Aluminum wafer box type annealing furnace

Abstract

The utility model discloses an aluminum wafer box type annealing furnace which comprises a bottom plate, a conveying belt is arranged on one side of the bottom plate, an annealing furnace main body is fixedly installed at the top of the bottom plate, a workbench is fixedly installed in the annealing furnace main body, an opening and closing assembly is arranged outside the annealing furnace main body, and the opening and closing assembly is fixedly installed on the bottom plate. A moving assembly is arranged at the top of the bottom plate, a rotating assembly is arranged at the top of the bottom plate, a shell is arranged at the top of the bottom plate, a clamping assembly is arranged in the shell, and an arranged telescopic rod is slidably connected into the telescopic rod, so that the stability is higher when clamping plates clamp aluminum wafers; through the arrangement of the structure, workers can conveniently take out annealed aluminum wafers, the defects that workers need to conduct manual discharging and need to bear high-temperature discomfort in the prior art are overcome, safety is higher, and use of the workers is greatly facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of aluminum disc annealing furnaces, in particular to an aluminum disc box annealing furnace. Background Art

[0002] Annealing furnaces are a process used in semiconductor device manufacturing that involves heating multiple semiconductor wafers to affect their electrical properties. Thermal treatments are designed for different effects. Wafers can be heated to activate dopants, convert thin films to thin films or to the wafer substrate interface, densely deposit thin films, change the state of growing thin films, repair implanted damage, move dopants or transfer dopants from one film to another or from a thin film into the wafer substrate.

[0003] When annealing aluminum discs, most of the existing aluminum disc box annealing furnaces are manually loaded and unloaded. When unloading the aluminum discs, due to the high temperature of the aluminum discs, the workers need to endure the high temperature and use professional tools to take the aluminum discs out of the annealing furnace. If an accident occurs when the workers are taking them out, the high-temperature aluminum discs will contact the workers' bodies, which will cause damage to the workers' health and be inconvenient for the workers to use. For this reason, we have proposed an aluminum disc box annealing furnace. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides an aluminum disc box-type annealing furnace for solving the above problems.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A box-type annealing furnace for aluminum discs comprises a bottom plate, a conveyor belt is arranged on one side of the bottom plate, an annealing furnace body is fixedly installed on the top of the bottom plate, a workbench is fixedly installed inside the annealing furnace body, an opening and closing component is arranged outside the annealing furnace body, a moving component is arranged on the top of the bottom plate, a rotating component is arranged on the top of the bottom plate, a shell is arranged on the top of the bottom plate, and a clamping component is arranged inside the shell.

[0007] Preferably, the opening and closing assembly comprises a sealing door movably plugged into the top of the annealing furnace body, connecting plates are fixedly connected to both sides of the sealing door, telescopic cylinders are fixedly installed on both sides of the annealing furnace body, and the output ends of the two telescopic cylinders are fixedly connected to the bottom of the connecting plate. The annealing furnace body can be opened by setting the opening and closing assembly.

[0008] Preferably, the moving component includes two symmetrically distributed slide rails fixedly connected to the top of the base plate, the outer parts of the two slide rails are slidably connected to electric slides, and the tops of the two electric slides are fixedly connected to the same fixed plate. The shell can be moved by setting the moving component.

[0009] Preferably, the rotating assembly includes a servo motor fixedly mounted on the top of the fixed plate, and the bottom of the housing is fixedly connected to the output end of the servo motor.

[0010] Preferably, the clamping assembly includes clamping cylinders fixedly mounted on both sides of the shell, the clamping cylinders extend into the interior of the shell, and the output ends of the clamping cylinders are fixedly connected to clamping plates, and the aluminum discs can be clamped by the provided clamping assembly.

[0011] Preferably, telescopic sleeves are fixedly installed on both sides of the shell, and the telescopic sleeves extend to the interior of the shell. A telescopic rod is slidably connected to the interior of the telescopic sleeve. The telescopic rod is fixedly connected to one side of the splint, and the telescopic rod is slidably connected to the interior of the telescopic rod, so that the splint has higher stability when clamping the aluminum disc.

[0012] Compared with the prior art, the beneficial effect of the utility model is as follows: when it is necessary to take out the aluminum disc inside the annealing furnace main body, the telescopic cylinder is first started. At this time, the output end of the telescopic cylinder drives the connecting plate and the sealing door to start moving, and then the electric slide is started, and then the electric slide slides on the slide rail. Through the movement of the electric slide, the fixed plate, the servo motor and the shell can be driven to move. At this time, the shell moves to the inside of the annealing furnace main body, and the clamping cylinder is started. The output end of the clamping cylinder drives the clamping plate to move. At this time, the clamping plate can clamp and fix the aluminum disc, and then the electric slide is started to keep the aluminum disc away from the annealing furnace main body. At this time, the servo motor is started, and the output end of the servo motor drives the shell to rotate. The clamping cylinder is closed, and the aluminum disc can be placed on the conveyor belt. Through the above structure, it is convenient for the staff to take out the annealed aluminum disc, avoiding the traditional disadvantages of requiring the staff to manually unload materials and requiring the staff to endure high temperature discomfort. It is safer and greatly convenient for the staff to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0014] Figure 2 It is a schematic diagram of the structure of the utility model in cross section;

[0015] Figure 3 It is a schematic diagram of the structure of a partial section of the utility model.

[0016] In the figure: 1. bottom plate; 2. conveyor belt; 3. annealing furnace body; 4. telescopic cylinder; 5. connecting plate; 6. sealing door; 7. slide rail; 8. electric slide; 9. fixing plate; 10. servo motor; 11. housing; 12. clamping cylinder; 13. clamping plate; 14. telescopic sleeve; 15. telescopic rod; 16. workbench. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] Example: Refer to Figure 1-3 A box-type annealing furnace for aluminum discs comprises a bottom plate 1, a conveyor belt 2 is arranged on one side of the bottom plate 1, an annealing furnace body 3 is fixedly installed on the top of the bottom plate 1, a workbench 16 is fixedly installed inside the annealing furnace body 3, and an opening and closing component is arranged outside the annealing furnace body 3, the opening and closing component comprises a sealing door 6 movably plugged into the top of the annealing furnace body 3, connecting plates 5 are fixedly connected on both sides of the sealing door 6, telescopic cylinders 4 are fixedly installed on both sides of the annealing furnace body 3, and the output ends of the two telescopic cylinders 4 are fixedly connected to the bottom of the connecting plate 5. The annealing furnace body 3 can be opened by setting the opening and closing component.

[0019] Specifically, a moving component is provided on the top of the base plate 1, and the moving component includes two symmetrically distributed slide rails 7 fixedly connected to the top of the base plate 1. The outsides of the two slide rails 7 are slidably connected to electric slides 8, and the tops of the two electric slides 8 are fixedly connected to the same fixed plate 9. The shell 11 can be moved by setting the moving component.

[0020] Specifically, a rotating assembly is disposed on the top of the base plate 1 , and the rotating assembly includes a servo motor 10 fixedly mounted on the top of the fixed plate 9 , and the bottom of the housing 11 is fixedly connected to the output end of the servo motor 10 .

[0021] Specifically, a shell 11 is provided on the top of the base plate 1, and a clamping assembly is provided inside the shell 11. The clamping assembly includes a clamping cylinder 12 fixedly installed on both sides of the shell 11. The clamping cylinder 12 extends into the interior of the shell 11, and the output end of the clamping cylinder 12 is fixedly connected to a clamping plate 13. The aluminum disc can be clamped by the set clamping assembly.

[0022] Specifically, telescopic sleeves 14 are fixedly installed on both sides of the shell 11, and the telescopic sleeves 14 extend to the interior of the shell 11. The interior of the telescopic sleeve 14 is slidably connected with a telescopic rod 15, and the telescopic rod 15 is fixedly connected to one side of the clamping plate 13. The telescopic rod 15 is slidably connected to the interior of the telescopic rod 15, so that the clamping plate 13 has higher stability when clamping the aluminum disc.

[0023] During use: when it is necessary to take out the aluminum disc inside the annealing furnace body 3, first start the telescopic cylinder 4. At this time, the output end of the telescopic cylinder 4 drives the connecting plate 5 and the sealing door 6 to start moving. At this time, start the electric slide 8, and then the electric slide 8 slides on the slide rail 7. Through the movement of the electric slide 8, the fixed plate 9, the servo motor 10 and the shell 11 can be driven to move. At this time, the shell 11 moves to the inside of the annealing furnace body 3. At this time, start the clamping cylinder 12, and the output end of the clamping cylinder 12 drives the clamping plate 13 to move. At this time, the clamping plate 13 can clamp and fix the aluminum disc. At this time, start the electric slide 8 to keep the aluminum disc away from the annealing furnace body 3. At this time, start the servo motor 10, and the output end of the servo motor 10 drives the shell 11 to rotate. Close the clamping cylinder 12, and the aluminum disc can be placed on the conveyor belt 2. Through the above structure, it is convenient for the staff to take out the annealed aluminum disc, avoiding the traditional need for the staff to manually unload the material, and the need for the staff to endure the disadvantages of high temperature discomfort. It is safer and greatly convenient for the staff to use.

[0024] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0025] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A box-type annealing furnace for aluminum wafers, comprising a bottom plate (1), characterized in that: A conveyor belt (2) is arranged on one side of the bottom plate (1), an annealing furnace body (3) is fixedly installed on the top of the bottom plate (1), a workbench (16) is fixedly installed inside the annealing furnace body (3), an opening and closing component is arranged outside the annealing furnace body (3), a moving component is arranged on the top of the bottom plate (1), a rotating component is arranged on the top of the bottom plate (1), a shell (11) is arranged on the top of the bottom plate (1), and a clamping component is arranged inside the shell (11).

2. The aluminum wafer box annealing furnace according to claim 1, characterized in that: The opening and closing assembly comprises a sealing door (6) movably plugged into the top of the annealing furnace body (3), both sides of the sealing door (6) are fixedly connected to connecting plates (5), and both sides of the annealing furnace body (3) are fixedly installed with telescopic cylinders (4), and the output ends of the two telescopic cylinders (4) are fixedly connected to the bottom of the connecting plate (5).

3. The aluminum wafer box annealing furnace according to claim 1, characterized in that: The moving assembly comprises two symmetrically distributed slide rails (7) fixedly connected to the top of the base plate (1); the exteriors of the two slide rails (7) are slidably connected to electric slide platforms (8); and the tops of the two electric slide platforms (8) are fixedly connected to the same fixed plate (9).

4. The aluminum wafer box annealing furnace according to claim 3, characterized in that: The rotating assembly comprises a servo motor (10) fixedly mounted on the top of a fixed plate (9), and the bottom of the housing (11) is fixedly connected to the output end of the servo motor (10).

5. The aluminum wafer box annealing furnace according to claim 1, characterized in that: The clamping assembly comprises a clamping cylinder (12) fixedly mounted on both sides of a housing (11), wherein the clamping cylinder (12) extends into the interior of the housing (11), and an output end of the clamping cylinder (12) is fixedly connected to a clamping plate (13).

6. The aluminum wafer box annealing furnace according to claim 5, characterized in that: Telescopic sleeves (14) are fixedly mounted on both sides of the shell (11), the telescopic sleeves (14) extend into the interior of the shell (11), a telescopic rod (15) is slidably connected to the interior of the telescopic sleeve (14), and the telescopic rod (15) is fixedly connected to one side of the clamping plate (13).

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