Automatic alignment system for alignment target spot of mask plate

Abstract

The utility model relates to an automatic alignment system for alignment target spots of a mask plate, which comprises a platform seat provided with a CCD (Charge Coupled Device) camera moving component. The CCD camera moving assembly comprises an X-axis driving module, the X-axis driving module is driven by an X-axis driving device, a Y-axis driving module is installed on the X-axis driving module, the Y-axis driving module is driven by a Y-axis driving device, and a CCD camera assembly is installed on the Y-axis driving module; the CCD camera assembly comprises a camera mounting plate, and the camera mounting plate is connected with a sliding block in the Y-axis guide rail and a nut in the Y-axis lead screw pair; and a CCD camera is mounted on the camera mounting plate. According to the utility model, the positions in the X and Y directions can be automatically adjusted, manual intervention operation is not needed, the target spot position searching operation is simple, the target spot position is set in advance, the CCD automatically moves to the center of the target spot, the target spot searching time is shortened, and the production efficiency is improved; and the operation frequency of personnel entering the machine is reduced, and the low product yield caused by dust generated after the body enters the machine is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of mask plate production and relates to a mask plate alignment target automatic alignment system. Background Art

[0002] In the production process of glass cover plates, touch cover plates, etc. of electronic products, the mask plate is an indispensable workpiece because its edge position needs to form a pattern through exposure and development process.

[0003] During the exposure and development process, the two masks need to be aligned. The existing equipment uses a manual knob to move the CCD position back and forth and left and right to align the target point so that the CCD can find the center position of the target. It takes too long to find the target point and it is not convenient to operate from the inside of the machine. Summary of the invention

[0004] The utility model aims to provide a mask plate alignment target point automatic alignment system, which can solve the above-mentioned problems.

[0005] According to the technical solution provided by the utility model: a mask plate automatic alignment target point alignment system includes a platform seat, on which a CCD camera moving assembly is arranged; the CCD camera moving assembly includes an X-axis driving module, the X-axis driving module is driven by an X-axis driving device, a Y-axis driving module is installed on the X-axis driving module, the Y-axis driving module is driven by the Y-axis driving device, and a CCD camera assembly is installed on the Y-axis driving module; the CCD camera assembly includes a camera mounting plate, the camera mounting plate is connected to a slider in a Y-axis guide rail and a nut in a Y-axis lead screw pair; a CCD camera is installed on the camera mounting plate, and a CCD lens is arranged on the CCD camera; an avoidance hole is opened in the middle of the platform seat, and the CCD lens is located in the avoidance hole.

[0006] As a further improvement of the present invention, the X-axis drive module includes an X-axis screw pair, and X-axis guide rails are provided on both sides of the X-axis screw pair.

[0007] As a further improvement of the present invention, the X-axis driving device is an X-axis driving motor, and the X-axis driving motor is installed on the platform seat.

[0008] As a further improvement of the present invention, the Y-axis drive module includes a Y-axis base, on which a Y-axis screw pair is installed, and Y-axis guide rails are provided on both sides of the Y-axis screw pair; the bottom of the Y-axis base is connected to the slider in the X-axis guide rail and the nut in the X-axis screw pair.

[0009] As a further improvement of the present invention, the Y-axis driving device is a Y-axis driving motor, the Y-axis driving motor is installed on the Y-axis base, and the output shaft of the Y-axis driving motor is connected to the screw in the Y-axis screw pair through a coupling.

[0010] As a further improvement of the present invention, the X-axis screw pair is perpendicular to the Y-axis screw pair.

[0011] As a further improvement of the utility model, the two sides of the avoidance hole are mobile component installation areas, and four groups of CCD camera mobile components are installed on the platform seat, namely the first CCD camera mobile component, the second CCD camera mobile component, the third CCD camera mobile component, and the fourth CCD camera mobile component. The first CCD camera mobile component and the second CCD camera mobile component are located in the mobile component installation area on one side, and the third CCD camera mobile component and the fourth CCD camera mobile component are located in the mobile component installation area on the other side.

[0012] As a further improvement of the utility model, the first CCD camera moving assembly and the third CCD camera moving assembly are located on the top surface of the platform seat, and the second CCD camera moving assembly and the fourth CCD camera moving assembly are located on the bottom surface of the platform seat.

[0013] The positive effects of this application are:

[0014] The utility model can automatically adjust the position in the X and Y directions without manual intervention. The operation of finding the target position is simple. The target position is set in advance, and the CCD automatically moves to the center of the target, which shortens the time of finding the target and improves production efficiency. It also reduces the frequency of personnel entering the machine and reduces the dust generated by the body entering the machine, which leads to low product yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of the utility model.

[0016] Figure 1 In the embodiment, the platform seat 1, the X-axis driving module 2, the X-axis driving device 3, the Y-axis driving module 4, the Y-axis driving device 5, the camera mounting plate 6, the CCD camera 7, the CCD lens 8 and the like are included. DETAILED DESCRIPTION

[0017] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0018] In order to enable those skilled in the art to better understand the solution of the utility model, the following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

[0019] It should be noted that the terms "first", "second", etc. in the specification and claims of the utility model and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so as to describe the embodiments of the utility model described herein. In addition, similar terms such as "including" and "having" mean that in addition to those contents already listed in "including" and "having", other contents that have not been listed can also be "included" and "having"; for example, a process, method, system, product or device that can include a series of steps or units is not necessarily limited to those steps or units that have been clearly listed, but can include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0020] Due to the angle of the drawing, some components may not be drawn, but their positions and connection relationships can be partially understood based on the text expression.

[0021] like Figure 1 As shown, the utility model is a mask plate alignment target point automatic alignment system, comprising a platform seat 1, on which a CCD camera moving component is arranged.

[0022] The CCD camera moving assembly includes an X-axis driving module 2, which is driven by an X-axis driving device 3. A Y-axis driving module 4 is installed on the X-axis driving module 2, which is driven by a Y-axis driving device 5, and a CCD camera assembly is installed on the Y-axis driving module 4.

[0023] The X-axis driving module 2 includes an X-axis lead screw pair, and X-axis guide rails are arranged on both sides of the X-axis lead screw pair.

[0024] The X-axis driving device 3 is an X-axis driving motor, which is mounted on the platform seat 1 . The output shaft of the X-axis driving motor drives the screw in the X-axis screw pair to rotate through a coupling.

[0025] The Y-axis driving module 4 comprises a Y-axis base, on which a Y-axis screw pair is installed, and two sides of the Y-axis screw pair are provided with Y-axis guide rails. The bottom of the Y-axis base is connected with a slider in the X-axis guide rail and a nut in the X-axis screw pair.

[0026] The Y-axis driving device 5 is a Y-axis driving motor, which is mounted on the Y-axis base. The output shaft of the Y-axis driving motor drives the screw in the Y-axis screw pair to rotate through a coupling.

[0027] The X-axis screw pair is perpendicular to the Y-axis screw pair.

[0028] The CCD camera assembly comprises a camera mounting plate 6, which is connected with a slider in the Y-axis guide rail and a nut in the Y-axis screw rod pair. A CCD camera 7 is mounted on the camera mounting plate 6, and a CCD lens 8 is arranged on the CCD camera 7.

[0029] An avoidance hole is provided in the middle of the platform seat 1, and the CCD lens 8 is located in the avoidance hole, and both sides of the avoidance hole are mobile component installation areas. In this embodiment, four groups of CCD camera mobile components are installed on the platform seat 1, namely, the first CCD camera mobile component, the second CCD camera mobile component, the third CCD camera mobile component, and the fourth CCD camera mobile component. The first CCD camera mobile component and the second CCD camera mobile component are located in the mobile component installation area on one side, and the third CCD camera mobile component and the fourth CCD camera mobile component are located in the mobile component installation area on the other side. At the same time, in order to save space, the first CCD camera mobile component and the third CCD camera mobile component are located on the top surface of the platform seat 1, and the second CCD camera mobile component and the fourth CCD camera mobile component are located on the bottom surface of the platform seat 1.

[0030] The working process of the utility model is as follows:

[0031] When in use, the system is located below the first glass mask plate and the second glass mask plate. Position-matched target points are respectively arranged at the four corners of the first glass mask plate and the second glass mask plate. The target point of the first glass mask plate is a ring, and the target point of the second glass mask plate is a point.

[0032] First, the CCD lens 8 moves to the bottom of the dot-shaped target points at the four corners of the second glass mask, and then adjusts the position of the first glass mask until the dot-shaped target points at the four corners of the second glass mask are projected vertically to the center of the circular target points at the four corners of the first glass mask. After the CCD lens 8 recognizes the alignment of the first glass mask and the second glass mask, exposure begins.

[0033] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A mask plate target automatic alignment system, comprising a platform seat (1), characterized in that: A CCD camera moving assembly is provided on the platform seat (1); the CCD camera moving assembly comprises an X-axis driving module (2), the X-axis driving module (2) is driven by an X-axis driving device (3), a Y-axis driving module (4) is installed on the X-axis driving module (2), the Y-axis driving module (4) is driven by a Y-axis driving device (5), and a CCD camera assembly is installed on the Y-axis driving module (4); the CCD camera assembly comprises a camera mounting plate (6), the camera mounting plate (6) is connected to a slider in a Y-axis guide rail and a nut in a Y-axis lead screw pair; a CCD camera (7) is installed on the camera mounting plate (6), and a CCD lens (8) is provided on the CCD camera (7); an avoidance hole is opened in the middle of the platform seat (1), and the CCD lens (8) is located in the avoidance hole.

2. The automatic mask plate alignment target point alignment system according to claim 1, characterized in that: The X-axis drive module (2) comprises an X-axis screw pair, and X-axis guide rails are arranged on both sides of the X-axis screw pair.

3. The automatic mask plate alignment target point alignment system according to claim 2, characterized in that: The X-axis driving device (3) is an X-axis driving motor, and the X-axis driving motor is mounted on the platform seat (1).

4. The automatic mask plate alignment target point alignment system according to claim 2, characterized in that: The Y-axis drive module (4) comprises a Y-axis base, a Y-axis screw pair is mounted on the Y-axis base, and Y-axis guide rails are arranged on both sides of the Y-axis screw pair; the bottom of the Y-axis base is connected to a slider in the X-axis guide rail and a nut in the X-axis screw pair.

5. The automatic mask plate alignment target point alignment system according to claim 4, characterized in that: The Y-axis driving device (5) is a Y-axis driving motor, which is mounted on the Y-axis base. The output shaft of the Y-axis driving motor is connected to the lead screw in the Y-axis lead screw pair via a coupling.

6. The automatic mask plate alignment target point alignment system according to claim 1, characterized in that: The X-axis screw pair is perpendicular to the Y-axis screw pair.

7. The automatic mask plate alignment target point alignment system according to claim 1, characterized in that: Both sides of the avoidance hole are mobile component installation areas. Four groups of CCD camera mobile components are installed on the platform seat (1), namely a first CCD camera mobile component, a second CCD camera mobile component, a third CCD camera mobile component, and a fourth CCD camera mobile component. The first CCD camera mobile component and the second CCD camera mobile component are located in the mobile component installation area on one side, and the third CCD camera mobile component and the fourth CCD camera mobile component are located in the mobile component installation area on the other side.

8. The automatic mask target alignment system according to claim 7, characterized in that: The first CCD camera moving assembly and the third CCD camera moving assembly are located on the top surface of the platform seat (1), and the second CCD camera moving assembly and the fourth CCD camera moving assembly are located on the bottom surface of the platform seat (1).

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