Photoresist temperature control system

Abstract

The utility model provides a photoresist temperature control system, and belongs to the technical field of photoresist temperature control. The system comprises a sleeve device which comprises a photoresist conveying pipeline, a temperature control pipeline and a connector, and the connector comprises a first communication port and a second communication port which are communicated with an inlet and an outlet of the temperature control pipeline; the liquid separation branch extension module comprises a main body part and at least one extension connecting seat, each extension connecting seat is used for being connected with a sleeve device, the main body part comprises a main liquid inlet channel and a main liquid outlet channel, the main liquid inlet channel is communicated with a first communication port of the sleeve device connected with the liquid separation branch extension module, and the main liquid outlet channel is communicated with a second communication port of the sleeve device connected with the liquid separation branch extension module; the main liquid outlet channel is communicated with a second communication port of the sleeve device connected with the liquid separation branch extension module; and the peripheral temperature control loop is used for circulating temperature control liquid and comprises a liquid inlet and a liquid outlet which are respectively communicated with the main liquid outlet channel and the main liquid inlet channel. The photoresist temperature control system provided by the utility model can meet the temperature control requirements of multiple paths or multiple types of photoresist in the same area of the wafer.

Description

Technical Field

[0001] The utility model relates to the technical field of photoresist temperature control, in particular to a photoresist temperature control system. Background Art

[0002] The current common photoresist pipeline temperature control solutions are based on installing a pipe for liquid circulation outside the photoresist delivery pipeline, and injecting temperature-controlled liquid into the pipe to transfer cold or heat to the photoresist through the polymer corrosion-resistant hose that transports the photoresist by heat conduction.

[0003] This temperature control pipeline that corresponds one-to-one with a photoresist pipeline can only control the temperature of a single photoresist pipeline. When the same area of ​​the wafer needs to be coated with glue, multiple photoresist pipelines or multiple types of photoresists may be required to coat the area. The above-mentioned single temperature control pipeline cannot meet the needs. Utility Model Content

[0004] One purpose of the utility model is to meet the temperature control requirements of multiple or multiple photoresists in the same area of ​​a wafer.

[0005] In particular, an embodiment of the present application provides a photoresist temperature control system, comprising:

[0006] A sleeve device, comprising a photoresist delivery pipeline, a temperature control pipeline located outside the photoresist delivery pipeline, and a connector, wherein the connector is arranged at one end of the photoresist delivery pipeline and comprises a first communication port and a second communication port connected to an inlet and an outlet of the temperature control pipeline;

[0007] A liquid splitting manifold extension module, comprising a main body and at least one extension connection seat, each of the extension connection seats being used to be connected to the sleeve device, and the main body comprising a main liquid inlet channel and a main liquid outlet channel, the main liquid inlet channel being connected to the first communication port of the sleeve device to which the liquid splitting manifold extension module is connected, and the main liquid outlet channel being connected to the second communication port of the sleeve device to which the liquid splitting manifold extension module is connected;

[0008] The peripheral temperature control circuit is used for circulating the temperature control liquid, and comprises a liquid inlet and a liquid outlet, which are respectively connected with the main liquid outlet channel and the main liquid inlet channel.

[0009] Optionally, the peripheral temperature control circuit includes a main passage, the main passage includes a circulation pump and a temperature controller connected in series between the liquid inlet and the liquid outlet, and the temperature controller is used to adjust the temperature of the temperature-controlled liquid.

[0010] Optionally, a thermometer, a first pressure gauge and a second pressure gauge are also connected to the main passage, the first pressure gauge and the second pressure gauge are used to measure the pressure of the temperature-controlled liquid at the liquid inlet and the liquid outlet, respectively, and the circulation pump is connected to both the first pressure gauge and the second pressure gauge.

[0011] Optionally, the peripheral temperature control circuit also includes a pressure loss protection branch, a three-way valve, a first one-way valve and a second one-way valve, the first one-way valve and the second one-way valve are respectively arranged upstream and downstream of the circulation pump, and are used to limit the temperature control liquid to flow only from the liquid inlet to the liquid outlet, the three-way valve includes a first interface, a second interface and a third interface, the first interface and the second interface are respectively connected to the liquid inlet and the first one-way valve, one end of the pressure loss protection branch is connected to the pipeline between the second one-way valve and the liquid outlet, and the other end is connected to the third interface.

[0012] Optionally, the peripheral temperature control circuit further includes a pressure relief valve, which is arranged in a circuit formed by the peripheral temperature control circuit, the sleeve device and the liquid separation branch path expansion module, and is used for relieving pressure when the pressure is greater than a preset value.

[0013] Optionally, the photoresist temperature control system further comprises a degassing module, which is arranged between the main liquid inlet channel and the liquid inlet, and the degassing module is used to remove bubbles in the temperature control liquid.

[0014] Optionally, the main body is further formed with a degassing connection portion for connecting the degassing module, and the main body is provided with a degassing channel for connecting the degassing module and the main liquid inlet channel.

[0015] Optionally, the temperature control pipeline further includes:

[0016] An inner tube is sleeved on the outside of the photoresist delivery pipeline, a first flow space is formed between the inner tube and the photoresist delivery pipeline, and an end of the first flow space close to the connector is connected to the first communication port;

[0017] An outer tube is sleeved on the outer side of the inner tube, a second flow space is formed between the outer tube and the inner tube, and an end of the second flow space close to the connector is connected to the second communication port;

[0018] The quick-catch nozzle module is arranged at one end of the photoresist delivery pipeline away from the connecting head. The quick-catch nozzle module is provided with a flow port for connecting the first flow space and the second flow space. The quick-catch nozzle module also includes a photoresist nozzle connected to the photoresist delivery pipeline.

[0019] Optionally, there are multiple main liquid outlet channels.

[0020] Optionally, an annular supporting structure is provided between the inner tube and the outer tube.

[0021] According to the first aspect of the utility model, the photoresist temperature control system includes a liquid separation manifold extension module, which includes at least one extension connection seat for connecting a sleeve device, and connects the sleeve device connected to the extension connection seat with a peripheral temperature control circuit, so that the peripheral temperature control reflux can simultaneously control the temperature of multiple or multiple photoresists in the same area. The entire system can meet the temperature control requirements of multiple or multiple photoresists in the same area of ​​the wafer.

[0022] According to the second aspect of the utility model, the peripheral temperature control circuit can form a normal circulation circuit and a pressure loss protection circuit. When the circulation pump and the temperature controller cannot respond in time, the three-way valve can be switched to a state where the first interface is connected to the third interface, cutting off the connection between the normal circulation circuit and the sleeve device. The residual temperature control liquid can be circulated in the pressure loss protection circuit to ensure that the photoresist in the pipeline still has a certain time limit for temperature control when the above-mentioned accident occurs, thereby effectively improving the reliability of the entire temperature control system.

[0023] Furthermore, by collecting the pressure of the temperature-controlled liquid at the inlet and outlet and combining it with a real-time responsive circulation pump, the optimal output of the circulation pump can be maintained according to the pressure difference of the temperature-controlled liquid at the inlet and outlet, thereby ensuring sufficient flow in the pipeline and ensuring sufficient heat exchange efficiency.

[0024] Furthermore, by collecting the temperature of the temperature-controlled liquid in real time through a thermometer, the temperature controller can be adjusted to a suitable temperature range. Combined with the above-mentioned flow regulation, the temperature-controlled liquid entering the pipeline device can meet the temperature control requirements of the photoresist.

[0025] According to the third aspect of the utility model, the pressure relief valve can automatically release pressure when the pressure in the pipeline is accidentally over-pressured, thereby avoiding leakage of temperature control liquid due to pipeline rupture or damage, thereby further improving the reliability of the entire temperature control system.

[0026] According to the fourth aspect of the utility model, the photoresist temperature control system also includes a degassing module, which can remove accumulated bubbles in the temperature control liquid, thereby eliminating the negative impact of bubbles on heat exchange efficiency, and at the same time eliminating the problem of excessive pipeline back pressure caused by bubble accumulation in the pipeline. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 A connection block diagram of a photoresist temperature control system according to an embodiment of the utility model;

[0028] Figure 2 for Figure 1 A cross-sectional view of a sleeve device of a photoresist temperature control system in an embodiment;

[0029] Figure 3 for Figure 1 A schematic diagram of the assembly structure of the liquid separation branch path extension module and the sleeve device of the photoresist temperature control system in the embodiment;

[0030] Figure 4 for Figure 1 A cross-sectional view of the connection between the liquid separation branch path extension module and the sleeve device of the photoresist temperature control system in the embodiment;

[0031] Figure 5 The schematic diagram is a peripheral temperature control circuit of a photoresist temperature control system according to an embodiment of the utility model. DETAILED DESCRIPTION

[0032] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. It is to be understood that the specific embodiments described herein are only used to explain the present application, rather than to limit the present application. It should also be noted that, for ease of description, only some structures related to the present application are shown in the accompanying drawings, rather than all structures. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0033] The terms "including" and "having" and any variations thereof in this application are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device comprising a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products or devices.

[0034] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0035] Figure 1 The figure is a connection block diagram of a photoresist temperature control system according to an embodiment of the utility model. Figure 2 for Figure 1 A cross-sectional view of a sleeve device 10 of a photoresist temperature control system in an embodiment. Figure 3 for Figure 1 A schematic diagram of the assembly structure of the liquid separation branch path extension module 20 and the sleeve device 10 of the photoresist temperature control system in the embodiment. Figure 4 for Figure 1A cross-sectional view of the connection between the liquid separation branch path extension module 20 and the sleeve device 10 of the photoresist temperature control system in the embodiment. Figure 2 The sleeve device 10 is in a straightened state. When actually used, the sleeve device 10 can be bent into a Figure 3 The bending state in Figure 2 The dotted line in the figure is the direction of photoresist flow, and the other arrows are the direction of temperature control liquid flow. Figure 1 As shown, in one embodiment, the photoresist temperature control system includes a sleeve device 10, a liquid separation branch path expansion module 20 and a peripheral temperature control circuit 30. Figure 2 As shown, the sleeve device 10 includes a photoresist delivery pipeline 11, a temperature control pipeline 12 located outside the photoresist delivery pipeline 11, and a connector 13, the connector 13 is arranged at one end of the photoresist delivery pipeline 11 and includes a first communication port 131 and a second communication port 132 connected to the inlet and outlet of the temperature control pipeline 12. Figure 3 As shown, the liquid branching extension module 20 includes a main body 21 and at least one extension connection seat 22, each of which is used to connect to the sleeve device 10. Figure 4 As shown, the main body 21 includes a main liquid inlet channel 211 and a main liquid outlet channel 212, the main liquid inlet channel 211 is connected to the first communication port 131 of the sleeve device 10 connected to the liquid branching extension module 20, and the main liquid outlet channel 212 is connected to the second communication port 132 of the sleeve device 10 connected to the liquid branching extension module 20. The peripheral temperature control circuit 30 is used to circulate the temperature control liquid, and includes a liquid inlet 301 and a liquid outlet 302, which are respectively connected to the main liquid outlet channel 212 and the main liquid inlet channel 211.

[0036] The photoresist temperature control system of this embodiment includes a liquid separation branch circuit extension module 20, which includes at least one extension connection seat for connecting the sleeve device 10, and connects the sleeve device 10 connected to the extension connection seat with the peripheral temperature control circuit 30, so that the peripheral temperature control reflux can simultaneously control the temperature of multiple or multiple photoresists in the same area. The entire system can meet the temperature control requirements of multiple or multiple photoresists in the same area of ​​the wafer.

[0037] Figure 5 FIG. 3 is a schematic diagram of a peripheral temperature control circuit 30 of a photoresist temperature control system according to an embodiment of the present invention. Figure 5As shown, in one embodiment, the peripheral temperature control circuit 30 includes a main passage 303, and the main passage 303 includes a circulation pump 31 and a thermostat 32 connected in series between the liquid inlet 301 and the liquid outlet 302. The thermostat 32 is used to adjust the temperature of the temperature-controlled liquid, and the thermostat 32 can be an electronic heat exchanger. The main passage 303 is also connected to a thermometer 33, a first pressure gauge 34, and a second pressure gauge 35. The first pressure gauge 34 and the second pressure gauge 35 are used to measure the pressure of the temperature-controlled liquid at the liquid inlet 301 and the liquid outlet 302, respectively. The circulation pump 31 is connected to the first pressure gauge 34 and the second pressure gauge 35. The peripheral temperature control circuit 30 also includes a pressure loss protection branch 304, a three-way valve 36, a first one-way valve 37 and a second one-way valve 38. The first one-way valve 37 and the second one-way valve 38 are respectively arranged upstream and downstream of the circulation pump 31, and are used to limit the temperature control liquid to flow only from the liquid inlet 301 to the liquid outlet 302. The three-way valve 36 includes a first interface, a second interface and a third interface. The first interface and the second interface are respectively connected to the liquid inlet 301 and the first one-way valve 37. One end of the pressure loss protection branch 304 is connected to the pipeline between the second one-way valve 38 and the liquid outlet 302, and the other end is connected to the third interface.

[0038] The peripheral temperature control circuit 30 of this embodiment can form at least two temperature control circuits through the arrangement of the three-way valve 36 and the one-way valve, namely, a normal circulation circuit in which only the first interface and the second interface are connected (see Figure 5 ), and a pressure loss protection circuit in which only the first interface and the third interface are connected (see Figure 5 dot-dash line loop in the figure).

[0039] The peripheral temperature control circuit 30 of the present embodiment can form a normal circulation circuit and a pressure loss protection circuit. When the circulation pump 31 and the temperature controller 32 cannot respond in time, the three-way valve 36 can be switched to a state where the first interface is connected to the third interface, thereby cutting off the connection between the normal circulation circuit and the sleeve device 10, and circulating the residual temperature control liquid in the pressure loss protection circuit to ensure that the photoresist in the pipeline still has a certain time limit of temperature control protection when the above-mentioned accident occurs, thereby effectively improving the reliability of the entire temperature control system.

[0040] Furthermore, by collecting the pressure of the temperature-controlled liquid at the liquid inlet 301 and the liquid outlet 302, combined with the real-time response of the circulation pump 31, the optimal output of the circulation pump 31 can be maintained according to the pressure difference of the temperature-controlled liquid at the liquid inlet 301 and the liquid outlet 302, thereby ensuring sufficient flow in the pipeline and ensuring sufficient heat exchange efficiency.

[0041] Furthermore, by collecting the temperature of the temperature-controlled liquid in real time through the thermometer 33, the temperature controller 32 can be adjusted to a suitable temperature range. Combined with the above-mentioned flow regulation, the temperature-controlled liquid entering the pipeline device can meet the temperature control requirements of the photoresist.

[0042] In a further embodiment, Figure 5 As shown, the peripheral temperature control circuit 30 also includes a pressure relief valve 39, which is arranged in a circuit formed by the peripheral temperature control circuit 30, the sleeve device 10 and the liquid separation branch path expansion module 20, and is used to relieve pressure when the pressure is greater than a preset value, and is also used to automatically close after the pressure is restored. Since the working principle of the pressure relief valve 39 is a prior art, it will not be described in detail here.

[0043] Since the pipeline device will move during operation, when the pipeline device is accidentally hit, the pressure in the pipeline where the temperature control liquid is located will instantly exceed the upper limit of the pressure resistance. In this embodiment, the pressure relief valve 39 can automatically release the pressure when the pressure in the pipeline is accidentally over-pressured, thereby avoiding leakage of the temperature control liquid due to pipeline rupture or damage, thereby further improving the reliability of the entire temperature control system.

[0044] like Figure 3 As shown, in another embodiment, the photoresist temperature control system also includes a degassing module 40, which is arranged between the main liquid inlet channel 211 and the liquid inlet 301, and the degassing module 40 is used to remove bubbles in the temperature control liquid. The degassing module 40 can adopt an existing degassing device. The degassing principle of the degassing device is common knowledge in the field and is not described in detail here. The main body 21 is also formed with a degassing connection portion for connecting the degassing module 40, and the main body 21 is provided with a degassing channel for connecting the degassing module 40 and the main liquid inlet channel 211.

[0045] The photoresist temperature control system of this embodiment also includes a degassing module 40, which can remove accumulated bubbles in the temperature control liquid, thereby eliminating the negative impact of bubbles on heat exchange efficiency and eliminating the problem of excessive pipeline back pressure caused by bubble accumulation in the pipeline.

[0046] In one embodiment, if Figure 2 As shown, the temperature control pipe 12 also includes an inner tube 121, an outer tube 122 and a quick-catch nozzle module 14. The inner tube 121 is sleeved on the outside of the photoresist delivery pipe 11, and a first flow space is formed between the inner tube 121 and the photoresist delivery pipe 11, and the end of the first flow space close to the connector 13 is connected to the first connecting port 131. The outer tube 122 is sleeved on the outside of the inner tube 121, and a second flow space is formed between the outer tube 122 and the inner tube 121, and the end of the second flow space close to the connector 13 is connected to the second connecting port 132. The quick-catch nozzle module 14 is arranged at the end of the photoresist delivery pipe 11 away from the connector 13, and the quick-catch nozzle module 14 is provided with a flow port 141 for connecting the first flow space and the second flow space, and the quick-catch nozzle module 14 also includes a photoresist nozzle 142 connected to the photoresist delivery pipe 11. The number of the main liquid outlet channels 212 can be one or more, such as Figure 4In the embodiment shown, the number of main liquid outlet channels 212 is 2 and they are symmetrically arranged on both sides of the outer tube 122. Furthermore, a heat-insulating sleeve is provided on the outer side of the outer tube 122, and an annular support structure 123 is provided between the inner tube 121 and the outer tube 122. Of course, a through hole for circulating the temperature-controlled liquid is also provided in the annular support structure 123.

[0047] The thermal insulation sleeve of this embodiment can ensure the stability of the temperature in the pipeline, and the annular support structure 123 is used to maintain the effective cross-sectional area between the inner tube 121 and the outer tube 122, thereby ensuring the stability of the flow in the circulation pipeline.

[0048] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A photoresist temperature control system, characterized in that: include: A sleeve device, comprising a photoresist delivery pipeline, a temperature control pipeline located outside the photoresist delivery pipeline, and a connector, wherein the connector is arranged at one end of the photoresist delivery pipeline and comprises a first communication port and a second communication port connected to an inlet and an outlet of the temperature control pipeline; A liquid splitting manifold extension module, comprising a main body and at least one extension connection seat, each of the extension connection seats being used to be connected to the sleeve device, and the main body comprising a main liquid inlet channel and a main liquid outlet channel, the main liquid inlet channel being connected to the first communication port of the sleeve device to which the liquid splitting manifold extension module is connected, and the main liquid outlet channel being connected to the second communication port of the sleeve device to which the liquid splitting manifold extension module is connected; The peripheral temperature control circuit is used for circulating the temperature control liquid, and comprises a liquid inlet and a liquid outlet, which are respectively connected with the main liquid outlet channel and the main liquid inlet channel.

2. The photoresist temperature control system according to claim 1, characterized in that: The peripheral temperature control circuit comprises a main passage, and the main passage comprises a circulation pump and a temperature controller connected in series between the liquid inlet and the liquid outlet, and the temperature controller is used to adjust the temperature of the temperature-controlled liquid.

3. The photoresist temperature control system according to claim 2, characterized in that: The main passage is also connected to a thermometer, a first pressure gauge and a second pressure gauge. The first pressure gauge and the second pressure gauge are used to measure the pressure of the temperature-controlled liquid at the liquid inlet and the liquid outlet, respectively. The circulation pump is connected to both the first pressure gauge and the second pressure gauge.

4. The photoresist temperature control system according to claim 3, characterized in that: The peripheral temperature control circuit also includes a pressure loss protection branch, a three-way valve, a first one-way valve and a second one-way valve. The first one-way valve and the second one-way valve are respectively arranged upstream and downstream of the circulation pump, and are used to limit the temperature control liquid to flow only from the liquid inlet to the liquid outlet. The three-way valve includes a first interface, a second interface and a third interface. The first interface and the second interface are respectively connected to the liquid inlet and the first one-way valve. One end of the pressure loss protection branch is connected to the pipeline between the second one-way valve and the liquid outlet, and the other end is connected to the third interface.

5. The photoresist temperature control system according to any one of claims 1 to 4, characterized in that: The peripheral temperature control circuit also includes a pressure relief valve, which is arranged in a circuit formed by the peripheral temperature control circuit, the sleeve device and the liquid separation branch path expansion module, and is used to relieve pressure when the pressure is greater than a preset value.

6. The photoresist temperature control system according to claim 1, characterized in that: It also includes a degassing module, which is arranged between the main liquid inlet channel and the liquid inlet, and the degassing module is used to remove bubbles in the temperature-controlled liquid.

7. The photoresist temperature control system according to claim 6, characterized in that: The main body is also formed with a degassing connection portion for connecting the degassing module, and the main body is provided with a degassing channel for connecting the degassing module and the main liquid inlet channel.

8. The photoresist temperature control system according to claim 1, characterized in that: The temperature control pipeline also includes: An inner tube is sleeved on the outside of the photoresist delivery pipeline, a first flow space is formed between the inner tube and the photoresist delivery pipeline, and an end of the first flow space close to the connector is connected to the first communication port; An outer tube is sleeved on the outer side of the inner tube, a second flow space is formed between the outer tube and the inner tube, and an end of the second flow space close to the connector is connected to the second communication port; The quick-catch nozzle module is arranged at one end of the photoresist delivery pipeline away from the connecting head. The quick-catch nozzle module is provided with a flow port for connecting the first flow space and the second flow space. The quick-catch nozzle module also includes a photoresist nozzle connected to the photoresist delivery pipeline.

9. The photoresist temperature control system according to claim 8, characterized in that: The number of the main liquid outlet channels is multiple.

10. The photoresist temperature control system according to claim 8, characterized in that: An annular supporting structure is provided between the inner tube and the outer tube.

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