Vacuum flat tube

Abstract

The utility model belongs to the field of manufacturing of isotope mass spectrometers in analytical instruments, particularly relates to a vacuum flat tube, and aims to solve the problems of insufficient structural strength, low space utilization rate and easiness in deformation in an ultrahigh vacuum environment in the design of a pipeline in the prior art, particularly meet the requirement of large-mass dispersion, and improve the production efficiency. And the cavity compactness and the processing cost are difficult to consider at the same time. According to the device, an inlet connecting piece is installed at an outlet of a deflection pipeline and fixed to one end of a flat pipe, one end of the flat pipe is communicated with the outlet of the deflection pipeline, the other end of the flat pipe is fixed to an outlet connecting piece, and the outlet connecting piece is installed on a receiver; the width of the flat pipe is gradually increased from the end close to the inlet connecting piece to the end close to the outlet connecting piece. According to the utility model, the structural strength is high, the pipeline with gradually increased width is matched with the scattered ion flow flight path, the requirement of large dispersion mass dispersion spacing is met, and the whole design and process have the advantages of less welding and difficult deformation.

Description

Technical Field

[0001] The utility model belongs to the field of manufacturing isotope mass spectrometers in analytical instruments, and specifically relates to a vacuum flat tube. Background Art

[0002] A mass spectrometer is an instrument that ionizes the sample to be tested, separates the mass-to-charge ratio (m / z) through a magnetic mass analyzer, and amplifies and processes the separated ion flow signals to determine the mass and content of the substance. The sample ionization and sample ion flight need to be carried out in a high vacuum environment. Therefore, the mass spectrometer needs to provide a vacuum pipeline for the ion flow flight, which includes an ion source pipeline, a mass analyzer deflection pipeline, and a receiving end pipeline.

[0003] According to the design requirements of different instruments, pipelines are usually made of stainless steel of different materials. The shapes of the flat tubes at the receiver end of the prior art are generally round, flat, or a combination of round and flat. The receiving end pipeline often uses a cylindrical pipeline with the same radius at both ends. The structural strength of the circular pipeline is high, but it has not been made into a trumpet-shaped variable diameter shape. At the same time, the large mass dispersion spacing of the same width, the flight cavity space of the circular pipeline is large. In addition, the flat pipeline of the prior art uses the same inlet and outlet width, and is welded with two upper and lower cover plates and supporting side strips. The structural strength is weak and the space is large.

[0004] The above two methods are characterized by easy processing and low price. There is also a technology to flatten the middle part of the circular pipe. This technology requires customized tooling. At the same time, the general material is pure copper. Due to the material and pressing, the middle part has no support. In an ultra-high vacuum environment, it is easy to deform and the structural strength is slightly weak. The spacing between the ion flows at the outlet and inlet of the deflected flat tube is small, and the outlet end, that is, the receiving end, is where the ion flows gradually separate. The mass spectrometer with large mass dispersion (the receiving spacing between the two ion flows) requires a wider pipe, and the wider pipe increases the volume of the flight cavity, which has a greater impact on the vacuum pumping speed and the instrument structure.

[0005] Based on this, the utility model provides a vacuum flat tube. Utility Model Content

[0006] In order to solve the above problems in the prior art, namely, the pipeline design in the prior art has the problems of insufficient structural strength, low space utilization and easy deformation in an ultra-high vacuum environment, especially the problem of difficulty in taking into account the compactness of the cavity and the processing cost while meeting the requirements of large mass dispersion, the utility model provides a vacuum flat tube, including an inlet connector, a flat tube and an outlet connector;

[0007] The inlet connector is installed at the outlet of the deflection pipeline, the inlet connector is fixed to one end of the flat tube, one end of the flat tube is connected to the outlet of the deflection pipeline, the other end of the flat tube is fixed to the outlet connector, and the outlet connector is installed on the receiver;

[0008] The width of the flat tube gradually increases from an end close to the inlet connector to an end close to the outlet connector;

[0009] The flat tube is composed of a shell and a flat tube cover plate, and an ion beam channel is arranged between the shell and the flat tube cover plate.

[0010] In some preferred embodiments, the inlet connector comprises an inlet flange, and the inlet flange is a blind hole flange.

[0011] In some preferred embodiments, the outlet connector includes an outlet flange, and the outlet flange is a blind hole flange.

[0012] In some preferred embodiments, the inlet connector is fixed to one end of the flat tube, and its specific structure is as follows:

[0013] The inlet connector is provided with a first countersunk hole, in which one end of a flat tube is installed and fixed, and the shape of the first countersunk hole matches the shape of the one end of the flat tube.

[0014] In some preferred embodiments, the other end of the flat tube is fixed to the outlet connector, and its specific structure is as follows:

[0015] The outlet connector is provided with a second countersunk hole, in which the other end of the flat tube is installed and fixed, and the shape of the second countersunk hole matches the shape of the other end of the flat tube.

[0016] In some preferred embodiments, the flat tube includes a shell, a flat tube bottom groove, a cover plate groove and a flat tube cover plate;

[0017] The shell is provided with a cover plate groove, the cover plate groove is provided with a flat tube bottom groove, the flat tube bottom groove is a channel for the ion beam, and the cover plate groove is provided with a flat tube cover plate.

[0018] In some preferred embodiments, the height of the flat tube bottom groove is greater than the height of the ion beam.

[0019] In some preferred embodiments, the width of the flat tube bottom groove at the entrance is greater than the ion beam spacing at the entrance.

[0020] In some preferred embodiments, the width of the flat tube bottom groove at the outlet is greater than the ion beam spacing at the outlet.

[0021] In some preferred embodiments, the inlet connector is installed at the outlet of the deflection pipe and the outlet connector is installed on the receiver, and the specific structure is:

[0022] The inlet flange is connected to the outlet flange of the deflection pipe; and the outlet flange is mounted on the receiver flange.

[0023] Beneficial effects of the utility model:

[0024] The middle of the vacuum flat tube is a flat tube, and the cavity space formed by it is smaller than that of the circular tube. The bottom groove of the flat tube is processed in an integrated manner, and the structural strength is high. The gradually increasing width of the tube matches the flight trajectory of the scattered ion flow. While satisfying the requirements of having a small cavity space and structural strength, it realizes the receiving function of the large mass dispersion distance ion flow and meets the requirements of large dispersion mass dispersion spacing.

[0025] The bell-mouth flat tube of the utility model can be designed according to the specific spacing of the large mass dispersion, which minimizes the cavity space. At the same time, the bottom groove of the flat tube adopts high-precision processing technology, which is formed in one time and is not easy to flatten. There is a notch on the upper part, and the upper mirror stainless steel cover plate is directly placed in the notch for welding. The whole design and process have less welding, are not easy to deform, and have high strength. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Other features, objects and advantages of the present application will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:

[0027] Figure 1 This is a schematic diagram of the overall structure of a vacuum flat tube of the utility model;

[0028] Figure 2 It is a schematic diagram of an inlet connector in a vacuum flat tube of the utility model;

[0029] Figure 3 It is a schematic diagram of an outlet connector in a vacuum flat tube of the utility model;

[0030] Figure 4 This is a structural schematic diagram of a flat tube cover plate in a vacuum flat tube of the utility model;

[0031] Figure 5 This is a structural schematic diagram of a flat tube bottom groove in a vacuum flat tube of the utility model;

[0032] Figure 6 The utility model is a cross-sectional schematic diagram of a flat tube in a vacuum flat tube. DETAILED DESCRIPTION

[0033] The present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the relevant utility model, rather than to limit the utility model. It is also necessary to explain that, for ease of description, only the parts related to the relevant utility model are shown in the accompanying drawings.

[0034] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0035] like Figure 1-Figure 6 For details, see Figure 1 The utility model provides a vacuum flat tube, comprising an inlet connector 1, a flat tube 2 and an outlet connector 3;

[0036] The inlet connector 1 is installed at the outlet of the deflection pipeline, the inlet connector 1 is fixed to one end of a flat tube 2, one end of the flat tube 2 is connected to the outlet of the deflection pipeline, the other end of the flat tube 2 is fixed to an outlet connector 3, and the outlet connector 3 is installed on the receiver;

[0037] The width of the flat tube 2 gradually increases from the end close to the inlet connector 1 to the end close to the outlet connector 3;

[0038] The flat tube 2 is composed of a shell 21 and a flat tube cover plate 24 , and an ion beam channel is provided between the shell 21 and the flat tube cover plate 24 .

[0039] Among them, see Figure 2 The inlet connector 1 includes an inlet flange, which is a blind hole flange; the outlet connector 3 includes an outlet flange, which is a blind hole flange.

[0040] Among them, see Figure 3 , the inlet connector 1 is installed at the outlet of the deflection pipe and the outlet connector 3 is installed on the receiver, and its specific structure is:

[0041] The inlet flange is connected to the outlet flange of the deflection pipe; and the outlet flange is mounted on the receiver flange.

[0042] Among them, the principle of the utility model is: according to the principle of mass spectrometer, that is, after the ion flow of the substance to be measured passes through the electromagnetic field, the ion flow is separated according to the mass-to-charge ratio. According to the principle of ion optical focusing, the separated multiple beams of ion flow must pass through the length of the exit arm and then be focused separately. The multiple isotope ion beams coming out of the electromagnetic field are scattered, and the spacing between ion flows becomes larger and larger until they reach the receiver. Therefore, the designed receiving end vacuum flat tube structure adopts a structure with gradually increasing width. The inlet end adopts an inlet flange with a smaller radius, the outlet end adopts an outlet flange with a larger radius, and a trapezoidal flat tube is adopted in the middle, and the overall adaptation gradually increases the spacing requirements.

[0043] For further explanation of the present invention, see Figure 1 and Figure 2 The inlet connector 1 is fixed to one end of the flat tube 2, and its specific structure is as follows:

[0044] The inlet connector 1 is provided with a first countersunk hole 11 , in which one end of the flat tube 2 is installed and fixed, and the shape of the first countersunk hole 11 matches the shape of one end of the flat tube 2 .

[0045] Wherein, the inlet flange matches the outlet flange of the deflection pipe. Figure 2 As shown. The inlet flange uses a blind flange as a basis, and a rectangular through hole (first countersunk hole 11) is opened in the middle of the blind flange. The height and width of the first countersunk hole 11 match the flat tube 2.

[0046] For further explanation of the present invention, see Figure 1 and Figure 3 The other end of the flat tube 2 is fixed to the outlet connector 3, and its specific structure is as follows:

[0047] The outlet connector 3 is provided with a second countersunk hole 31 , in which the other end of the flat tube 2 is installed and fixed, and the shape of the second countersunk hole 31 matches the shape of the other end of the flat tube 2 .

[0048] Wherein, the outlet flange matches the receiver flange. Figure 3 As shown. The outlet flange uses a blind flange as a basis, and a rectangular through hole (second countersunk hole 31) is opened in the middle of the blind flange. The height and width of the second countersunk hole 31 match the flat tube 2.

[0049] For further explanation of the present invention, see Figure 4 , Figure 5 and Figure 6 The flat tube 2 includes a shell 21, a flat tube bottom groove 22, a cover plate groove 23 and a flat tube cover plate 24;

[0050] The housing 21 is provided with a cover plate groove 23 , and a flat tube bottom groove 22 is provided on the cover plate groove 23 . The flat tube bottom groove 22 is a passage for the ion beam, and a flat tube cover plate 24 is installed on the cover plate groove 23 .

[0051] The flat tube cover is made of 2 mm stainless steel. Figure 4 The size matches the cover plate slot 23.

[0052] In the flat tube 2, the flat tube bottom groove 22 and the cover plate groove 23 together form a concave shape, which is made of stainless steel and processed in one piece, and the bottom thickness is 2 mm.

[0053] For further explanation of the present invention, see Figure 4 , Figure 5 and Figure 6 The height of the flat tube bottom groove 22 is greater than the height of the ion beam; the width of the flat tube bottom groove 22 at the entrance is greater than the ion beam spacing at the entrance; the width of the flat tube bottom groove 22 at the exit is greater than the ion beam spacing at the exit.

[0054] In this embodiment, the housing 21, the flat tube bottom groove 22, and the cover plate groove 23 are formed by one-time processing of large stainless steel materials. The flat tube cover plate 24 is placed in the cover plate groove 23 for welding, and the inlet end of the welded assembly is placed in the first countersunk hole 11 of the inlet flange and welded, and the outlet end is placed in the second countersunk hole 31 of the outlet flange and welded. After the overall welding is completed, a helium mass spectrometer is used to detect leaks to ensure that it meets the high vacuum requirements.

[0055] In the description of the present invention, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicating directions or positional relationships are based on the directions or positional relationships shown in the drawings, which are only for the convenience of description, and do not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0056] In addition, it should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0057] The term "comprise" or any other similar term is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus / device that includes a list of elements includes not only those elements but also other elements not expressly listed, or also includes elements inherent to such process, method, article, or apparatus / device.

[0058] So far, the technical solution of the utility model has been described in conjunction with the preferred embodiments shown in the accompanying drawings, but it is easy for those skilled in the art to understand that the protection scope of the utility model is obviously not limited to these specific embodiments. Without departing from the principle of the utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will fall within the protection scope of the utility model.

Claims

1. A vacuum flat tube, characterized in that: It comprises an inlet connector (1), a flat tube (2) and an outlet connector (3); The inlet connector (1) is installed at the outlet of the deflection pipeline, the inlet connector (1) is fixed to one end of the flat tube (2), one end of the flat tube (2) is connected to the outlet of the deflection pipeline, the other end of the flat tube (2) is fixed to the outlet connector (3), and the outlet connector (3) is installed on the receiver; The width of the flat tube (2) gradually increases from an end close to the inlet connector (1) to an end close to the outlet connector (3); The flat tube (2) is composed of a shell (21) and a flat tube cover plate (24), and an ion beam channel is provided between the shell (21) and the flat tube cover plate (24).

2. A vacuum flat tube according to claim 1, characterized in that: The inlet connector (1) comprises an inlet flange, which is a blind hole flange.

3. A vacuum flat tube according to claim 2, characterized in that: The outlet connecting piece (3) comprises an outlet flange, and the outlet flange is a blind hole flange.

4. The vacuum flat tube according to claim 1, characterized in that: The inlet connector (1) is fixed to one end of the flat tube (2), and its specific structure is as follows: The inlet connector (1) is provided with a first countersunk hole (11), one end of a flat tube (2) is installed and fixed in the first countersunk hole (11), and the shape of the first countersunk hole (11) matches the shape of one end of the flat tube (2).

5. The vacuum flat tube according to claim 1, characterized in that: The other end of the flat tube (2) is fixed to the outlet connector (3), and its specific structure is as follows: The outlet connection piece (3) is provided with a second countersunk hole (31), in which the other end of the flat tube (2) is installed and fixed, and the shape of the second countersunk hole (31) matches the shape of the other end of the flat tube (2).

6. The vacuum flat tube according to claim 1, characterized in that: The flat tube (2) comprises an outer shell (21), a flat tube bottom groove (22), a cover plate groove (23) and a flat tube cover plate (24); The housing (21) is provided with a cover plate groove (23), the cover plate groove (23) is provided with a flat tube bottom groove (22), the flat tube bottom groove (22) is a passage for the ion beam, and a flat tube cover plate (24) is mounted on the cover plate groove (23).

7. The vacuum flat tube according to claim 6, characterized in that: The height of the flat tube bottom groove (22) is greater than the height of the ion beam.

8. The vacuum flat tube according to claim 6, characterized in that: The width of the flat tube bottom groove (22) at the entrance is greater than the ion beam spacing at the entrance.

9. The vacuum flat tube according to claim 6, characterized in that: The width of the flat tube bottom groove (22) at the outlet is greater than the ion beam spacing at the outlet.

10. The vacuum flat tube according to claim 3, characterized in that: The inlet connector (1) is installed at the outlet of the deflection pipe and the outlet connector (3) is installed on the receiver. The specific structure is as follows: The inlet flange is connected to the outlet flange of the deflection pipe; and the outlet flange is mounted on the receiver flange.

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