Furnace door opening and closing device and reaction furnace

Abstract

The utility model relates to the technical field of semiconductor manufacturing, in particular to a furnace door opening and closing device and a reaction furnace, and solves the problem that the residual available space outside the reaction furnace is limited due to the fact that the related furnace door opening and closing device is complex in structure and large in occupied space. The furnace door opening and closing device comprises a supporting plate, at least two transmission wheels and a winding piece, the supporting plate is connected with a furnace body, the supporting plate is provided with a receding opening, the receding opening is configured to expose a furnace opening, the at least two transmission wheels are rotatably connected with the supporting plate, the at least two transmission wheels are arranged around the receding opening, and the winding piece is wound on the at least two transmission wheels. And the winding piece is configured to move around the avoiding opening under the guide of the transmission wheel and is connected with the furnace door, and the furnace door is driven by the winding piece to cover or expose the avoiding opening. The furnace door opening and closing device drives the furnace door to open and close through the winding piece, the structure is simple, the occupied space is small, and more available space can be left outside the reaction furnace.

Description

Technical Field

[0001] The present disclosure relates to the technical field of semiconductor manufacturing, and in particular to a furnace door opening and closing device and a reaction furnace. Background Art

[0002] When processing semiconductor products, it is usually necessary to place the semiconductor products in a specific reactor and process them under specific environmental conditions. At present, the industry usually uses boats to load or move semiconductor products. Before processing, it is usually necessary to open the furnace door first, let the boat loaded with the semiconductor products to be processed enter the furnace tube of the reactor, and then close the furnace door. At present, the industry usually uses furnace door opening and closing devices to open and close the furnace door.

[0003] The related furnace door opening and closing device adopts a cantilever to control the alignment and opening and closing of the furnace door and the furnace mouth of the reactor. The opening and closing process is complicated, and the device components controlling the cantilever movement are numerous and occupy a large space. Therefore, a large space needs to be reserved outside the reactor to accommodate the furnace door opening and closing device, which results in limited remaining available space outside the reactor. Utility Model Content

[0004] In view of this, the embodiments of the present disclosure provide a furnace door opening and closing device and a reactor, which solve the problem that the remaining available space outside the reactor is limited due to the complex structure and large space occupied by the related furnace door opening and closing device.

[0005] In a first aspect, an embodiment of the present disclosure provides a furnace door opening and closing device, which is applied to a reaction furnace, wherein the reaction furnace comprises a furnace body and a furnace door, the furnace body having a furnace opening, wherein the furnace door opening and closing device comprises: a support plate connected to the furnace body, the support plate having a avoidance opening, and the avoidance opening is configured to expose the furnace opening; at least two transmission wheels rotatably connected to the support plate, a straight line where the central axis of the transmission wheel is located passes through the support plate, and at least two of the transmission wheels are arranged around the avoidance opening; a winding member wound around at least two of the transmission wheels and configured to move around the avoidance opening under the guidance of the transmission wheels; wherein the winding member is connected to the furnace door, and the furnace door covers or exposes the avoidance opening under the drive of the winding member.

[0006] In some embodiments, the number of the transmission wheels is greater than two, and all of the transmission wheels include: at least one driving wheel rotatably connected to the support plate, a straight line where the center axis of the driving wheel passes through the support plate, and the driving wheel is configured to drive the winding member to move; a plurality of driven wheels rotatably connected to the support plate, a straight line where the center axis of the driven wheel passes through the support plate, and the driven wheels are configured to support the winding member and roll with the movement of the winding member; wherein the furnace door opening and closing device also includes: a power source assembly connected to the driving wheel and configured to drive the driving wheel to rotate.

[0007] In some embodiments, the power source assembly includes: a motor configured to provide a driving force; a reducer connected to the motor and configured to reduce the rotation speed of the motor; wherein the reducer includes a main body and an output shaft, the main body is connected to the support plate, the output shaft is connected to the driving wheel and is rotatably connected to the support plate, and under the drive of the driving force, the output shaft drives the driving wheel to rotate synchronously.

[0008] In some embodiments, the output shaft has a limiting portion, the driving wheel has a limiting groove, and the limiting portion is located in the limiting groove; wherein the power source assembly also includes: at least two fixing members, wherein one of the fixing members is threadedly connected to the driving wheel and abuts against the limiting portion, and the other fixing member is threadedly connected to the driving wheel and abuts against the output shaft.

[0009] In some embodiments, the plurality of driven wheels include: at least three driven wheels, wherein at least one driving wheel and at least three driven wheels are arranged around the avoidance opening so that the winding member forms a quadrilateral around the avoidance opening.

[0010] In some embodiments, the plurality of transmission wheels further include: at least one tensioning wheel rotatably connected to the support plate, a straight line where a central axis of the tensioning wheel passes through the support plate, and the tensioning wheel is configured to tension the winding member.

[0011] In some embodiments, the winding member has a tensioning section, and the tensioning wheel is in contact with the tensioning section; wherein the furnace door opening and closing device also includes: an adjusting plate, having a long hole, and the extension direction of the long hole intersects with the extension direction of the tensioning section; a locking member, passing through the long hole and screwed to the support plate; or, the adjusting plate has a plurality of holes, and the arrangement direction of the plurality of holes intersects with the extension direction of the tensioning section, and the locking member passes through at least one of the holes and is screwed to the support plate; a fixing block, connected to the support plate, and arranged on the side of the tensioning wheel away from the tensioning section, wherein the fixing block has a threaded hole, and the extension direction of the threaded hole is the same as the extension direction of the long hole; an adjusting member, screwed to the fixing block through the threaded hole, and abutting against the adjusting plate.

[0012] In some embodiments, the winding member includes at least one supporting segment and at least one connecting segment, the connecting segment is connected to the supporting segment, and the supporting segment is connected to the furnace door to drive the furnace door to move; wherein the furnace door opening and closing device also includes: at least one first slide rail assembly, connected to the support plate and extending along the extension direction of the supporting segment; a first slider assembly, slidably connected to the first slide rail assembly and connected to the furnace door.

[0013] In some embodiments, the furnace door is arranged parallel to the support plate; wherein the furnace door opening and closing device also includes: a second slide rail assembly, connected to the support plate and extending along the extension direction of the support section; at least one second slider assembly, slidably connected to the second slide rail assembly and connected to the furnace door; wherein the first slider assembly is connected to the top of the furnace door, and the second slider assembly is connected to the bottom of the furnace door.

[0014] In some embodiments, the top of the furnace door has a first bending section, the bottom of the furnace door has a second bending section, and the bending directions of the first bending section and the second bending section are both toward the support plate.

[0015] In some embodiments, the first slider assembly includes: a first axis, connected to the furnace door; a first roller, mounted on the first axis and rotatable relative to the first axis; the first slide rail assembly includes: a first track, having a first slide groove extending along the extension direction of the support section, wherein the first roller extends into the first slide groove and can slide in the first slide groove; a first limit plate, connected to the first track and partially covering the first slide groove; or, the second slider assembly includes: a second axis, connected to the furnace door; a second roller, mounted on the second axis and rotatable relative to the second axis; the second slide rail assembly includes: a second track, having a second slide groove extending along the extension direction of the support section, wherein the second roller extends into the second slide groove and can slide in the second slide groove; a second limit plate, connected to the second track and partially covering the second slide groove.

[0016] In some embodiments, the number of the first slider assembly is one, the number of the second slider assembly is two, or the number of the first slider assembly is two, the number of the second slider assembly is one, so as to achieve three-point fixation of the furnace door.

[0017] In some embodiments, the furnace door opening and closing device further includes: a sensor, which is arranged on at least one of the support plate, the first slide rail assembly or the second slide rail assembly, and the sensor is configured to detect the opening and closing state of the furnace door.

[0018] In a second aspect, an embodiment of the present disclosure provides a reaction furnace, comprising: a furnace body having a furnace mouth; a furnace door; a furnace door opening and closing device as described in the first aspect, connecting the furnace body and the furnace door, and configured to open and close the furnace door relative to the furnace mouth.

[0019] A furnace door opening and closing device provided by an embodiment of the present disclosure is applied to a reaction furnace, wherein the reaction furnace comprises a furnace body and a furnace door, and the furnace body has a furnace opening. The furnace door opening and closing device comprises: a support plate, at least two transmission wheels and a winding member, wherein the support plate is connected to the furnace body, the support plate has a avoidance opening, and the avoidance opening is configured to expose the furnace opening, at least two transmission wheels are rotatably connected to the support plate, and the straight line where the central axis of the transmission wheel is located passes through the support plate, at least two transmission wheels are arranged around the avoidance opening, the winding member is wound around the at least two transmission wheels, and is configured to move around the avoidance opening under the guidance of the transmission wheel, and the winding member is connected to the furnace door, and the furnace door covers or exposes the avoidance opening under the drive of the winding member. The furnace door opening and closing device uses the winding member to drive the furnace door to open and close, has a simple structure, occupies a small space, and allows more usable space to remain outside the reaction furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 Shown is a schematic structural diagram of a reaction furnace provided in one embodiment of the present disclosure.

[0021] Figure 2 Shown is a schematic structural diagram of a furnace door opening and closing device provided in one embodiment of the present disclosure.

[0022] Figure 3 Shown is a schematic structural diagram of a furnace door opening and closing device provided in another embodiment of the present disclosure.

[0023] Figure 4 Shown is a schematic structural diagram of a transmission wheel and a winding member provided in an embodiment of the present disclosure.

[0024] Figure 5 Shown is a schematic structural diagram of a power source assembly and a driving wheel provided in one embodiment of the present disclosure.

[0025] Figure 6 Shown is a schematic structural diagram of a furnace door opening and closing device provided in another embodiment of the present disclosure.

[0026] Figure 7 Shown Figure 6 A partial enlarged view of the furnace door opening and closing device in area A is shown.

[0027] Figure 8 Shown is a schematic structural diagram of a first slider assembly provided in an embodiment of the present disclosure.

[0028] Fig. 9 Shown is a schematic structural diagram of a first slide rail assembly provided in an embodiment of the present disclosure.

[0029] Fig.10 Shown is a schematic structural diagram of a second slider assembly provided in an embodiment of the present disclosure.

[0030] Fig.11Shown is a schematic structural diagram of a second slide rail assembly provided in an embodiment of the present disclosure.

[0031] Fig.12 Shown is a schematic diagram of the structure of a sensor provided in one embodiment of the present disclosure.

[0032] Fig.13 Shown is a schematic structural diagram of a driven wheel provided in an embodiment of the present disclosure.

[0033] Fig.14 Shown is a cross-sectional view of a driven wheel provided in one embodiment of the present disclosure.

[0034] Reference numerals:

[0035] 1. Reactor; 10. Furnace door opening and closing device; 100. Support plate; 101. Avoidance; 200. Transmission wheel; 201. Central axis of transmission wheel; 210. Driving wheel; 2101. Central axis of driving wheel; 2102. Limiting groove; 220. Driven wheel; 2201. Central axis of driven wheel; 2210. Fixed shaft; 2220. First ball bearing; 2230. Fixed sleeve; 2240. Third roller; 230. Tensioning wheel; 2301. Central axis of tensioning wheel; 300. Wrapping piece; 301, tensioning section; 302, supporting section; 303, connecting section; 400, power source assembly; 410, motor; 420, reducer; 4210, main body; 4220, output shaft; 4221, limiter; 430, fixing frame; 440, fixing piece; 500, adjusting plate; 501, long hole; 600, locking piece; 700, fixing block; 701, threaded hole; 800, adjusting piece; 900, first slide rail assembly; 910, first track; 9101, first slide groove; 920, first a stop plate; 1000, a first slider assembly; 1001, a first axis; 1002, a first roller; 1010, a fixing screw; 1020, a fixing nut; 1030, a second ball bearing; 1100, a second slide rail assembly; 1110, a second track; 1111, a second slide groove; 1120, a second stop plate; 1200, a second slider assembly; 1201, a second axis; 1202, a second roller; 1300, a sensor; 1310, a main structure; 1320, a pressing piece; 1321 , contact part; 1330, elastic part; 1340, contact point; 1301, first sensor; 1302, second sensor; 1400, first stopper; 1500, second stopper; 1600, clamping part; 20, furnace body; 21, furnace mouth; 30, furnace door; 31, top of furnace door; 310, first bending section; 3110, first vertical section; 3120, first horizontal section; 32, bottom of furnace door; 320, second bending section; 3210, second vertical section; 3220, second horizontal section. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0037] When processing semiconductor products, it is usually necessary to place the semiconductor products in a specific reactor and process them under specific environmental conditions. At present, the industry usually uses boats to load or move semiconductor products. Before processing, it is usually necessary to open the furnace door first, let the boat loaded with the semiconductor products to be processed enter the furnace tube of the reactor, and then close the furnace door. Some processing processes of semiconductor products need to be carried out under high temperature conditions. In order to avoid the high temperature gas in the reactor from causing harm to the staff when the furnace door is opened, a furnace door opening and closing device is usually used to open and close the furnace door.

[0038] The related furnace door opening and closing device adopts a cantilever to control the alignment and opening and closing of the furnace door and the furnace mouth of the reactor. The opening and closing process is complicated, and the device components controlling the cantilever movement are numerous, which occupies a large space. Therefore, a large space needs to be reserved outside the reactor to accommodate the furnace door opening and closing device, which leads to limited remaining available space outside the reactor, thereby restricting the installation of other processing technology equipment in the production line area of ​​semiconductor products.

[0039] In view of the above problems, an embodiment of the present disclosure provides a furnace door opening and closing device, which is applied to a reaction furnace, wherein the reaction furnace includes a furnace body and a furnace door, and the furnace body has a furnace opening. The furnace door opening and closing device includes: a support plate, at least two transmission wheels and a winding member, wherein the support plate is connected to the furnace body, the support plate has a avoidance opening, and the avoidance opening is configured to expose the furnace opening, at least two transmission wheels are rotatably connected to the support plate, and the straight line where the central axis of the transmission wheel is located passes through the support plate, at least two transmission wheels are arranged around the avoidance opening, the winding member is wound around the at least two transmission wheels, and is configured to move around the avoidance opening under the guidance of the transmission wheel, and the winding member is connected to the furnace door, and the furnace door covers or exposes the avoidance opening under the drive of the winding member. The furnace door opening and closing device uses the winding member to drive the furnace door to open and close, has a simple structure, occupies a small space, and can leave more usable space outside the reaction furnace.

[0040] The specific structure of the furnace door opening and closing device is described below in conjunction with the embodiments.

[0041] Figure 1 Shown is a schematic structural diagram of a reaction furnace provided in one embodiment of the present disclosure. Figure 2 FIG. 1 is a schematic diagram of the structure of a furnace door opening and closing device provided by an embodiment of the present disclosure. Figure 1 to Figure 2As shown, the furnace door opening and closing device 10 is applied to a reaction furnace 1, and the reaction furnace 1 includes a furnace body 20 and a furnace door 30, and the furnace body 20 has a furnace opening 21. The furnace door opening and closing device 10 includes a support plate 100, at least two transmission wheels 200 and a winding member 300. The support plate 100 is connected to the furnace body 20, and the support plate 100 has an avoidance opening 101, and the avoidance opening 101 is configured to expose the furnace opening 21. At least two transmission wheels 200 are rotatably connected to the support plate 100, and the straight line where the central axis 201 of the transmission wheel is located passes through the support plate 100, and the central axis 201 of the transmission wheel is fixedly connected or rotatably connected to the support plate 100. At least two transmission wheels 200 are arranged around the avoidance opening 101. The wrapping piece 300 is wrapped around at least two transmission wheels 200 and is configured to move around the avoidance opening 101 under the guidance of the transmission wheels 200 . The wrapping piece 300 is fixedly connected to the furnace door 30 , and the furnace door 30 covers or exposes the avoidance opening 101 driven by the wrapping piece 300 .

[0042] Exemplarily, the furnace door opening and closing device 10 includes two transmission wheels 200, which are rotatably connected to the support plate 100, and the two transmission wheels 200 are symmetrically arranged on both sides of the avoidance opening 101. The winding member 300 is wound around the two transmission wheels 200 and is configured to move along the extension direction of the avoidance opening 101 under the guidance of the transmission wheels 200.

[0043] In some embodiments, the number of the transmission wheels 200 is greater than two. Each transmission wheel 200 is disposed at the periphery of the avoidance opening 101. When the winding member 300 cooperates with the transmission wheels 200 at the periphery of the avoidance opening 101, the winding member 300 is disposed around the avoidance opening 101 and moves around the avoidance opening 101 under the guidance of each transmission wheel 200.

[0044] The angle between the central axis 201 of the transmission wheel and the support plate 100 can be set in the range of 0 to 180 degrees, which is not specifically limited in the present disclosure. For example, the angle between the central axis 201 of the transmission wheel and the support plate 100 can be set to 90 degrees, that is, the central axis 201 of the transmission wheel is perpendicular to the support plate 100.

[0045] The material of the winding member 300 may be a metal material, and the metal material may be stainless steel, aluminum, iron, etc., to ensure the mechanical strength of the winding member 300. Exemplarily, the winding member 300 may be a steel wire.

[0046] The furnace door opening and closing device 10 provided by the embodiment of the present disclosure includes a support plate 100, at least two transmission wheels 200 and a winding member 300. The support plate 100 is connected to the furnace body 20, and the support plate 100 has a avoidance opening 101, and the avoidance opening 101 is configured to expose the furnace opening 21 of the furnace body 20, at least two transmission wheels 200 are rotatably connected to the support plate 100, at least two transmission wheels 200 are arranged around the furnace opening 21, the winding member 300 is wound around the at least two transmission wheels 200, and the winding member 300 is connected to the furnace door 30. Under the guidance of the transmission wheel 200, the winding member 300 moves around the avoidance opening 101, and the furnace door 30 covers or exposes the avoidance opening 101 under the drive of the winding member 300. The furnace door opening and closing device 10 uses the winding member 300 to drive the furnace door 30 to open and close, has a simple structure, occupies a small space, and can leave more usable space outside the reaction furnace 1.

[0047] In some embodiments, if the number of transmission wheels 200 is greater than two, all transmission wheels 200 include at least one driving wheel 210 and a plurality of driven wheels 220. At least one driving wheel 210 is rotatably connected to the support plate 100, and the straight line where the central axis 2101 of the driving wheel is located passes through the support plate 100. The driving wheel 210 is configured to drive the winding member 300 to move, and the plurality of driven wheels 220 are rotatably connected to the support plate 100, and the straight line where the central axis 2201 of the driven wheel is located passes through the support plate 100. The driven wheels 220 are configured to support the winding member 300 and roll with the movement of the winding member 300. The furnace door opening and closing device 10 also includes a power source assembly 400, which is connected to the driving wheel 210 and is configured to drive the driving wheel 210 to rotate. The transmission structure is simple, occupies little space, and can realize the rapid opening and closing of the furnace door 30.

[0048] For example, Figure 3 to Figure 4 As shown, all transmission wheels 200 include a driving wheel 210 and three driven wheels 220. The angle range between the central axis 2101 of the driving wheel and the central axis 2201 of the three driven wheels and the support plate 100 can be set between 0 degrees and 180 degrees, which is not specifically limited in the present disclosure. Exemplarily, the angle between the central axis 2101 of the driving wheel and the support plate 100 can be set to 90 degrees, and the angle between the central axis 2201 of the driven wheel and the support plate 100 can be set to 90 degrees, that is, the central axis 2101 of the driving wheel and the central axis 2201 of the three driven wheels are respectively arranged perpendicular to the support plate 100.

[0049] In some embodiments, Figure 2 , Figure 3 and Figure 5As shown, the power source assembly 400 includes a motor 410 and a reducer 420. The motor 410 can be fixedly connected to the support plate 100, the motor 410 is configured to provide a driving force, and the reducer 420 is connected to the motor 410 and is configured to reduce the speed of the motor 410. The reducer 420 includes a main body 4210 and an output shaft 4220, the main body 4210 is fixedly connected to the support plate 100, the output shaft 4220 is fixedly connected to the driving wheel 210, the output shaft 4220 passes through the driving wheel 210 and is rotatably connected to the support plate 100, and under the driving force, the output shaft 4220 drives the driving wheel 210 to rotate synchronously.

[0050] For example, Figure 3 As shown, the main body 4210 is fixedly connected to the support plate 100 via a fixing frame 430 .

[0051] Exemplarily, the power source assembly 400 may further include a handle, the handle having an axle bar, the axle bar is fixedly connected to the driving wheel, and the axle bar passes through the driving wheel and is rotatably connected to the support plate 100 .

[0052] Exemplarily, the power source assembly 400 may also include a motor and a gear, wherein the gear is sleeved on the motor output shaft, the gear of the power source assembly 400 rotates with the rotation of the motor output shaft, the driving wheel 210 has a gear, and the gear of the power source assembly 400 is meshed with the gear of the driving wheel 210 so that the power source assembly 400 can drive the driving wheel 210 to rotate relative to the support plate 100.

[0053] The power source assembly 400 may also be other structures that can provide driving force, and the driving force drives the driving wheel 210 to rotate. The present disclosure does not specifically limit the structure of the power source assembly 400.

[0054] In some embodiments, the output shaft 4220 has a limiting portion 4221, the driving wheel 210 has a limiting groove 2102, and the limiting portion 4221 is located in the limiting groove 2102, so that the driving wheel 210 and the output shaft 4220 are circumferentially limited and connected. The power source assembly 400 also includes at least two fixing members 440. Among them, one fixing member 440 is screwed to the driving wheel 210 and abuts against the limiting portion 4221, and the other fixing member 440 is screwed to the driving wheel 210 and abuts against the output shaft 4220, so as to realize the fixed connection between the output shaft 4220 and the driving wheel 210. The above connection method is firm and reliable.

[0055] The fixing member 440 may be a fixing bolt, or other fixing structure with a threaded section, which is not specifically limited in the present disclosure.

[0056] In some embodiments, the plurality of driven wheels 220 include at least three driven wheels 220, wherein at least one driving wheel 210 and at least three driven wheels 220 are arranged around the avoidance opening 101, so that the winding member 300 forms a quadrilateral around the avoidance opening 101, so as to improve the stability of the furnace door opening and closing device 10. In addition, the power source assembly 400 is away from the avoidance opening 101 to avoid damage to the power source assembly 400 when the furnace opening 21 is in a high temperature environment. In particular, when the power source assembly 400 includes a motor 410 and a reducer 420, the motor 410 and the reducer 420 are easily failed in a high temperature environment.

[0057] For example, Figure 3 and Figure 4 As shown, the plurality of driven wheels 220 include three driven wheels 220 , and one driving wheel 210 and three driven wheels 220 are arranged around the avoidance opening 101 , so that the winding member 300 forms a quadrilateral around the avoidance opening 101 .

[0058] Exemplarily, the plurality of driven wheels 220 may further include five driven wheels 220 , and one driving wheel 210 and five driven wheels 220 are arranged around the avoidance opening 101 , so that the wrapping member 300 forms a quadrilateral around the avoidance opening 101 .

[0059] In some embodiments, the multiple transmission wheels 200 also include at least one tensioning wheel 230, which is rotatably connected to the support plate 100. The straight line where the center axis 2301 of the tensioning wheel is located passes through the support plate 100. The tensioning wheel 230 is configured to tension the winding member 300 to ensure that the winding member 300 is always in a tensioned state, thereby ensuring the opening and closing accuracy of the furnace door 30.

[0060] For example, Figure 3 and Figure 4 As shown, the multiple transmission wheels 200 also include a tensioning wheel 230, which is arranged between the two driven wheels 220. The angle between the central axis 2301 of the tensioning wheel and the support plate 100 can be set between 0 degrees and 180 degrees, which is not specifically limited in the present disclosure. For example, the angle between the central axis 2301 of the tensioning wheel and the support plate 100 can be set to 90 degrees, that is, the central axis 2301 of the tensioning wheel is arranged perpendicular to the support plate 100.

[0061] In some embodiments, Figures 4 to 7As shown, the winding member 300 has a tensioning section 301, and the tensioning wheel 230 contacts the tensioning section 301. The furnace door opening and closing device 10 also includes an adjusting plate 500, a locking member 600, a fixing block 700 and an adjusting member 800. The adjusting plate 500 has a long hole 501, and the extension direction of the long hole 501 intersects with the extension direction of the tensioning section 301. The tensioning wheel 230 is rotatably connected to the adjusting plate 500, and the straight line where the central axis 2301 of the tensioning wheel is located passes through the adjusting plate 500. The locking member 600 passes through the long hole 501 and is screwed to the support plate 100. The fixing block 700 is fixedly connected to the support plate 100 and is arranged on a side of the tensioning wheel 230 away from the tensioning section 301. The fixing block 700 has a threaded hole 701, and the extension direction of the threaded hole 701 is the same as the extension direction of the long hole 501. The adjusting member 800 is screwed to the fixing block 700 through the threaded hole 701 and abuts against the adjusting plate 500. The adjusting member 800 is rotated to adjust the length of the portion of the adjusting member 800 between the fixing block 700 and the adjusting plate 500, thereby adjusting the position of the tensioning wheel 230, so that the tensioning wheel 230 moves relative to the tensioning section 301, thereby adjusting the tensioning degree of the winding member 300 to an optimal state, thereby ensuring the stability and flexibility of the opening and closing process of the furnace door 30.

[0062] Exemplarily, the adjustment plate 500 has a plurality of holes, the arrangement direction of the plurality of holes intersects with the extension direction of the tensioning section 301 , and the locking member 600 passes through at least one hole and is screwed to the support plate 100 , thereby locking the adjustment plate 500 and the support plate 100 .

[0063] The locking member 600 may be a locking bolt, or other locking structures having a threaded section, which is not specifically limited in the present disclosure.

[0064] The adjusting member 800 may be an adjusting bolt, or other adjusting structures having a threaded section, which is not specifically limited in the present disclosure.

[0065] In some embodiments, Figure 4 , Figure 6 and Figure 8As shown, the wrapping member 300 includes at least one support section 302 and at least one connecting section 303, the connecting section 303 connects the support section 302, and the support section 302 is fixedly connected to the furnace door 30 to drive the furnace door 30 to move. The furnace door opening and closing device 10 also includes a first slide rail assembly 900 and at least one first slider assembly 1000. The first slide rail assembly 900 is fixedly connected to the support plate 100 and extends along the extension direction of the support section 302. The first slider assembly 1000 is slidably connected to the first slide rail assembly 900 and is fixedly connected to the furnace door 30. The first slide rail assembly 900 and the first slider assembly 1000 provide a guiding function and a supporting function for the opening and closing of the furnace door 30, thereby ensuring the stability of the opening and closing of the furnace door 30. In addition, the sliding friction between the first slider assembly 1000 and the first slide rail assembly 900 is used to reduce the resistance during the opening and closing process of the furnace door 30, so that the furnace door 30 can be opened and closed more easily.

[0066] Exemplarily, the support section 302 is connected to the furnace door 30 through the clamp 1600. Specifically, the clamp 1600 is connected to the furnace door 30, and the support section 302 is clamped between the clamp 1600 and the furnace door 30. The furnace door 30 and the clamp 1600 squeeze the support section 302 so that sufficient friction is generated between the support section 302 and the clamp 1600 or the furnace door 30, and when the support section 302 moves, the furnace door 30 is driven to move. In some embodiments, the clamp 1600 can also be connected to the support section 302, and the clamp 1600 and the furnace door 30 are detachably connected, so that the support section 302 can drive the clamp 1600 and the furnace door 30 to move. For example, the clamp 1600 is provided with a slot, and the support section 302 is interference-fitted with the clamp 1600 through the slot, and then the clamp 1600 is connected to the furnace door 30.

[0067] In some embodiments, Figure 2 , Figure 4 and Fig.10 As shown, the furnace door 30 is arranged in parallel with the support plate 100, and the furnace door opening and closing device 10 further includes: a second slide rail assembly 1100 and at least one second slider assembly 1200, the second slide rail assembly 1100 is fixedly connected to the support plate 100 and extends along the extension direction of the support section 302, and at least one second slider assembly 1200 is slidably connected to the second slide rail assembly 1100 and fixedly connected to the furnace door 30. The first slider assembly 1000 is fixedly connected to the top 31 of the furnace door, and the second slider assembly 1200 is fixedly connected to the bottom 32 of the furnace door. The second slide rail assembly 1100 and at least one second slider assembly 1200 provide a guiding function and a supporting function for the opening and closing of the furnace door 30, thereby ensuring the stability of the opening and closing of the furnace door 30. In addition, the sliding friction between the second slider assembly 1200 and the second slide rail assembly 1100 is used to reduce the resistance during the opening and closing process of the furnace door 30, so that the furnace door 30 can be opened and closed more easily.

[0068] In some embodiments, Figure 2 and Figure 3 As shown, the top 31 of the furnace door has a first bending section 310, and the bottom 32 of the furnace door has a second bending section 320, and the bending directions of the first bending section 310 and the second bending section 320 are both toward the support plate 100. The first slide rail assembly 900 protrudes from the surface of the support plate 100, and the avoidance opening 101 is provided on the support plate 100. The provision of the first bending section 310 and the second bending section 320 enables the furnace door 30 to cooperate with the first slider assembly 900 and the second slider assembly 1200, and to fit the avoidance opening 101 as much as possible.

[0069] For example, Figure 3 and Figure 4 As shown, the first bending section 310 includes a first vertical section 3110 and a first horizontal section 3120, the first vertical section 3110 is connected to the first horizontal section 3120, the first horizontal section 3120 is located at the lower side of the first slide rail assembly 900, the clamping member 1600 is located at the lower side of the first slide rail assembly 900, the support section 302 is between the clamping member 1600 and the first horizontal section 3120, and the clamping member 1600 is fixedly connected to the first horizontal section 3120. The first slider assembly 1000 is fixedly connected to the first vertical section 3110.

[0070] The second bending section 320 includes a second vertical section 3210 and a second horizontal section 3220 . The second vertical section 3210 is connected to the second horizontal section 3220 . The second horizontal section 3220 is located on the upper side of the second slide rail assembly 1100 . The second slider assembly 1200 is fixedly connected to the second vertical section 3210 .

[0071] In some embodiments, Figure 4 , Figure 6 , Figure 8 and Fig. 9As shown, the first slider assembly 1000 includes: a first shaft 1001 and a first roller 1002. The first shaft 1001 is fixedly connected to the furnace door 30. The first roller 1002 is sleeved on the first shaft 1001 and can rotate relative to the first shaft 1001. The first slide rail assembly 900 includes: a first track 910 and a first limiting plate 920. The first track 910 is fixedly connected to the support plate 100. The first track 910 has a first slide groove 9101 extending along the extension direction of the support section 302. The first roller 1002 extends into the first slide groove 9101 and can roll in the first slide groove 9101. The first limiting plate 920 is fixedly connected to the first track 910 and partially covers the first slide groove 9101. The first limiting plate 920 is used to limit the first roller 1002 to prevent the first roller 1002 from falling off the first track 910. The rolling friction between the first roller 1002 and the first slide groove 9101 is used to further reduce the resistance during the opening and closing process of the oven door 30, so that the oven door 30 can be opened and closed more easily.

[0072] For example, Figure 8 As shown, the first slider assembly 1000 includes: a fixing screw 1010, a fixing nut 1020 and a second ball bearing 1030. The fixing screw 1010 passes through the second ball bearing 1030 and is fixedly connected to the furnace door 30. The fixing nut 1020 and the nail cap of the fixing screw 1010 are respectively located on both sides of the second ball bearing 1030. The fixing nut 1020 is threadedly connected with the fixing screw 1010 and abuts against the inner ring of the second ball bearing 1030. The nail cap of the fixing screw 1010 abuts against the inner ring of the second ball bearing 1030 to prevent the second ball bearing 1030 from moving relative to the fixing screw 1010.

[0073] In some embodiments, Figure 4 , Figure 6 , Fig.10 and Fig.11As shown, the second slider assembly 1200 includes: a second shaft 1201 and a second roller 1202. The second shaft 1201 is fixedly connected to the furnace door 30. The second roller 1202 is sleeved on the second shaft 1201 and is rotatable relative to the second shaft 1201. The second slide rail assembly 1100 includes: a second track 1110 and a second limiting plate 1120. The second track 1110 is fixedly connected to the support plate 100. The second track 1110 has a second slide groove 1111 extending along the extension direction of the support section 302. The second roller 1202 extends into the second slide groove 1111 and can slide in the second slide groove 1111. The second limiting plate 1120 is fixedly connected to the second track 1110 and partially covers the second slide groove 1111. The second limiting plate 1120 is used to limit the second roller 1202 to prevent the second roller 1202 from falling off the second track 1110. The rolling friction between the second roller 1202 and the second slide groove 1111 is used to further reduce the resistance during the opening and closing process of the oven door 30, so that the oven door 30 can be opened and closed more easily.

[0074] For example, the structure of the second slider assembly 1200 may be the same as that of the first slider assembly 1000 , and will not be described in detail herein.

[0075] In some embodiments, the number of the first slider assembly 1000 is one, and the number of the second slider assembly 1200 is two, so as to achieve three-point fixation of the furnace door 30 to further ensure the stability of the opening and closing of the furnace door 30.

[0076] In some embodiments, the number of the first slider assembly 1000 is two, and the number of the second slider assembly 1200 is one, so as to achieve three-point fixation of the furnace door 30 to further ensure the stability of the opening and closing of the furnace door 30.

[0077] In some embodiments, the number of the first slider assemblies 1000 may be two or more, and the number of the second slider assemblies 1200 may be two or more, so as to further ensure the stability of the opening and closing of the furnace door 30 .

[0078] In some embodiments, the furnace door opening and closing device 10 further includes a sensor 1300. The sensor 1300 is disposed on at least one of the support plate 100, the first slide rail assembly 900, or the second slide rail assembly 1100. The sensor 1300 is electrically connected to the control system and is configured to detect the open or closed state of the furnace door 30. The sensor 1300 can be arranged on the periphery of the avoidance opening 101, as close to the avoidance opening 101 as possible, to improve the accuracy of the detection.

[0079] Since the processing technology of some products needs to be carried out in a high temperature environment, the temperature of the furnace body 20 is very high, and the area around the furnace mouth 21 is in a high temperature environment. In order to prevent the sensor 1300 from being damaged in a high temperature environment, the housing of the sensor 1300 is made of high temperature resistant ceramic material.

[0080] For example, Figure 2 and Fig.12 As shown, the sensor 1300 is a micro switch, and the sensor 1300 includes: a main structure 1310, a pressing plate 1320 and an elastic member 1330. The main structure 1310 is connected to the support plate 100, one side of the pressing plate 1320 is rotatably connected to the main structure 1310, one side of the elastic member 1330 is connected to the main structure 1310, and the other side of the elastic member 1330 is connected to the other side of the pressing plate 1320. A contact portion 1321 is provided on the other side of the pressing plate 1320, and a contact point 1340 is provided in the middle of the main structure 1310 and toward one side of the pressing plate 1320. An external force applies pressure to the contact portion 1321, and the pressing plate 1320 contacts the contact point 1340. The sensor 1300 sends an electrical signal to the control system, and the control system controls the power source assembly 400 to stop working, the driving wheel 210 to stop rotating, the winding member 300 to stop moving, and the furnace door 30 to stop moving.

[0081] The elastic member 1330 may be a spring or other elastic structure, which is not specifically limited in the present disclosure.

[0082] Exemplarily, the sensor 1300 can also be a slot-type photoelectric sensor, which is electrically connected to the control system. The slot-type photoelectric sensor has a detection slot. When the furnace door 30 is in a closed state or a fully opened state, the light beam in the detection slot is blocked, and the slot-type photoelectric sensor sends an electrical signal to the control system. The control system controls the power source assembly 400 to stop working, the driving wheel 210 to stop rotating, the winding member 300 to stop moving, and the furnace door 30 to stop moving.

[0083] Exemplarily, when the sensor 1300 is a slot-type photoelectric sensor, the furnace door opening and closing device 10 also includes a sensing sheet, which is arranged on the support plate 100. When the sensing sheet is located in the detection slot of the slot-type photoelectric sensor, the sensing sheet blocks the light beam in the detection slot. At this time, the slot-type photoelectric sensor sends an electrical signal to the control system, and the control system controls the power source assembly 400 to stop working, the driving wheel 210 to stop rotating, the winding member 300 to stop moving, and the furnace door 30 to stop moving.

[0084] For example, Figure 3 and Figure 6As shown, the furnace door opening and closing device 10 also includes a first sensor 1301, a second sensor 1302, a first stopper 1400 and a second stopper 1500. The two sensors 1300 include: the first sensor 1301 and the second sensor 1302 are respectively arranged on the support plate 100, and are respectively located at two diagonal positions of the support plate 100. The first sensor 1301 and the second sensor 1302 are respectively electrically connected to the control system. The first stopper 1400 is fixedly connected to the top 31 of the furnace door, and the second stopper 1500 is fixedly connected to the bottom 32 of the furnace door. When the furnace door 30 is in a closed state, the first stopper 1400 contacts and squeezes the first sensor 1301, and the first sensor 1301 sends an electrical signal to the control system. The control system determines that the furnace door 30 is completely closed, and the control system controls the power source assembly 400 to stop working, the driving wheel 210 stops rotating, the winding member 300 stops moving, and the furnace door 30 stops moving. When the furnace door 30 is in a fully open state, the second stopper 1500 contacts and squeezes the second sensor 1302, and the second sensor 1302 sends an electrical signal to the control system. The control system determines that the furnace door 30 is fully opened, and the control system controls the power source assembly 400 to stop working, the driving wheel 210 to stop rotating, the winding member 300 to stop moving, and the furnace door 30 to stop moving.

[0085] The cross-sectional shape of the first stopper 1400 may be L-shaped, T-shaped, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0086] Exemplarily, the first stopper 1400 is fixedly connected to the first vertical section 3110 , and the first stopper 1400 is located on the upper side of the first slide rail assembly 900 .

[0087] The cross-sectional shape of the second stopper 1500 may be L-shaped, T-shaped, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0088] Exemplarily, the second stopper 1500 is fixedly connected to the second horizontal section 3220 , and the second stopper 1500 is located on the upper side of the second slide rail assembly 1100 .

[0089] Exemplarily, the first sensor 1301 and the second sensor 1302 are both micro switches, and have the same structure as the sensor 1300 , which will not be described in detail here.

[0090] For example, Figure 3 , Fig.13 and Fig.14As shown, the driven wheel 220 includes: a fixed shaft 2210, a first ball bearing 2220, a fixed sleeve 2230 and a third roller 2240. The fixed shaft 2210 passes through the first ball bearing 2220 and the fixed sleeve 2230 in sequence and is connected to the support plate 100. The third roller 2240 is sleeved with the first ball bearing 2220. One side of the fixed sleeve 2230 abuts against the inner ring of the first ball bearing 2220, and the other side of the fixed sleeve 2230 abuts against the support plate 100 to avoid contact between the third roller 2240 and the support plate 100, thereby avoiding friction between the third roller 2240 and the support plate 100 when the third roller 2240 rotates and affecting the rotation of the third roller 2240.

[0091] Exemplarily, the structure of the tension wheel 230 is the same as that of the driven wheel 220, and will not be described in detail here. One side of the fixed sleeve of the tension wheel 230 abuts against the inner ring of the ball bearing of the tension wheel 230, and the other side of the fixed sleeve of the tension wheel 230 abuts against the adjustment plate 500 to prevent the roller of the tension wheel 230 from contacting the adjustment plate 500, thereby preventing the roller of the tension wheel 230 from generating friction with the adjustment plate 500 when rotating and affecting the rotation of the roller of the tension wheel 230.

[0092] In the embodiments of the present disclosure, if not clearly defined, the fixed connection may be in the form of bolts, nuts, screws, buckles, magnetic attraction, etc. for detachable connection. In some fixed connections, if there is no special requirement for detachable matching, non-detachable connection may be achieved by welding, bonding, etc.

[0093] The reactor 1 provided in the embodiment of the present disclosure includes: a furnace door opening and closing device 10, a furnace body 20 and a furnace door 30 as mentioned in the above embodiment, the furnace body 20 has a furnace mouth 21, and the furnace door opening and closing device 10 connects the furnace body 20 and the furnace door 30, and is configured to open and close the furnace door 30 relative to the furnace mouth 21.

[0094] Since the reaction furnace 1 includes the furnace door opening and closing device 10 , all technical features and technical effects of the reaction furnace 1 including the furnace door opening and closing device 10 are not described in detail here.

[0095] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.

[0096] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0097] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0098] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0099] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure shall be included in the protection scope of the present disclosure.

Claims

1. A furnace door opening and closing device, characterized in that: Applied to a reaction furnace, the reaction furnace comprises a furnace body and a furnace door, the furnace body has a furnace mouth, wherein the furnace door opening and closing device comprises: A support plate connected to the furnace body, the support plate having an avoidance opening, and the avoidance opening is configured to expose the furnace opening; At least two transmission wheels are rotatably connected to the support plate, the straight line where the central axis of the transmission wheel is located passes through the support plate, and at least two transmission wheels are arranged around the avoidance opening; A winding member, wound around at least two of the transmission wheels, and configured to move around the avoidance opening under the guidance of the transmission wheels; Wherein, the wrapping member is connected to the furnace door, and the furnace door covers or exposes the avoidance opening under the drive of the wrapping member.

2. The furnace door opening and closing device according to claim 1, characterized in that: The number of the transmission wheels is greater than two, and all the transmission wheels include: At least one driving wheel is rotatably connected to the support plate, a straight line where a central axis of the driving wheel passes through the support plate, and the driving wheel is configured to drive the winding member to move; A plurality of driven wheels are rotatably connected to the support plate, a straight line where the central axis of the driven wheels passes through the support plate, and the driven wheels are configured to support the winding member and roll with the movement of the winding member; Wherein, the furnace door opening and closing device also includes: The power source assembly is connected to the driving wheel and is configured to drive the driving wheel to rotate.

3. The furnace door opening and closing device according to claim 2, characterized in that: The power source assembly comprises: a motor configured to provide a driving force; A reducer connected to the motor and configured to reduce the rotation speed of the motor; Wherein, the reducer includes a main body and an output shaft, the main body is connected to the support plate, the output shaft is connected to the driving wheel and is rotatably connected to the support plate, and under the driving force, the output shaft drives the driving wheel to rotate synchronously.

4. The furnace door opening and closing device according to claim 3, characterized in that: The output shaft has a limiting portion, the driving wheel has a limiting groove, and the limiting portion is located in the limiting groove; Wherein, the power source component also includes: At least two fixing members, wherein one of the fixing members is threadedly connected to the driving wheel and abuts against the limiting portion, and the other fixing member is threadedly connected to the driving wheel and abuts against the output shaft.

5. The furnace door opening and closing device according to claim 2, characterized in that: The plurality of driven wheels include: At least three driven wheels, wherein at least one driving wheel and at least three driven wheels are arranged around the avoidance opening, so that the winding member forms a quadrilateral around the avoidance opening.

6. The furnace door opening and closing device according to claim 2, characterized in that: The plurality of transmission wheels also include: At least one tensioning wheel is rotatably connected to the support plate, a straight line where a central axis of the tensioning wheel is located passes through the support plate, and the tensioning wheel is configured to tension the winding member.

7. The furnace door opening and closing device according to claim 6, characterized in that: The winding member has a tensioning section, and the tensioning wheel is in contact with the tensioning section; Wherein, the furnace door opening and closing device also includes: An adjusting plate having a long hole, wherein an extending direction of the long hole intersects with an extending direction of the tensioning section; A locking member, passing through the long hole and being screwed to the support plate; Alternatively, the adjustment plate has a plurality of holes, the arrangement direction of the plurality of holes intersects with the extension direction of the tensioning section, and the locking member passes through at least one of the holes and is screwed to the support plate; a fixing block connected to the support plate and disposed on a side of the tensioning wheel away from the tensioning section, wherein the fixing block has a threaded hole, and an extending direction of the threaded hole is the same as an extending direction of the long hole; The adjusting member is screwed to the fixing block through the threaded hole and abuts against the adjusting plate.

8. The furnace door opening and closing device according to any one of claims 1 to 7, characterized in that: The winding member includes at least one supporting section and at least one connecting section, wherein the connecting section is connected to the supporting section, and the supporting section is connected to the furnace door to drive the furnace door to move; Wherein, the furnace door opening and closing device also includes: A first slide rail assembly connected to the support plate and extending along an extension direction of the support section; At least one first sliding block assembly is slidably connected to the first sliding rail assembly and is connected to the furnace door.

9. The furnace door opening and closing device according to claim 8, characterized in that: The furnace door is arranged parallel to the support plate; Wherein, the furnace door opening and closing device also includes: A second slide rail assembly connected to the support plate and extending along an extension direction of the support section; at least one second slider assembly, slidably connected to the second slide rail assembly and connected to the furnace door; Wherein, the first sliding block assembly is connected to the top of the furnace door, and the second sliding block assembly is connected to the bottom of the furnace door.

10. The furnace door opening and closing device according to claim 9, characterized in that: The top of the furnace door has a first bending section, and the bottom of the furnace door has a second bending section, and the bending directions of the first bending section and the second bending section are both toward the support plate.

11. The furnace door opening and closing device according to claim 9, characterized in that: The first slider assembly comprises: A first shaft connected to the furnace door; A first roller, mounted on the first shaft and rotatable relative to the first shaft; The first slide rail assembly comprises: A first track having a first slide groove extending along the extension direction of the support section, wherein the first roller extends into the first slide groove and can slide in the first slide groove; a first limiting plate connected to the first track and partially covering the first sliding groove; or, The second slider assembly comprises: A second shaft connected to the furnace door; A second roller is mounted on the second shaft and is rotatable relative to the second shaft; The second slide rail assembly comprises: A second track having a second slide groove extending along the extension direction of the support section, wherein the second roller extends into the second slide groove and can slide in the second slide groove; The second limiting plate is connected to the second track and partially covers the second sliding groove.

12. The furnace door opening and closing device according to claim 9, characterized in that: The number of the first slider assembly is one, and the number of the second slider assembly is two, or the number of the first slider assembly is two, and the number of the second slider assembly is one, so as to realize three-point fixation of the furnace door.

13. The furnace door opening and closing device according to claim 9, characterized in that: Also includes: A sensor is provided on at least one of the support plate, the first slide rail assembly or the second slide rail assembly, and the sensor is configured to detect the opening and closing state of the furnace door.

14. A reactor, characterized in that: include: A furnace body having a furnace mouth; Furnace door; The furnace door opening and closing device according to any one of claims 1 to 13, connecting the furnace body and the furnace door, and configured to open and close the furnace door relative to the furnace opening.

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