Horizontal graphite boat

Abstract

The utility model provides a horizontal graphite boat, relates to the field of processing of semiconductors and photovoltaic materials, and solves the technical problem that sticking point marks are generated when flaky materials are processed. The horizontal graphite boat comprises at least one boat piece which is horizontally arranged, the upper surface of the boat piece is provided with at least one bearing area, the bearing area is configured to bear a flaky material, and the flaky material is placed parallel to the boat piece; and the plurality of limiting wires are respectively connected with the boat pieces, are arranged around the bearing area, and are configured to limit the side edges of the sheet materials. Due to the fact that the connecting modes of the limiting wires and the boat pieces are more flexible and diverse, the limiting wires can be connected with the boat pieces in a connecting mode which is slightly influenced by thermal expansion and cold contraction, the limiting wires can be made of various different materials, and the limiting wires with smaller sizes can be made of appropriate materials in the technology. And if the contact area of the limiting wire and the flaky material is small, the flaky material is limited through the limiting wire, and sticking point marks can be avoided.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor and photovoltaic material processing, in particular to a horizontal graphite boat. Background Art

[0002] Traditional graphite boats typically feature columnar anchors around the placement of the sheet material to prevent it from shifting. These anchors are typically made of graphite, but due to the limitations of graphite manufacturing processes, they cannot be made very small. This results in a large contact area between the anchors and the sheet material. During the sheet material processing, current concentrates in the contact area, causing uneven coating on the cell surface and leaving marks on the sheet material after processing. Utility Model Content

[0003] In order to solve the above technical problems, the present application is proposed. An embodiment of the present application provides a horizontal graphite boat.

[0004] In the first aspect, an embodiment of the present application provides a horizontal graphite boat, comprising: at least one boat plate, arranged horizontally, the upper surface of the boat plate having at least one bearing area, the bearing area being configured to bear sheet material, the sheet material being placed parallel to the boat plate; a plurality of limiting wires, respectively connected to the boat plates, arranged around the bearing area, and configured to limit the side edges of the sheet material.

[0005] In some embodiments, one end of the limiting wire is embedded in the upper surface of the boat, and the other end of the limiting wire extends upward in a vertical direction.

[0006] In some embodiments, there are multiple boat plates, and the multiple boat plates are arranged in a vertical direction. The multiple boat plates have a first through hole and a second through hole, and the first through hole is arranged around the bearing area; wherein, the horizontal graphite boat also includes: a first connecting rod, passing through the second through hole on the multiple boat plates; a support sleeve, which is provided with the first connecting rod and is located between adjacent boat plates; wherein, each limit wire passes through the first through hole on the multiple boat plates.

[0007] In some embodiments, the horizontal graphite boat further includes a counterweight block, a first end of the limiting wire is connected to the top boat piece, and a second end of the limiting wire passes through the bottom boat piece and is connected to the counterweight block.

[0008] In some embodiments, the horizontal cross-sectional shape of the load-bearing area is a rectangle, and the load-bearing area has a first side and a second side arranged opposite to each other, and a third side and a fourth side connected to the first side and the second side; wherein, at least one limiting wire is arranged on the outer side of the first side and the second side, and at least two limiting wires are arranged on the outer side of the third side and the fourth side.

[0009] In some embodiments, the limiting wire is made of insulating material, or the surface of the limiting wire has an insulating layer.

[0010] In some embodiments, the limiting wire is made of a flexible material.

[0011] In some embodiments, the material of the limiting wire includes any one of ceramic, quartz, carbon fiber, graphite, silicon carbide, and alumina fiber.

[0012] In some embodiments, the cross-section of the limiting wire ranges in size from 0.01 mm to 0.3 mm.

[0013] In some embodiments, the plurality of boat sheets include a plurality of first boat sheets and a plurality of second boat sheets arranged in an alternating manner; wherein, the horizontal graphite boat further includes: a first pad connected between adjacent first boat sheets; a second pad connected between adjacent second boat sheets; a first electrode plate connected to the first pad and configured to provide current to each first boat sheet through the first pad; and a second electrode plate connected to the second pad and configured to provide current to each second boat sheet through the second pad.

[0014] The horizontal graphite boat proposed in the embodiment of the present application includes: at least one boat sheet, arranged horizontally, the upper surface of the boat sheet having at least one bearing area, the bearing area being configured to bear a sheet material, the sheet material being placed parallel to the boat sheet; and a plurality of limiting wires, respectively connected to the boat sheet, arranged around the bearing area, and configured to limit the side edges of the sheet material. Since the limiting wires are connected to the boat sheet in a more flexible and diverse manner, such as by winding or knotting, a connection method that is less affected by thermal expansion and contraction can be selected to connect to the boat sheet, thereby allowing the limiting wires to be made of a variety of different materials. In this way, suitable materials can be selected to make smaller limiting wires in terms of process. If the contact area between the limiting wire and the sheet material is small, the sheet material can be limited by the limiting wires to avoid the generation of stuck marks. In addition, since the limiting wires are small in size, they have little obstruction to airflow, thereby preventing uneven coating due to airflow obstruction, thereby improving process quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The above and other purposes, features, and advantages of the present application will become more apparent through a more detailed description of the embodiments of the present application in conjunction with the accompanying drawings. The accompanying drawings are intended to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the drawings, the same reference numerals generally represent the same components or steps.

[0016] Figure 1 Shown is a schematic structural diagram of a horizontal graphite boat provided by an exemplary embodiment of the present application.

[0017] Figure 2a An exemplary embodiment of the present application is shown. Figure 1 A partial enlarged view of area A in the middle.

[0018] Figure 2b An exemplary embodiment of the present application is shown. Figure 2a Schematic diagram of the load-bearing area.

[0019] Figure 3 An exemplary embodiment of the present application is shown. Figure 2a A partial enlarged view of area B in the middle.

[0020] Figure 4 An exemplary embodiment of the present application is shown. Figure 2a A partial enlarged view of the middle area C.

[0021] Figure 5 Shown is a side view of a horizontal graphite boat provided by an exemplary embodiment of the present application.

[0022] Figure 6 An exemplary embodiment of the present application is shown. Figure 1 A partial enlarged view of area D in the middle.

[0023] Figure 7 Shown is a front view of a horizontal graphite boat provided by an exemplary embodiment of the present application.

[0024] Reference numerals:

[0025] 100. Horizontal graphite boat; 101. Boat sheet; 1011. First boat sheet; 1012. Second boat sheet; 1013. Load-bearing area; 10131. First side; 10132. Second side; 10133. Third side; 10134. Fourth side; 102. Limiting wire; 103. First connecting rod; 104. Support sleeve; 105. First spacer; 106. Second spacer; 107. First electrode plate; 108. Second electrode plate; 109. Spring washer; 110. First nut; 111. Third connecting rod; 112. Third nut; 113. Insulating partition assembly; 114. First electrode hole; 115. Second electrode hole; 116. Support frame; 200. Sheet material. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0027] Application Overview

[0028] In semiconductor and solar cell manufacturing equipment, plasma enhanced chemical vapor deposition (PECVD) coating equipment uses a graphite boat as a jig to load solar cells into the process chamber for coating. Traditional vertical graphite boats are composed of multiple graphite boat sheets, multiple graphite pads, multiple graphite boat angles, multiple ceramic rods, multiple graphite rods, multiple graphite nuts, multiple graphite clamping points, and other structures. Among them, the graphite clamping points are set on the surface of the graphite boat sheet to limit the position of the solar cells. However, the graphite clamping points are usually columnar structures, and the connection method between the columnar clamping points and the boat sheet is relatively simple (for example, the columnar clamping points are generally fixed by embedding the columnar clamping points into the boat sheet). Since the vertical graphite boat enters and exits the high-temperature process chamber, the boat sheet and the columnar clamping points will expand and contract due to heat. Therefore, the columnar clamping points and the boat sheet must be made of the same material (i.e., graphite) and have the same expansion coefficient to maintain good connection strength. However, due to the limitations of the graphite manufacturing process, the size of the columnar card points cannot be made very small, resulting in a large contact area between the columnar card points and the battery cell. In this way, during the processing of the battery cell, the current will concentrate on flowing through the contact area, causing uneven coating on the surface of the battery cell. As a result, the card points will leave card point marks on the battery cell after the process, reducing the light energy conversion efficiency of the battery cell.

[0029] In order to solve the problem of card point marks on battery cells, some horizontal graphite boats currently adopt a structure without columnar card points. However, without setting columnar card points, the battery cells are easily offset during the process.

[0030] Furthermore, to address the issue of cells being prone to shifting due to the lack of columnar pinning, some horizontal graphite boats are designed with grooves on the boats, into which the cells are placed. While this structure can reduce the occurrence of pinning marks and limit cell shifting, the grooves block the flow of process gases, resulting in uneven coating in the area where the cell contacts the grooves, thereby reducing the cell's light energy conversion efficiency. Therefore, how to prevent cell pinning marks without blocking the flow of process gases has become an urgent problem to be solved.

[0031] In view of this, the present application proposes a horizontal graphite boat, which includes: at least one boat sheet, arranged horizontally, the upper surface of the boat sheet having at least one bearing area, the bearing area being configured to bear a sheet material, the sheet material being placed parallel to the boat sheet; and a plurality of limiting wires, respectively connected to the boat sheet, arranged around the bearing area, and configured to limit the side edges of the sheet material. Since the limiting wires are connected to the boat sheet in a more flexible and diverse manner, such as by winding or knotting, a connection method that is less affected by thermal expansion and contraction can be selected to connect to the boat sheet, thereby allowing the limiting wires to be made of a variety of different materials. In this way, suitable materials can be selected to make smaller limiting wires in terms of process. If the contact area between the limiting wire and the sheet material is small, the sheet material can be limited by the limiting wires to avoid the generation of stuck marks. In addition, since the limiting wires are small in size, they have little obstruction to airflow, thereby preventing uneven coating due to airflow obstruction, thereby improving process quality.

[0032] Exemplary devices

[0033] Figure 1 Shown is a schematic structural diagram of a horizontal graphite boat provided by an exemplary embodiment of the present application. Figure 2a An exemplary embodiment of the present application is shown. Figure 1 A partial enlarged view of area A in the middle. Figure 2b An exemplary embodiment of the present application is shown. Figure 2a Schematic diagram of the load-bearing area, Figure 2b The area within the dotted box marked with 1013 represents a bearing area. Figure 3 An exemplary embodiment of the present application is shown. Figure 2a A partial enlarged view of area B in the middle. Figures 1 to 3 As shown, an embodiment of the present application provides a horizontal graphite boat 100, comprising: at least one boat sheet 101, which is horizontally arranged, and the upper surface of the boat sheet 101 has at least one bearing area 1013, and the bearing area 1013 is configured to bear a sheet material 200, and the sheet material 200 is placed parallel to the boat sheet 101; a plurality of limiting wires 102, which are respectively connected to the boat sheet 101, and are arranged around the bearing area 1013, and are configured to limit the side of the sheet material 200.

[0034] Specifically, the material of the boat sheet 101 can be graphite, and the horizontal graphite boat 100 can include only one boat sheet 101, or Figure 1 As shown, it includes a plurality of boat pieces 101 arranged in a vertical direction, and one or more bearing areas 1013 can be set on any boat piece 101. Figure 1The boat 101 in the embodiment has ten supporting areas 1013, each of which can accommodate a sheet material 200. The sheet material 200 can be, for example, a battery cell. Multiple limiting wires 102 can be arranged around the supporting areas 1013. That is, when the sheet material 200 is placed on the boat 101, the multiple limiting wires 102 can surround the sheet material 200.

[0035] In one possible application scenario, there are at least two boats 101. Of each pair of adjacent boats 101, one is electrically connected to the positive electrode, and the other is electrically connected to the negative electrode. The electric field formed between the two adjacent boats 101 is used to ionize the process gas. The specific structure of this application scenario will be described in detail later.

[0036] The above structure allows for more flexible and diverse connection methods between the limiting wire 102 and the boat sheet 101, such as by winding or knotting. Therefore, a connection method that is less affected by thermal expansion and contraction can be selected to connect the limiting wire 102 to the boat sheet 101, thereby enabling the limiting wire 102 to be made of a variety of different materials. This allows the limiting wire 102 to be made of a smaller size using a suitable material in the process. If the contact area between the limiting wire 102 and the sheet material 200 is small, the limiting wire 102 can be used to limit the sheet material 200, thereby avoiding the generation of a stuck point mark. Furthermore, since the limiting wire 102 is small in size, it has little effect on obstructing airflow, thereby preventing uneven coating caused by airflow obstruction, thereby improving process quality. If the sheet material 200 is a photovoltaic cell, the stuck point mark on the photovoltaic cell can be reduced, and the coating uniformity of the cell can be improved, thereby improving the light energy conversion efficiency of the photovoltaic cell.

[0037] In some embodiments, as Figure 2b As shown, the horizontal cross-sectional shape of the bearing area 1013 is a rectangle, and the bearing area 1013 has a first side 10131 and a second side 10132 that are relatively arranged, and a third side 10133 and a fourth side 10134 connected to the first side 10131 and the second side 10132; wherein, at least one limiting wire 102 is arranged on the outer side of the first side 10131 and the second side 10132, and at least two limiting wires 102 are arranged on the outer side of the third side 10133 and the fourth side 10134.

[0038] In a specific example, Figure 2bAs shown, the first side 10131 and the second side 10132 are the two longer sides of the rectangular bearing area 1013, and the third side 10133 and the fourth side 10134 are the two shorter sides of the rectangular bearing area 1013. A limiting wire 102 is provided at the center of each of the first side 10131 and the second side, and two limiting wires 102 are provided at intervals on each of the third side 10133 and the fourth side 10134. By providing an appropriate number of limiting wires 102 on each side of the rectangular bearing area 1013, the deviation of the sheet material 200 can be limited, and the number of contact points with the sheet material 200 can be reduced, thereby reducing the probability of jam marks.

[0039] In some embodiments, as Figure 3 As shown, one end of the limiting wire 102 is embedded in the upper surface of the boat 101, and the other end of the limiting wire 102 extends upward in the vertical direction. Specifically, the upper surface of the boat 101 has a groove or mounting hole, and one end of the limiting wire 102 can be inserted into the groove or mounting hole. The length of the limiting wire 102 can be 5 mm. When there are multiple boats 101, a limiting wire 102 is embedded in the upper surface of each boat 101. This structure is simple and easy to process.

[0040] In some embodiments, as Figure 2a As shown, there are multiple boat plates 101, and the multiple boat plates 101 are arranged in a vertical direction. The multiple boat plates 101 have a first through hole and a second through hole, and the first through hole is arranged around the bearing area 1013; wherein, the horizontal graphite boat 100 also includes: a first connecting rod 103, which passes through the second through hole on the multiple boat plates 101; a support sleeve 104, which is sleeved with the first connecting rod 103 and is located between adjacent boat plates 101; wherein, each limiting wire 102 passes through the first through hole on the multiple boat plates 101.

[0041] The support sleeve 104 is an annular structure. To prevent electrical conduction between adjacent boats 101, the first connecting rod 103 and the support sleeve 104 are made of an insulating material, such as ceramic. Positioning the support sleeve 104 between adjacent boats 101 supports the boats 101 and maintains a certain spacing between them. This structure is simple and easy to manufacture.

[0042] Figure 4 An exemplary embodiment of the present application is shown. Figure 2a A partial enlarged view of the middle area C.

[0043] In some embodiments, as Figure 4As shown, the support sleeve 104 is also sleeved over the first end of the first connecting rod 103. The first end of the first connecting rod 103 protrudes from the upper surface of the top boat piece 101, and the first end of the first connecting rod 103 is at least partially threaded. The horizontal graphite boat 100 also includes: a spring washer 109 sleeved over the first end of the first connecting rod 103 and disposed above the support sleeve 104; and a first nut 110 threadedly connected to the first end of the first connecting rod 103 and disposed above the spring washer 109 to lock the spring washer 109. The spring washer 109 and the first nut 110 can be made of graphite.

[0044] In some embodiments, if the above-mentioned structure of the limiting wire 102 passing through the first through holes on multiple boat pieces 101 is adopted, the horizontal graphite boat 100 may also include: a counterweight, the first end of the limiting wire 102 is connected to the boat piece 101 at the top, and the second end of the limiting wire 102 passes through the boat piece 101 at the bottom and is connected to the counterweight. Specifically, if the limiting wire 102 is flexible, the limiting wire 102 needs to be tensioned and fixed. Exemplarily, since the first through hole is small in size, the first end of the limiting wire 102 can increase the cross-sectional area by bending and winding (such as knotting), so that the first end of the limiting wire 102 cannot pass through the first through hole. The second end of the limiting wire 102 is connected to the counterweight, and the limiting wire 102 can be tightened.

[0045] In some embodiments, the limiting wire 102 is made of a flexible material.

[0046] In some embodiments, the material of the limiting wire 102 includes any one of ceramic, quartz, carbon fiber, graphite, silicon carbide, and alumina fiber.

[0047] In some embodiments, if the structure in which the limiting wire 102 passes through the first through holes of multiple boats 101 is adopted, in order to prevent adjacent boats 101 from being conductive, the limiting wire 102 is made of insulating material, or the limiting wire 102 has an insulating layer on its surface.

[0048] In some embodiments, the cross-section of the limiting wire 102 has a size range of 0.01 mm to 0.3 mm. The smaller the size of the limiting wire 102, the smaller the contact area with the sheet material 200, thereby reducing the probability of generating a stuck point mark. When the cross-section of the limiting wire 102 is circular, the diameter of the cross-section of the limiting wire 102 can range from 0.01 mm to 0.3 mm.

[0049] Figure 5 Shown is a side view of a horizontal graphite boat provided by an exemplary embodiment of the present application.

[0050] In some embodiments, as Figure 5As shown, the multiple boat sheets 101 include multiple first boat sheets 1011 and multiple second boat sheets 1012 that are arranged in an alternating manner; wherein, the horizontal graphite boat 100 also includes: a first pad 105, connected between adjacent first boat sheets 1011; a second pad 106, connected between adjacent second boat sheets 1012; a first electrode plate 107, connected to the first pad 105, and configured to provide current to each first boat sheet 1011 through the first pad 105; a second electrode plate 108, connected to the second pad 106, and configured to provide current to each second boat sheet 1012 through the second pad 106.

[0051] Specifically, the material of the first and second spacers 105, 106 can be graphite. The first spacers 105 are connected between adjacent first boats 1011 to support the first boats 1011. The second spacers 106 are connected between adjacent second boats 1012 to support the second boats 1012. The first boats 1011, 1012, first spacers 105, second spacers 106, first electrode plates 107, and second electrode plates 108 are all conductive. The first boat 1011 is connected to the first pad 105, and the first electrode 107 is connected to at least one first pad 105. When the power supply device supplies power to the first electrode 107, the current in the first electrode 107 can flow into the first boat 1011 connected to the first pad 105 through the first pad 105 connected to the first electrode 107, and then pass through other first pads 105 connected to the first boat 1011 to other first boats 1011, and so on. The current is transmitted through the first pad 105, thereby powering all the first boats 1011. In principle, the second boat 1012 is connected to the second pad 106, and the second electrode plate 108 is connected to at least one second pad 106. When the power supply device supplies power to the second electrode plate 108, the current in the second electrode plate 108 can flow through the second pad 106 connected to the second electrode plate 108 into the second boat 1012 connected to the second pad 106, and then pass through other second pads 106 connected to the second boat 1012 to other second boats 1012. Similarly, the current is passed through the second pads 106, thereby supplying power to all second boats 1012. In this way, when the power supply device provides voltages of opposite polarity to the first electrode plate 107 and the second electrode plate 108, the staggered first boats 1011 and second boats 1012 can have opposite polarity, so that adjacent first boats 1011 and second boats 1012 act as positive and negative electrodes. The electric field formed between the adjacent first boats 1011 and second boats 1012 can achieve the effect of ionizing the process gas.

[0052] In a specific example, Figure 1As shown, the first boat piece 1011 has a protruding first connection portion, the second boat piece 1012 has a protruding second connection portion, the first pad 105 is connected between the first connection portions of adjacent first boat pieces 1011, and the second pad 106 is connected between the second connection portions of adjacent second boat pieces 1012.

[0053] Figure 6 An exemplary embodiment of the present application is shown. Figure 1 A partial enlarged view of area D in the middle.

[0054] In some embodiments, the horizontal graphite boat 100 further includes: a second connecting rod, the first end of the second connecting rod having a thread, the second end of the second connecting rod passing through the first connecting portion of the first pad 105 and the first boat sheet 1011; and a second nut screwed to the first end of the second connecting rod. By providing the second connecting rod, the connection between the first pad 105 and the first boat sheet 1011 can be stabilized to improve the structural stability, and the first pad 105 and the first boat sheet 1011 can be locked by the second nut, so that the current can flow stably between the first pad 105 and the first boat sheet 1011. The connection method between the second connecting rod and the first pad 105, the first boat sheet 1011, and the second nut is similar to the connection method between the third connecting rod 111 and the second pad 106, the second boat sheet 1012, and the third nut 112 described later, which can be referred to. Figure 6 The connection method of the third connecting rod 111, the second cushion block 106, the second boat piece 1012 and the third nut 112 is shown.

[0055] Similarly, in some embodiments, such as Figure 6 As shown, the horizontal graphite boat 100 further includes a third connecting rod 111 having a threaded first end and a second end passing through the second connection portion between the second spacer 106 and the second boat sheet 1012; and a third nut 112 threadedly engaged with the first end of the third connecting rod 111. The third connecting rod 111 secures the connection between the second spacer 106 and the second boat sheet 1012, improving structural stability. The third nut 112 locks the second spacer 106 and the second boat sheet 1012, ensuring stable current flow between the second spacer 106 and the second boat sheet 1012.

[0056] In some embodiments, the second connecting rod and the third connecting rod 111 are made of graphite.

[0057] In some embodiments, as Figure 5As shown, the first end of the first electrode plate 107 is connected to the first spacer 105, and the second end of the first electrode plate 107 is connected to the second spacer 106; the first end of the second electrode plate 108 is connected to the first spacer 105, and the second end of the second electrode plate 108 is connected to the second spacer 106. The horizontal graphite boat 100 also includes a plurality of insulating barrier assemblies 113 disposed between the first and second ends of the first electrode plate 107 and between the first and second ends of the second electrode plate 180. The insulating barrier assemblies 113 are exemplarily made of ceramic. Specifically, by connecting and fixing the first and second ends of the first electrode plate 107 and the first and second ends of the second electrode plate 108, the first and second electrode plates 107 and 108 can be securely fixed. The insulating barrier assemblies 113 prevent current from flowing between the first and second ends of the first electrode plate 107 and between the first and second ends of the second electrode plate 108.

[0058] In some embodiments, as Figure 5 As shown, the first end of the first electrode plate 107 has a first electrode hole 114, which is configured to be connected to a power supply device, and the second end of the second electrode plate 108 has a second electrode hole 115, which is configured to be connected to a power supply device.

[0059] Figure 7 Shown is a front view of a horizontal graphite boat provided by an exemplary embodiment of the present application.

[0060] In some embodiments, as Figure 7 As shown, the second electrode plate 108 is disposed at the bottom of the boat 101. The horizontal graphite boat 100 further includes a support frame 116 disposed at the bottom of the boat 101 and connected to the second electrode plate 108. The support frame 116 and the second electrode plate 108 are configured to support structures such as the boat 101, the first pad 105, and the second pad 106. Exemplarily, the second electrode plate 108 is disposed at the bottom of each of the first and second ends of the boat 101. The ends of the support frame 116 are respectively connected to the second electrode plate 108, so that the second electrode plate 108 and the support frame 116 serve as a bottom support structure to support other components in the horizontal graphite boat 100.

[0061] In some embodiments, the first end of the second electrode plate 108 is configured to be connected to a power supply, and the second end of the second electrode plate 108 is configured to be connected to a power supply. The first end and the second end of the second electrode plate 108 have opposite polarity. With this structure, power can be supplied only to the second electrode plate 108, thereby allowing currents of opposite polarity to flow into the first boat 1011 and the second boat 1012.

[0062] In some embodiments, any of the above power supply devices may be a radio frequency power supply.

[0063] In some embodiments, as Figure 5 and Figure 7 As shown, the top boat piece among the plurality of boat pieces 101 has a first connection portion and a second connection portion, and the bottom boat piece among the plurality of boat pieces 101 has a first connection portion and a second connection portion. When the top boat piece and / or the bottom boat piece is the first boat piece 1011, an insulating barrier assembly 113 is provided between the second connection portion of the top boat piece and / or the bottom boat piece and the second connection portion of the adjacent second boat piece 1012; when the top boat piece and / or the bottom boat piece is the second boat piece 1012, an insulating barrier assembly 113 is provided between the first connection portion of the top boat piece and / or the bottom boat piece and the first connection portion of the adjacent first boat piece 1011.

[0064] Specifically, the top boat and the bottom boat have both a first connecting portion and a second connecting portion, which facilitates the use of a second connecting rod, a second nut, a third connecting rod 111, and a third nut 112 to secure and lock the first boat 1011 and the second boat 1012. Since the first boat 1011 cannot be electrically connected to the second electrode plate 108, and the second boat 1012 cannot be electrically connected to the first electrode plate 107, the provision of an insulating barrier assembly 113 can isolate the first boat 1011 from the second electrode plate 108, and isolate the second boat 1012 from the first electrode plate 107.

[0065] The basic principles of the present application have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, and effects mentioned in this application are merely illustrative and not restrictive, and it should not be assumed that these advantages, strengths, and effects are required of each embodiment of this application. In addition, the specific details disclosed above are merely illustrative and facilitating understanding, and are not restrictive. The above details do not limit this application to necessarily being implemented using the above specific details.

[0066] The block diagrams of the devices, devices, equipment, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As will be appreciated by those skilled in the art, these devices, devices, equipment, and systems can be connected, arranged, or configured in any manner. Words such as "include," "comprise," "have," and the like are open-ended words, meaning "including but not limited to," and can be used interchangeably therewith. The words "or" and "and" used herein refer to the words "and / or" and can be used interchangeably therewith, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to," and can be used interchangeably therewith.

[0067] It should also be noted that in the apparatus, device, and method of the present application, each component or each step can be decomposed and / or recombined, and such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0068] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0069] The above description has been provided for the purpose of illustration and description. Furthermore, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although a number of example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A horizontal graphite boat, characterized in that: include: At least one boat sheet is horizontally arranged, the upper surface of the boat sheet has at least one bearing area, the bearing area is configured to bear a sheet material, and the sheet material is placed parallel to the boat sheet; A plurality of limiting wires are respectively connected to the boat pieces, arranged around the bearing area, and configured to limit the side edges of the sheet material.

2. The horizontal graphite boat according to claim 1, characterized in that: One end of the limiting wire is embedded in the upper surface of the boat piece, and the other end of the limiting wire extends upward in a vertical direction.

3. The horizontal graphite boat according to claim 1, characterized in that: There are multiple boat pieces, the multiple boat pieces are arranged in a vertical direction, and the multiple boat pieces have a first through hole and a second through hole, and the first through hole is arranged around the bearing area; Wherein, the horizontal graphite boat further comprises: A first connecting rod passing through the second through holes on the plurality of boat pieces; A support sleeve, sleeved with the first connecting rod and located between adjacent boat pieces; Wherein, each of the limiting wires passes through the first through holes on a plurality of the boat plates.

4. The horizontal graphite boat according to claim 3, characterized in that: Also includes: A counterweight block, wherein the first end of the limit wire is connected to the boat piece at the top, and the second end of the limit wire passes through the boat piece at the bottom and is connected to the counterweight block.

5. The horizontal graphite boat according to any one of claims 1 to 4, characterized in that: The horizontal cross-section of the bearing area is a rectangle, and the bearing area has a first side and a second side that are oppositely arranged, and a third side and a fourth side that are connected to the first side and the second side; Wherein, at least one limiting wire is arranged on the outer sides of the first side and the second side, and at least two limiting wires are arranged on the outer sides of the third side and the fourth side.

6. The horizontal graphite boat according to claim 3 or 4, characterized in that: The limiting wire is made of insulating material, or the surface of the limiting wire has an insulating layer.

7. The horizontal graphite boat according to any one of claims 1 to 4, characterized in that: The material of the limiting wire is a flexible material.

8. The horizontal graphite boat according to any one of claims 1 to 4, characterized in that: The materials of the limiting wire include: Any of ceramic, quartz, carbon fiber, graphite, silicon carbide and alumina fibers.

9. The horizontal graphite boat according to any one of claims 1 to 4, characterized in that: The size of the cross section of the limiting wire ranges from 0.01 mm to 0.3 mm.

10. The horizontal graphite boat according to claim 3, characterized in that: The plurality of boat pieces include a plurality of first boat pieces and a plurality of second boat pieces that are staggered; Wherein, the horizontal graphite boat further comprises: A first cushion block connected between adjacent first boat pieces; A second spacer block connected between adjacent second boat pieces; a first electrode plate connected to the first pad and configured to provide current to each of the first boats through the first pad; The second electrode plate is connected to the second spacer and is configured to provide current to each of the second boats through the second spacer.

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