanism, wherein: The column is fixedly arranged on one side of the base, the main furnace chamber moving mechanism is installed on the column, and the main furnace chamber moving mechanism is configured to assist in disassembling and assembling the main furnace chamber; The auxiliary furnace chamber moving mechanism is installed on the column, and the auxiliary furnace chamber moving mechanism is configured to drive the auxiliary furnace chamber, the balancing mechanism and the lifting head mechanism to rotate or lift together, or the auxiliary furnace chamber moving mechanism is configured to drive the furnace cover on the main furnace chamber, the auxiliary furnace chamber, the balancing mechanism and the lifting head mechanism to rotate or lift together.

12. The single crystal furnace according to claim 11, characterized in that: The auxiliary furnace chamber moving mechanism includes a second lifting mechanism, a first lifting seat, a first rotating mechanism and a first rotating arm. The second lifting mechanism is installed on the column, the driving end of the second lifting mechanism is connected to the first lifting seat, and the second lifting mechanism is configured to drive the first lifting seat to lift and lower. The first rotating mechanism is installed on the first lifting seat, the driving end of the first rotating mechanism is connected to the first end of the first rotating arm, the second end of the first rotating arm is connected to the auxiliary furnace chamber, and the first rotating mechanism is configured to drive the first rotating arm to rotate.

13. The single crystal furnace according to claim 11, characterized in that: A crystal receiving assembly is installed at the bottom of the auxiliary furnace chamber, and the crystal receiving assembly is configured to block the lower port of the auxiliary furnace chamber before the auxiliary furnace chamber moving mechanism drives the auxiliary furnace chamber to rotate, so as to prevent the crystal rod from accidentally falling during the rotation of the auxiliary furnace chamber.

14. The single crystal furnace according to claim 13, characterized in that: The crystal bonding assembly comprises a second driving member and a crystal bonding frame, the fixed end of the second driving member is hinged on the auxiliary furnace chamber, the crystal bonding frame is hinged on the auxiliary furnace chamber, and the driving end of the second driving member is connected to the crystal bonding frame; The second driving member is configured to drive the crystal receiving frame to move to the outside of the auxiliary furnace chamber to avoid the lower port of the auxiliary furnace chamber; The second driving member is further configured to drive the crystal receiving frame to move below the lower end of the auxiliary furnace chamber to block the lower port of the auxiliary furnace chamber.

15. The single crystal furnace according to claim 11, characterized in that: A control valve is installed on the furnace cover on the main furnace chamber, and the control valve is configured to control the opening or closing of the port on the main furnace chamber. A locking ring assembly is arranged between the control valve and the auxiliary furnace chamber, and the locking ring assembly is configured to control the connection or separation of the control valve and the auxiliary furnace chamber.

16. The single crystal furnace according to claim 11, characterized in that: The main furnace chamber moving mechanism includes a third lifting mechanism, a second lifting seat, a second rotating mechanism, a second rotating arm and a clamping member. The third lifting mechanism is installed on the column, and the driving end of the third lifting mechanism is connected to the second lifting seat. The third lifting mechanism is configured to drive the second lifting seat to lift and lower. The second rotating mechanism is installed on the second lifting seat, and the driving end of the second rotating mechanism is connected to the first end of the second rotating arm. The second rotating mechanism is configured to drive the second rotating arm to rotate. The clamping member is provided at the second end of the second rotating arm, and the clamping member is configured to clamp or release the main furnace chamber.

17. The single crystal furnace according to claim 1, characterized in that: The vacuum pipeline includes a connecting pipeline, a gas collecting pipeline and at least two vacuum pipelines, wherein: Each of the vacuuming pipes is in communication with the main furnace chamber, and each of the vacuuming pipes is provided with a first explosion-proof opening and a first cleaning opening facing downward, wherein the first explosion-proof opening is sealed by a first explosion-proof component, and the first explosion-proof component is configured to open automatically when the pressure in the vacuuming pipe reaches a corresponding value, or can be opened manually during cleaning; The communicating pipe is in communication with all the vacuuming pipes, one end of the gas collecting pipe is in communication with the communicating pipe, the other end of the gas collecting pipe is in communication with the vacuum pump, a second cleaning port is provided on the communicating pipe, at least one second explosion-proof port is provided on the gas collecting pipe, the second explosion-proof port is sealed by a second explosion-proof component, and the second explosion-proof component is configured to open automatically when the pressure in the gas collecting pipe reaches a corresponding value, or can be opened manually during cleaning; The first cleaning port and the second cleaning port are respectively provided with sealing members which can be opened or closed.

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