Feeding cylinder of single crystal furnace
By designing a single crystal furnace feeding barrel with slidable isolation components, the problems of long feeding process and high labor intensity are solved, and multiple feedings are added after a single loading are achieved, improving feeding efficiency.
Patent Information
- Application Number
- CN202420984760.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-08
- Publication Date
- 2025-03-25
- Estimated Expiration
- 2034-05-08
AI Technical Summary
In the production process of single crystal silicon rods, the use of feeding barrel re-loading process leads to high labor intensity and long re-loading process, and low working efficiency.
A single crystal furnace feeding barrel is designed, including a cylinder, a pull rod, a bottom cone and an isolation assembly. By providing a slidable isolation assembly on the pull rod, the receiving cavity is divided into multiple feeding areas, so that multiple feedings are achieved after a single loading.
The number of feeding barrels is reduced, the manual workload and the usage time of feeding process are reduced, and the feeding efficiency is improved.
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Figure CN222666092U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of single crystal silicon preparation, in particular to a single crystal furnace charging cylinder. Background Art
[0002] At present, in the production process of direct-pull single crystal silicon rods, in order to increase production capacity and control production costs, a feeding cylinder is usually used to re-feed polysilicon raw materials into the quartz crucible in the single crystal furnace. The feeding cylinder is used to add materials multiple times to fill the quartz crucible with silicon materials, and then single crystal silicon rods are pulled to achieve the effect of pulling multiple single crystal silicon rods in one furnace.
[0003] As the heat field increases, the charging amount and re-feeding amount of the single crystal furnace increase. Therefore, in the process of using the re-feeding tube, the number of re-feeding tubes also increases, which greatly increases the labor intensity and the re-feeding process time, and the work efficiency is low. Utility Model Content
[0004] In view of this, the utility model provides a single crystal furnace charging barrel to solve the problems of high labor intensity and long re-charging process time.
[0005] In order to solve the above technical problems, the utility model adopts the following technical solutions:
[0006] The utility model provides a single crystal furnace charging cylinder, comprising:
[0007] The cylinder comprises a first port and a second port opposite to each other, and a receiving cavity for receiving silicon material is provided inside the cylinder and passes through the first port and the second port;
[0008] A lifting rod, the first end of which extends into the accommodating cavity and is slidably arranged along the axial direction of the cylinder;
[0009] A bottom cone is connected to the end of the first end of the lifting rod and is used to block or leave the first port of the cylinder to control the silicon material from falling from the containing chamber;
[0010] The isolation assembly includes at least one isolation member, which is slidably connected to the lifting rod and is used to divide the accommodating cavity into at least two feeding areas for loading silicon materials.
[0011] In one embodiment of the utility model, the isolation assembly includes two isolation members. When loading, the two isolation members and the bottom cone are arranged at intervals to divide the accommodating chamber into three feeding areas.
[0012] In one embodiment of the utility model, the isolating member is an isolating cone, a through hole is provided on the central axis of the isolating cone, and the maximum cross-sectional area of the vertical axis of the isolating cone is less than or equal to the cross-sectional area of the vertical axis of the feeding zone.
[0013] In one embodiment of the present invention, the tip of the cone of the isolation cone faces the second end of the lifting rod.
[0014] In one embodiment of the present invention, the diameter change rate of the isolation cone remains equal or gradually increases from the tip of the cone to the other end of the cone.
[0015] In one embodiment of the utility model, a support ring is provided on the outside of the cylinder, and the support ring surrounds and is fixed on the outer circumference of the cylinder.
[0016] In one embodiment of the present invention, there are multiple support rings, the multiple support rings are spaced apart along the axial direction of the cylinder, and the multiple support rings are fixedly connected by fasteners.
[0017] In one embodiment of the present invention, the second end of the lifting rod is located outside the second end of the cylinder and is formed with a handle for lifting the lifting rod.
[0018] In one embodiment of the present invention, a crossbeam is provided at the second port of the cylinder, the crossbeam spans across two sides of the second port, and the second end of the lifting rod passes through the crossbeam.
[0019] In one embodiment of the present invention, the isolation cone and the bottom cone are quartz structural parts.
[0020] The above technical solution of the utility model has at least the following beneficial effects:
[0021] The single crystal furnace charging barrel of the utility model embodiment realizes the partitioning of the receiving chamber in the charging barrel during charging by setting a slidable isolation component on the lifting rod, and can realize multiple charging into the quartz crucible during one charging process. Compared with the traditional charging barrel, which needs to increase the number of re-charging charging barrels during the charging process, the utility model can charge the quartz crucible multiple times after a single charging, reducing the number of charging barrels, which is conducive to reducing the manual workload and the use time of the charging process, and improving the charging efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] Figure 1 This is a schematic structural diagram of a single crystal furnace charging barrel according to an embodiment of the utility model;
[0023] Figure 2 A cross-sectional view of a single crystal furnace charging barrel according to an embodiment of the utility model Figure 1 ;
[0024] Figure 3 A cross-sectional view of a single crystal furnace charging barrel according to an embodiment of the utility model Figure 2 ;
[0025] Figure 4 This is a schematic structural diagram of a first isolation cone according to an embodiment of the utility model;
[0026] Figure 5 A schematic diagram of the structure of a single crystal furnace charging barrel when charging a material according to an embodiment of the utility model Figure 1 ;
[0027] Figure 6 A schematic diagram of the structure of a single crystal furnace charging barrel when charging a material according to an embodiment of the utility model Figure 2 .
[0028] Reference numerals:
[0029] 100. Single crystal furnace charging cylinder; 10. Cylinder body; 11. Support ring; 12. Crossbeam; 13. Accommodating chamber; 20. Lifting rod; 30. Bottom cone; 40. Isolation assembly; 41. First isolation cone; 42. Second isolation cone. DETAILED DESCRIPTION
[0030] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution of the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the described embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the utility model.
[0031] In order to facilitate the understanding of the single crystal furnace charging barrel of the embodiment of the utility model, the technical problem to be solved by the utility model is first described below.
[0032] In some embodiments, the single crystal furnace charging barrel needs to be divided into multiple barrels for charging during the charging process. When adding the first few barrels of silicon material, since there is less silicon material in the quartz crucible, the barrel can be filled with normal charging during charging. However, it is found during the charging process that with the addition of each barrel of silicon material, the silicon material in the quartz crucible gradually increases, and the remaining space in the quartz crucible gradually decreases. When adding the next few barrels of silicon material, the barrel charging amount needs to be gradually reduced, otherwise during charging, the silicon liquid will overflow due to oscillation, or the material blocks will accumulate too high and roll down to the outside of the quartz crucible, causing an accident. In addition, when using a conventional charging barrel, during the charging process, it is forbidden to lift the lifting rod when the bottom cone and the lower edge of the barrel body are separated and charged, otherwise it is easy to get stuck and cause the barrel to break. This means that each time you add material, you can only push the bottom cone open once and add the silicon material to the quartz pot at one time. Therefore, when adding the next few barrels of material, in order to avoid silicon overflow and excessive accumulation of material blocks, the barrel cannot be filled up, so the same weight of silicon material needs to be added in multiple barrels. Therefore, during the entire feeding process, the number of barrels increases, and the time for loading and installing barrels back and forth increases, which not only wastes time, but also wastes manpower.
[0033] Take the maximum single loading amount of the feeding barrel as 110kg and the total weight of the added silicon material as 500kg as an example for explanation. The number of multiple feeding barrels and the weight of the loaded silicon material in the prior art are shown in Table 1 below.
[0034] Table 1 Number of re-feeding barrels and weight distribution of silicon materials in the prior art
[0035]
[0036]
[0037] As shown in Table 1, during the charging process, when the 1st and 2nd barrels are loaded, there is no silicon material or less silicon material in the quartz crucible, and the charging barrel can be normally filled with silicon material. After the 2nd barrel is loaded, there are already 220kg of silicon material in the quartz crucible, and the remaining space in the quartz crucible is gradually decreasing. Therefore, when the 3rd to 7th barrels are added, the amount of material added by the charging barrel is gradually reduced, so that to complete the entire charging process, the number of barrels that need to be charged is as many as 7 barrels, and the charging process has a large workload and a long charging time. In order to solve the above technical problems, the utility model proposes a single crystal furnace charging barrel, which can change the structure of the charging barrel so that a barrel of material can be filled when charging later, and multiple charging can be achieved, thereby reducing the time-consuming and labor-intensive problem of charging back and forth.
[0038] A single crystal furnace charging barrel according to an embodiment of the utility model is described in detail below with reference to the accompanying drawings.
[0039] refer to Figure 1 and Figure 2 , Figure 1 A schematic structural diagram of a single crystal furnace charging barrel 100 according to an embodiment of the utility model is shown. Figure 2 A cross-sectional view of a single crystal furnace charging barrel 100 according to an embodiment of the present invention is shown. Figure 1 .like Figure 1 and Figure 2 As shown, the single crystal furnace charging barrel 100 includes a barrel body 10 , a lifting rod 20 , a bottom cone 30 and an isolation assembly 40 .
[0040] The cylinder 10 includes a first port and a second port that are arranged opposite to each other, and a receiving cavity 13 for receiving silicon material is provided inside the cylinder 10 and passes through the first port and the second port. The first end of the lifting rod 20 extends into the receiving cavity 13 and is slidably arranged along the axial direction of the cylinder 10. The bottom cone 30 is connected to the end of the first end of the lifting rod 20 (such as Figure 2 The bottom of the middle cylinder 10 is connected, and the lifting rod is upward (such as Figure 2When the lifting rod 20 is pulled up, the bottom cone 30 is used to block the bottom of the cylinder 10. When the lifting rod 20 is downward, the bottom cone 30 leaves the bottom of the cylinder 10, so that the bottom port of the cylinder is opened to control the silicon material to fall from the accommodating chamber 13 into the quartz crucible. The isolation assembly 40 includes at least one isolation member, which is slidably connected to the lifting rod 20 and is used to divide the accommodating chamber 13 into at least two feeding areas for loading silicon materials. Specifically, the space between the lowest isolation member and the bottom of the cylinder 10, the space between multiple isolation members, and the space between the uppermost isolation member and the top of the cylinder 10 respectively form independent feeding areas, and the silicon materials in the multiple feeding areas are independently added to the quartz crucible at one time in a bottom-up order. For example, when the bottom cone 30 leaves the bottom of the cylinder 10, the silicon material in the feeding area between the lowest isolating piece and the bottom of the cylinder 10 falls into the quartz crucible. As the silicon material in the feeding area decreases, the other upper isolating pieces and the silicon material in other feeding areas all move downward under the action of gravity. When the lowest isolating piece moves downward to be flush with the bottom of the cylinder 10, all the silicon material in the feeding area is added into the quartz crucible. At this time, the lifting rod 20 is controlled to seal the lowest isolating piece to the bottom of the cylinder 10, and the feeding of the silicon material in the upper feeding area is suspended. When it is necessary to feed again, the lifting rod 20 is controlled to move downward to make the lowest isolating piece leave the bottom of the cylinder 10, and the silicon material in the next feeding area is continued to be added into the quartz crucible.
[0041] In the embodiments of the present invention, Figure 1 and Figure 2 As shown, the cylinder 10 can be understood as a hollow cylindrical structure, and the lifting rod 20 can slide up and down in the accommodating chamber 13 of the cylinder 10. When the lifting rod 20 moves upward, the bottom cone 30 connected to the bottom end of the lifting rod 20 blocks the bottom of the cylinder 10, and the operator can add material into the cylinder 10. The bottom cone 30 blocks the bottom of the cylinder 10 to prevent the silicon material from being exposed. When the lifting rod 20 moves downward, the bottom cone 30 leaves the bottom of the cylinder 10, and a gap is formed between the bottom cone 30 and the bottom of the cylinder 10. The silicon material in the cylinder 10 falls from the inside of the cylinder 10 through the gap into the quartz crucible, and the feeding is completed.
[0042] The following describes the feeding process of the feeding barrel of the embodiment of the utility model by taking the single barrel volume and the feeding weight set in Table 1 as an example.
[0043] The maximum single loading amount of the above-mentioned charging barrel is 110kg, the total weight of the added silicon material is 500kg, and the charging barrel of the single crystal furnace of the utility model is provided with a spacer (such as Figure 2 Taking the isolation assembly 40 in the figure as an example, the number of re-feeding barrels and the weight of silicon material in the feeding barrel are shown in Table 2 below.
[0044] Table 2 The number of re-feeding barrels and the weight distribution of silicon materials in the feeding barrel of the embodiment of the utility model
[0045]
[0046]
[0047] As shown in Table 2, the number of barrels required for the entire feeding process is 6 barrels. When loading the 1st to 4th barrels, the loading and feeding process of the feeding barrel is consistent with the prior art. When the feeding barrel of the utility model adds the 5th barrel material, the operator first lifts the lifting rod 20 so that the bottom cone 30 connected to the bottom end of the lifting rod 20 blocks the bottom of the barrel body 10, and after loading 50kg of silicon material of the 5th barrel (hereinafter referred to as the original 5th barrel) in Table 1 into the barrel body 10, the 50kg silicon material of the original 5th barrel is the feeding amount of the first feeding area, the operator continues to load the isolation piece into the barrel body 10, and loads 40kg of silicon material of the 6th barrel (hereinafter referred to as the original 6th barrel) in Table 1 into the barrel body 10, and the 40kg silicon material of the original 6th barrel is the feeding amount of the second feeding area, completing the 5th loading. At this time, the loading amount in the feeding barrel is 90kg, which does not exceed the maximum single loading amount of the feeding barrel of 110kg.
[0048] When the right time for feeding arrives, the operator lowers the lifting rod 20 to separate the bottom end of the bottom cone 30 from the bottom lower edge of the barrel 10, and the 50kg silicon material in the first feeding area falls from the inside of the barrel 10 into the quartz crucible. After adding 50kg, lift the lifting rod 20 so that the bottom cone 30 and the bottom end of the barrel 10 are closed to stop feeding, and the fifth feeding is completed. At this time, the isolation piece slides to the top of the bottom cone 30. When the right time for feeding arrives, lower the lifting rod 20 so that the bottom cone 30 and the isolation piece are separated from the bottom lower edge of the barrel 10, and the 40kg silicon material in the second feeding area falls from the inside of the barrel 10 into the quartz crucible. After adding 40kg, lift the lifting rod 20 so that the bottom cone 30 and the bottom end of the barrel 10 are closed to stop feeding, and the sixth feeding is completed. Compared with the prior art that requires adding 7 barrels of material, one barrel is reduced.
[0049] In the embodiment of the utility model, by setting a spacer, it is possible to add materials into the quartz crucible twice after one loading. By controlling the sliding of the isolation assembly 40 connected to the lifting rod 20 above the bottom cone 30, the accommodating chamber 13 is partitioned and multiple loadings are made after a single loading. Compared with the prior art, in which the number of re-feeding feeding barrels needs to be increased during the feeding process, the utility model can add materials multiple times after a single loading, reducing the number of feeding barrels, which is conducive to reducing the manual workload and the use time of the feeding process, and improving the feeding efficiency.
[0050] In one embodiment of the present invention, more isolation members may be provided to further improve the efficiency of feeding.
[0051] refer to Figure 3 , Figure 3A cross-sectional view of a single crystal furnace charging barrel 100 according to an embodiment of the present invention is shown. Figure 2 .like Figure 3 As shown, the isolation assembly 40 includes two isolation members. When loading, the two isolation members and the bottom cone 30 are arranged at intervals to divide the accommodating chamber 13 into three feeding areas, thereby realizing three feedings into the quartz crucible.
[0052] The maximum single loading amount of the above-mentioned feeding barrel is 110kg, and the total weight of the added silicon material is 500kg. When the isolation assembly 40 includes two isolation components, the number of repeated feeding barrels and the weight of the loaded silicon material are shown in Table 3 below.
[0053] Table 3: The number of re-feeding barrels and the weight distribution of silicon materials in another embodiment of the utility model
[0054]
[0055] like Figure 3 As shown, the number of barrels required to be charged to complete the entire charging process is 5 barrels. When the 1st to 4th barrels are loaded, the charging and charging process of the charging barrel are consistent with the prior art. The loading and feeding operations of the 5th to 7th barrels in the original Table 1 can be combined into the 5th barrel. The specific operations are: the operator first lifts the lifting rod 20 so that the bottom cone 30 connected to the bottom end of the lifting rod 20 blocks the bottom of the barrel 10, and then loads 50 kg of silicon material from the original 5th barrel into the barrel 10. The 50 kg of silicon material from the original 5th barrel is the feeding amount of the first feeding area. The operator loads the first isolation piece into the barrel 10, and loads 40 kg of silicon material from the original 6th barrel into the barrel 10. The 40 kg of silicon material from the original 6th barrel is the feeding amount of the second feeding area. The operator loads the second isolation piece into the barrel 10, and loads 20 kg of silicon material from the 7th barrel in Table 1 (hereinafter referred to as the original 7th barrel) into the barrel 10. The 20 kg of silicon material from the original 7th barrel is the feeding amount of the third feeding area, completing the 5th loading. At this time, the loading amount in the feeding barrel is 110kg, which does not exceed the maximum single loading amount of the feeding barrel of 110kg.
[0056] When the right time for feeding arrives, the operator lowers the lifting rod 20 to separate the bottom end of the bottom cone 30 from the bottom lower edge of the cylinder 10, and the 50kg silicon material in the first feeding area falls from the inside of the cylinder 10 into the quartz crucible. After adding 50kg, lift the lifting rod 20 so that the bottom cone 30 and the bottom end of the cylinder 10 are closed to stop feeding, and the fifth feeding is completed. At this time, the first isolation piece slides above the bottom cone 30. When the right time for feeding arrives, lower the lifting rod 20 so that the bottom cone 30 and the first isolation piece are separated from the bottom lower edge of the cylinder 10, and the 40kg silicon material in the second feeding area falls from the inside of the cylinder 10 into the quartz crucible. After adding 40kg, lift the lifting rod 20 so that the bottom cone 30 and the bottom end of the cylinder 10 are closed to stop feeding, and the sixth feeding is completed. At this time, the second isolation piece slides above the first isolation piece, and both isolation pieces are located above the bottom cone 30. When the appropriate time for feeding is reached, the lifting rod 20 is lowered to separate the bottom cone 30, the first isolation piece and the second isolation piece from the bottom edge of the cylinder 10, and the 20 kg of silicon material in the third feeding area falls from the inside of the cylinder 10 into the quartz crucible. After adding 20 kg, the lifting rod 20 is lifted to close the bottom end of the bottom cone 30 and the cylinder 10 to stop feeding, thus completing the seventh feeding.
[0057] In the embodiment of the utility model, two isolation pieces are provided to realize partitioning of the accommodating chamber of the feeding barrel and three feedings after a single loading, which reduces two barrels of material compared with the prior art. Compared with the solution in Table 1, the volume of the barrel can be utilized to the maximum extent, further improving the feeding efficiency.
[0058] In addition, in other embodiments of the present invention, the isolation assembly 40 may include three isolation members to divide the accommodating chamber 13 into four feeding areas when feeding. The present invention does not impose a sole limitation on the number of isolation members and the number of feeding areas.
[0059] Combination Figure 4 , and refer to Figure 5 and Figure 6 , Figure 4 The schematic diagram of the structure of the first isolation cone 41 of one embodiment of the utility model is shown. Figure 5 The schematic diagram of the structure of the charging barrel of a single crystal furnace of an embodiment of the utility model is shown. Figure 1 . Figure 6 The schematic diagram of the structure of the charging barrel of a single crystal furnace of an embodiment of the utility model is shown. Figure 2 .like Figure 4 and Figure 5As shown, the isolating member is an isolating cone, and a through hole penetrating the isolating cone is provided on the central axis of the isolating cone, through which the lifting rod passes, so that the isolating cone can slide up and down along the lifting rod. The isolating assembly 40 includes a first isolating cone 41 and a second isolating cone 42. The maximum cross-sectional area of the vertical axis of the isolating cone is less than or equal to the cross-sectional area of the vertical axis of the feeding zone, that is, there may be no gap between the bottom of the isolating cone and the inside of the cylinder, or there may be a smaller gap. Since most of the silicon materials in the accommodating chamber 13 are irregular blocks, the size of the silicon materials is larger than the gap between the bottom of the isolating cone and the inside of the cylinder, and there are also gaps between the silicon materials, which can ensure that the silicon materials are located in their respective independent feeding zones, making it convenient to add materials to the quartz crucible multiple times.
[0060] In one embodiment of the present invention, Figure 1 and Figure 3 As shown, the tip of the cone of the isolation cone faces the second end of the lifting rod 20 (as shown in FIG. Figure 2 The cone tips of the first isolation cone 41 and the second isolation cone 42 face upwards of the cylinder 10, and the cone bodies of the isolation cones have an inclined slope in the axial direction of the cylinder 10. When adding materials, the silicon material in the adding area can fall from the bottom of the cylinder 10 through the slope of the side of the isolation cone.
[0061] In one embodiment of the present invention, Figure 3 As shown, the diameter change rate of the isolation cone remains equal or gradually increases from the tip of the cone to the other end of the cone. That is to say, the cross-section of the isolation cone in the axial direction can be a frustum or a trumpet. The side cross-section of the first isolation cone 41 and the second isolation cone 42 is a frustum. When the cross-section of the isolation cone is a trumpet (not shown), the outer side wall of the isolation cone can prevent fine impurities in the feeding area from falling into the quartz crucible, which is conducive to further improving the purity of the pulled single crystal.
[0062] In one embodiment of the present invention, Figure 1 As shown, a support ring 11 is provided outside the cylinder 10, and the support ring 11 surrounds and is fixed on the outer periphery of the cylinder 10. The support ring 11 is sleeved on the outer periphery of the cylinder 10 to slow down the shaking of the cylinder 10 during the single crystal pulling process, thereby supporting the feeding cylinder.
[0063] In one embodiment of the present invention, Figure 1 As shown, there are multiple support rings 11, and the multiple support rings 11 are arranged at intervals along the axial direction of the cylinder 10, and the multiple support rings 11 are fixedly connected by fasteners, which is beneficial to further support the feeding cylinder.
[0064] In one embodiment of the present invention, Figure 1As shown, the second end of the lifting rod 20 is located outside the second end of the barrel 10, and is formed with a handle (not shown) for lifting the lifting rod 20. The handle is provided to facilitate the operator to lift the lifting bar up and down.
[0065] In one embodiment of the present invention, Figure 1 As shown, a crossbeam 12 is provided at the second end of the barrel 10, the crossbeam 12 spans across the two sides of the second end, and the second end of the lifting rod 20 passes through the crossbeam 12. The provision of the crossbeam 12 is conducive to the stability of the feeding barrel during the charging and feeding process.
[0066] In one embodiment of the present invention, Figure 3 As shown, the first isolation cone 41, the second isolation cone 42 and the bottom cone 30 are quartz structural parts, which is beneficial to prolong the service life of the isolation cone and the bottom cone 30.
[0067] The working principle of the single crystal furnace charging barrel 100 according to the embodiment of the utility model will be described below in combination with its structure.
[0068] The accommodating chamber 13 of the feeding barrel can accommodate up to 110 kg of silicon material. When the remaining space in the quartz crucible gradually decreases, the amount of material added to each barrel also gradually decreases, and the subsequent loading and feeding operations of the 5th to 7th barrels can be combined into the 5th barrel for loading and feeding. The specific operation is: first, 50 kg of silicon material is loaded as the feeding amount of the first feeding area, and then loaded into the first isolation cone 41; secondly, 40 kg of silicon material is loaded as the feeding amount of the second feeding area, and then loaded into the second isolation cone 42; finally, 20 kg of silicon material is loaded as the feeding amount of the third feeding area to complete the loading operation.
[0069] When adding 110kg of silicon material to the fifth cylinder: First, lower the lifting rod 20 to separate the bottom cone 30 from the lower edge of the bottom end of the cylinder 10, and the 50kg of silicon material in the first feeding area falls and is added to the quartz crucible. After adding 50kg of silicon material, lift the lifting rod 20 to close the bottom cone 30 and the lower edge of the cylinder 10 to stop feeding, and the first isolation cone 41 slides over the bottom cone 30. When the right time for feeding is reached, continue to lower the lifting rod 20 to separate the bottom cone 30 and the first isolation cone 41 from the lower edge of the cylinder 10, so that the 40kg of silicon material in the second feeding area falls and is added to the quartz crucible. After adding 40kg of silicon material, lift the lifting rod 20 to close the bottom cone 30 and the lower edge of the cylinder 10 to stop feeding, and the second isolation cone 42 and the first isolation cone 41 both slide over the bottom cone 30. Finally, when the appropriate time for feeding is reached, the lifting rod 20 is further lowered to separate the bottom cone 30, the first isolation cone 41 and the second isolation cone 42 from the lower edge of the cylinder 10, so that the 20 kg silicon material in the third feeding area falls and is added to the quartz crucible, thereby realizing single-zone loading and multiple feeding of the feeding cylinder.
[0070] In summary, the single crystal furnace feeding barrel 100 of the utility model is equipped with an isolation assembly 40 on the lifting rod 20 to achieve the partitioning of the accommodating chamber 13 in the feeding barrel during loading. Multiple feedings can be performed after a single loading, thereby reducing the number of feeding barrels, which is beneficial to reducing the manual workload and the use time of the feeding process, and improving the feeding efficiency.
[0071] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the usual meanings understood by persons with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "one" do not indicate quantity restrictions, but indicate the existence of at least one. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship also changes accordingly.
[0072] The above are preferred implementations of the present utility model. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present utility model. These improvements and modifications should also be regarded as the protection scope of the present utility model.
Claims
1. A single crystal furnace charging barrel, characterized in that: include: A cylinder, comprising a first port and a second port opposite to each other, wherein a receiving cavity for receiving silicon material is provided inside the cylinder and passes through the first port and the second port; A lifting rod, the first end of which extends into the accommodating cavity and is slidably arranged along the axial direction of the cylinder; A bottom cone connected to the end of the first end of the lifting rod, used to block or leave the first port of the cylinder to control the silicon material from falling from the containing cavity; The isolation assembly includes at least one isolation member, which is slidably connected to the lifting rod and is used to divide the accommodating cavity into at least two feeding areas for loading the silicon material.
2. The single crystal furnace charging barrel according to claim 1, characterized in that: The isolation assembly includes two isolation members. When loading, the two isolation members and the bottom cone are arranged at intervals to divide the accommodating chamber into three feeding areas.
3. The single crystal furnace charging barrel according to claim 1 or 2, characterized in that: The isolating member is an isolating cone, a through hole is arranged on the central axis of the isolating cone, and the maximum cross-sectional area of the vertical axis of the isolating cone is less than or equal to the cross-sectional area of the vertical axis of the feeding zone.
4. The single crystal furnace charging barrel according to claim 3, characterized in that: The tip of the cone of the isolation cone faces the second end of the lifting rod.
5. The single crystal furnace charging barrel according to claim 4, characterized in that: The diameter change rate of the isolation cone remains equal or gradually increases from the tip of the cone to the other end of the cone.
6. The single crystal furnace charging barrel according to claim 1, characterized in that: A support ring is provided on the outside of the cylinder, and the support ring surrounds and is fixed on the outer circumference of the cylinder.
7. The single crystal furnace charging barrel according to claim 6, characterized in that: There are a plurality of support rings, which are spaced apart along the axial direction of the cylinder and fixedly connected by fasteners.
8. The single crystal furnace charging barrel according to claim 1, characterized in that: The second end of the lifting rod is located outside the second end of the barrel and is formed with a handle for lifting the lifting rod.
9. The single crystal furnace charging barrel according to claim 1, characterized in that: A crossbeam is provided at the second port of the cylinder, the crossbeam spans across two sides of the second port, and the second end of the lifting rod passes through the crossbeam.
10. The single crystal furnace charging barrel according to claim 3, characterized in that: The isolation cone and the bottom cone are quartz structural parts.