Binding-unbinding and recycling device for alloy rotating target

Abstract

The utility model relates to the field of target material preparation, and provides an alloy rotating target unbinding and recycling device which comprises a support and a rotating mechanism. An open cavity is formed in the support, the rotating mechanism is arranged in the cavity and used for clamping and rotating the rotating target material, and the shell is used for sealing the cavity and comprises a cover body for sealing the upper side of the cavity and a baffle for sealing the side face of the cavity; and a heating element is arranged in the cover body. Through reasonable design, the device not only can unbind a rotary target material which is integrally formed through casting, but also can avoid the situation that when some toxic precious metal target materials are unbound, metal elements of the target materials enter a working environment at will, and consequently a worker feels uncomfortable.

Description

Technical Field

[0001] The utility model relates to the field of target material preparation, in particular to an alloy rotary target unbinding and recovery device. Background Art

[0002] Rotating targets are made of high-purity metals or compounds and are typically used in processes such as thin film deposition, evaporation, and sputtering.

[0003] Sputtering technology is a technology that uses particles with a certain amount of energy to bombard the surface of a solid to sputter out its atoms or molecules. The sputtered solid is usually called a target, and the sputtered atoms or molecules will fall on another solid surface to form a coating. The coated solid is usually called a substrate. Usually, the target is bound to a backplane for use. With the development of science and technology, the size of sputtering components is getting larger and larger, but it is quite difficult and expensive to prepare a single large-size target. The current mainstream alternative method is to prepare large-size targets by splicing multiple pieces of target materials, that is, on a large backplane, multiple pieces of target materials are bound and spliced ​​to form a large-size sputtering component. The commonly used binding solder is indium. However, on some specific targets, rotating targets can also be produced by casting in one piece, because it can increase production capacity and reduce manufacturing costs.

[0004] CN202211279015.7 discloses a rotating target unbinding device, including a bottom plate and a first vertical plate, the bottom plate and the first vertical plate are connected together, the bottom plate and the first vertical plate are perpendicular to each other and form an L shape; a slide rail is arranged on the top surface of the bottom plate, a slide bracket is arranged on the slide rail and slides with it, a first clamping shaft for fixing one end of the target is arranged on the slide bracket, and a first motor for controlling the rotation of the first clamping shaft is arranged at the end of the first clamping shaft away from the target; a second clamping shaft for fixing the other end of the target is arranged at the center of the top surface of the first vertical plate, the target is placed between the first clamping shaft and the second clamping shaft, a heater is arranged at the lower end of the rotating target, and a support cylinder for controlling the lifting of the heater is arranged between the heater and the bottom plate. The unbinding device is mainly suitable for rotating targets that use indium to bind back tubes and targets, and is not suitable for rotating targets that are integrally formed by casting.

[0005] Based on this, the technical problem solved in this case is: how to solve the problem that the existing unbinding equipment cannot unbind the rotating target material that is integrally formed by casting. Utility Model Content

[0006] In order to solve the above technical problems, the utility model provides an alloy rotary target unbinding and recovery device. Through reasonable design, the device can not only unbind the rotary target materials formed in one piece by casting, but also avoid the situation in which the metal elements of some toxic precious metal targets enter the working environment at will and cause physical discomfort to the staff when unbinding.

[0007] The technical solution of the utility model is:

[0008] A device for unbinding and recovering an alloy rotating target comprises a bracket and a rotating mechanism; an open cavity is provided in the bracket, the rotating mechanism is arranged in the cavity and is used to clamp and rotate the rotating target material, and also comprises a shell that closes the cavity, the shell comprises a cover body on the upper side of the closed cavity and a baffle on the side of the closed cavity; a heating element is arranged in the cover body.

[0009] In the above alloy rotary target unbinding and recovery device, an air inlet for inputting inert gas and an air outlet for discharging waste gas are provided in the cavity.

[0010] In the above alloy rotating target unbinding and recovery device, the air inlet and the air outlet are arranged relatively on both sides of the bracket; the air inlet is connected to the external air supply device; the air outlet is connected to the external exhaust gas treatment device.

[0011] The above alloy rotary target unbinding and recovery device further comprises a material receiving mechanism, which is arranged in the bracket and closes the lower side of the cavity.

[0012] In the above alloy rotary target unbinding and recovery device, the material collecting mechanism includes a plurality of collecting boxes; the plurality of collecting boxes jointly seal the lower side of the cavity.

[0013] In the above alloy rotary target unbinding and recovery device, a plurality of rollers are provided below the collecting box; the plurality of rollers are universal wheels.

[0014] In the above-mentioned alloy rotating target unbinding and recovery device, the rotating mechanism includes a base arranged on the bracket, a rotating shaft arranged on the base, and a driving assembly arranged on the base; the outer circumference of the rotating shaft matches the inner circumference of the rotating target material; and the driving assembly is used to drive the rotating shaft to rotate.

[0015] In the above alloy rotary target unbinding and recovery device, the upper end surface of the cover body is provided with a handle for convenient opening and closing by the staff.

[0016] In the above-mentioned alloy rotary target unbinding and recovery device, the outer side of the handle is wrapped with a heat insulating material.

[0017] In the above alloy rotary target unbinding and recovery device, the cavity has a structure that is wide at the top and narrow at the bottom and gradually narrows from the top to the bottom.

[0018] One of the above technical solutions of the utility model has at least one of the following advantages or beneficial effects:

[0019] The utility model designs an open cavity in the bracket, then clamps the rotating target material through the rotating mechanism in the cavity and arranges the heating element on the cover body on the upper side of the closed cavity. On the one hand, the rotating target material is heated and directly falls off from the lower side of the cavity during unbinding, so that it is convenient to collect the target material fragments. On the other hand, the rotating target material can be continuously rotated during unbinding so that the heating of each part of the target material is more uniform. In addition, a highly sealed space can be created and inert gas can be introduced to prevent the discharge of toxic precious metal gas and the oxidation of the target material to affect the reuse. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a front view of embodiment 1 of the utility model;

[0021] Figure 2 It is a top view of embodiment 1 of the present utility model.

[0022] In the figure: 1. bracket; 2. rotating mechanism; 3. shell; 4. cavity; 5. material collecting mechanism; 21. base; 22. rotating shaft; 23. driving assembly; 31. cover; 32. baffle; 51. collecting box; 311. heating element; 312. handle. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Example 1

[0025] See also Figure 1 , 2 A device for unbinding and recovering an alloy rotating target comprises a bracket 1 and a rotating mechanism 2; the bracket 1 is provided with an open cavity 4, the rotating mechanism 2 is arranged in the cavity 4 and is used to clamp and rotate the rotating target, and also comprises a shell 3 for enclosing the cavity 4, the shell 3 comprises a cover body 31 on the upper side of the enclosed cavity 4 and a baffle 32 on the side of the enclosed cavity 4; a heating element 311 is arranged in the cover body 31.

[0026] In this embodiment, an open cavity 4 is designed in the bracket 1, and then the rotating target is clamped by the rotating mechanism 2 in the cavity 4 and the heating element 311 is arranged on the cover 31 on the upper side of the closed cavity 4. On the one hand, when unbundling, the rotating target is heated and falls directly from the lower side of the cavity 4, so that it is convenient to collect the target fragments. On the other hand, when unbundling, the rotating target can be continuously rotated to make the target heated more evenly. In addition, a highly sealed space can be created and inert gas can be introduced to prevent the discharge of toxic precious metal gases and the oxidation of the target to affect its reuse.

[0027] As a preference of this embodiment, in order to prevent the emission of toxic noble metal gas and avoid the target material from being oxidized and affecting the reuse, a gas inlet for inputting argon gas and a gas outlet for discharging waste gas are provided in the cavity 4 .

[0028] As a further preference of this embodiment, the air inlet and the air outlet are arranged relatively on two sides of the bracket 1; the air inlet is connected to an external air supply device; and the air outlet is connected to an external exhaust gas treatment device.

[0029] It should be noted that, in order to prevent the cover body 31 from flipping up and down and affecting the smoothness of the air intake duct, the air inlet and the air outlet are arranged on the cover body 31 in this embodiment.

[0030] Under the above-mentioned preference, argon gas can flow evenly and continuously on the surface of the rotating target to further prevent its oxidation.

[0031] In this embodiment, in order to facilitate the workers to collect the target material fragments, a material collecting mechanism 5 is also included. The material collecting mechanism 5 is arranged in the bracket 1 and closes the lower side of the cavity 4.

[0032] Specifically, the material receiving mechanism 5 includes three collecting boxes 51 ; the three collecting boxes 51 together seal the lower side of the cavity 4 .

[0033] Under the above design, three collecting boxes 51 can independently collect target fragments. Compared with collecting in one collecting box 51 , the three collecting boxes 51 can reduce the overall weight of a single collecting box 51 , thereby facilitating the carrying of workers.

[0034] More specifically, four rollers 511 are provided below the collection box 51 ; the four rollers 511 are universal wheels.

[0035] In this embodiment, in order to further facilitate the workers to carry, clean and reuse the target material fragments, the roller 511 is designed to reduce the labor intensity of the workers.

[0036] In this embodiment, the rotating mechanism 2 includes a base 21 arranged on the bracket 1, a rotating shaft 22 arranged on the base 21, and a driving assembly 23 arranged on the base 21; the outer periphery of the rotating shaft 22 matches the inner periphery of the rotating target; the driving assembly 23 is used to drive the rotating shaft 22 to rotate.

[0037] In this embodiment, it should be noted that the base 21 of the rotating mechanism 2 can move on the bracket 1 to clamp or release the rotating target.

[0038] As a preference of this embodiment, a handle 312 is provided on the upper end surface of the cover body 31 for facilitating opening and closing by the staff.

[0039] In order to prevent the heated cover 31 from being too hot and causing the handle 312 to be too hot, the outside of the handle 312 is wrapped with a heat-insulating material.

[0040] In order to prevent the target material fragments from accumulating in the cavity 4 and being unable to fall out normally, the cavity 4 has a structure that is wide at the top and narrow at the bottom and gradually narrows from the top to the bottom.

[0041] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. An alloy rotating target unbinding and recovery device, characterized in that: It includes a bracket and a rotating mechanism; the bracket is provided with an open cavity, the rotating mechanism is arranged in the cavity and is used to clamp and rotate a rotating target material, and also includes a shell that closes the cavity, the shell includes a cover body that closes the upper side of the cavity and a baffle that closes the side of the cavity; a heating element is arranged in the cover body.

2. The alloy rotary target unbinding and recovery device according to claim 1 is characterized in that: The cavity is provided with an air inlet for inputting inert gas and an air outlet for discharging waste gas.

3. The alloy rotary target unbinding and recovery device according to claim 2 is characterized in that: The air inlet and the air outlet are arranged oppositely on two sides of the bracket; the air inlet is communicated with an external air supply device; and the air outlet is communicated with an external exhaust gas treatment device.

4. The alloy rotary target unbinding and recovery device according to claim 1, characterized in that: The invention also comprises a material receiving mechanism, which is arranged in the bracket and closes the lower side of the cavity.

5. The alloy rotary target unbinding and recovery device according to claim 4, characterized in that: The material receiving mechanism comprises a plurality of collecting boxes; the plurality of collecting boxes jointly seal the lower side of the cavity.

6. The alloy rotary target unbinding and recovery device according to claim 5, characterized in that: A plurality of rollers are arranged below the collecting box; the plurality of rollers are universal wheels.

7. The alloy rotary target unbinding and recovery device according to claim 1, characterized in that: The rotating mechanism comprises a base arranged on the bracket, a rotating shaft arranged on the base, and a driving component arranged on the base for driving the rotating shaft to rotate; the outer circumference of the rotating shaft matches the inner circumference of the rotating target.

8. The alloy rotary target unbinding and recovery device according to claim 1, characterized in that: The upper end surface of the cover body is provided with a handle for convenient opening and closing by staff.

9. The alloy rotary target unbinding and recovery device according to claim 8, characterized in that: The outer side of the handle is wrapped with heat insulating material.

10. The alloy rotary target unbinding and recovery device according to any one of claims 1 to 9, characterized in that: The cavity is a structure that is wide at the top and narrow at the bottom and gradually narrows from the top to the bottom.

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