Horizontal reaction furnace and reaction furnace system
By using support rods to support photovoltaic materials and thermal insulation components in the reactor, the problem of deforming or breaking of the paddle structure or furnace tube in high temperature environments is solved, and the stability and service life of the reactor are improved.
Patent Information
- Application Number
- CN202421444483.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-21
- Publication Date
- 2025-03-28
- Estimated Expiration
- 2034-06-21
AI Technical Summary
Under high temperature environments, the paddle structure or quartz furnace tube is prone to deformation or fracture under the gravity of photovoltaic materials and thermally insulated components.
A horizontal reactor is designed to support photovoltaic materials and thermal insulation components in the reaction chamber using support rods to prevent the paddle structure or furnace tube from bearing gravity.
It effectively avoids the problem of deformation or breaking of the paddle structure or furnace tube due to excessive load load in high temperature environments, and improves the stability and service life of the reactor.
Smart Images
Figure CN222688799U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of photovoltaic material processing, and in particular to a horizontal reactor and a reactor system. Background Art
[0002] At present, when transporting photovoltaic materials to the reactor for processing, the paddle structure transports the photovoltaic materials (usually placed in a carrier, such as a boat, a small boat, etc.) and the thermal insulation components to the reactor, and the paddle structure continues to support the photovoltaic materials and the thermal insulation components during processing, or the quartz furnace tube supports the photovoltaic materials and the thermal insulation components. However, due to the high temperature inside the reactor tube during processing, the paddle structure or the quartz furnace tube is easily deformed or even broken under the gravity of the photovoltaic materials (and the carrier) and the thermal insulation components in a high temperature environment. Utility Model Content
[0003] In order to solve the above technical problems, the present application is proposed. The embodiment of the present application provides a horizontal reactor and a reactor system.
[0004] In the first aspect, an embodiment of the present application provides a horizontal reactor configured to process photovoltaic materials, comprising: a furnace tube having a reaction chamber, the reaction chamber having a first opening and a second opening arranged opposite to each other; a furnace door assembly, comprising a first furnace door and a paddle structure connected to each other, and a first thermal insulation assembly located on the paddle structure, wherein the first furnace door is configured to cover the first opening, the paddle structure is configured to carry the photovoltaic material, and the first thermal insulation assembly is configured to block the heat in the reaction chamber from being transferred to the first opening; a furnace mouth flange connected to the first opening; a furnace tail flange connected to the second opening; at least one support rod arranged in the reaction chamber, the first end of the support rod being connected to the furnace mouth flange, and the second end of the support rod being connected to the furnace tail flange; wherein the paddle structure is configured to carry the photovoltaic material and the first thermal insulation assembly into the reaction chamber, and when the paddle structure enters the first preset position of the reaction chamber, the paddle structure is separated from the photovoltaic material and the first thermal insulation assembly, so that the photovoltaic material and the first thermal insulation assembly are supported by the support rod, and when the processing of the photovoltaic material is completed, the paddle structure carries the photovoltaic material and the first thermal insulation assembly out of the reaction chamber.
[0005] In some embodiments, there are multiple support rods, and the multiple support rods are spaced apart at the bottom of the reaction chamber; wherein, after the paddle structure enters the first preset position of the reaction chamber, it moves downward from the gaps between adjacent support rods to the second preset position, so that the paddle structure is separated from the photovoltaic material and the first thermal insulation component, and the paddle structure moves from the second preset position toward the second opening to the third preset position, so that the first furnace door covers the first opening; wherein, when the photovoltaic material is processed, the paddle structure moves from the third preset position to the second preset position, so that the first furnace door exposes the first opening, and the paddle structure moves upward from the second preset position from the gaps between adjacent support rods to the first preset position, so as to contact and carry the photovoltaic material and the first thermal insulation component, and transport the photovoltaic material and the first thermal insulation component out of the reaction chamber.
[0006] In some embodiments, there are multiple support rods, and the multiple support rods are spaced apart at the bottom of the reaction chamber; wherein, after the paddle structure enters the first preset position of the reaction chamber, it moves downward from the gaps between adjacent support rods to the second preset position, so that the paddle structure is separated from the photovoltaic material and the first thermal insulation component, and the paddle structure exits the reaction chamber; the horizontal reactor also includes: a second furnace door, and the second furnace door is configured to cover the first opening after the paddle structure exits the reaction chamber; wherein, when the photovoltaic material processing is completed, the second furnace door exposes the first opening, the paddle structure moves to the second preset position in the reaction chamber, and moves upward from the gaps between adjacent support rods to the first preset position, so as to contact and carry the photovoltaic material and the first thermal insulation component, and transport the photovoltaic material and the first thermal insulation component out of the reaction chamber.
[0007] In some embodiments, the plurality of support rods are symmetrically arranged relative to a vertical symmetry plane of the reaction chamber.
[0008] In some embodiments, it also includes: a first fixing member connected to the furnace mouth flange, the first fixing member has at least one first groove, and the first groove is configured to support the first end of the support rod; a second fixing member connected to the furnace tail flange, the second fixing member has at least one second groove, and the second groove is configured to support the second end of the support rod.
[0009] In some embodiments, the first fixing member is detachably connected to the furnace mouth flange; and / or the second fixing member is detachably connected to the furnace tail flange; and / or the first end of the support rod is detachably connected to the first fixing member; and / or the second end of the support rod is detachably connected to the first fixing member.
[0010] In some embodiments, the cross-sectional shape of the first groove is the same as the cross-sectional shape of the first end of the support rod; and / or, the cross-sectional shape of the second groove is the same as the cross-sectional shape of the second end of the support rod.
[0011] In some embodiments, the method further includes: a second heat insulation component configured to prevent heat in the reaction chamber from being transferred to the second opening, and the second heat insulation component is disposed at one end of the support rod close to the second opening.
[0012] In some embodiments, the cross-sectional shape of the support rod includes: circle, polygon, circular ring, rectangular ring.
[0013] In some embodiments, the material of the support rod includes: ceramic or metal.
[0014] In a second aspect, an embodiment of the present application provides a reactor system, comprising: a horizontal reactor as described in any one of the first aspects above; a boat pusher device, connected to the furnace door assembly of the horizontal reactor, configured to drive the furnace door assembly to move so that a paddle structure, photovoltaic material and a first thermal insulation assembly enter and exit the reaction chamber, and drive the paddle structure to rise and fall in the reaction chamber.
[0015] The horizontal reactor and reactor system proposed in the embodiments of the present application, since the photovoltaic material and the first thermal insulation component are carried by the support rods during processing, there is no need for the paddle structure or the furnace tube to bear the gravity of the photovoltaic material and the first thermal insulation component, thereby avoiding deformation or breakage of the paddle structure due to excessive load in a high temperature environment, or breakage of the furnace tube due to excessive load in a high temperature environment. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.
[0017] Figure 1 Shown is a schematic structural diagram of a paddle structure provided by an exemplary embodiment of the present application.
[0018] Figure 2 An exemplary embodiment of the present application is shown. Figure 1 Sectional view taken along AA direction.
[0019] Figure 3 An exemplary embodiment of the present application is shown. Figure 2 Cross-sectional view taken along direction BB.
[0020] Figure 4 Another exemplary embodiment of the present application is shown. Figure 2 Cross-sectional view taken along direction BB.
[0021] Figure 5An exemplary embodiment of the present application is shown. Figure 1 A partial enlarged view of area C in the middle.
[0022] Figure 6 Shown is a schematic structural diagram of a reactor system provided by an exemplary embodiment of the present application.
[0023] Reference numerals:
[0024] 100. Horizontal reactor; 110. Furnace tube; 120. Furnace door assembly; 121. First furnace door; 122. Paddle structure; 123. First thermal insulation assembly; 124. Paddle sleeve; 130. Furnace mouth flange; 140. Furnace tail flange; 150. Support rod; 160. Second fixing member; 161. Second groove; 170. Second thermal insulation assembly; 200. Carrier; 210. Boat support; 211. Boat foot; 220. Boat structure; 300. Reactor system; 310. Boat pushing device. DETAILED DESCRIPTION
[0025] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0026] Application Overview
[0027] At present, solar photovoltaic power generation has received continuous attention due to its advantages such as low cost and no pollution. The abundant solar radiation energy is an important energy source that is inexhaustible, pollution-free, cheap, and can be freely used by humans. Therefore, photovoltaic power generation is an important link in achieving carbon neutrality, and reducing the cost of photovoltaic electricity is a continuous goal of the photovoltaic industry. In the processing and manufacturing of photovoltaic cells, silicon wafers need to undergo multiple special chemical treatments before they can finally become cells. N-type cells have the advantages of high efficiency and low attenuation, and are gradually replacing traditional P-type cells. N-type cells need to undergo boron diffusion treatment, low pressure chemical vapor deposition (LPCVD) tunneling oxide layer and other processes during the processing.
[0028] At present, when transporting photovoltaic materials to the reactor for processing, the paddle structure transports the photovoltaic materials (usually placed in a carrier, such as a boat, a small boat, etc.) and the thermal insulation components to the reactor, and the paddle structure continues to support the photovoltaic materials and thermal insulation components during processing, or the quartz furnace tube supports the photovoltaic materials and thermal insulation components. However, the temperature of the boron diffusion process is relatively high, generally above 1000°C, and the paddle structure or quartz furnace tube is prone to deformation or even fracture under the gravity of the photovoltaic materials (and carriers) and thermal insulation components in a high temperature environment.
[0029] In view of this, the present application proposes a horizontal reactor, which is configured to process photovoltaic materials, including: a furnace tube, having a reaction chamber, the reaction chamber having a first opening and a second opening arranged opposite to each other; a furnace door assembly, including a first furnace door and a paddle structure connected to each other, and a first thermal insulation assembly located on the paddle structure, wherein the first furnace door is configured to cover the first opening, the paddle structure is configured to carry the photovoltaic material, and the first thermal insulation assembly is configured to block the heat in the reaction chamber from being transferred to the first opening; a furnace mouth flange, connected to the first opening; a furnace tail flange, connected to the second opening; at least one support rod, arranged in the reaction chamber, the first end of the support rod being connected to the furnace mouth flange, and the second end of the support rod being connected to the furnace tail flange; wherein the paddle structure is configured to carry the photovoltaic material and the first thermal insulation assembly into the reaction chamber, and when the paddle structure enters the first preset position of the reaction chamber, the paddle structure is separated from the photovoltaic material and the first thermal insulation assembly, so that the photovoltaic material and the first thermal insulation assembly are supported by the support rod, and when the processing of the photovoltaic material is completed, the paddle structure carries the photovoltaic material and the first thermal insulation assembly out of the reaction chamber. With this structure, since the photovoltaic material and the first thermal insulation component are carried by the support rods during processing, there is no need for the paddle structure or the furnace pipe to bear the gravity of the photovoltaic material and the first thermal insulation component, thereby avoiding deformation or breakage of the paddle structure due to excessive load in a high temperature environment, or breaking of the furnace pipe due to excessive load in a high temperature environment.
[0030] Exemplary Devices
[0031] Figure 1 FIG. 1 is a schematic diagram of a paddle structure provided by an exemplary embodiment of the present application. Figure 2 An exemplary embodiment of the present application is shown. Figure 1 The cross-sectional view cut along the AA direction, Figure 3 An exemplary embodiment of the present application is shown. Figure 2 The cross-sectional view cut along the BB direction, Figure 4 Another exemplary embodiment of the present application is shown. Figure 2 Cross-sectional view taken along direction BB.
[0032] like Figure 1 to Figure 4As shown, the embodiment of the present application provides a horizontal reactor 100, which is configured to process photovoltaic materials. The horizontal reactor 100 includes: a furnace tube 110, having a reaction chamber, the reaction chamber having a first opening and a second opening arranged opposite to each other; a furnace door assembly 120, including a first furnace door 121 and a paddle structure 122 connected to each other, and a first heat insulation assembly 123 located on the paddle structure 122, wherein the first furnace door 121 is configured to cover the first opening (specifically, the first furnace door 121 is in contact with the furnace mouth flange 130, thereby covering the first opening), and the paddle structure 122 is configured to carry the photovoltaic material ( Figure 1 to Figure 4 The photovoltaic material is carried by the carrier 200, the first thermal insulation component 123 is configured to block the heat in the reaction chamber from being transferred to the first opening; the furnace mouth flange 130 is connected to the first opening; the furnace tail flange 140 is connected to the second opening; at least one support rod 150 is arranged in the reaction chamber, the first end of the support rod 150 is connected to the furnace mouth flange 130, and the second end of the support rod 150 is connected to the furnace tail flange 140; wherein the paddle structure 122 is configured to carry the photovoltaic material and the first thermal insulation component 123 into the reaction chamber, and when the paddle structure 122 enters the first preset position of the reaction chamber, the paddle structure 122 is separated from the photovoltaic material and the first thermal insulation component 123, so that the photovoltaic material and the first thermal insulation component 123 are supported by the support rod 150, and when the processing of the photovoltaic material is completed, the paddle structure 122 carries the photovoltaic material and the first thermal insulation component 123 out of the reaction chamber.
[0033] The carrier 200 may include a boat structure 211, or may include a boat support 210 and a boat structure 220, wherein the boat support 210 is used to support the boat structure 220. The material of the furnace tube 110 may include quartz or silicon carbide (SIC). The photovoltaic material may be, for example, a silicon wafer. The first thermal insulation component 123 may be a quartz thermal insulation sheet, a thermal insulation bag containing a thermal insulation material, or a quartz thermal insulation sheet and a thermal insulation bag.
[0034] Through the above structure, the first insulation component 123 and the photovoltaic material (and the carrier 200) can be supported by the support rod 150 when the paddle structure 122 enters the first preset position of the reaction chamber, and the paddle structure 122 does not need to bear the gravity of the photovoltaic material and the first insulation component 123, thereby avoiding the paddle structure 122 from being deformed or even broken due to the gravity of the first insulation component 123 and the photovoltaic material (and the carrier 200) in a high temperature environment. In addition, the two ends of the support rod 150 are respectively connected to the furnace mouth flange 130 and the furnace tail flange 140, which has a greater bearing capacity and a smaller deformation amount than the paddle structure 122 connected to the boat pusher device only by one end of the paddle handle.
[0035] In addition, the traditional reactor can also usually use a soft landing process to transport photovoltaic materials, that is, after the photovoltaic materials are transported to the reactor by the paddle structure, the paddle structure places the photovoltaic materials on the inner wall of the furnace tube of the reactor, and then the paddle structure exits the reactor, and the reactor processes the photovoltaic materials. Since the furnace tube of the reactor is usually made of quartz, the quartz furnace tube is also easy to break under the conditions of high temperature, vacuum stress, and the gravity of the photovoltaic material (and the carrier), and in order to increase production capacity, as the size of the furnace tube increases, the possibility of the furnace tube breaking is also increasing. Through the above structure, it is also avoided to place the photovoltaic material and the first thermal insulation component 123 on the inner wall of the furnace tube, thereby avoiding the furnace tube 110 from breaking and improving the service life of the furnace tube 110.
[0036] In some embodiments, the furnace mouth flange 130 and the furnace tail flange 140 may be made of metal. Since metal materials have high strength, the furnace mouth flange 130 and the furnace tail flange 140 are made of metal materials to avoid damage due to the gravity of the support rod 150, the carrier 200, the photovoltaic material, and the first thermal insulation assembly 123 in a high temperature environment.
[0037] In some embodiments, the furnace door assembly 120 includes at least one paddle structure 122, that is, the embodiments of the present application can be applied to single-paddle transportation, double-paddle transportation, or multi-paddle transportation.
[0038] In some embodiments, the paddle structure 122 is made of silicon carbide or ceramic.
[0039] In some embodiments, there are multiple support rods 150, and the multiple support rods 150 are spaced apart at the bottom of the reaction chamber; wherein, after the paddle structure 122 enters the first preset position of the reaction chamber, it moves downward from the gap between adjacent support rods 150 to the second preset position, so that the paddle structure 122 is separated from the photovoltaic material and the first thermal insulation component 123, and the paddle structure 122 moves from the second preset position to the second opening direction to the third preset position, so that the first furnace door 121 covers the first opening; wherein, when the photovoltaic material processing is completed, the paddle structure 122 moves from the third preset position to the second preset position, so that the first furnace door 121 exposes the first opening, and the paddle structure 122 moves upward from the second preset position from the gap between adjacent support rods 150 to the first preset position, so as to contact and carry the photovoltaic material and the first thermal insulation component 123, and transport the photovoltaic material and the first thermal insulation component 123 out of the reaction chamber.
[0040] Specifically, the plurality of support rods 150 can be exemplarily arranged horizontally at the bottom of the reaction chamber. When the paddle structure 122 descends from the gap between any two support rods 150, as shown in FIG. Figure 4As shown, the photovoltaic material (and the carrier 200) and the first thermal insulation component 123 that are in contact with the upper surface of the paddle structure 122 are separated from the upper surface of the paddle structure 122 and in contact with the upper surface of the support rod 150, thereby changing from the paddle structure 122 supporting the photovoltaic material (and the carrier 200) and the first thermal insulation component 123 to the support rod 150 supporting the photovoltaic material (and the carrier 200) and the first thermal insulation component 123.
[0041] Similarly, after the paddle structure 122 moves upward from the interval between adjacent support rods 150, as shown in FIG. Figure 3 As shown, the photovoltaic material (and the carrier 200) and the first thermal insulation component 123 that are in contact with the upper surface of the support rod 150 are separated from the upper surface of the support rod 150 and in contact with the upper surface of the paddle structure 122, thereby achieving a change from the support rod 150 carrying the photovoltaic material (and the carrier 200) and the first thermal insulation component 123 to the paddle structure 122 carrying the photovoltaic material (and the carrier 200) and the first thermal insulation component 123.
[0042] In a specific example, before the process, the furnace door assembly 120 is located outside the reaction chamber, the paddle structure 122 is in a high position, the boat moving device places the boat support 210 and the boat structure 220 on the paddle structure 122, and the paddle structure 122 is gradually moved horizontally into the reaction chamber under the drive of the boat pushing device. When the paddle structure 122 reaches the first preset position, the paddle structure 122 moves downward from the interval between adjacent support rods 150 to the second preset position under the drive of the boat pushing device, and at this time, there is a distance between the first furnace door 121 and the furnace flange 130. In the process of the boat support 210 and the boat structure 220 carried by the boat support 210 following the paddle structure 122 to descend, after the boat support 210 and the support rod 150 contact, the boat support 210 and the boat structure 220 gradually change from being supported by the paddle structure 122 to being supported by the support rod 150. Finally, when the paddle structure 122 reaches the second preset position, the boat support 210 and the boat structure 220 are completely supported by the support rod 150. After the paddle structure 122 reaches the second preset position, it continues to move to the third preset position in the direction of the second opening under the drive of the boat pusher device. At this time, the first furnace door 121 will fit tightly with the furnace mouth flange 130, thereby covering the first opening to form a sealed space in the reaction chamber, and then process processing begins in the reaction chamber.
[0043] When the process is completed, the paddle structure 122 is driven by the boat pushing device to move horizontally away from the second opening to the second preset position, so that the first furnace door 121 and the furnace flange 130 are separated, thereby exposing the first opening. Then, the paddle structure 122 is driven by the boat pushing device to move upward from the interval between adjacent support rods 150 to the first preset position. In this process, the boat support 210 and the boat structure 220 gradually change from being supported by the support rods 150 to being supported by the paddle structure 122. When the paddle structure 122 reaches the first preset position, the boat support 210 and the boat structure 220 are completely supported by the paddle structure 122. Then, the paddle structure 122 is driven by the boat pushing device to move horizontally out of the reaction chamber. When the paddle structure 122 carries the boat support 210 and the boat structure 220 out of the furnace tube, the boat moving device moves the boat support 210 and the boat structure 220 away from the paddle structure 122.
[0044] In other embodiments, in some embodiments, there are multiple support rods 150, and the multiple support rods 150 are spaced apart at the bottom of the reaction chamber; wherein, after the paddle structure 122 enters the first preset position of the reaction chamber, it moves downward from the gaps between adjacent support rods 150 to the second preset position, so that the paddle structure 122 is separated from the photovoltaic material and the first thermal insulation component 123, and the paddle structure 122 exits the reaction chamber; the horizontal reactor also includes: a second furnace door, and the second furnace door is configured to cover the first opening after the paddle structure 122 exits the reaction chamber; wherein, when the photovoltaic material processing is completed, the second furnace door exposes the first opening, the paddle structure 122 moves to the second preset position in the reaction chamber, and moves upward from the gaps between adjacent support rods 150 to the first preset position, so as to contact and carry the photovoltaic material and the first thermal insulation component 123, and transport the photovoltaic material and the first thermal insulation component 123 out of the reaction chamber.
[0045] In a specific example, before the process, the paddle structure 122 is located outside the reaction chamber and is in a high position. After the boat moving device places the boat support 210 and the boat structure 220 on the paddle structure 122, the paddle structure 122 is gradually moved horizontally to the first preset position in the reaction chamber under the push of the boat pushing device, and then the paddle structure 122 is driven by the boat pushing device to move downward from the interval between adjacent support rods 150 to the second preset position, wherein, in the process of the boat support 210 following the paddle structure 122 to descend, after the boat support 210 and the support rod 150 are in contact, the boat support 210 and the boat structure 220 carried by the boat support 210 gradually change from being supported by the paddle structure 122 to being supported by the support rod 150. When the paddle structure 122 reaches the second preset position, the boat support 210 and the boat structure 220 are completely supported by the support rod 150. Then the paddle structure 122 moves horizontally and exits the reaction chamber under the drive of the boat pushing device. When the paddle structure 122 completely exits the reaction chamber, the second furnace door gradually moves to the first opening and covers the first opening. The second furnace door and the furnace mouth flange 130 are in close contact to form a sealed space in the reaction chamber, and then the process begins in the reaction chamber.
[0046] When the process is completed, the second furnace door moves away from the first opening, and the paddle structure 122 (at this time in a low position) gradually moves horizontally to the second preset position in the reaction chamber under the drive of the boat pushing device. When the paddle structure 122 reaches the second preset position, the paddle structure 122 moves upward to the first preset position by the interval between the adjacent support rods 150 under the drive of the boat pushing device. In this process, the boat support 210 and the boat structure 220 gradually change from being supported by the support rods 150 to being supported by the paddle structure 122. When the paddle structure 122 reaches the first preset position, the boat support 210 and the boat structure 220 are completely supported by the paddle structure 122. Then the paddle structure 122 moves horizontally and gradually moves out of the furnace tube under the drive of the boat pushing device. When the paddle structure 122 carries the boat support 210 and the boat structure 220 out of the reaction chamber, the boat moving device moves the boat support 210 and the boat structure 220 away from the paddle structure 122.
[0047] In some embodiments, Figure 3 As shown, the plurality of support rods 150 are symmetrically arranged relative to the vertical symmetry plane of the reaction chamber. Specifically, the plurality of support rods 150 can be arranged on both sides of the bottom of the reaction chamber with the vertical symmetry plane as the symmetry axis, and the paddle structure 122 can be raised or lowered from the position of the vertical symmetry plane.
[0048] In a specific example, if Figure 2 and Figure 3 As shown, the carrier 200 is a boat support 210 , which includes a boat foot 211 . The boat foot 211 is used to support the boat support 210 , and the support rods 150 on both sides can support the two ends of the boat foot 211 respectively.
[0049] In some embodiments, the material of the support rod 150 includes: ceramic or metal. Ceramic or metal materials have high strength, thereby preventing the support rod 150 from being broken due to the gravity of the photovoltaic material (and carrier 200), the first insulation component 123, the second insulation component 170 and the like.
[0050] In some embodiments, Figure 3 As shown, the lower surface of the carrier 200 includes: a first contact area that contacts the upper surface of the support rod 150, and a second contact area that contacts the upper surface of the paddle structure 122, and the height of the first contact area is lower than the second contact area. With this structure, the paddle structure 122 only needs to drop a short distance after entering the reaction chamber, so that the support rod 150 can support the carrier 200, so that a smaller furnace tube 110 can be used, reducing costs.
[0051] Figure 5 An exemplary embodiment of the present application is shown. Figure 1 A partial enlarged view of area C in the middle.
[0052] In some embodiments, Figure 5 As shown, the horizontal reactor 100 also includes: a first fixing member connected to the furnace mouth flange 130, the first fixing member has at least one first groove, and the first groove is configured to support the first end of the support rod 150; a second fixing member 160, connected to the furnace tail flange 140, the second fixing member 160 has at least one second groove 161, and the second groove 161 is configured to support the second end of the support rod 150.
[0053] The connection method of the first fixing member, the first groove and the support rod 150 can refer to Figure 5 The second fixing member 160, the second groove 161 and the support rod 150 are connected. By setting the support rod 150 in the first groove and the second groove 161, the support rod 150 can be firmly fixed, and the first fixing member and the second fixing member 160 have simple structures and are easy to produce.
[0054] In some embodiments, the first fixing member and the second fixing member 160 are made of metal. Since metal material has high strength, the first fixing member and the second fixing member 160 are made of metal material to avoid damage due to the gravity of the support rod 150, the carrier 200, the photovoltaic material, and the first insulation assembly 123 in a high temperature environment.
[0055] In some embodiments, the first fixing member is welded to the furnace mouth flange 130, and / or the second fixing member 160 is welded to the furnace tail flange 140. By welding, the first fixing member can be firmly connected to the furnace mouth flange 130, and the second fixing member 160 can be firmly connected to the furnace tail flange 140.
[0056] In other embodiments, the first fixing member is detachably connected to the furnace mouth flange 130; and / or the second fixing member 160 is detachably connected to the furnace tail flange 140. Through the detachable connection mode, when the first fixing member and / or the second fixing member 160 is damaged, the first fixing member and / or the second fixing member 160 can be removed, and only the first fixing member and / or the second fixing member 160 can be replaced, thereby saving costs.
[0057] Exemplarily, the furnace mouth flange 130 has a first threaded hole, the furnace tail flange 140 has a second threaded hole, the first fixing member has a first through hole, and the second fixing member 160 has a second through hole. The horizontal reactor 100 also includes: a first screw passing through the first through hole and being screwed to the first threaded hole; a second screw passing through the second through hole and being screwed to the second threaded hole.
[0058] In some embodiments, the first end of the support rod 150 is detachably connected to the first fixing member; and / or the second end of the support rod 150 is detachably connected to the first fixing member 160. Through the detachable connection, the support rod 150 can be more firmly connected to the first fixing member and the second fixing member 160, preventing the support rod 150 from rotating or moving, causing the photovoltaic material (and the carrier 200) and the first thermal insulation assembly 123 to fall.
[0059] Exemplarily, the bottom of the first groove has a third threaded hole, the bottom of the second groove 161 has a fourth threaded hole, the first end of the support rod 150 has a third through hole, and the second end of the support rod has a fourth through hole. The horizontal reactor 100 also includes: a third screw, passing through the third through hole and screwed to the third threaded hole; a fourth screw, passing through the fourth through hole and screwed to the fourth threaded hole.
[0060] In some embodiments, the cross-sectional shape of the first groove is the same as the cross-sectional shape of the first end of the support rod 150; and / or, the cross-sectional shape of the second groove 161 is the same as the cross-sectional shape of the second end of the support rod 150. By making the cross-sectional shape of the first groove the same as the cross-sectional shape of the first end of the support rod 150, and / or making the cross-sectional shape of the second groove 161 the same as the cross-sectional shape of the second end of the support rod 150, the support rod 150 can be prevented from rotating in the first groove and the second groove 161, thereby causing the photovoltaic material (and the carrier 200) and the first thermal insulation assembly 123 to fall off the support rod 150. Exemplarily, the cross-sectional shape of the first groove, the cross-sectional shape of the first end of the support rod 150, the cross-sectional shape of the second groove 161, and the cross-sectional shape of the second end of the support rod 150 are all rectangular.
[0061] In some embodiments, Figure 2As shown, the horizontal reactor 100 further includes: a second heat insulation component 170, which is configured to prevent the heat in the reaction chamber from being transferred to the second opening, and the second heat insulation component 170 is disposed at one end of the support rod 150 close to the second opening. The second heat insulation component 170 can be provided to prevent high temperature from damaging the structure at the second opening, and the second heat insulation component 170 is supported by the support rod 150, so that the paddle structure 122 or the furnace tube 110 can avoid the second heat insulation component 170 being damaged by the gravity.
[0062] In some embodiments, the cross-sectional shapes of the support rod 150 include: circle, polygon, circular ring, rectangular ring, and processing the cross-sectional shape of the support rod 150 into the above-mentioned shapes is simple to process. Moreover, if the cross-sectional shape of the support rod 150 is circular ring or rectangular ring, the weight of the support rod 150 can be reduced, thereby reducing the weight of the load on the furnace mouth flange 130, the furnace tail flange 140 (as well as the first fixing frame and the second fixing member 160).
[0063] In some embodiments, the horizontal reactor 100 further includes a heat-insulating layer, which is sleeved outside the furnace tube 110 and configured to prevent the heat in the reaction chamber from being transferred to the outside, thereby preventing workers from being scalded.
[0064] Based on the same concept, the embodiment of the present application also provides a reactor system 300, Figure 6 FIG. 1 is a schematic diagram of a reactor system according to an exemplary embodiment of the present invention. Figure 6 As shown, the reactor system 300 includes: the horizontal reactor 100 described in the above embodiment; a boat pusher device 310, which is connected to the furnace door assembly 120 of the horizontal reactor 100 and is configured to drive the furnace door assembly 120 to move so that the paddle structure 122, the photovoltaic material and the first insulation assembly 123 enter and exit the reaction chamber, and drive the paddle structure 122 to rise and fall in the reaction chamber.
[0065] In some embodiments, Figure 1 As shown, the furnace door assembly 120 further includes a paddle sleeve 124 , which is sleeved on the paddle handle of the paddle structure 122 , and the boat pushing device 310 is connected to the paddle sleeve 124 .
[0066] In some embodiments, the first furnace door 121 has a fifth through hole, the paddle structure 122 passes through the fifth through hole, and the paddle cover 124 is also connected to the first furnace door 121 and is configured to seal the fifth through hole.
[0067] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.
[0068] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.
[0069] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.
[0070] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.
[0071] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.
Claims
1. A horizontal reactor, characterized in that: The invention is configured to process photovoltaic materials, wherein the horizontal reactor comprises: A furnace tube having a reaction chamber, wherein the reaction chamber has a first opening and a second opening arranged opposite to each other; A furnace door assembly, comprising a first furnace door and a paddle structure connected to each other, and a first thermal insulation assembly located on the paddle structure, wherein the first furnace door is configured to cover the first opening, the paddle structure is configured to carry the photovoltaic material, and the first thermal insulation assembly is configured to block heat in the reaction chamber from being transferred to the first opening; A furnace mouth flange connected to the first opening; A furnace tail flange connected to the second opening; At least one support rod is disposed in the reaction chamber, a first end of the support rod is connected to the furnace mouth flange, and a second end of the support rod is connected to the furnace tail flange; Wherein, the paddle structure is configured to carry the photovoltaic material and the first thermal insulation component into the reaction chamber. When the paddle structure enters the first preset position of the reaction chamber, the paddle structure is separated from the photovoltaic material and the first thermal insulation component so that the photovoltaic material and the first thermal insulation component are supported by the support rod. When the processing of the photovoltaic material is completed, the paddle structure carries the photovoltaic material and the first thermal insulation component out of the reaction chamber.
2. The horizontal reactor according to claim 1, characterized in that: There are multiple support rods, and the multiple support rods are arranged at intervals at the bottom of the reaction chamber; Wherein, after the paddle structure enters the first preset position of the reaction chamber, it moves downward from the interval between the adjacent support rods to the second preset position, so that the paddle structure is separated from the photovoltaic material and the first thermal insulation component, and the paddle structure moves from the second preset position to the second opening direction to the third preset position, so that the first furnace door covers the first opening; Wherein, when the processing of the photovoltaic material is completed, the paddle structure moves from the third preset position to the second preset position so that the first furnace door exposes the first opening, and the paddle structure moves upward from the second preset position through the gap between adjacent support rods to the first preset position to contact and carry the photovoltaic material and the first thermal insulation component, and transport the photovoltaic material and the first thermal insulation component out of the reaction chamber.
3. The horizontal reactor according to claim 1, characterized in that: There are multiple support rods, and the multiple support rods are arranged at intervals at the bottom of the reaction chamber; Wherein, after the paddle structure enters the first preset position of the reaction chamber, it moves downward from the interval between the adjacent support rods to the second preset position, so that the paddle structure is separated from the photovoltaic material and the first thermal insulation component, and the paddle structure exits the reaction chamber; The horizontal reactor also includes: a second furnace door, the second furnace door being configured to cover the first opening after the paddle structure exits the reaction chamber; Among them, when the processing of the photovoltaic material is completed, the second furnace door exposes the first opening, the paddle structure moves to the second preset position in the reaction chamber, and moves upward from the gap between adjacent support rods to the first preset position to contact and carry the photovoltaic material and the first thermal insulation component, and transport the photovoltaic material and the first thermal insulation component out of the reaction chamber.
4. The horizontal reactor according to claim 2 or 3, characterized in that: The plurality of support rods are symmetrically arranged relative to a vertical symmetry plane of the reaction chamber.
5. The horizontal reactor according to any one of claims 1 to 3, characterized in that: Also includes: A first fixing member connected to the furnace mouth flange, wherein the first fixing member has at least one first groove, and the first groove is configured to support the first end of the support rod; The second fixing member is connected to the furnace tail flange, and the second fixing member has at least one second groove, and the second groove is configured to support the second end of the support rod.
6. The horizontal reactor according to claim 5, characterized in that: The first fixing member is detachably connected to the furnace opening flange; and / or The second fixing member is detachably connected to the furnace tail flange; and / or The first end of the support rod is detachably connected to the first fixing member; and / or The second end of the support rod is detachably connected to the first fixing member.
7. The horizontal reactor according to claim 5, characterized in that: The cross-sectional shape of the first groove is the same as the cross-sectional shape of the first end of the support rod; and / or the cross-sectional shape of the second groove is the same as the cross-sectional shape of the second end of the support rod.
8. The horizontal reactor according to any one of claims 1 to 3, characterized in that: Also includes: The second heat insulation component is configured to prevent the heat in the reaction chamber from being transferred to the second opening. The second heat insulation component is arranged at one end of the support rod close to the second opening.
9. The horizontal reactor according to any one of claims 1 to 3, characterized in that: The cross-sectional shape of the support rod includes: circle, polygon, circular ring, rectangular ring.
10. The horizontal reactor according to any one of claims 1 to 3, characterized in that: The material of the support rod includes: ceramic or metal.
11. A reactor system, characterized in that: include: The horizontal reactor according to any one of claims 1 to 10; The boat pusher device is connected to the furnace door assembly of the horizontal reactor and is configured to drive the furnace door assembly to move so that the paddle structure, the photovoltaic material and the first insulation assembly enter and exit the reaction chamber, and drive the paddle structure to rise and fall in the reaction chamber.