Vacuum coating equipment
By setting the non-directional position of the cold trap air intake channel in the vacuum coating equipment and using bent pipes to connect the deposition cavity and the cold trap channels, the problem of condensation and blockage of the reaction gas is solved, and the reliability of the coating equipment and the smoothness of the coating equipment are improved.
Patent Information
- Application Number
- CN202421428510.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-20
- Publication Date
- 2025-04-01
- Estimated Expiration
- 2034-06-20
AI Technical Summary
In existing vacuum coating equipment, the pipeline between the deposition chamber and the cold trap is easily blocked due to the condensation of the reaction gas, which affects the smooth progress of the coating and the reliability of the equipment.
By setting the air inlet passage of the cold trap above the cold head and using a bent pipe to connect the air outlet passage of the deposition chamber with the air inlet passage of the cold trap, the reaction gas is avoided directly blowing to the cold head, and the risk of condensation is reduced.
It ensures the continuous discharge of reaction gas in the deposition chamber and the continuous vacuum of the deposition chamber, and improves the working reliability of the coating equipment and the smoothness of the coating.
Smart Images
Figure CN222700403U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of coating equipment, in particular to vacuum coating equipment. Background Art
[0002] Vacuum coating equipment is a kind of equipment used to deposit a film layer on the surface of a workpiece to prevent oxidation, waterproofing, corrosion and other problems on the surface of the workpiece. Vacuum coating equipment generally includes a sublimation chamber, a cracking chamber, a deposition chamber, a cold trap and a vacuum pump; the process of preparing a film layer using vacuum coating equipment is as follows: first, under vacuum conditions, the coating material is heated to about 150°C in the sublimation chamber and sublimated into a gas state, and the gaseous coating material enters the cracking chamber. When heated to about 600°C, the molecular bonds of the gaseous coating material are broken and cracked into reactive gas with reaction activity. The reactive gas enters the deposition chamber from the cracking chamber and deposits and polymerizes on the surface of the workpiece to be plated in the deposition chamber to form a film layer. The vacuum pump continuously evacuates the deposition chamber. During the vacuuming process, the unreacted reactive gas in the deposition chamber is deposited in the cold trap under the action of the vacuum pump.
[0003] In the prior art, the air outlet channel of the deposition chamber of the vacuum coating equipment is usually arranged opposite to the air inlet channel of the cold trap, and the air outlet channel of the deposition chamber is connected to the air inlet channel of the cold trap by a straight pipe. However, since the unreacted reaction gas in the deposition chamber is directly blown to the cold head of the cold trap and the temperature of the cold head is low, the reaction gas is easy to condense at one end of the pipe close to the cold trap to block the pipe mouth, affecting the continuous discharge of the reaction gas in the deposition chamber and the vacuum pumping of the deposition chamber, which is not conducive to the smooth coating of the vacuum coating equipment and the reliability of the coating operation is poor. Utility Model Content
[0004] The utility model provides a vacuum coating device, aiming to solve the problem that a pipeline connecting a deposition chamber and a cold trap in the vacuum coating device of the prior art is easily blocked due to condensation of reaction gas.
[0005] The utility model is implemented by providing a vacuum coating device, comprising:
[0006] A raw material chamber assembly, the raw material chamber assembly comprising a sublimation chamber and a cracking chamber connected to the sublimation chamber;
[0007] A deposition assembly connected to the raw material chamber assembly, the deposition assembly comprising a deposition chamber communicated with the cracking chamber, and an air outlet channel communicated with the deposition chamber;
[0008] A vacuum assembly connected to the deposition assembly, the vacuum assembly comprising a cold trap and a vacuum pump connected to the cold trap, the cold trap comprising an outer cylinder, a cold head disposed in the outer cylinder, and an air inlet channel passing through a side wall of the outer cylinder and communicating with the interior of the outer cylinder, the air inlet channel being located above the cold head, and the air inlet channel and the air outlet channel being located at different heights, and the air outlet channel being connected to the air inlet channel via a bent pipe.
[0009] Preferably, the bent pipe is the Z-shaped pipe.
[0010] Preferably, an electric heating plate is provided on the outer wall of the bent pipe.
[0011] Preferably, the raw material chamber assembly, the deposition assembly and the vacuum assembly are detachably connected in sequence.
[0012] Preferably, the bent pipe includes a first pipe segment, a second pipe segment vertically connected to the first pipe segment, and a third pipe segment vertically connected to the second pipe segment and reversely parallel to the first pipe segment. The first pipe segment is connected to the air outlet channel of the deposition chamber, and the third pipe segment is connected to the air inlet channel.
[0013] Preferably, one end of the bent pipe is connected to the air outlet channel via a flange, and the other end of the bent pipe is connected to the air inlet channel via a flange.
[0014] Preferably, the deposition assembly further comprises a feed pipe, wherein the feed pipe comprises a main pipe body connected to the cracking chamber, and a plurality of sub-pipe bodies respectively communicated with the main pipe body, and each of the sub-pipe bodies is respectively communicated with the deposition chamber.
[0015] Preferably, the height difference between the air outlet channel and the air inlet channel in the vertical direction is 10 to 30 centimeters.
[0016] Preferably, the height difference between the air inlet channel and the cold head is 5 to 15 centimeters.
[0017] Preferably, it also includes:
[0018] A first outer cover is fixed to the vacuum assembly, and the bent pipe is received in the first outer cover.
[0019] The vacuum coating equipment provided by the utility model sets the air inlet channel of the cold trap above the cold head of the cold trap, and connects the air outlet channel of the deposition chamber to the air inlet channel of the cold trap through a bent pipe. Since the air inlet channel of the cold trap is not directly opposite to the cold head of the cold trap, the reaction gas coming out of the bent pipe will not be blown directly to the cold head of the cold trap, so that the reaction gas is not easy to condense and clog in the bent pipe, especially the reaction gas is not easy to condense at one end of the bent pipe close to the cold trap and clog the pipe, ensuring the continuous discharge of the reaction gas in the deposition chamber and the continuous vacuum pumping of the deposition chamber, which is conducive to the smooth coating of the vacuum coating equipment and has good coating reliability. At the same time, the deposition chamber and the cold trap are connected by a bent pipe, which is convenient for connecting the air inlet channel and the air outlet channel. Compared with a straight pipe, the bent pipe can reduce the influence of the low temperature of the cold trap on the internal temperature of the bent pipe, and can further reduce the risk of condensation and blockage of the reaction gas in the bent pipe. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1 A three-dimensional diagram of a vacuum coating device provided by an embodiment of the utility model;
[0021] Figure 2 A front schematic diagram of a vacuum coating device provided by an embodiment of the utility model;
[0022] Figure 3 A schematic diagram of a vacuum coating device provided by an embodiment of the utility model after some structures are removed;
[0023] Figure 4 A three-dimensional diagram of a raw material chamber assembly of a vacuum coating device provided by an embodiment of the utility model;
[0024] Figure 5 A three-dimensional diagram of a deposition assembly of a vacuum coating device provided by an embodiment of the utility model;
[0025] Figure 6 A three-dimensional diagram of a vacuum component of a vacuum coating device provided by an embodiment of the utility model;
[0026] Figure 7 A three-dimensional diagram of a bent pipe of a vacuum coating device provided in an embodiment of the utility model. DETAILED DESCRIPTION
[0027] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.
[0028] The vacuum coating equipment provided by the embodiment of the utility model sets the air inlet channel of the cold trap above the cold head of the cold trap, and connects the air outlet channel of the deposition chamber to the air inlet channel of the cold trap through a bent pipe. Since the air inlet channel of the cold trap is not directly opposite to the cold head of the cold trap, the reaction gas coming out of the bent pipe will not be blown directly to the cold head of the cold trap, so that the reaction gas is not easy to condense and clog in the bent pipe, especially the reaction gas is not easy to condense at one end of the bent pipe close to the cold trap and clog the pipe, ensuring the continuous discharge of the reaction gas in the deposition chamber and the continuous vacuum pumping of the deposition chamber, which is conducive to the smooth coating of the vacuum coating equipment and has good coating reliability. At the same time, the deposition chamber and the cold trap are connected by a bent pipe, which is convenient for connecting the air inlet channel and the air outlet channel, and the bent pipe can reduce the influence of the low temperature of the cold trap on the internal temperature of the bent pipe compared to the straight pipe, which can further reduce the risk of condensation and blockage of the reaction gas in the bent pipe.
[0029] Please refer to Figure 1-Figure 4 The present invention provides a vacuum coating device, comprising:
[0030] A raw material chamber component 1, the raw material chamber component 1 comprises a sublimation chamber 11 and a cracking chamber 12 connected to the sublimation chamber 11;
[0031] A deposition assembly 2 connected to the raw material chamber assembly 1, the deposition assembly 2 comprising a deposition chamber 21 communicated with the cracking chamber 12, and a gas outlet channel 22 communicated with the deposition chamber 21;
[0032] The vacuum assembly 3 connected to the deposition assembly 1 includes a cold trap 31 and a vacuum pump 32 connected to the cold trap 31. The cold trap 31 includes an outer cylinder 311, a cold head 312 arranged in the outer cylinder 311, and an air inlet channel 313 passing through the side wall of the outer cylinder 311 and communicating with the interior of the outer cylinder 311. The air inlet channel 313 is located above the cold head 312. The air inlet channel 313 and the air outlet channel 22 are located at different heights. The air outlet channel 22 and the air inlet channel 313 are connected by a bent pipe 33.
[0033] In an embodiment of the utility model, a vacuum coating device is provided by setting an air inlet channel 313 of the cold trap 31 above the cold head 312 of the cold trap 31, and the air inlet channel 313 and the air outlet channel 22 are located at different heights, so that the reaction gas coming out of the air outlet channel 22 will not be directly blown to the cold head 312 of the cold trap 31, and the air outlet channel 22 entering the deposition chamber 21 is connected to the air inlet channel 313 of the cold trap 31 through a bent pipe 33, and the air inlet channel 313 of the cold trap 31 is not directly opposite to the cold head 312 of the cold trap 31, so that the reaction gas coming out of the bent pipe 33 will not be directly blown to the cold head 312 of the cold trap 31, so that the reaction gas is not easy to condense and clog in the bent pipe 33, especially the reaction gas is not easy to condense at one end of the bent pipe 33 close to the cold trap 31 and clog the pipe, thereby ensuring the continuous discharge of the reaction gas in the deposition chamber 21 and the continuous vacuum pumping of the deposition chamber 21, which is beneficial to the smooth coating of the vacuum coating device and has good reliability of coating work. At the same time, the deposition chamber 21 and the cold trap 31 are connected by a curved pipe 33, which facilitates the connection between the air inlet channel 313 and the air outlet channel 22. The curved pipe 33 can also be used to change the movement direction of the reaction gas, thereby preventing the reaction gas from blowing directly to the cold head 312 of the cold trap 31, thereby reducing the impact of the low temperature of the cold trap 31 on the internal temperature of the curved pipe 33, and further reducing the risk of condensation and blockage of the reaction gas in the curved pipe 33.
[0034] In the embodiment of the utility model, the raw material chamber assembly 1 further includes a connecting pipe 13 connected to the cracking chamber 12 , and the connecting pipe 13 is connected to the deposition chamber 21 .
[0035] Please refer to Figure 5 As an embodiment of the utility model, the deposition assembly 2 also includes a feed pipe 23, which includes a main pipe body 231 connected to the cracking chamber 12, and a plurality of sub-tube bodies 232 respectively connected to the main pipe body 231, and each sub-tube body 232 is respectively connected to the deposition chamber 21.
[0036] In this embodiment, the number of sub-tube bodies 232 can be two, three or more. The reaction gas in the cracking chamber 12 enters from the main tube 231, and then enters the deposition chamber 21 from multiple sub-tube bodies 232 to participate in the coating. Since the reaction gas in the deposition chamber 21 diffuses into the deposition chamber 21 through multiple sub-tube bodies 232 at the same time, the reaction gas diffuses more evenly in the deposition chamber 21, thereby improving the uniformity of the coating. Of course, the specific structure of the feed pipe 23 is not limited to this. The feed pipe 23 can also be a straight pipe or a pipe of other shapes, which is not limited here.
[0037] In the embodiment of the utility model, the film material used for deposition of the vacuum coating equipment is not limited, and the type of workpiece used for coating is also not limited. For example, the vacuum coating equipment can be used to deposit a parylene film layer on a workpiece. The process of depositing the parylene film layer is as follows: the p-xylene ring dimer is placed in the sublimation chamber 11, and the p-xylene ring dimer is heated and sublimated at 175°C to a gas state under vacuum conditions; the dimer gas enters the cracking chamber 12, and at a temperature of 680°C, the molecular bonds of the dimer are broken and cracked into reactive p-xylene monomers; the p-xylene monomers enter the deposition chamber 21 from the connecting pipe 13, and are deposited and polymerized on the workpiece to be plated in the deposition chamber 21 to form a poly-p-xylene film. During this process, the vacuum pump 32 continuously evacuates the deposition chamber 21, and the unreacted p-xylene monomers in the deposition chamber 21 enter the cold trap 31 under the action of the vacuum pump 32, and are condensed and collected under the cooling effect of the cold head 312 of the cold trap 31.
[0038] As an embodiment of the present invention, the bent pipe 33 is a Z-shaped pipe, which is convenient for processing the bent pipe 33 and can extend the reaction gas. In addition, the bent pipe 33 can also be bent into other shapes, such as a U shape.
[0039] Please follow Figure 3 , Figure 6-Figure 7 As an embodiment of the utility model, the bent pipe 33 includes a first pipe segment 331, a second pipe segment 332 vertically connected to the first pipe segment 331, and a third pipe segment 333 vertically connected to the second pipe segment 332 and reversely parallel to the first pipe segment 331. The first pipe segment 331 is connected to the air outlet channel 22 of the deposition chamber 21, and the third pipe segment 333 is connected to the air inlet channel 313.
[0040] In this embodiment, the reaction gas in the deposition chamber 21 enters the inlet channel 313 from the outlet channel 22 through the first pipe section 331, the second pipe section 332, and the third pipe section 333 in sequence, and the reaction gas is captured by the cold trap 31. Among them, the bent pipe 33 is an integrated structure, and the lengths of the first pipe section 331 and the third pipe section 333 are equal, so that the bent pipe 33 is a symmetrical structure, which is convenient for the processing of the bent pipe 33.
[0041] As an embodiment of the utility model, the gas outlet channel 22 is an gas outlet pipe connected to the deposition chamber 21, and the gas inlet channel 313 is an gas inlet pipe connected to the outer tube 311, which facilitates the connection of the gas outlet channel 22 and the gas inlet channel 313 by bending the pipe 33. In addition, the gas outlet channel 22 can also be set as an air outlet hole connected to the deposition chamber 21, and the gas inlet channel 313 can be an air inlet hole connected to the outer tube 311.
[0042] As an embodiment of the present invention, one end of the bent pipe 33 is connected to the outlet channel 22 through a flange, and the other end of the bent pipe 33 is connected to the inlet channel 313 through another flange. Specifically, the first pipe section 331 is connected to the outlet pipe through a flange, and the third pipe section 333 is connected to the inlet pipe through a flange, which facilitates the connection of the bent pipe 33 and the disassembly and assembly of the bent pipe 33.
[0043] As an embodiment of the present invention, an electric heating plate (not shown) is provided on the outer wall of the curved pipe 33. The electric heating plate is powered on to heat the curved pipe 33, which can prevent the reaction gas from condensing and depositing in the curved pipe 33, and reliably prevent the reaction gas from condensing and clogging the curved pipe 33.
[0044] As a preferred embodiment of the utility model, the electric heating plate wraps the outer wall of the bent pipe 33 to achieve uniform heating of the bent pipe 33 and better prevent the pipe from condensation and blockage.
[0045] As an embodiment of the present invention, the raw material chamber component 1, the deposition component 2, and the vacuum component 3 are detachably connected in sequence.
[0046] In this embodiment, the raw material chamber assembly 1, the deposition assembly 2, and the vacuum assembly 3 are sequentially detachably connected, so that the raw material chamber assembly 1, the deposition assembly 2, and the vacuum assembly 3 are all modularly designed, which is convenient for disassembly and assembly between the raw material chamber assembly 1, the deposition assembly 2, and the vacuum assembly 3, and the raw material chamber assembly 1, the deposition assembly 2, or the vacuum assembly 3 can be flexibly replaced according to the process adjustment needs. Preferably, the raw material chamber assembly 1, the deposition assembly 2, and the vacuum assembly 3 are sequentially snap-connected, which is convenient and quick to disassemble and assemble.
[0047] As an embodiment of the utility model, the height difference between the air inlet channel 313 and the cold head 312 is 5 to 15 cm. The height difference between the air inlet channel 313 and the cold head 312 can be designed according to actual conditions. The greater the height difference between the air inlet channel 313 and the cold head 312, the better the effect of preventing the bending pipe 33 from being blocked. The height difference between the air inlet channel 313 and the cold head 312 is controlled to be 5 to 15 cm, which can ensure the appropriate height difference between the air inlet channel 313 and the cold head 312 in the vertical direction, which can prevent the blocking of the bending pipe 33 and avoid the height dimension of the cold trap 31 from being too high.
[0048] In practical applications, the height of the outer cylinder 311 of the existing cold trap 31 can be increased, and the air inlet channel 313 can be set above the cold head 312, so that the air inlet channel 313 and the cold head 312 are staggered in the vertical direction, avoiding the air inlet channel 313 and the cold head 312 from facing each other, thereby preventing the blockage of the bent pipe 33.
[0049] As an embodiment of the utility model, the height difference between the outlet channel 22 and the inlet channel 313 in the vertical direction is 10 to 30 cm, which can ensure an appropriate height difference between the outlet channel 22 of the deposition chamber 21 and the inlet channel 313 of the cold trap 31 in the vertical direction, prevent the bent pipe 33 from being blocked, and control the length of the bent pipe 33 within a more appropriate range.
[0050] Please refer to Figure 3 , as an embodiment of the utility model, comprising:
[0051] The first outer cover 4 is fixed to the vacuum assembly 3 , and the bent pipe 33 is received in the first outer cover 4 , so that the bent pipe 33 can be hidden.
[0052] As an embodiment of the utility model, it includes:
[0053] The second outer cover 5 is fixed to the deposition assembly 2 , and the feed pipe 23 is received in the second outer cover 5 , so that the feed pipe 23 can be hidden.
[0054] In an embodiment of the utility model, a vacuum coating device is provided, by setting the air inlet channel 313 of the cold trap 31 at a position above the cold head 312 of the cold trap 31, and the deposition chamber 21 is connected to the cold trap 31 through a bent pipe 33. Since the air inlet channel 313 of the cold trap 31 is not directly opposite to the cold head 312 of the cold trap 31, the reaction gas coming out of the end of the bent pipe 33 connected to the cold trap 31 will not be directly blown to the cold head 312 of the cold trap 31, so that the reaction gas is not easy to condense and clog in the bent pipe 33, especially the reaction gas is not easy to condense at the end of the bent pipe 33 close to the cold trap 31 and clog the pipe, thereby ensuring the continuous discharge of the reaction gas in the deposition chamber 21, which is beneficial to the smooth coating of the vacuum coating equipment and has good reliability of coating work. Moreover, the deposition chamber 21 and the cold trap 31 are connected by a curved pipe 33, which facilitates the connection between the air inlet channel 313 and the air outlet channel 22. The curved pipe 33 can also be used to change the movement direction of the reaction gas, thereby preventing the reaction gas from blowing directly toward the cold head 312 of the cold trap 31, and can reduce the impact of the low temperature of the cold trap 31 on the internal temperature of the curved pipe 33, thereby further reducing the risk of condensation and blockage of the reaction gas in the curved pipe 33.
[0055] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A vacuum coating device, characterized in that: include: A raw material chamber assembly, the raw material chamber assembly comprising a sublimation chamber and a cracking chamber connected to the sublimation chamber; A deposition assembly connected to the raw material chamber assembly, the deposition assembly comprising a deposition chamber communicated with the cracking chamber, and an air outlet channel communicated with the deposition chamber; A vacuum assembly connected to the deposition assembly, the vacuum assembly comprising a cold trap and a vacuum pump connected to the cold trap, the cold trap comprising an outer cylinder, a cold head disposed in the outer cylinder, and an air inlet channel passing through a side wall of the outer cylinder and communicating with the interior of the outer cylinder, the air inlet channel being located above the cold head, and the air inlet channel and the air outlet channel being located at different heights, and the air outlet channel being connected to the air inlet channel via a bent pipe.
2. The vacuum coating equipment according to claim 1, characterized in that: The bent pipe is a Z-shaped pipe.
3. The vacuum coating equipment according to claim 1, characterized in that: An electric heating plate is arranged on the outer wall of the bent pipe.
4. The vacuum coating equipment according to claim 1, characterized in that: The raw material chamber component, the deposition component and the vacuum component are detachably connected in sequence.
5. The vacuum coating equipment according to claim 1, characterized in that: The bent pipe includes a first pipe segment, a second pipe segment vertically connected to the first pipe segment, and a third pipe segment vertically connected to the second pipe segment and reversely parallel to the first pipe segment. The first pipe segment is connected to the air outlet channel, and the third pipe segment is connected to the air inlet channel.
6. The vacuum coating equipment according to claim 1, characterized in that: One end of the bent pipe is connected to the air outlet passage through a flange, and the other end of the bent pipe is connected to the air inlet passage through another flange.
7. The vacuum coating equipment according to claim 1, characterized in that: The deposition assembly further comprises a feed pipe, wherein the feed pipe comprises a main pipe body connected to the cracking chamber, and a plurality of sub-pipe bodies respectively communicated with the main pipe body, and each of the sub-pipe bodies is respectively communicated with the deposition chamber.
8. The vacuum coating equipment according to claim 1, characterized in that: The height difference between the air outlet channel and the air inlet channel in the vertical direction is 10 to 30 centimeters.
9. The vacuum coating equipment according to claim 1, characterized in that: The height difference between the air inlet channel and the cold head is 5 to 15 centimeters.
10. The vacuum coating equipment according to claim 1, characterized in that: Also includes: A first outer cover is fixed to the vacuum assembly, and the bent pipe is received in the first outer cover.