Detection device and detection system
By designing a detection device including a reference seat and a thimble, the problem that the planarity measurement in the prior art is not suitable for large batches, medium and high precision, and high-precision and high-efficiency planarity measurement are achieved.
Patent Information
- Application Number
- CN202421566729.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-04
- Publication Date
- 2025-03-25
- Estimated Expiration
- 2034-07-04
AI Technical Summary
The existing flatness measurement methods are not suitable for large batches, medium and high-precision flatness measurements, and there are problems such as incomplete measurement results, long measurement time, temperature sensitivity, low measurement accuracy, time-consuming and labor-intensive.
A detection device and a detection system are provided, including a reference seat and several thimbles. By adjusting the position of the thimble, the distance difference between it and the reference plane is less than 0.01 mm, thereby realizing high-precision plane measurement of the plane to be measured.
It realizes high-precision measurement of large batches, medium and high precision flatness, with measurement accuracy up to 0.05mm and high measurement efficiency, and is suitable for planarity measurement of large batches of workpieces.
Smart Images

Figure CN222670959U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of flatness detection tools, and in particular to a detection device and a detection system. Background Art
[0002] Flatness refers to the deviation of the macroscopic convex height of the substrate from the ideal plane. Flatness is an indicator that limits the variation of the actual plane from its ideal plane and is used to control the shape error of the actual plane being measured.
[0003] Current flatness measurement methods generally include feeler gauge measurement, liquid plane method, laser plane interferometer measurement, level meter / digital level measurement, and meter measurement method. Among the existing flatness measurement methods, the feeler gauge measurement method has incomplete measurement results and can only detect the edges of parts; the liquid plane method takes a long time to measure and is sensitive to temperature, so it is only suitable for planes with low measurement accuracy; the laser plane interferometer measurement method is mainly used for measuring small smooth planes; the level meter measurement method requires repeated movement of the instrument and recording of data at each measuring point, which is time-consuming and labor-intensive, takes a long time to adjust, and has cumbersome data processing procedures; meter measurement methods, such as three-coordinate measuring machines, have high measurement accuracy but low efficiency.
[0004] In short, the existing flatness measurement methods are not suitable for large-scale, medium- and high-precision flatness measurement. Utility Model Content
[0005] To this end, the utility model proposes a detection device and a detection system to at least partially solve the technical problem that the existing flatness measurement method is not suitable for large-scale, medium- and high-precision flatness measurement.
[0006] The technical solution of the utility model is as follows:
[0007] In the first aspect, the utility model provides a detection device, 1. A detection device, characterized in that: it comprises a reference seat and a plurality of ejectors; the reference seat is provided with a reference surface, and the other side of the reference seat opposite to the reference surface is provided with at least three groups of hole structures, and each group of the hole structures is arranged around a reference axis at intervals;
[0008] Each of the hole structures comprises a plurality of mounting blind holes, each of the mounting blind holes is sequentially arranged along a direction perpendicular to the reference axis, and a through hole is respectively provided on the bottom surface of each of the mounting blind holes, and the through hole passes through the reference seat;
[0009] Each ejector pin corresponds to each hole structure one by one, and each ejector pin is inserted into one of the mounting blind holes of the corresponding hole structure. One end of the ejector pin fits the bottom surface of the mounting blind hole, and the end surface of the other end is a spherical surface.
[0010] Furthermore, the ejector pin comprises a straight rod section and a tapered section connected in series, and the cross section of the tapered section gradually decreases in a direction away from the straight rod section;
[0011] An internal thread is provided on the inner wall of the mounting blind hole, and an external thread is provided on the outer circumference of the straight rod section, and the external thread is threadedly connected with the internal thread;
[0012] A sphere is fixedly arranged on one end of the tapered section away from the straight rod section.
[0013] Furthermore, there are three ejector pins, and the difference in the maximum distance between any two of the ejector pins and the reference surface is less than 0.01 mm.
[0014] Furthermore, the parallelism between the plane where the points of the three ejector pins that are the farthest from the reference plane are located and the reference plane is less than 0.02 mm.
[0015] Furthermore, a plurality of grooves are provided on the outer circumference of the straight rod segment; each of the grooves is located between the external thread and the tapered segment, and each of the grooves is spaced apart in the circumferential direction of the straight rod segment.
[0016] Furthermore, the diameter of the sphere is between 0.3-0.5 mm.
[0017] Furthermore, the hole distance between two adjacent mounting blind holes of each hole structure is smaller than the diameter of the mounting blind hole;
[0018] The through holes on the bottom surfaces of the mounting blind holes of the same hole structure are connected.
[0019] Furthermore, a threaded through hole is provided on the reference seat, the threaded through hole passes through the reference seat, and the threaded through hole is coaxial with the reference axis;
[0020] The detection device further comprises a plug shaft, the plug shaft is threadedly connected to the threaded through hole, and the plug shaft has a detection head, the diameter of the detection head matches the diameter of the hole to be detected of the workpiece.
[0021] Furthermore, a cross groove is provided on the end surface of the plug shaft away from the detection head.
[0022] In a second aspect, the utility model provides a detection system, comprising the detection device as described above, and also comprising a height difference scale, wherein the bottom surface of the reference seat of the height difference scale is in contact with the reference surface, and the probe of the height difference scale passes through the through hole and is in contact with the plane to be measured of the workpiece.
[0023] The working principle and beneficial effects of the utility model are:
[0024] The detection device provided by the utility model is provided with a reference seat and a plurality of ejectors, wherein at least three groups of hole structures are provided on the other side surface opposite to the reference surface of the reference seat, and each group of hole structures includes a plurality of mounting blind holes which are arranged in sequence, and a through hole is provided on the bottom surface of each mounting blind hole, and an ejector is provided in each of the mounting blind holes of the three groups of hole structures, respectively, and the distance between the end point of each ejector and the reference surface is adjusted so that the parallelism between the plane where the end point of each ejector is located and the reference surface is within a predetermined error. At this time, after the end point of each ejector is fitted with the plane to be measured, that is, the parallelism between the plane to be measured and the reference surface is within a predetermined error, then the reference seat of the height difference ruler can be placed on the reference surface, and the probe of the height difference ruler can measure the distance between each point of the plane to be measured and the reference surface, wherein the difference between the maximum value of the distance and the minimum value of the distance is the flatness of the plane to be measured. BRIEF DESCRIPTION OF THE DRAWINGS
[0025] The utility model is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.
[0026] Figure 1 An axonometric diagram of a detection device provided in an embodiment of the utility model;
[0027] Figure 2 A front view of a detection device provided by an embodiment of the utility model;
[0028] Figure 3 A bottom view of a detection device provided in an embodiment of the utility model;
[0029] Figure 4 for Figure 3 Sectional view at the middle BB;
[0030] Figure 5 Figure 1 A partial enlarged view of the middle A;
[0031] Figure 6 This is a schematic diagram of the principle of the detection device provided in the embodiment of the utility model when used to measure verticality.
[0032] In the figure: 100-reference seat, 110-reference surface, 120-hole structure, 121-mounting blind hole, 122-through hole, 130-mounting surface, 140-threaded through hole, 200-thimble, 210-straight rod section, 211-groove, 220-tapered section, 230-sphere, 300-height difference ruler, 310-probe, 400-workpiece, 410-plane to be measured, 420-hole to be measured, 500-plug shaft, 510-detection head. DETAILED DESCRIPTION
[0033] The following will be combined with the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0034] For ease of understanding, the detection device will be introduced in the detection system in this embodiment.
[0035] This embodiment provides a detection system, which includes a detection device and a height difference ruler 300, wherein the reference Figures 1 to 4 As shown, the detection device includes a reference seat 100 and a plurality of ejectors 200. A reference surface 110 is provided on the reference seat 100, and at least three groups of hole structures 120 are provided on the other side of the reference seat 100 opposite to the reference surface 110, and each group of hole structures 120 is arranged around a reference axis at intervals; each group of hole structures 120 includes a plurality of mounting blind holes 121, and each mounting blind hole 121 is sequentially arranged along a direction perpendicular to the reference axis, and a through hole 122 is respectively provided on the bottom surface of each mounting blind hole 121, and the through hole 122 passes through the reference seat 100; each ejector 200 corresponds to each group of hole structures 120 one by one, and each ejector 200 is inserted into one of the mounting blind holes 121 of the corresponding hole structure, and one end of the ejector 200 is in contact with the bottom surface of the mounting blind hole 121, and the end surface of the other end is a spherical surface.
[0036] In the detection device of the present embodiment, by adjusting the maximum distance between the spherical surface of each ejector pin 200 and the reference surface 110 of the reference seat 100, the difference of each distance is within a certain threshold range, that is, the parallelism between the plane where the point of each ejector pin 200 and the reference surface 110 is farthest from the reference surface 110 and the reference surface 110 is within a certain threshold range; at this time, the reference seat 100 of the height difference ruler 300 can be placed on the reference surface 110, and then, the probe 310 of the height difference ruler 300 passes through each through hole 122 and the mounting blind hole 121 to contact the plane 410 to be measured of the workpiece, and the reading of the height difference ruler 300 at this time is recorded, that is, the height difference between the plane 410 to be measured of the workpiece and the reference surface 110, and by moving the height difference ruler 300, the height difference ruler 300 measures the distance between multiple points of the plane 410 to be measured and the reference surface 110, wherein the difference between the maximum value of the distance and the minimum value of the distance is the flatness of the plane 410 to be measured.
[0037] When the detection system of this embodiment measures the flatness of a plane, on the one hand, this method has a higher measurement accuracy, and its measurement accuracy can reach 0.05mm; on the other hand, when measuring different workpieces 400, only the detection device and the height difference scale 300 need to be moved. Compared with moving usually heavier workpieces, the scheme of this embodiment can more conveniently measure different workpieces. Moreover, when measuring the flatness of a plane of the workpiece, the detection system only needs to move the height difference scale 300, which is convenient for measurement, so that this measurement method can be applicable to the measurement of the flatness of a relatively large number of workpieces 400.
[0038] refer to Figure 1 and Figure 2 As shown, the reference seat 100 of this embodiment is in the shape of a plate, one side of which constitutes the above-mentioned reference surface 110. For the convenience of description, in this embodiment, the other side of the reference seat 100 opposite to the reference surface 110 is called the mounting surface 130; the above-mentioned hole structures 120 are arranged on the mounting surface 130. The hole structures 120 of this embodiment are specifically three groups. Preferably, each hole structure 120 is evenly and spaced around a reference axis, for example, around the axis of the reference seat 100. It should be noted that the hole structures 120 can also be four groups, five groups, six groups or more. When in use, three groups can be selected for use.
[0039] In this embodiment, reference Figure 3 and Figure 4 As shown, each group of hole structures includes a plurality of mounting blind holes 121 , and each mounting blind hole 121 is sequentially arranged along a direction perpendicular to the reference axis; that is, arranged along the radial direction of the reference seat 100 of this embodiment.
[0040] In this embodiment, the distance between two adjacent mounting blind holes 121 in each group of hole structures 120 is smaller than the diameter of the mounting blind holes 121. For example, in a specific embodiment, the diameter of each mounting blind hole 121 is 4 mm, and the distance between two adjacent mounting blind holes 121 is 3 mm. Since the ejector pin 200 is installed in each mounting blind hole 121, by setting the distance between two adjacent mounting blind holes 121 to be smaller than the diameter of the mounting blind hole 121, compared with the case where the hole distance is larger than the hole diameter, the solution of this embodiment can set more mounting blind holes 121 within the same length, so that the adjustment range of the mounting position of the ejector pin 200 is larger, and the use range of the detection device can be wider.
[0041] refer to Figure 1 , Figure 3 and Figure 4As shown, in this embodiment, the through holes 122 on the bottom surfaces of the mounting blind holes 121 in the same hole structure 120 are connected. Specifically, in this embodiment, a long hole runs through the bottom surface of each mounting blind hole 121. Since the detection device of this embodiment needs the probe 310 of the height difference ruler 300 to pass through the through hole 122 and contact the plane 410 to be measured when in use, by connecting the through holes 122, on the one hand, compared with the non-connected through holes 122, the solution of this embodiment does not need to take out the probe 310 of the height difference ruler 300 and then insert it into another through hole 122, which is more convenient to use. On the other hand, the probe 310 of the height difference ruler 300 can also move continuously in each through hole 122, and can measure more points on the plane 410 to be measured, thereby improving the measurement accuracy.
[0042] In this embodiment, reference Figure 2 and Figure 5 As shown, the ejector pin 200 comprises a straight rod section 210 and a tapered section 220 connected in series, and the cross-section of the tapered section 220 is reduced in the direction away from the straight rod section 210; an internal thread is provided on the inner wall of each of the above-mentioned mounting blind holes 121, and an external thread is provided on the outer periphery of the straight rod section 210, and the external thread can be screwed with the internal thread; and a sphere 230 is fixedly provided on one end of the tapered section 220 away from the straight rod section 210.
[0043] That is, the ejector pin 200 of the present embodiment is fixed on the reference seat 100 by screwing the straight rod section 210 and the mounting blind hole 121 , and the spherical surface of the ball 230 constitutes the spherical surface of the end of the ejector pin 200 .
[0044] In this embodiment, reference Figure 5 As shown, a plurality of grooves 211 are provided on the outer circumference of the straight rod section 210 , each groove 211 is located between the external thread and the tapered section 220 , and each groove 211 is spaced apart around the circumference of the straight rod section 210 .
[0045] In this embodiment, by providing the above-mentioned groove 211, the roughness of the straight rod section 210 at this location can be increased, so that the user can rotate the straight rod section 210, that is, rotate the ejector pin, more conveniently. In some embodiments, the above-mentioned groove 211 can also be replaced by a plurality of ridges.
[0046] In this embodiment, the diameter of the sphere 230 is between 0.3-0.5 mm, and the diameter can be, for example, any one of 0.3 mm, 0.35 mm, 0.4 mm, 0.45 mm or 0.5 mm, or any other value between 0.3-0.5 mm. By setting the diameter of the sphere 230 between 0.3-0.5 mm, on the one hand, it can be prevented that the diameter of the sphere 230 is too small to damage the plane 410 to be measured, and on the other hand, it can be prevented that the diameter of the sphere 230 is too large to affect the detection accuracy.
[0047] In this embodiment, there are three ejector pins 200, and the difference in the maximum distance between any two ejector pins 200 and the reference surface 110 is less than 0.01 mm; for the convenience of description, the plane where the points of the three ejector pins 200 with the greatest distance from the reference surface 110 are located is called the contact plane in this embodiment, and the parallelism between the contact plane and the reference surface 110 is less than 0.02 mm. The distance between the bottom surface of the installation blind hole 121 and the reference surface 110, the length of the ejector pin 200, and the flatness of the reference surface 110 can be adjusted so that when the bottom surface of the ejector pin 200 fits the bottom surface of the installation blind hole 121, the above-mentioned size and parallelism requirements are met.
[0048] The specific process of the detection device of this embodiment for measuring the flatness of the plane 410 to be measured is as follows:
[0049] First, according to the size of the plane 410 to be measured, the ejector pin 200 is installed in a suitable installation blind hole 121 in each hole structure 120 until the bottom surface of the ejector pin 200 fits with the bottom surface of the installation blind hole 121;
[0050] Make the spherical surfaces of the three ejector pins 200 contact the plane 410 to be measured, fit the bottom surface of the height difference ruler 300 to the reference surface 110, pass the probe 310 of the height difference ruler 300 through the through hole 122 and contact the plane 410 to be measured, record the reading G1 at this time, move the height difference ruler 300, make the probe of the height difference ruler 300 contact another point on the plane 410 to be measured, record the reading G2 at this time, ..., record the reading Gn;
[0051] The flatness of the plane 410 to be measured is: Max(G1, G2, ... Gn)-Min(G1, G2, ... Gn); that is, the difference between the maximum value of the distance between each point on the plane to be measured and the reference plane and the minimum value of the distance between each point on the plane to be measured and the reference plane.
[0052] In this embodiment, reference Figure 3 and Figure 6 As shown, a threaded through hole 140 is opened on the reference seat 100, and the threaded through hole 140 passes through the reference seat 100, and the threaded through hole 140 is coaxial with the above-mentioned reference axis; the detection device of this embodiment also includes a plug shaft 500, which is threadedly connected to the threaded through hole 140, and the plug shaft 500 has a detection head 510, and the diameter of the detection head 510 matches the diameter of the hole 420 to be measured of the workpiece.
[0053] In this embodiment, a cross groove is provided on the end face of the plug shaft 500 away from the detection head 510. Since it does not affect understanding, the cross groove is not shown in the drawings of this embodiment; in some embodiments, an inner hexagonal hole or the like may also be provided on the end face.
[0054] By providing the above-mentioned threaded through hole 140 and plug shaft 500, the detection device can be used to detect the verticality between the plane 410 to be measured on the workpiece 400 and the hole 420 to be measured on the plane 410 to be measured; the specific method is:
[0055] After each ejector pin 200 is mounted on the reference seat 100 , the spherical surface of each ejector pin 200 is brought into contact with the plane to be measured 410 , and the contact between the spherical surface of the ejector pin 200 and the plane to be measured 410 is maintained, and the plug shaft 500 is aligned with the hole to be measured 420 ;
[0056] A tool is inserted into the cross groove, and the tool is used to drive the plug shaft 500 to rotate, and it is observed whether the plug shaft 500 can be inserted into the hole 420 to be measured. If the plug shaft 500 can be inserted into the hole 420 to be measured, it indicates that the verticality between the plane 410 to be measured and the hole 420 to be measured meets the requirement; if the plug shaft 500 cannot be inserted into the hole 420 to be measured, it indicates that the verticality between the plane 410 to be measured and the hole 420 to be measured does not meet the requirement.
[0057] It should be noted that, that is, when the detection device is used in actual applications, it is necessary to adjust the verticality between the plug shaft 500 and the contact plane, or adjust the diameter of the detection head 510 of the plug shaft 500 according to the verticality requirement between the plane 410 to be measured and the hole 420 to be measured. The specific corresponding relationship can be determined by calculation or experiment, which will not be repeated here.
[0058] In addition to the above-mentioned qualitative measurement of whether the verticality between the plane to be measured 410 and the hole to be measured 420 meets the requirements, the detection device of this embodiment can also quantitatively measure the verticality between the plane to be measured 410 and the hole to be measured 420. The specific measurement process is as follows:
[0059] First, insert the detection head 510 of the plug shaft 500 into the hole 420 to be measured, rotate the three ejector pins 200 to ensure that two ejector pins 200 are in contact with the plane 410 to be measured, and use a feeler gauge to measure the minimum distance between the other ejector pin 200 that is not in contact with the plane to be measured and the plane 410 to be measured. Measure multiple times, and the maximum value of each minimum distance is the verticality value between the plane 410 to be measured and the hole 420 to be measured.
[0060] In order to make the detection device more durable, in this embodiment, the above-mentioned reference seat 100 is preferably made of tool steel, and the quenching hardness preferably satisfies HRC>60; the roughness of the reference surface 110 should be below 3.2um.
[0061] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A detection device, characterized in that: The invention comprises a reference seat (100) and a plurality of ejector pins (200); the reference seat (100) is provided with a reference surface (110); another side surface of the reference seat (100) opposite to the reference surface (110) is provided with at least three groups of hole structures (120); each group of the hole structures (120) is arranged at intervals around a reference axis; Each of the hole structures (120) comprises a plurality of mounting blind holes (121), each of the mounting blind holes (121) is arranged in sequence along a direction perpendicular to the reference axis, and a through hole (122) is provided on the bottom surface of each of the mounting blind holes (121), and the through hole (122) passes through the reference seat (100); each of the ejector pins (200) corresponds to each of the hole structures (120) one by one, and each of the ejector pins (200) is inserted into one of the mounting blind holes (121) of the corresponding hole structure (120), one end of the ejector pin (200) is in contact with the bottom surface of the mounting blind hole (121), and the end surface of the other end is a spherical surface.
2. The detection device according to claim 1, characterized in that: The ejector pin (200) comprises a straight rod section (210) and a tapered section (220) connected in series, and the cross section of the tapered section (220) gradually decreases in a direction away from the straight rod section (210); An internal thread is provided on the inner wall of the mounting blind hole (121), and an external thread is provided on the outer periphery of the straight rod section (210), and the external thread is threadedly connected to the internal thread; A spherical body (230) is fixedly provided on one end of the tapered section (220) away from the straight rod section (210).
3. The detection device according to claim 2, characterized in that: There are three ejector pins (200), and the difference in the maximum distance between any two ejector pins (200) and the reference surface (110) is less than 0.01 mm.
4. The detection device according to claim 3, characterized in that: The planes where the points of the three ejector pins (200) that are at the greatest distance from the reference plane (110) are located have a parallelism with the reference plane (110) of less than 0.02 mm.
5. The detection device according to claim 2, characterized in that: A plurality of grooves (211) are provided on the outer circumference of the straight rod section (210); each of the grooves (211) is located between the external thread and the tapered section (220), and each of the grooves (211) is arranged at intervals in the circumferential direction of the straight rod section (210).
6. The detection device according to claim 2, characterized in that: The diameter of the sphere (230) is between 0.3-0.5 mm.
7. The detection device according to claim 1, characterized in that: The hole distance between two adjacent mounting blind holes (121) of each hole structure (120) is smaller than the diameter of the mounting blind hole (121); The through holes (122) on the bottom surfaces of the mounting blind holes (121) of the same hole structure (120) are connected.
8. The detection device according to any one of claims 1 to 7, characterized in that: A threaded through hole (140) is provided on the reference seat (100), the threaded through hole (140) passes through the reference seat (100), and the threaded through hole (140) is coaxial with the reference axis; The detection device further comprises a plug shaft (500), the plug shaft (500) being threadedly connected to the threaded through hole (140), and the plug shaft (500) having a detection head (510), the diameter of which matches the diameter of the hole (420) to be detected of the workpiece (400).
9. The detection device according to claim 8, characterized in that: A cross groove (211) is provided on the end surface of the plug shaft (500) facing away from the detection head.
10. A detection system, characterized in that: The detection device comprises the detection device as described in any one of claims 1 to 9, and also comprises a height difference scale (300), the bottom surface of the reference seat (100) of the height difference scale (300) is in contact with the reference surface (110), and the probe (310) of the height difference scale (300) passes through the through hole (122) and is in contact with the plane (410) to be measured of the workpiece (400).