Plasma electrode mounting structure

Abstract

The utility model relates to the technical field of plasma processing equipment, and discloses a plasma electrode mounting structure, which comprises a main body mechanism, a cooling mechanism and a connecting mechanism, and the cooling mechanism is positioned in the main body mechanism. According to the plasma electrode installation structure, through installation of the main body mechanism, through arrangement of the limiting assembly, the limiting assembly is pressed upwards with a hand during installation, then the plasma electrode plate is clamped in the installation frame through connection of the clamping groove and the clamping block, then the hand is released, the reset spring drives the limiting plate to reset, and the plasma electrode plate is installed in the installation frame. The clamping groove is blocked by the limiting plate to fix the plasma electrode plate in the clamping groove, fixation is firmer through the arrangement of a rubber pad, when replacement and maintenance are needed, the limiting assembly is pressed upwards, the limiting plate is driven by the reset spring to contract, then the plasma electrode plate is pulled out of the clamping groove, and the disassembly and assembly efficiency can be effectively improved; later replacement and maintenance are facilitated, and the practicability of the plasma electrode mounting structure is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma processing equipment, in particular to a plasma electrode installation structure. Background Art

[0002] At present, plasma treatment equipment is widely used in plasma cleaning, etching, plasma plating, plasma degumming, plasma ashing, surface activation, modification and other occasions. Through its treatment, the wetting ability of materials can be improved, so that a variety of materials can be coated, plated and other operations can be carried out, the adhesion and bonding force can be enhanced, and organic pollutants, oil or grease can be removed at the same time.

[0003] The existing CN219575560U patent document proposes a plasma processing device, including a plasma component, a mounting mechanism and a driving mechanism, wherein the plasma component includes a positive electrode, a negative electrode and a device body provided with a vacuum chamber, the positive electrode and the negative electrode are arranged at two sides of the vacuum chamber with intervals, so that the positive electrode and the negative electrode can cooperate to form a plasma generating structure; the mounting mechanism is arranged in the vacuum chamber, and the mounting mechanism is located between the positive electrode and the negative electrode; the driving mechanism is transmission-connected to at least one of the mounting mechanism and the plasma generating structure, so that the mounting mechanism can reciprocate relative to the plasma generating structure in a direction perpendicular to the connecting line of the positive electrode and the negative electrode. When the plasma processing device in the present application performs a process such as degumming on a circuit board by plasma, the circuit board on the mounting mechanism can reciprocate along the direction of the cutting electric field, so that the plasma is more evenly distributed on the circuit board, thereby improving the uniformity of the plasma processing device.

[0004] However, since the prior art patent technology with publication number CN219575560U cannot quickly disassemble and assemble the plasma electrode plate during use, it is more troublesome in subsequent replacement and maintenance, which reduces the efficiency of maintenance. Utility Model Content

[0005] 1. Technical issues to be resolved

[0006] The utility model aims to provide a plasma electrode installation structure to solve the problem in the above background technology that the plasma electrode plate cannot be quickly disassembled and assembled, which is troublesome in subsequent replacement and maintenance and reduces the maintenance efficiency.

[0007] (II) Technical solution

[0008] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a plasma electrode installation structure, comprising a main body mechanism, a cooling mechanism and a connecting mechanism, wherein the cooling mechanism is located inside the main body mechanism, the connecting mechanism is located at the left end of the cooling mechanism, the main body mechanism comprises a device body, a mounting frame and a slot, the mounting frame is fixedly installed inside the device body, and the slot is fixedly arranged at the left end of the mounting frame;

[0009] Preferably, the main body structure also includes a plasma electrode plate, a card block and a limit assembly, the plasma electrode plate is movably installed inside the installation frame, the card block is fixedly installed at the upper end of the plasma electrode plate, and the limit assembly is fixedly arranged above the card slot. Through the setting of the limit assembly, the limit assembly is pressed upward by hand during installation, and then the plasma electrode plate is carded into the installation frame through the connection between the card slot and the card block, and then the hand is released, and the reset spring drives the limit plate to reset, and the card slot is blocked with the limit plate to fix the plasma electrode plate in the card slot. The rubber pad is set to make the fixation more secure, and when replacement and maintenance are required, the limit assembly is pressed upward to make the reset spring drive the limit plate to contract, and then the plasma electrode plate can be pulled out of the card slot, which can effectively improve the efficiency of disassembly and assembly and facilitate later replacement and maintenance.

[0010] Preferably, the limiting assembly comprises a return spring, a limit plate, a rubber pad and an insulating plate, the return spring is fixedly mounted above the card slot, and the limit plate is fixedly mounted at the lower end of the return spring.

[0011] Preferably, the rubber pad is fixedly mounted on the right end of the limiting plate, and the insulating plate is fixedly mounted on the right end of the rubber pad.

[0012] Preferably, the cooling mechanism comprises a cooling liquid circulation pipe, a liquid inlet end and a liquid outlet end, and the cooling liquid circulation pipe is fixedly installed inside the plasma electrode plate.

[0013] Preferably, the liquid inlet end is fixedly arranged at the left end of the coolant circulation pipe, and the liquid outlet end is fixedly arranged at the right end of the coolant circulation pipe. Through the setting of the coolant circulation pipe, the coolant enters the pipe from the liquid inlet end for circulation, which can take away the heat generated by the electrode plate, so that the electrode plate can be cooled quickly, and finally flows out through the liquid outlet end.

[0014] Preferably, the connection mechanism comprises an inlet connection pipe, an internal thread, a filter screen, an outlet connection pipe and an external thread, and the inlet connection pipe is fixedly installed at the left end of the liquid inlet end.

[0015] Preferably, the internal thread is fixedly arranged on the inner end of the inlet connecting pipe, and the filter screen is fixedly installed inside the inlet connecting pipe.

[0016] Preferably, the outlet connecting pipe is fixedly installed on the right end of the liquid outlet end, and the external thread is fixedly arranged on the outer end of the outlet connecting pipe. The liquid inlet end and the liquid outlet end can be quickly connected to the cooling device through the internal thread arranged on the inlet connecting pipe and the external thread arranged on the outlet connecting pipe, which is convenient for cooling. The filter net can filter impurities in the coolant to avoid pipeline blockage.

[0017] Compared with the prior art, the beneficial effects of the utility model are:

[0018] 1. The plasma electrode installation structure realizes the setting of the limit assembly through the installation of the main body mechanism. During installation, the limit assembly is pressed upward by hand, and then the plasma electrode plate is clamped in the installation frame through the connection of the card slot and the card block, and then the hand is released, and the reset spring drives the limit plate to reset, and the card slot is blocked with the limit plate to fix the plasma electrode plate in the card slot. The rubber pad is set to make the fixation more secure. When replacement and maintenance are required, the limit assembly is pressed upward to make the reset spring drive the limit plate to shrink, and then the plasma electrode plate can be pulled out of the card slot, which can effectively improve the efficiency of disassembly and assembly, facilitate later replacement and maintenance, and improve the practicality of the plasma electrode installation structure;

[0019] 2. The plasma electrode mounting structure realizes the setting of the coolant circulation pipe by installing the cooling mechanism. The coolant enters the pipe from the liquid inlet end for circulation, which can take away the heat generated by the electrode plate, so that the electrode plate is quickly cooled, and finally flows out through the liquid outlet end, thereby improving the cooling effect of the plasma electrode mounting structure;

[0020] 3. The plasma electrode mounting structure, through the installation of the connecting mechanism, can quickly connect the liquid inlet end and the liquid outlet end to the cooling device through the internal thread set on the inlet connecting pipe and the external thread set on the outlet connecting pipe, which is convenient for cooling. The filter net can filter impurities in the coolant to avoid pipeline blockage, thereby improving the use effect of the plasma electrode mounting structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0022] Figure 2 This is a schematic diagram of the explosion structure of the utility model;

[0023] Figure 3 This is a schematic diagram of the structure of the limit assembly of the utility model;

[0024] Figure 4 This is a schematic diagram of the cooling mechanism structure of the utility model;

[0025] Figure 5 It is an enlarged structural diagram of the connection mechanism of the utility model.

[0026] In the figure: 1. main body; 101. device body; 102. mounting frame; 103. slot; 104. plasma electrode plate; 105. block; 106. limit assembly; 1061. reset spring; 1062. limit plate; 1063. rubber pad; 1064. insulating plate; 2. cooling mechanism; 201. coolant circulation pipe; 202. liquid inlet end; 203. liquid outlet end; 3. connecting mechanism; 301. inlet connecting pipe; 302. internal thread; 303. filter screen; 304. outlet connecting pipe; 305. external thread. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] See also Figure 1-Figure 5 The utility model provides a technical solution: a plasma electrode installation structure, including a main body mechanism 1, a cooling mechanism 2 and a connecting mechanism 3, the cooling mechanism 2 is located inside the main body mechanism 1, the connecting mechanism 3 is located at the left end of the cooling mechanism 2, the main body mechanism 1 includes a device body 101, a mounting frame 102 and a card slot 103, the mounting frame 102 is fixedly installed inside the device body 101, the card slot 103 is fixedly arranged at the left end of the mounting frame 102, the main body mechanism 1 also includes a plasma electrode plate 104, a card block 105 and a limit assembly 106, the plasma electrode plate 104 is movable The movable part 106 is installed inside the installation frame 102, the block 105 is fixedly installed on the upper end of the plasma electrode plate 104, the limit assembly 106 is fixedly arranged above the card slot 103, the limit assembly 106 includes a reset spring 1061, a limit plate 1062, a rubber pad 1063 and an insulating plate 1064, the reset spring 1061 is fixedly installed above the card slot 103, the limit plate 1062 is fixedly installed on the lower end of the reset spring 1061, the rubber pad 1063 is fixedly installed on the right end of the limit plate 1062, and the insulating plate 1064 is fixedly installed on the right end of the rubber pad 1063.

[0029] The cooling mechanism 2 includes a cooling liquid circulation pipe 201, a liquid inlet end 202 and a liquid outlet end 203. The cooling liquid circulation pipe 201 is fixedly installed inside the plasma electrode plate 104, the liquid inlet end 202 is fixedly set at the left end of the cooling liquid circulation pipe 201, and the liquid outlet end 203 is fixedly set at the right end of the cooling liquid circulation pipe 201.

[0030] The connecting mechanism 3 includes an inlet connecting pipe 301, an internal thread 302, a filter screen 303, an outlet connecting pipe 304 and an external thread 305. The inlet connecting pipe 301 is fixedly installed at the left end of the liquid inlet end 202, the internal thread 302 is fixedly installed at the inner end of the inlet connecting pipe 301, the filter screen 303 is fixedly installed inside the inlet connecting pipe 301, the outlet connecting pipe 304 is fixedly installed at the right end of the liquid outlet end 203, and the external thread 305 is fixedly installed at the outer end of the outlet connecting pipe 304.

[0031] Working principle: through the setting of the limit assembly 106, during installation, the limit assembly 106 is pressed upward by hand, and then the plasma electrode plate 104 is clamped in the installation frame 102 through the connection between the card slot 103 and the card block 105, and then the hand is released, and the reset spring 1061 drives the limit plate 1062 to reset, and the card slot 103 is blocked with the limit plate 1062 to fix the plasma electrode plate 104 in the card slot 103. The setting of the rubber pad 1063 makes the fixation more secure. When replacement and maintenance are required, the limit assembly 106 is pressed upward to make the reset spring 1061 drive the limit plate 1062 to shrink, and then The plasma electrode plate 104 can be pulled out from the card slot 103, which can effectively improve the efficiency of disassembly and assembly, and facilitate later replacement and maintenance. The liquid inlet end 202 and the liquid outlet end 203 can be quickly connected to the cooling device through the internal thread 302 set on the inlet connecting pipe 301 and the external thread 305 set on the outlet connecting pipe 304. The filter net 303 can filter impurities in the coolant to avoid pipe blockage. When the plasma electrode plate 104 heats up, the coolant enters the tube from the liquid inlet end 202 for circulation, which can take away the heat generated by the electrode plate, so that the electrode plate can be quickly cooled and finally flows out through the liquid outlet end 203.

[0032] Finally, it should be noted that the above content is only used to illustrate the technical solution of the utility model, rather than to limit the protection scope of the utility model. Simple modifications or equivalent substitutions of the technical solution of the utility model by ordinary technicians in this field do not deviate from the essence and scope of the technical solution of the utility model.

Claims

1. A plasma electrode mounting structure, comprising a main body mechanism (1), a cooling mechanism (2) and a connecting mechanism (3), characterized in that: The cooling mechanism (2) is located inside the main mechanism (1), the connecting mechanism (3) is located at the left end of the cooling mechanism (2), the main mechanism (1) comprises a device body (101), a mounting frame (102) and a card slot (103), the mounting frame (102) is fixedly mounted inside the device body (101), and the card slot (103) is fixedly arranged at the left end of the mounting frame (102); The main body mechanism (1) further comprises a plasma electrode plate (104), a clamping block (105) and a limiting assembly (106); the plasma electrode plate (104) is movably mounted inside the mounting frame (102); the clamping block (105) is fixedly mounted on the upper end of the plasma electrode plate (104); and the limiting assembly (106) is fixedly arranged above the clamping slot (103).

2. A plasma electrode mounting structure according to claim 1, characterized in that: The limiting assembly (106) comprises a reset spring (1061), a limiting plate (1062), a rubber pad (1063) and an insulating plate (1064); the reset spring (1061) is fixedly mounted above the slot (103); and the limiting plate (1062) is fixedly mounted at the lower end of the reset spring (1061).

3. A plasma electrode mounting structure according to claim 2, characterized in that: The rubber pad (1063) is fixedly mounted on the right end of the limiting plate (1062), and the insulating plate (1064) is fixedly mounted on the right end of the rubber pad (1063).

4. A plasma electrode mounting structure according to claim 3, characterized in that: The cooling mechanism (2) comprises a cooling liquid circulation pipe (201), a liquid inlet end (202) and a liquid outlet end (203); the cooling liquid circulation pipe (201) is fixedly installed inside the plasma electrode plate (104).

5. A plasma electrode mounting structure according to claim 4, characterized in that: The liquid inlet end (202) is fixedly arranged at the left end of the cooling liquid circulation pipe (201), and the liquid outlet end (203) is fixedly arranged at the right end of the cooling liquid circulation pipe (201).

6. A plasma electrode mounting structure according to claim 5, characterized in that: The connection mechanism (3) comprises an inlet connection pipe (301), an internal thread (302), a filter screen (303), an outlet connection pipe (304) and an external thread (305); the inlet connection pipe (301) is fixedly mounted at the left end of the liquid inlet end (202).

7. A plasma electrode mounting structure according to claim 6, characterized in that: The internal thread (302) is fixedly arranged at the inner end of the inlet connecting pipe (301), and the filter screen (303) is fixedly installed inside the inlet connecting pipe (301).

8. A plasma electrode mounting structure according to claim 7, characterized in that: The outlet connecting pipe (304) is fixedly installed at the right end of the liquid outlet end (203), and the external thread (305) is fixedly arranged at the outer end of the outlet connecting pipe (304).

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