Heating assembly

Abstract

The utility model relates to the technical field of heating elements, in particular to a heating element, which is used for generic semiconductor equipment and comprises an electric heating tube assembly with a heating channel, connector elements positioned at two ends of the electric heating tube assembly and a shell mounted between the two connector elements. The shell comprises a plurality of outer plate bodies, the outer plate bodies are arranged in a surrounding mode, and the two ends of the outer plate bodies are fixed to the two connector pieces respectively. The shell of the device is defined by the multiple flat-plate-shaped independently-arranged outer plate bodies, the whole shell is of a polygonal structure, the two ends of each outer plate body are fixedly installed with the connector pieces respectively, the shell is formed by the multiple flat-plate-shaped outer plate bodies, and the outer plate bodies do not need to be formed in a stretching mode; therefore, the manufacturing difficulty, the manufacturing cost and the installation difficulty of the shell in the large-size heating assembly are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of heating elements, in particular to a heating component. Background Art

[0002] Fluid heating equipment can be used in the semiconductor, photovoltaic solar energy, display panels, testing equipment, micro-chemical and other industries, such as wet cleaning equipment in semiconductor processes. Fluid heating equipment can be applied to multiple links, such as etching and degumming, ultrapure water cleaning, etc. These all require heating of acid and alkali liquids, chemical liquids, pure water or ultrapure water. By increasing the temperature of the cleaning liquid, the cleaning effect is improved and the cleaning speed is accelerated.

[0003] In the prior art, the heating equipment applied to the above-mentioned fields needs to protect the components such as the electric heating tube inside by the outer shell. The traditional outer shell is prepared by methods such as substrate stretching. Since the heating equipment is relatively large in size, the preparation of the outer shell is relatively difficult and the manufacturing cost is also relatively high. Utility Model Content

[0004] The utility model aims to solve the problems pointed out in the background technology and proposes a heating component.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A heating assembly for use in pan-semiconductor equipment comprises an electric heating tube assembly having a heating channel, joint pieces located at both ends of the electric heating tube assembly, and a shell installed between the two joint pieces, wherein the joint piece has a fluid channel connected to the heating channel, and the shell comprises a plurality of outer plates, wherein the plurality of outer plates are arranged in a surrounding manner, and the two ends of the outer plates are respectively fixed to two of the joint pieces.

[0007] The electric heating tube assembly includes a first electric heating tube body, which is connected to the fluid channel. The side of the connector close to the first electric heating tube body has a first installation groove, and both ends of the first electric heating tube body are respectively sealed and installed in the first installation grooves of the two connectors.

[0008] An inner tube body is provided within the first electric heating tube body, a fluid gap is left between the outer wall of the inner tube body and the inner wall of the first electric heating tube body, support heads are sealed and installed at both ends of the inner tube body, the joint piece is provided with a step portion on the inner circumference of the first installation groove, the support head part abuts against the step portion, the support head is provided with a connecting seam, and the fluid channel is connected with the fluid gap through the connecting seam.

[0009] The support head includes a base, one end of which is provided with a slot portion, and the end of the inner tube body is sealed and installed in the slot portion, and the other end of the base has a plurality of ribs distributed in an annular manner and arranged along the axial direction of the inner tube body, and the connecting seam is formed between adjacent ribs, and the ribs have a first step portion and a second step portion, the end of the first step portion abuts against the step portion, and the outer side surface of the second step portion abuts against the wall of the fluid channel.

[0010] An inner shell is provided between the outer circumference of the first electric heating tube body and the inner circumference of the outer plate body, and the inner shell includes a plurality of inner plates, which are arranged in a surrounding manner. The side of the joint member close to the inner shell has a plurality of protruding second planar portions, and the shape formed by the plurality of second planar portions matches the shape of the inner shell, and the end of the inner plate body is fixed to the second planar portion.

[0011] The connector has a first mounting ring rib and a second mounting ring rib, the first mounting ring rib and the second mounting ring rib are both located within the range enclosed by the second planar portion, the second mounting ring rib is located within the range enclosed by the first mounting ring rib, the first mounting groove is located between the first mounting ring rib and the second mounting ring rib, and at least part of the support head is located within the range enclosed by the second mounting ring rib.

[0012] A plurality of the outer plates are connected to form a first polygonal cylindrical structure; or a plurality of the outer plates are connected to form a first cylindrical structure;

[0013] And / or a plurality of the inner plates are connected to form a second polygonal cylinder structure; or a plurality of the inner plates are connected to form a second cylindrical structure;

[0014] The electric heating tube assembly includes a plurality of second electric heating tube bodies arranged side by side, both ends of the second electric heating tube bodies are fixed to the joint piece, each of the second electric heating tube bodies is connected to the fluid channel, a plurality of through holes connected to the fluid channel are opened on a side of the joint piece close to the second electric heating tube body, a second mounting groove is provided on a side of the joint piece located on the through hole close to the second electric heating tube body, and both ends of the second electric heating tube body are respectively sealed and mounted in the second mounting grooves of the joint piece.

[0015] The connector includes a first component and a second component. The first component is provided with a third mounting groove, and the second component is provided with an annular protrusion. The annular protrusion is sealed and installed in the third mounting groove. The first component is provided with the fluid channel, and the second component is provided with the second mounting groove and the through hole. The second mounting groove and the through hole are located on the inner side of the annular protrusion.

[0016] The outer circumference of one end of the joint member close to the electric heating tube assembly has a plurality of first planar portions distributed in an annular shape, the shape formed by the plurality of first planar portions matches the shape of the shell, and the end of the outer plate body is fixed to the first planar portion.

[0017] The connector is located outside the first planar portion and is provided with a plurality of second through holes, the axes of the second through holes being arranged along the length direction of the electric heating tube assembly, a rod assembly being connected between the second through holes of the two connectors, and the rod assembly being able to clamp the electric heating tube assembly in the middle of the two connectors.

[0018] The electric heating tube assembly includes a tube substrate, a nano-electric heating film coated or sprayed on the surface of the tube substrate, and an electrode assembly electrically connected to the nano-electric heating film;

[0019] Or a mounting bracket is installed on the housing;

[0020] Or the connector is integrally formed with a threaded connection portion, a clamping connection portion, or a flange connection portion;

[0021] The outer plate body is an insulating plate;

[0022] The two ends of the outer plate are respectively fixed to the two connectors by welding or by screws.

[0023] A heating component proposed by the utility model has the beneficial effect that the outer shell of the device is surrounded by a plurality of independently arranged flat plate-shaped outer plates, the outer shell as a whole is a polygonal structure, and the two ends of the outer plate bodies are respectively fixedly installed with joint parts. Since the outer shell is formed by a plurality of flat plate-shaped outer plates, and the outer plate bodies do not need to be formed by stretching, the manufacturing difficulty, manufacturing cost and installation difficulty of the outer shell in a large-volume heating component are reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0025] Figure 2 The internal structure of the utility model is shown in FIG. Figure 1 ;

[0026] Figure 3 The internal structure of the utility model is shown in FIG. Figure 2 ;

[0027] Figure 4 It is a partial cross-sectional structural schematic diagram of the utility model;

[0028] Figure 5 This is a schematic diagram of the bottom structure of the connector of the utility model;

[0029] Figure 6It is a schematic diagram of the radial cross-sectional structure of the utility model;

[0030] Figure 7 This is a schematic diagram of the structure of multiple electric heating tubes of the utility model;

[0031] Figure 8 For the utility model Figure 7 Schematic diagram of partial cross-section structure of the middle joint

[0032] Fig. 9 It is a partial cross-sectional structural schematic diagram of the support head of the utility model;

[0033] Fig.10 This is a schematic diagram of the utility model in which the outer plate body is connected to form a four-sided cylindrical structure;

[0034] Fig.11 This is a schematic diagram of the outer plate body of the utility model being connected to form a cylindrical structure.

[0035] In the figure: connector 1, fluid channel 2, stepped portion 201, rod body assembly 3, shell 4, first plane portion 5, first mounting hole 6, outer plate body 7, inner shell body 8, inner plate body 9, electric heating pipe assembly 10, first electric heating pipe body 101, second electric heating pipe body 102, first through hole 11, fluid gap 12, inner tube body 13, second plane portion 14, first mounting groove 15, support head 16, connecting seam 161, first step portion 162, second step portion 163, base 164, slot portion 165, rib plate 166, outer side surface 1631, second mounting hole 17, second through hole 18, first component 19, second component 20, second mounting groove 21, through hole 22, annular protrusion 23, third mounting groove 24, mounting bracket 25, first mounting ring rib 151, and second mounting ring rib 152. DETAILED DESCRIPTION

[0036] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0037] Reference Figure 1-8 A heating assembly for a pan-semiconductor device includes an electric heating tube assembly 10 having a heating channel, joint pieces 1 located at both ends of the electric heating tube assembly 10, and a shell 4 installed between the two joint pieces 1, wherein the joint piece 1 has a fluid channel 2 connected to the heating channel, and the shell 4 includes a plurality of outer plates 7, which are arranged in a surrounding manner, and the two ends of the outer plates 7 are respectively fixed to the two joint pieces 1.

[0038] refer to Figure 1 , Figure 2When the device is in use, the fluid enters the heating channel of the electric heating tube assembly through the fluid channel of a joint piece, and flows out from the fluid channel of another joint piece after being heated by the electric heating tube assembly. The outer shell 4 of the device is surrounded by a plurality of flat-plate-shaped independently arranged outer plates 7. The outer shell as a whole has a polygonal structure, and the two ends of the outer plate 7 are respectively fixedly installed with the joint piece 1. Since the outer shell 4 is formed by a plurality of flat-plate-shaped outer plates 7, and the outer plate 7 does not need to be stretched, the manufacturing difficulty, manufacturing cost and installation difficulty of the outer shell 4 in a large-volume heating component are reduced.

[0039] The fluid in the device can be gas, liquid or a gas-liquid mixture.

[0040] It can be understood that pan-semiconductors include integrated circuits, flat panel displays, LEDs, solar cells, discrete devices, and semiconductor equipment and materials industries, which include semiconductors.

[0041] As an implementation method, refer to Figure 3 , Figure 4 The electric heating tube assembly 10 includes a first electric heating tube body 101, which is connected to the fluid channel 2. The connector 1 has a first mounting groove 15 on one side close to the first electric heating tube body 101. Both ends of the first electric heating tube body 101 are respectively sealed and installed in the first mounting grooves 15 of the two connectors 1. As an installation method, a sealing ring is embedded in the first mounting groove 15 so that the end of the first electric heating tube body 101 abuts against the sealing ring to achieve a sealed installation between the first electric heating tube body 101 and the connector 1.

[0042] refer to Figure 4 , Figure 5 , Figure 6 An inner tube body 13 is provided in the first electric heating tube body 101. For example, the first electric heating tube body 101 and the inner tube body 13 can be coaxially arranged to facilitate installation. A fluid gap 12 is left between the outer wall of the inner tube body 13 and the inner wall of the first electric heating tube body 101. Support heads 16 are respectively sealed and installed at both ends of the inner tube body 13. The joint member 1 is located on the inner circumference of the first installation groove 15 and is provided with a step portion 201. The support head 16 partially abuts against the step portion 201. The support head 16 is provided with a connecting slit 161. The fluid channel 2 is connected with the fluid gap 12 through the connecting slit 161. The inner tube body 13 is installed inside the first electric heating tube body 101. The fluid flows through the fluid channel at one end and then enters the fluid gap 12 after passing through the connecting slit 161. After the first electric heating tube body 101 heats the fluid inside the fluid gap 12, the fluid is discharged from the connecting slit 161 and the fluid channel at the other end. Since the heating channel is a dynamic cylindrical structure, the rapid heating effect of the fluid can be achieved.

[0043] refer to Fig. 9The support head 16 includes a base 164, one end of which is provided with a slot portion 165, the end of the inner tube body 13 is sealed and installed in the slot portion 165, the other end of the base 164 has a plurality of ribs 166 distributed in an annular manner and arranged along the axial direction of the inner tube body 13, a connecting seam 161 is formed between adjacent ribs 166, the ribs 166 have a first step portion 162 and a second step portion 163, the end of the first step portion 162 abuts against the step portion 201, and the outer side surface 1631 of the second step portion 163 abuts against the wall of the fluid channel 2. The support head is abutted against the connector in this way, the installation is simple and convenient, the guiding performance is good, and the support head is easy to form.

[0044] refer to Figure 4 , Figure 5 , Figure 6 An inner shell 8 is provided between the outer circumference of the first electric heating tube body 101 and the inner circumference of the outer plate body 7. The inner shell 8 includes a plurality of inner plates 9, which are arranged in a surrounding manner. The joint 1 has a plurality of protruding second planar portions 14 on one side close to the inner shell 8. The shape formed by the plurality of second planar portions 14 matches the shape of the inner shell. The end of the inner plate body 9 is fixed to the second planar portion 14. The inner shell 8 with a polygonal cylindrical structure is installed between the first electric heating tube body 101 and the outer shell to further play a protective role. In addition, the inner shell 8 with this structure is easy to manufacture and has low cost.

[0045] refer to Figure 4 , Figure 5 The connector has a first mounting ring rib 151 and a second mounting ring rib 152. The first mounting ring rib 151 and the second mounting ring rib 152 are both located within the range enclosed by the second planar portion 14. The second mounting ring rib 152 is located within the range enclosed by the first mounting ring rib 151. The first mounting groove 15 is located between the first mounting ring rib 151 and the second mounting ring rib 152. At least part of the support head 16 is located within the range enclosed by the second mounting ring rib 152. On the one hand, the molding method of the first mounting ring rib 151 and the second mounting ring rib 152 is relatively simple, and on the other hand, it is convenient for assembling the first electric heating pipe body 101.

[0046] As an embodiment of the housing, refer to Figure 1 , Fig.10 , a plurality of outer plates 7 are connected to form a first polygonal cylinder structure, such as a quadrilateral, pentagonal, hexagonal or other polygonal cylinder;

[0047] As another embodiment of the housing, refer to Fig.11 , a plurality of outer plates 7 are connected to form a first cylindrical structure;

[0048] As an embodiment of the inner shell, refer to Figure 2 , a plurality of inner plates 9 are connected to form a second polygonal cylinder structure;

[0049] As an implementation method of the inner shell, a plurality of inner plates 9 are connected to form a second cylindrical structure.

[0050] As another embodiment, refer to Figure 7 , Figure 8 The electric heating tube assembly 10 includes a plurality of second electric heating tube bodies 102 arranged side by side. Both ends of the second electric heating tube bodies 102 are fixedly assembled with the joint member 1. Each second electric heating tube body 102 is connected with the fluid channel 2. The fluid enters the plurality of second electric heating tube bodies 102 through the fluid channel 2 of one joint member 1, and is discharged from the fluid channel 2 of another joint member 1 through the plurality of second electric heating tube bodies 102. The device heats the fluid by connecting a plurality of second electric heating tube bodies 102 with small diameters in parallel, and the heating efficiency is higher.

[0051] refer to Figure 8 A plurality of through holes 22 connected to the fluid channel 2 are provided on one side of the connector 1 close to the second electric heating tube body 102. A second mounting groove 21 is provided on the side of the connector 1 close to the second electric heating tube body 102. Both ends of the second electric heating tube body 102 are respectively sealed and installed in the second mounting grooves 21 of the connector 1. Each second electric heating tube body 102 is correspondingly installed in the second mounting grooves 21 of two connectors 1. Preferably, a sealing ring is arranged in the second mounting groove 21 so that the end of the second electric heating tube body 102 abuts against the sealing ring.

[0052] refer to Figure 8 The connector 1 includes a first component 19 and a second component 20. The first component 19 is provided with a third mounting groove 24, and the second component 20 is provided with an annular protrusion 23. The annular protrusion 23 is sealed and installed in the third mounting groove 24. The first component 19 is provided with a fluid channel 2, and the second component 20 is provided with a second mounting groove 21 and a through hole 22. The second mounting groove 21 and the through hole 22 are located on the inner side of the annular protrusion 23. The connector 1 of the device adopts a split structure of the first component 19 and the second component 20, which reduces the manufacturing difficulty of the connector 1 and is also relatively simple to assemble.

[0053] As a way of installing the shell 4, the outer circumference of one end of the connector 1 close to the electric heating tube assembly 10 has a plurality of first planar portions 5 distributed in a ring shape, and the shape formed by the plurality of first planar portions 5 matches the shape of the shell. The end of the outer plate body 7 is fixedly installed with the first planar portion 5, and the first planar portion 5 forming a polygonal structure is provided on the connector 1, and a plurality of outer plate bodies 7 are respectively fixed on the corresponding first planar portions 5 to complete the fixing of the shell 4.

[0054] As an installation method, a plurality of first through holes 11 are opened at the end of the outer plate body 7, and a first mounting hole 6 is set on the first plane portion 5. The outer plate body 7 is placed against the first plane portions 5 of the upper and lower joint members 1, and then screws are passed through the first through holes 11 and fixed to the first mounting holes 6. The first mounting holes 6 can be fixed by tapping the screws, or the first mounting holes 6 can be tapped in advance.

[0055] As another installation method, the outer plate body 7 is placed against the first plane portion 5 and then a welding operation is performed.

[0056] In order to make the heating assembly better adapt to the high-pressure environment, the connector 1 is provided with a plurality of second through holes 18 located on the outside of the first planar portion 5. The axis of the second through holes 18 is arranged along the length direction of the electric heating tube assembly 10. A rod assembly 3 is connected between the second through holes 18 of the two connectors 1. The rod assembly 3 can enable the two connectors 1 to clamp the electric heating tube assembly 10 in the middle. The two connectors 1 are fastened together through the rod assembly 3. For example, a double-headed screw is arranged, and the two ends of the double-headed screw pass through the second through holes 18 of the two connectors 1, and then are locked by a nut to make the connector 1 and the electric heating tube assembly 10 more firmly abutted.

[0057] The electric heating tube assembly 10 of the device can adopt a nano electric heating tube, for example: the electric heating tube assembly 10 includes a tube substrate, a nano electric heating film coated or sprayed on the surface of the tube substrate, and an electrode assembly electrically connected to the nano electric heating film, and the nano electric heating film is heated by energizing the electrode assembly;

[0058] Alternatively, a mounting bracket 25 is mounted on the housing 4 to facilitate mounting the device on other equipment;

[0059] In order to facilitate the connection with external equipment, the connector 1 is integrally formed with a threaded connection part, a clamping connection part or a flange connection part;

[0060] The outer plate body 7 is an insulating plate, and the inner plate body can be an insulating plate to provide better protection.

[0061] The above is only a preferred specific implementation method of the utility model, but the protection scope of the utility model is not limited thereto. Any technical solution, concept, and design obtained by equivalent replacement or change based on the technical solution and utility model concept of the utility model by any technician familiar with the technical field within the technical scope disclosed by the utility model should be included in the protection scope of the utility model.

Claims

1. A heating component for use in a pan-semiconductor device, characterized in that: The invention comprises an electric heating tube assembly (10) having a heating channel, joint pieces (1) located at both ends of the electric heating tube assembly (10), and a housing (4) installed between the two joint pieces (1), wherein the joint piece (1) has a fluid channel (2) connected to the heating channel, and the housing (4) comprises a plurality of outer plates (7), wherein the plurality of outer plates (7) are arranged in a surrounding manner, and the two ends of the outer plates (7) are respectively fixed to the two joint pieces (1).

2. A heating assembly according to claim 1, characterized in that: The electric heating tube assembly (10) comprises a first electric heating tube body (101), the first electric heating tube body (101) being in communication with the fluid channel (2), the connector (1) having a first mounting groove (15) on one side close to the first electric heating tube body (101), and the two ends of the first electric heating tube body (101) being respectively sealed and mounted in the first mounting grooves (15) of the two connectors (1).

3. A heating assembly according to claim 2, characterized in that: An inner tube body (13) is arranged inside the first electric heating tube body (101), a fluid gap (12) is reserved between the outer wall of the inner tube body (13) and the inner wall of the first electric heating tube body (101), support heads (16) are respectively installed in a sealed manner at both ends of the inner tube body (13), a step portion (201) is arranged on the inner circumference of the first installation groove (15), a portion of the support head (16) abuts against the step portion (201), a connecting slit (161) is arranged on the support head (16), and the fluid channel (2) is connected to the fluid gap (12) through the connecting slit (161).

4. A heating assembly according to claim 3, characterized in that: The support head (16) comprises a base (164), one end of the base (164) is provided with a slot portion (165), the end of the inner tube body (13) is sealed and installed in the slot portion (165), the other end of the base (164) has a plurality of ribs (166) distributed in an annular manner and arranged along the axial direction of the inner tube body (13), the connecting seam (161) is formed between adjacent ribs (166), the ribs (166) have a first step portion (162) and a second step portion (163), the end of the first step portion (162) abuts against the step portion (201), and the outer side surface (1631) of the second step portion (163) abuts against the wall of the fluid channel (2).

5. A heating assembly according to claim 3 or 4, characterized in that: An inner shell (8) is provided between the outer circumference of the first electric heating tube body (101) and the inner circumference of the outer plate body (7), the inner shell (8) comprising a plurality of inner plates (9), the plurality of inner plates (9) being arranged in a surrounding manner, the joint member (1) having a plurality of protruding second planar portions (14) on one side close to the inner shell (8), the shape formed by the plurality of second planar portions (14) matching the shape of the inner shell (8), and the end of the inner plate body (9) being fixed to the second planar portion (14).

6. A heating assembly according to claim 5, characterized in that: The connector comprises a first mounting ring rib (151) and a second mounting ring rib (152); the first mounting ring rib (151) and the second mounting ring rib (152) are both located within a range enclosed by the second plane portion (14); the second mounting ring rib (152) is located within a range enclosed by the first mounting ring rib (151); the first mounting groove (15) is located between the first mounting ring rib (151) and the second mounting ring rib (152); and at least a portion of the support head (16) is located within a range enclosed by the second mounting ring rib (152).

7. A heating assembly according to claim 5, characterized in that: A plurality of the outer plates (7) are connected to form a first polygonal cylindrical structure; or a plurality of the outer plates (7) are connected to form a first cylindrical structure; And / or a plurality of the inner plates (9) are connected to form a second polygonal cylindrical structure; or a plurality of the inner plates (9) are connected to form a second cylindrical structure.

8. A heating assembly according to claim 1, characterized in that: The electric heating tube assembly (10) comprises a plurality of second electric heating tube bodies (102) arranged side by side, the two ends of the second electric heating tube bodies (102) being fixed to the joint member (1), each of the second electric heating tube bodies (102) being connected to the fluid channel (2), a plurality of through holes (22) connected to the fluid channel (2) being provided on a side of the joint member (1) close to the second electric heating tube bodies (102), a second mounting groove (21) being provided on a side of the joint member (1) close to the through hole (22) of the second electric heating tube body (102), and the two ends of the second electric heating tube body (102) being respectively sealed and mounted in the second mounting groove (21) of the joint member (1).

9. A heating assembly according to claim 8, characterized in that: The connector (1) comprises a first component (19) and a second component (20); the first component (19) is provided with a third mounting groove (24); the second component (20) is provided with an annular protrusion (23); the annular protrusion (23) is sealingly mounted in the third mounting groove (24); the first component (19) is provided with the fluid channel (2); the second component (20) is provided with the second mounting groove (21) and a through hole (22); the second mounting groove (21) and the through hole (22) are located on the inner side of the annular protrusion (23).

10. A heating assembly according to claim 1 or 2 or 3 or 4 or 6 or 7 or 8 or 9, characterized in that: The outer circumference of one end of the joint member (1) close to the electric heating tube assembly (10) has a plurality of first planar portions (5) distributed in an annular shape, the shape formed by the plurality of first planar portions (5) matches the shape of the outer shell (4), and the end of the outer plate body (7) is fixed to the first planar portion (5).

11. A heating assembly according to claim 10, characterized in that: The connector (1) is provided with a plurality of second through holes (18) located outside the first plane portion (5); the axes of the second through holes (18) are arranged along the length direction of the electric heating tube assembly (10); a rod assembly (3) is connected between the second through holes (18) of two connectors (1); and the rod assembly (3) can enable the two connectors (1) to clamp the electric heating tube assembly (10) in the middle.

12. A heating assembly according to claim 1 or 2 or 3 or 4 or 6 or 7 or 8 or 9 or 11, characterized in that: The electric heating tube assembly (10) comprises a tube substrate, a nano-electric heating film coated or sprayed on the surface of the tube substrate, and an electrode assembly electrically connected to the nano-electric heating film; Alternatively, a mounting bracket (25) is mounted on the housing (4); Alternatively, the connector (1) is integrally formed with a threaded connection portion, a clamping connection portion, or a flange connection portion; The outer plate body (7) is an insulating plate; The two ends of the outer plate body (7) are respectively fixed to the two connectors (1) by welding or by screws.

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